JP3568940B2

JP3568940B2 - Displacement measuring device

Info

Publication number: JP3568940B2
Application number: JP2002157643A
Authority: JP
Inventors: 敦郎田沼
Original assignee: Anritsu Corp
Current assignee: Anritsu Corp
Priority date: 2002-05-30
Filing date: 2002-05-30
Publication date: 2004-09-22
Anticipated expiration: 2022-05-30
Also published as: JP2003344011A

Description

【０００１】
【発明の属する技術分野】
本発明は、測定対象面上に照射された光で形成される照射点を一定の間隔で走査させることにより、前記測定対象面の変位量を非接触で測定する変位測定装置に係り、特に、受光素子の位置決めを適宜行うことができる変位測定装置に関するものである。
【０００２】
【従来の技術】
図５に示すように、変位測定装置は、投光手段２と受光手段６で構成されており、三角測量の原理に基づき測定対象物１０の測定対象面１０ａの変位を測定する。測定対象面１０ａが鏡面のように反射率が高い場合は、照射点Ｓで反射される光の殆どが、照射点Ｓを対称にして入射角度と同じ角度で受光手段６に反射される。
【０００３】
変位測定装置の投光手段２は、レーザダイオード等の光源３と、振動ミラー型又はポリゴンミラー型等の偏向装置４と、ｆθレンズなどの収束レンズ５で概略構成されている。光源３は、偏向装置４に対しレーザ光を出射する。偏向装置４は、入射されたレーザ光を偏向させ、一定のストロークでレーザ光を走査する。この偏向装置４は、レーザ光を往復あるいは片道走査する。収束レンズ５は、偏向装置４により扇形に走査されるレーザ光が平行になるように収束させるものである。
【０００４】
受光手段６は、集光レンズアレイＣと結像レンズアレイＦと受光素子群Ｐで構成されている。集光レンズアレイＣは、互いに等しい焦点距離ｆ１（例えば２０ｍｍ）を有する複数の集光レンズ部Ｃ１〜Ｃｎが一列に並ぶように合成樹脂あるいはガラスで形成されている。
【０００５】
各集光レンズ部Ｃ１〜Ｃｎは、投光手段２から測定対象物１０側に放射される投光ビームの走査幅寸法（例えば３０ｍｍ）内に複数個並ぶように、少なくともその並列方向（走査方向）に沿ったレンズの幅ｄが投光ビームの走査幅寸法（例えば３０ｍｍ）より短い（例えば２．５ｍｍ）略矩形状の外形を有する。また、各集光レンズ部Ｃ１〜Ｃｎは、その光軸に直交する面が球面状に形成されたレンズとなっている。すなわち、各集光レンズ部Ｃ１〜Ｃｎは、光をその光軸の周りに均等に絞り込むことができるレンズである。各光軸はそれぞれ平行で且つその光軸に直交する線上に連続して一列に並ぶように側面同士を密着させた状態で一体化されている。
【０００６】
集光レンズアレイＣは、各集光レンズ部Ｃ１〜Ｃｎの光軸が測定対象物１０の表面１０ａ上に走査される照射点Ｓ（移動軌跡ＳＬ）と交わるように配置されている。集光レンズアレイＣは照射点Ｓ（移動軌跡ＳＬ）から焦点距離ｆ１離れた位置に配置されている。
【０００７】
結像レンズアレイＦは、複数（本実施の形態では２個）の結像レンズ部Ｆ１，Ｆ２を集光レンズアレイＣと同様、走査方向にアレイ状に連続させたレンズアレイである。各結像レンズ部Ｆ１，Ｆ２は入射光をその光軸の周りに均等に絞り込むことができるレンズである。各結像レンズ部Ｆ１，Ｆ２は、その各光軸がそれぞれ平行で且つその光軸に直交する線上に連続して一列に並ぶように側面同士を密着させた状態で一体化されている。各結像レンズ部Ｆ１，Ｆ２は、所定数の集光レンズ部（図５では６個）Ｃ１〜Ｃ６に対応して対向配置される。結像レンズアレイＦは、集光レンズアレイＣからのビームを収束して、受光素子群Ｐへ出射する。
【０００８】
受光素子群Ｐは、結像レンズ部Ｆ１，Ｆ２に対応した同数（本実施の形態では２個）の受光素子Ｐ１，Ｐ２で構成されている。各受光素子Ｐ１，Ｐ２はそれぞれ各結像レンズ部Ｆ１，Ｆ２に対応しており、それぞれ焦点距離ｆ２離れた位置に配置されている。
【０００９】
各受光素子Ｐ１，Ｐ２は、図５に示すように、照射点Ｓから反射される光が結像される受光面Ｐ１ａ，Ｐ２ａを有する。なお、受光面Ｐ１ａ，Ｐ２ａでの結像点Ｋの走査方向（すなわち照射点Ｓの走査方向）の幅を走査幅Ｗと称する。また結像点Ｋの走査方向（走査幅Ｗ）と直交する方向を縦方向と称する。各受光素子Ｐ１，Ｐ２の縦方向の両端縁には、それぞれ電極が設けられている。これらの電極からは、それぞれ結像点Ｋの位置に応じた電流が出力される。
【００１０】
以下、上記変位測定装置の作用について図５乃至図１０を用いて説明する。
図５に示すように光源３から照射された照射光は、偏向装置４により屈曲され、所定のストロークで走査される。走査された照射光は収束レンズ５に入射され、平行に移動するビームとなり、測定対象面１０ａ上に照射点を形成する。照射光は照射点Ｓごとに反射又は散乱し、その反射，散乱光（測定光）は受光手段６側へ出射される。
【００１１】
図６（ａ）に示すように、照射点Ｓが走査されて、集光レンズアレイＣの一端にある集光レンズ部Ｃ１に対向する位置に移動する。この照射点Ｓからの測定光は、集光レンズ部Ｃ１によってほぼ平行なビームとなって収束する。収束された測定光は、結像レンズ部Ｆ１の光軸に対し角度のある状態で結像レンズ部Ｆ１に入射される。
【００１２】
結像レンズ部Ｆ１は、集光レンズ部Ｃ１に入射された測定光の向きを変え、受光面Ｐ１ａの走査幅方向の一端側の位置に測定光を結像させる。ここで、図７（ａ）に示すように、側方からみても、照射点Ｓからの測定光は、集光レンズ部Ｃ１によってほぼ平行に収束され、結像レンズ部Ｆ１によって受光素子Ｐ１の受光面Ｐ１ａ上に結像されている。
【００１３】
このため、受光素子Ｐ１の受光面Ｐ１ａには、照射点Ｓの高さに正確に対応した位置に点状の像Ｋａ（結像点）が形成され、その位置に対応した電気信号（電流）が電極から出力される。なお、照射点Ｓから他の集光レンズ部Ｃ２等に入射する測定光も収束されて結像レンズ部Ｆ１に入射される。しかし、これらの光は受光素子Ｐ１の受光面Ｐ１ａ上には結像されない。
【００１４】
また、照射点Ｓの走査によって、図６（ｂ）に示すように、照射点Ｓが集光レンズアレイＣの集光レンズ部Ｃ１の光軸と交わる位置に移動する。この照射点Ｓからの測定光は、主に集光レンズ部Ｃ１によってほぼ平行なビームに収束される。収束された測定光は、結像レンズ部Ｆ１の光軸と平行な状態で入射される。このため、照射点Ｓの像Ｋａは、受光面Ｐ１ａの走査幅方向のほぼ中心位置に形成される。
【００１５】
更に、照射点Ｓの走査によって図６（ｃ）に示すように、照射点Ｓは、集光レンズアレイＣの集光レンズ部Ｃ１に対向する範囲内で、その光軸に対し隣の集光レンズ部Ｃ２寄りに移動する。すると、この照射点Ｓからの測定光は、主に集光レンズ部Ｃ１によって収束され、結像レンズ部Ｆ１の光軸に対し図６（ａ）の場合と逆の角度をもって結像レンズ部Ｆ１に入射される。このため、結像レンズ部Ｆ１は、受光面Ｐ１ａの走査幅方向の他端側の位置で点状の像Ｋａを形成する。
【００１６】
このように、照射点Ｓが集光レンズ部Ｃ１に対向する範囲内で移動すると、受光面Ｐ１ａ上の像Ｋａの位置は、受光面Ｐ１ａの走査方向幅の一端側から他端側に移動することになる。
【００１７】
また、照射点Ｓの走査にともなって、例えば図７（ｂ）に示すように照射点ＳがＳ’のように高さ方向にδだけ移動すると、受光素子Ｐ１の受光面Ｐ１ａ上の像がＫ’のようにずれて，その位置に対応する電気信号が出力される。そして、この電気信号から照射点Ｓ’の基準面からの高さが検出され、照射点Ｓの高さとの差δも判る。
【００１８】
そして、図６（ｄ）に示すように、照射点Ｓが集光レンズ部Ｃ１とＣ２の境界部に対向する位置にくると、その照射点Ｓからの測定光は、二つの集光レンズ部Ｃ１，Ｃ２によってそれぞれほぼ平行なビームに収束されて結像レンズ部Ｆ１に入射する。このため、受光面Ｐ１ａの走査幅方向の両端に像Ｋａ，Ｋｂが形成される。ここで、この２つの結像点Ｋａ，Ｋｂの受光面Ｐ１ａ上、縦方向に沿った位置はともに等しいので、受光素子Ｐ１からは像が１つの場合と同様にその縦方向の位置に対応した信号が出力される。
【００１９】
照射点Ｓが更に走査されると、図６（ｅ）に示すように、照射点Ｓが集光レンズ部Ｃ２に対向する範囲内まで移動する。すると、照射点Ｓからの測定光は、主に集光レンズ部Ｃ２によって収束され、その光軸に対し角度のある状態で結像レンズ部Ｆ１に入射される。そして、結像レンズＦ１は、受光面Ｐ１ａの走査幅方向の一端側の位置で点状の像Ｋｂをつくる。
【００２０】
以下同様に、照射点Ｓが集光レンズアレイＣの走査方向に走査される間に、結像点Ｋは、各集光レンズ部Ｃ１〜Ｃ６ごとに受光面Ｐ１ａの走査方向幅の一端から他端まで移動する。これと同時に、測定対象物１０の表面１０ａの変位に応じて結像点Ｋが縦方向に移動する。
【００２１】
次に、結像点Ｋが受光素子Ｐ１の隣の受光素子Ｐ２に移動するときの作用について、図８乃至図１０を用いて説明する。なお、図中網で囲われている部分は、連続する集光レンズ部Ｃ６と集光レンズ部Ｃ７の境界近傍の領域を示す。
