JP3450101B2 - Cleaning method and cleaning device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for cleaning objects to be cleaned, which are laminated so that at least a part thereof is in close contact with each other.

[0002]

2. Description of the Related Art When cleaning parts that are in close contact with each other through an oil film such as a lead frame, the parts are usually put in a cleaning basket at a level of several hundreds, and the cleaning basket is immersed in a cleaning agent for cleaning. ing. As a cleaning agent,
Chlorinated solvents such as CFC 113 and 1,1,1-trichloroethane which are specific CFCs have been mainly used. Chlorine-based solvents are generally characterized by high solubility in organic materials such as processing oils and fats. As the cleaning step, steam cleaning is performed after immersion cleaning, and finally the parts are given dryness. Further, during immersion cleaning, ultrasonic waves may be irradiated as necessary to effectively remove organic substances by dissolution.

The above-mentioned chlorine-based solvent is excellent in that it has various elements required for cleaning agents, such as low surface tension, low viscosity, high KB value, no flash point, and steam cleaning. Although it is a solvent, due to the environmental problems associated with the recent destruction of the ozone layer, 1,1,1-
Trichloroethane has been banned since 1996. For this reason, use of methylene chloride, trichlene, or the like as a chlorine-based organic solvent in place of 1,1,1-trichloroethane has been studied and partially put to practical use.

However, methylene chloride is suspected to be a carcinogenic substance, and it is expected that environmental regulations (water quality standards, air pollution, soil environmental standards) will be strengthened, while trichlene is categorized in the Chemical Substances Control Law, Class 2 Specified Chemistry. It is expected that the substance will be designated and various regulations will be strengthened under the Water Pollution Control Law.
Furthermore, since these solvents contain chlorine in the molecule, they may be subject to future use regulations as substances causing ozone layer depletion.

As described above, the use of chlorine-based solvents including alternative solvents such as methylene chloride and trichlene is required to be reduced or eliminated altogether. Therefore, as cleaning agents to replace chlorine-based solvents, organic solvents such as relatively volatile alcohols, acetone, and ether, alternative CFCs such as second-generation CFCs and third-generation CFCs, silicone-based solvents and isoparaffins can be used. Various hydrocarbon solvents have been proposed. However, organic solvents such as alcohols, acetone, and ether, which dissolve organic substances and are relatively highly volatile, are not only toxic to the human body, but also have a low flash point and require handling under the Fire Defense Law. Therefore, it has a difficulty in practicality. Second-generation CFC (HCFC) contains chlorine in the molecule, and it was reported that it will be subject to usage restrictions around 2020.
FC) has drawbacks in terms of manufacturing and cost.

On the other hand, a cleaning agent containing a silicone-based solvent or a hydrocarbon-based solvent such as isoparaffin as a main component does not cause environmental damage such as ozone layer destruction and adheres to electronic parts. It exhibits excellent cleaning performance against various stains such as cutting flux and press oil adhering to the flux and metal working parts. In addition, the first mission of cleaning is to remove the contaminants from the surface of the parts,
At the same time, it is important to carry out the drying without impairing the cleaning finish. For that purpose, it is considered that the best method is to perform steam cleaning and then dry after finishing cleaning or cleaning and rinsing. The cleaning agent containing a silicone-based solvent or a hydrocarbon-based solvent as a main component also has an advantage that such a cleaning mode can be carried out.

Although the above-mentioned cleaning agent containing a silicone-based solvent or a hydrocarbon-based solvent as a main component can be used for most industrial parts, for example, in the state of a laminated layer closely adhered to each other such as a lead frame. For cleaning products, there is a problem that the cleaning agent (including steam cleaning agent) is difficult to enter in the gaps of the laminate, and the cleaning agent that has once invaded is difficult to come out, resulting in poor finish after cleaning. There was a difficulty that it was easy.

Such a phenomenon is not limited to a cleaning agent containing a silicone solvent or a hydrocarbon solvent as a main component,
It is a phenomenon that applies to all ethane alternative cleaning agents. That is, many thin metal plates such as lead frames and hoop materials have portions that are in close contact with each other due to the thickness of the oil film, and it is extremely difficult to remove the oil film in this portion. For example, in a so-called “standard size” lead frame or the like after punching, the lead frames are in close contact with each other due to the working oil in the manufacturing process. For this reason, in cleaning, the cleaning agent must be dissolved and removed after the cleaning agent has penetrated into the gaps closely adhered by the oil film. Most of the CFC / ethane alternative cleaning agents that do not contain chlorine in the molecule are difficult to handle only by their dissolving power. In addition, ultrasonic irradiation, cleaning agent liquid circulation, cleaning basket swing (up and down movement), etc. are used together. However, even if these cleaning methods are used, the finishability after cleaning is not sufficiently satisfied.

On the other hand, as a method (or a cleaning device) for cleaning the plate-like parts and the like which are stacked in close contact with each other as described above, for example, they are stacked in a holding recess whose width is widened toward the opening. The plate-shaped parts are placed, and the jig that holds the plate-shaped parts is repeatedly tilted at a predetermined angle to clean (and dry) while separating (peeling) the plate-shaped parts that are in close contact during cleaning. ) Has been proposed (Japanese Patent Laid-Open No. 6-114352 and Japanese Utility Model Publication No.
6-31884 gazette).

However, in the above-described cleaning method, since the plate-like parts are basically tilted in accordance with the forming angle of the holding recesses to separate the plate-like parts by the deviation, the deviation width is set to be large. It was difficult to do.
Further, in order to obtain a large amount of deviation, the forming angle of the holding concave portion and the repeating inclination angle of the jig must be increased,
Therefore, there is a risk that the plate-shaped component will fall from the jig, and also a load will be applied to the driving means for inclining the jig. In the first place, there is a problem in that the jig for holding the part to be cleaned is tilted in the cleaning tank, which causes the apparatus to be complicated.

In Japanese Patent Publication No. 57-6982, there is described a jig using two plates having notches as a device for cleaning a plate-like cleaning object such as a lead frame. However, in this conventional pallet jig, an attempt is made to solve the influence on the washability due to the poor drainage property due to the large contact area with the jig in flat mounting, and it has unevenness. The two plates are used only for arranging and holding the wash items in the recesses, and do not shift the block-like wash items in the washing process. Further, in Japanese Utility Model Laid-Open No. 221-2726, a container having liquid crystal panels arranged in a vertical direction and filled therein is provided with a plate having corrugated unevenness corresponding to the thickness of the panel, and the corrugated plate is used to move the panel up and down. There is described a liquid crystal panel cleaning jig which is fixed appropriately and slides the bottom plate laterally to open a gap between the front and back surfaces of the panel to improve the cleaning property.
However, the plate having wavy unevenness in this jig is used to fix the panels one by one from the top and bottom and also to fix the panels with a gap open when they are slanted. However, it cannot be applied to thin plates such as lead frames.

