JP7202483B2 - Mother glass panel transfer device, display panel inspection device and display panel inspection equipment - Google Patents

Description

TECHNICAL FIELD The present invention relates to a mother glass panel transfer device, a display panel inspection device, and a display panel inspection equipment, and more particularly, to face down display panels of various sizes included in a large mother glass panel. The present invention relates to a mother glass panel transfer device, a display panel inspection device, and display panel inspection equipment capable of inspecting for defects.

2. Description of the Related Art Organic light emitting diodes (OLEDs), which are used as flat panel displays, have wide viewing angles, excellent contrast, and fast response speeds, and are widely used in smartphones, televisions, and the like.

An organic light-emitting diode (OLED) is formed by depositing an organic material layer on a panel, which is a substrate, to form an organic light-emitting layer. Accordingly, pixels that emit light and colors according to electrical signals are implemented. will be

Here, when pixels are implemented by forming an organic material layer on a panel, which is a substrate, by deposition, an inspection for defects in the pixels should be performed before the sealing process.

Conventionally, in order to prevent contamination from particles scattered during inspection, a face-down method is used, that is, the display panel to be inspected faces downward on one side where the deposition part exists. An inspection was in progress.

The display panel can be manufactured in various sizes depending on the purpose of use, and is provided on the mother glass panel in the manufacturing process. It may be a single type in which a plurality of panels exist or a mixed type in which display panels of various sizes are mixed.

Conventionally, in order to inspect the display panel for defects, the display panel is placed on a fishbone type stage module with one side of the mother glass panel, where the display panel deposition part is present, faces downward. The fishbone type stage module grips the outer part of the surface where the deposition part is not formed with the deposition part facing downward, and then moves into the chamber for inspection. will do.

After that, the other surface of the mother glass panel where the vapor deposition part does not exist is sucked by the vacuum plate, and after the probe block of the probe unit is moved to the place where the probe block is located, the contact pad of the display panel comes into contact with the probe block. The inspection was progressing by doing so.

However, although the conventional inspection method is useful for inspecting a display panel on a mother glass panel with a relatively small size, the display panel on a large mother glass panel is defective in a face down method. In fact, it is difficult to apply it because it causes a serious problem to inspect the presence or absence of.

In other words, in the case of a large mother glass panel, if it is arranged in a fishbone type stage module with one surface where the deposition part is located facing downward, the fishbone type stage module is used for deposition. Of the one side where the part exists, the outer part where the vapor-deposited part is not formed is supported, but at this time, the center part of the large mother glass panel hangs down due to its own weight, making it virtually impossible to perform an accurate inspection. be.

In addition to the problems described above, the conventional inspection method has the following problems.

Only one type of probe block for inspecting the presence or absence of defects in the display panel can be attached to the probe unit, so there are various sizes of display panels that need to be inspected on the mother glass panel. When the target display panel is changed, it is inevitably necessary to replace it with a new probe unit that matches it.

The replacement work of the probe unit is generally performed manually by an operator, and accordingly, there is a problem that the time required for the replacement work increases and the yield decreases.

In addition, there is a problem that workers are often injured or electrocuted when replacing the probe unit.

Therefore, it is a face-down method to prevent contamination from scattered particles during inspection, and quickly and accurately inspect various types of display panels on large mother glass panels for defects. The reality is that there is an urgent need for research on the development of equipment for this purpose.

SUMMARY OF THE INVENTION It is an object of the present invention to enable the presence or absence of defects in display panels of various sizes included in a large mother glass panel in a face down manner without replacing probe units or probe blocks. , a mother glass panel transfer device, a display panel inspection device and a display panel inspection equipment.

A mother glass panel transfer device according to an embodiment of the present invention includes a stage module for sucking and fixing the other surface of the mother glass panel in a normal state in which one surface of the mother glass panel faces upwards-the mother glass panel At least one type of display panel having an organic material layer deposited thereon for forming an organic light emitting layer is provided on one side, and the stage module is in a state in which the mother glass panel is in the normal state and the one side faces downward. After sucking the other surface of the mother glass panel whose state has changed from the normal state to the reversed state on the stage module, the mother glass panel is rotated to the reversed state. a transfer module for moving the display panel to a first position for inspecting for defects of the display panel while maintaining ;; a vacuum suction module for advancing; and after suctioning the other surface of the mother glass panel moved to the first position by the transfer module, moving to a second position while maintaining the reversed state. and the mother glass panel is held in the reversed state by the vacuum adsorption module, and the other surface is adsorbed, thereby inspecting whether the display panel is defective due to the interaction. modules;

The vacuum adsorption module of the mother glass panel transfer apparatus according to an embodiment of the present invention brings the electrode pads of the display panel into contact with the probe block through positional movement while maintaining the mother glass panel in the reversed state. In this way, the display panel may be inspected for defects in the reversed state.

In the transfer module of the mother glass panel transfer device according to an embodiment of the present invention, when the other surface is sucked by the picker module, the transfer module releases the suction and after being separated from the mother glass panel, returns to its original position. can be characterized in that the position is moved to

The second position of the mother glass panel transfer device according to an embodiment of the present invention may be a position raised to the vacuum adsorption module by the picker module with reference to the first position.

The stage module of the mother glass panel transfer apparatus according to one embodiment of the present invention adsorbs the other surface of the mother glass panel in the normal state, but prevents the center part of the mother glass panel from sagging due to its own weight. The plurality of stage units may be arranged to be spaced apart from each other so that a first space is formed between the plurality of stage units.

The transfer module of the mother glass panel transfer apparatus according to one embodiment of the present invention is inserted into the first space when the stage module rotates and the mother glass panel is changed from the normal state to the reversed state. and a plurality of transfer units for sucking the other surface of the mother glass panel arranged in the reversed state, but preventing the central portion of the mother glass panel from sagging due to its own weight. be able to.

The picker module of the mother glass panel transfer apparatus according to an embodiment of the present invention is positioned at a third position, passes through the vacuum suction module by being lowered, and then is moved to the first position and is moved to the transfer module. After the other surface of the mother glass panel moved to the first position is sucked by the vacuum suction module, the other surface of the mother glass panel is sucked by the vacuum suction module after being moved to the second position by rising. can be characterized by:

The picker module of the mother glass panel transfer apparatus according to one embodiment of the present invention includes a plurality of picker units spaced apart from each other so as to uniformly pick up the other surface of the mother glass panel. can be

The picker module of the mother glass panel transfer device according to one embodiment of the present invention releases the suction when the other surface of the mother glass panel moved to the second position is suctioned by the vacuum suction module. After being separated from the mother glass panel by a force, the glass panel may return to the third position.