【００２２】
図８に示すように、照射点Ｓからの測定光は、主に集光レンズ部Ｃ６に入射される。集光レンズ部Ｃ６に入射された測定光は、平行光となって結像レンズ部Ｆ１に入射され、図６（ｃ）と同様に受光面Ｐ１ａに結像される。また集光レンズ部Ｃ７に入射された測定光は、平行光となって結像レンズ部Ｆ２に入射され、図６（ｃ）と同様に受光素子Ｐ２ａに結像されない。
【００２３】
そして、照射点Ｓが走査されて、図９に示すように測定光が集光レンズ部Ｃ６と集光レンズ部Ｃ７の境界近傍（網で囲われている部分）に入射された場合、測定光はその集光レンズ部Ｃ６，Ｃ７の境界近傍から平行光となって結像レンズ部Ｆ１，Ｆ２の境界近傍に入射される。このとき、結像レンズ部Ｆ１に入射された測定光は、図６（ｄ）の場合と同様、受光面Ｐ１ａの走査幅方向の終端縁に結像される。一方、結像レンズ部Ｆ２に入射された測定光は、図６（ｄ）の場合と同様、受光面Ｐ２ａの走査幅方向の始端縁に結像される。
【００２４】
そして、更に照射点Ｓが走査されると、図１０に示すように測定光は主に集光レンズ部Ｃ７に入射される。集光レンズ部Ｃ７に入射された測定光は、平行光となって結像レンズ部Ｆ２に入射され、図６（ｅ）と同様に受光面Ｐ２ａに結像される。また集光レンズ部Ｃ６に入射された測定光は、平行光となって結像レンズ部Ｆ１に入射され、図６（ｅ）と同様に受光面Ｐ２ａに結像されない。
【００２５】
このように、本実施の形態における変位測定装置は、結像レンズ径Ｄを拡大した単体の結像レンズを用いた場合と比較して、結像レンズアレイＦの開口及び焦点距離ｆ２を小さくできる。これにより、集光レンズアレイＣの開口を大きく、焦点距離ｆ１を小さくできる。したがって、複数の結像レンズ部Ｆ１，Ｆ２で集光レンズアレイＣからの測定光を結像させるように構成することで、受光面Ｐａの受光幅ｗが小さく応答速度の速い受光素子群Ｐを用いることができる。ゆえに、走査速度を上げて受光素子群Ｐの信号出力に対する処理速度を上げることができ、測定時間を短縮することが可能となる。
【００２６】
ところで、受光素子Ｐ１，Ｐ２は、結像レンズアレイＦにて収束されるビームが受光面Ｐ１ａ，Ｐ２ａ上にて結像されるが、その位置決めを行う必要がある。具体的には、図１１に示すように、結像レンズアレイＦからの距離（矢印イ），ビームの結像位置（矢印ロ），ビームに対する傾き（矢印ハ）のそれぞれ位置合わせを行う。
【００２７】
結像レンズアレイＦからの距離の位置決めは、各受光素子Ｐ１，Ｐ２の受光面Ｐ１ａ，Ｐ２ａを、結像レンズアレイＦにて収束されるビームの焦点に位置合わせするために行う。
【００２８】
ビームの結像位置は、各受光素子Ｐ１，Ｐ２の両端に設けられた各電極から出力される電流を基に演算された変位測定値が等しくなる所望位置にビームが結像されるよう位置合わせするために行う。
【００２９】
ビームに対する傾きは、図１１で示すビームの光軸に対して各受光素子Ｐ１，Ｐ２の受光面Ｐ１ａ，Ｐ２ａの傾きを位置決めする。この位置決めは、図５に示すように、照射点Ｓの走査幅を広くするために受光手段６を二個併設させた場合に、それぞれの受光素子Ｐ１，Ｐ２の変位検出感度（測定対象面１０ａのＺ方向の変位に伴う各受光素子Ｐ１，Ｐ２の両端に設けられた各電極から出力される電流の変化量）が合うように位置合わせするために行う。この場合、通常一方の受光素子Ｐ１（Ｐ２）の変位検出感度に他方の受光素子Ｐ２（Ｐ１）の変位検出感度を合わせる位置決めを行う。
【００３０】
従来、上記位置決めを行う位置決め機構として図１２（ａ）（ｂ）に示すものがある。図１２（ａ）は従来の位置決め機構を示す図、図１２（ｂ）は図１２（ａ）における側面図である。なお、図１２（ａ）では、位置決め機構を図１２と同方向から見ている。
【００３１】
図１２（ａ）（ｂ）に示すように、受光素子Ｐ１は、取付板７０に固定されている。取付板７０は、不動の板体７１（例えば、変位測定装置の外筐をなすケースなど）の一方の面に接触している。また、板体７１の他方の面には、調整板７２が接触している。
【００３２】
調整板７２には、受光素子Ｐ１の受光面Ｐ１ａに照射される光軸方向（図１１中矢印イ）に平行する二つの長孔７３ａ，７３ｂが設けられている。長孔７３ａ，７３ｂには、それぞれネジ７４ａ，７４ｂが挿通されている。ネジ７４ａ，７４ｂは、板体７１に螺着されている。
【００３３】
また、調整板７２には、受光素子Ｐ１の受光面Ｐ１ａ（図１１中矢印ロ）に平行する二つの長孔７３ｃ，７３ｄが設けられている。長孔７３ｃ，７３ｄには、それぞれネジ７４ｃ，７４ｄが挿通されている。ネジ７４ｃ，７４ｄは、板体７１に設けられた穴部７１ａを通過して取付板７０に螺着されている。
【００３４】
この位置決め機構によれば、まず、ネジ７４ａ，７４ｂ，７４ｃ，７４ｄを緩めた状態で、調整板７２および取付板７０を長孔７３ａ，７３ｂに沿って矢印イ方向に移動させる。これにより、取付板７０に固定された受光素子Ｐ１の受光面Ｐ１ａと、結像レンズアレイＦとの距離が可変する。そして、受光面Ｐ１ａが、結像レンズアレイＦにて収束されるビームの焦点に合う位置でネジ７４ａ，７４ｂを締めて位置決めする。
【００３５】
次いで、取付板７０を長孔７３ｃ，７３ｄに沿って矢印ロ方向に移動させる。これにより、取付板７０に固定された受光素子Ｐ１の受光面Ｐ１ａに当たるビームの焦点位置が可変する。そして、受光面Ｐ１ａの所望位置にビームの焦点が当たる位置でネジ７４ｃ，７４ｄを締めて位置決めする。
【００３６】
次いで、ネジ７４ａを緩めてネジ７４ｂを外すとともに、ネジ７４ｃ，７４ｄを緩めて、ネジ７４ａを中心に調整板７２および取付板７０を矢印ハ方向に回動させる。これにより、取付板７０に固定された受光素子Ｐ１の受光面Ｐ１ａによるビームの光軸に対する傾きが可変する。そして、回動させた受光素子Ｐ１の変位検出感度が、他の変位測定装置の受光素子Ｐ２の変位検出感度に合った位置でネジ７４ａを締めて位置決めする。
【００３７】
【発明が解決しようとする課題】
しかしながら、上述した従来の変位測定装置では、ビームに対する傾き（矢印ハ方向）を位置決めする際、回動中心となるネジ７４ａが長孔７３ａに挿通されているために、ネジ７４ａを中心とした回動を行うことが難しい。これにより、前段で位置決めした焦点位置（矢印イ方向）の調整が変わってしまうこととなる。さらに、ネジ７４ｃ，７４ｄを緩める必要があるため、前段で位置決めした結像位置の（矢印ロ方向）の調整も変わってしまうこととなる。
【００３８】
そこで、再び、焦点位置の調整を行うこととなるが、ネジ７４ｂを外しているので、長孔７３ａ，７３ｂに沿った受光素子Ｐ１の移動を行うことができず、正確な焦点位置の調整が困難となる。さらに、焦点位置の調整を行う際、ネジ７４ｂが外れているので、ネジ７４ａを中心に回動して傾きの調整が変わってしまうこととなる。
【００３９】
すなわち、従来の変位測定装置では、受光素子Ｐ１の傾きの調整を行うことにより、先の二つの調整が変わり、これを再び調整しようとすると傾きの調整が変わってしまうので、受光素子Ｐ１の正確な位置決めを行うことが困難であった。ゆえに、各調整を組み合わせて行う慣習に委ねているのが現状である。
【００４０】
そこで本発明は、上記課題を解消するために、受光素子の位置決め調整を容易、且つ、正確に行うことができる変位測定装置を提供することを目的としている。
【００４１】
【課題を解決するための手段】
上記目的を達成するため本発明による請求項１記載の変位測定装置は、
測定対象面１０ａに照射光を照射し、その反射光を結像レンズ部Ｆ１にて収束し受光素子Ｐ１の受光面Ｐ１ａ上に形成された結像点の検出位置に基づいて前記測定対象面１０ａの変位量を非接触で測定する変位測定装置において、
前記受光素子Ｐ１が固定される取付板２０と、
一方の面が前記取付板２０の前記受光素子Ｐ１が固定される面と反対の面と接して配され、遊挿穴２１ａが穿設された不動の板体２１と、
該板体２１の他方の面に接し、光軸に平行する一対の焦点調整長孔２３ａ，２３ｂ、および前記受光素子Ｐ１の受光面Ｐ１ａに平行して配置される一対の結像位置調整長孔２４ａ，２４ｂを有する調整板２２と、
前記焦点調整長孔２３ａ，２３ｂの一方を介して前記板体２１に螺着される焦点調整ネジ２５と、
前記焦点調整長孔２３ａ，２３ｂの他方に挿通される円柱形状をなし、偏心位置に螺着される傾き調整ネジ２７を介して前記板体２１に取り付けられる傾き調整部材２６と、
前記各結像位置調整長孔２４ａ，２４ｂを介し前記遊挿穴２１ａに挿通されて前記取付板２０に螺着される各結像位置調整ネジ２８と、
からなる位置決め機構を備え、前記各焦点調整長孔２３ａ，２３ｂに沿った前記受光素子Ｐ１の焦点位置の調整を行い、前記各結像位置調整長孔２４ａ，２４ｂに沿った前記受光素子Ｐ１の結像位置の調整を行い、前記焦点調整ネジ２５を中心とした傾き調整部材２６の偏心回動に伴う前記受光素子Ｐ１の傾き位置の調整を行うことを特徴とする。
【００４２】
請求項２記載の変位測定装置は、
測定対象面１０ａに照射光を照射し、その反射光を結像レンズ部Ｆ１にて収束し受光素子Ｐ１の受光面Ｐ１ａ上に形成された結像点の検出位置に基づいて前記測定対象面１０ａの変位量を非接触で測定する変位測定装置において、
前記受光素子Ｐ１が固定される取付板２０と、