[0012]

As mentioned above, various alternative cleaning agents for CFCs and chlorine-based solvents that cause environmental damage have been investigated, but none of them contain chlorine in the molecule. However, it is difficult to deal with the objects to be cleaned that are laminated so as to be in intimate contact with each other through the oil film, etc., only by the dissolving power of the cleaning agent, ultrasonic irradiation, liquid circulation of the cleaning agent, and shaking of the cleaning basket. The current situation is that sufficient cleaning finish has not been obtained even when these are used together.

On the other hand, in the conventional cleaning method in which the stacked state of the stacked objects to be cleaned is shifted, it is difficult to set the deviation width to a large extent, and the effect of the displacement can be obtained sufficiently. However, the jig for accommodating the object to be cleaned needs to be tilted in the cleaning tank, which complicates the apparatus.

The present invention has been made in order to solve such a problem, and it is possible to stably impart a good cleaning finish to an object to be cleaned that is laminated so as to be in intimate contact via an oil film or the like. It is an object of the present invention to provide a cleaning method that is made possible, and a cleaning device that can realize such a cleaning finish with a simple device configuration.

[0015]

According to the cleaning method of the present invention, as described in claim 1, when cleaning the objects to be cleaned that are laminated in a state where at least a part thereof is in close contact, the cleaning method is formed upward. By applying the object to be cleaned in the laminated state along the direction of the laminating surface thereof to a jig having an uneven portion, the laminated state of the object to be cleaned is changed from the initial state to the laminated state in accordance with the shape of the uneven portion. It is characterized in that the object to be cleaned is cleaned while being displaced along the surface direction.

Further, the cleaning method of the present invention is particularly preferably defined in claim 2.
As described above, in the above-described cleaning method, a jig having the uneven portion is installed near the bottom of the cleaning tank,
The object to be cleaned in the stacked state is stored in a cleaning basket such that the stacking surface direction is the vertical direction, and the bottom of the object to be cleaned in the stacked state hits the uneven portion of the jig while the cleaning basket is descending. , Swinging the cleaning basket up and down in the cleaning tank so that the stacked objects to be cleaned are displaced according to the shape of the uneven portion, or as described in claim 3, By stacking the objects to be cleaned in the stacked state in a cleaning basket in which a jig having an uneven portion is installed so as to be supported by the uneven portions of the jig with the stacking surface direction being the vertical direction, the stacked state is obtained. The object to be cleaned is shifted according to the shape of the uneven portion.

According to a fourth aspect of the present invention, as described in claim 4, the first cleaning device is formed with a cleaning basket for accommodating the objects to be cleaned, which are stacked in a state where at least a portion thereof is in close contact, and an upward direction. A jig having a concavo-convex portion is installed near the bottom, and a cleaning tank in which a cleaning agent and / or its vapor into which the cleaning object stored in the cleaning basket is dipped or exposed and a descending direction of the cleaning basket are provided. The swinging mechanism for swinging the washing basket up and down in the washing tank so that the bottom of the objects to be washed in the stacked state hits the uneven portion of the jig along the direction of the stacking surface. It is characterized by having and.

Further, in the second cleaning device, as described in claim 5, a jig having an uneven portion formed upward is installed on the bottom portion, and at least a part of the jig is laminated in close contact. And a cleaning basket in which the cleaning target is housed so as to be supported by the concave-convex portion along the direction of the laminated surface, and a cleaning agent in which the cleaning target housed in the cleaning basket is immersed or exposed and / or It is characterized by comprising a cleaning tank containing the vapor.

According to a sixth aspect of the present invention, there is provided the cleaning device according to the first or second cleaning device, wherein the ultrasonic wave is installed at the bottom of the cleaning tank containing the cleaning agent. It is characterized by comprising an oscillating means and a degassing means for removing the dissolved gas in the cleaning agent.

Here, the washing in the present invention is not particularly limited as long as it is a step of treating a laminate, at least a portion of which is in close contact with an oil film or the like, as an object to be washed, and liquids such as oils and fats. A stain removal cleaning step for mainly removing various dirt components such as dirt and solid dirt, a rinsing cleaning step for mainly removing cleaning agent components adhering to the cleaning step, and drying of an object to be cleaned using a steam cleaning agent (in some cases, It can be applied to any of the steam cleaning (drying) steps of performing cleaning (including cleaning). Further, it may be applied to one of the respective cleaning steps as described above, or may be applied to each of the cleaning steps in which the dirt removal cleaning step to the steam cleaning (drying) step are continued. Further, as a specific cleaning means, various physical cleaning auxiliary means such as ultrasonic irradiation, swinging of a cleaning basket, circulation and injection of a cleaning agent (in liquid or out of liquid) can be used in combination.

In the cleaning method of the present invention, the object to be cleaned in a stacked state is applied to a jig having an uneven portion along the direction of the stacking surface thereof so that the stacked state of the object to be cleaned is adjusted according to the shape of the uneven portion. Since the cleaning is carried out while shifting along the stacking surface direction from the initial state, the penetration of the cleaning agent and its vapor into the contact portion of the cleaning target is promoted in accordance with the amount of deviation of the cleaning target in the stacked state. . Therefore, it is possible to reduce the concentration of oils and fats and the like that are present in the close contact portion of the object to be cleaned in a short time. The cleaning finish can be stably imparted.

By forming the width of each convex portion of the concave-convex portion to be sufficiently wider than the thickness of each of the objects to be cleaned which form the object to be cleaned in the laminated state, the deviation amount can be reduced. Can be determined by the formation angle of. Therefore, it is possible to sufficiently obtain the effect of promoting the permeation of the cleaning agent and its vapor based on the displacement of the objects to be cleaned in the stacked state without using a complicated mechanism.

In particular, in the cleaning method according to the second aspect, the cleaning basket containing the object to be cleaned is vertically swung, so that the object to be cleaned hits the jig having the uneven portion and is displaced from the initial state. The stacked state is repeated. When the objects to be cleaned in the stacked state are displaced, the cleaning agent and its vapor are forcibly infiltrated into the contact area of the objects to be cleaned, and when the original layered state is restored, the infiltrated cleaning agent and its vapor are removed. To be done. By repeating such a state, the new cleaning agent and its vapor will permeate into the close contact part of the object to be cleaned, so that the oils and fats etc. intervening in the close part of the object to be cleaned surely and in a short time. The concentration of can be reduced.

Further, in the cleaning method according to the third aspect, cleaning is carried out by accommodating the objects to be cleaned in a stacked state in a cleaning basket having a jig having an uneven portion on the bottom thereof. In such a case, the objects to be cleaned do not shift from each other in the initial stage of cleaning and the stacked state is maintained, but as the cleaning time elapses, the cleaning agent and its vapor permeate gradually into the adhered parts and naturally The objects to be cleaned exhibit a slip phenomenon with each other. The width of each convex part of the uneven part is wide enough for the thickness of the individual objects to be cleaned that form the stacked objects to be cleaned, and a sufficient inclination is formed so that one convex part is formed. When considered in terms of parts, the objects to be cleaned adjacent to each other will be slightly displaced. Even if the amount of displacement at one location is small, it will be several percent to several tens of percent of the remaining area when integrated over the entire contact surface, which will greatly contribute to the penetration of the cleaning agent and its vapor. As a result, it is possible to reliably reduce the concentration of oils and fats or the like that are present in the close contact portion of the cleaning target.

