JP3479221B2 - Combustion equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a combustion apparatus mainly used for oxidizing a semiconductor wafer or the like in a semiconductor device manufacturing process.

[0002]

2. Description of the Related Art In the manufacture of semiconductor devices, there is an oxidation treatment step of forming an oxide film on the surface of a semiconductor wafer.
As one method of this oxidation treatment, there is a method of forming a oxide film by bringing a semiconductor wafer into contact with water vapor at high temperature in an oxidation treatment furnace. As an oxidation treatment apparatus using this steam, for example, as shown in Japanese Patent Laid-Open No. 56-62326, hydrogen gas and oxygen gas are directly supplied into the oxidation treatment furnace to be used in the oxidation treatment furnace. A method of burning hydrogen gas to generate water vapor is known.

However, in the method of burning hydrogen gas in the oxidation treatment furnace, the temperature in the oxidation treatment furnace is greatly influenced by the degree of combustion of hydrogen gas and oxygen gas, so that the oxidation treatment temperature of the semiconductor wafer is sufficiently high. Since it is difficult to control the temperature of the semiconductor wafer, the stability and reproducibility of the oxidation process on the semiconductor wafer are low.

Therefore, for example, Japanese Examined Patent Publication No. 63-60528
As disclosed in Japanese Patent Laid-Open No. 63-210501 and Japanese Patent Laid-Open No. 63-210501, an external combustion device as a steam generator is independently provided outside the oxidation treatment furnace, and hydrogen gas is supplied to the external combustion device. A method is known in which oxygen gas is supplied and burned to generate steam, and the steam is supplied to an oxidation treatment apparatus through a pipe.

According to this external combustion method, the heating state in the oxidation treatment furnace can be controlled separately from the operating state of the external combustion apparatus as the steam generator, so that the oxidation of the semiconductor wafer in the oxidation treatment furnace is performed. The process can be performed with high stability and reproducibility. Therefore,
This external combustion type oxidation treatment device is in the spotlight. The external combustion type combustion device is divided into an annular external combustion device and a distributed external combustion device, depending on the form of introduction of hydrogen gas and oxygen gas, particularly the form of the introduction pipe of oxygen gas.

Next, an example of the form of the hydrogen gas and oxygen gas introduction portion of this external combustion device will be described. FIG. 9 is a diagram showing an outline of a conventional annular external combustion device disclosed in, for example, Japanese Unexamined Patent Publication No. 5-304136. In the figure, 1
Indicates the entire external combustion device. Reference numeral 2 is a combustion container, 3 and 4 are hydrogen gas introduction pipes and oxygen gas introduction pipes opened at the lower portion of the combustion container 2, 5 is a heater for heating at least one of hydrogen and oxygen gas to a spontaneous ignition temperature, and 6 is a combustion container 2 Is a cooling mechanism provided around it, 7 is a hydrogen gas ejection nozzle, and 8 is an oxygen gas ejection nozzle. As shown in FIG. 9, an oxygen gas ejection nozzle 8 is arranged surrounding the hydrogen gas ejection nozzle 7 in a ring shape.

FIG. 10 shows, for example, Japanese Patent Laid-Open No. 6-267.
It is a figure which shows the outline of the conventional distributed external combustion apparatus shown by 932 gazette. In the figure, 9 is a concave portion provided at the tip of the hydrogen gas ejection nozzle 7, 10 is an oxygen diffusion plate provided with an oxygen gas ejection nozzle (hole) 8, and 11 is a heat insulating material. The same parts as those of the device are designated by the same reference numerals. As shown in FIG. 10, in the distributed external combustion device, a concave portion 9 is formed at the tip of the hydrogen gas ejection nozzle 7 opening at the bottom of the combustion container 2, and the hydrogen gas ejection nozzle 7 is used as the center. A plurality of oxygen gas ejection nozzles (holes) 8 are arranged at a predetermined interval around the periphery.

[0008]

By the way, in recent years,
Due to demands for manufacturing semiconductor devices, an oxidizing process has been performed in which the flow rate of hydrogen gas, the flow rate of oxygen gas, the mixing ratio of hydrogen gas and oxygen gas, and the like are variously changed. In particular, when the oxide film formation is controlled with high accuracy by using the steam generated in the external combustion device, the hydrogen gas flow rate is reduced or the generated steam is diluted in order to reduce the amount of steam generated. Therefore, it has become necessary to supply an oxygen gas flow rate more than the amount required for complete combustion. In other words, for future semiconductor devices, high-quality steam oxidation treatment using low flow rate hydrogen gas to reduce the generation of steam and steam oxidation treatment using a low hydrogen gas / oxygen gas mixture ratio to dilute the steam will be performed with high quality. Moreover, it is important to be able to carry out it stably.

On the other hand, even in the general-purpose oxidation treatment, that is, in the combustion in which the flow rate of hydrogen gas is, for example, 3 liters per minute or more, and the mixture ratio of hydrogen gas / oxygen gas is 1 or more,
As in the past, it is an important technology that high quality and stable implementation are possible.