According to the mother glass panel transfer apparatus, the display panel inspection apparatus, and the display panel inspection equipment according to the present invention, the presence or absence of defects in display panels of various sizes included in a large mother glass panel in a face down manner. can proceed without replacing the probe unit or probe block, maximizing the accuracy, speed, etc. of inspection for defects.

4 is a view for explaining a display panel inspected for defects by the display panel inspection equipment according to the present invention; FIG. 5 is a diagram for explaining various embodiments of combinations of display panels included in a mother glass panel that can be mounted on a stage module provided in the display panel inspection equipment according to the present invention; 1 is a block configuration diagram for explaining display panel inspection equipment according to the present invention; FIG. 1 is a diagram for explaining a display panel inspection equipment according to the present invention; FIG. 5 is a schematic cross-sectional view taken along line AA of FIG. 4 for explaining the flow of air in the inspection process progress equipment provided in the display panel inspection equipment according to the present invention; FIG. 5 is a schematic cross-sectional view taken along line BB of FIG. 4 for explaining the flow of air in the inspection process progress equipment provided in the display panel inspection equipment according to the present invention; 4 is a flowchart for explaining a process of sucking a mother glass panel to a vacuum adsorption module by a mother glass panel transfer device provided in the display panel inspection equipment according to the present invention; FIG. 4 is a view for explaining a state in which a mother glass panel is mounted in a normal state on a stage module provided in the mother glass panel transfer apparatus according to the present invention; FIG. 9 is a view for explaining a state in which the mother glass panel in a normal state changes to a reversed state due to the rotation of the stage module from the state shown in FIG. 8; FIG. 9 is a view for explaining a state in which the mother glass panel in a normal state changes to a reversed state due to the rotation of the stage module from the state shown in FIG. 8; FIG. 4 is a view for explaining a state in which a transfer module provided in the mother glass panel transfer apparatus according to the present invention enters a stage module; FIG. FIG. 5 is a view for explaining a state in which a transfer module provided in the mother glass panel transfer device according to the present invention sucks a reversed mother glass panel; FIG. 5 is a view for explaining a state in which a transfer module provided in the mother glass panel transfer device according to the present invention sucks a reversed mother glass panel; FIG. 4 is a view for explaining a state in which a transfer module provided in the mother glass panel transfer apparatus according to the present invention is moved to a first position; FIG. FIG. 5 is a view for explaining a state in which a picker module provided in the mother glass panel transfer apparatus according to the present invention descends and picks up a reversed mother glass panel; FIG. 5 is a view for explaining a state in which a picker module provided in the mother glass panel transfer apparatus according to the present invention descends and picks up a reversed mother glass panel; FIG. 5 is a view for explaining a state in which a transfer module provided in the mother glass panel transfer apparatus according to the present invention returns to its original position; FIG. FIG. 5 is a view for explaining a state in which a picker module provided in the mother glass panel transfer apparatus according to the present invention is raised to a second position; FIG. FIG. 5 is a view for explaining a state in which a picker module provided in the mother glass panel transfer device according to the present invention is raised to a third position; FIG. 1 is a diagram for explaining a display panel inspection apparatus provided in a display panel inspection facility according to the present invention; A mother glass panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is attracted to the vacuum suction module provided in the mother glass panel transfer device according to the present invention, and inspection for defects is performed. FIG. 4 is a drawing for explaining an inspection method for each display panel when proceeding. FIG. A mother glass panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is attracted to the vacuum suction module provided in the mother glass panel transfer device according to the present invention, and inspection for defects is performed. FIG. 4 is a drawing for explaining an inspection method for each display panel when proceeding. FIG. A mother glass panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is attracted to the vacuum suction module provided in the mother glass panel transfer device according to the present invention, and inspection for defects is performed. FIG. 4 is a drawing for explaining an inspection method for each display panel when proceeding. FIG. A mother glass panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is attracted to the vacuum suction module provided in the mother glass panel transfer device according to the present invention, and inspection for defects is performed. FIG. 4 is a drawing for explaining an inspection method for each display panel when proceeding. FIG. A mother glass panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is attracted to the vacuum suction module provided in the mother glass panel transfer device according to the present invention, and inspection for defects is performed. FIG. 4 is a drawing for explaining an inspection method for each display panel when proceeding. FIG. A mother glass panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is attracted to the vacuum suction module provided in the mother glass panel transfer device according to the present invention, and inspection for defects is performed. FIG. 4 is a drawing for explaining an inspection method for each display panel when proceeding. FIG. A mother glass panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is attracted to the vacuum suction module provided in the mother glass panel transfer device according to the present invention, and inspection for defects is performed. FIG. 4 is a drawing for explaining an inspection method for each display panel when proceeding. FIG. FIG. 4 is a view for explaining the movement of probe blocks that are not used when a display panel is inspected for defects by the display panel inspection apparatus according to the present invention; FIG.

A mother glass panel transfer device according to an embodiment of the present invention includes a stage module for sucking and fixing the other surface of the mother glass panel in a normal state in which one surface of the mother glass panel faces upwards-the mother glass panel At least one type of display panel having an organic material layer deposited thereon for forming an organic light emitting layer is provided on one side, and the stage module is in a state in which the mother glass panel is in the normal state and the one side faces downward. After sucking the other surface of the mother glass panel whose state has changed from the normal state to the reversed state on the stage module, the mother glass panel is rotated to the reversed state. a transfer module for moving the display panel to a first position for inspecting for defects of the display panel while maintaining ;; a vacuum suction module for advancing; and after suctioning the other surface of the mother glass panel moved to the first position by the transfer module, moving to a second position while maintaining the reversed state. and the mother glass panel is held in the reversed state by the vacuum adsorption module, and the other surface is adsorbed, thereby inspecting whether the display panel is defective due to the interaction. modules;

Specific embodiments of the present invention are described in detail below with reference to the drawings. However, the spirit of the present invention is not limited to the presented embodiments, and a person skilled in the art who understands the spirit of the present invention can add, change, delete, etc. other components within the scope of the same spirit, and make other backwards modifications. Other embodiments that fall within the scope of the invention and the spirit of the invention could be readily suggested, and are also within the scope of the spirit of the present invention.

Also, constituent elements having the same function within the same conceptual scope shown in the drawings of the respective embodiments will be described using the same reference numerals.

