JP3405285B2 - Electrode manufacturing method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an electrode by firing a paste composed of an organic substance and an inorganic substance containing a glass component.

[0002]

2. Description of the Related Art Conventionally, electrodes made by firing a paste composed of an organic substance and an inorganic substance containing a glass component have been used for electronic parts such as ceramic capacitors and display devices such as plasma display panels. It is formed by applying a paste composed of an organic material of an electrode material and an inorganic material containing a glass component to the material by printing and firing.

[0003]

When firing a paste composed of an organic substance and an inorganic substance containing a glass component to form an electrode, there is a problem that the electrode is separated from the base material during firing. I think about this subject as follows.

In FIG. 4, a paste composed of an organic material of an electrode material prepared by firing and an inorganic material containing a glass component is applied by printing, dried at 60 ° C., and then heated in the same manner as when firing, and its weight. The results of changes and differential thermal analyzes are shown (TG-DTA analysis). Between 15-40 min (1
Abrupt weight loss at 50-420 ° C) and DT
Since the exothermic peak of A appears at 388 ° C., it can be seen that the organic matter is burned down due to combustion. Since there is almost no change in weight over 40 min (420 ° C or higher),
It is considered that only inorganic substances remain.

Conventionally, the glass component contained in the paste is
It melts and adheres to the substrate, and is present to bond an electrically conductive inorganic substance to the substrate, but its melting point is 450-
It is about 550 ° C. Therefore, while organic matter is present,
The adhesion between the substrate and the electrode is secured by the organic substance,
The adhesiveness decreases as the organic matter in the paste decreases.

[0006] Further, the volume of the electrode shrinks due to the burning of the organic substance, and stress is generated in the electrode. A conceptual diagram of the generation of this stress is shown in FIG.

As shown in FIG. 5 (a), when a paste containing an organic substance, a glass component 1, and conductive metal particles 2 is printed on a substrate 3 by printing or the like, the electrode 4 before firing is fired.
As shown in (b), the organic matter disappears due to evaporation and combustion, whereby the film contracts, and the film is subjected to the stress due to the contraction and the moment to lift from the base material 3 due to the stress. . If the adhesion is weak, it rises from the base material during firing and is fired as it is. After firing, as shown in FIG.
As described above, the end portions of the electrodes are peeled off, or all of them are peeled off.

Further, in the case of an electrode formed by printing, drying, exposing, developing and baking a paste containing a photosensitive organic substance, in addition to the stress generated during baking, exposure, cross-linking, etc. As a result, stress is generated, so that during firing, the stress during exposure is also applied, and the possibility of further peeling increases.

The present invention was devised in view of these inconveniences, and an object thereof is to provide a method for manufacturing an electrode that alleviates stress generation during firing and forms an electrode without causing electrode peeling. I am trying.

[0010]

A method for manufacturing an electrode according to the present invention is a method for manufacturing an electrode, which is prepared by firing a paste composed of an organic material and an inorganic material containing a glass component. Is used to form an electrode shape on a substrate, and is exposed to plasma before firing.

Further, it is characterized in that it is exposed to plasma generated using a gas containing oxygen.

Further, it is characterized in that it is exposed to plasma generated using a gas containing ozone.

A method of manufacturing an electrode, which is produced by firing a paste composed of an organic material and an inorganic material containing a glass component, wherein the electrode shape is formed on a base material by a printing method using the paste, It is characterized by being exposed to ultraviolet rays before firing.

[0014] A method of manufacturing an electrode by firing a paste composed of an organic substance and an inorganic substance containing a glass component, wherein the paste is used to form an electrode shape on a base material by a printing method or the like and then fired. It is characterized in that it is previously irradiated with ultraviolet rays having a wavelength of 150 to 250 nm in an atmosphere containing oxygen.

Further, in an electrode and a method for manufacturing an electrode, which is prepared by firing a paste composed of an organic substance and an inorganic substance containing a glass component, an electrode shape is formed on a base material by a printing method or the like using the paste, Before firing
It is characterized by being exposed to ozone.

A method for manufacturing an electrode, which is prepared by firing a paste composed of an organic material containing a photosensitive material and an inorganic material containing a glass component, wherein a printing method, a photolithography method or the like is used with the paste. Before forming the electrode shape on the substrate by firing, the wavelength of 400nm
It is characterized by being exposed to the following ultraviolet rays.

A method for manufacturing an electrode prepared by firing a paste composed of an organic substance and an inorganic substance containing a glass component according to the present invention, wherein stress produced by shrinkage of an organic substance during firing is relaxed by the above-mentioned production method. As a result, peeling of the electrode can be prevented, and a highly reliable electrode can be obtained.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION (Embodiment 1) In the present embodiment, as shown in FIG. 1A, a paste containing an organic material, a glass component 1, and conductive metal particles 2 is formed by printing or the like. The electrode 4 before firing formed on the material 3 is shown in FIG.
After being exposed to oxygen-containing plasma 5 as shown in FIG. 2, firing is performed to obtain an electrode as shown in FIG. 1 (c).

By introducing this process, the occurrence of film peeling during firing is eliminated, and this phenomenon will be considered as follows.

When exposed to oxygen plasma, the organic component in the pre-firing electrode 4 reacts and becomes carbon dioxide and disappears. At this time, since it is a surface reaction, it gradually disappears from the surface, so that the conductive metal particles and the organic matter inside do not move, and the organic matter between particles near the surface is removed. Therefore, it is considered that since the volume shrinkage is small by baking in a state where the amount of organic substances in the film is smaller than in the conventional case, the stress generated during the baking is smaller than in the conventional case.