However, in the case of the annular type external combustion device as described in JP-A-5-304136, the hydrogen gas introduction pipe and the oxygen gas introduction pipe having the inner and outer double pipe structure are close to each other. When hydrogen gas and oxygen gas are jetted from each tip nozzle while heating to the spontaneous ignition temperature and burned, a flame comes out from the tip of the hydrogen gas jet nozzle in the center, and the tip of the hydrogen gas jet nozzle is lost. Devitrification at the tip of the nozzle when heated above the transmission temperature (about 1200 ° C) (transparent quartz discolors whitish and peels into pieces. Amorphous quartz transforms into crystalline cristopalite. .), Causing the generation of particles and deforming the nozzle shape. Therefore, a period (life) that allows high-quality oxidation without particle generation
The problem arises that is shortened.

Further, in the case of the dispersion type external combustion device as described in Japanese Patent Laid-Open No. 6-267932, the oxygen gas jet nozzle is dispersed far away from the tip of the hydrogen gas jet nozzle, and Since it is arranged at a position projecting from the tip of the hydrogen gas ejection nozzle, the oxygen gas is diffused and diffused in a wide range around the oxygen gas ejection nozzle. As a result, the combustion flame when ignited and combusted to generate water vapor is spread and formed around the hydrogen gas ejection nozzle without approaching the tip of the hydrogen gas ejection nozzle. As a result, the generation of particles due to devitrification of the nozzle tip and the deformation of the nozzle shape do not occur.

However, in this distributed external combustion device,
In the case of steam oxidation treatment using low flow rate hydrogen gas or steam oxidation treatment using a mixture ratio of low hydrogen gas / oxygen gas, a combustion flame is formed near the tip of the hydrogen gas ejection nozzle, and the tip of the hydrogen gas ejection nozzle is devitrified. As it is heated above the temperature, it causes devitrification of the nozzle tip and causes particles to be generated, and also causes deformation of the nozzle shape, and as with the annular external combustion device, high quality without particles generation. There is a problem that the period (life) that can be subjected to the oxidation treatment becomes short.

The present invention has been made in order to solve the above-mentioned problems, and a case where hydrogen gas / oxygen gas has a normal mixing ratio, a low flow hydrogen gas steam oxidation treatment, and a mixture of low hydrogen gas / oxygen gas are used. It is an object of the present invention to provide a combustion apparatus that does not have a problem with particle generation in both cases of specific utilization steam oxidation treatment.

[0014]

That is, the present invention is
The combustion apparatus is provided with a hydrogen gas ejection port for introducing hydrogen gas into the combustion container and an oxygen gas ejection port for introducing oxygen gas into the combustion container, and the opening area of the hydrogen gas ejection port is 0.
12cm ² or more 0.50 cm ² or less, and 8~14mm around the oxygen gas injection port from the center of the hydrogen gas ports
In release position, the opening area is 0.2～0.6Cm ^2, particularly preferably that a configuration of 0.3~0.5cm ^2.

The present invention, in the combustion apparatus, comprises a hydrogen gas ejection port for introducing hydrogen gas into the combustion container and an oxygen gas ejection port for introducing oxygen gas into the combustion container, and the opening area of the hydrogen gas ejection port is There 0.12 cm ² or more 0.50 cm ² or less, and at a position apart 8~14mm around the first oxygen gas jet port from the center of the hydrogen gas ejection port, the opening area of 0.2～0.6Cm ² , preferably with composed of 0.3～0.5Cm ^2, at the position of the second oxygen gas ejection port you release 14~20mm from the center to the periphery of the hydrogen gas ejection port, 1 cm
The opening area is ² or less.

The present invention, in the combustion apparatus, is provided with a hydrogen gas jet port for introducing hydrogen gas into the combustion container and an oxygen gas jet port for introducing oxygen gas into the combustion container. (S) is less than 0.12 cm ² , and the oxygen gas ejection port is [4+ (S / π) ^1/2 ] to [10+ (S / π) ^1/2 ] from the center of the hydrogen gas ejection port to the periphery. mm
In release position, the opening area is 0.2～0.6Cm ^2, particularly preferably that a configuration of 0.3~0.5cm ^2.

The present invention, in the combustion apparatus, comprises a hydrogen gas ejection nozzle for introducing hydrogen gas into the combustion container and an oxygen gas ejection nozzle for introducing oxygen gas into the combustion container, and the opening area of the hydrogen gas ejection port. (S) is less than 0.12 cm ² , and the first oxygen gas ejection port is surrounded by [4+ (S / π) ^1/2 ] to [10+ (S /
π) ^1/2 ] mm apart, the opening area is 0.2-0.6
cm ^2, preferably together with make up at 0.3～0.5Cm ^2, around the second oxygen gas jet port from the center of the hydrogen gas ports ^{[10+ (S / π) 1/2} ] ~ [16+ ( S / π)
The opening area is 1 cm ² or less at positions separated by ^1/2 ] mm.