1. 1. Display Panel and Mother Glass Panel FIG. 1 is a view for explaining a display panel inspected for defects by the display panel inspection equipment according to the present invention, and FIG. 2 is provided to the display panel inspection equipment according to the present invention. FIG. 4 is a diagram for explaining various embodiments of a combination of display panels included in a mother glass panel that can be mounted on a stage module;

Referring to FIG. 1, a display panel DP has pixels formed by depositing an organic material layer for forming an organic light emitting layer on a panel serving as a substrate. A panel inspection facility (1000, see FIGS. 3 and 4) may be inspected for defects.

In the display panel DP, a first electrode pad EP1 formed along a first corner area, which is one of the corner areas of the top surface, is formed in order to test for pixel defects. a second electrode pad EP2 formed along a second corner region that is another one of the upper surface; and a third corner region that is still another one of the corner regions of the upper surface. A fourth electrode pad EP4 may be formed along a fourth corner region, which is still another one of the electrode pad EP3 and the corner regions of the upper surface.

However, although the position and number of electrode pads may vary depending on the characteristics of the display panel DP, the display panel DP shown in FIG. I will explain.

The display panel DP is formed in a plurality of pieces on a mother glass panel MP whose size is determined depending on the size of the stage module (110, see FIGS. 3 and 4) in the manufacturing process, and then cut. The mother glass panel MP may be a glass substrate serving as a base for production of the display panel DP.

The mother glass panel MP has a single type or a plurality of display panels DP of the same size in order to minimize the empty space and increase the efficiency of defect inspection, that is, to increase the chamfering efficiency. It may be a mixed type formed by mixing display panels DP of various sizes.

For example, the mother glass panel MP is a single type of two 98-inch display panels as shown in FIG. A mixed type of 6 display panels, a single type of 18 31.5 inch display panels as shown in FIG. 2(c), and two 49 inch display panels as shown in FIG. 2(d). A mixed type of two 75-inch display panels and a mixed type of three 65-inch display panels and two 55-inch display panels as shown in FIG. Instead, it may be a panel to which a mixed type of display panel of various sizes is applied.

The display panel inspection equipment 1000 according to the present invention can inspect whether or not each of all the display panels included in the mixed type mother glass panel MP of various combinations described above has defects. A typical example is a mixed type in which three 65-inch display panels and two 55-inch display panels are formed.

2. Display Panel Inspection Equipment FIG. 3 is a block diagram for explaining the display panel inspection equipment according to the present invention, and FIG. 4 is a diagram for explaining the display panel inspection equipment according to the present invention.

Referring to FIGS. 3 and 4, the display panel inspection equipment 1000 according to the present invention uses a back adsorption method, that is, a face down method to inspect display panels of various sizes included in a mother glass panel MP. It is an inspection facility that can maximize the accuracy and speed of the inspection for defects by allowing the presence or absence of defects in the DP to be performed without replacing the probe unit (PU, see FIG. 20) or the probe block PB, An inspection process preparation facility 1100 and an inspection process progress facility 1200 may be included.

The inspection process preparation equipment 1100 inspects a mother glass panel MP having at least one kind of display panel DP having an organic material layer deposited thereon for forming an organic light-emitting layer in a normal state in which the one surface faces upward. When the other surface of the mother glass panel MP is attracted to the stage module 110, the stage module 110 rotates so that the mother glass panel MP is in the reversed state in which the one surface faces downward in the normal state. After that, the transfer module 120 is a facility for receiving the transmission of the mother glass panel MP in the reversed state and moving the mother glass panel MP to a facility for the next process while maintaining the reversed state. may

After the picker module 130 picks up the other surface of the mother glass panel MP that has entered by the transfer module 120, the inspection process progressing equipment 1200 moves the position of the picker module 130 so that the vacuum suction module 140 is in the reversed state. When the mother glass panel MP is sucked, the electrode pads of the display panel DP are brought into contact with the probe blocks PB of the probe unit PU of the display panel inspection device 200 through the positional movement of the vacuum suction module 140. It may be a facility for inspecting whether or not there is a defect.

Meanwhile, in the display panel inspection equipment 1000 according to the present invention, the mother glass panel MP is mounted on the stage module 110, and the transfer module 120 sucks the mother glass panel MP to the vacuum suction module 140 via the picker module 130. can be defined as a mother glass panel transfer device 100, and the display panel DP adsorbed to the vacuum adsorption module 140 by the mother glass panel transfer device 100 is inspected for defects by the display panel inspection device 200. The proceeding process will be described in detail with reference to FIGS. 7 to 28. FIG.

5 and 6 are drawings for explaining the air flow in the inspection process processing equipment provided for the display panel inspection equipment according to the present invention, and FIG. 5 is a schematic cross-sectional view taken along line AA of FIG. 6 is a schematic cross-sectional view taken along line BB of FIG.

Referring to FIGS. 5 and 6 together with FIGS. 3 and 4, the inspection process progress equipment 1200 inspects the display panel DP for the defect by contacting the electrode pads of the display panel DP with the probe block PB. and a vision module 410 for photographing the display panel DP to be inspected for defects and confirming the presence or absence of spots or scratches on the display panel DP. A second space 400 installed to be movable may be included, and the second space 400 may be positioned below the first space 300 .

Here, the vision module 410 may include, for example, four camera units, and the camera units change the working distance (WD) according to the size of the display panel DP to be photographed. may be moveable toward.

In addition, since the four camera units must photograph the entire area of the display panel DP corresponding to the size of the display panel DP to be photographed, each of the four camera units has a size of 1/4 of the display panel DP to be photographed. It must be located in the center of the area and can therefore be moved forward or backward, left or right. In addition, if necessary, it may be rotated forward or backward in order to correspond to the rotation of the display panel DP to be photographed.

Meanwhile, the inspection for defects of the display panel DP in the inspection process preparation equipment 1100 and the inspection process progress equipment 1200 may be performed under a nitrogen atmosphere.

In particular, in the case of the inspection process progress equipment 1200, the nitrogen air should be stably circulated in the first space 300 and the second space 400 without stagnation.

For this purpose, the inspection process progress equipment 1200 has a forced circulation module 310 located in the upper part of the first space part 300, and connects the upper part and the lower part to circulate the nitrogen air in the first space part 300. and a second circulation duct module 420 connecting the first space 300 and the second space 400 .

The second circulation duct module 420 may allow the nitrogen air that has flowed into the second space 400 from the first space 300 to flow back into the first space 300 and circulate. A forced suction module 430 may be positioned on the second circulation duct module 420 .