In the first cleaning device of the present invention, the cleaning basket is placed so that the bottom of the stacked objects to be cleaned hits the uneven portion of the jig installed near the bottom of the cleaning tank while the cleaning basket is descending. Since the cleaning basket swinging mechanism for swinging the cleaning basket up and down is provided, the state in which the object to be cleaned hits the jig having the uneven portion and is displaced according to the swinging of the cleaning basket and the initial stacked state are repeated. Therefore, like the cleaning method according to claim 2,
Since it is possible to reduce the concentration of oils and fats, etc. existing in the close contact part of the object to be cleaned reliably and in a short time, it is good to include the contact surface in the object to be cleaned stacked at least in part. It is possible to impart a good cleaning finish.

Further, in the second cleaning apparatus, since the jig having the concave and convex portion formed upward is installed at the bottom and the cleaning basket is used, the cleaning target in the stacked state becomes longer as the cleaning time elapses. The individual objects to be cleaned that form the objects will be slightly displaced. Therefore, as in the cleaning method according to claim 3, the concentration of oils and fats and the like present in the close contact portion of the object to be cleaned can be surely reduced, and therefore, cleaning in which at least a part of them are stacked in close contact It is possible to give a good cleaning finish to the object including its contact surface.

In each of the first and second cleaning devices of the present invention, the amount of deviation can be determined by the formation angle of the convex portion, so that the cleaning target objects in the stacked state can be formed with a simple device configuration. It is possible to sufficiently obtain the effect of promoting permeation of the cleaning agent and its vapor based on the deviation.

In the cleaning apparatus of the present invention, the ultrasonic finishing means and the degassing means for removing the dissolved gas in the cleaning agent are installed to improve the cleaning finish of the cleaning object in the laminated state. it can. This is because not only the physical cleaning assistance effect of ordinary ultrasonic cleaning but also the generation of cavitation due to ultrasonic energy can be increased by removing the dissolved gas in the cleaning agent. As the degassing means, one that heats the cleaning agent, one that uses a gas-liquid separation membrane, one that uses a vacuum pump, etc. are widely used, and the degassing means in the present invention is particularly limited to that specific means. It is not something that will be done. However, the solubility of the gas in the detergent is preferably set to 80% or less of the saturated solubility, and more preferably 65% or less.

[0029]

BEST MODE FOR CARRYING OUT THE INVENTION Modes for carrying out the present invention will be described below.

FIG. 1 is a diagram showing a schematic configuration of a cleaning apparatus according to an embodiment of the present invention. The cleaning device shown in FIG.
The main part is roughly divided into a dirt removal cleaning step A, a rinse cleaning step B, and a steam cleaning step C, and the cleaning basket 1 in which an object to be cleaned is stored is sequentially transferred to each of these steps A, B, and C. At the same time, it has a transport mechanism D to which a swinging mechanism of the cleaning basket 1 is attached. In addition, cleaning agent regeneration mechanism E
Also, a steam cleaner regenerating mechanism F is provided side by side.

The stain removing and cleaning step A has a first cleaning tank 11 and a second cleaning tank 12. Each of these washing tanks 1
1 and 12 are each filled with a predetermined amount of cleaning agent 13. By immersing the cleaning object stored in the cleaning basket 1 in the cleaning agent 13, the dirt components attached to the cleaning object are removed. It The number of cleaning tanks in the stain removal / cleaning step A is not particularly limited, and is set according to the shape of the object to be cleaned, the type and amount of dirt, the cleaning time, the cleaning quality, and the like. A single tank may be used, or multiple tanks may be used as in this embodiment.

Here, the cleaning agent 13 contained in each of the cleaning tanks 11 and 12 is set in accordance with the dirt component, the type of the object to be cleaned, etc., and the water-based cleaning agent, the solvent-based cleaning agent, etc.
Various cleaning agents can be used, but solvent-based cleaning agents are particularly suitable for the present invention. Examples of the solvent-based cleaning agent include silicone-based solvents, hydrocarbon-based solvents, perfluorocarbon-based solvents, terpene-based solvents, mixed solvents thereof, or those obtained by adding cleaning active ingredients such as alcohol and various additives to them. To be Also, after washing with a cleaning composition containing a solvent as a main component, such as an alkylamine oxide-based solvent, a polyglycol-based solvent, a terpene-based solvent, an alcohol-based solvent, and a cleaning agent containing these and a surfactant, It is also possible to use one type of solvent-based cleaning agent called a semi-aqueous cleaning agent capable of rinsing the cleaning composition with water. As an aqueous cleaning agent, an inorganic acid,
Examples thereof include aqueous solutions of organic acids and alkalis, detergents containing a surfactant as a main component, these aqueous solutions, and those obtained by adding various additives thereto.

For example, as a silicone-based solvent which is a kind of solvent-based cleaning agent,

[Chemical 1] A linear polydiorganosiloxane represented by

[Chemical 2] At least one low molecular weight polyorganosiloxane selected from cyclic polydiorganosiloxanes represented by
Examples of the hydrocarbon solvent include branched or straight chain aliphatic hydrocarbons having 6 to 20 carbon atoms.

R in the above formulas (1) and (2) is
A substituted or unsubstituted monovalent hydrocarbon group such as an alkyl group such as a methyl group, an ethyl group, a propyl group, a butyl group, a monovalent unsubstituted hydrocarbon group such as a phenyl group, a trifluoromethyl group, etc. The monovalent substituted hydrocarbon group and the like are exemplified, but the methyl group is most preferable from the viewpoint of stability of the system, maintenance of volatility and the like.

Each of the above-mentioned cleaning tanks 11 and 12 has an ultrasonic wave generator (ultrasonic vibrator) 14 as an ultrasonic wave generator installed at the bottom thereof, so that ultrasonic cleaning can be used in combination. It is possible. In addition, each cleaning tank 11,
Near the bottom of 12, a shifting jig 15 having an uneven portion formed upwardly, which will be described in detail later, is provided at a position corresponding to the swing range of the cleaning basket 1 by the swing mechanism attached to the transport mechanism D. Each is installed. Furthermore, each cleaning tank 11, 12
Each have a cleaning liquid circulation system 16, and a deaerator 17 is inserted in each of these cleaning liquid circulation systems 16. Generally, when a cleaning agent is irradiated with ultrasonic waves, the cleaning power is improved due to the cavitation effect. Also, ultrasonic waves are more effective when the dissolved gas in the cleaning agent is small. Therefore, the ultrasonic cleaning of the cleaning target can be effectively performed by using the degassing device 17 together with the ultrasonic cleaning. The combined use of such deaeration is effective for various cleaning agents.

