JP3418488B2 - Manufacturing method of stamper for duplicating optical disk - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a stamper for duplicating an optical disc, and more particularly to a technique for manufacturing a replica of an information recording medium using an optical disc such as a laser disc or a compact disc.

[0002]

2. Description of the Related Art Since an optical disk as an information recording medium has a recording density and a storage capacity which are remarkably larger than the storage capacity of a magnetic disk or a VLSI, and has an advantage that the access time is short. Recently, it has become the mainstream of recording media. These optical discs are mainly
It is made by injection molding or injection compression molding. The injection molding method is a method in which molten metal is filled in a chamber of a mold with a stamper and then cooled to take out a molded product.The injection compression molding method uses the same mold as the injection molding method, but the mold is This is a method in which the mold can be opened and the mold that has been opened by injection pressure is clamped and molded.

The stamper used here is a mother (m
The other stamper (hereinafter, referred to as a mother) or the sun stamper (hereinafter, referred to as a sun) is used. Since the stamper has a replication accuracy that gradually decreases depending on the number of replica manufactured optical disks, a master stamper (hereinafter, referred to as a master) is not used in the molding in the optical disk, but a replication from the master is performed. The mother or the sun duplicated from the mother is used. The master is manufactured by forming a fine concavo-convex shape by a photolithography method on a photoresist layer formed on a glass substrate, and then using a sputtering or vacuum deposition method or the like on the formed concavo-convex shape.
Ni electroforming is performed after applying a conductive coating such as, and Ni electroforming is peeled from the glass substrate to obtain a sheet-shaped master. Next, a copy of the master (or mother) to the mother (or sun) is obtained by the following method.

FIG. 6 is a view for explaining a conventional mother manufacturing method. In the figure, 21 is a holder, 22 is an electrode, 23 is an electrode ring, 24 is an electrode holder, 25 is a master, and 26 is a mother. .

The holder 21 is a bottomed cylindrical container made of an elastic insulating material such as rubber or resin. A cathode 22 is provided so as to penetrate through the center of the bottom, and the center of the holder 21 is open at the bottom. The master 25 having a release coating on its surface is housed in the holder 21 in close contact with the outer peripheral end face to the back face so that the electroforming solution does not enter. The central opening of the master 25 is in pressure contact with the electrode ring 23 held by the electrode holder 24, and the mother 26 is electroformed on the master 25 in this state.

The electroformed mother 26 is peeled from the master 25. However, since the outer periphery of the master 25 is not a perfect circle, the outer peripheral end face is not evenly adhered to the holder 21, and the peeling film is thin. Therefore, the electrolytic solution permeates from the outer periphery, and the master 25 and the mother 26 are joined to each other during electroforming and cannot be uniformly separated, so that the outer peripheral end of the mother 26 needs to be cut.

[0007]

When the mother 26 is cut, the outer circumference of the master 25 is also cut, so that the outer diameter of the master 25 becomes smaller every time the mother 26 is manufactured as a replica, and the number of replicas becomes smaller. Less. Further, when the sun is made from the mother, the number of replicas is similarly limited, and for example, only about 10 suns can be obtained from one mother. Further, the outer peripheral surface of the master (or mother) is apt to be damaged and distorted by the metal pieces, and the master (or mother) is damaged by the infiltration of the electroforming liquid.

According to the present invention, when copying a mother (or sun), the outer diameter is not reduced by removing only the outer peripheral Ni thin film portion of the mother (or sun) without cutting the outside of the master (or mother). Thus, an object of the present invention is to provide a method of manufacturing a stamper for optical disk duplication, which can extend the life of a master (or mother) and stably peel off a duplication stamper with high precision.

[0009]

According to a first aspect of the present invention, a fine concavo-convex shape is formed on a photoresist layer formed on a glass substrate, and Ni electroforming is performed after forming a conductive film on the fine concavo-convex shape. , Peeling the Ni electroformed from the glass substrate,
A master manufacturing process for manufacturing a master by i electroforming, and a mother manufacturing process for manufacturing a mother by Ni electroforming by a process similar to the master manufacturing process from the master after the master has a release coating treatment, or the master In the step of manufacturing a stamper for optical disk duplication consisting of a sun manufacturing step of manufacturing a sun by electroforming from the mother by a step similar to the step of manufacturing the mother from the mother or the sun created on the master or the mother. Extend the life of the master (mother) by cutting the outer peripheral Ni thin film of the above-mentioned Ni or electroforming of the mother or sun with a cutter with a blade length adjustment stopper so that the cutting edge does not reach the surface of the master (or mother) It was done like this.

According to a second aspect of the invention, in the first aspect of the invention, the same effect as that of the first aspect of the invention can be obtained by providing a conductive seal mask on the outer peripheral surface of the mother.

