JP3538501B2 - Gas analyzer - Google Patents
Gas analyzerInfo
- Publication number
- JP3538501B2 JP3538501B2 JP15310796A JP15310796A JP3538501B2 JP 3538501 B2 JP3538501 B2 JP 3538501B2 JP 15310796 A JP15310796 A JP 15310796A JP 15310796 A JP15310796 A JP 15310796A JP 3538501 B2 JP3538501 B2 JP 3538501B2
- Authority
- JP
- Japan
- Prior art keywords
- sample gas
- flow path
- concentration
- gas
- bypass flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、サンプルガス入
口で生じるガス濃度の突変による過度応答を緩和できる
ガス分析計に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas analyzer capable of mitigating an excessive response due to a sudden change in gas concentration generated at a sample gas inlet.
【０００２】[0002]
【従来の技術】ガス分析計において、例えば、校正ガス
の切り換わり時に、サンプルガス入口で生じるガス濃度
の急激な変化により、図３における応答曲線Ｘから分か
るように、分析計が過度応答を示すことがあり、この過
度応答を防止するために従来は、分析部にサンプルガス
を供給するサンプルガス流路に、バッファタンクを設け
ることで濃度変化を緩和していた。2. Description of the Related Art In a gas analyzer, for example, when a calibration gas is switched, an abrupt change in gas concentration at the sample gas inlet causes the analyzer to exhibit an excessive response as can be seen from a response curve X in FIG. Conventionally, in order to prevent such an excessive response, conventionally, a buffer tank is provided in a sample gas flow path for supplying a sample gas to an analysis unit, so that a change in concentration is reduced.
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来構成で
は、前記バッファタンク内においてサンプルガスの流れ
に対して対流等により溜まりが発生し、図３における応
答曲線Ｙのように分析計の応答速度が遅くなる。また、
大容量のバッファタンクを用いるから、分析計内で配管
部品の占めるスペースが大きくなってその他の構成部品
の配置が困難になるとともに、メンテナンス性も低下す
るおそれがある。However, in the conventional structure, the flow of the sample gas is accumulated in the buffer tank by convection or the like, and the response speed of the analyzer is reduced as shown by the response curve Y in FIG. Become slow. Also,
Since a large-capacity buffer tank is used, the space occupied by the piping components in the analyzer becomes large, which makes it difficult to arrange other components and also reduces the maintainability.
【０００４】この発明は、上述の事柄に留意してなされ
たもので、その目的は、応答速度を遅らせること無く、
サンプルガス流路で生じるガス濃度の突変による過度応
答を防止できるとともに、配管部品の占めるスペースを
小さくできるガス分析計を提供することにある。[0004] The present invention has been made in consideration of the above-mentioned matters, and its object is to reduce the response speed without delay.
An object of the present invention is to provide a gas analyzer capable of preventing an excessive response due to a sudden change in gas concentration generated in a sample gas flow path and reducing a space occupied by piping components.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するた
め、この発明は、分析部にサンプルガスを供給するサン
プルガス流路に入口および出口を接続した状態でバイパ
ス流路を設け、前記入口でバイパス流路とサンプルガス
流路に分かれたサンプルガスを前記出口で合流させ、さ
らに、このバイパス流路中に大口径の配管を設けてい
る。In order to achieve the above object, according to the present invention, a bypass flow path is provided in a state where an inlet and an outlet are connected to a sample gas flow path for supplying a sample gas to an analysis section, and a bypass flow path is provided at the inlet. Bypass flow path and sample gas
The sample gas divided into the flow paths is joined at the outlet, and a large-diameter pipe is provided in the bypass flow path.