As a concrete deaerator 17, it is preferable to adopt a simple method of discharging the cleaning agent from the nozzle in a vacuum or reduced pressure atmosphere. It is also possible to employ the method of boiling the cleaning agent described in JP-A-63-221878 or JP-A-1-27680, but when the cleaning agent 13 has a flash point. May cause inconvenience.

The dirt removing cleaning step A includes ultrasonic cleaning by the ultrasonic generator 14 installed in each cleaning tank 11 and 12 and rocking cleaning by the rocking mechanism attached to the transport mechanism D as described above. Is used together to remove dirt,
Further, other physical cleaning auxiliary means such as circulation and injection of the cleaning agent can be used together.

The rinsing / cleaning step B has a first rinsing / cleaning tank 21 and a second rinsing / cleaning tank 22. Each of these rinsing cleaning tanks 21 and 22 is filled with a predetermined amount of rinsing cleaning agent 23, and by immersing the cleaning object stored in the cleaning basket 1 in the rinsing cleaning agent 23, The cleaning agent components that adhere and residual stain components are removed. The number of rinsing / cleaning tanks in the rinsing / cleaning step B is not particularly limited, and is set according to the cleaning quality, cleaning time, etc., and may be a single tank, or as in this embodiment. It may be a tank.

When the solvent-based cleaning agent is used as the cleaning agent 13, the rinsing cleaning agent 23 accommodated in each of the rinsing cleaning tanks 21 and 22 is a cleaning agent containing only the solvent as the main component, or a small amount thereof. The thing etc. which added the agent are used.
In addition, as long as it is a cleaning agent that can perform cleaning, rinsing, and further drying (steam cleaning) with one liquid, a cleaning agent having the same composition as the cleaning agent 13 can be used as the rinsing cleaning agent 23. Furthermore, when using a water-based cleaning agent or a semi-water-based cleaning agent as the cleaning agent 13, a rinse cleaning agent 23
Is used as water.

Further, as in the cleaning tanks 11 and 12, an ultrasonic generator 14, a shift jig 15 and a deaerator 17 are inserted in the rinse cleaning tanks 21 and 22, respectively, and the cleaning agent circulation system 1 is provided.
6 is installed, and the rinsing and cleaning efficiency is improved similarly to the stain removing and cleaning step A.

A cleaning agent regenerating mechanism E is additionally provided in the above-mentioned stain removal cleaning step A and rinse cleaning step B.
Here, when the cleaning is repeated, the dirt component is mixed in the cleaning agent 13 and the rinsing agent 23, and the concentration thereof gradually increases. Here, when a new liquid equivalent to the amount taken out from the first cleaning tank 11 (or the first rinse cleaning tank 21) while being attached to the cleaning object or the cleaning basket 1 is replenished,
The dirt density approaches a certain level. If this concentration is below the control value, it is not necessary to replace the cleaning liquid,
If the control value is exceeded, liquid replacement is required. In order to reduce the treatment amount of the cleaning agent waste liquid and the running cost, it is important to reuse the contaminated cleaning agent by, for example, regenerating it by distillation. Therefore, in the cleaning apparatus of this embodiment, a cleaning agent regenerating mechanism E is attached to the dirt removal cleaning step A and the rinse cleaning step B.

As the cleaning agent regenerating mechanism E, for example, a distillation apparatus is used, and the cleaning agent regenerated by distillation is reused. That is, for example, the cleaning agent regeneration mechanism E from the first cleaning tank 11
The cleaning agent 13 sent to is separated by the distillation device of the cleaning agent regeneration mechanism E from the dirt component by utilizing the boiling point difference. This distilled and purified cleaning agent is used as a regenerated cleaning agent in the second cleaning tank 1
It is retransmitted to 2. Further, since the first cleaning tank 11 and the second cleaning tank 12 are connected via the overflow pipe 18, the cleaning agent 13 contained in the first cleaning tank 11 and the second cleaning tank 12 is The cleaning agent regeneration mechanism E is configured to circulate while being cleaned. The same applies to the rinse detergent 23.

Here, the cleaning agent 13 and the rinse cleaning agent 23 are basically treated as separate systems in the cleaning agent regenerating mechanism E, but a cleaning agent having the same composition or a cleaning agent having the same main component is used. In this case, the cleaning agent 13 and the rinse cleaning agent 23 can be treated in the same system.

The steam cleaning (drying) step C has a steam cleaning (drying) tank 31, and this steam cleaning (drying) tank 31.
Is filled with a steam cleaning agent 32. Steam cleaner 32
A heating device 33 such as a heater is placed therein, and the cleaning target is exposed to the steam 32a generated by heating the steam cleaning agent 32, whereby the cleaning cleaning and drying of the cleaning target are performed. Further, a cooling unit 34 is provided above the steam cleaning (drying) tank 31 to prevent vaporization of the steam 32a. The steam cleaning (drying) tank 31 may be configured such that the object to be cleaned is once immersed in the steam cleaning agent 32, and the object to be cleaned is exposed to the steam 32a in the pulling process.

Here, in general, cleaning means removing the contaminants from the surface of the object to be cleaned, but in a broad sense, it includes the step of drying the parts after the removal. That is, no matter how much the dirt is removed in the washing step, if it takes time to dry it, redeposition of dirt in the drying step and adsorption of dust, dust and the like will be caused, and finally the finishability will be impaired. This shows how quickly the object to be cleaned, which is wet with the cleaning agent, must be dried. For this reason, the cleaning apparatus of this embodiment applies the steam cleaning (drying) step C to the drying.

As the above-mentioned vapor cleaner 32, for example, a single solvent or a mixture of perfluorocarbon type solvent, hydrofluorocarbon type solvent, hydrochlorofluorocarbon type solvent, hydrofluoroether type solvent, silicone type solvent, etc., or various types thereof described above. A cleaning solvent, an additive, etc. are used. By performing steam cleaning or immersion cleaning with the steam cleaning agent 32 mainly containing such a perfluorocarbon-based solvent, the cleaning target is liquid-replaced with a perfluorocarbon-based solvent or the like having a small latent heat of vaporization, and when it is taken out from the apparatus. To be dried. In particular, when the vapor cleaning agent 32 made of a perfluorocarbon solvent is used, it is preferable to use the above-mentioned silicone solvent or aliphatic hydrocarbon solvent as the cleaning agent 13 and the rinse cleaning agent 23. The reason is that the solubility with the perfluorocarbon-based solvent is large in the heated state, and the liquid replacement of the cleaning agent existing on the surface of the cleaning object can be easily performed. Normally, the cleaning agent component is liquid-replaced by steam cleaning, but in order to perform liquid replacement more effectively, it is preferable to immerse the cleaning agent component in the heated steam cleaning agent 32 and then pull it up. This heating temperature is 3
It is preferable that the temperature is lower than the boiling point of 2 by about 40 K to the boiling point.

