JP3368250B2 - Semiconductor manufacturing apparatus for removing foreign matter in semiconductor manufacturing - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for removing foreign matters such as flash burrs in a semiconductor integrated circuit after resin encapsulation and resin burrs after resin encapsulation. The present invention relates to a semiconductor manufacturing apparatus that removes foreign matters such as resin burrs after sealing.

[0002]

2. Description of the Related Art Foreign substances such as flash burrs in a semiconductor integrated circuit after resin encapsulation and resin burrs after resin encapsulation are removed by a worker after manually supplying water and using a brush for flash burrs and resin encapsulation. Foreign substances such as resin burrs are removed.

[0003]

The work of removing foreign matters such as flash burrs by hand and resin burrs after resin encapsulation takes time, resulting in variations in quality.

[0004]

In order to solve the above problems, there is provided a semiconductor manufacturing apparatus for automatically removing foreign matters such as flash burrs and resin burrs after resin encapsulation on behalf of a person.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION First, a lead frame in which a large number of semiconductor integrated circuits after resin sealing are arranged is housed in a magazine, a slide unit on the loader side is pulled out, and the magazine in which the lead frame is housed is set in a magazine housing BOX. .

The magazine set in the loader section is transported to a predetermined position by the magazine transport belt.

The lifter plate rises from the lower side of the magazine set at a predetermined position to project one work piece from the magazine.

The work is chucked by the mechanical chuck and transferred to the transfer rail.

The work transferred on the transfer rail is transferred to the position of the foreign matter removing unit by the work transfer arm.

For the work carried to the position of the foreign matter removing unit, the mask provided with the opening of the sealing resin portion projecting from the lower surface rises to fix the work.

Further, the upper surface of the work is pressed by the posture holding mechanism.

A brush attached to the tip of the motor rotates while being supplied with water, and presses it against the surface of the work while applying a constant pressure. Then, by laterally moving, foreign matters such as flash burrs and resin burrs after resin sealing are removed.

The work from which foreign matters such as flash burrs and resin burrs after resin sealing are removed is inserted into a dehydrating jig in the rotary drum by a work feeding arm.

Next, the shutter of the rotary drum is closed, the motor is rotated, and it is dried by centrifugation. Hot air is supplied to the rotary drum for centrifugal separation and drying with hot air.

When the drying process is completed, the shutter is opened and the work is clamped by the mechanical chuck and stored in the magazine of the unloader section.

The magazine is moved by a belt conveyor to a predetermined position. When the magazine inside the device is full, pull out the magazine storage section with the slide rail and take out the magazine.

The unit for supplying an empty magazine is such that the magazine storage section is pulled out from the main body of the apparatus by a slide rail.
Set an empty magazine. The magazine is moved to a predetermined position by a belt conveyor.

A unit for supplying the magazine of the loader section to the unloader and an empty magazine is provided at the rear of the apparatus, and the empty magazine of the loader section is moved to the unit for supplying the unloader section and the empty magazine by belt conveyance. Let

The water / liquid supply / drainage unit is provided with a water supply valve, a buffer tank, a drainage pump, and a drainage valve. The water is automatically supplied to the brush, and the drainage used for the brush is stored in the buffer tank. When it is full, it will drain automatically. Also, the water in the buffer tank can be supplied again to the brush to make it a circulation type.

[0020]

Embodiments of the present invention will now be described in detail with reference to the drawings.

FIG. 1 is a schematic diagram of a semiconductor manufacturing apparatus. The structure of the semiconductor manufacturing apparatus will be described with reference to FIGS. A buffer tank 7 is provided below the device main body 33 to serve as a water supply / drainage unit.

A loader section 30 capable of supplying and discharging the magazine 5 from the front of the apparatus, an empty magazine supply section 31, and an unloader section 32 are provided. Each unit is provided with a magazine transport conveyor 6 so that the magazine 5 can be moved to a predetermined position.

One work 2 is transferred from the magazine 5 moved to a predetermined position onto the transport rail 3 by the work transfer unit.

The work 2 transferred to the carrying rail 3 is carried to a foreign matter removing unit, and foreign matters such as flash burrs and resin burrs after resin sealing are removed by the brush 1.

The work 2 from which foreign matters such as flash burr and resin burr after resin sealing are removed is conveyed to a drying unit and dried by hot air and centrifugation.

The dried work 2 is unloader section 3
It is stored in magazine 2 of 2.

A magazine transfer unit for transferring the magazine 5 of the loader section 30 to the unloader section 32 and the empty magazine supply section 31 is provided at the rear of the apparatus.

Next, each unit will be described in detail.

