JP3385976B2 - Floor structure, floor parts, floor unit and transport system for tracked bogie - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floor structure, a floor component, a floor unit and a transfer system for a rail guided vehicle for laying rails on a grating floor of a clean room or the like for running the rail guided vehicle. is there.

[0002]

2. Description of the Related Art Generally, in a clean room, a floor is formed by spreading a plurality of gratings at a predetermined height from a bottom floor (concrete surface or the like). The floor made of grating contributes to the cleaning in the clean room by ventilating the airflow downflowing from the ceiling in the cleanroom and sending the airflow to the exhaust duct on the back side of the floor. On the other hand, in factories and the like, an unmanned transport vehicle (hereinafter simply referred to as a transport vehicle) may be used to transport the articles. Carrier vehicles include tracked vehicles that travel along tracks such as rails. For example, if a guided vehicle is used to convey articles in a clean room, the conveyance work can be unmanned in the semiconductor manufacturing process.

[0003]

In order to drive the track guided vehicle, it is necessary to lay a rail on which the track guided vehicle travels on the floor. However, since the floor of the clean room is formed by spreading the grating as described above, it is necessary to carry out a work such as cutting and working for welding and welding. In addition, since the strength of the joint between the rail and grating is insufficient, it is necessary to support and reinforce the rail, or to prevent the rail from becoming a protrusion from the floor and hindering the walking of workers, When laying in a buried state, there was a problem that construction of rails would be a large-scale work, such as building columns for rails from the bottom floor.

The present invention has been made to solve the above problems, and a first object thereof is to provide a floor structure for a track guided vehicle, which can easily carry out the work of laying rails of the track guided vehicle on a grating floor. , Floor parts, floor units and transport systems. A second object of the present invention is to simplify the laying work of the rail as well as the laying work of the rail when the track guided vehicle is of the belt traveling drive type.

[0005]

In order to achieve the first object, the invention according to claim 1 is a floor for a track guided vehicle for laying a rail forming a running track of the track guided vehicle on a grating floor. A structure, wherein a plurality of bridges are bridged in a direction intersecting with the traveling track in a state of being directly or indirectly supported by a column provided to support grating, A rail component constituting the rail is placed, and a plurality of floor plates are placed so as to fill a gap between the rail components in the array area of the bridge.
Directly supported by the pillars in the state that they are bridged between the pillars.
And the floor board is in the front in the longitudinal direction of the rail.
The length of the grating is a natural number times the length of one side .

[0006] In the invention described in claim 2, the track guided vehicle
To lay rails that form the running track on the grating floor
Floor structure for rail guided trucks, supporting grating
Supported directly or indirectly on a post provided to
Crossing multiple bridges with the running track
In the direction of the bridge,
The rail parts that make up the rail are placed,
Between the rail parts in the array area of the bridge
Multiple floor boards are placed to fill the gap and
Engagement part is formed on the corner to position the rail part
Has been done.

[0007] In the invention described in claim 3, the track guided vehicle
To lay rails that form the running track on the grating floor
Floor structure for rail guided trucks, supporting grating
Supported directly or indirectly on a post provided to
Crossing multiple bridges with the running track
In the direction of the bridge,
The rail parts that make up the rail are placed,
Between the rail parts in the array area of the bridge
Multiple floor boards are placed to fill the gap and
Ji is directly supported on the pillars while being bridged between the pillars.
The floorboard is held in the longitudinal direction of the rail.
And has a length that is a natural number times the length of one side of the grating.
The rail parts on the bridge.
Therefore, an engaging portion is formed.

According to the invention described in claim 4, claims 1 to 3 are provided.
In the invention of any one of above, the rail is the gray
It extends linearly in the direction in which the
Width end position and width in the width direction of the ridge array area
The floorboard is located at at least one of the division positions.
Are all the same size. According to a fifth aspect of the present invention, in the invention according to any one of the first to fourth aspects, the track guided vehicle is a belt traveling drive system that travels using a belt stretched along the rail, Positioning mechanisms for positioning both ends of the belt are provided on both sides of the rail in the longitudinal direction.

According to a sixth aspect of the present invention, there is provided a floor component arranged on one end side in the longitudinal direction of the rail for laying the belt of the track guided vehicle according to the fifth aspect along the rail, the floor component comprising: A drive pulley for winding the belt and a power source for driving the drive pulley to rotate are attached to a flooring material which has the same size as the grating and can be supported by the support column at four corners.

According to a seventh aspect of the present invention, there is provided a floor component arranged on one end side in the longitudinal direction of the rail for laying the belt of the track guided vehicle according to the fifth aspect along the rail, the floor component comprising: A driven pulley around which a belt is wound is attached to a floor material that has the same size as the grating and can be supported by the column.

According to an eighth aspect of the present invention, the floor unit includes the bridge, the rail component and the floor plate, which are the components of the floor structure according to any one of the first to fifth aspects. 6 and the both floor parts according to claim 7.

According to a ninth aspect of the present invention, in the transport system, the tracked carriage is allowed to travel on the rail laid by the floor structure according to any one of the first to fifth aspects. It has been deployed.

According to a tenth aspect of the present invention, in the ninth aspect of the present invention, in the transport system, the tracked carriage is of a belt traveling drive type, and the traveling floor of the traveling unit is the traveling floor using the floor unit of the eighth aspect. It has been laid.

According to an eleventh aspect of the present invention, in the ninth or tenth aspect of the present invention, the transport system includes a housing for covering a traveling area of the track guided vehicle, and a cleaning device for cleaning the inside of the housing. Is provided.

(Operation) Therefore, according to the first aspect of the invention, the plurality of bridges are directly or indirectly supported by the grating columns, so that a large number of bridges are arranged in a direction intersecting the traveling track. Be done. A rail is formed by placing rail components on a multi-row bridge so as to draw a traveling track. The gap between the rail parts is filled with a floorboard placed on the bridge. The bridge is also bridged between the columns. Floorboard
Is one side of the grating in the longitudinal direction of the rail.
Because it is several times longer than the natural length, it is supported by the bridge at both ends.
Be done.