In the above-mentioned steam cleaning (drying) step C, a steam cleaning agent regeneration mechanism F is attached. Here, when the concentration of the cleaning agent component mixed in the steam cleaning tank 31 increases,
Not only is the steam cleaning property (drying property) reduced, but cleaning agent 1
There is a risk of fire depending on the type of 3 or 23. Therefore, a steam cleaning agent regeneration mechanism F is provided which separates the steam cleaning agent 32 from the mixed liquid of the cleaning agents 13 and 23 and the steam cleaning agent 32 and returns only the steam cleaning agent 32 to the steam cleaning tank 31. As the liquid separating means, for example, a separating means or the like based on the difference in specific gravities thereof is used, and it is also possible to use cooling or the like together to facilitate the separation.

For example, in the perfluorocarbon type solvent, about 5% by weight of a silicone type solvent or an aliphatic hydrocarbon type solvent is dissolved at room temperature. This concentration has no particular adverse effect on the steam detergency. Usually, even if about 20% by weight of a silicone solvent or an aliphatic hydrocarbon solvent is mixed in the steam cleaning tank 31, it does not adversely affect the steam cleaning property and the cleaning finish property.

Next, the steps A, B, and C will be described in detail with reference to FIGS. 2 to 4 for explaining the mechanism for shifting the stacked objects to be cleaned, which is a characteristic part of the cleaning device. 2 is a partial cross-sectional view (a is a front view and b is a side view) showing a state in which the cleaning basket 1 is housed in the cleaning tank 11 (12), and FIG. FIG. 4 is a perspective view showing a state of being housed in the omitted cleaning tank, and FIG. 4 is a view for explaining the mechanism for shifting the cleaning object. Here, the mechanism for shifting the object to be cleaned will be described in the case where the cleaning basket 1 is housed in the cleaning tanks 11 and 12.
The same applies to the areas 1 and 22.

As shown in FIGS. 2 and 3, the cleaning basket 1 is composed of a frame body having a plurality of bottom plates 1a for partially supporting the bottom part of the objects to be cleaned 2 in the stacked state. Has an opening so that the object to be cleaned 2 contacts the shifting jig 15. Also, on the side surface of the cleaning basket 1,
Side support plate 1b that prevents the cleaning target 2 from collapsing or dropping
Are provided respectively.

The object 2 to be cleaned is housed in the cleaning basket 1 as described above such that the stacking surface direction is the vertical direction. At this stage of storage, the cleaning object 2 has a plurality of bottom plates 1a.
It is supported by and remains laminated. Here, the cleaning target 2 is formed by stacking alignable plate-like parts such as a lead frame and a hoop material, or similarly alignable parts such as a liquid crystal cell, in a state where at least a part thereof is in close contact with each other. It is particularly effective for those in which the laminated surfaces are laminated in close contact with each other via an oil film or liquid crystal. The cleaning object 2 is not limited to a lead frame, a liquid crystal cell, or the like, and similarly various kinds of mechanical parts, electronic parts, etc. can be cleaned as long as they are laminated in a state where at least a part of them are in close contact It can be an object.

On the other hand, the shifting jig 15 has an uneven portion 15a formed upward, and the uneven portion 15a basically has a saw-tooth shape, that is, a mountain-shaped convex portion having a top angle (tilt angle) θ. It has a continuously formed shape. However, the top portion may have a flat portion depending on the thickness of the component, and this does not particularly affect the cleaning effect. Such a shifting jig 15 is provided with the uneven portion 15 on the upper side.
The cleaning tank 1 so that the cleaning target 2 can be supported by a.
Two are installed in parallel in each of 1 and 12,
As for the installation direction, the direction in which the uneven portion 15a is formed is the cleaning target 2
Is set so as to be parallel to the stacking direction of. Also,
When the cleaning basket 1 is swung by the swinging drive mechanism attached to the transport mechanism D, the bottom of the cleaning object 2 is uneven when the cleaning basket 1 descends.
It is supposed to hit.

The formation pitch p of each chevron projection of the concavo-convex portion 15a is determined by the thickness of each of the parts to be cleaned (2 ₁ , 2 ₂ , ... 2 _n ) constituting the object to be cleaned 2 in the stacked state ( It is set to be sufficiently wider than the width in the stacking direction). If the formation pitch p of the chevron convex portions is not set sufficiently wide with respect to the thickness of each of the parts to be cleaned, the parts to be cleaned may not be sufficiently displaced. For this reason, it is preferable that the formation pitch p of the chevron protrusions is twice or more the thickness of each part to be cleaned. In addition, the top angle θ of the chevron convex portion determines the shift width of the cleaning target object 2 in the stacked state, and the required cleaning quality and the condition of the cleaning target object 2 (contact state, inclusions in the contact portion, etc.). ) Is set appropriately. It is preferable that the specific shift width of the object to be cleaned 2 is 0.1% or more with respect to the width in the shift direction of the component to be cleaned 2 (width in the vertical direction of the component). More preferably 0.3% or more, more preferably 0.
5% or more. Since this shift width depends on the width of the component to be cleaned 2 in the displacement direction, the top angle θ of the chevron convex portion is further changed according to the thickness of the component 2 to be cleaned so that the above-described displacement width of 0.1% or more can be obtained. Sets the formation pitch p. If the shift width is less than 0.1%, the penetration and discharge of the cleaning agent 13 may not be sufficiently promoted. The shift width is more preferably 0.5% or more, but if the shift width is set too large, deformation may occur depending on the part 2 to be cleaned. Therefore, it is practically set to 10% or less. preferable.

The cleaning basket 1 containing the object to be cleaned 2 is
Cleaning tanks 11 and 12 in which the above-mentioned shifting jig 15 is installed
Is immersed in the cleaning agent 13 filled in the
It is rocked up and down. Swing the cleaning basket 1 up and down,
If the bottom portion of the cleaning object 2 hits the uneven portion 15a of the shifting jig 15 during the descending operation, the cleaning object 2 becomes uneven.
It is shifted according to the chevron shape. A state in which the cleaning target 2 in the stacked state is displaced by the displacement jig 15 will be described with reference to FIG.

That is, the uneven portion 15a of the shifting jig 15
The object to be cleaned 2 before hitting is kept in the initial stacked state as shown in FIG. When the cleaning basket 1 starts to swing and the bottom portion of the cleaning object 2 hits the uneven portion 15a, as shown in FIG.
_The space between _n is forcibly displaced along the stacking surface direction to a shape corresponding to the mountain shape of the uneven portion 15a of the displacement jig 15. Since the cleaning agent 13 is forced to permeate between the respective laminated surfaces of the cleaning target object 2 with the stacked state shifted, the permeation of the cleaning agent 13 into the close contact portion of the cleaning target object 2 is promoted.

