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JP3464615B2 - Aluminum surface nitriding method - Google Patents
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JP3464615B2 - Aluminum surface nitriding method - Google Patents

Aluminum surface nitriding method

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Publication number
JP3464615B2
JP3464615B2 JP33365898A JP33365898A JP3464615B2 JP 3464615 B2 JP3464615 B2 JP 3464615B2 JP 33365898 A JP33365898 A JP 33365898A JP 33365898 A JP33365898 A JP 33365898A JP 3464615 B2 JP3464615 B2 JP 3464615B2
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JP
Japan
Prior art keywords
aluminum
base material
temperature
fluidized bed
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP33365898A
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Japanese (ja)
Other versions
JP2000160319A (en
Inventor
好樹 恒川
正洋 奥宮
和志 涌出
寿士 安部
Original Assignee
パーカー熱処理工業株式会社
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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はアルミニウムまたは
アルミニウム合金(以下これらを単にアルミニウムとい
う)製構造部材の表面に窒化物を形成せしめる表面硬化
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface hardening method for forming a nitride on the surface of a structural member made of aluminum or an aluminum alloy (hereinafter simply referred to as aluminum).

【0002】[0002]

【従来の技術】近年、省エネルギー、省資源を達成する
ため、例えば自動車の燃費向上等を達成するために構造
用部材の軽量化や高リサイクル化が指向されている。そ
の代表例としては、各種鉄鋼材料からアルミニウム材料
への代替が挙げられ、各工業分野で広範囲に行われてい
る。しかしながら、アルミニウムは鉄鋼より耐摩耗性が
低いため摺動用途に使用するには適当ではないとされ、
表面硬化処理が必要とされる。従来、種々要求機能の
内、耐摩耗性、潤滑性向上を目的としたレーザーアロ
イ、放電融合法や熱伝導性向上を目的とした溶射、複合
めっき法等が知られているが、いずれも密着性が良好で
生産性に優れた表面硬化法としては十分ではなかった。
また、拡散浸透法のイオン窒化で得られるAlN層は高硬
度で、生成化合物層の高熱伝導、高絶縁特性の利用が期
待されるが、成膜速度が遅いという問題点を有するもの
であった。
2. Description of the Related Art In recent years, in order to achieve energy saving and resource saving, for example, to improve fuel efficiency of automobiles, weight reduction and high recycling of structural members have been aimed. A typical example thereof is substitution of various steel materials with aluminum materials, which are widely used in various industrial fields. However, since aluminum has lower wear resistance than steel, it is not suitable for sliding applications,
A surface hardening treatment is required. Among various required functions, laser alloys for the purpose of improving wear resistance and lubricity, discharge fusion method, thermal spraying for the purpose of improving thermal conductivity, composite plating method, etc. have been conventionally known. It was not sufficient as a surface hardening method with good productivity and excellent productivity.
In addition, the AlN layer obtained by ion nitriding by the diffusion and penetration method has high hardness, and it is expected that the high thermal conductivity and high insulating property of the produced compound layer will be utilized, but it has a problem that the film formation rate is slow. .

【0003】アルミニウム表面に密着性の良好な厚いAl
N層を得る手段として粉末塗布法がある。この方法は窒
化する場合に問題となるアルミニウム材料表面に形成さ
れる表面酸化膜による窒化阻害作用や、雰囲気中の微量
酸素による表面酸化を抑制するために、酸化物生成自由
エネルギーの低いMgを含むAl-Mg粉末をAl基材表面に塗
布後、窒素雰囲気中で加熱する方法である。この方法に
よれば、緻密で密着性の良好な厚さ200μmのAlN改質層
が形成されるが、基材に塗布したAl-Mg粉末が基材表面
で焼結し、部品形状が変化するという新たな問題が生じ
た。
Thick Al with good adhesion to the aluminum surface
There is a powder coating method as a means for obtaining the N layer. This method contains Mg, which has a low free energy of oxide formation, in order to suppress the nitriding inhibitory action by the surface oxide film formed on the surface of the aluminum material, which is a problem when nitriding, and the surface oxidation by a trace amount of oxygen in the atmosphere. This is a method in which Al-Mg powder is applied to the surface of an Al base material and then heated in a nitrogen atmosphere. According to this method, an AlN modified layer with a thickness of 200 μm that is dense and has good adhesion is formed, but the Al-Mg powder applied to the base material is sintered on the surface of the base material, and the shape of the part changes. A new problem arose.