Here, the forced circulation module 310 and the forced suction module 430 are a kind of suction fan, and the forced suction module 430 is positioned above the second circulation duct module 420 to provide air from the first space 300 to the second space. After the nitrogen air introduced into the space 400 is sucked, it may be discharged to the first space 300 .

Therefore, the inspection process progress equipment 1200 performs the inspection process of the display panel under a uniform nitrogen atmosphere.

On the other hand, since the inspection process preparation equipment 1100 and the inspection process progress equipment 1200 require an operator to enter during maintenance, the atmosphere can be changed to a clean dry air (CDA) atmosphere.

3. Mother Glass Panel Transfer Apparatus FIG. 7 is a flow chart illustrating a process of sucking a mother glass panel to a vacuum suction module by a mother glass panel transfer apparatus provided in the display panel inspection equipment according to the present invention.

First, referring to FIGS. 3 and 4, the mother glass panel transfer device 100 may include a stage module 110, a transfer module 120, a picker module 130, a vacuum adsorption module 140, and the like.

The stage module 110 is a component for attracting and fixing the other surface of the mother glass panel MP in a normal state in which one surface of the mother glass panel MP faces upward, and one surface of the mother glass panel MP emits organic light. At least one kind of display panel DP having an organic layer deposited thereon for forming layers may be provided.

Here, the other surface of the mother glass panel MP may be a non-vapor-deposited portion as a whole.

The stage module 110 can be rotated so that the display panel can be inspected in a face-down manner, whereby the mother glass panel that is placed and sucked on the stage module 110 in the normal state. The MP can be in an inverted state with the one side facing downward.

After the transfer module 120 sucks the other surface of the mother glass panel MP whose state is changed from the normal state to the reversed state on the stage module 110, the transfer module 120 moves the mother glass panel MP while maintaining the reversed state. It may be a component for moving to a first position for inspection for defects.

After picking up the other surface of the mother glass panel MP moved to the first position by the transfer module 120, the picker module 130 is lifted from the first position while maintaining the reversed state. A plate-shaped vacuum suction module 140, which is a component for moving to a certain second position and will be described later, can suction the mother glass panel MP in the reversed state.

When the picker module 130 moves the reversed mother glass panel MP to the second position, the vacuum suction module 140 suctions the mother glass panel MP while maintaining smoothness in the reversed state. After that, the probe unit PU of the display panel inspection apparatus 200 interacts with the probe block PB to inspect the display panel for defects.

When the mother glass panel is sucked in the reversed state by the vacuum suction module 140, the vacuum suction module 140 moves the electrode pads of the display panel DP while maintaining the reversed state of the mother glass panel MP. and the probe block PB are brought into contact with each other, and the inspection for defects in the display panel DP is performed in the reversed state.

Here, the reason why the mother glass panel should be finally attracted to the vacuum suction module 140 while maintaining the reversed state is the accurate position control of the display panel DP for inspecting whether the display panel is defective. This is to maintain the smoothness of the display panel DP. This is because a problem occurs in the process and an accurate inspection for the presence or absence of defects cannot be guaranteed.

Hereinafter, a process of sucking the mother glass panel MP to the vacuum suction module 140 by the mother glass panel transfer device 100 according to the present invention will be described.

Referring to FIG. 7, the step of sucking the mother glass panel to the vacuum suction module by the mother glass panel transfer device 100 according to the present invention is the first step in which the mother glass panel MP is placed on the stage module 110 in a normal state. (S10), the second step (S20) in which the stage module 110 rotates, the third step (S30) in which the transfer module 120 enters and sucks the mother glass panel MP, and the transfer module 120 moves to the first position. a fifth step (S50) in which the picker module 130 descends to suck the mother glass panel MP; a sixth step (S60) in which the transfer module 120 returns; A seventh step (S70) of lifting to the second position, an eighth step (S80) of sucking the display panel DP by the vacuum suction module 140, and a ninth step of lifting the picker module 130 and moving to the third position ( S90).

Each step described above will be specifically described below with reference to FIGS. 8 to 19. FIG.

FIG. 8 is a view for explaining a state in which a mother glass panel is mounted in a normal state on a stage module provided in the mother glass panel transfer apparatus according to the present invention.

Referring to FIG. 8, the mother glass panel MP can be attached to the stage module 110 after being placed (S10) on the stage module 110 in a normal state.

Here, for convenience of explanation, the mother glass panel MP is shaded at one side where at least one or more display panels DP are provided.

On the other hand, the method of disposing the mother glass panel MP on the stage module 110 is not particularly limited, and various methods such as an automatic method using a robot device under a nitrogen atmosphere or a manual method by an operator may be used.

The stage module 110 may include a plurality of stage units 112 for sucking the other surface SF2 of the mother glass panel MP in the normal state, and the stage units 112 are spaced apart from each other. A first space S1 can be formed in the .

For example, as shown in FIG. 8, the stage units 112 may be formed of nine pieces, but the present invention is not limited thereto. The number may be changed as long as it can be stably supported.

Each of the stage units 112 may include a suction means 114 such as a suction pad for sucking the mother glass panel MP, and the number of the suction means 114 is not limited.

9 and 10 are diagrams for explaining a situation in which the mother glass panel in a normal state changes to a reversed state due to the rotation of the stage module from the situation shown in FIG.

9 and 10, the stage module 110 can be rotated (R, S20) while sucking the mother glass panel MP in a normal state, and the rotation direction is not limited.

A driving method for rotating the stage module 110 is not particularly limited. For example, the stage module 110 may be rotated using a known motor.

When the stage module 110 rotates, the mother glass panel MP sucked in the normal state changes its state to a reversed state in which the one surface SF1 on which the vapor deposition portion exists faces downward.

While the mother glass panel MP is being inspected for defects, the display panel DP continues to be inspected for defects in a face-down manner. It will be possible.

FIG. 11 is a view for explaining how a transfer module provided in the mother glass panel transfer apparatus according to the present invention enters the stage module, and FIGS. 12 and 13 are views for the mother glass panel transfer apparatus according to the present invention. FIG. 10 is a view for explaining a state in which a provided transfer module sucks a reversed mother glass panel; FIG.

11 to 13, when the mother glass panel MP is reversed due to the rotation of the stage module 110, the transfer module 120 enters the stage module 110 and then sucks the mother glass panel MP (S30). It will be.

The transfer module 120 includes a plurality of transfer units 122 for sucking the other surface SF2 of the mother glass panel MP that is inserted into the first space S1 provided by the stage unit 112 and arranged in an inverted state. can be done.

