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JP3538309B2 - Manufacturing method of multilayer ceramic electronic component - Google Patents
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JP3538309B2 - Manufacturing method of multilayer ceramic electronic component - Google Patents

Manufacturing method of multilayer ceramic electronic component

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Publication number
JP3538309B2
JP3538309B2 JP03448598A JP3448598A JP3538309B2 JP 3538309 B2 JP3538309 B2 JP 3538309B2 JP 03448598 A JP03448598 A JP 03448598A JP 3448598 A JP3448598 A JP 3448598A JP 3538309 B2 JP3538309 B2 JP 3538309B2
Authority
JP
Japan
Prior art keywords
ceramic
electronic component
multilayer ceramic
resin
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP03448598A
Other languages
Japanese (ja)
Other versions
JPH11233388A (en
Inventor
佳也 坂口
淳夫 長井
秀紀 倉光
和博 小松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP03448598A priority Critical patent/JP3538309B2/en
Publication of JPH11233388A publication Critical patent/JPH11233388A/en
Application granted granted Critical
Publication of JP3538309B2 publication Critical patent/JP3538309B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、例えば積層セラミ
ックコンデンサ等の積層セラミック電子部品の製造方法
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer ceramic electronic component such as a multilayer ceramic capacitor.

【0002】[0002]

【従来の技術】セラミックシートと、導電体層とを交互
に積層して製造する積層セラミックコンデンサにおい
て、セラミックシートは少なくともチタン酸バリウム等
の誘電体材料とポリエチレンとを含有し、かつ多孔度が
30%以上のものであり、導電体層は、パラジウムやニ
ッケル等の金属粉末と、エチルセルロース等の樹脂成分
を混合したペーストを用いて形成していた。
2. Description of the Related Art In a multilayer ceramic capacitor manufactured by alternately laminating ceramic sheets and conductor layers, the ceramic sheet contains at least a dielectric material such as barium titanate and polyethylene and has a porosity of 30%. % Or more, and the conductor layer was formed using a paste in which a metal powder such as palladium or nickel and a resin component such as ethyl cellulose were mixed.

【0003】[0003]

【発明が解決しようとする課題】しかしながら上記方法
によると、エチルセルロース等の樹脂成分を溶解、もし
くは金属粉末と樹脂の混合物である導電体層用ペースト
の粘度調整に希釈剤として有機溶剤を使用するため、こ
の有機溶剤によって上記セラミックシートが膨潤または
溶解され、内部電極の短絡や耐電圧性の低下を招き、信
頼性や品質の点に問題点を有していた。
However, according to the above method, an organic solvent is used as a diluent for dissolving a resin component such as ethyl cellulose or adjusting the viscosity of a conductive layer paste which is a mixture of a metal powder and a resin. However, the ceramic sheet is swelled or dissolved by the organic solvent, causing a short circuit of the internal electrode and a decrease in withstand voltage, and has a problem in reliability and quality.

【0004】そこで本発明は、導電体ペーストの希釈剤
に水を使用することにより、上記セラミックシートに対
し上述したような問題点のない積層セラミック電子部品
を提供することを目的とするものである。
Accordingly, an object of the present invention is to provide a multilayer ceramic electronic component which does not have the above-mentioned problems with respect to the ceramic sheet by using water as a diluent for the conductive paste. .

【0005】[0005]

【課題を解決するための手段】この目的を達成するため
に本発明の積層セラミック電子部品の製造方法は、ポリ
エチレンとセラミック原料を含有する複数のセラミック
シートと金属と樹脂と水を含有する複数の導電体層とを
交互に積層し、まず加圧し、この加圧を保持したまま加
熱して前記ポリエチレンを融解して前記セラミックシー
ト同士の接着を強固にして積層体を形成する第1の工程
と、次に前記積層体を焼成する第2の工程とを有するも
のであり、希釈剤として水を使用することにより前記セ
ラミックシート内に浸入した時、前記セラミックシート
を膨潤または溶解させないため上記目的を達成できる。
In order to achieve the above object, a method for manufacturing a multilayer ceramic electronic component according to the present invention comprises the steps of:
A plurality of ceramic sheets containing ethylene and ceramic raw materials, and a plurality of conductor layers containing metal, resin, and water are alternately laminated, and first pressurized.
The polyethylene is heated to melt the ceramic sheet.
A first step of the bonding of the bets with each other and firmly to form a laminate, even then a second step of firing the laminate
The above object can be achieved by using water as a diluent so that the ceramic sheet does not swell or dissolve when it enters the ceramic sheet.