The loader section 30 will be described with reference to FIGS. 3, 4 and 5.
Using. The magazine 5 set in the loader unit 30 is transported to a predetermined position by the magazine transport belt 8 driven by the magazine transport belt drive motor 21.

The lifter plate 10 is driven by the lifter motor 9 to move upward from below the magazine 5 set at a predetermined position, so that one work 2 is projected from the magazine 5.

The work 2 is clamped by the work chuck claw 12. The work chuck jaws 12 are driven by a chuck opening / closing motor 19 and a chuck opening / closing drive belt 15.

The upper surface of the work 2 is the work holding cylinder 1
It is pressed and fixed by a work presser 13 driven by 4.

The chucked work 2 is moved up and down by a chuck up / down drive shaft 18 driven by a chuck up / down motor 17.
And is conveyed by the work transfer drive belt 16 driven by the work transfer drive motor 11 to above the transfer rail 3.

Work 2 transported above the transport rail 3
Moves down, opens the work chuck jaws 12, and is transferred onto the transport rail 3.

The size of the magazine 5 for each product type can be changed by driving the magazine guide 23 by the magazine guide drive belt 22.

The mechanism of the loader section 30 is also provided in the unloader section 32. The empty magazine supply unit 31 is provided with only the mechanism of the magazine conveyor 6.

FIGS. 6 and 7 are drawings of the magazine storage box 24. A handle 25 and a slide unit 20 are attached to the magazine storage box 24 so that it can be pulled out. Magazine 5 is this magazine storage B
After being set in the OX 24, it can be put in and taken out from the loader unit 30, the unloader unit 32, and the empty magazine supply unit 31.

FIG. 8 is a detailed view of the work transfer section. The work 2 transferred on the transfer rail 3 is pushed by the work transfer arm 26 and is transferred on the transfer rail 3. The work transfer arm 26 includes a work transfer arm drive motor 2
It can be moved to the left and right by the work transfer arm drive belt 28 driven by 9, and can be moved up and down by the work transfer arm vertical cylinder 27.

FIG. 10 shows a foreign matter removing unit. The brush 1 is attached to a brush rotation motor 39 and can be rotated. Water supply nozzles 4 on both sides of the brush 1
1 is provided so that the brush 1 can be used in a wet state. In addition, a brush cover is provided around the brush 1 to prevent the water supply from scattering.

A brush pressurizing cylinder 35 is provided for pressurizing the brush 1, and a constant pressurization can be applied.

In order to move the unit of the brush 1 up and down, a brush vertical drive pulley 37 and a brush vertical drive motor 38 via a brush vertical drive shaft 36 are provided.

The brush 1 for removing foreign matters is provided with two systems to increase the takt time.

To remove foreign matters such as flash burrs and resin burrs after resin sealing, the brush 1 is pressed against the surface of the work 2 while rotating it, and a certain pressure is applied to the brush 1 so that the brush 1 can be used in a wet state. Alternatively, it is moved laterally while supplying the liquid.

The foreign matter removing unit is provided with a posture holding mechanism unit for keeping the posture of the work. The posture holding mechanism will be described with reference to FIG.

A work holding plate 43 is provided in which the work holding roller 44 is arranged in the longitudinal direction of the work 2, and the pressure of the work holding roller 44 is given by the work holding spring 42. Thereby, the posture of the work 2 can be maintained.

Next, the work fixing mask 45 will be described with reference to FIGS. A work fixing mask 45 having an opening hole 46 corresponding to the size of the sealing resin 48 of the lead frame 47 is provided immediately below the work 2 in order to apply a uniform surface pressure when removing foreign matter and fix the position of the work 2. .

Next, the drying unit will be described with reference to FIGS. 14 and 15. The work 2 from which foreign matters such as flash burrs and resin burrs after resin sealing are removed is the transfer rail 3
Then, the work feeding arm 51 inserts the work into the dehydration jig 50 in the rotary drum 49.

Next, the shutter 52 of the rotary drum 49 is closed and rotated by the rotary drum drive motor 53, and the product is dried by centrifugation. Warm air is supplied from the warm air supply duct 54 into the rotary drum 49 to perform centrifugal separation and drying with warm air.

When the drying process is completed, the shutter 52 is opened and the work 2 is clamped by the work chuck claws 12 and stored in the magazine 5 of the unloader section 32. This movement is the same as the work transfer method described in the description of the loader unit 30.

Next, the magazine transfer unit will be described with reference to FIG. The magazine transfer unit is arranged behind the device. The magazine 5 of the loader unit 30 positions a magazine positioning plate driven by a magazine positioning drive motor.