【0004】[0004]

【発明が解決しようとする課題】本発明は、緻密で密着
性の良好なAlN改質層を簡単に効率良く形成し得るアル
ミニウムの表面処理方法を提供することを目的とするも
のである。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a surface treatment method for aluminum, which can easily and efficiently form a dense AlN modified layer having good adhesion.

【0005】[0005]

【課題を解決するための手段】本発明に係る方法は、Al
2O3、SiO2、SiC等のセラミックス粒子と、Mg、Alまたは
Al-Mg合金粉末とからなる処理剤を流動床炉中に充填
し、窒素ガスを前記流動床に流動化ガスとして導入して
前記処理剤を流動化し、この流動層内にアルミニウムま
たはアルミニウム合金基材を装入して該基材の融点以下
で処理することにより前記基材表面に窒化物層を形成す
ることにより、前記課題を達成したものである。本発明
において、前記流動化ガスとして窒素ガスに不活性ガ
ス、例えばアルゴンガスを混入して炉内温度を調整する
ようにしてもよく、また、処理剤中におけるMg、Alまた
はAl-Mg合金粉末/セラミックス粒子の混合割合は3%質
量の範囲とすることが好ましい。
The method according to the present invention comprises:
Ceramic particles such as 2 O 3 , SiO 2 , SiC, Mg, Al or
Al-Mg alloy powder and a treating agent is filled in a fluidized bed furnace, nitrogen gas is introduced into the fluidized bed as a fluidizing gas to fluidize the treating agent, and aluminum or an aluminum alloy base is contained in the fluidized bed. The above object is achieved by forming a nitride layer on the surface of the base material by charging the material and treating it at a temperature below the melting point of the base material. In the present invention, an inert gas may be mixed with the nitrogen gas as the fluidizing gas, for example, an argon gas may be mixed to adjust the temperature in the furnace, and Mg in the treating agent, Al or Al-Mg alloy powder. / The mixing ratio of the ceramic particles is preferably in the range of 3% by mass.

【0006】[0006]