According to a third aspect of the present invention, in the first aspect of the invention, the outer peripheral surface is prevented from being damaged by allowing the mother outer peripheral surface to wrap around from the front surface to the rear surface, and the same effect as in the first aspect can be obtained. It was done like this.

According to a fourth aspect of the present invention, in the first aspect of the present invention, a ring-shaped thin plate of titanium material is provided on the mother outer peripheral surface to reduce distortion on the outer peripheral surface of the master (or mother). The same effect can be obtained.

According to a fifth aspect of the present invention, in the first aspect of the present invention, a backing plate larger than the outer surface of the mother is provided on the back surface of the mother so that the master (or mother) is not damaged. The same effect as that of claim 1 is obtained.

[0014]

1 is a view for explaining an embodiment of a method for manufacturing a stamper for optical disk duplication according to the present invention. FIG. 1 (A) is a partial sectional view of a stamper duplicating apparatus, and FIG. ) Is an enlarged view of the S portion of FIG. 1 (A), and FIG. 1 (C) is
FIG. 1 is a plan view of FIG. 1A (however, a cutter is omitted), in which 1 is a chucking claw, 2 is a negative electrode, 3 is a master (or mother), 4 is a mother (or sun), and 5 is a A cutter (with a blade length adjustment stopper), 6 is a cutting tool, and 7 is a blade length adjusting unit. In the drawings other than FIG. 1 described below, the same reference numerals as those in FIG.

In FIG. 1 (A), the master 3 has fine irregularities formed on a photoresist formed on a glass substrate (not shown) by the photolithography method, and the fine irregularities are formed on the irregularities. A Ni conductive film is formed by sputtering or a vacuum deposition method, and then Ni electroforming is performed on the Ni conductive film to separate it from the glass substrate to form a sheet.

The mother 4 (or sun) is formed by subjecting the uneven surface of the master 3 (or mother) to a release coating treatment with graphite powder or the like, and then electroforming Ni on the uneven surface to remove it.
The sheet-shaped master 3 is chucked by the chucking claws 1 made of an electric insulating material, and electroformed in an electroforming liquid (not shown) with the master 3 (or mother) as a negative electrode to perform duplication.

FIG. 1 (A) shows this state. The mother (or sun) 4 duplicated on the upper surface of the master (or mother) 3 is the portion of the circle R shown in FIG. The mother (or sun) 4 is peeled off from the master (or mother) 3 after the Ni thin film portion on the outer periphery of the mother (or sun) 4 is removed by cutting with a cutter 5 having a length of 0.01 mm to 0.02 mm.

The cutter 5 has a blade length adjusting portion 7 as shown in FIG. 1 (B). By adjusting the blade length adjusting portion 7, whether the blade tip is in contact with the surface of the master (or mother) 3 The edge of the master (or mother) 3 does not damage the surface of the master (or mother) 3 so that it is almost in contact with the mother (or sun).
4 can be peeled off.

In this way, when the mother (or sun) 4 is duplicated, only the outer Ni thin film portion of the mother (or sun) 4 is removed without cutting the outside of the master (or mother) 3, so that the master (or sun) 4 is removed. Since the (or mother) 3 is not damaged and there is no dimensional change, the life can be extended (corresponding to claim 1). In the invention of claim 1, the outer peripheral Ni thin film portion of the mother (or sun) 4 is cut by the cutter 5, but before the Ni electroforming, the cutting portion of the mother (or sun) 4 is electrically conductive. The peripheral Ni thin film portion can be cut more safely by placing a body seal or the like.

2A and 2B are views for explaining another example of the embodiment of the method for manufacturing a stamper for optical disk duplication according to the present invention. FIG. 2A is a partial sectional view of the stamper duplicating apparatus, FIG. 2B is an enlarged view of the S portion of FIG.
In the figure, 8 is a conductive ceiling.

The conductive ceiling 8 has a thickness of 0.02 mm.
It is a 0.03 mm conductive seal mask, and the conductive sealing 8 is applied to the outer periphery N of the master (or mother) 3 before Ni electroforming.
It is attached to the i surface and Ni electroforming is performed. The radial width of the conductive ceiling 8 is chosen to include the circle R cut by the cutter 5. By cutting the cutting circle R having the conductive sealing 8 of the mother (or sun) 4 after Ni electroforming with the cutter 5 having a blade length adjusting function, the blade tip of the cutter 5 is on the surface of the master (or mother) 3. Even if it does not reach, the peripheral Ni thin film portion of the mother (or sun) 4 can be cut and peeled off without damaging the master (or mother) 3 (corresponding to claim 2).