[0018]

[0019]

[0020]

In the present invention, the combustion apparatus is provided with a hydrogen gas ejection port for introducing hydrogen gas into the combustion container, and an oxygen gas ejection port for introducing oxygen gas into the combustion container, and the hydrogen gas ejection port. It is configured such that a movable heater for controlling the temperature of at least one of the oxygen gas ejection ports is provided.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION A combustion apparatus according to the present invention has optimum arrangement conditions and opening areas of a hydrogen gas jet port for introducing hydrogen gas into a combustion container and an oxygen gas jet port for introducing oxygen gas into a combustion container. Depending on whether the hydrogen gas / oxygen gas has a normal mixing ratio or a low flow rate hydrogen gas steam oxidation treatment or a low hydrogen gas / oxygen gas mixture ratio steam oxidation treatment, the conditions are defined. Also, it is possible to provide a combustion device that does not have a problem related to particle generation.

As described above, in the generation of particles, a flame is emitted from the tip of the central hydrogen gas jet nozzle, the tip of the hydrogen gas jet nozzle is heated above the devitrification temperature (about 1200 ° C.), and the nozzle is heated. This is caused by the transformation of the transparent amorphous quartz at the tip into crystalline cristopalite.From this point, the usual solution is to avoid the combustion flame from the nozzle tip. However, if the combustion flame separates from the nozzle tip, it becomes unstable depending on the distance, which is not desirable from the viewpoint of controlling the combustion state. Further, in the case of steam oxidation treatment using low flow rate hydrogen gas or steam oxidation treatment using a mixture ratio of low hydrogen gas / oxygen gas, the combustion flame is particularly small near the nozzle tip and is unstable, so combustion It is not desirable from the viewpoint of controlling the state, and it is necessary to prevent the problem of particle generation.

In the present invention, from the phenomenon of particle generation, the temperature condition at the tip of the hydrogen gas ejection nozzle is measured and the conditions for forming a combustion flame are variously changed so that the temperature at the tip of the hydrogen gas ejection nozzle is the devitrification temperature. I tried to find a condition that does not exceed (about 1200 ° C), but particle generation is related to the extremely local temperature rise corresponding to the temperature fluctuation due to flame fluctuation, and it is optimal from the average measured temperature. It is extremely difficult to set the configuration, so the hydrogen gas /
Combustion should be performed without problems for particle generation both when the oxygen gas has a normal mixing ratio and when steam oxidation treatment using a low flow rate hydrogen gas and steam oxidation treatment using a low hydrogen gas / oxygen gas mixture ratio are used. It defines the optimum arrangement conditions and opening area conditions for the hydrogen gas ejection port and the oxygen gas ejection port in the apparatus.

Embodiment 1. 1 and 2 show a combustion device according to a first embodiment of the present invention.
Reference numeral 1 is an external combustion device, 2 is a combustion vessel that introduces hydrogen gas and oxygen gas while heating and generates steam by burning them, 3 is a hydrogen gas introduction pipe, 4 is an oxygen gas introduction pipe,
Reference numeral 5 is a heater for heating at least one of hydrogen and oxygen gas, 6 is a cooling mechanism which is provided around the combustion container 2 and cools the combustion container 2 at a condensation temperature of water vapor or higher, 7 is a hydrogen gas ejection nozzle, and 8 is oxygen. A gas ejection nozzle (hole), 9 is a concave portion at the tip of the hydrogen gas ejection nozzle 7, 10 is an oxygen diffusion plate, 1
1 is a heat insulating material provided between the heater 5 and the cooling mechanism 6,
2 is a portion showing the area of the hydrogen gas outlet, 13 is a portion showing the area of the oxygen gas outlet, and 14 is a combustion flame formed by the combustion of hydrogen and oxygen.

[0026] In the annular type combustor of FIG. 1, the opening area of the hydrogen gas ejection port (S) is 0.12 cm ² or more 0.50 cm ²
Below, and at a position where the oxygen gas jet nozzle is 8 to 14 mm away from the center of the hydrogen gas jet nozzle, the opening area is 0.2 to 0.6 cm ² , and particularly preferably 0.3 to
It has a configuration in which it is opened in an annular shape at 0.5 cm ² .

For example, the shape of the hydrogen gas ejection port is 4 to 4 mm in diameter.
It is possible to cite a configuration in which it has a circular shape of 8 mm, and the oxygen gas ejection nozzle is opened in an annular shape with a width of 0.7 mm centered at a position 10 mm away from the center of the hydrogen gas ejection nozzle.

For example, the shape of the hydrogen gas ejection port is 4 to 4 mm in diameter.
An example of the configuration is a circular shape of 8 mm, and the oxygen gas ejection nozzle is opened in a ring shape having a width of 0.8 mm centered at a position 8 mm away from the center of the hydrogen gas ejection nozzle.

[0029] In distributed combustor of FIG. 2, the opening area of the hydrogen gas ejection port (S) is 0.12 cm ² or more 0.50 cm ²
Below, and at a position where the oxygen gas jet nozzle (hole) is 8 to 14 mm away from the center of the hydrogen gas jet nozzle to the periphery, the total hole area of the oxygen gas jet nozzle is 0.3 to
The structure is such that the openings are dispersed in an opening area of 0.5 cm ² .

For example, the shape of the hydrogen gas ejection port is 4 to 4 mm in diameter.
8 mm circular shape and its oxygen gas ejection nozzle (hole)
There may be mentioned a configuration in which eight holes each having a diameter of 2.5 mm are opened in 45 degree increments on a concentric circle of 10 mm from the center of the hydrogen gas ejection nozzle.

