JP3367985B2 - How to duplicate relief patterns - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for reproducing a relief pattern such as a hologram, and more particularly, a resin plate is prepared by using a flexible material as a substrate for copying a resist from a relief plate. The present invention relates to a relief pattern duplication method.

[0002]

2. Description of the Related Art Conventionally, when a duplicate is obtained from a resist relief plate, a mold 50 made of Ni or the like is prepared as shown in FIG. Then, the relief pattern is duplicated by pressing it with a mold 50 to laminate it and exposing it to UV from the glass substrate 51 side to cure the ultraviolet curable resin 52.

[0003]

However, in the conventional duplication method, bubbles and the like are easily mixed when the resin is dropped and laminated, and once mixed, the bubbles cannot be removed and a defect occurs. There was a problem that it was easy to do. Further, since the substrate is lacking in flexibility, the mold and the glass substrate cannot be separated while warping, and defects are likely to occur in this case as well. In addition, when the mold 50 is once manufactured from the resist relief plate and duplicated, if a defect such as a damage such as a scratch or a resin residue is generated in the mold, the mold must be manufactured again. . However, the production of this mold requires plating and the like, which is extremely troublesome. Further, when the mold is duplicated a plurality of times, as shown in FIG. 7, defects are generated in the original plate and the duplicated product due to burrs and foreign matters mixed in by the resin protrusion 52 and the difficulty of peeling the duplicated product from the original plate. . For example, if the resin squeezes out and is irradiated with UV to cure the resin, it is difficult to peel and remove it, and if you try to remove it with a cutter, foreign matter such as dust may get mixed in the pattern or scratch it. There was a problem of being lost.

The present invention has been made in view of the above circumstances, and it is possible to easily reproduce a relief pattern without defects and to use the original plate of the final copy when it becomes unusable. Another object of the present invention is to provide a relief pattern duplication method capable of easily producing an original plate.

[0005]

According to the relief pattern duplication method of the present invention, when a relief pattern such as a hologram is duplicated, it is duplicated from a resist relief pattern plate so that foreign matter such as bubbles can be extruded and removed even if it is mixed. A flexible material such as an acrylic plate is used as the substrate
It is characterized in that a relief pattern without defects can be duplicated.

FIG. 1 is for explaining the duplication method of the present invention. In FIG. 1A, a positive resist layer 2 is formed on a chrome mask 4 having a pattern 5 and a glass substrate 1. Dry plates 3 are placed opposite to each other, and a chrome mask 4
When exposed with UV light 6 from the side, the positive type resist is exposed except for the area of the pattern 5, and when developed, the exposed portion is removed and the relief pattern 7 is formed on the glass substrate 1 as shown in FIG. 1 (b). Once formed, the chrome mask 4 is duplicated. Of course, it is also possible to use a negative resist. The relief pattern may be a mirror surface and a rough surface, or may be a relief hologram or the like.

Then, as shown in FIG. 1C, the ultraviolet curable resin 9 is applied on the duplicated plate (original plate) and the acrylic substrate 8.
Are placed opposite to each other and exposed to UV light 6 from the acrylic substrate 8 side. At this time, a release layer 10 is applied on the acrylic substrate 8 outside the effective area. When the ultraviolet curable resin 9 is dropped, bubbles 11 and the like are mixed therein. However, when the original plate and the acrylic substrate 8 are brought into close contact with each other, the acrylic substrate 8 is flexible and warped as shown by a broken line. It can be extruded and removed by adhering it from the central part. Then, when the UV curable resin 9 is cured in a pattern by the UV light 6 to separate them, as shown in FIG. 1D, the acrylic substrate 8 is flexible and the release layer 10 is applied. Therefore, the acrylic substrate can be easily peeled off while warping. Further, the resin 9 on the release layer 10 is torn and can be easily removed, so that the end portion of the resin can be smoothed.