The transfer units 122 may be spaced apart from each other like the stage units 112 .

For example, as shown in the drawing, the transfer units 122 may be formed in eight units, but are not necessarily limited thereto.

After entering the first space S1 provided by the mother glass panel MP and the stage unit 112, the transfer unit 122 can absorb the other surface SF2 of the mother glass panel MP, thereby removing the mother glass panel MP. For adsorption, it may be moved vertically if necessary.

Each of the transfer units 122 may include a suction means 124 such as a suction pad for sucking the mother glass panel MP, and the number of the suction means 124 is not limited.

As described above, when the mother glass panel MP is sucked by the transfer unit 122, the suction of the mother glass panel MP by the stage unit 112 is released, whereby the mother glass panel MP is moved to the above position. It will be interlocked with the movement of the transfer unit 122 .

FIG. 14 is a diagram for explaining a state in which a transfer module provided in the mother glass panel transfer apparatus according to the present invention is moved to the first position.

Referring to FIG. 14, the transfer module 120 may be moved to a first position for inspection for defects while maintaining the reversed state while sucking the reversed mother glass panel MP (S40).

Here, the first position may refer to a position above the reversed mother glass panel MP with respect to the position where the vacuum adsorption module 140 and the picker module 130 are arranged. 130 can stably adsorb the mother glass panel MP in the reversed state while maintaining the reversed state.

15 and 16 are diagrams for explaining a state in which a picker module provided in a mother glass panel transfer apparatus according to the present invention descends to pick up a reversed mother glass panel, and FIG. FIG. 4 is a view for explaining a situation in which a transfer module provided in the mother glass panel transfer device returns to its original position; FIG.

15 and 16, the picker module 130 can be moved to the first position after passing the vacuum adsorption module 140 by descending from the third position, and then moved to the first position by the transfer module 120. Referring to FIG. The reversed mother glass panel MP that has been moved can be sucked (S50).

The picker module 130 may include a plurality of picker units 132 spaced apart from each other so as to uniformly attract the other surface SF2 of the mother glass panel MP to prevent sagging.

When the mother glass panel MP is sucked by the picker module 130, the transfer module 120 releases the suction and is separated from the mother glass panel MP and moved to its original position (see FIG. 17). S60).

The transfer module 120 moved to the original position can operate to inspect other display panels provided on other mother glass panels.

FIG. 18 is a view for explaining a situation in which the picker module provided in the mother glass panel transfer apparatus according to the present invention is raised to the second position.

Referring to FIG. 18, the picker module 130 picks up the mother glass panel MP in the reversed state, and then moves up to the second position (S70). S80) It becomes possible.

Here, the second position may be a position raised to the vacuum adsorption module 140 by the picker module 130 with respect to the first position, and the vacuum adsorption module 140 stably picks up the mother glass by the picker module 130 . The panel MP can be sucked in the reversed state.

The vacuum adsorption module 140 may include a plurality of adsorption means such as adsorption pads for adsorbing the mother glass panel MP.

FIG. 19 is a view for explaining a situation in which the picker module provided in the mother glass panel transfer apparatus according to the present invention is raised to the third position.

Referring to FIG. 19, when the second surface SF2 of the mother glass panel MP moved to the second position is sucked by the vacuum suction module 140, the picker module 130 releases the suction to remove the mother glass panel MP. After being separated, it may be raised and returned to the third position (S90).

After that, an inspection for defects may be performed by interacting with the display panel inspection apparatus 200 including the probe unit PU on which the vacuum adsorption module 140 and the probe block PB are mounted.

Here, the interaction is realized by contacting the electrode pads of the display panel DP provided on the mother glass panel MP with the position of the vacuum adsorption module 140 and the probe block PB of the probe unit PU to detect the defect of the display panel DP. It can mean that an examination for the presence or absence is proceeding.

Hereinafter, a process of inspecting whether or not the display panel DP is defective by the display panel inspection apparatus 200 will be described in detail.

4. Display Panel Inspection Apparatus FIG. 20 is a diagram for explaining a display panel inspection apparatus provided in the display panel inspection equipment according to the present invention.

Referring to FIG. 20, the display panel inspection apparatus 200 may include a probe unit PU that supports the probe block PB and a support unit 210 on which the probe unit PU is movably mounted.

The support unit 210 may be a frame formed in the shape of a plate, and the probe unit PU supports a plurality of first probe blocks PB1 arranged in a horizontal direction, and a first probe unit PU1 arranged in a vertical direction. A second probe unit PU2 supporting a plurality of second probe blocks PB2 arranged in the horizontal direction, a third probe unit PU3 supporting a plurality of third probe blocks PB3 arranged in the horizontal direction, and a plurality of A fourth probe unit PU4 may be included that supports a fourth probe block PB4.

Here, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 move on the support unit 210 in lateral directions D1 and D2 or longitudinal directions D3 and D4. , and the result of being moved in the diagonal direction D5 can be obtained through the movement in the horizontal directions D1, D2 and the vertical directions D3, D4.

Here, the horizontal directions D1 and D2 and the vertical directions D3 and D4 may be directions for forming a square corresponding to the shape of the display panel DP.

Also, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 may be immediately moved on the support unit 210 in the diagonal direction D5.

On the other hand, the plurality of first probe blocks PB1, the plurality of second probe blocks PB2, the plurality of third probe blocks PB3, and the plurality of fourth probe blocks PB4 are respectively the first probe unit PU1 and the second probe block PB4. It can be mounted movably on the probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4.

As described above, positional movement of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and/or the fourth probe unit PU4 on the support unit 210 and the first probe unit Positional movement of the plurality of first probe blocks PB1 on PU1, positional movement of the plurality of second probe blocks PB2 on the second probe unit PU2, movement of the plurality of second probe blocks PB2 on the third probe unit PU3 Through the positional movement of the 3-probe block PB3 and the positional movement of the plurality of fourth probe blocks PB4 on the fourth probe unit PU4, various sizes of probe blocks included in the mother glass panel MP can be obtained without exchanging the probe units. It is possible to inspect each display panel DP for defects, and it is also possible to check the arrangement of display panels DP of various sizes included in the mother glass panel MP, that is, the long sides are in the horizontal direction D1 and D2. Regardless of whether it is positioned or positioned in the longitudinal direction D3, D4, the inspection can proceed appropriately accordingly.