According to the second aspect of the invention, a plurality of blocks are provided.
The ridge is supported directly or indirectly on the grating post.
By being held, it can be mounted in multiple rows in the direction that intersects the running track.
Passed. Rail parts run on bridges with multiple rows
The rails are formed by placing them so as to draw. Les
The clearance between the base parts is determined by the floor board placed on the bridge.
Buried. Also, rail parts were formed on the bridge
By engaging with the engaging part, the correct position to draw the running trajectory
It is positioned in the table.

According to the invention described in claim 3, a plurality of blocks are provided.
The ridge is supported directly or indirectly on the grating post.
By being held, it can be mounted in multiple rows in the direction that intersects the running track.
Passed. Rail parts run on bridges with multiple rows
The rails are formed by placing them so as to draw. Les
The clearance between the base parts is determined by the floor board placed on the bridge.
Buried. The bridge is also bridged between the columns.
Floor plate is one side length of grating in the longitudinal direction of the rail
Since it is a natural multiple of the length, it is supported on the bridge at both ends.
Be held. In addition, rail parts were formed on the bridge
By engaging with the engaging part, the correct position to draw the running trajectory
It is positioned in the table.

According to the invention described in claim 4, the bridge
Since the rails are linear in the array area of
Will extend in the direction of arrangement of the ring. Rails are the array
For the area, the width end position and width equal division position in the width direction
Located in at least one of the above. For this reason, all
You can use the same size floorboard to fill the rail gap.
It will be possible. According to the invention described in claim 5, the belt used for traveling by the track guided vehicle that is a belt traveling drive system is configured such that both ends are positioned by positioning mechanisms provided on both sides in the longitudinal direction of the rail. Stretched along.

According to the invention described in claim 6, by assembling the floor part in the area on the one end side in the longitudinal direction of the rail to the pillar at the four corners of the floor material in the same manner as the grating, the floor part is preassembled to the floor material. The attached drive pulley and its power source are arranged at a predetermined position on one end side in the longitudinal direction of the rail.

According to the invention as set forth in claim 7, the floor parts are pre-assembled to the floor material by assembling the floor parts to the pillars at the four corners of the floor material in the area on one end side in the longitudinal direction of the rail in the same manner as the grating. The driven pulley attached is arranged at a predetermined position on one end side in the longitudinal direction of the rail.

According to the invention of claim 8, claim 1
By using the bridge, the rail component, and the floor plate according to any one of claims 5 to 5, the rail is laid using the pillar for grating. Various parts such as a pulley and a power source necessary for winding and rotating a belt used for traveling a track guided carriage of a belt traveling drive system are the floor parts according to claim 6 and claim 7 in the longitudinal direction of the rail. By arranging them on both sides in the direction while being supported by the columns, they are correctly arranged at the predetermined positions.

According to the invention described in claim 9, the transport system comprises a traveling floor on which rails are laid by the floor structure according to any one of claims 1 to 5, and a rail on the traveling floor. It is composed of a tracked truck that has been deployed. The work to deploy the transport system on the grating floor is easy.

According to the tenth aspect of the present invention, when the rail guided vehicle is provided with a belt traveling drive type transport system on the grating floor, the construction of the traveling floor is carried out.
It is performed using the floor unit described in, and rail laying work and belt laying work are easy.

According to the eleventh aspect of the present invention, the guided vehicle travels in a traveling area in the housing kept clean by the cleaning device. Therefore, in this transport system, the load transported by the guided vehicle is kept clean.

[0025]

BEST MODE FOR CARRYING OUT THE INVENTION (First Embodiment) A first embodiment of the present invention will be described below with reference to FIGS.

FIG. 12 shows a plan view of the clean room. The floor 2 of the clean room 1 is a grating floor in which a large number of gratings 3 are spread over almost one surface.
In the clean room 1, various facilities 4 and 5 used for semiconductor manufacturing are installed on the floor. A transfer system 7 is provided in the clean room 1 for transferring a load 6 such as a semiconductor wafer between the two facilities 4 and 5.

As shown in FIGS. 13 and 14, the transport system 7 includes a guided vehicle 8 (shown in FIG. 13) as a guided vehicle.
The housing 9 has a rectangular parallelepiped shape that surrounds the entire traveling area. The housing 9 is formed of a transparent plate material (for example, a transparent resin plate or a glass plate) on its side surface so that the position of the transport vehicle 8 and its working condition can be seen from the outside. The housing 9 is configured by connecting a plurality of house units 10 in the longitudinal direction, and a plurality of fan filter units 11 as cleaning devices arranged for each house unit 10 are arranged at regular intervals above the housing unit 10. . The fan filter unit 11 blows clean air into the housing 9 through a filter (neither is shown) by a fan,
It serves to keep the cleanliness of the traveling area in which the load 6 is conveyed higher than the cleanliness in the clean room 1 outside the housing 9. The length of one house unit 10 is twice the length of one side of the grating 3.

A passage 12 is provided near the center of the housing 9 in the longitudinal direction to cross the traveling area.
An operator can pass through the housing 9 through the passage 12 by opening the door 13. An operation panel 14 is installed at one longitudinal end of the housing 9,
By operating the panel of the operation panel 14, operation control of the carrier vehicle 8 and its setting can be performed.

Each grating 3 is supported at four corners on a large number of pillars 16 standing on the concrete surface 15 (see FIG. 11), and the floor 2 is formed at a predetermined height from the concrete surface 15. The pillars 16 are erected on the entire area of the concrete surface 15 at positions corresponding to the four corners of the grating 3 at intervals substantially equal to the length of one side thereof.

As shown in FIG. 10, the transport vehicle 8 includes pulleys 17, 18, 19, arranged at both ends of the traveling area.
A running belt (timing belt) 21 as a belt stretched along a running track by being wound around 20
Both ends of the are fixed to the bottom of the traveling platform 22. The traveling belt 21 rotates when a traveling motor 23 as a power source arranged on the floor side is driven and the drive pulley 17 is rotationally driven. That is, the transport vehicle 8 adopts a belt traveling drive system in which the traveling belt 21 travels along a track in a predetermined direction according to the rotation direction when the traveling belt 21 rotates in the forward or reverse direction. As shown in FIGS. 9 and 10, the carriage 22 has four corners at the bottom four corners.
One traveling wheel 24 is rotatably provided, and a pair of front and rear guide rollers 25 are rotatably provided at a position sandwiched by the front and rear traveling wheels 23 along a bottom width center line thereof. The pulleys 17 to 20 form a positioning mechanism.