一方の面が前記取付板２０の前記受光素子Ｐ１が固定される面と反対の面と接して配され、遊挿穴２１ａが穿設された不動の板体２１と、
該板体２１の他方の面に接し、光軸に平行する一対の焦点調整長孔２３ａ，２３ｂ、および前記受光素子Ｐ１の受光面Ｐ１ａに平行して配置される一対の結像位置調整長孔２４ａ，２４ｂを有する調整板２２と、
前記各焦点調整長孔２３ａ，２３ｂを介して前記板体２１に螺着される各焦点調整ネジ２５と、
前記結像位置調整長孔２４ａ，２４ｂの他方に挿通される円柱形状をなし、偏心位置に螺着される傾き調整ネジ２７を介し前記遊挿穴２１ａに挿通されて前記取付板２０に取り付けられる傾き調整部材２６と、
前記結像位置調整長孔２４ａ，２４ｂの一方を介し前記遊挿穴２１ａに挿通されて前記取付板２０に螺着される結像位置調整ネジ２８と、
からなる位置決め機構を備え、前記各焦点調整長孔２３ａ，２３ｂに沿った前記受光素子Ｐ１の焦点位置の調整を行い、前記各結像位置調整長孔２４ａ，２４ｂに沿った前記受光素子Ｐ１の結像位置の調整を行い、前記結像位置調整ネジ２８を中心とした傾き調整部材２６の偏心回動に伴う前記受光素子Ｐ１の傾き位置の調整を行うことを特徴とする。
【００４３】
請求項３記載の変位測定装置は、
測定対象面１０ａに照射光を照射し、その反射光を結像レンズ部Ｆ１にて収束し受光素子Ｐ１の受光面Ｐ１ａ上に形成された結像点の検出位置に基づいて前記測定対象面１０ａの変位量を非接触で測定する変位測定装置において、
前記受光素子Ｐ１が固定される取付板２０と、
一方の面が前記取付板２０の前記受光素子Ｐ１が固定される面と反対の面と接して配され、遊挿穴２１ａが穿設された不動の板体２１と、
該板体２１の他方の面に接し、光軸に平行する一対の焦点調整長孔２３ａ，２３ｂ、および前記受光素子Ｐ１の受光面Ｐ１ａに平行して配置される一対の結像位置調整長孔２４ａ，２４ｂを有する調整板２２と、
前記焦点調整長孔２３ａ，２３ｂの一方を介し前記遊挿穴２１ａに挿通されて前記取付板２０に螺着される焦点調整ネジ２５と、
前記焦点調整長孔２３ａ，２３ｂの他方に挿通される円柱形状をなし、偏心位置に螺着される傾き調整ネジ２７を介し前記遊挿穴２１ａに挿通されて前記取付板２０に取り付けられる傾き調整部材２６と、
前記各結像位置調整長孔２４ａ，２４ｂを介して前記板体２１に螺着される各結像位置調整ネジ２８と、
からなる位置決め機構を備え、前記各焦点調整長孔２３ａ，２３ｂに沿った前記受光素子Ｐ１の焦点位置の調整を行い、前記各結像位置調整長孔２４ａ，２４ｂに沿った前記受光素子Ｐ１の結像位置の調整を行い、前記焦点調整ネジ２５を中心とした傾き調整部材２６の偏心回動に伴う前記受光素子Ｐ１の傾き位置の調整を行うことを特徴とする。
【００４４】
請求項４記載の変位測定装置は、
測定対象面１０ａに照射光を照射し、その反射光を結像レンズ部Ｆ１にて収束し受光素子Ｐ１の受光面Ｐ１ａ上に形成された結像点の検出位置に基づいて前記測定対象面１０ａの変位量を非接触で測定する変位測定装置において、
前記受光素子Ｐ１が固定される取付板２０と、
一方の面が前記取付板２０の前記受光素子が固定された面と反対の面と接して配され、遊挿穴２１ａが穿設された不動の板体２１と、
該板体２１の他方の面に接し、光軸に平行する一対の焦点調整長孔２３ａ，２３ｂ、および前記受光素子Ｐ１の受光面Ｐ１ａに平行して配置される一対の結像位置調整長孔２４ａ，２４ｂを有する調整板２２と、
前記各焦点調整長孔２３ａ，２３ｂを介し前記遊挿穴２１ａに挿通されて前記取付板２０に螺着される各焦点調整ネジ２５と、
前記結像位置調整長孔２４ａ，２４ｂの他方に挿通される円柱形状をなし、偏心位置に螺着される傾き調整ネジ２７を介して前記板体２１に取り付けられる傾き調整部材２６と、
前記結像位置調整長孔２４ａ，２４ｂの一方を介して前記板体２１に螺着される結像位置調整ネジ２８と、
からなる位置決め機構を備え、前記各焦点調整長孔２３ａ，２３ｂに沿った前記受光素子Ｐ１の焦点位置の調整を行い、前記各結像位置調整長孔２４ａ，２４ｂに沿った前記受光素子Ｐ１の結像位置の調整を行い、前記結像位置調整ネジ２８を中心とした傾き調整部材２６の偏心回動に伴う前記受光素子Ｐ１の傾き位置の調整を行うことを特徴とする。
【００４５】
請求項５記載の変位測定装置は、請求項１〜請求項４の何れかに記載の変位測定装置において、
複数の結像レンズ部Ｆ１，Ｆ２が連設されてなる結像レンズアレイＦと、
前記各結像レンズ部Ｆ１，Ｆ２に対応するように複数の受光素子Ｐ１，Ｐ２が設けられた受光素子群Ｐと、
前記結像レンズアレイＦを光軸方向に移動させて、前記受光素子群Ｐの基準となる一つの受光素子Ｐ２にかかる焦点位置の調整を行う焦点位置調整部と、
前記基準の受光素子Ｐ２をその受光面Ｐ２ａに沿って移動させて、該基準の受光素子Ｐ２にかかる結像位置の調整を行う結像位置調整部と、
を備え、前記位置決め機構により、前記基準の受光素子Ｐ２の他の受光素子Ｐ１にかかる変位検出感度を前記基準の受光素子Ｐ２の変位検出感度に合わせるように傾き調整部材２６を偏心回動させることを特徴とする。
【００４６】
【発明の実施の形態】
以下、本発明の実施の形態を図面を参照して具体的に説明する。
なお、以下に説明する実施の形態において、変位測定装置の構成および作用は、上述した従来の技術にて参照した図５乃至図１１と同様である。したがって、本実施の形態では、従来の技術と同一個所には、同一番号を付して説明を省略する。
【００４７】
以下、上述した変位測定装置における各受光素子Ｐ１，Ｐ２の位置決め機構について説明する。図１（ａ）は本発明の変位測定装置にかかる位置決め機構を示す図、図１（ｂ）は図１（ａ）における側面図である。なお、図１（ａ）では、位置決め機構を図１における走査幅Ｗ方向にて受光素子Ｐ１側から見ている。
【００４８】
本位置決め機構は、各受光素子Ｐ１，Ｐ２にかかる図１中の（イ），（ロ），（ハ）の３種の位置決めを行う。
【００４９】
（イ）の位置決めは、受光素子Ｐ１，Ｐ２の受光面Ｐ１ａ，Ｐ２ａを、結像レンズ部Ｆ１，Ｆ２にて収束されるビームの光軸に沿って移動させて、焦点距離ｆ２を調整する焦点合わせのための位置決めである。
【００５０】
（ロ）の位置決めは、受光素子Ｐ１，Ｐ２の受光面Ｐ１ａ，Ｐ２ａを、走査幅Ｗと直交する縦方向に移動させて、受光素子Ｐ１，Ｐ２の両端に設けられた各電極から出力される電流を基に演算された変位測定値が等しくなる位置にビームを結像させるための位置合わせである。
【００５１】
（ハ）の位置決めは、一方の受光素子Ｐ１（Ｐ２）を回動させることによって、他方の受光素子Ｐ２（Ｐ１）に対して変位検出感度（測定対象面１０ａの図１中上下方向に変位に伴う受光素子Ｐ１（Ｐ２）の両端に設けられた各電極から出力される電流の変化量）を合わせるための位置決めである。
【００５２】
上記（イ），（ロ），（ハ）の位置決めを行うために、位置決め機構は、図１（ａ），（ｂ）に示すように、取付板２０と、板体２１と、調整板２２とを有している。取付板２０には、板状に形成され、受光素子Ｐ１が固定されている。この取付板２０の面は、不動の板体２１の一方の面（内面）に接触している。板体２１は、例えば変位測定装置の外筐なすケースなどからなり、遊挿穴２１ａが穿設されている。また、調整板２２は、板状に形成され、板体２１の他方の面（外面）に接触している。
【００５３】
調整板２２には、一対の焦点調整長孔２３ａ，２３ｂと、一対の結像位置調整長孔２４ａ，２４ｂが穿設されている。各焦点調整長孔２３ａ，２３ｂは、光軸に平行するように設けられている。また、各結像位置調整長孔２４ａ，２４ｂは、取付板２０に固定された受光素子Ｐ１の受光面Ｐ１ａ（図１の（ロ）方向）に平行するように設けられている。
【００５４】
一方の焦点調整長孔２３ａには、焦点調整ネジ２５が挿通されている。焦点調整ネジ２５は、一方の焦点調整長孔２３ａを介して板体２１に螺着される。
【００５５】
他方の焦点調整長孔２３ｂは、一方の焦点調整長孔２３ａよりも幅広の長孔をなしている。この他方の焦点調整長孔２３ｂには、傾き調整部材２６が挿通されている。傾き調整部材２６は、焦点調整長孔２３ｂに挿通される円柱形状をなしている。円柱形状とされた傾き調整部材２６の偏心位置には、傾き調整ネジ２７が螺着されている。傾き調整部材２６は、傾き調整ネジ２７を介して板体２１に取り付けられて偏心回動可能とされる。なお、傾き調整部材２６は、調整板２２の焦点調整長孔２３ｂから延出する前記円柱形状と同心の円柱形状をなす摘み部２６ａを有している。
【００５６】
各結像位置調整長孔２４ａ，２４ｂには、それぞれ結像位置調整ネジ２８が挿通されている。各結像位置調整ネジ２８は、それぞれ結像位置調整長孔２４ａ，２４ｂを介し遊挿穴２１ａに挿通されて取付板２０に螺着される。
【００５７】
なお、結像レンズアレイＦは、光軸に沿う方向に移動可能とされている。この結像レンズアレイＦの移動は、受光素子群の基準となる一つの受光素子（本実施の形態では受光素子Ｐ２）にかかる焦点位置の調整を行う焦点位置調整部をなす。
【００５８】
また、基準となる受光素子Ｐ２は、別の取付板（不図示）に取り付けられている。この別の取付板は、例えば変位測定装置の外筐なすケースなどからなる不動とされた別の板体（不図示）に対し、一対の長孔と、この長孔に挿通されるネジによって受光素子Ｐ２の受光面Ｐ２ａと縦方向（図１の（ロ）方向）に平行に移動可能とされている。この基準の受光素子Ｐ２における受光面Ｐ２ａに平行する移動は、基準の受光素子Ｐ２にかかる結像位置の調整を行う結像位置調整部をなす。