The installation position of the shifting jig 15 is shown in FIG.
The state where the maximum shift width shown in (b) is reached is the cleaning basket 1.
It is preferable to set so as to be realized when the lower end portion of the vertical swing of the cleaning basket is reached, and the stopper of the cleaning basket 1 is installed in the cleaning tanks 11 and 12 so that such a state can be stably obtained. Good. If the cleaning basket 1 descends even after reaching the maximum shift width shown in FIG. 4B, the cleaning target X may be collapsed or dropped.

Since the cleaning basket 1 is continuously swung up and down, the cleaning basket 1 is raised and the cleaning object 2 is covered with the uneven portion 15a.
When the cleaning target 2 is supported by the bottom plate 1a of the cleaning basket 1 again, the cleaning target 2 returns to the initial stacked state. At this time, the permeated cleaning agent 13 is discharged. Then, by repeating the vertical movement of the cleaning basket 1 many times within the cleaning time, the displacement of the cleaning target 2 caused by the shifting jig 15 and the once displaced cleaning target 2 are in the original state (initial state). Since the phenomenon of returning to step 1 occurs continuously, the new cleaning agent 13 can be constantly permeated into the contact portion of the cleaning object 2. At this time, when a solvent-based cleaning agent is used as the cleaning agent 13, the oil and the like are sequentially dissolved from the end side into the cleaning agent 13 that has continuously penetrated into the close contact portion, so that it can be performed reliably and in a short time. Cleaning object 2
It is possible to reduce the concentration of oil or the like that is present in the close contact part.

Further, as described above, the objects to be cleaned 2 in the stacked state can be largely displaced only by vertically moving the jig 15 and the cleaning basket 1, so that no mechanical load is applied. With a very simple device configuration, it is possible to obtain a good cleaning effect on the contact portion due to the displacement of the cleaning object 2. Further, since the shift width can be basically determined by the apex angle θ of the uneven portion 15a of the shift jig 15, it is possible to easily obtain the shift width according to the cleaning condition only by replacing the shift jig 15. You can

When the above-described swinging and accompanying cleaning of the object to be cleaned 2 are applied to the object to be cleaned, ultrasonic waves are emitted from the ultrasonic generator 14 to the object to be cleaned 2 The effect can be further enhanced.
Furthermore, by performing degassing of the cleaning agent 13 when performing ultrasonic irradiation, the ultrasonic cleaning effect can be further enhanced as described above.

The object 2 to be cleaned which has been subjected to the dirt removing and cleaning step A as described above is then sent to the rinsing cleaning step B, and similarly to the dirt removing and cleaning step A, the swing cleaning and the accompanying displacement of the object to be cleaned 2 are carried out. Due to the effect and further the cleaning assisting effect by the ultrasonic irradiation, the cleaning agent 13 component and the remaining stain component attached to the cleaning target 2 including the space between the laminated surfaces are surely removed.

After passing through the above-described rinse cleaning step B, the cleaning object 2 is sent to the steam cleaning (drying) step C and directly exposed to the steam 32a of the steam cleaning agent 32, or in the heated steam cleaning agent 32. And then exposed to the steam 32a. Then, the cleaning target 2 pulled up from the steam cleaning tank 31 after a predetermined time is brought to a dry state, and the cleaning process is completed. In the dirt removal washing step A and the rinsing washing step B, the cleaning object 2 is sufficiently removed of the dirt components including the contact portion, so that the cleaning object 2 after drying is provided with good cleaning finish. ing.

It should be noted that the shifting jig 1 is also placed in the steam cleaning tank 31.
It is also effective to dispose the cleaning object 2 in the stacked state in the steam cleaning (drying) step C by displacing the cleaning object 5 while exposing it to the steam 32a of the steam cleaning agent 32. As a result, the penetration of the vapor 32a between the stacked surfaces of the cleaning object 2 is promoted, and the cleaning finish can be further improved.

As described above, in the cleaning apparatus of this embodiment, the cleaning object 2 in the laminated state is moved by the shifting jig 15 and the swinging of the cleaning basket 1 in the dirt removing cleaning step A and the rinsing cleaning step B. Since the cleaning is performed with a large shift, it is possible to sufficiently remove the dirt component of the cleaning target 2 including the contact portion. Therefore, the object to be cleaned 2 after drying
It is possible to stably provide excellent cleaning finish. Since such a good cleaning finish can be obtained without using a complicated mechanism as described above, it is possible to simplify the device configuration and the like.
Further, by installing the shifting jig 15 in the cleaning tanks 11 and 12 and the rinsing cleaning tanks 21 and 22, if the object to be cleaned does not need to be displaced, the shifting jig 15 can be removed or the cleaning basket 1 By protecting the lower side of the cleaning object so that it does not hit the shifting jig 15, a normal cleaning process can be easily performed.

In the above embodiment, the displacement jig 15 and the cleaning object 2 contact each other when the cleaning basket is swung, but the cleaning basket 1 is cleaned without swinging. Displacement jig 15 when immersed in agents 13 and 23
It is also possible to adopt a configuration in which the cleaning target 2 hits. In this case, the same effect as that of the embodiment described later can be obtained.

Next, another embodiment of the present invention will be described with reference to FIGS.

FIG. 5 is a view showing the schematic arrangement of the cleaning apparatus of this embodiment. The cleaning apparatus shown in FIG. 5 has the same configuration as that of the cleaning apparatus shown in FIG. 1 except that the displacement jigs are not installed in the cleaning tanks 11 and 12 and the rinse cleaning tanks 21 and 22. There is. Further, the cleaning agent 13, the rinse cleaning agent 23, the steam cleaning agent 32, and the object to be cleaned are the same as those in the above-described embodiment.

As shown in FIGS. 6 and 7, the cleaning apparatus of this embodiment is characterized in that the cleaning basket 1 is provided with a shifting jig 15. That is, as shown in FIG. 6, the cleaning basket 1 according to this embodiment is a frame body in which at least two shifting jigs 15 are installed parallel to the bottom so as to support the stacked cleaning objects 2. Further, the side surface support plates 1b for preventing the cleaning target 2 from collapsing or dropping are provided on the side surfaces. The uneven portion 15a of the shifting jig 15 has the same shape as that of the above-described embodiment. The displacement jig installed in the cleaning basket 1 is not limited to the split type as shown in FIG. 6, and a displacement jig integrated in the longitudinal direction of the cleaning object 2 may be used.

The object to be cleaned 2 has a stacking surface direction which is the vertical direction and a stacking direction which is the uneven portion 15 of the jig 15.
The shifting jig 15 is arranged so as to be parallel to the forming direction of a.
Is stored in the cleaning basket 1 in which is installed, and in this state, the dirt removal cleaning step A, the rinse cleaning step B, and the steam cleaning (drying) step C are sequentially sent. And each process A, B, C
In, the displacement of the cleaning object 2 in the stacked state occurs as follows.