As shown in FIGS. 9 and 11, one concave guide rail 26 is laid in the center of the traveling area, and two traveling rails 27 are equidistant from both sides of the guide rail 26. It has been laid. The transport vehicle 8 is arranged so that the four traveling wheels 24 are mounted on the traveling rails 27 and the guide rollers 25 are fitted in the recesses of the guide rails 26 so that the vehicle 8 can travel. The guide rail 2
6 and the traveling rail 27 constitute rails.

As shown in FIG. 10, the height of the traveling belt 21 is two guide pulleys 18, 19 and the driven pulley 2.
It is positioned by being guided by 0. The traveling belt 21 includes an upper guide pulley 18 and a driven pulley 20.
The upper portion guided between and is accommodated in the concave portion of the guide rail 25 (see FIG. 9) and is disposed at a height substantially flush with the floor 2. In addition, the lower guide pulley 19
Running belt 21 guided between the driven pulley 20 and the driven pulley 20.
The lower part passes through the back side of the floor 2 (see FIG. 13).

As shown in FIGS. 9 and 10, a cargo receiving base 28 is erected on the traveling base 22. The loading platform 28 has a frame structure, and a loading platform 29 on which the load 6 is loaded is formed on the upper portion.
As shown in FIG. 13, sensors 30 for detecting workers and foreign objects in the traveling area are provided at both ends of the housing 9, but since the cargo receiving table 28 has a frame structure, the sensors 30 emit light. The detected light thus detected does not pass through the gap of the receiving tray 28 and is not blocked.

This embodiment is characterized by the floor structure of the running area. The structure will be described below with reference to FIGS. 1 to 8 and 11. As shown in FIG. 11, the floor structure of the traveling area is obtained by assembling the components of the floor unit 31 instead of the grating 3 in the traveling area.
A running floor 32 having rails 26 and 27 is laid by using a pillar 16 prepared in advance for grating.

The floor unit 31 includes a group of parts for assembling a track area on which the rails 26 and 27 are laid, and a set of floor parts 33, which are arranged on both sides of the track area for attaching the traveling belt 21. And 34. The floor component 33 is configured by previously assembling necessary components such as the traveling motor 23 and the drive pulley 17 integrally with a floor material 35 having the same size as the grating. Further, the floor component 34 is such that the driven pulley 20 has a floor material 36 of the same size as the grating in advance.
It is constructed by being integrally assembled with. That is, each floor part 3
3 and 34 are floor materials 35 and 36 of the same size as the grating 3.
Necessary parts are pre-unitized. On the other hand, the group of parts used for assembling the track area includes a bridge (bridging material) 37, a guide rail part 38, a traveling rail part 39, and a floor board 40, each of which is required in number in accordance with the length of the track area. The guide rail component 38 and the traveling rail component 39 form rail components.

Grating 3 used in this embodiment
Is a regular quadrangle having a side length L of about 60 cm. For this reason, columns 16 are erected on the concrete surface 15 at intervals of about 60 cm. In addition, the upper end of the pillar 16 is 4
The book pin 16a is formed so as to project upward. The grating 3 of this example is positioned by inserting the pins 16a into the pin holes (not shown) at the four corners of the grating 3, and the bolts are screwed into the screw holes at the center of the pin 16a from the surface side to the support 16. Fixed.

First, the floor structure of the track area will be described with reference to FIGS. The bridge 37, which has a length substantially equal to one side of the grating 3, is spanned between all the pillars 16 forming a pair in the width direction of the track area as shown in FIGS. 1 and 11, and is constant in the longitudinal direction of the track area. Many columns are arranged at intervals. The bridges 37 are arranged in a direction intersecting the running track (in this example, a direction perpendicular to the running track). Then, the rail parts 38, 39 and the floor plate 40 are attached to the bridges 37 in a large number of rows while being supported by the lower surface thereof.

The floor plate 40 is formed such that its length in the longitudinal direction (longitudinal direction of the rail) is a natural number multiple of the length L of one side of the grating 3, and in particular, this embodiment has a double length 2L. There is. In this way, by setting the long side to have a length n · L (where n is a natural number) that is a natural number multiple of one side of the grating 3, it is possible to fix the bridge 37 at both ends in the longitudinal direction with screws or the like. In addition, the short side has three rail parts 38, 39.
The length is half the value obtained by subtracting the total length of the widths of the three rail components 38 and 39 from the length of one side of the grating 3 so that the gap can be arranged so as to fill the gap.

The length of each rail component 38, 39 is a natural multiple of the length of one side of the grating 3. In this example, the length of each rail component 38, 39 is formed longer than the long side length 2L of the floor plate 40, and is set to, for example, double the length 4L. The rail component 38 and the rail component 39 may have the same length or different lengths. Each rail part 38,
The length 39 is preferably long in consideration of the labor of assembling work and rattling of the transport vehicle 8 at the connection point, but it is preferable to select an appropriate size in consideration of ease of transport.

A large number of circular holes 40a are formed in the floor plate 40 in substantially the entire area except a part of both ends in the longitudinal direction. Also,
Circular holes 38a are formed on the bottom surface of the recess of the guide rail component 38 at regular intervals in the longitudinal direction. Circular holes 40a, 38a formed in the floor plate 40 and the guide rail component 38
Is for releasing the air blown out from the fan filter unit 11 to the back side of the running floor 32 by using the suction force of the exhaust duct. Further, since the circular hole 38a is provided on the bottom surface of the recess of the guide rail component 38, it is possible to prevent dust from accumulating on the bottom surface of the guide rail.

2 and 3 are sectional views of the running floor 32.
Two pin holes 37 a having substantially the same structure as those formed at the four corners of the grating 3 are formed at both ends of the bridge 37. The bridge 37 is positioned with respect to the support 16 by inserting the pins 16a into the pin holes 37a at both ends, and bolts 41 are attached to the pins 16a from the surface side thereof.
By being screwed on, it is fixed in a state of being positioned with respect to the column 16.