21 to 27 show that a mother glass panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is adsorbed to a vacuum adsorption module provided in the mother glass panel transfer device according to the present invention. FIG. 10 is a diagram for explaining an inspection method for each display panel when an inspection for defects is performed on each display panel; FIG.

First, the mother glass panel MP attracted to the vacuum adsorption module 140 in a reversed state has a display panel DP, three 65-inch display panels DP1, DP2 and DP3, and two 55-inch display panels DP4 and DP5. A mixed type will be described as an example.

Each display panel has a plurality of first electrode pads formed along a first corner area, which is one of the corner areas of the top surface, and a first electrode pad, which is the other one of the corner areas of the top surface. A plurality of second electrode pads formed along two corner regions, a plurality of third electrode pads formed along a third corner region, which is still another one of the corner regions of the upper surface, and the upper surface. and a plurality of fourth electrode pads formed along a fourth corner region, which is still another one of the corner regions.

Also, an example will be described in which the 65-inch display panels DP1, DP2, and DP3 are inspected first, and then the remaining 55-inch display panels DP4 and DP5 are inspected when the inspection is completed. .

Referring to FIG. 21, a first probe unit PU1, a second probe unit PU2, a third probe unit PU3 and a fourth probe unit PU4 are attached to a 65-inch mother glass panel MP attached to the vacuum adsorption module 140. The display panels DP1, DP2, and DP3 may be movable on the support unit 210 in order to inspect for defects.

In other words, the first electrode pads, the second electrode pads, the third electrode pads, and the fourth electrode pads of the 65-inch display panels DP1, DP2, and DP3 are respectively connected to the plurality of first probe blocks PB1 of the first probe unit PU1. at least some of them, at least some of the plurality of second probe blocks PB2 of the second probe unit PU2, at least some of the plurality of third probe blocks PB3 of the third probe unit PU3, and a plurality of the fourth probe units PU4 At least one of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 is a support unit so as to contact at least a part of the fourth probe block PB4 of 210 can be displaced.

At least one of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 may be directly moved in a diagonal direction D5 or, as shown in the drawing, It can be moved in the diagonal direction D5 through the movement in the horizontal directions D1, D2 and the vertical directions D3, D4.

Here, the positional movements of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 on the support unit 210 are performed by a linear motion guide, a motor, and a ball. Although it can be implemented using various components such as a screw and a ball nut, this is only an example, and it can be implemented by applying various known movement methods.

The first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 are configured to include the plurality of first electrode pads, the plurality of second electrode pads, the plurality of third electrode pads, and the plurality of third electrode pads. Some of the plurality of first probe blocks PB1, some of the plurality of second probe blocks PB2, and some of the plurality of probe blocks that must contact the electrode pads and the plurality of fourth electrode pads. If it is a part of the third probe block PB3 and a part of the plurality of fourth probe blocks PB4, it is directly moved in the diagonal direction D5 or moved in the horizontal directions D1 and D2 and the vertical directions D3 and D4. can be moved in the diagonal direction D5 through .

In this case, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 can have a windmill shape.

On the other hand, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 have the plurality of first electrode pads, the plurality of second electrode pads, the plurality of All of the plurality of first probe blocks PB1, all of the plurality of second probe blocks PB2, and the plurality of probe blocks that must be in contact with the third electrode pads and the plurality of fourth electrode pads. Even if all of the third probe blocks PB3 and all of the plurality of fourth probe blocks PB4 are directly moved in the diagonal direction D5 or moved in the horizontal directions D1 and D2 and the vertical directions D3 and D4, depending on the situation. It can be moved in the diagonal direction D5 through movement.

The first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 are respectively the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the The position can be moved on the fourth probe unit PU4, and the movement method is not particularly limited.

As described above, the display panel inspection apparatus 200 according to the present invention is configured to move the probe unit PU and/or the probe block PB to the 65-inch display panels DP1, DP2, DP3, and 65-inch display panels DP1, DP2, DP3, and All of the 55-inch display panels DP4 and DP5 can be inspected for defects without replacing probe units and/or probe blocks, which will be described in detail below.

In the display panel inspection apparatus 200 according to the present invention, three 65-inch display panels DP1, DP2 and DP3 and two 55-inch display panels DP4 and DP5 are formed on the vacuum adsorption module 140 by a sensing unit (not shown). It is sensed that the mother glass panel MP is sucked.

The sensing unit may include an imaging unit using a camera and/or various sensor units. Before or during the movement, the size of the display panel DP constituting the mother glass panel MP is sensed.

When the size and/or type of the display panels DP1, DP2, DP3, DP4, DP5 constituting the mother glass panel MP are sensed by the sensing unit, the control unit determines what kind of display panels DP1, DP2, It is determined whether DP3, DP4, and DP5 are inspected first, and as described above, the 65-inch display panels DP1, DP2, and DP3 are determined to be inspected with priority over the 55-inch display panels DP4 and DP5. The situation will be described as an example.

The size and/or type of display panels DP1, DP2, DP3, DP4 and DP5 formed on the mother glass panel MP are detected by the control unit, and 65-inch display panels DP1, DP2 and DP3 among the detected display panels are detected. is preferentially tested, the control unit causes the probe block PB to come into contact with the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad provided on the 65-inch display panel DP to electrically The probe unit PU and the probe block PB can be moved so that they can be physically connected.

In other words, the first probe unit PU1 moves in the downward direction D4 in the vertical directions D3 and D4, which is the direction toward the third probe unit PU3 regardless of the order, and moves in the right direction D1 in the horizontal directions D1 and D2. Through the position movement, the diagonal direction D5ni
Although it can be moved, it is not necessarily limited to this, and may be moved directly in the diagonal direction D5.

At this time, among the plurality of first probe blocks PB1, the probe block required for testing can be moved in the left direction D2 of the horizontal directions D1 and D2 on the first probe unit PU1. Depending on the arrangement of the pads, there may be no position change as shown in the drawing.

In addition, the second probe unit PU2 moves in the leftward direction D2 in the horizontal directions D1 and D2, which is the direction toward the fourth probe unit PU4 regardless of the order, and moves in the downward direction D4 in the vertical directions D3 and D4. Through the positional movement, it may be moved in the diagonal direction D5, but it is not necessarily limited to this, and may be moved directly in the diagonal direction D5.

At this time, the probe blocks necessary for testing among the plurality of second probe blocks PB2 can be moved in the upper direction D3 of the vertical directions D3 and D4 on the second probe unit PU2, but the arrangement of the electrode pads of the display panel is not sufficient. Depending on the state, there may be no change in position as shown in the drawings.

