JP3438983B2 - Method and apparatus for supporting work for wire saw - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a supporting device and the like used when cutting a work such as a semiconductor material, a magnetic material and a ceramic with a wire saw.

[0002]

2. Description of the Related Art In recent years, a wire saw has been used to cut a large-diameter work into a large number of wafer-shaped small pieces. Need to support. A supporting device for this purpose is shown in FIGS. 3 (a), 3 (b), 4 and 5.

The supporting device 21 comprises a work plate 22 having a pair of strip-shaped convex portions 22a, 22a formed along the longitudinal direction. The work 23 is adhered to the work plate 22 via, for example, a glass plate or a carbon plate. The work plate 22 has the same length as that of the work plate 22 and can be fitted between the pair of band-shaped projections 22a and 22a.
Is bolted to an adapter plate 24 having. The adapter plate 24 has a T-shaped cross section. The adapter plate 24 is attached to another adapter plate 25 having a groove 25a having a shape complementary to the T-shaped cross section of the adapter plate 24. A stopper piece 24b is attached to one end of the adapter plate 24, and the adapter plate 24 is bolted to the other adapter plate 25 at this stopper piece 24b.

A work supporting device 2 for such a wire saw
The work 23 supported by 1 is pressed against a cutting wire (not shown) in the wire saw to be cut.

[0005]

By the way, according to the work supporting device for wire saw 21 described above, when the adapter plate 24 is attached to the other adapter plate 25, the T-shaped cross-sectional shape of the adapter plate 24 is
After being aligned with the groove 25a of the other adapter plate 25, the adapter plate 24 must be slid with respect to the other adapter plate 25 so that the adapter plate 24 and the groove 25a fit together. I have to. This work is performed with the work plate 22 with the work attached to the adapter plate 24. Therefore, the overall weight is considerable. Especially for silicon semiconductor single crystal,
As the diameter increases, the length is being considered, and the overall weight tends to increase.

When the weight of the whole is increased, the adapter plate 24 itself is bent, and it becomes difficult to slide it with respect to the other adapter plate 25. Further, in the case of the slide type attachment, if the slurry used when cutting with the wire saw adheres to the groove 25a and hardens, it becomes difficult to attach / detach to / from the adapter plate 24. When such a situation occurs, in the worst case, the adapter plate 24
There is a risk that the cut work may be dropped while trying to forcibly remove the work piece from the other adapter plate 25.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a work supporting device for a wire saw, which can relatively easily attach and detach a work.

[0008]

In the supporting method according to the first aspect of the present invention, a work to be cut by a wire saw is adhered to the middle of the lower surface of a work plate longer than the work, and the left and right ends of the work plate are attached to each other. , Each of which is hooked on a pair of brackets having a hook shape on the supporting device,
The work plate is fixed on the pair of brackets.

According to the second aspect of the present invention, the supporting device is longer than the work to be cut by the wire saw, and can hold the work plate to which the work is bonded in the middle of the lower surface and the left and right ends of the work plate. It is characterized by comprising a pair of brackets having a hook shape and a fixing means for fixing the work plate on the bracket.

[0010]

According to the above-described work supporting method and work supporting apparatus, for example, an operator holds near the left and right ends of a work plate, hooks the work plate on a pair of brackets having tip hooks, and then It suffices to fix the work plate on the bracket with fixing means such as bolts, and there is no need to push in or pull out the work plate.
The removal work can be performed extremely easily.

Further, since it is of a hook type, even if the work plate is bent by its own weight or the weight of the work, the work can be attached and detached very easily. Further, even if the slurry adheres to the bracket, the adhered slurry can be easily removed, and even if the bracket is not removed, there is no problem in attaching and detaching the work.

[0012]

EXAMPLES Examples will be described below with reference to the drawings.

FIG. 1 is a perspective view showing the main part of the supporting device, and FIG.
FIG. 2A is a front view showing the main part of the supporting device, and FIG. 2B is a right side view showing the main part of the supporting device. The support device 1 includes a work plate 3 for attaching a work 2 to be cut by a wire saw (not shown), a pair of brackets 4 and 4 for supporting the left and right ends of the work plate 3, and the work plate 3. A pair of brackets 4,
4 is provided with a bolt 5 as a fixing means for fixing.
In FIG. 1, a semiconductor silicon ingot is shown as the work 2.

The work plate 3 is longer than the work 2. On the lower side of the work plate 3, left and right thin portions 3a, 3a are formed, respectively. The length of the thick portion 3b sandwiched between the thin portions 3a and 3a is slightly shorter than the distance between the inner side surfaces of the pair of brackets 4 and 4. The work 2 is fixed to the lower surface of the thick portion 3b of the work plate 3 through a glass plate, a carbon plate or the like.

The pair of brackets 4 and 4 are respectively "ko"
The bracket 4 is shaped like a letter, and the tip of each bracket 4 is shaped like a hook. That is, the main body 6 of the work supporting device 1 (see FIG.
(A)) mounting portion 4a to be mounted, and this mounting portion 4a
An arm portion 4b vertically installed on a and a placing portion 4c continuously provided on the lower end portion of the arm portion 4b and extending horizontally toward the front side.
And the supporting portion 4c connected to the front end of the mounting portion 4c.
It is composed of a stopper portion 4d which stands upright.