For example, the shape of the hydrogen gas ejection port is 4 to 4 mm in diameter.
8 mm circular shape and its oxygen gas ejection nozzle (hole)
There may be mentioned a configuration in which 12 holes each having a diameter of 2 mm are opened in a concentric circle of 13 mm from the center of the hydrogen gas ejection nozzle in steps of 30 degrees.

In the case of such a structure, there is no problem with respect to particle generation even if the mixing ratio of hydrogen gas / oxygen gas is changed.

Embodiment 2. 3 and 4 show a combustion apparatus according to a second embodiment of the present invention. In each figure, 1 is an external combustion apparatus, 2 is a hydrogen gas and an oxygen gas which are introduced while heating and burned. A combustion container for generating steam by means of 3, a hydrogen gas introduction pipe, 4 an oxygen gas introduction pipe, 5 a heater for heating at least one of hydrogen and oxygen gas, 6 is provided around the combustion container 2, and the combustion container 2 Cooling mechanism for cooling water vapor above the condensation temperature, 7
Is a hydrogen gas ejection nozzle, 8 is an oxygen gas ejection nozzle (hole), 9 is a concave portion at the tip of the hydrogen gas ejection nozzle 7, 10
Is an oxygen diffusion plate, 11 is a heat insulating material provided between the heater 5 and the cooling mechanism 6, 12 is a portion showing the hydrogen gas ejection port area,
Reference numeral 13 is a portion showing the area of the oxygen gas ejection port, and 14 is a combustion flame formed by the combustion of hydrogen and oxygen.

[0034] In the annular type combustion apparatus in FIG. 3, the opening area of the hydrogen gas ejection port (S) is 0.12 cm ² or more 0.50 cm ²
Below, and at a position where the oxygen gas jet nozzle is separated from the center of the hydrogen gas jet nozzle by 8 to 14 mm from the center to 0.
The opening area is 3 to 0.5 cm ^{2 in} an annular shape, and the opening area of the oxygen gas ejection nozzle is 1 cm ² or less at a position 14 to 20 mm away from the center of the hydrogen gas ejection nozzle. is there.

For example, as shown in FIG. 3, the shape of the hydrogen gas ejection port is a circle having a diameter of 4 to 8 mm, and the oxygen gas ejection nozzle is 1 from the center of the hydrogen gas ejection nozzle to the periphery.
A structure in which a hole having a width of 0.5 mm is opened in an annular shape centered on a position separated by 3.5 mm, and eight rectangular holes having a width of 1 mm and a radial length of 5 mm are opened radially at intervals of 45 degrees from the annular hole. Is mentioned.

For example, as shown in FIG. 1, the hydrogen gas ejection port has a circular shape with a diameter of 4 to 8 mm, and its oxygen gas ejection nozzle is 1 from the center of the hydrogen gas ejection nozzle to the periphery.
An example is a configuration in which a ring-shaped opening is formed with a width of 1 mm centered on a position separated by 4 mm.

[0037] In distributed combustion device of FIG. 4, the opening area of the hydrogen gas ejection port (S) is 0.12 cm ² or more 0.50 cm ²
Below, and at a position where the oxygen gas jet nozzle (hole) is 8 to 14 mm away from the center of the hydrogen gas jet nozzle to the periphery, the total hole area of the oxygen gas jet nozzle is 0.3 to
The openings are dispersed with an opening area of 0.5 cm ² , and the oxygen gas injection nozzles (holes) are opened at a position 14 to 20 mm away from the center of the hydrogen gas injection nozzle to an opening area of 1 cm ² or less. It is a composition.

For example, the shape of the hydrogen gas ejection port is 4 to 4 mm in diameter.
8 mm circular shape and its oxygen gas ejection nozzle (hole)
8 holes with a diameter of 2.5 mm at 45 degree intervals on a concentric circle of 10 mm from the center of the hydrogen gas ejection nozzle, and on a concentric circle of 16 mm, a hole on a concentric circle of 10 mm is 1
A configuration is possible in which eight holes each having a diameter of 2.5 mm are opened at intervals of 45 degrees with a shift of 5 degrees.

With such a configuration, even if the mixing ratio of hydrogen gas / oxygen gas is changed, as in the first embodiment,
There was no problem with particle generation.

Embodiment 3. Structurally, FIG. 1 and FIG.
In the annular type combustion device according to the third embodiment of the present invention, the hydrogen gas ejection port has an opening area (S) of less than 0.12 cm ² and the oxygen gas ejection From the center of the hydrogen gas jet nozzle to the surrounding area [4+
The opening area is 0.3 to 0.5 cm ² at positions separated by (S / π) ^1/2 ]-[10+ (S / π) ^1/2 ] mm.

For example, the shape of the hydrogen gas outlet is 1 m in diameter.
There may be mentioned a configuration in which the oxygen gas jet nozzle has a circular shape of m and the opening of the oxygen gas jet nozzle is a ring having a width of 0.8 mm centered at a position 8 mm away from the center of the hydrogen gas jet nozzle.

For example, the shape of the hydrogen gas outlet is 1 m in diameter.
There may be mentioned a configuration in which the oxygen gas jet nozzle has a circular shape of m, and the oxygen gas jet nozzle is opened in an annular shape with a width of 0.6 mm centered at a position 10.5 mm away from the center of the hydrogen gas jet nozzle.