Projections 37b are formed on the upper surfaces of both ends of the bridge 37.
Is formed, and the traveling rail component 39 is fitted in the convex portion 37b at the concave portion on the back surface. Since the head portion of the bolt 41 is buried in the convex portion 37b so as to be flush with the upper surface thereof, the traveling rail component 39 abuts the entire upper surface of the convex portion 37b and is arranged horizontally. As shown in FIG. 2, a recess 37c is formed at the center of the bridge 37 in the longitudinal direction, and the guide rail component 38 is fitted in the recess 37c. The rail parts 38 and 39 are fixed to the bridge 37 at a plurality of points by screwing screws 42 and 43 onto the bridge 37 from the front surface side. Further, the bridges 37 arranged at both ends of the track area are formed to have a half width.

Both side edges of the floor plate 40 are bent at a right angle to the back side. Cylindrical support parts 40b are welded to both ends in the longitudinal direction of the back surface of the floor plate 40, and the floor plate 40 is fixed to the bridge 37 by screwing a screw 44 inserted into a hole of the support part 40b into the bridge 37. Has been done.
Further, the aluminum bridge 37 is lightened by reinforcing the strength with ribs 37d to reduce the wall thickness. Further, the bridge 37 is formed with two holes 37e penetrating in the longitudinal direction of the rail. Power supply lines and signal lines (not shown) necessary for various sensors and various electric devices for controlling the traveling of the transport vehicle 8 are wired on the back surface of the traveling floor 32 and, for example, inserted into these holes 37e. Supported by.

Next, the structure of the floor parts 33 and 34 will be described.
First, the floor part 33 on the drive side will be described. 4 to 6
As shown in FIG. 3, the flooring material 35 has a regular square shape with one side length L and has the same size as the grating 3, and has screw holes (not shown) similar to those of the grating 3 at four corners. The floor parts 33 are arranged so that the pins 16a are inserted into the pin holes at the four corners of the floor material 35, and the bolts B (shown in FIG. 4) from the surface side.
By being screwed onto the pin 16a, it is assembled to the support column 16 in a fixed state. Necessary parts such as the traveling motor 23, the drive pulley 17, the guide pulleys 18 and 19, and the fan filter unit 45 are previously integrally assembled to the floor material 35.

The traveling motor 23 is supported on the upper surface of the floor member 35 by using a supporting member 46, and its drive shaft is driven by the drive pulley 17.
Are connected. The pulleys 17 to 19 are arranged on the extension line of the width center of the guide rail 26 so that the respective width center lines are located in the same plane. That is, the floor material 35 is formed with a notch 35a connected to the recess of the guide rail 26 and extending along the extension thereof, and the pulleys 17 to 19 are arranged at positions corresponding to the notch 35a. The upper guide pulley 18 is rotatably supported by a support portion 47 attached to the notch 35a so as to extend upward, and the lower guide pulley 19 is notched 35.
It is rotatably supported in a state in which it is inserted into the notch 35a by a support portion 48 attached to the portion a so as to extend downward.

A plurality of circular holes 35b are formed in the floor material 35, and two support arms 49 are provided on the upper surface thereof.
Is attached. A cover 50 (shown in FIGS. 4 and 6) is attached to the floor part 35, and the traveling motor 23 and each pulley 17 are provided.
~ 19, fan filter unit 45 and each circular hole 35
It is attached in a state of being supported by the two support arms 49 so as to cover b. The traveling motor 23 and each pulley 17 to
The dust generated in the sliding portion of 19 is not discharged to the outside of the cover 50, but is discharged to the bottom of the floor material 35 by the fan filter unit 45. Note that FIG.
The guide pulley 18 is omitted in FIG.

Next, the floor part 34 on the driven side will be described. As shown in FIGS. 7 and 8, the floor material 36 has a regular square shape with a side length L and has the same size as the grating 3, and has screw holes (not shown) similar to those of the grating 3 at the four corners.
Have. The floor part 34 is arranged so that the pins 16a are inserted into the pin holes at the four corners of the floor material 36, and the bolt B is inserted from the front side.
By screwing (shown in FIG. 7) onto the pin 16a, the pillar 16 is assembled in a positioned state. Flooring 36
Is formed with a notch 36a which is connected to the recess of the guide rail 26 and extends along the extension thereof, and a large number of circular holes 36b are formed in substantially the entire central portion except the frame member 51 formed in the peripheral portion of the lower surface thereof. Are formed.

A support portion 52 extending downward is attached to the floor member 36 at the end of the notch 36a, and the driven pulley 20 is rotatably supported by the support portion 52 while being inserted into the notch 36a. . The driven pulley 20 is arranged such that its upper surface is located at substantially the same height as the lower surface of the guide pulley 18 provided on the floor part 33 on the driving side, and its lower surface is at the same height as the lower surface of the guide pulley 19. There is. Therefore, the traveling belt 21 is attached so that the upper and lower portions thereof extend in parallel with each other in the track area. A cover 53 that covers the driven pulley 20 is attached to the upper surface of the floor material 36, and the dust generated at the sliding portion of the driven pulley 20 is discharged only below the floor material 36 because of the cover 53. In FIG. 7, the traveling belt 2
1 is omitted.

Running floor 3 for deploying transport system 7
The second floor work is performed as follows. The components of the floor unit 31 are attached to the traveling area in place of the grating 3 by using the columns 16.

First, a large number of bridges 37 are provided in the track area.
Are laid across two columns 16 that form a pair in the width direction of the traveling area, and are arranged at constant distances L in the longitudinal direction of the traveling area. Each bridge 37 has pin holes 37a at both ends.
For the pin 16a inserted in the
It is fixed to the column 16 by screwing.

With respect to a large number of bridges 37 arranged in a row in the track area at every distance L, the convex portions 37 at both ends in the width direction are provided.
The traveling rail parts 39 are fitted to b, and the traveling rail parts 39 are vertically aligned in two rows at both end positions in the width direction of the track area so as to be connected to one, thereby forming two traveling rails 27. In addition, the recessed portion 3 located at the center of the lodge 37 in the width direction
The guide rail component 38 is fitted to 7c, and the guide rail components 38 are connected in one row by arranging the guide rail components 38 in a row in the width center position of the track area to form one guide rail 26. Each rail part 38, 39 is fixed to the bridge 37 at a plurality of points using screws 42, 43.