【0006】[0006]

【発明の実施の形態】本発明の請求項1に記載の発明
は、ポリエチレンとセラミック原料を含有する複数のセ
ラミックシートと金属と樹脂と水を含有する複数の導電
体層とを交互に積層し、まず加圧し、この加圧を保持し
たまま加熱して前記ポリエチレンを融解して前記セラミ
ックシート同士の接着を強固にして積層体を形成する第
1の工程と、次に前記積層体を焼成する第2の工程と
有する積層セラミック電子部品の製造方法であり、セラ
ミックシートの膨潤または溶解を防止することにより、
導電体層の短絡や耐電圧性の低下を防止し、信頼性や品
質の向上を達成することができる。
BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention comprises alternately laminating a plurality of ceramic sheets containing polyethylene and ceramic raw materials and a plurality of conductor layers containing metal, resin and water. First, pressurize and hold this pressure
The polyethylene is melted by heating while heating.
A first step of forming a laminate by strengthening the adhesion between Kkushito, then a second step of firing the laminate
A manufacturing method of a multilayer ceramic electronic component having, Serra
By preventing swelling or dissolution of the Mick sheet,
It is possible to prevent short-circuiting of the conductor layer and decrease in withstand voltage, and to improve reliability and quality.

【0007】[0007]

【0008】請求項に記載の発明は、樹脂成分とし
て、水溶性樹脂を用いる請求項1に記載の積層セラミッ
ク電子部品の製造方法であり、セラミックシートの膨潤
または溶解を抑制することにより、導電体層の短絡や耐
電圧性の低下を防止し、信頼性や品質の向上を達成する
ことができる。
According to a second aspect of the present invention, there is provided the method for manufacturing a multilayer ceramic electronic component according to the first aspect, wherein a water-soluble resin is used as the resin component, and the ceramic sheet swells.
Alternatively, by suppressing dissolution, a short circuit of the conductor layer and a decrease in withstand voltage can be prevented, and reliability and quality can be improved.

【0009】請求項に記載の発明は、樹脂成分とし
て、水分散型合成樹脂エマルジョンを用いる請求項1
記載の積層セラミック電子部品の製造方法であり、セラ
ミックシートの膨潤または溶解を抑制することにより、
導電体層の短絡や耐電圧性の低下を防止し、信頼性や品
質の向上を達成することができる。
[0009] According to a third aspect of the invention, as a resin component, a method of manufacturing a multilayer ceramic electronic component according to claim 1 using a water-dispersed synthetic resin emulsion, Serra
By suppressing the swelling or dissolution of the mic sheet,
It is possible to prevent short-circuiting of the conductor layer and decrease in withstand voltage, and to improve reliability and quality.

【0010】請求項に記載の発明は、第1の工程にお
いて、セラミックシート中のポリエチレンは、重量平均
分子量が400000以上である請求項1に記載の積層
セラミック電子部品の製造方法であり、多孔度の高いセ
ラミックシートとなるので上記導電体層の有無による段
差を吸収できる。
[0010] According to a fourth aspect of the invention, in a first step, the polyethylene in the ceramic sheet is a method of manufacturing a multilayer ceramic electronic component of claim 1 the weight average molecular weight of 400,000 or more, porous Since the ceramic sheet has a high degree, a step due to the presence or absence of the conductor layer can be absorbed.

【0011】以下本発明の実施の形態について積層セラ
ミックコンデンサを例に図面を参照しながら説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings, taking a multilayer ceramic capacitor as an example.