In the dispersion type combustion apparatus, the opening area (S) of the hydrogen gas ejection port is 0.12 cm ² or more and 0.50 cm ² or less, and the oxygen gas ejection nozzle (hole) is located from the center of the hydrogen gas ejection nozzle. The total hole area of the oxygen gas injection nozzle is 0.3 to 0.5c at a position 8 to 14mm away from the surrounding area.
The structure is such that the openings are dispersed in an opening area of m ² .

For example, the shape of the hydrogen gas outlet is 4 to 4 mm in diameter.
8 mm circular shape and its oxygen gas ejection nozzle (hole)
There may be mentioned a configuration in which eight holes each having a diameter of 2.5 mm are opened in 45 degree increments on a concentric circle of 10 mm from the center of the hydrogen gas ejection nozzle.

For example, the hydrogen gas ejection port may have a diameter of 4 to
8 mm circular shape and its oxygen gas ejection nozzle (hole)
There may be mentioned a configuration in which 12 holes each having a diameter of 2 mm are opened in a concentric circle of 13 mm from the center of the hydrogen gas ejection nozzle in steps of 30 degrees.

Fourth Embodiment Structurally, FIG. 3 and FIG.
In the annular combustion device according to the fourth embodiment of the present invention, the opening area (S) of the hydrogen gas ejection port is less than 0.12 cm ² and the oxygen gas ejection is performed. From the center of the hydrogen gas jet nozzle to the surrounding area [4+
(S / π) ^1/2 ] to [10+ (S / π) ^1/2 ] mm apart, opening with an opening area of 0.3 to 0.5 cm ² , and the oxygen gas ejection nozzles with hydrogen. [10+ (S / π) ^1/2 ] to [16+ (S /
π) ^1/2 ] mm apart, and the opening area is 1 cm ² or less.

For example, as shown in FIG. 3, the shape of the hydrogen gas ejection port is a circle having a diameter of 1 mm, and the oxygen gas ejection nozzle is 10.
A hole with a width of 0.6 mm is opened in an annular shape centered on a position separated by 5 mm, and the annular hole is radially divided by 45 degrees.
A configuration is possible in which eight rectangular holes each having a width of 1 mm and a radial length of 5 mm are opened.

For example, as shown in FIG. 1, the hydrogen gas ejection port has a circular shape with a diameter of 1 mm, and its oxygen gas ejection nozzle is 11 m away from the center of the hydrogen gas ejection nozzle.
An example is a configuration in which a ring is opened with a width of 1.1 mm centered on a position separated by m.

[0049] In distributed combustion device of FIG. 4, the opening area of the hydrogen gas ejection port (S) is 0.12 cm ² or more 0.50 cm ²
Below, and at a position where the oxygen gas jet nozzle (hole) is 8 to 14 mm away from the center of the hydrogen gas jet nozzle to the periphery, the total hole area of the oxygen gas jet nozzle is 0.3 to
The openings are dispersed with an opening area of 0.5 cm ² , and the oxygen gas injection nozzles (holes) are opened at a position 14 to 20 mm away from the center of the hydrogen gas injection nozzle to an opening area of 1 cm ² or less. It is a composition.

For example, the shape of the hydrogen gas ejection port is 4 to 4 mm in diameter.
8 mm circular shape and its oxygen gas ejection nozzle (hole)
8 holes with a diameter of 2.5 mm at 45 degree intervals on a concentric circle of 10 mm from the center of the hydrogen gas ejection nozzle, and on a concentric circle of 16 mm, a hole on a concentric circle of 10 mm is 1
A configuration is possible in which eight holes each having a diameter of 2.5 mm are opened at intervals of 45 degrees with a shift of 5 degrees.

Reference Example 1. FIG. 5 shows a combustion apparatus which is a reference example 1 of the present invention, in which 1 is an external combustion apparatus, 2 is a combustion vessel for introducing hydrogen gas and oxygen gas while heating them, and burning them to generate water vapor, 3 Is a hydrogen gas introduction pipe, 4 is an oxygen gas introduction pipe, 5 is a heater for heating at least one of hydrogen and oxygen gas, and 6 is a cooling mechanism for cooling a combustion container provided around the combustion container at a temperature at which water vapor is above dew condensation temperature. , 7 is a hydrogen gas ejection nozzle, 8 is an oxygen gas ejection nozzle (hole), 9 is a concave portion at the tip of the hydrogen gas ejection nozzle 7, 10 is an oxygen diffusion plate, 1
1 is a heat insulating material provided between the heater 5 and the cooling mechanism 6,
Reference numeral 2 is a portion showing the area of the hydrogen gas ejection port, 13 is a portion showing the area of the oxygen gas ejection port, 14 is a combustion flame formed by combustion of hydrogen and oxygen, and 15 is a tip portion of the hydrogen gas ejection nozzle.

The dispersion type combustion apparatus of FIG. 5 is provided with a hydrogen gas ejection nozzle for introducing hydrogen gas into the combustion container and an oxygen gas ejection nozzle for introducing oxygen gas into the combustion container.
Further, the oxygen gas ejection nozzle is configured to be flush with the tip of the hydrogen gas ejection nozzle or to be retracted to open at a plurality of locations widely dispersed in the surroundings.