Two rows of gaps are formed between the two guide rails 26 on both sides of the guide rail 26, and the floor plate 40 is provided in each of these two rows of gaps with the long side direction being the longitudinal direction of the traveling area. Are arranged vertically in a vertical direction, and the floor boards 40 are laid in the spaces between the two rows. Each floor board 40 is fixed to the bridge 37 by using screws 44 at both ends in the longitudinal direction. Thus, the portion of the track area of the running floor 32 is completed.

Next, the floor parts 33 and 34 are assembled to both ends of the running area, that is, both sides in the longitudinal direction of the track area.
Each floor part 33, 34 is the same as the grating 33,
Pin 1 in the pin holes formed in the four corners of the floor material 35, 36.
6a, and the bolt 16 is screwed to the pin 16a from the surface side, so that the support 16 is assembled. The floor parts 33 and 34 are various floor parts 3 which are necessary in advance.
Since it is constructed by being integrally assembled to the 5, 36, the floor material 3
Only the work of assembling 5, 36 to the column 16 is required. This completes the work of assembling the running floor 32.

The work for attaching the running belt 21 to the running floor 32 is carried out with the row of floor plates 40 arranged on one side of the guide rail 26 removed. Further, the work of fixing the traveling belt 21 to the transport vehicle 8 is performed with a part of the floor plate 40 removed. Furthermore, the work for wiring electric wires such as power supply lines and signal lines on the back side of the running floor 32 is performed by the floor board 4 for one row.
0 is removed, and the electric wire is inserted into the hole 37e of the bridge 37 and supported by the bridge 37.

When the traveling floor 32 needs to be removed for the purpose of checking the electric wires or the like laid on the underside of the floor for the maintenance of the transport vehicle 8 or for exchanging the traveling belt 21, one side of the guide rail 26 is used. The required number of rows of floor boards 40 may be removed. At this time, the floor plate 40 has the grating 3
Since the length is 2L, which is twice the length of one side, the number of detached gratings 3 can be smaller than when the grating 3 is removed. Further, since the floor plate 40 is a separate member from the rail parts 38 and 39 and is relatively lightweight, the work of removing the floor plate 40 can be light labor.

As described in detail above, according to this embodiment,
The following effects are obtained. (1) Since the rails 26 and 27 are laid by assembling the components of the floor unit 31 to the grating columns 16, the guide rails 26 and the traveling rails 27 for traveling the transport vehicle 8 are installed on the floor. It is possible to simplify the work to be laid in 2.

(2) A large number of bridges 37 are arranged between the grating columns 16 in a direction intersecting the running track,
Since the support structure receives the rail components 38, 39 and the floor plate 40 from below by the multiple rows of bridges 37, the rail components 38, 39 and the floor plate 40 can be assembled with strong support strength against a load from above.

(3) The bridge 37 has rail parts 38,
Since the convex portion 37b and the concave portion 37c are formed at the assembling position of the rail 39, the rail parts 38 and 39 can be mounted on the convex portion 37b and the concave portion 3 respectively.
It can be positioned at an accurate position that matches the running track by a simple work of just fitting it into 7c.

(4) Since the long side length of the floor plate 40 is set to be a natural multiple of the length L of one side of the grating 3, both ends of the floor plate 40 can be supported by the bridge 37. That is, the bridge 37 is arranged at the connection point between the adjacent floor plates 40, and the strength against the load from above the traveling floor 32 can be further increased. Especially in this example, floor material 4
Since the length of the long side of 0 is set to be twice the length of one side of the grating 3, the number of floor plates 40 to be arranged is relatively small, and the mounting work or the removing work can be simplified.

(5) The area of the running floor 32 is set to an area for one row of the grating 3, the guide rails 26 are arranged at the center of the area width corresponding to the spacing of the support columns 16, and both end positions of the area width are set. Two traveling rails 27 are arranged in the. Therefore, in the area, the widths of the gaps formed on both sides of the guide rail 26 become equal, and the floor board 40 can be made of one component of the same size. Therefore, when the floor board 40 is attached, it is not necessary to check the components one by one, the work is easy, and the manufacturing cost of the floor board 40 can be kept low because it is a single component.

(6) Since the floor plates 40 are arranged in two rows on both sides of the guide rail 26, it is possible to perform maintenance work for electric wires and the like wired on the back side of the running floor 32, and replacement work of the running belt 21. When it is necessary to remove the traveling floor 32, it is only necessary to remove the required number of floor plates 40 for one row on one side of the guide rail 26. Further, since the floor plate 40 is a separate component from the rail components 38 and 39 and is relatively lightweight, it does not require much labor for its removal work as compared with the grating 3.

(7) The length of the rail parts 38, 39 is a natural multiple of the length of one side of the grating 3, and the floor plate 4 is also used.
Since it is longer than the long side length of 0, the number of connection points of the rail parts 38 and 39 on the rails 26 and 27 can be reduced, and rattling of the transport vehicle 8 at the connection points of the rail parts 38 and 39 can be reduced as much as possible. You can

(8) The running belt 21 is attached to the guide rail 2
Floor parts 33 and 34 were prepared by unitizing various parts necessary for laying along 6 together with the floor material in advance. That is, a floor component 33 in which the traveling motor 23 and the drive pulley 17 are assembled in advance to the floor material 35 and a floor component 34 in which the driven pulley 20 is assembled in advance to the floor material 36 are prepared as the components of the floor unit 31. Therefore, the work of assembling the traveling floor 32 on the spot can be simplified.

(9) Since the transport vehicle 8 is covered with the housing 9 together with the traveling area, and the housing 9 is provided with the fan filter unit 11 for further increasing the cleanliness of the inside thereof than the cleanliness of the clean room 1. The load 6 such as a semiconductor wafer to be transported by the transport vehicle 8 can be transported in the cleanest possible state. Therefore, the yield of manufactured semiconductor wafers and the like is improved.

(10) Since the transport vehicle 8 is of the belt traveling drive type, components of the traveling drive system such as the traveling motor 23 are arranged at a location distant from the transport vehicle 8, and dust generated from sliding parts of these components. It is possible to reduce the concern about the contamination of the load 6 due to the load.

(11) Since the passage 9 through which the worker can pass is provided in the housing 9, the structure in which the traveling area of the transport vehicle 8 is covered with the housing 9 does not easily obstruct the passage of the worker.

(12) Since the cargo receiving table 28 of the carrier 8 has a frame structure in which a gap for detecting the light of the sensors 30 mounted at both ends of the traveling area is secured, it is possible for the worker to enter the traveling area. Can be detected in an efficient detection area.