【００５９】
上記構成では、焦点位置調整部により、結像レンズアレイＦを光軸方向に移動させ、受光素子Ｐ２にかかる焦点位置を調整する。さらに、結像位置調整部により、受光素子Ｐ２を受光面Ｐ２ａと平行させて受光素子Ｐ２にかかる結像位置を調整する。
【００６０】
続いて、上述した位置決め機構により受光素子Ｐ１の位置決めを行う。
まず、焦点調整ネジ２５および結像位置調整ネジ２８を緩め、調整板２２に対して取付板２０を、焦点調整長孔２３ａ，２３ｂに沿って移動させる。これにより受光素子Ｐ１が光軸方向に移動して、受光素子Ｐ１にかかる焦点位置が調整される。この調整後、焦点調整ネジ２５を締め付ける。
【００６１】
次いで、取付板２０を、結像位置調整長孔２４ａ，２４ｂに沿って移動させる。これにより、受光素子Ｐ１が縦方向に移動して、受光素子Ｐ１にかかる結像位置が調整される。この調整後、結像位置調整ネジ２８を締め付ける。
【００６２】
次いで、焦点調整ネジ２５，傾き調整ネジ２７および結像位置調整ネジ２８を緩め、傾き調整部材２６を傾き調整ネジ２７を中心として偏心回動させる。すなわち、取付板２０を、焦点調整ネジ２５を中心として走査方向を基準に回動させる。これにより、受光素子Ｐ１が走査方向を基準に回動して、受光素子Ｐ２の変位検出感度に対して受光素子Ｐ１の変位検出感度が合うように調整される。この調整後、焦点調整ネジ２５，傾き調整ネジ２７および結像位置調整ネジ２８を締め付ける。なお、傾きの調整の際、傾き調整部材２６の摘み２６ａを手指で回すことにより調整板２２に手を振れることなく略一定の軌跡で調整板２２および取付板２０を回動させることが可能である。
【００６３】
ここで、受光素子Ｐ１を回動させて変位検出感度を合わせる調整により、受光素子Ｐ１にかかる焦点位置および結像位置に微小にズレが生じる。そこで、上記焦点位置の調整および結像位置の調整を再び行う。この場合、傾き調整部材２６は回動させないので、変位検出感度にズレが生じることがなく、全ての位置決めが完了することとなる。
【００６４】
したがって、上述した変位測定装置では、他方の焦点調整長孔２３ｂに挿通されて焦点の調整時に受光素子Ｐ１を焦点調整長孔２３ａ，２３ｂに沿って移動できるようにするとともに、傾き調整ネジ２７によって偏心回動するように設けられた傾き調整部材２６を備えている。これにより、変位検出感度の調整による位置決めが、他の焦点位置および結像位置の調整によってズレることがないので、３種の調整の内の１つの位置決めを決定させる。すなわち、受光素子Ｐ１の位置決め調整を容易、且つ、正確に行うことが可能となる。
【００６５】
ところで、上述した実施の形態では、傾き調整部材２６を他方の焦点調整長孔２３ｂに設けた構成であるが、これに限らない。図２（ａ）（ｂ）に示すように、焦点調整長孔２３ａ，２３ｂに焦点調整ネジ２５をそれぞれ挿通して板体２１に螺着させ、結像位置調整長孔２４ａ，２４ｂの一方に結像位置調整ネジ２８を挿通し遊挿穴２１ａを通して取付板２０に螺着させ、結像位置調整長孔２４ａ，２４ｂの他方に傾き調整部材２６を挿通し遊挿穴２１ａを通して傾き調整ネジ２７を取付板２０に螺着させてもよい。
【００６６】
この構成であっても、焦点調整ネジ２５の締緩により焦点調整長孔２３ａ，２３ｂに沿った焦点位置の調整を行い、結像位置調整ネジ２８の締緩により結像位置調整長孔２４ａ，２４ｂに沿った結像位置の調整を行い、焦点調整ネジ２５，結像位置調整ネジ２８および傾き調整ネジ２７の締緩により結像位置調整ネジ２８を中心とした傾き調整部材２６の偏心回動に伴う傾き位置の調整を行うことにより、上述した効果を得ることが可能である。
【００６７】
また、図３（ａ）（ｂ）に示すように、焦点調整長孔２３ａ，２３ｂの一方に焦点調整ネジ２５をそれぞれ挿通し遊挿穴２１ａを通して取付板２０に螺着させ、焦点調整長孔２３ａ、２３ｂの他方に傾き調整部材２６を挿通し遊挿穴２１ａを通して傾き調整ネジ２７を取付板２０に螺着させ、結像位置調整長孔２４ａ，２４ｂに結像位置調整ネジ２８をそれぞれ挿通して板体２１に螺着させてもよい。
【００６８】
この構成であっても、焦点調整ネジ２５の締緩により焦点調整長孔２３ａ，２３ｂに沿った焦点位置の調整を行い、結像位置調整ネジ２８の締緩により結像位置調整長孔２４ａ，２４ｂに沿った結像位置の調整を行い、焦点調整ネジ２５，結像位置調整ネジ２８および傾き調整ネジ２７の締緩により結像位置調整ネジ２８を中心とした傾き調整部材２６の偏心回動に伴う傾き位置の調整を行うことにより、上述した効果を得ることが可能である。
【００６９】
また、図４（ａ）（ｂ）に示すように、焦点調整長孔２３ａ，２３ｂに焦点調整ネジ２５をそれぞれ挿通し遊挿穴２１ａを通して取付板２０に螺着させ、結像位置調整長孔２４ａ，２４ｂの一方に結像位置調整ネジ２８を挿通して板体２１に螺着させ、結像位置調整長孔２４ａ，２４ｂの他方に傾き調整部材２６を挿通して調整ネジ２７を板体２１に螺着させてもよい。
【００７０】
この構成であっても、焦点調整ネジ２５の締緩により焦点調整長孔２３ａ，２３ｂに沿った焦点位置の調整を行い、結像位置調整ネジ２８の締緩により結像位置調整長孔２４ａ，２４ｂに沿った結像位置の調整を行い、焦点調整ネジ２５，結像位置調整ネジ２８および傾き調整ネジ２７の締緩により焦点調整ネジ２５を中心とした傾き調整部材２６の偏心回動に伴う傾き位置の調整を行うことにより、上述した効果を得ることが可能である。
【００７１】
なお、上述した実施の形態では、結像レンズアレイＦが２個の結像レンズ部Ｆ１，Ｆ２を有し、受光素子群Ｐが、受光素子Ｐ１，Ｐ２を有した構成であり、基準となる受光素子Ｐ２に対して他の受光素子Ｐ１を位置決めする構成としたが、結像レンズアレイＦが複数の結像レンズ部を有し、受光素子群も対応して複数有した構成であってもよい。この場合、基準となる受光素子（Ｐ２）は、上記と同様の構成で位置決めされ、その他の各受光素子（Ｐ１）に上記位置決め機構を設ければよい。
【００７２】
【発明の効果】
以上説明したように本発明による変位測定装置は、調整板に設けられた一対の焦点調整長孔および一対の結像位置調整長孔の１つに傾き調整ネジによって偏心回動する傾き調整部材を設けている。そして、受光素子の焦点位置あるいは結像位置の調整時には、傾き調整部材が焦点調整長孔あるいは結像位置調整長孔に沿った移動に関与する。また、受光素子の傾き位置（変位検出感度）の調整時には、傾き調整部材が偏心回動することで受光素子の傾き位置が調整される。これにより、調整された受光素子の傾き位置が、他の焦点位置および結像位置の調整によってズレることがないので、３種の調整の内の１つの位置決めを決定させることとなる。したがって、受光素子の各位置決め調整を容易、且つ、正確に行うことができる。
【図面の簡単な説明】
【図１】（ａ）本発明の変位測定装置にかかる位置決め機構を示す図。
（ｂ）図１（ａ）における側面図。
【図２】（ａ）他の位置決め機構を示す図。
（ｂ）図２（ａ）における側面図。
【図３】（ａ）他の位置決め機構を示す図。
（ｂ）図３（ａ）における側面図。
【図４】（ａ）他の位置決め機構を示す図。
（ｂ）図４（ａ）における側面図。
【図５】変位測定装置を示す斜視図。
【図６】（ａ）〜（ｅ）受光手段における照射点の走査に対応した結像点を示した上面図。
【図７】（ａ）（ｂ）受光手段における照射点に対応した結像点を示した側面図。
【図８】連続する結像レンズ部の境界近傍における作用を示す図。
【図９】連続する結像レンズ部の境界近傍における作用を示す図。
【図１０】連続する結像レンズ部の境界近傍における作用を示す図。
【図１１】図５における側面図。
【図１２】（ａ）従来の位置決め機構を示す図。
（ｂ）は図１２（ａ）における側面図。
【符号の説明】
１０ａ…測定対象面、２０…取付板、２１…板体、２１ａ…遊挿穴、２２…調整板、２３ａ，２３ｂ…焦点調整長孔、２４ａ，２４ｂ…結像位置調整長孔、２５…焦点調整ネジ、２６…傾き調整部材、２７…傾き調整ネジ、２８…結像位置調整ネジ、Ｆ…結像レンズアレイ、Ｆ１，Ｆ２…結像レンズ部、Ｐ…受光素子群、Ｐ１，Ｐ２…受光素子、Ｐ１ａ，Ｐ２ａ…受光面。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a displacement measurement device that measures a displacement amount of the measurement target surface in a non-contact manner by scanning at regular intervals an irradiation point formed by light irradiated on the measurement target surface, and in particular, The present invention relates to a displacement measuring device capable of appropriately positioning a light receiving element.