FIG. 3 is a view for explaining still another example in the embodiment of the stamper manufacturing method for optical disk duplication according to the present invention. FIG. 3A is a partial sectional view of the stamper duplicating apparatus. 3 (B) is an enlarged view of the S portion of FIG. 3 (A), in which 9 is a conductive tape.

The conductive tape 9 is a master (or mother) 3
Outer Ni Ni is attached so as to wrap around from the front surface to the back surface and electroformed, and after electroforming the outer circumference N of the mother (or sun)
The i thin film portion is cut by the cutter 5 and removed to remove the mother (or sun) 4, and the cutter 5 is adjusted by the blade length adjusting unit 7 so that the blade tip does not reach the master (or mother) 3.

Since the conductive tape 9 is wound around the master (or mother) 3 from the front surface to the back surface, the surface of the master (or mother) 3 is not damaged, and the electroforming liquid is used as the master (or mother). ) It is possible to prevent penetration into the surface side (corresponding to claim 3).

FIG. 4 is a view for explaining still another example in the embodiment of the stamper manufacturing method for optical disk duplication according to the present invention, and FIG. 4 (A) is a partial sectional view of the stamper duplicating apparatus. 4 (B) is an enlarged view of the S portion of FIG. 4 (A), in which 10 is a titanium ring plate.

The titanium ring plate 10 is a circular ring whose outer circumference is larger than that of the master (or mother) 3 and whose inner circumference is larger than the cutting circle S, and whose thickness is 0.05 mm to 0.1 mm.
It is made of a titanium material with a thickness of about mm, is attached to the upper surface of the master (or mother) 3 before electroforming, and after performing electroforming, the outer circumference Ni of the electroformed mother (or sun) 4
The thin film portion is cut by the cutter 5 with a blade length adjusting function at the cutting surface S and removed, and then the mother (or sun) 4 is peeled off,
Then, the titanium ring plate 10 is peeled off.

Since the titanium material ring 10 having a larger diameter and a smaller thickness than the master (or mother) 3 is attached to the outer periphery of the master (or mother) 3, the distortion of the surface of the master (or mother) 3 is reduced, Therefore, a stable flat surface can be obtained, and the outer peripheral Ni thin film of the upper mother (or sun) 4 can be removed without damaging the surface of the master (or mother) 3 (corresponding to claim 4).

FIG. 5 is a view for explaining still another example in the embodiment of the stamper manufacturing method for optical disk duplication according to the present invention, and FIG. 5A is a partial sectional view of the stamper duplicating apparatus. 5 (B) is an enlarged view of the S part without the cutter of FIG. 4 (A), and FIG. 5 (C) is a plan view of the essential part of FIG. 5 (A), in which 11 is a backing plate and 12 is It is a conductive adhesive.

As shown in FIG. 5B, the master (or mother) 3 is not directly attached to the chucking claw 1, but the upper surface of the conductive adhesive material 12 bonded to the electrically insulating backing plate 11. Attached to. The outer diameter of the backing plate 11 is larger than the outer diameter of the master (or mother) 3 and is attached so that the outer circumference thereof contacts the inner wall surface of the chucking claw 1. As described above, the conductive adhesive 12 has an outer diameter substantially the same as the outer diameter of the master (or mother) 3, and the master (or mother) is interposed via the conductive adhesive 12.
3 is negatively charged and electroformed, and a mother (or sun) 4 is formed by upper surface electroforming of a master (or mother) 3.

The electroformed mother (or sun) 4 is formed on the backing plate 11 so as to enclose the master (or mother) 3 and the conductive adhesive material 12, so that the position of the cutting tool 6 of the cutter 5 is changed. Is set on the cutting circle R substantially equal to the outer circumference of the master (or mother) 3 and cut. Since the blade edge of the cutter 5 is on the backing plate 11 having a thick and stable flat surface, the outer peripheral Ni thin film of the mother (or sun) 4 should be removed and peeled without damaging the master (or mother) 3. You can

[0031]

【The invention's effect】

Effect of claim 1: Fine unevenness is formed on a photoresist layer formed on a glass substrate, Ni electroforming is performed after forming a conductive film on the fine unevenness, and the Ni electroforming is performed from the glass substrate. A master manufacturing step of peeling and manufacturing a master by the Ni electroforming, and a mother manufacturing step of manufacturing a mother by Ni electroforming from the master by a step similar to the master manufacturing step after a release coating treatment on the master, Alternatively, in the optical disk duplicating stamper manufacturing process including a sun manufacturing process for manufacturing a sun by electroforming from the mother by a process similar to the process for manufacturing the mother from the master, the master or the mother is manufactured. A mother or a sun, and an outer periphery N of the mother or the sun by the Ni electroforming
Since the i thin film is cut by a cutter with a blade length adjusting stopper so that the cutting edge does not reach the surface of the master (or mother) and is duplicated, the life of the master (mother) can be extended.