【0012】(実施の形態1)図1は本実施の形態にお
ける積層セラミックコンデンサの一工程を示す断面図で
あり、1aはセラミックシート、2aはセラミックシー
ト1a上に形成した内部電極2となる金属ペースト、4
aは金属ペースト形成部分、5aは金属ペースト非形成
部分、6は金属上板、7は金属下板、8は金属上板6と
金属下板7の間隔を示している。また図2は一般的な積
層セラミックコンデンサの一部切欠斜視図であり、1は
セラミック誘電体層、2は内部電極、3は外部電極であ
る。
(Embodiment 1) FIG. 1 is a cross-sectional view showing one step of a monolithic ceramic capacitor according to the present embodiment, wherein 1a is a ceramic sheet, and 2a is a metal serving as an internal electrode 2 formed on the ceramic sheet 1a. Paste, 4
a indicates a metal paste forming portion, 5a indicates a metal paste non-forming portion, 6 indicates a metal upper plate, 7 indicates a metal lower plate, and 8 indicates a distance between the metal upper plate 6 and the metal lower plate 7. FIG. 2 is a partially cutaway perspective view of a general multilayer ceramic capacitor, wherein 1 is a ceramic dielectric layer, 2 is an internal electrode, and 3 is an external electrode.

【0013】まず、重量平均分子量が400000のポ
リエチレンと、チタン酸バリウムを主成分とする誘電体
粉末からなる多孔度が70%であるセラミックシート1
a上に印刷法により、内部電極2となる金属ペースト2
aを所望の形状に複数形成する。この金属ペースト2a
は、金属成分として40〜70重量%ニッケルを含有
し、水溶性樹脂成分として2〜20重量%、希釈剤とし
て、イオン交換水を30〜70重量%を含有するもので
ある。上記水溶性樹脂として例えば、積水化学工業
(株)のKW−1、ライオン(株)AQ2266、第一
工業製薬(株)TB−13等がある。これらのセラミッ
クシート1aを金属ペースト2a中の水分を除去した
後、セラミックシート1aを挟んで、金属ペースト2a
が交互に対向するように積み重ね、仮積層体を得る。そ
の後、この仮積層体を金属上板6、金属下板7で挟ん
で、室温で一軸プレス機にてゲージ圧で5〜100MP
aの範囲で加圧する。ここで金属上板6と金属下板7の
仮積層体と接する面は研磨されており、金属上板6、金
属下板7面の間隔8のばらつきは、40μm以下に制御
されている。その後仮積層体に十分な圧力が加わったこ
とを確認して、仮積層体の最高温度が150℃〜200
℃になるまで昇温し、積層体を得る。ここで積層体の最
高温度を150℃〜200℃としたのは、150℃程度
からポリエチレンが融解し、セラミックシート同士の接
着が強固になるからである。200℃以下としたのは、
200℃より高くなるとポリエチレンが分解してしま
い、セラミックシート同士の接着に寄与しなくなるから
である。その後、縦3.2mm、横1.6mmのチップ形状
に切断して、大気中350℃でポリエチレンを除去した
(脱バイ)。この脱バイの時の温度は、ポリエチレンが
積層体から除去できかつ金属ペースト2a中のニッケル
の酸化が進みすぎない程度にすることが望ましく、具体
的には250〜350℃で行うことが望ましい。その
後、窒素ガスおよび水素ガスを用いて金属ペースト2a
中のニッケルの酸化が進みすぎない雰囲気を保ちなが
ら、1300℃で焼成を行う。この焼成によりチタン酸
バリウムを主成分とするセラミック誘電体層1とニッケ
ルを主成分とする内部電極2が同時に焼結した焼結体を
得る。次いでこの焼結体の内部電極2の露出した両端面
に銅等の外部電極3を焼き付け、メッキを施した後に完
成品に至る。
First, a ceramic sheet 1 made of polyethylene having a weight average molecular weight of 400,000 and a dielectric powder containing barium titanate as a main component and having a porosity of 70%.
a, a metal paste 2 to be an internal electrode 2 by a printing method
a is formed in a desired shape. This metal paste 2a
Contains 40 to 70% by weight of nickel as a metal component, 2 to 20% by weight of a water-soluble resin component, and 30 to 70% by weight of ion-exchanged water as a diluent. Examples of the water-soluble resin include KW-1 of Sekisui Chemical Co., Ltd., AQ2266 of Lion Corporation, and TB-13 of Daiichi Kogyo Seiyaku Co., Ltd. After removing the moisture in the metal paste 2a from these ceramic sheets 1a, the metal paste 2a is sandwiched between the ceramic sheets 1a.
Are stacked alternately so as to obtain a temporary laminate. Then, this temporary laminated body was sandwiched between the metal upper plate 6 and the metal lower plate 7, and the gauge pressure was 5 to 100 MPa with a uniaxial press at room temperature.
Pressurize in the range of a. Here, the surfaces of the metal upper plate 6 and the metal lower plate 7 that are in contact with the temporary laminate are polished, and the variation in the distance 8 between the surfaces of the metal upper plate 6 and the metal lower plate 7 is controlled to 40 μm or less. Thereafter, it was confirmed that sufficient pressure was applied to the temporary laminate, and the maximum temperature of the temporary laminate was 150 ° C to 200 ° C.
The temperature was raised to ℃ to obtain a laminate. Here, the reason why the maximum temperature of the laminate is set to 150 ° C. to 200 ° C. is that polyethylene is melted from about 150 ° C., and the adhesion between the ceramic sheets becomes strong. The reason for setting the temperature to 200 ° C. or less is that
If the temperature is higher than 200 ° C., the polyethylene is decomposed and does not contribute to the adhesion between the ceramic sheets. Thereafter, the chip was cut into a chip shape having a length of 3.2 mm and a width of 1.6 mm, and the polyethylene was removed at 350 ° C. in the atmosphere (debuying). It is desirable that the temperature at the time of the de-buying be such that the polyethylene can be removed from the laminate and the oxidation of the nickel in the metal paste 2a does not proceed too much. Then, the metal paste 2a is formed using nitrogen gas and hydrogen gas.
Sintering is performed at 1300 ° C. while maintaining an atmosphere in which oxidation of nickel in the inside does not proceed excessively. By this firing, a sintered body is obtained in which the ceramic dielectric layer 1 mainly containing barium titanate and the internal electrode 2 mainly containing nickel are sintered simultaneously. Next, external electrodes 3 made of copper or the like are baked on the exposed both end surfaces of the internal electrodes 2 of the sintered body, plated, and the finished product is obtained.