Next, an example of using a flexible acrylic substrate as an original plate will be described with reference to FIG. Figure 2 (a)
For example, a pattern 5 is placed on a glass substrate or the like to form a chrome mask 4, and a resist 2 is laminated thereon.
That is, since the chrome mask 4 is usually formed by vapor deposition or the like, a thickness of about 0.1 μm can be obtained at most.
In order to obtain a relief of about μm thickness, a resist is placed on it, and UV light 6 is irradiated from the substrate side to form a relief pattern having a predetermined thickness. Then, using this as an original plate, a plate M1 having a relief pattern 7 formed on an acrylic substrate 8 by the method shown in FIG. 1 is obtained (FIG. 2C). Further, this version M1 is used as an original plate, and FIG.
As shown in (d), a plurality of plates M2 on which a pattern made of an ultraviolet curable resin is formed are similarly formed on a flexible substrate, and M2 is used as an original plate in the same manner as in FIG.
A plurality of plates M3 as shown in (e) are formed. The plate M3 thus formed is used as an original plate, and a final product in which a pattern made of a resin layer is formed on a glass substrate is duplicated.

Thus, from the resist relief original plate whose substrate is glass, a plate having a pattern formed on a flexible substrate such as M1, M2, and M3 is sequentially duplicated to make an original plate, and a final plate having a glass substrate is prepared. By copying the product, for example, even when the plate M3 is damaged and cannot be used, the plate M2 can be used as the original plate, and even when the plate M2 cannot be used, the plate M1 can be used. When printing durability is lost, there is no need to newly prepare from the first resist relief plate, which saves labor, reduces cost, and enables mass production.

When replicating from a relief plate using such a flexible substrate, as shown in FIG. 3, the replica substrate 20 is made larger than the size of the effective region 21 to be replicated, and a primer is applied to the effective region 21. While applying
A mold release agent is applied to the outside of the effective area 22, the original plate 23 is brought into close contact therewith, and the resin is cured by UV exposure to separate the two. At this time, even if the resin 24 protrudes from the effective area 21, since the release agent is applied to the outside of the effective area 22, the duplication substrate 20 and the original plate 23 can be easily peeled off, or the protruding resin 24 is separated. Since the mold agent is applied, it can be easily removed by blowing air. Also,
Even on the side of the original plate 23, the amount of the resin 24 sticking out is relatively small. Even if the release agent is not applied to the outside of the effective area 22, if the primer is applied only to the effective area,
Since the resin hardly adheres to the outside of the effective area 22 where the primer is not applied, it is possible to deal with it by only applying the primer to the effective area.

Further, as shown in FIG. 4, a release agent is applied to the area 32 excluding the effective area 31 which is the pattern portion of the resin original plate 30, and a primer is applied to the entire surface of the duplication substrate 33 to uncured. You may make it laminate | stack by interposing resin of this. When the resin is cured by UV exposure and peeled off, the protrusion resin 34 of the original plate can be easily peeled off by blowing air, and can be used as a defect-free original plate for multiple times of duplication. Since the surface of the product is treated with a primer, the part corresponding to the pattern can be reproduced without any defect.

Further, as shown in FIG. 5, a plate 3 used as a duplicate original plate after being duplicated a plurality of times using a resin original plate
0 is set on the spinner chuck base 40 and IPA is set.
By cleaning with (isopropyl alcohol) cleaning liquid, foreign substances mixed in during the work can be removed, and the force for peeling the duplicated product from the original plate can be reduced. That is, instead of coating with a release agent, a plate 30, which is a replication original plate, is set on the spinner chuck table 40 with the pattern surface facing upward. For example, the first time is 700 rpm for 10 seconds, and the second time is 1500.
If the resin is rotated at rpm for 30 seconds, IPA is continuously dripped for the first few seconds, and then IPA is dripped for several seconds, the IPA can be rotated to remove foreign matter such as resin residue and dust adhering to the surface. After that, if the dropping of IPA is stopped and the rotation is continued, the IPA can be ejected.

In the above description, the case where the ultraviolet curable resin is used has been described, but the present invention is applicable to the case where the electron beam curable resin is used and the resin is irradiated with an electron beam to be cured. Needless to say.

[0014]

According to the present invention, a flexible material is used as a substrate for replication from a resist relief plate, the flexibility of the substrate is used to eliminate defects such as bubbles mixed during the production of the original plate, and the original plate and the duplicate substrate. The substrate can be easily peeled off because the substrate can be warped. Furthermore, by using a plate duplicated using a flexible substrate as an original plate for the next duplication, duplication can be easily performed even if the base material to be duplicated is a hard material. Further, by preparing a plurality of flexible original plates, it is not necessary to newly prepare from a resist relief plate when a defect occurs,
Cost can be reduced and labor can be saved. Further, it is possible to further enhance the peeling effect at the time of copying by applying a primer only to the effective area at the time of copying or by applying a release agent outside the effective area. Also, after performing duplicates multiple times, set the duplicate original plate on the spinner and wash it with IPA to remove foreign substances mixed in during the work, and to easily separate the duplicate from the original plate. It will be possible.