For example, the oxygen diffusion plate 10 may be retracted on the same plane as the hydrogen gas jet nozzle tip portion 15 or within 5 mm, and the hydrogen gas jet nozzle inner diameter is not enlarged at the tip portion.

Reference Example 2. FIG. 6 shows a combustion apparatus which is a reference example 2 of the present invention, in which 1 is an external combustion apparatus, 2 is a combustion vessel for introducing hydrogen gas and oxygen gas while heating them, and burning them to generate water vapor, 3 Is a hydrogen gas introduction pipe, 4 is an oxygen gas introduction pipe, 5 is a heater for heating at least one of hydrogen and oxygen gas, and 6 is a cooling mechanism for cooling a combustion container provided around the combustion container at a temperature at which water vapor is above dew condensation temperature. , 7 is a hydrogen gas ejection nozzle, 8 is an oxygen gas ejection nozzle (hole), 9 is a concave portion at the tip of the hydrogen gas ejection nozzle 7, 10 is an oxygen diffusion plate, 1
1 is a heat insulating material provided between the heater 5 and the cooling mechanism 6,
2 is a portion showing the area of the hydrogen gas jet, 13 is a portion showing the area of the oxygen gas jet, 14 is a combustion flame formed by the combustion of hydrogen and oxygen, 16 is an oxygen gas jet nozzle facing the hydrogen gas jet nozzle side. (Hole).

The distributed combustion apparatus of FIG. 6 is provided with a hydrogen gas ejection nozzle for introducing hydrogen gas into the combustion container and an oxygen gas ejection nozzle for introducing oxygen gas into the combustion container.
In addition, a part or all of the oxygen gas ejection nozzle hole faces the hydrogen gas ejection nozzle side.

For example, the shape of the hydrogen gas ejection port is 4 to 4 mm in diameter.
8 mm circular shape and its oxygen gas ejection nozzle (hole)
From the center of the hydrogen gas jet nozzle, open four holes with a diameter of 2 mm in 90 degree steps on a concentric circle of 10 mm, and
On the concentric circles of mm, shift 4 degrees from the holes on the concentric circles of 10 mm, and open four holes with a diameter of 2 mm at 90 degree intervals.
In addition, there is a configuration in which all the four inner holes are directed toward the hydrogen gas ejection nozzle side at an angle of 45 degrees.

Reference Example 3. FIG. 7 shows a combustion apparatus which is a reference example 3 of the present invention, in which 1 is an external combustion apparatus, 2 is a combustion vessel for generating steam by introducing hydrogen gas and oxygen gas while heating and burning them. Is a hydrogen gas introduction pipe, 4 is an oxygen gas introduction pipe, 5 is a heater for heating at least one of hydrogen and oxygen gas, and 6 is a cooling mechanism for cooling a combustion container provided around the combustion container at a temperature at which water vapor is above dew condensation temperature. , 7 is a hydrogen gas ejection nozzle, 8 is an oxygen gas ejection nozzle (hole), 9 is a concave portion at the tip of the hydrogen gas ejection nozzle 7, 10 is an oxygen diffusion plate, 1
1 is a heat insulating material provided between the heater 5 and the cooling mechanism 6,
2 is a portion showing the area of the hydrogen gas outlet, 13 is a portion showing the area of the oxygen gas outlet, 14 is a combustion flame formed by combustion of hydrogen and oxygen, 17 is a side surface side of the hydrogen gas jet nozzle and the oxygen gas jet nozzle. A cooling body, 18 is an internal cooling body by the gas of the hydrogen gas ejection nozzle and the oxygen gas ejection nozzle.

The combustion apparatus of FIG. 7 is equipped with a hydrogen gas ejection nozzle for introducing hydrogen gas into the combustion container and an oxygen gas ejection nozzle for introducing oxygen gas into the combustion container. The cooling body for controlling the temperature of the gas jet nozzle is provided on at least one of the side surface and the inside of the hydrogen gas jet nozzle and the oxygen gas jet nozzle.

For example, as a cooling method from the side, a structure in which a water cooling holder using cooling water is provided on the side surfaces of the hydrogen gas jet nozzle and the oxygen gas jet nozzle is mixed with hydrogen gas or oxygen gas as a cooling method from the inside. There is a configuration in which a flow passage through which an inert gas such as nitrogen gas can be flowed is provided at the tip of the hydrogen gas ejection nozzle and the oxygen gas ejection nozzle.

As a method of using these cooling bodies, for example, the capacity of the cooling body is lowered only at the time of ignition, and the cooling capacity is increased during the oxidation treatment.