Then, chucking is performed by the finger arm 63. The finger arm 63 is driven forward and backward by the finger arm advance cylinder 62, the chuck is opened and closed by the finger arm chuck cylinder 61, and the chuck is vertically moved by the finger arm vertical cylinder 58.

The chucked magazine 5 is raised by the finger arm upper and lower cylinders 58, the magazine moving belt 59 is driven by the magazine moving motor 60, and conveyed to the empty magazine supply unit 31 or the unloading unit 32.

With this mechanism, the magazine 5 emptied in the loader section 30 can be used as the magazine 5 for storing the work 2 in the unloader section 32, and the magazine 5 in the unloader section 32 becomes insufficient. In this case, it becomes possible to supply the magazine 5 from the empty magazine supply unit 31.

The water supply / drainage unit will be described with reference to FIG. The water supply 73 is a valve B68 for controlling the water supply nozzle 41 and a valve A65 for controlling the buffer tank 7.
Divided into

The water supply system further includes a valve D70 for controlling the drainage 66 and a valve E7 for controlling the water supply nozzle 41.
Divide into 1. Next to the valve E71, the flow rate adjustment valve 72
Is provided. By adjusting the flow rate adjusting valve 72, the flow rate of the water supply nozzle 41 can be adjusted, and the wet state of the brush 1 can be adjusted.

The drainage system is drained from the buffer tank 7 through the drainage pump 64 and the valve C69.

As a normal flow of water supply / drainage, it reaches the water supply nozzle 41 from the water supply 73 through the valve B68, the valve E71 and the flow rate adjusting valve 72.

The water or liquid discharged from the water supply nozzle 41 is discharged to the buffer tank 7 via the drain pan 67.

The water or liquid in the buffer tank is sucked up by the drainage pump 64, the valve C69 is opened, and is drained to the drainage 66. At this time, the valve D70 must be closed.

Valve C69 is closed and valve D70 is
When is opened, the water or liquid in the buffer tank is supplied again to the water supply nozzle 41, and the circulation type is achieved.

With the above structure, it is possible to automatically remove foreign matters such as flash burrs and resin burrs after resin sealing.

Further, in the present invention, the brush 1 is pressed against the workpiece 2 to rotate and move, but it is not always necessary to press the flat surface, and the circumferential surface of the brush 1 may be pressed. . Further, the work 2 may be moved without moving the brush 1.

[0063]

The work time can be shortened by automating the work of removing foreign matters such as flash burrs by hand and resin burrs after resin sealing.

Since the pressing of the brush is made constant and the amount of water supply for making the brush wet can be made constant, it is possible to eliminate foreign matter removal defects such as flash burrs and resin burrs after resin sealing. This can improve the quality.

Furthermore, since the foreign matters such as the removed flash burrs and resin burrs after resin sealing can be automatically collected, reattachment to the work can be prevented.

Since a magazine can be circulated by providing a loader section, an unloader section, an empty magazine supply section, and a magazine transfer unit, automatic operation can be performed with a minimum number of magazines.

Since slide units are provided in the loader section, unloader section, and empty magazine supply section so that they can be pulled out, the magazines can be supplied and taken out during operation.

A buffer tank is provided between water supply and drainage,
Energy can be saved because the water supply and drainage can be circulated.

[Brief description of drawings]

FIG. 1 is a schematic diagram of an apparatus for removing foreign matters such as flash burrs and resin burrs after resin sealing according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of an apparatus for removing foreign matters such as flash burrs and resin burrs after resin sealing according to an embodiment of the present invention.

FIG. 3 is a side view of a magazine transport conveyor of an apparatus for removing foreign matters such as flash burr and resin burr after resin sealing according to an embodiment of the present invention.

FIG. 4 is a front view of a magazine transport conveyor of an apparatus for removing foreign matters such as flash burr and resin burr after resin sealing according to an embodiment of the present invention.

FIG. 5 is a guide view of a magazine transport conveyor of an apparatus for removing foreign matters such as flash burr and resin burr after resin sealing according to an embodiment of the present invention.

FIG. 6 is a plan view of the magazine housing portion of the apparatus for removing foreign matter such as flash burr and resin burr after resin sealing according to the embodiment of the present invention.

FIG. 7 is a front view of the magazine housing portion of the apparatus for removing foreign matter such as flash burr and resin burr after resin sealing according to the embodiment of the present invention.

FIG. 8 is a detailed view of the work transfer unit of the apparatus for removing foreign matters such as flash burrs and resin burrs after resin sealing according to the embodiment of the present invention.

FIG. 9 is a plan view of the main body of an apparatus for removing foreign matter such as flash burr and resin burr after resin sealing according to the embodiment of the present invention.