【０００６】この発明では、大口径の配管を有するバイ
パス流路を、小口径の配管で構成されている通常のサン
プルガス流路に接続したので、サンプルガスは、バイパ
ス流路とサンプルガス流路に分かれる。In the present invention, the bypass flow path having the large-diameter pipe is connected to the normal sample gas flow path composed of the small-diameter pipe, so that the sample gas is supplied to the bypass flow path and the sample gas flow path. Divided into
【０００７】例えば、低濃度のサンプルガス（または、
高濃度のサンプルガス）を分析部に供給している場合
に、サンプルガス入口で低濃度のサンプルガス（また
は、高濃度のサンプルガス）が高濃度のサンプルガス
（または、低濃度のサンプルガス）に濃度変化すると、
バイパス流路の入口では、サンプルガス流路に高濃度の
サンプルガス（または、低濃度のサンプルガス）が流入
するとともに、前記大口径の配管に高濃度のサンプルガ
ス（または、低濃度のサンプルガス）が流入する。そし
て、前記大口径の配管から流出した低濃度のサンプルガ
ス（または、高濃度のサンプルガス）と、サンプルガス
流路を通過した高濃度のサンプルガス（または、低濃度
のサンプルガス）とが、分析部の直上流側に位置するバ
イパス流路の出口で合流することにより、サンプルガス
流路を通過した高濃度のサンプルガス（または、低濃度
のサンプルガス）が前記大口径の配管から流出した低濃
度のサンプルガス（または、高濃度のサンプルガス）に
より希釈（または、濃縮）される一方、前記大口径の配
管に流入した高濃度のサンプルガス（または、低濃度の
サンプルガス）は、前記大口径の配管中の低濃度のサン
プルガス（または、高濃度のサンプルガス）によって希
釈（または、濃縮）される。For example, a low-concentration sample gas (or
When a high-concentration sample gas is supplied to the analysis unit, a low-concentration sample gas (or high-concentration sample gas) is converted to a high-concentration sample gas (or low-concentration sample gas) at the sample gas inlet. When the concentration changes to
At the inlet of the bypass flow path, a high-concentration sample gas (or a low-concentration sample gas) flows into the sample gas flow path, and a high-concentration sample gas (or a low-concentration sample gas) flows into the large-diameter pipe. ) Flows in. The low-concentration sample gas (or high-concentration sample gas) flowing out of the large-diameter pipe and the high-concentration sample gas (or low-concentration sample gas) that has passed through the sample gas flow path are: By merging at the outlet of the bypass flow path located immediately upstream of the analyzer, the high-concentration sample gas (or low-concentration sample gas) that has passed through the sample gas flow path has flowed out of the large-diameter pipe. While being diluted (or concentrated) by the low-concentration sample gas (or the high-concentration sample gas), the high-concentration sample gas (or the low-concentration sample gas) flowing into the large-diameter pipe is It is diluted (or concentrated) by a low-concentration sample gas (or a high-concentration sample gas) in a large-diameter pipe.
【０００８】最終的に、バイパス流路の上流側よりも濃
度変化が緩和された形でサンプルガスが分析部に供給さ
れる。しかも、従来のバッファタンクのようにサンプル
ガスの溜まりが発生することは無いので、応答速度を遅
らせること無く、サンプルガス入口で生じるガス濃度の
突変による過度応答を防止できるとともに、配管部品の
占めるスペースを小さくできる。[0008] Finally, the sample gas is supplied to the analysis section in a form in which the change in concentration is less than that on the upstream side of the bypass flow path. In addition, since the sample gas does not accumulate unlike the conventional buffer tank, it is possible to prevent an excessive response due to a sudden change in the gas concentration generated at the sample gas inlet without delaying the response speed, and to occupy the piping parts. Space can be reduced.
【０００９】[0009]
【発明の実施の形態】以下、この発明の実施形態を、図
面に基づいて説明する。図１はガス分析計の全体を示
し、図２は、この実施形態で用いたバイパス流路の構成
を示す。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows the entire gas analyzer, and FIG. 2 shows the configuration of a bypass flow path used in this embodiment.
【００１０】図１、図２において、１は通常のサンプル
ガス流路で、分析部２にサンプルガスＳを供給する小口
径の配管１ａで構成される。この配管１ａは、例えば、
３／２ミリメートルの内径を有する。この配管１ａの一
端にはサンプルガス入口３が形成され、他端は分析部２
に接続される。In FIGS. 1 and 2, reference numeral 1 denotes a normal sample gas flow path, which is constituted by a small-diameter pipe 1a for supplying a sample gas S to the analysis unit 2. This pipe 1a is, for example,
It has an inside diameter of 3/2 millimeter. A sample gas inlet 3 is formed at one end of the pipe 1a, and the analysis unit 2 is provided at the other end.