【0014】図4は、縦3.2mm、横1.6mmの大きさ
で、有効層が100層の積層セラミックコンデンサの有
効層厚みと耐電圧特性との関係を示すグラフ図である。
実線は本発明品で金属ペースト2aの樹脂成分として水
溶性樹脂を用い、希釈剤としてはイオン交換水を用いた
ものであり、点線は従来品で希釈剤として有機溶剤を使
用したものである。
FIG. 4 is a graph showing the relationship between the effective layer thickness and the withstand voltage characteristic of a multilayer ceramic capacitor having a size of 3.2 mm in length and 1.6 mm in width and having 100 effective layers.
The solid line is a product of the present invention, in which a water-soluble resin is used as a resin component of the metal paste 2a, and ion-exchanged water is used as a diluent. The dotted line is a conventional product in which an organic solvent is used as a diluent.

【0015】図4を見ると従来の積層セラミックコンデ
ンサでは、金属ペーストに使用している有機溶剤のセラ
ミックシートへの浸透によりセラミックシートが膨潤ま
たは溶解されるため、有効層厚みが7μm以下の場合、
耐電圧性にバラツキが特に大きくなる。ところが、金属
ペースト2aの樹脂成分として水溶性樹脂を使用し、希
釈剤としてイオン交換水を用いた本発明の積層セラミッ
クコンデンサは、有効層厚みが7μm以下になっても耐
電圧特性のバラツキが非常に小さかった。この結果よ
り、図3に見られるような、従来の金属ペーストを用い
て内部電極を形成した場合に多発していたセラミックシ
ートの膨潤または溶解による内部電極の短絡100や耐
電圧特性の低下を抑制し、歩留まりを大幅に改善するこ
とができることが分かる。
Referring to FIG. 4, in the conventional multilayer ceramic capacitor, since the ceramic sheet swells or dissolves due to the permeation of the organic solvent used for the metal paste into the ceramic sheet, when the effective layer thickness is 7 μm or less,
Variations in withstand voltage become particularly large. However, the multilayer ceramic capacitor of the present invention in which a water-soluble resin is used as a resin component of the metal paste 2a and ion-exchanged water is used as a diluent has a large variation in withstand voltage characteristics even when the effective layer thickness becomes 7 μm or less. Was small. From this result, as shown in FIG. 3, it is possible to suppress the short circuit 100 of the internal electrode and the deterioration of the withstand voltage characteristic due to the swelling or melting of the ceramic sheet, which frequently occur when the internal electrode is formed using the conventional metal paste. It can be seen that the yield can be greatly improved.