Although the present embodiment is exposed to the plasma generated by using the gas containing oxygen, the plasma may be generated by using the gas containing ozone, which is not limited to the present embodiment. Not a thing.

(Embodiment 2) As shown in FIG. 3, a paper containing an organic substance, a glass component 1, and conductive metal particles 2.
Electrode 4 before firing that has a strike formed on substrate 3 by printing or the like
Is exposed to ultraviolet rays 7 from an ultraviolet ray generating lamp 6 in an atmosphere containing oxygen. It is preferable that the ultraviolet lamp 6 emits ultraviolet rays 7 having a wavelength of 185 nm to 205 nm, which is effective for ozone generation. The generation of ozone and excited oxygen causes a reaction with an organic substance on the surface of the electrode 4 before firing to remove the organic substance. By baking after this step, the degree of volume contraction is reduced as described in the embodiment of the invention, so that stress is relieved and peeling of the electrode can be prevented.

When irradiating with ultraviolet rays, the electrode 4 before firing is also used.
It may be carried out while heating the substrate 3 on which is formed by a hot plate or the like.

Further, in the present embodiment, ozone is generated using an ultraviolet lamp, but ozone may be generated by barrier discharge or the like, and the present invention is not limited to this example.

(Embodiment 3) A method for manufacturing an electrode, which is prepared by firing a paste composed of an organic substance containing a photosensitive material and an inorganic substance containing a glass component, which is a printing method and photolithography using the paste. By forming the electrode shape on the base material using a method or the like and exposing it to ultraviolet rays having a wavelength of 400 nm or less before firing, peeling of the electrode can be similarly prevented by stress relaxation.

This is because, for example, the photosensitive material is irradiated with ultraviolet rays to crosslink the monomer and become entangled with the binder polymer, which makes it difficult to dissolve during development and forms a pattern. It has been reported that a resin component such as PMMA used in a polymer is broken in a binder-polymer bond when irradiated with high-energy ultraviolet rays. From this, it is considered that the stress generated by crosslinking during exposure breaks the binder-polymer bond by exposing the film to high-energy ultraviolet light before firing, so that the stress during exposure is alleviated.

Therefore, it is presumed that the total stress (stress during exposure + stress during firing) that acts during firing is relaxed, so that peeling of the electrode does not occur.

[0028]

As described above, according to the method of manufacturing an electrode of the present invention, the stress generated at the time of electrode formation can be relaxed and the electrode can be formed without peeling. Therefore, a highly reliable ceramic capacitor or the like can be obtained. It is possible to realize stable manufacturing of electronic parts, display devices, etc.

[Brief description of drawings]

FIG. 1 is a schematic view showing a configuration of main parts of an electrode manufacturing method according to an embodiment of the present invention and a process thereof.

FIG. 2 is a schematic view showing a main step of an electrode manufacturing method according to an embodiment of the present invention.

FIG. 3 is a schematic view showing a main process of an electrode manufacturing method according to an embodiment of the present invention.

FIG. 4 is a diagram showing a result of TG-DTA analysis after applying a paste composed of an organic material and an inorganic material containing a glass component of an electrode material to be formed by firing, which was applied by printing, and dried at 60 ° C.

FIG. 5 is an explanatory diagram of a conventional stress generated by firing and a concept that causes peeling of electrodes.

[Explanation of symbols]

1 Organic substances and glass components 2 Conductive metal particles 3 base materials 4 Pre-firing electrode Plasma containing oxygen 6 UV lamp 7 UV

Front page continued (72) Inventor Hiroyuki Tanaka 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Shinya Fujiwara 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd. 72) Inventor Hideki Marunaka 1-1, Sachimachi, Takatsuki City, Osaka Prefecture Matsushita Electronics Industrial Co., Ltd. (56) Reference JP 2000-276080 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01J 9/02 H01J 11/02

Claims (8)

(57) [Claims] 1. A method for manufacturing an electrode, which is produced by firing a paste composed of an organic substance and an inorganic substance containing a glass component, wherein an electrode shape is formed on a base material by the paste, and a plasma is formed before firing. A method for manufacturing an electrode, which is characterized by exposing to an electrode. 2. The method for producing an electrode according to claim 1, wherein the electrode is exposed to plasma generated by using a gas containing oxygen. 3. The method for producing an electrode according to claim 1, wherein the electrode is exposed to plasma generated by using a gas containing ozone. 4. A method for manufacturing an electrode, which is produced by firing a paste composed of an organic substance and an inorganic substance containing a glass component, wherein the paste is used to form an electrode shape on a base material, and ultraviolet rays are applied before firing. A method for manufacturing an electrode, which is characterized by exposing to an electrode. 5. A method of manufacturing an electrode, which is produced by firing a paste composed of an organic substance and an inorganic substance containing a glass component, wherein the paste is used to form an electrode shape on a base material, and oxygen is added before firing. 150 in an atmosphere containing
The method for producing an electrode according to claim 4, wherein the ultraviolet ray of ˜250 nm is irradiated. 6. A method of manufacturing an electrode, which is produced by firing a paste composed of an organic material and an inorganic material containing a glass component, wherein the electrode shape is formed on a base material by a printing method or the like using the paste, A method for manufacturing an electrode, which comprises exposing to ozone before firing. 7. A method for producing an electrode, which is produced by firing a paste composed of an organic substance containing a photosensitive material and an inorganic substance containing a glass component, the base being formed by a printing method and a photolithography method using the paste. A method for manufacturing an electrode, comprising forming an electrode shape on a material and exposing the material to ultraviolet rays having a wavelength of 400 nm or less before firing. 8. The method according to any one of claims 1 to 7.
Plasma with electrodes created by the method of manufacturing electrodes
Display panel.