Fifth Embodiment FIG. 8 shows a combustion apparatus according to a fifth embodiment of the present invention, in which 1 is an external combustion apparatus, 2 is a combustion vessel for introducing steam while heating and inducing hydrogen gas and oxygen gas to generate steam, Reference numeral 3 is a hydrogen gas introduction pipe, 4 is an oxygen gas introduction pipe, 5 is a heater for heating at least one of hydrogen and oxygen gas, and 6 is a cooling for cooling a combustion container provided around the combustion container at a water vapor temperature equal to or higher than dew condensation temperature. Mechanism, 7 is a hydrogen gas ejection nozzle, 8 is an oxygen gas ejection nozzle (hole), 9 is a concave portion at the tip of the hydrogen gas ejection nozzle 7, 10 is an oxygen diffusion plate,
11 is a heat insulating material provided between the heater 5 and the cooling mechanism 6,
12 is a portion showing the area of the hydrogen gas outlet, 13 is a portion showing the area of the oxygen gas outlet, 14 is a combustion flame formed by the combustion of hydrogen and oxygen, 19 is a portion which can be moved closer to the tip of the hydrogen gas outlet nozzle. It is a possible movable heater.

The combustion apparatus of FIG. 8 is equipped with a hydrogen gas ejection nozzle for introducing hydrogen gas into the combustion container and an oxygen gas ejection nozzle for introducing oxygen gas into the combustion container. This is a configuration in which a movable heater is provided to control the temperature of at least one of the gas ejection nozzles.

The method of using this movable heater is, for example, to move it to the hydrogen gas ejection nozzle side and the oxygen gas ejection nozzle side only at the time of ignition and to move it away from the nozzle side at the time of oxidation treatment.

The main states of the opening area of the hydrogen gas jetting nozzle and the position and opening area of the oxygen gas jetting nozzle in the above embodiment, and the comparison state with other reference examples are as follows. Reference example A: (Structure corresponds to Fig. 1) Opening area of hydrogen gas jet nozzle (cm ² ): 0.126 Opening area of oxygen gas jet nozzle (cm ² ): 0.879 Hydrogen gas jet of oxygen gas jet nozzle Distance from nozzle (mm): 10 Normal mixing ratio: × Diluting mixing ratio: ◎ Reference example B: (Structure corresponds to Fig. 4) Opening area of hydrogen gas injection nozzle (cm ² ): 0.126 Opening area of oxygen gas jet nozzle (cm ² ): 0.125 Distance of oxygen gas jet nozzle from hydrogen gas jet nozzle (mm): 10 Normal mixing ratio: ◎ Diluting mixing ratio: × Case C: (Structure corresponds to FIG. 4) Opening area of hydrogen gas jet nozzle (cm ² ): 0.126 Opening area of oxygen gas jet nozzle (cm ² ): 0.2 Hydrogen gas jet nozzle of oxygen gas jet nozzle Distance from (mm): 10 Normal mixing ratio: ○ Diluting mixing ratio: △ Example of embodiment D: (Structure corresponds to FIG. 4) Opening area of hydrogen gas jet nozzle (cm ² ): 0.126 Oxygen gas jet nozzle Opening area (cm ² ): 0.4 Distance of oxygen gas jet nozzle from hydrogen gas jet nozzle (mm): 10 Normal mixing ratio: ○ Diluting mixing ratio: ○

Each of the above-mentioned evaluations was carried out by counting the number of particles in the water vapor discharged from the combustion device.

[0066]

Since the present invention is constructed as described above, it has the following effects.

According to the first and third aspects of the present invention, since the position and the opening area of the oxygen gas ejecting nozzle can be set to proper values with respect to the position and the opening area of the hydrogen gas ejecting nozzle, the oxygen gas is ejected from the oxygen gas ejecting nozzle. It spreads out and diffuses in a more appropriate range around it. As a result, the combustion flame when ignited and burned to generate water vapor does not come out from the tip of the hydrogen gas ejection nozzle but comes out from the surrounding oxygen gas ejection nozzles, and approaches the tip of the hydrogen gas nozzle. It is possible to prevent the particles from being generated and the nozzle shape to be deformed due to devitrification of the nozzle tip.

Also, in the case of the steam oxidation treatment using low flow rate hydrogen gas and the steam oxidation treatment using low hydrogen gas / oxygen gas mixture ratio, the combustion flame when ignited and burned to generate steam is hydrogen. The flame can be formed away from the tip of the gas ejection nozzle. For this reason, the tip of the hydrogen gas jet nozzle is heated above the devitrification temperature to prevent devitrification of the nozzle tip, and the cause of particle generation and the deformation of the nozzle shape can be eliminated. In addition, it is possible to prevent the period (lifetime) during which high quality oxidation processing is possible without generation of particles from being shortened.

According to the second and fourth aspects of the present invention, since the position and the opening area of the oxygen gas injection nozzle can be set to appropriate values with respect to the position and the opening area of the hydrogen gas injection nozzle, the oxygen gas is ejected from the oxygen gas. It spreads out from the nozzle to an appropriate area around the nozzle and is ejected. As a result, the combustion flame when ignited and burned to generate water vapor does not come out from the tip of the hydrogen gas ejection nozzle but comes out from the surrounding oxygen gas ejection nozzles, and the tip of the hydrogen gas nozzle becomes abnormal. It is possible to prevent the generation of particles and the deformation of the nozzle shape due to devitrification at the nozzle tip.