(13) Since the floor plate 40 has a large number of circular holes 40a formed on almost the entire surface thereof, and further the circular holes 38a are formed on the bottom surface of the concave portion of the guide rail component 38, the air flow downflowed from the ceiling can be prevented. You can ventilate to the back side without disturbing too much. In addition, when the transport vehicle 8 is traveling, the traveling wheels 24
The dust generated by the contact of the guide roller 25 with the rails 26 and 27 can be smoothly released to the exhaust duct on the back side of the running floor 32 together with the airflow. Further, although the guide rail component 38 has a concave shape, dust is unlikely to collect in the concave portion. Therefore, the traveling area can be cleaned.

(Second Embodiment) A second embodiment of the present invention will be described below with reference to FIGS. In the first embodiment, the traveling vehicle installed on the floor surface is driven to rotate the traveling belt to drive the transport vehicle. On the other hand, in the present embodiment, a traveling motor is equipped on the transport vehicle side, and a traveling belt stretched on the floor side is wound around a drive pulley that is rotationally driven by the traveling motor. Take. The same components as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

A drive pulley 62 is attached to the drive shaft of a traveling motor 61 arranged on the traveling table 22 of the transport vehicle 8. The traveling belt 21 is wound around the drive pulley 62 while being guided by the two guide pulleys 63. Both ends of the traveling belt 21 are fixed to the floor surface on both sides in the longitudinal direction of the rail. Carrier 8
The four traveling wheels 24 are rotatably mounted on the two traveling rails 27, and the guide wheel 64 provided at the center of the bottom of the traveling platform 22 is in the recess of the guide rail 26. By driving the traveling motor 61, the transport vehicle 8 travels along the rails 26 and 27 while shifting the position of engagement with the traveling belt 21.

In this embodiment, the floor structure in the track area is the same as in the first embodiment. That is, the bridge 37, the rail components 38 and 39, and the floor plate 40 are configured as shown in FIG. A mechanism for fixing both ends of the running belt 21 is preassembled on the floor parts 65 and 66 arranged on both sides of the track area.

The floor component 65 includes a floor material 67 having the same size as the grating 3 and having four corners with pin holes (not shown) into which the pins 16a of the columns 16 can be inserted similarly to the grating 3, and the floor material 67. A fixing member 68 for fixing one end of the traveling belt 21 is attached to the. Further, the floor component 66 includes a floor material 69 having the same size as the grating 3 and having pin holes (not shown) into which the pins 16a of the support columns 16 can be inserted similarly to the grating 3, and the floor material 69. A tension adjusting device 70 for fixing one end of the traveling belt 21 and adjusting the tension is attached to the traveling belt 21. It should be noted that each floor 67, 69 has a large number of circular holes 69.
a (only the floor material 69 is shown in FIG. 15) is made of liquid.

As shown in FIG. 15, the tension adjusting device 70 for the floor part 66 includes a drum 71 which fixes one end of the traveling belt 21 and can be wound around the end portion, and a drum 71 which is rotated for traveling. A ratchet mechanism 72 that allows the belt 21 in the winding direction and regulates it in the feeding direction. The ratchet mechanism 72 includes a ratchet gear 73 that can rotate integrally with the drum 71, and the ratchet gear 73.
And a locking claw 74 that locks with. The rotary shaft 75 of the drum 71 is supported by a support base 76, and an operation lever 77 can be engaged with the end of the rotary shaft 75.

The support base 76 is fixed to the upper surface of the floor material 69 with bolts (not shown) at a plurality of points, and the floor material is provided with long holes (not shown) through which the bolts are inserted. 69 is slidable in the longitudinal direction of the rail. An adjustment bolt 78 inserted into a support portion 69b fixed to the floor material 69 is screwed to the support base 76, and the adjustment bolt 78 is rotated while the bolt is loosened to slide the support base 76. By doing so, the tension of the traveling belt 21 can be finely adjusted.

When the tension of the traveling belt 21 is adjusted, the bolt is loosened and the operating lever 77 engaged with the rotating shaft 75 is operated to rotate the drum 71 to apply the tension to the traveling belt 21. Give. At this time, the traveling belt 21 is roughly adjusted at the level of the tooth pitch of the ratchet gear 73. Next, the adjustment bolt 78 is rotated to finely adjust the position of the drum 71, and the tension of the traveling belt 21 is finely adjusted. In this embodiment, the bridge 37,
Rail parts 38, 39, floor board 40 and floor parts 65, 6
The floor unit 31 is constituted by 6.

As described above, according to this embodiment, the same effect as that of the first embodiment can be obtained. In addition, the following effects can be obtained. (14) Since the tension adjusting device 70 prepares the floor component 66 integrated with the floor material 69, the troublesome work of assembling the mechanism for adjusting the tension of the traveling belt 21 to the grating 3 can be eliminated. Therefore, it is possible to save the labor of laying a running floor on site as much as possible.

The present invention is not limited to the above-mentioned embodiment, but can be carried out in the following forms, for example. ○ The rail is not limited to a straight line. It is also possible to adopt a configuration in which curved rails are laid. For example, a part of the grating 3 corresponding to an area of a curved track is removed to make a running area, and a plurality of bridges 3 are provided in this running area.
A large number of columns 7 are bridged between the columns 16 so that they are oriented so as to intersect the curved track. The bridge 37 is formed with a concave portion or a convex portion as an engaging portion in consideration of its position and shape so that the rail draws a curve of the track when the rail component is fitted. The floor plate is formed into a shape that can fill the gap according to the curved shape of the rail component. With such a configuration, the rail can be laid by a simple construction using the pillar 16 even in a curved track.

The tracked carriage that is the target of the floor structure is not limited to the belt drive type. A traveling floor structure may be adopted in order to drive a transporting vehicle of a normal traveling type in which traveling wheels are driven by traveling motors mounted on the vehicle body to travel in a clean room. In this case, floor parts 3
3, 34, 65, 66 are not necessary, and the floor unit is composed of the bridge 37, rail parts 38, 39 and floor plate 40.

The bridges 37 do not necessarily have to be arranged between all the support columns 16, and the intervals may be every other support column 16, or the bridges 37 may be arranged without teeth in places.