In addition, regardless of the order, the third probe unit PU3 moves toward the first probe unit PU1 in the vertical direction D3 and D4 toward the upper direction D3 and in the horizontal directions D1 and D2 toward the left direction D2. Through the movement, the position may be moved in the diagonal direction D5, but it is not necessarily limited to this, and may be moved directly in the diagonal direction D5.

At this time, a probe block required for testing among the plurality of third probe blocks PB3 may be moved in the right direction D1 of the horizontal directions D1 and D2 on the third probe unit PU3, but the arrangement of the electrode pads of the display panel may be changed. Depending on the state, there may be no change in position as shown in the drawings.

In addition, the fourth probe unit PU4 moves in the right direction D1 in the horizontal directions D1 and D2, which is the direction toward the second probe unit PU2 regardless of the order, and moves in the upper direction D3 in the vertical directions D3 and D4. Through the movement, the position may be moved in the diagonal direction D5, but it is not necessarily limited to this, and may be moved directly in the diagonal direction D5.

At this time, the probe blocks required for testing among the plurality of fourth probe blocks PB4 can be moved in the downward direction D4 among the vertical directions D3 and D4 on the fourth probe unit PU4. Depending on the arrangement state, there may be no position change as shown in the drawing.

The first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 can be moved to form a windmill shape.

The first probe block PB1 and the third probe block PB3 required for testing are positioned in opposite directions on the first probe unit PU1 and the third probe unit PU3, respectively, according to the arrangement of electrode pads of the display panel. The second probe block PB2 and the fourth probe block PB4 required for inspection can be moved in opposite directions on the second probe unit PU2 and the fourth probe unit PU4, respectively, depending on the arrangement of the electrode pads of the display panel. can be moved to

Of course, as described above, the positions of the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 may not change depending on the arrangement of the electrode pads of the display panel. .

Some of the plurality of first probe blocks PB1, some of the plurality of second probe blocks PB2, and some of the plurality of third probe blocks PB3 are caused by the positional movement of the probe unit PU and the positional movement of the probe blocks PB as described above. and some of the plurality of fourth probe blocks PB4 respectively correspond to the first electrode pads, the second electrode pads, the third electrode pads and the fourth electrode pads of the 65-inch display panels DP1, DP2 and DP3. It will be placed exactly where you want it.

When the probe unit PU and the probe block PB are completely moved, the vacuum adsorption module 140 moves the first electrode pad, the second electrode pad, and the third electrode of the first 65-inch display panel DP1 constituting the mother glass panel MP. The pads and the fourth electrode pads are moved to be positioned above the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4, respectively.

Here, the positional movement of the vacuum adsorption module 140 may include linear movement and/or rotational movement, and various other movement methods may be applied.

Accordingly, various arrangement states of the display panel DP1 that require inspection can be implemented.

The first electrode pad, the second electrode pad, the third electrode pad and the fourth electrode pad of the first 65-inch display panel DP1 are the first probe block PB1, the second probe block PB2 and the third probe block PB3, respectively. 22, through the displacement of the vacuum adsorption module 140, the first electrode pad of the first 65-inch display panel DP1, the second electrode pad, and the second probe block PB4. The electrode pads, the third electrode pads and the fourth electrode pads respectively come into contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 to implement electrical connection. , the inspection to determine whether the first 65-inch display panel DP1 is defective will proceed.

On the other hand, when the inspection for defects of the first 65-inch display panel DP1 is completed, the position of the vacuum adsorption module 140 is moved to move the first electrode pad, the second electrode pad, and so on of the first 65-inch display panel DP1. The contact between the third electrode pad and the fourth electrode pad and the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 is released.

Then, as shown in FIG. 23, the position of the vacuum adsorption module 140 is moved to the first, second, third and fourth electrode pads of the second 65-inch display panel DP2. The contact of the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 is realized, and whether or not the second 65-inch display panel DP2 is defective is determined. Inspection will proceed.

When the second 65-inch display panel DP2 is inspected for defects, the position of the vacuum adsorption module 140 is moved to move the first electrode pad, the second electrode pad, the third electrode pad, and the third electrode pad of the second 65-inch display panel DP2. The contact between the electrode pads and the fourth electrode pads and the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 is released.

Then, as shown in FIG. 24, the position of the vacuum adsorption module 140 is moved, and the first electrode pad, the second electrode pad, the third electrode pad and the fourth electrode pad of the third 65-inch display panel DP3 are respectively connected. The contact of the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 is implemented, and whether or not the third 65-inch display panel DP3 is defective is determined. Inspection will proceed.

When the inspection for defects in the third 65-inch display panel DP3 is completed, the position of the vacuum adsorption module 140 is moved to move the first electrode pad, the second electrode pad, the third electrode pad, and the third electrode pad of the third 65-inch display panel DP3. The contact between the electrode pads and the fourth electrode pads and the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 is released.

Thereafter, the control unit controls probe blocks PB1, PB2, PB3, PB1, PB2, PB3, PB3, PB3, PB3, PB3, PB2, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB2, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB4, PB3, PB3, PB3, PB3, PB3, PB3, PB3, PB4, PB3, PB3, PB3, PB4, PB3, PB3, PB3, PB3, PB3, PB3, PB3, etc. the probe unit PU1 so that the PB4 is in contact with the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad provided on the 55-inch display panels DP4 and DP5 to enable electrical connection; PU2, PU3, PU4 and probe blocks PB1, PB2, PB3, PB4 can be displaced.

By moving the probe units PU1, PU2, PU3 and PU4 and moving the probe blocks PB1, PB2, PB3 and PB4, the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth Each of the probe blocks PB4 is moved to a position exactly corresponding to the first electrode pad, the second electrode pad, the third electrode pad and the fourth electrode pad of the 55 inch display panels DP4 and DP5.

When the positional movements of the probe units PU1, PU2, PU3, PU4 and the probe blocks PB1, PB2, PB3, PB4 are completed, the vacuum adsorption module 140 moves the first 55-inch display panel DP4 constituting the mother glass panel MP. A first electrode pad, a second electrode pad, a third electrode pad and a fourth electrode pad are positioned above the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4, respectively. The position will be moved so that

Here, the positional movement of the vacuum adsorption module 140 may include linear movement and/or rotational movement, and various other movement methods may be applied.