That is, in the initial stage of cleaning, the objects to be cleaned 2 are not displaced from each other and are in a laminated state (block state).
However, as the cleaning time elapses, the cleaning agent 13 gradually permeates into the contact portion, and the cleaning objects 2 naturally exhibit the sliding phenomenon. Uneven portion 15a of the shifting jig 15
7, the formation pitch p of each chevron-shaped convex portion is set to be sufficiently wide with respect to the thickness of the component to be cleaned. Therefore, as shown in FIG. Since the cleaning agent 13 is displaced from each other, the penetration of the cleaning agent 13 into the contact portion of the cleaning object 2 is further promoted. As a result, when a solvent-based cleaning agent is used as the cleaning agent 13, the oil and the like are dissolved in the cleaning agent 13 that has permeated into the contacting area in order from the end side, so that the contacting area of the cleaning object 2 can be reliably performed. It is possible to reduce the concentration of oil and the like present in the. Further, at this time, the swinging of the cleaning basket 1 is also used, so that the cleaning target 2
Displacement is promoted.

As described above, in the state where the cleaning object 2 is displaced, the dirt removing cleaning step A to the rinsing cleaning step B are performed.
Then, the steam cleaning (drying) step C is sequentially carried out to reliably remove the dirt components adhering to the cleaning target 2 including the contact portion, and also give good cleaning finish after drying. The effects of ultrasonic irradiation and deaeration of the cleaning agent in the stain removal cleaning step A and the rinse cleaning step B are the same as in the above-described embodiment.

As described above, in the cleaning apparatus of this embodiment, the objects to be cleaned 2 in the stacked state are cleaned while being displaced by the displacement jig 15 in each of the steps A, B, and C, so that the close contact portion is cleaned. It is possible to sufficiently remove the dirt component of the cleaning target 2. Therefore, it is possible to stably impart good cleaning finish to the cleaning target 2 after drying. In addition, since the object to be cleaned 2 in the stacked state can be largely displaced only by the displacement jig 15 installed in the cleaning basket 1, there is no mechanical load, and the object to be cleaned has an extremely simple device configuration. A good cleaning effect for the contact portion due to the deviation of 2 can be obtained. Further, since the shift width can be basically determined by the apex angle θ of the uneven portion 15a of the shift jig 15, it is possible to easily obtain the shift width according to the cleaning condition only by replacing the shift jig 15. You can

[0072]

EXAMPLES Next, specific examples of the present invention will be described.

First, a specific example of cleaning using the cleaning apparatus of the embodiment shown in FIGS. 1 to 4 and the evaluation results thereof will be described.

Example 1 First, 200 Cu lead frames (length: 144 mm, width: 50 mm, plate thickness: 0.25 mm) as the objects to be cleaned were pressed with each other.
Prepare a laminate in which G-6050 (manufactured by Nippon Machine Oil Co., Ltd.) is intimately laminated, and this is the cleaning device (cleaning tank 2 shown in FIG.
(Tank + Rinsing washing tank + Steam washing 1 tank), and each of the cleaning agents shown in Table 1 was used for cleaning under the following conditions. As the steam cleaner, a perfluorocarbon-based steam cleaner FRV-100 (trade name, manufactured by Toshiba Corporation) was used. The takt time is set to 5 minutes (4 minutes for cleaning), and the cleaning basket is swung in each cleaning tank and rinsing cleaning tank.
Ultrasonic waves (W density = 1.08 W / cm ² ) of kHz / 600 W were irradiated.
Also, the top angle θ is 90
Then, a shifting jig (made of SUS304, plate thickness 3 mm) having a concavo-convex portion having a formation pitch p of 10 mm was installed. The minimum shift width of the lead frame laminate by this shift jig is 0.5%.

[0075]

[Table 1] After cleaning and drying each leadframe stack under the conditions described above,
In addition to examining the rate of separation (cleaning efficiency) for each sheet, 20 lead frames were randomly taken out and the amount of oil remaining on the surface thereof was measured to evaluate the cleaning state and cleaning finish. The results are shown in Table 2. Note that cleaning was performed in the same manner as in Example except that the comparative example shifting jig in the table was not used, and the results were evaluated in the same manner. Also,
The residual oil content was measured using an oil concentration meter OCMA-200 manufactured by HORIBA, Ltd., and Freon S-316 was used as the extraction liquid.

[0076]

[Table 2] As is clear from Table 2, it can be seen that the use of the shifting jig significantly improves the cleaning state and the cleaning finish of the cleaning object in the laminated state when various cleaning agents are used.

Example 2 In a cleaning example using the cleaning agent b in Example 1,
Top angle θ is 60 degrees (shift width = 0.9%), top angle θ is 90 degrees (shift width = 0.5%), top angle θ is 120 degrees (shift width = 0.3
%), The top angle θ is 150 degrees (shift width = 0.13%), and the top angle θ is 170 degrees (shift width = 0.07%).
After cleaning was performed in the same manner except that the manufacturing method and the plate thickness = 3 mm) were used, the cleaning state and the cleaning finish were evaluated in the same manner as in Example 1. In addition, during the cleaning using the above-mentioned shift jig, the cleaning agent was deaerated to evaluate the cleaning state and the cleaning finish depending on the presence or absence of deaeration. The results are shown in Table 3.

[0078]

[Table 3] As is clear from Table 3, it is more effective to set the shift width to 0.1% or more.

Example 3 In a cleaning example using the cleaning agent b in Example 1,
Ultrasonic waves with W density of 0.76 W / cm ² (28 kHz / 600 W) and W density
After washing was performed in the same manner except that ultrasonic waves of 1.08 W / cm ² (40 kHz / 1200 W) were used, the washing state and the washing finish were evaluated in the same manner as in Example 1. Further, during cleaning using the above ultrasonic waves, the cleaning agent was deaerated to evaluate the cleaning state and the cleaning finish depending on the presence or absence of deaeration. The results are shown in Table 4.

[0080]

[Table 4] As is clear from Table 4, the ultrasonic cleaning effect is improved by degassing the cleaning agent. In addition, other detergents showed the same tendency.

Next, a specific example of cleaning using the cleaning apparatus shown in FIGS. 5 to 7 and its evaluation result will be described.

Example 4 As a cleaning object, a liquid crystal cell was prepared in which 20 liquid crystal cells (filled liquid crystal: CM-130 (trade name, manufactured by Merck Japan Co., Ltd.) were laminated in close contact with each other. Using the cleaning device shown in FIG. 5 (2 cleaning tanks + 2 rinse cleaning tanks + 1 steam cleaning tank) and the cleaning basket shown in FIG. 6, and using the cleaning agents shown in Table 1, It was washed under the conditions.
Perfluorocarbon steam cleaner FRV for steam cleaner
-100 (trade name, manufactured by Toshiba Corporation) was used. The takt time was 5 minutes (4 minutes for cleaning), and the cleaning basket was rocked in each cleaning tank and the rinse tank, and ultrasonic waves of 28 kHz / 600 W were irradiated. In addition, the cleaning basket has a rugged jig (SUS304) with a top angle θ of 90 degrees and a pitch p of 30 mm.
Made, plate thickness 3 mm) was installed. The shift width of the liquid crystal cell stack by the shift jig is 2.5% at the minimum.