Connected to.
【００１１】４は、サンプルガス流路１に接続されてい
るバイパス流路で、大口径の配管５が設けられている。
ａおよびｂは、それぞれ、バイパス流路４の接続位置を
構成するバイパス流路４の入口および出口を示す。Reference numeral 4 denotes a bypass passage connected to the sample gas passage 1, and a large-diameter pipe 5 is provided.
“a” and “b” denote an inlet and an outlet of the bypass flow path 4 forming the connection position of the bypass flow path 4, respectively.
【００１２】更に、バイパス流路４は、前記大口径の配
管５と、サンプルガス流路１を構成する配管１ａの内径
と同径の内径を有する配管４ａ，４ｂとで構成されてい
る。そして、この配管４ａ，４ｂ間に前記大口径の配管
５がゴム継手７，８を介して接続されている。前記大口
径の配管５の内径は、例えば、１５ミリメートルで、配
管４ａ、４ｂ，１ａの内径の１０倍に設定されている。
勿論、サンプルガスの流れに対して対流等により溜まり
が発生しないよう従来用いた大容量のバッファタンクの
内径よりも小に設定されている。The bypass flow path 4 is composed of the large-diameter pipe 5 and the pipes 4a and 4b having the same inner diameter as the inner diameter of the pipe 1a constituting the sample gas flow path 1. The large-diameter pipe 5 is connected between the pipes 4a and 4b via rubber joints 7 and 8. The inner diameter of the large-diameter pipe 5 is, for example, 15 mm, and is set to be 10 times the inner diameter of the pipes 4a, 4b, 1a.
Of course, the inner diameter is set smaller than the inner diameter of a conventionally used large-capacity buffer tank so that accumulation does not occur due to convection or the like with respect to the flow of the sample gas.
【００１３】９，１０は三方継手で、この三方継手９，
１０を介してサンプルガス流路１にバイパス流路４が設
けられる。Reference numerals 9 and 10 denote three-way joints.
A bypass flow path 4 is provided in the sample gas flow path 1 via 10.
【００１４】なお、この実施形態では、配管４ａ、４
ｂ，１ａに四フッ化エチレン（商品名テフロン）管が使
用され、前記大口径の配管５にポリプロピレン管が使用
されている。In this embodiment, the pipes 4a, 4a
B and 1a are made of ethylene tetrafluoride (trade name: Teflon), and the large-diameter pipe 5 is made of polypropylene.
【００１５】而して、バイパス流路４の上流側に位置す
るサンプルガス入口３から低濃度のサンプルガスＳが分
析部２に供給されているとする。そして、サンプルガス
入口３で低濃度のサンプルガスＳが高濃度のサンプルガ
スＳ1 に急激に濃度変化すると、高濃度のサンプルガス
Ｓ1 はバイパス流路４の入口ａでバイパス流路４とサン
プルガス流路１に分かれる。Thus, it is assumed that a low-concentration sample gas S is supplied to the analyzer 2 from the sample gas inlet 3 located on the upstream side of the bypass flow path 4. When the sample gas at the inlet 3 low concentration of the sample gas S is abruptly concentration change in the sample gas S 1 of a high concentration, the sample gas S 1 high concentrations of the bypass passage 4 at the inlet a of the bypass passage 4 samples It is divided into gas flow paths 1.
【００１６】そして、配管１ａを通過したサンプルガス
Ｓ1 は前記大口径の配管５より流出した濃度変化前の低
濃度のサンプルガスＳにより希釈される一方、配管４ａ
を通過した濃度変化後のサンプルガスＳ1 も前記大口径
の配管５内で同様に低濃度のサンプルガスＳによって希
釈される。The sample gas S 1 that has passed through the pipe 1a is diluted by the low-concentration sample gas S that has flowed out of the large-diameter pipe 5 before the concentration change, while the pipe 4a
The sample gas S 1 after the concentration change after passing through is also diluted with the low-concentration sample gas S in the large-diameter pipe 5.