[0002]
[Prior art]
As shown in FIG. 5, the displacement measuring device includes a light projecting unit 2 and a light receiving unit 6, and measures the displacement of the measurement target surface 10a of the measurement target 10 based on the principle of triangulation. When the measurement target surface 10a has a high reflectance like a mirror surface, most of the light reflected at the irradiation point S is reflected by the light receiving means 6 at the same angle as the incident angle with the irradiation point S symmetrical.
[0003]
The light projecting means 2 of the displacement measuring device is roughly composed of a light source 3 such as a laser diode, a deflecting device 4 such as a vibrating mirror type or a polygon mirror type, and a converging lens 5 such as an fθ lens. The light source 3 emits a laser beam to the deflecting device 4. The deflecting device 4 deflects the incident laser light and scans the laser light with a constant stroke. The deflecting device 4 scans the laser light back and forth or one way. The converging lens 5 converges the laser light scanned in a fan shape by the deflecting device 4 so as to be parallel.
[0004]
The light receiving means 6 includes a condenser lens array C, an imaging lens array F, and a light receiving element group P. The condenser lens array C is formed of synthetic resin or glass so that a plurality of condenser lens portions C1 to Cn having the same focal length f1 (for example, 20 mm) are arranged in a line.
[0005]
The condensing lens sections C1 to Cn are arranged at least in the parallel direction (scanning direction) so that a plurality of condensing lens sections C1 to Cn are arranged within a scanning width dimension (for example, 30 mm) of a light beam emitted from the light projecting means 2 to the measurement object 10 side. ) Has a substantially rectangular outer shape (for example, 2.5 mm) in which the width d of the lens along the projected beam is smaller than the scanning width of the projected beam (for example, 30 mm). Further, each of the condenser lens portions C1 to Cn is a lens having a surface orthogonal to the optical axis formed in a spherical shape. That is, each of the condenser lens units C1 to Cn is a lens that can uniformly narrow down light around its optical axis. The optical axes are integrated in a state where their side surfaces are in close contact with each other so as to be continuously arranged in a line on a line which is parallel and orthogonal to the optical axis.
[0006]
The condenser lens array C is arranged such that the optical axis of each of the condenser lens sections C1 to Cn intersects with the irradiation point S (movement trajectory SL) scanned on the surface 10a of the measurement object 10. The condenser lens array C is disposed at a position away from the irradiation point S (movement trajectory SL) by a focal distance f1.
[0007]
The imaging lens array F is a lens array in which a plurality of (two in the present embodiment) imaging lens units F1 and F2 are arranged in an array in the scanning direction, similarly to the condenser lens array C. Each of the imaging lens units F1 and F2 is a lens capable of uniformly reducing incident light around its optical axis. The imaging lens portions F1 and F2 are integrated with their side surfaces in close contact with each other so that their respective optical axes are parallel and continuous on a line perpendicular to the optical axis. Each of the imaging lens units F1 and F2 is disposed to face a predetermined number of condenser lens units (six in FIG. 5) C1 to C6. The imaging lens array F converges the beam from the condenser lens array C and emits the beam to the light receiving element group P.
[0008]
The light receiving element group P is composed of the same number (two in the present embodiment) of light receiving elements P1 and P2 corresponding to the imaging lens units F1 and F2. The light receiving elements P1 and P2 correspond to the imaging lens units F1 and F2, respectively, and are arranged at positions apart from the focal length f2.
[0009]
As shown in FIG. 5, each of the light receiving elements P1 and P2 has light receiving surfaces P1a and P2a on which light reflected from the irradiation point S is imaged. The width of the light receiving surfaces P1a and P2a in the scanning direction of the imaging point K (that is, the scanning direction of the irradiation point S) is referred to as a scanning width W. The direction orthogonal to the scanning direction (scanning width W) of the imaging point K is referred to as a vertical direction. Electrodes are provided on both ends in the vertical direction of each of the light receiving elements P1 and P2. A current corresponding to the position of the imaging point K is output from each of these electrodes.
[0010]
Hereinafter, the operation of the displacement measuring device will be described with reference to FIGS.
As shown in FIG. 5, the irradiation light emitted from the light source 3 is bent by the deflecting device 4 and scanned at a predetermined stroke. The scanned irradiation light is incident on the converging lens 5 and becomes a beam that moves in parallel, and forms an irradiation point on the measurement target surface 10a. The irradiation light is reflected or scattered at each irradiation point S, and the reflected and scattered light (measurement light) is emitted to the light receiving means 6 side.
[0011]
As shown in FIG. 6A, the irradiation point S is scanned and moves to a position facing the condenser lens portion C1 at one end of the condenser lens array C. The measurement light from the irradiation point S is converged as a substantially parallel beam by the condenser lens portion C1. The converged measurement light is incident on the imaging lens unit F1 at an angle with respect to the optical axis of the imaging lens unit F1.
[0012]
The imaging lens unit F1 changes the direction of the measurement light incident on the condenser lens unit C1, and forms an image of the measurement light at a position on one end side in the scanning width direction of the light receiving surface P1a. Here, as shown in FIG. 7A, even when viewed from the side, the measurement light from the irradiation point S is converged almost in parallel by the condenser lens unit C1, and the measurement light of the light receiving element P1 is formed by the imaging lens unit F1. An image is formed on the light receiving surface P1a.
[0013]
Therefore, on the light receiving surface P1a of the light receiving element P1, a point-like image Ka (imaging point) is formed at a position accurately corresponding to the height of the irradiation point S, and an electric signal (current) corresponding to the position is formed. Is output from the electrode. Note that the measurement light that enters the other condensing lens unit C2 and the like from the irradiation point S is also converged and is incident on the imaging lens unit F1. However, these lights do not form an image on the light receiving surface P1a of the light receiving element P1.
[0014]
6B, the irradiation point S moves to a position where the irradiation point S intersects the optical axis of the condenser lens portion C1 of the condenser lens array C, as shown in FIG. The measurement light from the irradiation point S is converged into a substantially parallel beam mainly by the condenser lens portion C1. The converged measurement light is incident in a state parallel to the optical axis of the imaging lens unit F1. Therefore, the image Ka of the irradiation point S is formed substantially at the center of the light receiving surface P1a in the scanning width direction.
[0015]
Further, as shown in FIG. 6C, the scanning of the irradiation point S causes the irradiation point S to be located adjacent to the optical axis within a range facing the condenser lens portion C1 of the condenser lens array C. The lens moves toward the lens section C2. Then, the measurement light from the irradiation point S is mainly converged by the condenser lens portion C1, and the imaging lens portion F1 has an angle opposite to the optical axis of the imaging lens portion F1 with respect to the case of FIG. Is incident on. Therefore, the imaging lens unit F1 forms a point-like image Ka at a position on the other end side in the scanning width direction of the light receiving surface P1a.
[0016]
As described above, when the irradiation point S moves within the range facing the condenser lens portion C1, the position of the image Ka on the light receiving surface P1a moves from one end of the scanning direction width of the light receiving surface P1a to the other end. Will be.