【発明の実施の形態】本発明によるAlN改質層の形成メ
カニズムは以下のように考えられる。すなわち、Al
2O3、SiO2、SiC等のセラミックス粒子と、Mg、Alまたは
Al-Mg合金粉末とからなる処理剤を流動床炉中に充填
し、窒素ガスをアルミニウムの融点以下に昇温保持した
前記流動床に流動化ガスとして導入して前記処理剤を流
動化し、この流動層内にアルミニウム基材を装入する
と、アルミニウム基材表面の自然酸化膜が流動する処理
剤の物理的研掃作用により基材表面の自然酸化膜は完全
に除去され、活性表面をなす。またアルミニウムと窒素
ガスとの反応は発熱反応であるため、AlN生成反応の進
行とともに流動床温度が上昇し、アルミニウム基材表面
が溶解するおそれが生じる。その場合、流動床温度が所
定値を越えた際に、迅速に不活性ガス、例えばアルゴン
ガスを窒素ガスに混入することにより窒素ガスの分圧を
下げることにより、温度の過度の上昇を抑制し、AlN生
成反応を制御することができる。一方、MgまたはAl-Mg
合金粉末を処理剤として用いた場合、改質層断面のEPMA
分析によるとMgは基材内部まで拡散し、基材界面ではMg
が濃化している。この部分にAl3Mg2が存在し、炉内温度
の上昇とともにAlとMgに分解して、窒化物生成標準エネ
ルギーの低いAlがNと結び付き、AlN改質層を形成す
る。また、Al粉末を用いた場合は、Al粉末がバルク材よ
り活性であるため、アルミニウム基材表面の自然酸化膜
がAl粉末により除去され、活性化されることによりAlN
が形成される。処理温度833Kで実施する場合、AlN改質
層の厚さは通常の拡散処理と同様に加熱時間とともに増
加するものである。
BEST MODE FOR CARRYING OUT THE INVENTION The formation mechanism of the AlN modified layer according to the present invention is considered as follows. That is, Al
Ceramic particles such as 2 O 3 , SiO 2 , SiC, Mg, Al or
The treating agent consisting of Al-Mg alloy powder is packed in a fluidized bed furnace, and the treating agent is fluidized by introducing it as fluidizing gas into the fluidized bed where nitrogen gas is heated and maintained below the melting point of aluminum. When the aluminum base material is charged into the fluidized bed, the natural oxide film on the surface of the aluminum base material is completely removed by the physical scavenging action of the treating agent in which the natural oxide film on the surface of the aluminum base material flows to form an active surface. Further, since the reaction between aluminum and nitrogen gas is an exothermic reaction, the fluidized bed temperature rises as the AlN production reaction progresses, and the surface of the aluminum base material may melt. In that case, when the fluidized bed temperature exceeds a predetermined value, the inert gas, for example, argon gas is rapidly mixed into the nitrogen gas to lower the partial pressure of the nitrogen gas, thereby suppressing an excessive rise in temperature. , AlN formation reaction can be controlled. On the other hand, Mg or Al-Mg
When alloy powder is used as a treating agent, EPMA of the modified layer cross section
According to the analysis, Mg diffuses inside the base material, and Mg
Is getting thicker. Al 3 Mg 2 is present in this portion and decomposes into Al and Mg as the temperature in the furnace rises, and Al having a low standard energy for nitride formation is combined with N to form an AlN modified layer. When Al powder is used, the Al powder is more active than the bulk material, so the natural oxide film on the surface of the aluminum base material is removed by the Al powder and activated, so that AlN
Is formed. When the treatment temperature is 833K, the thickness of the AlN modified layer increases with the heating time as in the case of the ordinary diffusion treatment.

【0007】本発明において使用するAl2O3、SiO2、SiC
等のセラミックス粒子はその粒径が50〜200μmのもの
が好ましく、またMg、AlまたはAl-Mg合金粉末はその粒
径が90〜250μmのものが好ましい。流動床中に充填さ
れるセラミックス粒子とMg、AlまたはAl-Mg合金粉末と
の配合比率は0.1〜20質量%とすることができるが、配
合比率が3質量%程度から充填層の焼結が始まり、5質
量%で基材溶融が始まる可能性があること、および経済
性等を勘案すると、3質量%以下、より好ましくは1質
量%程度とする。また、Al-Mg合金粉末を使用する場
合、取扱の容易さ並びに効果を考慮すると40〜60質量%
Mg-Al程度のMgを含有する合金を使用することが好まし
い。
Al 2 O 3 , SiO 2 , SiC used in the present invention
It is preferable that the ceramic particles such as those having a particle diameter of 50 to 200 μm and the Mg, Al or Al-Mg alloy powder have a particle diameter of 90 to 250 μm. The mixing ratio of the ceramic particles to be filled in the fluidized bed and the Mg, Al or Al-Mg alloy powder can be 0.1 to 20% by mass. In consideration of the possibility that the base material may start to melt at 5% by mass, the economy, and the like, the content is set to 3% by mass or less, and more preferably about 1% by mass. In addition, when using Al-Mg alloy powder, considering the easiness of handling and the effect, 40-60 mass%
It is preferable to use an alloy containing Mg of about Mg-Al.