【００１７】このため、最終的に、バイパス流路４の上
流側よりも濃度変化が緩和された形でサンプルガスＳ2
が分析部２に供給される。Therefore, finally, the sample gas S 2 is formed in a form in which the change in concentration is more moderate than that on the upstream side of the bypass flow path 4.
Is supplied to the analysis unit 2.
【００１８】しかも、前記大口径の配管５は、従来用い
た大容量のバッファタンクの内径よりも小に設定された
内径を有しているので、前記大口径の配管５内ではサン
プルガスの溜まりが発生することは無い。したがって、
サンプルガスＳ2 の分析部２への到達の遅れが無くな
り、図３における応答曲線Ｚのように分析計の応答速度
を遅らせることが無い。なお、図３において、Ｔ2 ＝２
Ｔ1 であった。Further, since the large-diameter pipe 5 has an inner diameter set smaller than the inner diameter of the conventionally used large-capacity buffer tank, the sample gas accumulates in the large-diameter pipe 5. but it is not free to occur. Therefore,
There is no arrival delay to the analysis unit 2 of the sample gas S 2, you are not to slow the response speed of the analyzer as a response curve Z in Fig. In FIG. 3, T 2 = 2
It was T 1.
【００１９】なお、上記実施形態では、配管１ａ、４
ａ，４ｂの内径の略１０倍の内径を有する配管５を用
い、配管５をポリプロピレンで、配管１ａ、４ａ，４ｂ
を四フッ化エチレンで形成したものを示したが、サンプ
ルガスＳの組成、流量等の条件により配管材料、配管内
径等を適宜変更してもよい。In the above embodiment, the pipes 1a, 4a
A pipe 5 having an inner diameter approximately 10 times the inner diameter of each of the pipes 1a, 4a, and 4b is used.
Is formed of ethylene tetrafluoride, but the material of the pipe, the inner diameter of the pipe, and the like may be appropriately changed depending on conditions such as the composition and the flow rate of the sample gas S.
【００２０】[0020]
【発明の効果】以上説明したように、この発明において
は、分析部にサンプルガスを供給するサンプルガス流路
に入口および出口を接続した状態でバイパス流路を設
け、前記入口でバイパス流路とサンプルガス流路に分か
れたサンプルガスを前記出口で合流させ、さらに、この
バイパス流路中に大口径の配管を設けたので、出口にお
けるサンプルガスの濃度変化は、サンプルガス入口にお
ける濃度変化よりも緩和されたものとなり、バイパス流
路の上流側よりも濃度変化が緩和された形でサンプルガ
スを分析部に供給できる。しかも、大口径の配管によ
り、前記大口径の配管内ではサンプルガスの溜まりが発
生することは無いので、応答速度を遅らせること無く、
サンプルガス入口で生じるガス濃度の突変による過度応
答を防止できるとともに、配管部品の占めるスペースを
小さくできる。As described above, according to the present invention, a bypass flow path is provided in a state where an inlet and an outlet are connected to a sample gas flow path for supplying a sample gas to an analysis unit, and the bypass flow path is provided at the inlet. Sample gas flow path
The sampled gas was merged at the outlet, and a large-diameter pipe was provided in the bypass flow path, so that the change in the concentration of the sample gas at the outlet was less than that at the inlet of the sample gas. In addition, the sample gas can be supplied to the analysis section in a form in which the change in concentration is reduced more than the upstream side of the bypass flow path. Moreover, since the large-diameter pipe does not cause accumulation of the sample gas in the large-diameter pipe, without delaying the response speed,
Transient response due to a sudden change in gas concentration generated at the sample gas inlet can be prevented, and the space occupied by piping components can be reduced.
【図１】この発明の一実施形態を示す全体構成説明図で
ある。FIG. 1 is an explanatory diagram of an overall configuration showing an embodiment of the present invention.
【図２】上記実施形態におけるバイパス流路を示す斜視
図である。FIG. 2 is a perspective view showing a bypass flow path in the embodiment.