[0070]

According to the fifth aspect of the present invention, since the hydrogen gas jet nozzle and the oxygen gas jet nozzle tip can be heated to a high temperature during ignition, the hydrogen gas and the oxygen gas can be easily ignited. In addition, the mobile heater is used during the oxidation process.
The temperature of the tip of the hydrogen gas jet nozzle and the tip of the oxygen gas jet nozzle can be lowered by the action of the nozzle, so that the tip is not heated abnormally, and the devitrification of the tip of the nozzle causes the generation of particles and the deformation of the nozzle shape. It can be eliminated.

[Brief description of drawings]

FIG. 1 is a structural diagram of an annular combustion device according to first and third embodiments of the present invention.

FIG. 2 is a structural diagram of a distributed combustion device according to Embodiments 1 and 3 of the present invention.

FIG. 3 is a structural diagram of an annular combustion device according to Embodiments 2 and 4 of the present invention.

FIG. 4 is a structural diagram of a distributed combustion device according to Embodiments 2 and 4 of the present invention.

FIG. 5 is a structural diagram of a combustion apparatus showing Reference Example 1 of the present invention.

FIG. 6 is a structural diagram of a combustion apparatus showing a reference example 2 of the present invention.

FIG. 7 is a structural diagram of a combustion apparatus showing a reference example 3 of the present invention.

FIG. 8 is a structural diagram of a combustion apparatus showing Embodiment 5 of the present invention.

FIG. 9 is a view showing a form of a conventional annular combustion device.

FIG. 10 is a diagram showing a form of a conventional distributed combustion device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 External combustion chamber, 2 Combustion vessel, 3 Hydrogen gas introduction pipe, 4 Oxygen gas introduction pipe, 5 Heater, 6 Cooling mechanism, 7 Hydrogen gas ejection nozzle, 8 Oxygen gas ejection nozzle, 9 Recessed portion, 10 Oxygen diffusion plate, 11 Insulation Material, 12 hydrogen gas jet area, 13 oxygen gas jet area, 14 combustion flame, 15 hydrogen gas jet nozzle tip, 16 oxygen gas jet nozzle (hole) facing hydrogen gas jet nozzle side, 17 hydrogen gas jet nozzle And a side surface cooling body of the oxygen gas jetting nozzle, 18 an internal cooling body by the gas of the hydrogen gas jetting nozzle and the oxygen gas jetting nozzle, 19 a movable heater which can be moved closer to the tip side of the hydrogen gas jetting nozzle

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuya Inoue 4-chome, Mizuhara, Itami City, Hyogo Prefecture Ryoden Semiconductor System Engineering Co., Ltd. (72) Inventor Takatomo Fukumoto 2-2 Marunouchi, Chiyoda-ku, Tokyo No. 3 Mitsubishi Electric Corporation (72) Inventor Shoji Takahara 2-3-3 Marunouchi, Chiyoda-ku, Tokyo Mitsubishi Electric Corporation (72) Inventor Masaya Tanio 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsubishi Electric Incorporated (56) Reference JP-A-9-246262 (JP, A) JP-A-11-317400 (JP, A) JP-A-10-294308 (JP, A) JP-A-3-155624 (JP, A) A) JP 8-178225 (JP, A) JP 5-304136 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/31 H01L 21/205 H01L 21 / 316 F22B 3/02

Claims (4)

(57) [Claims] 1. A combustion device for producing hydrogen vapor by introducing hydrogen gas and oxygen gas into a combustion container and combusting the hydrogen gas, and a hydrogen gas jet port for introducing the hydrogen gas into the combustion container and oxygen gas. An oxygen gas injection port to be introduced into the combustion container, the opening area of the hydrogen gas injection port is 0.12 cm ² or more and 0.50 cm ² or less, and the oxygen gas injection port is surrounded from the center of the hydrogen gas injection port. 8 to 1
A combustion device, which is configured to open with an opening area of 0.3 to 0.5 cm ² at positions separated by 4 mm. 2. The combustion according to claim 1, wherein the oxygen gas ejection port is open at an opening area of 1 cm ² or less at a position 14 to 20 mm away from the center of the hydrogen gas ejection port to the periphery. apparatus. 3. A combustion device for generating steam by introducing hydrogen gas and oxygen gas into a combustion container while heating and burning the hydrogen gas, and a hydrogen gas ejection port for introducing the hydrogen gas into the combustion container, An oxygen gas jet for introducing oxygen gas into the combustion vessel, the opening area (S) of the hydrogen gas jet is less than 0.12 cm ² , and the oxygen gas jet is the center of the hydrogen gas jet. From around [4
+ (S / π) ^1/2 ] to [10+ (S / π) ^1/2 ] m
A combustor characterized by having an opening area of 0.3 to 0.5 cm ² at positions separated by m. 4. An oxygen gas jet from the center of the hydrogen gas jet to [10+ (S / π) ^1/2 ] to [16+ (S
4. The combustion device according to claim 3, wherein the combustion device is configured to open with an opening area of 1 cm ² or less at positions separated by / π) ^1/2 ] mm. 5. A combustion apparatus for generating steam by introducing hydrogen gas and oxygen gas into a combustion container while heating the hydrogen gas and burning the hydrogen gas, and a hydrogen gas jet port for introducing the hydrogen gas into the combustion container, An oxygen gas injection port for introducing oxygen gas into the combustion container, and a movable heater for controlling the temperature of at least one of the hydrogen gas injection port and the oxygen gas injection port. And a combustion device.