【0008】前記流動床へ流動化ガスとして供給する窒
素ガスの空筒速度はセラミックス粒子とMg、AlまたはAl
-Mg合金粉末とが流動化するに足るようにするが、実際
には0.5〜3.0cm/s程度とする。処理温度はアルミニウム
基材の溶融温度以下、例えば940〜933K以下に設定され
るが、前述したようにAlとN2とは発熱反応であるため、
反応開始と共に次第に炉内温度が上昇する。過度の炉内
温度上昇が生じた場合、あるいは生じるおそれがある場
合には、アルゴンガス等の不活性ガスの1種または2種
以上を適当量混入して窒素ガスの分圧を低下させ、炉内
温度上昇を抑制するようにする。これら不活性ガスの混
入に際しては、流動床炉内に温度検知センサー等を設
け、このセンサー等の検知手段により炉内温度が所定の
設定値を越えるとき、窒素ガス供給ラインの途中に分岐
させた不活性ガス供給ラインを開放し制御された量の不
活性ガスを炉内に導入するようにする。なお、処理温度
の下限は反応途中生成物であるAl3Mg2の生成温度が724K
付近であることからそれ以上の温度、例えば740K程度以
上とすることが好ましい。
The empty space velocity of nitrogen gas supplied as fluidizing gas to the fluidized bed depends on the ceramic particles and Mg, Al or Al.
-Mg alloy powder should be fluidized enough, but in practice, it should be about 0.5 to 3.0 cm / s. The treatment temperature is set to the melting temperature of the aluminum base material or less, for example, 940 to 933 K or less, but as described above, Al and N 2 are exothermic reactions,
The temperature in the furnace gradually rises with the start of the reaction. If an excessive temperature rise in the furnace occurs or may occur, reduce the partial pressure of nitrogen gas by mixing an appropriate amount of one or more inert gases such as argon gas. Try to suppress the rise in internal temperature. When mixing these inert gases, a temperature detection sensor or the like was provided in the fluidized bed furnace, and when the temperature in the furnace exceeded a predetermined set value by the detection means such as this sensor, it was branched in the middle of the nitrogen gas supply line. The inert gas supply line is opened so that a controlled amount of inert gas is introduced into the furnace. The lower limit of the treatment temperature is 724 K when the production temperature of Al 3 Mg 2 which is a product in the reaction is 724 K.
Since it is in the vicinity, it is preferable to set the temperature higher than that, for example, about 740 K or higher.

【0009】本発明において、処理の対象となるアルミ
ニウム基材には、純アルミニムのみならず、各種合金元
素を所定量添加したアルミニウム合金(熱処理型合金を
も含む)がいずれも適用できる。特に表面酸化物が強固
に付着したアルミニウム基材に窒化処理するのに極めて
有効と言える。
In the present invention, not only pure aluminum but also aluminum alloys containing a predetermined amount of various alloying elements (including heat treatment type alloys) can be applied to the aluminum base material to be treated. In particular, it can be said that it is extremely effective for nitriding the aluminum base material to which the surface oxide is firmly attached.

【0010】[0010]

【実施例1】Al-50質量%Mg/Al2O3の配合割合1質量%
の処理剤を充填し、処理温度833Kに保持した流動床炉内
に、空筒速度1.1cm/sでN2ガスを導入し、板厚5mm、幅10
mm、長さ20mmの純アルミニウム板の基材を装入し、基材
表面に本発明法により窒化処理を施した。
[Example 1] Al-50 mass% Mg / Al 2 O 3 compounding ratio 1 mass%
Into a fluidized bed furnace filled with the treating agent of No. 1 and kept at a treating temperature of 833K, N 2 gas was introduced at an empty space velocity of 1.1 cm / s, a plate thickness of 5 mm and a width of 10 mm.
A pure aluminum plate base material having a length of 20 mm and a length of 20 mm was charged, and the surface of the base material was subjected to a nitriding treatment by the method of the present invention.