【図３】応答曲線を示す特性図である。FIG. 3 is a characteristic diagram showing a response curve.
１…サンプルガス流路、２…分析部、３…サンプルガス
入口、４…バイパス流路、５…大口径の配管、ａ…バイ
パス流路の入口、ｂ…バイパス流路の出口、Ｓ…サンプ
ルガス。DESCRIPTION OF SYMBOLS 1 ... sample gas flow path, 2 ... analysis part, 3 ... sample gas inlet, 4 ... bypass flow path, 5 ... large diameter pipe, a ... bypass flow path inlet, b ... bypass flow path outlet, S ... sample gas.
フロントページの続き (72)発明者 松浦 良視 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 (56)参考文献 特開 昭63−118632（ＪＰ，Ａ) 特開 平８−43275（ＪＰ，Ａ) 特開 平６−265475（ＪＰ，Ａ) 特開 平４−272121（ＪＰ，Ａ) 実開 平７−26746（ＪＰ，Ｕ) 実開 平７−16149（ＪＰ，Ｕ) 実開 昭60−98039（ＪＰ，Ｕ) 実開 昭64−55446（ＪＰ，Ｕ) 特公 平５−12659（ＪＰ，Ｂ２) 実公 平１−31951（ＪＰ，Ｙ２) 実公 平５−31547（ＪＰ，Ｙ２) 特許3299102（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 1/00 - 1/44 ＪＩＣＳＴファイル（ＪＯＩＳ)Continuation of the front page (72) Inventor Yoshimi Matsuura 2 Higashi-cho, Kichijoin-gu, Minami-ku, Kyoto, Kyoto Inside Horiba, Ltd. (56) References JP-A-63-118632 (JP, A) JP-A-8- 43275 (JP, A) JP-A-6-265475 (JP, A) JP-A-4-272121 (JP, A) JP-A 7-26746 (JP, U) JP-A 7-16149 (JP, U) Japanese Utility Model Application No. Sho 60-98039 (JP, U) Japanese Utility Model Application No. 64-55446 (JP, U) Japanese Patent Publication No. 5-12659 (JP, B2) Japanese Utility Model Publication No. 1-39511, JP (Y2) Japanese Utility Model Publication No. 5-31547 (JP, Y2) Patent 3299102 (JP, B2) (58) Fields investigated (Int. Cl. 7 , DB name) G01N 1/00-1/44 JICST file (JOIS)
Claims (2)
ルガス流路に入口および出口を接続した状態でバイパス
流路を設け、前記入口でバイパス流路とサンプルガス流
路に分かれたサンプルガスを前記出口で合流させ、さら
に、このバイパス流路中に大口径の配管を設けたことを
特徴とするガス分析計。1. A to the analysis portion of the bypass flow passage provided with a sample gas while connected sample gas flow path inlet and outlet for supplying the bypass passage and the sample gas flow by the inlet
A gas analyzer , wherein sample gas divided into paths is joined at the outlet, and a large-diameter pipe is provided in the bypass flow path.
まりが発生しない程度の内径に設定されている請求項１
に記載のガス分析計。2. The large-diameter pipe is set to an inside diameter that does not cause accumulation of sample gas.
The gas analyzer according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15310796A JP3538501B2 (en) | 1996-05-25 | 1996-05-25 | Gas analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15310796A JP3538501B2 (en) | 1996-05-25 | 1996-05-25 | Gas analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09318498A JPH09318498A (en) | 1997-12-12 |
| JP3538501B2 true JP3538501B2 (en) | 2004-06-14 |
Family
ID=15555132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15310796A Expired - Fee Related JP3538501B2 (en) | 1996-05-25 | 1996-05-25 | Gas analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3538501B2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3299102B2 (en) | 1995-01-31 | 2002-07-08 | 株式会社堀場製作所 | Infrared gas analyzer for semiconductor special gas |
-
1996
- 1996-05-25 JP JP15310796A patent/JP3538501B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3299102B2 (en) | 1995-01-31 | 2002-07-08 | 株式会社堀場製作所 | Infrared gas analyzer for semiconductor special gas |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09318498A (en) | 1997-12-12 |
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