FIG. 10 is a detailed view of a foreign matter removing unit of the apparatus for removing foreign matter such as flash burr and resin burr after resin sealing according to the embodiment of the present invention.

FIG. 11 is a detailed view of the work posture holding mechanism of the apparatus for removing foreign matters such as flash burr and resin burr after resin sealing according to the embodiment of the present invention.

FIG. 12 is a work-fixing mask diagram of an apparatus for removing foreign matters such as flash burrs and resin burrs after resin sealing according to the embodiment of the present invention.

FIG. 13 is a work diagram according to the embodiment of the present invention.

FIG. 14 is a plan view of a drying unit of an apparatus for removing foreign matters such as flash burrs and resin burrs after resin sealing according to an embodiment of the present invention.

FIG. 15 is a front view of a drying unit of an apparatus for removing foreign matters such as flash burr and resin burr after resin sealing according to an embodiment of the present invention.

FIG. 16 is a detailed view of a magazine transfer unit of the device for removing foreign matters such as flash burr and resin burr after resin sealing according to the embodiment of the present invention.

FIG. 17 is a detailed view of the water supply / drainage unit of the device for removing foreign matters such as flash burr and resin burr after resin sealing according to the embodiment of the present invention. 1 Brush 2 Work 3 Transfer Rail 4 Work Transfer Unit 5 Magazine 6 Magazine Transfer Conveyor 7 Buffer Tank 8 Magazine Transfer Belt 9 Lifter Motor 10 Lifter Plate 11 Work Transfer Drive Motor 12 Work Chuck Claw 13 Work Presser 14 Work Presser Cylinder 15 Chuck Open / close drive belt 16 Work transfer drive belt 17 Chuck vertical motor 18 Chuck vertical drive shaft 19 Chuck open / close motor 20 Slide unit 21 Magazine transport belt drive motor 22 Magazine guide drive belt 23 Magazine guide 24 Magazine storage box 25 Handle 26 Work transport arm 27 Work transfer arm vertical cylinder 28 Work transfer arm drive belt 29 Work transfer arm drive motor 30 Loader section 31 Empty magazine supply section 32 Loader unit 33 Device body 34 Water supply pipe 35 Brush pressurizing cylinder 36 Brush up / down drive shaft 37 Brush up / down drive pulley 38 Brush up / down drive motor 39 Brush rotation motor 40 Brush cover 41 Water supply nozzle 42 Work holding spring 43 Work holding plate 44 Work holding roller 45 Work Fixing Mask 46 Opening Hole 47 Lead Frame 48 Sealing Resin 49 Rotating Drum 50 Dehydrating Jig 51 Work Feeding Arm 52 Shutter 53 Rotating Drum Driving Motor 54 Hot Air Supply Duct 55 Exhaust Duct 56 Magazine Positioning Plate 57 Magazine Positioning Driving Motor 58 Finger arm up / down cylinder 59 Magazine moving belt 60 Magazine moving motor 61 Finger arm chuck cylinder 62 Finger arm advance cylinder 3-finger arm 64 drainage pump 65 valve 1 66 drainage 67 drain pan 68 Valve 2 69 valve 3 70 valve 4 71 valve 5 72 flow regulating valve 73 Water

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yutaka Murakami 1705-1 Saya, Sui-cho, Kasuya-gun, Fukuoka Prefecture (56) References JP-A-59-158528 (JP, A) JP-A-1-164550 (JP) , A) JP 1-184837 (JP, A) JP 63-62331 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01L 21/56 H01L 23/00- 23/10 H01L 23/28 H01L 23/30

Claims (4)

(57) [Claims] 1. A foreign matter removing apparatus in semiconductor manufacturing for removing foreign matter such as flash burrs and resin burrs after resin sealing by supplying water or liquid and pressing the brush while rotating it, in order to maintain the posture of the work. A semiconductor manufacturing device equipped with a stabilizer mechanism by arranging a bearing in the longitudinal direction of a work and applying a pressure to the work. 2. A position fixing is performed so that a sealing resin portion of a lead frame on which a large number of semiconductor integrated circuits after resin sealing are arranged enters a mask opening having an opening matching the size of the sealing resin. The semiconductor manufacturing apparatus according to claim 1, further comprising: 3. A loader section for supplying a magazine containing a semiconductor integrated circuit after resin sealing, an unloader for discharging a magazine containing a semiconductor integrated circuit after resin sealing, and a unit for supplying an empty magazine. The semiconductor manufacturing apparatus according to claim 1. 4. The semiconductor manufacturing apparatus according to claim 1, further comprising a slide unit for taking out a magazine of a loader section, an unloader section, and a unit section for supplying an empty magazine during operation of the apparatus.