【0011】基材投入後、炉内温度は833Kまで昇温中に
流動化ガスとして窒素ガスを導入した。また同一条件で
はあるが窒素ガスの40%をアルゴンガスに置換した流動
化ガスを導入した処理をも行った。それらの基材表面の
AlN改質層の厚さと処理時間との関係を図1に示す。図
1より、基材表面のAlN改質層の厚さは処理時間と共に
増加すること、および流動化ガスとして窒素ガスにアル
ゴンガス等の不活性ガスを混入することにより窒化処理
に与らない不活性ガスの存在により窒素ガスの分圧が低
下しその分窒化処理速度が遅くなることが分かる。さら
に、この窒化処理に際し、基材を流動床炉内に装入した
後、処理時間25.2ksで生成する基材表面のAlN改質層厚
さと炉内温度との関係を図2に示す。なお、この図2に
おいて、740K以下ではAlN改質層が得られないことは前
述したように反応途中生成物であるAl3Mg2の生成温度が
724K付近であることから740K以下では十分なAl3Mg2が生
成されなかったためと考えられる。
After the substrate was charged, nitrogen gas was introduced as a fluidizing gas while the temperature inside the furnace was raised to 833K. Also, under the same conditions, a treatment was conducted in which a fluidizing gas in which 40% of nitrogen gas was replaced with argon gas was introduced. Of those substrate surfaces
FIG. 1 shows the relationship between the thickness of the AlN modified layer and the processing time. From Fig. 1, it can be seen that the thickness of the AlN modified layer on the surface of the base material increases with the treatment time, and that nitrogen gas as a fluidizing gas is mixed with an inert gas such as argon gas to prevent the nitriding treatment from occurring. It can be seen that the presence of the active gas lowers the partial pressure of the nitrogen gas, and the nitriding processing speed is reduced accordingly. Further, in this nitriding treatment, the relationship between the thickness of the AlN reformed layer on the surface of the base material and the temperature in the furnace generated in the processing time of 25.2 ks after charging the base material into the fluidized bed furnace is shown in FIG. In addition, in FIG. 2, the AlN modified layer cannot be obtained at 740 K or less, as described above, because the formation temperature of Al 3 Mg 2 which is an intermediate product in the reaction is large.
Since it is around 724 K, it is considered that sufficient Al 3 Mg 2 was not formed below 740 K.

【0012】[0012]

【実施例2】Al-50質量%Mg/Al2O3の配合割合0.25質量
%の処理剤を充填し、処理温度800Kに保持した流動床炉
内に、空筒速度1.1cm/sでN2ガスを導入し、板厚5mm、幅
10mm、長さ20mmの純アルミニウム板の基材を装入し、基
材表面に本発明法により窒化処理を施した場合に得られ
るAl基材表面上のAlN改質層の試料断面の光学顕微鏡組
織写真を図3に示す。この図3より、AlN改質層は基材
表面から深さ250μmまで生成され、基材表面にAl-Mg等
の焼結等に起因する形状変化は全く見られなかった。
[Example 2] Al-50 mass% Mg / Al 2 O 3 compounding ratio of 0.25 mass% was charged in a fluidized-bed furnace maintained at a treatment temperature of 800 K, and the treatment was performed at an empty space velocity of 1.1 cm / s. Introduce 2 gases, thickness 5mm, width
Optical microscope of a sample cross section of an AlN modified layer on the surface of an Al substrate obtained by charging a substrate of a pure aluminum plate having a length of 10 mm and a length of 20 mm and subjecting the surface of the substrate to a nitriding treatment by the method of the present invention. The structure photograph is shown in FIG. As shown in FIG. 3, the AlN modified layer was formed up to a depth of 250 μm from the surface of the base material, and no shape change due to sintering of Al-Mg or the like was observed on the surface of the base material.

【0013】実施例1および実施例2で得られたAlN改
質層の被膜特性を調査したところ、従来法例えば塗布後
加熱法で得られた被膜と同等の硬度、熱伝導度および絶
縁特性を具えたものであることが確認され、特に表面近
傍のAlN改質層はAlNの体積率がほぼ100vol%のものであ
った。
When the coating properties of the AlN modified layers obtained in Examples 1 and 2 were investigated, the same hardness, thermal conductivity and insulating properties as the coating obtained by the conventional method, for example, the heating method after coating, were obtained. It was confirmed that the AlN modified layer near the surface had an AlN volume ratio of almost 100 vol%.