Effect of claim 2 In the invention of claim 1, since the conductive seal mask is provided on the outer peripheral surface of the mother, the same effect as that of the invention of claim 1 can be obtained, and further, the master (or mother) can be obtained. The damage rate can be reduced.

Effect of claim 3: In the invention of claim 1, since the conductive tape is attached so as to wrap around from the front surface to the back surface of the mother outer peripheral surface, damage to the outer peripheral surface is prevented and the electroforming liquid is immersed. The penetration can be prevented, and the same effect as that of the first aspect can be obtained.

Effect of claim 4: In the invention of claim 1, since the ring-shaped thin plate of titanium material is provided on the outer peripheral surface of the mother, the distortion of the outer peripheral surface of the master (or mother) is reduced, and the same as in the first aspect. The effect of is obtained.

Effect of claim 5: In the invention of claim 1, a backing plate larger than the outer surface of the mother is provided on the back surface of the mother, and the mother (or sun) is provided at an outer circumference substantially equal to that of the master (or mother). Since it is cut, the master (or mother) is not damaged, and the same effect as in claim 1 can be obtained.

[Brief description of drawings]

FIG. 1 is a diagram for explaining an embodiment of a method for manufacturing a stamper for optical disk duplication according to the present invention.

FIG. 2 is a diagram for explaining another example of the embodiment of the method for manufacturing a stamper for optical disk duplication according to the present invention.

FIG. 3 is a diagram for explaining still another example in the embodiment of the method for manufacturing a stamper for optical disk duplication according to the present invention.

FIG. 4 is a diagram for explaining still another example in the embodiment of the method for manufacturing the stamper for optical disk duplication according to the present invention.

FIG. 5 is a diagram for explaining still another example in the embodiment of the method for manufacturing a stamper for optical disc duplication according to the present invention.

FIG. 6 is a diagram for explaining a conventional mother manufacturing method.

[Explanation of symbols]

1 ... Chucking claw, 2 ... Negative electrode, 3 ... Master (or mother), 4 ... Mother (or sun), 5 ... Cutter (with blade length adjustment stopper), 6 ... Blade tool, 7 ... Blade length adjusting unit, 8 … Conductive sealing, 9… Conductive tape, 10… Titanium ring plate, 1
1 ... backing plate, 12 ... conductive adhesive.

Continuation of front page (56) Reference JP-A 1-215996 (JP, A) JP-A 1-246391 (JP, A) JP-A 3-43101 (JP, A) JP-A 3-291392 (JP , A) JP-A-4-183889 (JP, A) JP-A-5-342643 (JP, A) JP-A-6-302019 (JP, A) JP-A-7-150386 (JP, A) JP-A 62-44339 (JP, A) (58) Fields surveyed (Int.Cl. ⁷ , DB name) C25D 1/00 C25D 1/20 G11B 7/26

Claims (5)

(57) [Claims] 1. A fine concavo-convex shape is formed on a photoresist layer formed on a glass substrate, Ni electroforming is performed after forming a conductive coating on the fine concavo-convex shape, and the Ni electroforming is peeled from the glass substrate. A mother manufacturing step of manufacturing a master stamper by Ni electroforming, and a mother stamper manufactured by Ni electroforming by a step similar to the master manufacturing step from the master stamper after a release coating treatment on the master stamper A master stamper manufacturing process for manufacturing an optical disk duplication comprising a manufacturing process or a sun manufacturing process for manufacturing a sun stamper by electroforming from the mother stamper by a process similar to the process for manufacturing the mother stamper from the master stamper. the mother Stan path created on path, the outer peripheral Ni thin film according to prior Symbol Ni electroforming the mother stamper A method of manufacturing a stamper for optical disk duplication, which comprises cutting with a cutter having a blade length adjusting stopper, removing and then peeling. Wherein said master Stan optical disk duplication stamper manufacturing method according to claim 1, characterized in that it the path outside peripheral surface provided with conductive sealing mask. Wherein the master Stan optical disk duplication stamper manufacturing method according to claim 1 from the surface to the path outside peripheral surface, characterized in that paste the conductive tape crowded around the back surface. Wherein said master Stan optical disk duplication stamper manufacturing method according to claim 1, in Pas outer circumferential surface and providing a ring-shaped thin plate titanium material. The back surface of claim 5, wherein the master Stan Pas, Masutasu <br/> Tan optical disk duplication stamper manufacturing method according to claim 1, characterized in that is provided with the outer surface is greater than the backing plate of the path.