[0015]

EXAMPLE As shown in FIG. 1 (a), OFPR800 manufactured by Tokyo Ohka Co., Ltd. was used as a photoresist, and a positive photoresist layer was coated on a glass substrate 1 by a spinner method at 1500 revolutions / minute to obtain a relief. A hologram dry plate 3 was produced. Next, a chrome mask 4 made of an amplitude hologram having a pattern 5 in which the interference fringes were binarized was prepared, the chrome mask surface side of this mask was brought into close contact with the dry plate 3, and 40 mJ of UV light 6 was irradiated. After this,
The exposed dry plate was developed using NMD-3 manufactured by Tokyo Ohka Co., Ltd. as a developing solution to obtain a relief hologram developed with a relief pattern 7 as shown in FIG. 1 (b). Then, a protective film made of polyethylene-EVA (SPV-367 Nitto Denko) outside the effective area of the acrylic substrate 8 is laminated, a primer is applied only to the effective area by a spinner, and then the protective film is peeled off, and this time Release agent (Freon, 1,
3; MS-77, Daikin Industries, Ltd.). Then
The ultraviolet curable resin 9 was dropped on the acrylic substrate 8 to bring the resist original plate into close contact. Due to the adhesion of the resist original plate, the ultraviolet curable resin 9 is removed from the photoresist 7 portion, the ultraviolet curable resin 9 is filled between the photoresist patterns, and at the same time, foreign matter such as bubbles mixed in is caused by the flexibility of the acrylic substrate. It was pushed out and could be removed. In this state, 450 mJ of UV light 6 was irradiated from the acrylic substrate 8 side. Then, by peeling the flexible acrylic substrate side while warping it, it is possible to peel easily without resin residue on the glass substrate side,
A resin relief pattern was obtained on the acrylic substrate.
The obtained plate was irradiated again with ultraviolet rays to sufficiently cure (polymerize) the resin, and a flexible relief hologram lens was obtained.

[0016]

As described above, according to the present invention, it is possible to easily reproduce a relief pattern having no defect, and to re-produce the original plate when the original plate for final reproduction becomes unusable. It is extremely easy to manufacture and is extremely effective especially when used for hologram duplication and the like.

[Brief description of drawings]

FIG. 1 is a diagram illustrating a duplication method of the present invention.

FIG. 2 is an explanatory diagram of an example in which a resin plate is used as an original plate.

FIG. 3 is a diagram illustrating duplication from a relief plate using a flexible substrate.

FIG. 4 is a diagram illustrating duplication from a relief plate using a flexible substrate.

FIG. 5 is a diagram illustrating cleaning of a resin original plate.

FIG. 6 is a diagram illustrating copying of a conventional relief plate.

FIG. 7 is a diagram illustrating a problem of conventional relief plate duplication.

[Explanation of symbols]

1 ... Glass substrate, 2 ... Positive resist, 3 ... Dry plate, 4 ...
Chrome mask, 5 ... Pattern, 6 ... UV light, 7 ... Relief pattern, 8 ... Acrylic substrate, 9 ... UV curable resin, 10 ... Release layer, 20 ... Duplication substrate, 21 ... Effective area,
22 ... outside the effective range, 23 ... original plate, 24 ... resin.

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Claims (2)

(57) [Claims] 1. Either one of the original plate and the duplication substrate is flexible.
A reluctant, after both interposed an uncured ultraviolet-curable resin or electron beam curable resin between in close contact with, by irradiating ultraviolet rays or electron beam to cure the resin, of both full
In the duplication method that peels while curving the lexible side, the dimensions of the original plate or duplication substrate are set to the area of the duplication pattern.
Larger than the mold release area other than the duplicate pattern area
A method for replicating a relief pattern, characterized in that a relief agent is applied . 2. A method according to claim 1, wherein replication method of the relief pattern which comprises using the CFCs 1,1,3 as a release agent.