Under the conditions as described above, after washing and drying the liquid crystal cell laminate, the liquid crystal cell glass surface is visually inspected (with a polarizing plate) for the presence or absence of liquid crystal residues and stains to clean the liquid crystal cell glass surface. The state and the cleaning finish were evaluated. The results are shown in Table 5. Note that cleaning was performed in the same manner as in Example except that the comparative example shifting jig in the table was not used, and the results were evaluated in the same manner.

[0084]

[Table 5] As is clear from Table 5, it can be seen that the use of the shifting jig significantly improves the cleaning condition and the cleaning finish of the cleaning object in the laminated state when various cleaning agents are used.

Example 5 In the cleaning example of Example 4, the top angle θ was 60 degrees (shift width = 4.3%), the top angle θ was 120 degrees (shift width = 1.4%), and the top angle θ was 150 degrees (shift). Width = 0.6%) each jig (SUS3
After the cleaning was performed in the same manner as in Example 4, except that each of 04-made, plate thickness = 3 mm, and formation pitch p = 50 mm) was used, the cleaning state and the cleaning finish were evaluated in the same manner as in Example 4. The result is 6
Shown in.

[0086]

[Table 6] Incidentally, in each of the above-mentioned embodiments, an example in which the present invention is applied to a cleaning device in which a stain removal cleaning step, a rinse cleaning step and a steam cleaning step are sequentially installed has been described, but the present invention is not limited to this. For example, it can be applied to a one-tank type cleaning device or a single-step cleaning device, and the same effect can be obtained.

Further, in Japanese Patent Laid-Open No. 61-242629, in order to shorten the cleaning time by increasing the contact area with a cleaning agent when cleaning or steam cleaning a component (small component),
Although a cleaning jig in which irregularities are formed on the surface for holding a component is described, the irregularity does not support a plate-like object to be cleaned as in the present invention, and the mounting surface of the component is simply It is merely an uneven surface and is clearly distinguished from the present invention.

[0088]

As described above, according to the present invention, the object to be cleaned in a laminated state in which at least a part thereof is in close contact with the oil film or the like is displaced by the displacement jig having the uneven portion while being cleaned sufficiently. Therefore, it is possible to sufficiently remove the dirt components of the objects to be cleaned in the stacked state including the contact portion with an extremely simple device configuration. Therefore, a good cleaning finish can be stably imparted to the stacked objects to be cleaned.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of a cleaning apparatus according to an embodiment of the present invention.

FIG. 2 is a partial cross-sectional view showing a state where a cleaning basket containing an object to be cleaned is housed in a cleaning tank of the cleaning apparatus shown in FIG.

3 is a perspective view of essential parts showing a state in which a cleaning basket accommodating an object to be cleaned is housed in a cleaning tank of the cleaning apparatus shown in FIG.

FIG. 4 is a diagram showing a state in which an object to be cleaned in the cleaning apparatus shown in FIG. 1 is displaced by a displacement jig.

FIG. 5 is a diagram showing a schematic configuration of a cleaning apparatus according to another embodiment of the present invention.

6 is a perspective view showing a structural example of a cleaning basket used in the cleaning apparatus shown in FIG.

7 is a partial cross-sectional view showing a state in which a cleaning basket containing an object to be cleaned is accommodated in a cleaning tank of the cleaning apparatus shown in FIG. 5 and a state in which the object to be cleaned is displaced by a displacement jig.

[Explanation of symbols] A: Removal and cleaning process B: Rinse washing process C: Steam cleaning process D: Transport mechanism E: Cleaning agent regeneration mechanism F: Steam cleaner regeneration mechanism 1 ... Cleaning basket 2 ... Laminated objects to be cleaned 11, 12 ... Cleaning tank 13 ... cleaning agent 14 ... Ultrasonic generator 15 …… Sliding jig 15a ... uneven portion 17 ... Degassing device 21, 22 ... Rinse washing tank 23 ... Rinse detergent 31 ... Steam cleaning tank 32 ... Steam cleaner

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) B08B 3/04 B08B 3/10 B08B 11/02

Claims (6)

(57) [Claims] 1. When cleaning an object to be cleaned laminated in a state where at least a part thereof is in close contact, a jig having an uneven portion formed upward is used to clean the object to be cleaned in the laminated state. By applying along the direction of, the cleaning object is cleaned while shifting the stacked state of the cleaning object from the initial state along the stacking surface direction in accordance with the shape of the uneven portion. Cleaning method. 2. The cleaning method according to claim 1, wherein the jig having the uneven portion is installed near the bottom of the cleaning tank, and the objects to be cleaned in the stacked state are arranged such that the stacking surface direction is the vertical direction. Stored in a cleaning basket, the bottom of the stacked cleaning object hits the uneven portion of the jig while the cleaning basket is descending, and the stacked cleaning object shifts according to the shape of the uneven portion. As described above, the cleaning method is characterized by rocking the cleaning basket up and down in the cleaning tank. 3. The cleaning method according to claim 1, wherein a cleaning basket having a jig having the concave-convex portion on a bottom thereof is mounted on the cleaning basket, and the cleaning object in the stacked state is arranged with the stacking surface direction being the vertical direction. The cleaning method is characterized in that the object to be cleaned in the stacked state is shifted according to the shape of the concavo-convex portion by being housed so as to be supported by the concavo-convex portion. 4. A cleaning basket for accommodating objects to be cleaned stacked at least partially in close contact with each other and a jig having an uneven portion formed upward are installed near the bottom, and the cleaning basket is provided. A cleaning tank in which the cleaning object stored in is immersed or exposed, and / or a vapor thereof, and a cleaning object in the stacked state on the uneven portion of the jig while the cleaning basket is descending. A cleaning device including a cleaning basket swinging mechanism for vertically swinging the cleaning basket in the cleaning tank so that the bottom portion of the cleaning basket hits the stacking surface. 5. A jig having an uneven portion formed upward is installed at the bottom, and at least a portion of the objects to be cleaned stacked in a state of being in close contact with each other has the uneven surface along the direction of the stacked surface. A cleaning basket that is stored so as to be supported by the cleaning basket; and a cleaning tank that stores the cleaning agent and / or the vapor in which the cleaning target stored in the cleaning basket is immersed or exposed. Cleaning equipment. 6. The cleaning apparatus according to claim 4 or 5, further comprising ultrasonic wave oscillating means installed at the bottom of the cleaning tank accommodating the cleaning agent and dissolved gas in the cleaning agent. A cleaning device comprising: a deaeration means.