[0017]
Also, when the irradiation point S moves by δ in the height direction as shown in FIG. 7B, for example, as shown in FIG. 7B, along with the scanning of the irradiation point S, the image on the light receiving surface P1a of the light receiving element P1 is changed. An electric signal corresponding to the position is output with a shift like K '. Then, the height of the irradiation point S ′ from the reference plane is detected from this electric signal, and the difference δ from the height of the irradiation point S is also known.
[0018]
Then, as shown in FIG. 6D, when the irradiation point S comes to a position facing the boundary between the condenser lenses C1 and C2, the measurement light from the irradiation point S is supplied to the two condenser lenses. The beams are converged into substantially parallel beams by C1 and C2, respectively, and are incident on the imaging lens unit F1. Therefore, images Ka and Kb are formed at both ends of the light receiving surface P1a in the scanning width direction. Here, since the positions along the vertical direction on the light receiving surface P1a of the two imaging points Ka and Kb are the same, the light receiving element P1 corresponds to the position in the vertical direction as in the case of one image. A signal is output.
[0019]
When the irradiation point S is further scanned, as shown in FIG. 6E, the irradiation point S moves to a range facing the condenser lens portion C2. Then, the measurement light from the irradiation point S is mainly converged by the condenser lens portion C2 and is incident on the imaging lens portion F1 at an angle with respect to the optical axis. Then, the imaging lens F1 forms a point image Kb at a position on one end side of the light receiving surface P1a in the scanning width direction.
[0020]
Similarly, while the irradiation point S is scanned in the scanning direction of the condensing lens array C, the imaging point K is moved from one end of the scanning direction width of the light receiving surface P1a to each of the condensing lens portions C1 to C6. Move to the end. At the same time, the imaging point K moves in the vertical direction according to the displacement of the surface 10a of the measurement object 10.
[0021]
Next, an operation when the imaging point K moves to the light receiving element P2 adjacent to the light receiving element P1 will be described with reference to FIGS. Note that a portion surrounded by a net in the drawing indicates a region near the boundary between the continuous condenser lens portions C6 and C7.
[0022]
As shown in FIG. 8, the measurement light from the irradiation point S mainly enters the condenser lens portion C6. The measurement light that has entered the condenser lens section C6 becomes parallel light, enters the imaging lens section F1, and forms an image on the light receiving surface P1a, as in FIG. 6C. Also, the measurement light that has entered the condenser lens section C7 becomes parallel light and enters the imaging lens section F2, and is not imaged on the light receiving element P2a as in FIG. 6C.
[0023]
Then, the irradiation point S is scanned, and as shown in FIG. 9, when the measurement light is incident on the vicinity of the boundary between the condenser lens portion C6 and the condenser lens portion C7 (portion surrounded by a net), Is converted into parallel light from near the boundary between the condenser lens portions C6 and C7 and is incident near the boundary between the imaging lens portions F1 and F2. At this time, the measurement light that has entered the imaging lens unit F1 forms an image on the end edge of the light receiving surface P1a in the scanning width direction, as in the case of FIG. 6D. On the other hand, the measurement light that has entered the imaging lens unit F2 forms an image on the starting edge of the light receiving surface P2a in the scanning width direction, as in the case of FIG. 6D.
[0024]
Then, when the irradiation point S is further scanned, the measurement light mainly enters the condenser lens portion C7 as shown in FIG. The measurement light that has entered the condenser lens section C7 becomes parallel light, enters the imaging lens section F2, and forms an image on the light receiving surface P2a in the same manner as in FIG. Further, the measurement light incident on the condenser lens portion C6 becomes parallel light and is incident on the imaging lens portion F1, and is not imaged on the light receiving surface P2a as in FIG.
[0025]
As described above, the displacement measuring device according to the present embodiment can reduce the aperture and the focal length f2 of the imaging lens array F as compared with the case where a single imaging lens having an enlarged imaging lens diameter D is used. . Thereby, the aperture of the condenser lens array C can be made large and the focal length f1 can be made small. Therefore, by configuring the plurality of imaging lens units F1 and F2 to form an image of the measurement light from the condenser lens array C, the light receiving element group P having a small light receiving width w of the light receiving surface Pa and a high response speed can be obtained. Can be used. Therefore, the processing speed for the signal output of the light receiving element group P can be increased by increasing the scanning speed, and the measurement time can be reduced.
[0026]
By the way, in the light receiving elements P1 and P2, the beams converged by the imaging lens array F are imaged on the light receiving surfaces P1a and P2a, but their positioning needs to be performed. Specifically, as shown in FIG. 11, the respective positions of the distance from the imaging lens array F (arrow A), the beam imaging position (arrow B), and the inclination with respect to the beam (arrow C) are adjusted.
[0027]
The positioning of the distance from the imaging lens array F is performed in order to align the light receiving surfaces P1a and P2a of the light receiving elements P1 and P2 with the focal point of the beam converged by the imaging lens array F.
[0028]
The imaging position of the beam is adjusted so that the beam is imaged at a desired position where displacement measurement values calculated based on currents output from the electrodes provided at both ends of each of the light receiving elements P1 and P2 become equal. Do to do.
[0029]
As for the inclination with respect to the beam, the inclination of the light receiving surfaces P1a and P2a of the respective light receiving elements P1 and P2 is determined with respect to the optical axis of the beam shown in FIG. As shown in FIG. 5, when two light receiving means 6 are provided in parallel in order to widen the scanning width of the irradiation point S, this positioning is performed by detecting the displacement detection sensitivity of each of the light receiving elements P1 and P2 (measurement target surface 10a (The amount of change in the current output from each electrode provided at both ends of each of the light receiving elements P1 and P2 due to the displacement in the Z direction). In this case, usually, positioning is performed to match the displacement detection sensitivity of one light receiving element P1 (P2) with the displacement detection sensitivity of the other light receiving element P2 (P1).
[0030]
Conventionally, there is a mechanism shown in FIGS. 12A and 12B as a positioning mechanism for performing the above positioning. FIG. 12A shows a conventional positioning mechanism, and FIG. 12B is a side view in FIG. In FIG. 12A, the positioning mechanism is viewed from the same direction as in FIG.
[0031]
As shown in FIGS. 12A and 12B, the light receiving element P1 is fixed to the mounting plate 70. The mounting plate 70 is in contact with one surface of an immovable plate 71 (for example, a case forming an outer case of the displacement measuring device). The adjustment plate 72 is in contact with the other surface of the plate 71.
[0032]
The adjusting plate 72 is provided with two long holes 73a and 73b parallel to the optical axis direction (arrow A in FIG. 11) irradiated onto the light receiving surface P1a of the light receiving element P1. Screws 74a and 74b are inserted into the long holes 73a and 73b, respectively. The screws 74a and 74b are screwed to the plate 71.
[0033]
The adjusting plate 72 is provided with two long holes 73c and 73d parallel to the light receiving surface P1a of the light receiving element P1 (arrow B in FIG. 11). Screws 74c and 74d are inserted into the long holes 73c and 73d, respectively. The screws 74c and 74d pass through holes 71a provided in the plate 71 and are screwed to the mounting plate 70.
[0034]
According to this positioning mechanism, first, the adjusting plate 72 and the mounting plate 70 are moved in the direction of arrow A along the long holes 73a, 73b with the screws 74a, 74b, 74c, 74d loosened. Thereby, the distance between the light receiving surface P1a of the light receiving element P1 fixed to the mounting plate 70 and the imaging lens array F is changed. Then, the screws 74a and 74b are tightened and positioned at a position where the light receiving surface P1a is focused on the beam focused by the imaging lens array F.
[0035]
Next, the mounting plate 70 is moved in the direction of arrow B along the long holes 73c and 73d. Thereby, the focal position of the beam impinging on the light receiving surface P1a of the light receiving element P1 fixed to the mounting plate 70 is changed. Then, the screws 74c and 74d are tightened and positioned at a position where the beam focuses on a desired position on the light receiving surface P1a.
[0036]
Next, the screw 74a is loosened to remove the screw 74b, and the screws 74c and 74d are loosened, so that the adjusting plate 72 and the mounting plate 70 are rotated around the screw 74a in the direction of arrow C. Thereby, the inclination of the beam with respect to the optical axis by the light receiving surface P1a of the light receiving element P1 fixed to the mounting plate 70 is variable. Then, the screw 74a is tightened and positioned at a position where the displacement detection sensitivity of the rotated light receiving element P1 matches the displacement detection sensitivity of the light receiving element P2 of another displacement measuring device.
[0037]
[Problems to be solved by the invention]
However, in the above-described conventional displacement measuring device, when positioning the inclination with respect to the beam (in the direction of arrow C), since the screw 74a serving as the rotation center is inserted into the long hole 73a, the rotation around the screw 74a is performed. It is difficult to move. As a result, the adjustment of the focal position (the direction of the arrow A) positioned in the preceding stage changes. Further, since it is necessary to loosen the screws 74c and 74d, the adjustment of the imaging position (arrow B direction) positioned in the previous stage also changes.
[0038]
Then, the focus position is adjusted again. However, since the screw 74b is removed, the light receiving element P1 cannot be moved along the long holes 73a and 73b, and the accurate focus position adjustment is not performed. It will be difficult. Further, when the focus position is adjusted, since the screw 74b is disengaged, the adjustment of the tilt is changed by rotating around the screw 74a.
[0039]
That is, in the conventional displacement measuring device, the adjustment of the inclination of the light receiving element P1 changes the previous two adjustments. If the adjustment is performed again, the adjustment of the inclination changes. It was difficult to perform accurate positioning. Therefore, the current practice is to rely on customs that combine each adjustment.
[0040]
Therefore, an object of the present invention is to provide a displacement measuring device capable of easily and accurately performing positioning adjustment of a light receiving element in order to solve the above-mentioned problem.