The bridges are not arranged by directly using the support columns, but by the bridges for supporting the two support bridges that are laid between the support columns in a direction parallel to the rails. It is also possible to adopt a configuration of bridging. According to this structure, the interval between the bridges can be made shorter than that between the columns. Therefore, even if the strength of the floor board is slightly weak, more bridges can be received from the lower surface of the floor board at short intervals, so that the required floor strength can be secured. With this configuration, the length of the floorboard in the rail longitudinal direction may be any length as long as both ends thereof can be located on the upper surface of the bridge, and is not necessarily a natural multiple of the length of one side of the grating 3.

The number of rails is not limited to three.
The structure may be one guide rail. In this case, the running wheels roll on the grating or the upper surface of the floor plate. For example, when the traveling wheels roll on the upper surface of the floor plate, there is no risk of rattling of the carrier unless a circular hole is formed in that area. Further, the configuration may be such that there are only two traveling rails. For example, if a magnetic or colored tape is attached along the track, and it is an inductive guided vehicle that runs while detecting the track by magnetism or reflected light,
A configuration with only rails for traveling is also valid. For example, when there are only two rails for traveling, the width of the floor board may be set to be approximately equal to the distance between the rails. Further, even when the rail is positioned in the middle of the width of the bridge, it is not limited to the center position of the width. In this case, although it is necessary to prepare two parts having different widths, the gaps on both sides of the rail can be filled with the floor plate.

○ Running area (bridge array area)
Is not limited to the width of one grating 3.
The traveling area may have a width corresponding to a plurality of gratings based on the relationship between the distance between the left and right traveling wheels of the guided vehicle (transport vehicle) and the length of one side of the grating. For example, a plurality of rails may be laid one by one in an area for one row of grating. Further, in the case of such a configuration, the width of the floor plate (the length of the side in the direction intersecting the running track) may be longer than the length of one side of the grating 3.

In the floor structure for a belt traveling drive type track guided vehicle, the bridge parts 37, rail parts 38, 39 and floor plate 4 are used without using the floor parts 33, 34, 65, 66.
Only use 0 to lay the track area of the running floor,
It is also possible to adopt a configuration in which a pulley or a traveling motor required to attach the traveling belt is directly assembled to the grating 3 by using a mounting bracket or the like.

A floor unit may be used in order to place a guided vehicle (transport vehicle) on a grating floor other than the clean room. For rail guided vehicles that do not use the belt drive system, the floor unit is composed of parts excluding floor parts.

The floor structure of each of the above-mentioned embodiments may be implemented in a grating floor in which the grating is not fixed by screws or bolts simply by inserting the pillar pins. In this case, the bridge is only inserted into and supported by the pin of the column in the same manner as the grating, but there is no problem because it is supported in the positioned state.

The technical idea (invention) which is grasped from each of the above-mentioned embodiments and is not described in the scope of claims is described below together with its effect. (1) In claim 1 , the length of the floorboard in the longitudinal direction of the rail is a natural number multiple of two or more of the length of one side of the grating. According to this structure, the number of floor plates can be relatively small, and the work of assembling work is reduced.

(2) In claim 4 , the rail is located at the center of the width of the array area of the bridges, and the floor plates are arranged in two rows on both sides of the rail. According to this structure, the floorboards can all have the same size, and the assembling work can be simplified by unifying the parts. Also, for maintenance of wiring on the back side of the floor, it is sufficient to remove only the floor plate located on one side of the rail.

(3) In claim 4 , a guide rail is located at the center of the width of the array area of the bridge, two running rails are located at both ends of the width of the array area, and the floor plate is the guide. It is arranged in two rows on both sides of the rail. With this configuration, the same effect as the above (2) can be obtained.

(4) In any one of claims 5 and 9 to 11, the belt is accommodated in the recess of the guide rail and is arranged at a height substantially equal to or lower than the floor surface. . According to this structure, the belt does not become a protrusion from the floor surface, so that the operator does not have to worry about getting his or her foot caught on the belt.

(5) In any one of claims 1 to 11, a hole is formed in the bridge so as to penetrate therethrough in the traveling track direction. According to this structure, when electric wires such as a power supply line and a signal line necessary for controlling traveling of the track guided vehicle are wired on the floor back side, the electric wires can be supported by inserting them into the holes of the bridge.

(6) In any one of claims 1 to 5 and 8 to 11, a large number of ventilation holes are formed in the floor plate. According to this configuration, the airflow downflowing from the ceiling in the clean room can be passed to the back surface side without disturbing the floor surface. The circular hole 40a constitutes a ventilation hole.

(7) In (6), a hole is formed in the bottom surface of the recess of the guide rail. According to this configuration, dust is unlikely to collect in the concave portion of the guide rail. In addition,
The circular hole 38a constitutes a hole.

(8) In the eleventh aspect, the housing is provided with a passage for crossing the traveling area. According to this configuration, even if the housing is provided, it can pass through the passage, so the housing does not interfere.

[0094]

As described in detail above, the first to fifth and eighth aspects are as follows.
According to the invention described in 11, the floor structure is adopted in which the rail parts and the floor plate are placed on the row of bridges which are directly or indirectly bridged over the columns for grating in the direction intersecting with the traveling track. Rails can be easily laid on.

According to the invention described in claims 1, 3 , and 9,
Since the floor plate is a natural number times the length of one side of the grating in the longitudinal direction of the rail, when the bridge is directly bridged between the columns, both ends of the floor material can be firmly supported by the bridge.

According to the invention described in claims 2, 3, and 9,
Engage the rail part with the engaging part formed on the bridge
You can position it at the correct position that draws the running trajectory. Yo
This makes it easy to assemble rail parts.
It

According to the invention described in claims 4 and 9, the straight line
If it is a rail, it will be
Which of the width end position and the width equal division position in the width direction
Since the rail is laid in the crab position, all floors of the same size
Boards can be used, and simplification of construction by unifying floor board parts
Can be planned.

According to the fifth and ninth aspects of the invention, the belt used for traveling by the track guided vehicle of the belt traveling drive system has both ends positioned by the positioning mechanism provided on both sides in the longitudinal direction of the rail. It will be stretched along the rail.