Further, FIGS. 1 and 2A show a main part of an attachment device for attaching the work plate 3 to which the work 2 is adhered to the support device 1. The mounting device 10 has a mounting table 11. The mounting table 11 has a box shape and is capable of supporting both ends of the work plate 3 and surrounding and bending the work 2 bonded to the work plate 3. The platform 11 can be moved up and down by an elevator device (not shown),
It can be moved back and forth by a feeding device (not shown). By using the mounting table 11, the work 2 is prevented from falling onto the ground.

Next, a method of mounting the work 2 on the supporting device 1 using the mounting device 10 will be described.

First, the work plate 3 to which the work 2 is adhered is placed on the mounting table 11. Next, the mounting table 11 is raised by an elevating device (not shown), and the thin-walled portions 3a, 3a of the work plate 3 are aligned with the gaps at the tips of the brackets 4, 4. Then, the table 1 is mounted by a feeding device (not shown).
1 is advanced to position the thin portions 3a, 3a of the work plate 3 on the mounting portion 4c of the work plate 3. After that, the platform 11 is lowered by an elevator device (not shown). As a result, the work plate 3 is attached to the brackets 4, 4
Will be mounted on the mounting portion 4c. Then, the work plate 3 is fixed on the brackets 4 and 4 by the bolts 5. As a result, the work 2 is supported by the support device 1.

According to the supporting device 1 and the supporting method as described above, the work plate 3 is hooked on the pair of brackets 4 and 4 having the tip hook shape, and then the work plate 3 is mounted on the brackets 4 and 4 by the bolts 5. Since it suffices to fix the work plate 3 and the work of pushing in or pulling out the work plate 3 is not necessary, the work of attaching and detaching the work 2 can be performed extremely easily. This work can be easily performed manually by an operator without using the attachment device 10.

Further, since it is of a hook type, even if the work plate 3 is bent by its own weight or the weight of the work 2, the work 2 can be attached and detached very easily. Further, even if the slurry adheres to the brackets 4 and 4, the adhered slurry can be easily removed, and even if it is not removed,
There is no problem in attaching and detaching the work.

Although the embodiments made by the present inventor have been described above, the present invention is not limited to the embodiments, and various modifications can be made without departing from the scope of the invention. There is no end.

[0022]

According to the present invention, for example, an operator holds near the left and right ends of a work plate, hooks the work plate on a pair of brackets having a tip hook shape, and thereafter,
It is only necessary to fix the work plate on the bracket with fixing means such as bolts, and there is no need to push in or pull out the work plate, so the work of mounting and removing the work can be done very easily. become.

Further, since it is of a hook type, even if the work plate is bent by its own weight or the weight of the work, the work can be attached and detached very easily. Further, even if the slurry adheres to the bracket, the adhered slurry can be easily removed, and even if the bracket is not removed, there is no problem in attaching and detaching the work.

[Brief description of drawings]

FIG. 1 is a perspective view showing a main part of a supporting device according to an embodiment.

FIG. 2 is a front view and a right side view showing a main part of a supporting device according to an embodiment.

FIG. 3 is a front view and a right side view showing a main part of a conventional supporting device.

FIG. 4 is a perspective view showing a state in which a work is adhered to a conventional work plate.

5 is a perspective view showing a state where the work plate of FIG. 4 is attached to an adapter plate.

[Explanation of symbols]

1 Support device 2 work 3 work plate 4 bracket 5 bolts (fixing means)

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Etsuo Kiuchi 762 Ashimon, Gunma-gun Gunma-gun Gunma Prefecture Sanmitsu Semiconductor Industry Co., Ltd. (72) Inventor Kazuo Hayakawa 762-Ashimon Gunma-gun Gunma-cho Sanmae Semiconductor Industry Co., Ltd. (72) Inventor Kohei Sotoyama 150 Odaira, Odakura, Saigo-mura, Nishishirakawa-gun, Fukushima Shin-Etsu Semiconductor Co., Ltd., Shirakawa Laboratory (56) Reference JP-A-51-106286 (JP, A) (58) ) Fields surveyed (Int.Cl. ⁷ , DB name) B24B 27/06 B24B 41/06 B28D 5/04 H01L 21/304 611 B30B 15/02 B23Q 3/155

Claims (2)

(57) [Claims] 1. A work to be cut by a wire saw is bonded in the middle of the lower surface of a work plate that is longer than the work, and the left and right ends of the work plate are respectively paired with a pair of brackets at the end of the support device. A method for supporting a work for a wire saw, characterized in that the work plate is fixed on the pair of brackets. 2. A work plate, which is longer than a work to be cut by a wire saw and to which the work is bonded in the middle of the lower surface, and a pair of brackets having a hook shape capable of holding the left and right ends of the work plate. And a fixing means for fixing the work plate on the bracket, the device for supporting a work for a wire saw.