[0041]
[Means for Solving the Problems]
In order to achieve the above object, a displacement measuring device according to claim 1 of the present invention comprises:
Irradiation light is emitted to the measurement target surface 10a, and the reflected light is converged by the imaging lens unit F1 and the measurement target surface 10a is detected based on the detection position of the imaging point formed on the light receiving surface P1a of the light receiving element P1. In a displacement measuring device that measures the amount of displacement in a non-contact manner,
A mounting plate 20 to which the light receiving element P1 is fixed,
An immovable plate 21 having one surface disposed in contact with the surface of the mounting plate 20 opposite to the surface on which the light receiving element P1 is fixed, and having a play insertion hole 21a formed therein;
A pair of focus adjustment slots 23a and 23b in contact with the other surface of the plate 21 and parallel to the optical axis; and a pair of imaging position adjustment slots arranged in parallel with the light receiving surface P1a of the light receiving element P1. An adjustment plate 22 having 24a, 24b;
A focus adjustment screw 25 screwed to the plate 21 via one of the focus adjustment slots 23a, 23b;
A tilt adjusting member 26 which has a cylindrical shape inserted into the other of the focus adjusting slots 23a and 23b and is attached to the plate 21 via a tilt adjusting screw 27 screwed into an eccentric position;
An imaging position adjusting screw 28 which is inserted into the play insertion hole 21a through each of the imaging position adjusting slots 24a and 24b and is screwed to the mounting plate 20;
And adjusts the focal position of the light receiving element P1 along each of the focus adjusting slots 23a and 23b. The position of the light receiving element P1 along each of the imaging position adjusting slots 24a and 24b is adjusted. The image forming position is adjusted, and the tilt position of the light receiving element P1 is adjusted according to the eccentric rotation of the tilt adjusting member 26 about the focus adjusting screw 25.
[0042]
The displacement measuring device according to claim 2 is
Irradiation light is emitted to the measurement target surface 10a, and the reflected light is converged by the imaging lens unit F1 and the measurement target surface 10a is detected based on the detection position of the imaging point formed on the light receiving surface P1a of the light receiving element P1. In a displacement measuring device that measures the amount of displacement in a non-contact manner,
A mounting plate 20 to which the light receiving element P1 is fixed,
An immovable plate 21 having one surface disposed in contact with the surface of the mounting plate 20 opposite to the surface on which the light receiving element P1 is fixed, and having a play insertion hole 21a formed therein;
A pair of focus adjustment slots 23a and 23b in contact with the other surface of the plate 21 and parallel to the optical axis; and a pair of imaging position adjustment slots arranged in parallel with the light receiving surface P1a of the light receiving element P1. An adjustment plate 22 having 24a, 24b;
A focus adjusting screw 25 screwed to the plate 21 via the focus adjusting slots 23a and 23b;
It has a cylindrical shape inserted into the other one of the imaging position adjusting slots 24a, 24b, and is inserted into the loose insertion hole 21a via an inclination adjusting screw 27 screwed at an eccentric position and attached to the mounting plate 20. An inclination adjusting member 26,
An imaging position adjusting screw 28 which is inserted into the play insertion hole 21a through one of the imaging position adjusting slots 24a and 24b and is screwed to the mounting plate 20;
And adjusts the focal position of the light receiving element P1 along each of the focus adjusting slots 23a and 23b. The position of the light receiving element P1 along each of the imaging position adjusting slots 24a and 24b is adjusted. The image forming position is adjusted, and the tilt position of the light receiving element P1 is adjusted with the eccentric rotation of the tilt adjusting member 26 about the image forming position adjusting screw 28.
[0043]
The displacement measuring device according to claim 3 is
Irradiation light is emitted to the measurement target surface 10a, and the reflected light is converged by the imaging lens unit F1 and the measurement target surface 10a is detected based on the detection position of the imaging point formed on the light receiving surface P1a of the light receiving element P1. In a displacement measuring device that measures the amount of displacement in a non-contact manner,
A mounting plate 20 to which the light receiving element P1 is fixed,
An immovable plate 21 having one surface disposed in contact with the surface of the mounting plate 20 opposite to the surface on which the light receiving element P1 is fixed, and having a play insertion hole 21a formed therein;
A pair of focus adjustment slots 23a and 23b in contact with the other surface of the plate 21 and parallel to the optical axis; and a pair of imaging position adjustment slots arranged in parallel with the light receiving surface P1a of the light receiving element P1. An adjustment plate 22 having 24a, 24b;
A focus adjusting screw 25 that is inserted into the play insertion hole 21a through one of the focus adjusting slots 23a and 23b and is screwed to the mounting plate 20;
It is formed into a cylindrical shape that is inserted into the other of the focus adjustment slots 23a and 23b, and is inserted through the loose insertion hole 21a through an inclination adjustment screw 27 that is screwed at an eccentric position and is attached to the mounting plate 20. Member 26,
An imaging position adjusting screw 28 screwed to the plate 21 via the imaging position adjusting slots 24a and 24b;
And adjusts the focal position of the light receiving element P1 along each of the focus adjusting slots 23a and 23b. The position of the light receiving element P1 along each of the imaging position adjusting slots 24a and 24b is adjusted. The image forming position is adjusted, and the tilt position of the light receiving element P1 is adjusted according to the eccentric rotation of the tilt adjusting member 26 about the focus adjusting screw 25.
[0044]
The displacement measuring device according to claim 4 is
Irradiation light is emitted to the measurement target surface 10a, and the reflected light is converged by the imaging lens unit F1 and the measurement target surface 10a is detected based on the detection position of the imaging point formed on the light receiving surface P1a of the light receiving element P1. In a displacement measuring device that measures the amount of displacement in a non-contact manner,
A mounting plate 20 to which the light receiving element P1 is fixed,
An immovable plate 21 having one surface disposed in contact with the surface of the mounting plate 20 opposite to the surface on which the light receiving element is fixed, and having a play insertion hole 21a formed therein;
A pair of focus adjustment slots 23a and 23b in contact with the other surface of the plate 21 and parallel to the optical axis; and a pair of imaging position adjustment slots arranged in parallel with the light receiving surface P1a of the light receiving element P1. An adjustment plate 22 having 24a, 24b;
A focus adjusting screw 25 that is inserted into the play insertion hole 21a through the focus adjusting slots 23a and 23b and screwed to the mounting plate 20;
A tilt adjusting member 26 which has a cylindrical shape inserted into the other of the imaging position adjusting slots 24a and 24b and is attached to the plate 21 via a tilt adjusting screw 27 screwed into an eccentric position;
An imaging position adjusting screw 28 screwed to the plate 21 via one of the imaging position adjusting slots 24a, 24b;
And adjusts the focal position of the light receiving element P1 along each of the focus adjusting slots 23a and 23b. The position of the light receiving element P1 along each of the imaging position adjusting slots 24a and 24b is adjusted. The image forming position is adjusted, and the tilt position of the light receiving element P1 is adjusted with the eccentric rotation of the tilt adjusting member 26 about the image forming position adjusting screw 28.
[0045]
The displacement measuring device according to claim 5 is the displacement measuring device according to any one of claims 1 to 4,
An imaging lens array F in which a plurality of imaging lens units F1 and F2 are continuously provided;
A light-receiving element group P in which a plurality of light-receiving elements P1 and P2 are provided so as to correspond to the respective imaging lens units F1 and F2;
A focus position adjusting unit that moves the imaging lens array F in the optical axis direction and adjusts a focus position on one light receiving element P2 serving as a reference of the light receiving element group P;
An imaging position adjustment unit that moves the reference light receiving element P2 along the light receiving surface P2a and adjusts an image forming position on the reference light receiving element P2;
And the tilt adjustment member 26 is eccentrically rotated by the positioning mechanism so that the displacement detection sensitivity applied to the other light receiving elements P1 of the reference light receiving element P2 matches the displacement detection sensitivity of the reference light receiving element P2. It is characterized by.
[0046]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.
In the embodiment described below, the configuration and operation of the displacement measuring device are the same as those in FIGS. 5 to 11 referred to in the above-described conventional technique. Therefore, in the present embodiment, the same parts as those in the related art are denoted by the same reference numerals, and description thereof will be omitted.
[0047]
Hereinafter, a positioning mechanism of each of the light receiving elements P1 and P2 in the above-described displacement measuring device will be described. FIG. 1A is a diagram showing a positioning mechanism according to the displacement measuring device of the present invention, and FIG. 1B is a side view of FIG. 1A. In FIG. 1A, the positioning mechanism is viewed from the light receiving element P1 side in the scanning width W direction in FIG.
[0048]
The present positioning mechanism performs three types of positioning (a), (b), and (c) in FIG. 1 for each of the light receiving elements P1 and P2.
[0049]
The positioning in (a) is performed by moving the light receiving surfaces P1a and P2a of the light receiving elements P1 and P2 along the optical axis of the beam converged by the imaging lens units F1 and F2 to adjust the focal length f2. This is positioning for alignment.
[0050]
The positioning of (b) is performed by moving the light receiving surfaces P1a and P2a of the light receiving elements P1 and P2 in the vertical direction orthogonal to the scanning width W and outputting from the respective electrodes provided at both ends of the light receiving elements P1 and P2. This is alignment for imaging a beam at a position where displacement measurement values calculated based on current are equal.
[0051]
The positioning of (c) is performed by rotating one of the light receiving elements P1 (P2), thereby detecting the displacement detection sensitivity (the displacement of the measurement target surface 10a in the vertical direction in FIG. This is positioning for adjusting the amount of change in current output from each electrode provided at both ends of the light receiving element P1 (P2).