According to the sixth aspect of the present invention, by simply assembling the floor parts to the columns in the same manner as the grating, the drive pulley and its power source required when the track guided vehicle is of the belt traveling drive type are provided. Can be easily assembled.

According to the invention described in claim 7, by simply assembling the floor parts to the columns in the same manner as the grating, the driven pulley required when the tracked carriage is of the belt traveling type can be easily assembled. it can.

According to the eighth and tenth aspects of the present invention, when the track guided vehicle is of the belt traveling drive system, the construction of the traveling floor is performed using the floor unit, and the rail laying work and the belt laying work are carried out. This simplifies the construction work for deploying the transportation system on the grating floor.

According to the eleventh aspect of the present invention, since the track guided vehicle travels in the traveling area inside the housing which is kept clean by the cleaning device, the load carried by the track guided vehicle is kept clean. You can

[Brief description of drawings]

FIG. 1 is a partial plan view of a running floor in the first embodiment.

FIG. 2 is a sectional view of the same.

FIG. 3 is a front sectional view of the same main part.

FIG. 4 is a plan view of a floor part on the driving side.

FIG. 5 is a side sectional view of the same.

FIG. 6 is a rear view of the same.

FIG. 7 is a plan view of the floor part on the driven side.

FIG. 8 is a side sectional view of the same.

FIG. 9 is a front view of a carrier vehicle.

FIG. 10 is a side view of the carrier vehicle.

FIG. 11 is a plan view showing a running floor.

FIG. 12 is a plan view of a clean room.

FIG. 13 is a side view of the transfer system.

FIG. 14 is a side view of the carrier according to the second embodiment.

FIG. 15 is a plan view of a floor part.

[Explanation of symbols]

1 ... Clean room, 2 ... Floor as grating floor,
3 ... Grating 7, 7 ... Conveying system, 8 ... Conveying vehicle as a tracked vehicle, 9 ... Housing, 11 ... Fan filter unit as a cleaning device, 16 ... Struts, 17 ... Driving pulleys constituting a positioning mechanism, 18, 19 ... guide pulleys constituting the positioning mechanism, 20 ... driven pulleys constituting the positioning mechanism, 21 ... traveling belts as belts, 23 ... traveling motors as power sources, 24 ... traveling wheels, 25 ... guide rollers, 26 ... Guide rails as rails, 27 ... Rails for traveling as rails, 31 ... Floor unit, 32 ... Traveling floor, 33 ... Floor parts, 34 ... Floor parts, 35 ... Floor material, 36 ... Floor material, 37 ... Bridge, 37b
... a convex portion as an engaging portion, 37c ... a concave portion as an engaging portion,
38 ... Guide rail parts as rail parts, 39 ... Traveling rail parts as rail parts, 40 ... Floor plate, 6
5, 66 ... Floor parts, 67, 69 ... Floor material, 68 ... Fixing member, 70 ... Tension adjusting device.

Claims (11)

(57) [Claims] 1. A floor structure for a tracked vehicle for laying a rail that forms a traveling track of a tracked vehicle on a grating floor, which is directly or indirectly supported by a column provided to support the grating. In this state, a plurality of bridges are bridged in a direction intersecting the running track, and rail parts constituting the rails are placed on the bridges in a plurality of rows, and the bridge arrangement area is arranged. A plurality of floor plates are placed so as to fill the gap between the rail parts in the bridge , and the bridge is supported in a state of being bridged between the columns.
It is directly supported by the pillar, and the floor plate is the length of the rail.
Natural number times the side length of the grating in the hand direction
Floor structure for tracked bogies with a length of . 2. A rail that forms a traveling track of a track guided vehicle is guided.
With a floor structure for tracked trucks for laying on the floor
There, directly to the support provided for supporting the grating or
Or multiple bridges with indirect support.
Cross over multiple rows in the direction that intersects the running track,
The rail components that make up the rail are mounted on the bridge.
Placed in the bridge array area
Multiple floor boards are placed so as to fill the gap between the rail parts.
The bridge for positioning the rail component.
Floor structure for tracked bogies that have joints . 3. A rail that forms a running track of a track guided vehicle is guided.
With a floor structure for tracked trucks for laying on the floor
There, directly to the support provided for supporting the grating or
Or multiple bridges with indirect support.
Cross over multiple rows in the direction that intersects the running track,
The rail components that make up the rail are mounted on the bridge.
Placed in the bridge array area
Multiple floor boards are placed so as to fill the gap between the rail parts.
And the bridge is bridged between the struts.
It is directly supported by the pillar, and the floor plate is the length of the rail.
Natural number times the side length of the grating in the hand direction
Has a length of 10 mm and is engaged to position the rail component on the bridge.
Floor structure for tracked bogies that have joints . 4. The rail is arranged in the grating.
Extending linearly in the direction of
A) The width end position or the width equal division position
Located on either side, all floors are the same size
According to any one of claims 1 to 3,
Floor structure for guided vehicles. 5. A belt traveling drive system in which the rail guided vehicle travels using a belt stretched along the rail, and a positioning mechanism for positioning both end portions of the belt on both sides in the longitudinal direction of the rail. 1 is provided.
A floor structure for a guided vehicle according to any one of claims 4 to 5. 6. A floor component arranged on one end side in the longitudinal direction of the rail for laying the belt of the track guided vehicle according to claim 5 along the rail, the drive for winding the belt. A floor component in which a pulley and a power source for rotationally driving the drive pulley are assembled to a floor material that has the same size as the grating and can be supported by the pillar at four corners. 7. A floor component arranged on one end side in the longitudinal direction of the rail for laying the belt of the track guided vehicle according to claim 5 along the rail, the driven part for winding the belt. A floor component in which the pulley is assembled to a floor material that is the same size as the grating and can be supported by the support pillar. 8. The bridge, the rail component and the floor plate, which are components of the floor structure according to any one of claims 1 to 5, and the both floors according to claims 6 and 7. Floor unit with parts. 9. A transfer system in which the tracked carriage is movably arranged on the rail laid by the floor structure according to any one of claims 1 to 5. 10. The transport system according to claim 9, wherein the track guided vehicle is a belt traveling drive system, and the traveling floor is laid by using the floor unit according to claim 8. 11. The transport system according to claim 9, further comprising a housing that covers a traveling area of the track guided vehicle, and a cleaning device that cleans the inside of the housing.