【0014】[0014]

【発明の効果】以上のような本発明によれば、高硬度で
高熱伝導度、高絶縁特性の利用が期待されるアルミニウ
ムおよびアルミニウム合金のAlN改質層が、流動床炉を
用いて基材の融点以下の温度で経済的かつ迅速に厚膜を
形成することができ、当該分野で極めて有用である。
As described above, according to the present invention, the AlN modified layer of aluminum and aluminum alloy, which is expected to utilize high hardness, high thermal conductivity and high insulation properties, is used as a base material in a fluidized bed furnace. A thick film can be formed economically and rapidly at a temperature equal to or lower than the melting point of, and is extremely useful in the art.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明実施例における処理時間とAlN改質層厚
さの関係図である。
FIG. 1 is a diagram showing the relationship between the processing time and the thickness of an AlN modified layer in an example of the present invention.

【図2】本発明実施例における処理温度とAlN改質層厚
さの関係図である。
FIG. 2 is a diagram showing the relationship between the processing temperature and the thickness of the AlN modified layer in the example of the present invention.

【図3】本発明実施例により得られたアルミニウム基材
表層断面の光学顕微鏡組織写真である。
FIG. 3 is an optical micrograph of a cross section of the surface layer of the aluminum base material obtained in the example of the present invention.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平7−166321(JP,A) 特開 平5−5172(JP,A) 特開 平9−157829(JP,A) 特開 平7−207302(JP,A) (58)調査した分野(Int.Cl.7,DB名) C23C 8/24 C23C 12/02 ─────────────────────────────────────────────────── --- Continuation of the front page (56) References JP-A-7-166321 (JP, A) JP-A-5-5172 (JP, A) JP-A-9-157829 (JP, A) JP-A-7- 207302 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) C23C 8/24 C23C 12/02

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 Al2O3、SiO2、SiC等のセラミックス粒子
と、Mg、AlまたはAl-Mg合金粉末とからなる処理剤を流
動床炉中に充填し、窒素ガスを前記流動床に流動化ガス
として導入して前記処理剤を流動化し、この流動層内に
アルミニウムまたはアルミニウム合金基材を装入して該
基材の融点以下で処理することにより前記基材表面に窒
化物層を形成することを特徴とするアルミニウムの表面
窒化方法。
1. A treatment agent composed of ceramic particles such as Al 2 O 3 , SiO 2 , and SiC and Mg, Al or Al-Mg alloy powder is filled in a fluidized bed furnace, and nitrogen gas is introduced into the fluidized bed. A nitride layer is formed on the surface of the base material by introducing as a fluidizing gas to fluidize the treatment agent, charging an aluminum or aluminum alloy base material into the fluidized bed, and treating the base material at a temperature equal to or lower than the melting point of the base material. A method for surface nitriding aluminum, which comprises forming.
【請求項2】 前記流動化ガスとして窒素ガスに不活性
ガスを混入して炉内温度を調整する請求項1記載のアル
ミニウムの表面窒化方法。
2. The surface nitriding method for aluminum according to claim 1, wherein an inert gas is mixed with nitrogen gas as the fluidizing gas to adjust the temperature in the furnace.
【請求項3】 処理剤中におけるMg、AlまたはAl-Mg合
金粉末/セラミックス粒子の混合割合を3%質量以下の
範囲とする請求項1または2記載のアルミニウムの表面
窒化方法。
3. The surface nitriding method for aluminum according to claim 1, wherein the mixing ratio of Mg, Al or Al-Mg alloy powder / ceramic particles in the treating agent is within the range of 3% by mass or less.
JP33365898A 1998-11-25 1998-11-25 Aluminum surface nitriding method Expired - Lifetime JP3464615B2 (en)

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