【0016】特に高積層化が要求されているニッケルを
内部電極2とする積層セラミックコンデンサの製造には
十分効果を発揮することは言うまでもない。
Needless to say, this is particularly effective for the production of a multilayer ceramic capacitor using nickel as the internal electrode 2 which is required to be highly laminated.

【0017】なお本発明においてポイントとなることを
以下に記載する。 (1)セラミックシート1aは多孔度が70%の場合に
ついてのみ示したが、30%以上80%未満であれば同
様の効果が得られる。また有効層数が100層を越える
場合は、多孔度が40〜75%のセラミックシート1a
を用いることが望ましい。
The key points in the present invention are described below. (1) Although only the case where the porosity of the ceramic sheet 1a is 70% is shown, similar effects can be obtained if the porosity is 30% or more and less than 80%. When the number of effective layers exceeds 100, the ceramic sheet 1a having a porosity of 40 to 75% is used.
It is desirable to use

【0018】(2)内部電極2を形成する金属ペースト
2aに含まれる樹脂成分として水溶性樹脂についてのみ
示したが、水分散型合成樹脂エマルジョンでも同様の効
果が得られる。
(2) Although only the water-soluble resin is shown as the resin component contained in the metal paste 2a forming the internal electrode 2, the same effect can be obtained with a water-dispersed synthetic resin emulsion.

【0019】(3)金属ペースト2aの金属成分として
ニッケルを用いたが銅などの卑金属やまたパラジウム、
銀−パラジウムなどの貴金属を用いてもかまわない。
(3) Nickel was used as the metal component of the metal paste 2a, but a base metal such as copper, palladium,
A noble metal such as silver-palladium may be used.

【0020】(4)金属ペースト2aの希釈剤としてイ
オン交換水を用いたが、純水等の含有イオンを取り除い
た水を使用する方が好ましい。
(4) Although ion-exchanged water is used as a diluent for the metal paste 2a, it is preferable to use water from which contained ions such as pure water have been removed.

【0021】(5)水溶性樹脂あるいは水分散型合成樹
脂エマルジョンは、焼成後の残留カーボンによる絶縁抵
抗の劣化を防止するために、脱バイ時の熱処理温度以下
で分解するものを用いることが望ましい。
(5) As the water-soluble resin or the water-dispersed synthetic resin emulsion, it is desirable to use one that decomposes at a temperature not higher than the heat treatment temperature during debubbling in order to prevent deterioration of insulation resistance due to residual carbon after firing. .

【0022】(6)実施の形態1においては、積層セラ
ミックコンデンサのみについて示したが、セラミックシ
ート1aを用いて製造するような積層バリスタ、積層サ
ーミスタ、積層フィルタ、フェライト部品、セラミック
多層基板などの積層型セラミック電子部品の製造におい
て同様の効果が得られる。
(6) In the first embodiment, only the multilayer ceramic capacitor has been described. However, the multilayer varistor, multilayer thermistor, multilayer filter, ferrite component, ceramic multilayer substrate, etc., manufactured using the ceramic sheet 1a. A similar effect can be obtained in the manufacture of a die ceramic electronic component.

【0023】[0023]

【発明の効果】以上本発明によると、導電体層中の希釈
剤がセラミックシート内部へ浸入したとしても、セラミ
ックシートを膨潤または溶解させたりしないので、導電
体層の短絡や耐電圧性の低下を防止し、信頼性や品質の
向上を達成することができる。また歩留まりを大幅に改
善することができる。
As described above, according to the present invention, even if the diluent in the conductor layer enters the inside of the ceramic sheet, the ceramic sheet does not swell or dissolve, so that the conductor layer is short-circuited and the withstand voltage is reduced. Can be prevented, and improvement in reliability and quality can be achieved. Also, the yield can be greatly improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態における積層セラミック
コンデンサの一製造工程である圧着工程を示す断面図
FIG. 1 is a cross-sectional view showing a crimping step as one manufacturing step of a multilayer ceramic capacitor according to an embodiment of the present invention.