The first electrode pad, the second electrode pad, the third electrode pad and the fourth electrode pad of the first 55-inch display panel DP4 are the first probe block PB1, the second probe block PB2 and the third probe block PB3, respectively. 26, the vacuum adsorption module 140 is moved to position the first electrode pad of the first 55-inch display panel DP4, the second electrode pad, and the second probe block PB4. The electrode pads, the third electrode pads and the fourth electrode pads respectively come into contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 to implement electrical connection. , the inspection to determine whether the first 55-inch display panel DP4 is defective will proceed.

On the other hand, when the inspection for defects of the first 55-inch display panel DP4 is completed, the position of the vacuum adsorption module 140 is moved to move the first electrode pad, the second electrode pad, The contact between the third electrode pad and the fourth electrode pad and the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 is released.

Then, as shown in FIG. 27, the position of the vacuum adsorption module 140 is moved to the first electrode pad, the second electrode pad, the third electrode pad and the fourth electrode pad of the second 55-inch display panel DP5. The contact of the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 is implemented, and whether there is a defect in the second 55-inch display panel DP5 is determined. Inspection will proceed.

When the second 55-inch display panel DP5 is inspected for defects, the position of the vacuum adsorption module 140 is moved to move the first electrode pad, the second electrode pad, the third electrode pad, and the third electrode pad of the second 55-inch display panel DP5. The contact between the electrode pads and the fourth electrode pads and the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4 is released, and the electrodes included in the mother glass panel are removed. Thus, the inspection for defects on all the display panels DP1, DP2, DP3, DP4, and DP5 is completed.

As described above, when all the display panels DP1, DP2, DP3, DP4, and DP5 formed on one mother glass panel have been inspected for defects, the mother glass panel MP undergoes the next process (for example, sealing). stop process, etc.), and the inspection process for other mother glass panels is repeated.

FIG. 28 is a diagram for explaining the positional movement of probe blocks that are not used when a display panel is inspected for defects by the display panel inspection apparatus according to the present invention.

Referring to FIG. 28, when a display panel is inspected for defects, some of a plurality of probe blocks on an arbitrary probe unit may not be used for inspection.

A case will be described below where only the outermost probe block PBX among a plurality of probe blocks on an arbitrary probe unit is not used for testing. The same is applicable when .

When testing a display panel of a specific size, if some of a plurality of probe blocks on an arbitrary probe unit are probe blocks that must contact a plurality of electrode pads, among the plurality of probe blocks The rest of the probe blocks PBX are located on the mother glass panel other than the display panel on which some of the plurality of probe blocks come into contact with the plurality of electrode pads and are inspected for the presence or absence of the defect. can be moved such that it is prevented from contacting other display panels.

Specifically, the probe block PBX includes a probe body portion PBX1 attached to the probe unit PU, and a probe variable portion PBX2 which is attached to the probe body portion PBX1 so as to be movable upward or downward and includes a probe. and when the probe variable part PBX2 corresponds to the remaining probe block, it is moved downward from the probe body part PBX1 to make contact with another display panel on the mother glass panel. can be prevented.

Here, the method of moving the probe variable part PBX2 on the probe body part PBX1 can be applied to a driving method such as an actuator, but is not necessarily limited to this, and all known driving methods can be applied. be able to.

Although the configuration and features of the present invention have been described above based on the embodiments of the present invention, the present invention is not limited thereto, and the present invention belongs to the present invention that can be variously changed or modified within the spirit and scope of the present invention. Such modifications or variations are obvious to those skilled in the art and are thus intended to be covered by the appended claims.

Claims (9)

a stage module for adsorbing and fixing the other surface of the mother glass panel in a normal state in which one surface of the mother glass panel faces upward;
Here, one surface of the mother glass panel is provided with at least one kind of display panel on which an organic material layer for forming an organic light emitting layer is deposited, and the stage module is arranged such that the mother glass panel is in the normal state. Rotate in a reversed state with one side facing the bottom,
After sucking the other surface of the mother glass panel whose state has changed from the normal state to the reversed state on the stage module, the mother glass panel is checked for defects in the display panel while maintaining the reversed state. a transfer module for moving to a first position for inspection;
a vacuum suction module for inspecting whether the display panel has defects by interacting with a probe unit having a probe block;
After sucking the other surface of the mother glass panel moved to the first position by the transfer module, the mother glass panel is moved to the second position while maintaining the reversed state, and the mother glass panel is held by the vacuum adsorption module. a picker module for inspecting whether the display panel is defective due to the interaction by picking up the other surface while maintaining the reversed state;
a mother glass panel transfer device. The vacuum adsorption module is
While the mother glass panel is maintained in the reversed state, the position is moved so that the electrode pads of the display panel and the probe blocks are brought into contact with each other, and the display panel is inspected for defects in the reversed state. 2. The mother glass panel transfer device according to claim 1, characterized in that: The transfer module comprises:
2. The mother glass according to claim 1, wherein when the other surface is sucked by the picker module, the suction is released and the mother glass panel is separated from the mother glass panel and then moved to the original position. Panel transfer device. The second position is
2. The device for transferring a mother glass panel according to claim 1, wherein the first position is a reference position and the position is raised to the vacuum suction module by the picker module. The stage module is
including a plurality of stage units for holding the other surface of the mother glass panel in the normal state but preventing the mother glass panel from sagging at its central portion due to its own weight;
The plurality of stage units are
2. The device for transferring a mother glass panel as claimed in claim 1, wherein the first space is formed between the respective ones arranged to be separated from each other. The transfer module comprises:
When the stage module rotates and the state of the mother glass panel changes from the normal state to the reversed state, the other surface of the mother glass panel inserted into the first space and arranged in the reversed state is sucked. 6. The mother glass panel transfer device according to claim 5, further comprising a plurality of transfer units for preventing the central portion of the mother glass panel from sagging due to its own weight. The picker module is
While positioned at the third position, after passing through the vacuum suction module by descent, the mother glass panel is moved to the first position and suctioned the other surface of the mother glass panel moved to the first position by the transfer module. 2. The device for transferring a mother glass panel according to claim 1, wherein the mother glass panel transferring device as claimed in claim 1, wherein the mother glass panel is moved to the second position by being lifted so that the second surface of the mother glass panel is sucked by the vacuum suction module. . The picker module is
8. The device for transferring a mother glass panel according to claim 7, comprising a plurality of picker units spaced apart from each other so as to uniformly pick up the other surface of the mother glass panel. The picker module is
When the other surface of the mother glass panel moved to the second position is adsorbed by the vacuum adsorption module, the mother glass panel is released from the adsorption and separated from the mother glass panel, and then returned to the third position. The mother glass panel transfer device according to claim 7, characterized by:

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