【図2】一般的な積層セラミックコンデンサの一部切欠
斜視図
FIG. 2 is a partially cutaway perspective view of a general multilayer ceramic capacitor.

【図3】短絡の発生した焼結体の断面図FIG. 3 is a cross-sectional view of a sintered body in which a short circuit has occurred.

【図4】本発明と従来の積層コンデンサの有効層厚みと
耐電圧特性との関係を示すグラフ
FIG. 4 is a graph showing the relationship between the effective layer thickness and the withstand voltage characteristics of the present invention and the conventional multilayer capacitor.

【符号の説明】[Explanation of symbols]

1 セラミック誘電体層 1a セラミックシート 2 内部電極 2a 金属ペースト 3 外部電極 1 ceramic dielectric layer 1a Ceramic sheet 2 Internal electrode 2a Metal paste 3 External electrodes

───────────────────────────────────────────────────── フロントページの続き (72)発明者 倉光 秀紀 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (72)発明者 小松 和博 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 平4−196009(JP,A) 特開 平5−190043(JP,A) 特開 平3−273696(JP,A)   ────────────────────────────────────────────────── ─── Continuation of front page    (72) Inventor Kurumitsu Hideki               1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric               Kiki Sangyo Co., Ltd. (72) Inventor Kazuhiro Komatsu               1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric               Kiki Sangyo Co., Ltd.                (56) References JP-A-4-196009 (JP, A)                 JP-A-5-190043 (JP, A)                 JP-A-3-273696 (JP, A)

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 ポリエチレンとセラミック原料を含有す
複数のセラミックシートと金属と樹脂と水を含有する
複数の導電体層とを交互に積層し、まず加圧し、この加
圧を保持したまま加熱して前記ポリエチレンを融解して
前記セラミックシート同士の接着を強固にして積層体を
形成する第1の工程と、次に前記積層体を焼成する第2
の工程とを有する積層セラミック電子部品の製造方法。
Claims: 1. A material containing polyethylene and a ceramic raw material.
A plurality of ceramic sheets and a plurality of conductor layers containing a metal, a resin, and water are alternately laminated, and firstly, pressure is applied.
The polyethylene is melted by heating while maintaining the pressure.
A first step of forming a laminate by strengthening the adhesion between the ceramic sheets, and a second step of firing the laminate next.
And a method for manufacturing a multilayer ceramic electronic component.
【請求項2】 樹脂は、水溶性樹脂である請求項1に記
載の積層セラミック電子部品の製造方法。
2. The method according to claim 1, wherein the resin is a water-soluble resin .
【請求項3】 樹脂は、水分散型合成樹脂エマルジョン
である請求項2に記載の積層セラミック電子部品の製造
方法。
3. The resin is an aqueous dispersion type synthetic resin emulsion.
The method for producing a multilayer ceramic electronic component according to claim 2, wherein
【請求項4】 セラミックシート中のポリエチレンは、
重量平均分子量が400000以上である請求項1に記
載の積層セラミック電子部品の製造方法。
4. The polyethylene in the ceramic sheet,
The method for producing a multilayer ceramic electronic component according to claim 1, wherein the weight average molecular weight is 400,000 or more .
JP03448598A 1998-02-17 1998-02-17 Manufacturing method of multilayer ceramic electronic component Expired - Fee Related JP3538309B2 (en)

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Application Number Priority Date Filing Date Title
JP03448598A JP3538309B2 (en) 1998-02-17 1998-02-17 Manufacturing method of multilayer ceramic electronic component

Publications (2)

Publication Number Publication Date
JPH11233388A JPH11233388A (en) 1999-08-27
JP3538309B2 true JP3538309B2 (en) 2004-06-14

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001022449A1 (en) * 1999-09-22 2001-03-29 Matsushita Electric Industrial Co. Ltd. Electronic device of ceramic
KR20230043530A (en) 2021-09-24 2023-03-31 삼성전기주식회사 Method for manufacturing conductive paste and method for manufacturing multilayer ceramic capacitor
CN116156686A (en) * 2021-11-23 2023-05-23 中国科学院上海硅酸盐研究所 A kind of PTC ceramic gas heating element and preparation method thereof

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