[0052]
As shown in FIGS. 1 (a) and 1 (b), the positioning mechanism includes a mounting plate 20, a plate 21, and an adjusting plate 22 in order to perform the positioning of (a), (b) and (c). And The light receiving element P1 is fixed to the mounting plate 20 in a plate shape. The surface of the mounting plate 20 is in contact with one surface (inner surface) of the immovable plate 21. The plate body 21 is made of, for example, a case or the like that is an outer case of the displacement measuring device, and has a play insertion hole 21a. The adjustment plate 22 is formed in a plate shape and is in contact with the other surface (outer surface) of the plate body 21.
[0053]
The adjustment plate 22 is provided with a pair of focus adjustment slots 23a and 23b and a pair of imaging position adjustment slots 24a and 24b. The focus adjusting slots 23a and 23b are provided so as to be parallel to the optical axis. Further, the respective imaging position adjusting slots 24a and 24b are provided so as to be parallel to the light receiving surface P1a (the direction (b) in FIG. 1) of the light receiving element P1 fixed to the mounting plate 20.
[0054]
A focus adjustment screw 25 is inserted into one focus adjustment slot 23a. The focus adjustment screw 25 is screwed to the plate 21 via one focus adjustment slot 23a.
[0055]
The other focus adjustment slot 23b is a wider slot than the one focus adjustment slot 23a. The tilt adjusting member 26 is inserted into the other focus adjusting slot 23b. The tilt adjustment member 26 has a cylindrical shape inserted into the focus adjustment slot 23b. A tilt adjusting screw 27 is screwed at an eccentric position of the column-shaped tilt adjusting member 26. The tilt adjusting member 26 is attached to the plate 21 via a tilt adjusting screw 27 and is eccentrically rotatable. The tilt adjusting member 26 has a knob 26a extending from the focus adjusting slot 23b of the adjusting plate 22 and having a cylindrical shape concentric with the cylindrical shape.
[0056]
An imaging position adjusting screw 28 is inserted into each of the imaging position adjusting slots 24a and 24b. Each of the imaging position adjustment screws 28 is inserted into the loose insertion hole 21a through the imaging position adjustment slots 24a and 24b, and screwed to the mounting plate 20.
[0057]
The imaging lens array F is movable in a direction along the optical axis. The movement of the imaging lens array F forms a focal position adjusting unit that adjusts the focal position of one light receiving element (the light receiving element P2 in the present embodiment) which is a reference of the light receiving element group.
[0058]
The light receiving element P2 serving as a reference is mounted on another mounting plate (not shown). The other mounting plate receives light from another immovable plate body (not shown) made of, for example, a case serving as an outer casing of the displacement measuring device by a pair of long holes and a screw inserted into the long holes. The light receiving surface P2a of the element P2 can be moved in parallel in the vertical direction (the direction (b) in FIG. 1). The movement of the reference light-receiving element P2 parallel to the light-receiving surface P2a forms an image-position adjustment unit that adjusts the image-forming position of the reference light-receiving element P2.
[0059]
In the above configuration, the focal position adjusting unit moves the imaging lens array F in the optical axis direction to adjust the focal position on the light receiving element P2. Further, the image forming position adjustment unit adjusts the image forming position on the light receiving element P2 by making the light receiving element P2 parallel to the light receiving surface P2a.
[0060]
Subsequently, the light receiving element P1 is positioned by the above-described positioning mechanism.
First, the focus adjustment screw 25 and the imaging position adjustment screw 28 are loosened, and the mounting plate 20 is moved relative to the adjustment plate 22 along the focus adjustment slots 23a and 23b. Thereby, the light receiving element P1 moves in the optical axis direction, and the focal position on the light receiving element P1 is adjusted. After this adjustment, the focus adjustment screw 25 is tightened.
[0061]
Next, the mounting plate 20 is moved along the imaging position adjusting slots 24a and 24b. Accordingly, the light receiving element P1 moves in the vertical direction, and the image forming position on the light receiving element P1 is adjusted. After this adjustment, the imaging position adjusting screw 28 is tightened.
[0062]
Next, the focus adjusting screw 25, the tilt adjusting screw 27, and the imaging position adjusting screw 28 are loosened, and the tilt adjusting member 26 is eccentrically rotated about the tilt adjusting screw 27. That is, the mounting plate 20 is rotated around the focus adjustment screw 25 with respect to the scanning direction. As a result, the light receiving element P1 rotates based on the scanning direction, and the displacement detection sensitivity of the light receiving element P1 is adjusted to match the displacement detection sensitivity of the light receiving element P2. After this adjustment, the focus adjustment screw 25, the tilt adjustment screw 27, and the imaging position adjustment screw 28 are tightened. When adjusting the tilt, the knob 26a of the tilt adjusting member 26 can be turned by hand to rotate the adjusting plate 22 and the mounting plate 20 along a substantially constant trajectory without shaking the hand on the adjusting plate 22. is there.
[0063]
Here, by adjusting the rotation detection of the light receiving element P1 to adjust the displacement detection sensitivity, a slight shift occurs in the focal position and the image forming position on the light receiving element P1. Therefore, the adjustment of the focus position and the adjustment of the image formation position are performed again. In this case, since the tilt adjusting member 26 is not rotated, there is no deviation in the displacement detection sensitivity, and all positioning is completed.
[0064]
Therefore, in the displacement measuring device described above, the light receiving element P1 is inserted into the other focus adjustment slot 23b so that the light receiving element P1 can be moved along the focus adjustment slots 23a and 23b during focus adjustment, and the tilt adjustment screw 27 is used. The tilt adjusting member 26 is provided to be eccentrically rotated. Accordingly, the positioning by adjusting the displacement detection sensitivity does not shift due to the adjustment of the other focal position and the imaging position, so that one of the three types of adjustment is determined. That is, the positioning adjustment of the light receiving element P1 can be easily and accurately performed.
[0065]
In the above-described embodiment, the tilt adjusting member 26 is provided in the other focus adjusting slot 23b, but the present invention is not limited to this. As shown in FIGS. 2A and 2B, the focus adjusting screws 25 are inserted into the focus adjusting slots 23a and 23b, respectively, and screwed to the plate 21, and the focus adjusting screws 25 are inserted into one of the imaging position adjusting slots 24a and 24b. The image forming position adjusting screw 28 is inserted and screwed into the mounting plate 20 through the loose insertion hole 21a. The tilt adjusting member 26 is inserted into the other of the image forming position adjusting slots 24a and 24b, and the tilt adjusting screw 27 is inserted through the loose insertion hole 21a. May be screwed to the mounting plate 20.
[0066]
Even with this configuration, the focus position is adjusted along the focus adjustment slots 23a and 23b by tightening and loosening the focus adjustment screw 25, and the imaging position adjustment slots 24a and 24a are adjusted by tightening and loosening the imaging position adjustment screw 28. The image forming position is adjusted along 24b, and the focus adjusting screw 25, the image forming position adjusting screw 28, and the tilt adjusting screw 27 are tightened and loosened to rotate the tilt adjusting member 26 around the image forming position adjusting screw 28. The above-described effects can be obtained by performing the adjustment of the tilt position associated with.
[0067]
As shown in FIGS. 3 (a) and 3 (b), a focus adjusting screw 25 is inserted into one of the focus adjusting slots 23a and 23b, and is screwed to the mounting plate 20 through the play inserting hole 21a. An inclination adjusting member 26 is inserted into the other one of 23a and 23b, and an inclination adjusting screw 27 is screwed into the mounting plate 20 through the play insertion hole 21a, and an imaging position adjusting screw 28 is inserted into the imaging position adjusting slots 24a and 24b, respectively. Then, it may be screwed to the plate 21.
[0068]
Even with this configuration, the focus position is adjusted along the focus adjustment slots 23a and 23b by tightening and loosening the focus adjustment screw 25, and the imaging position adjustment slots 24a and 24a are adjusted by tightening and loosening the imaging position adjustment screw 28. The image forming position is adjusted along 24b, and the focus adjusting screw 25, the image forming position adjusting screw 28 and the tilt adjusting screw 27 are tightened and loosened to rotate the tilt adjusting member 26 about the image forming position adjusting screw 28. The above-described effects can be obtained by performing the adjustment of the tilt position associated with.
[0069]
Also, as shown in FIGS. 4A and 4B, the focus adjusting screws 25 are inserted into the focus adjusting slots 23a and 23b, respectively, and are screwed to the mounting plate 20 through the loose insertion holes 21a. An image forming position adjusting screw 28 is inserted into one of the image forming position adjusting holes 24a and 24b and screwed to the plate 21. An inclination adjusting member 26 is inserted into the other of the image forming position adjusting long holes 24a and 24b and the adjusting screw 27 is inserted into the plate body. 21 may be screwed.
[0070]
Even with this configuration, the focus position is adjusted along the focus adjustment slots 23a and 23b by tightening and loosening the focus adjustment screw 25, and the imaging position adjustment slots 24a and 24a are adjusted by tightening and loosening the imaging position adjustment screw 28. The image forming position is adjusted along the position 24b, and the focus adjusting screw 25, the image forming position adjusting screw 28, and the tilt adjusting screw 27 are tightened and loosened to cause the eccentric rotation of the tilt adjusting member 26 about the focus adjusting screw 25. The effect described above can be obtained by adjusting the tilt position.
[0071]
In the above-described embodiment, the imaging lens array F has two imaging lens units F1 and F2, and the light receiving element group P has the light receiving elements P1 and P2, which is a reference. Although the other light-receiving element P1 is positioned with respect to the light-receiving element P2, a configuration in which the imaging lens array F has a plurality of imaging lens portions and a plurality of light-receiving element groups correspondingly. Good. In this case, the reference light receiving element (P2) is positioned by the same configuration as described above, and the other light receiving elements (P1) may be provided with the positioning mechanism.
[0072]
【The invention's effect】
As described above, the displacement measuring device according to the present invention includes the tilt adjusting member that is eccentrically rotated by the tilt adjusting screw in one of the pair of focus adjusting slots and the pair of imaging position adjusting slots provided in the adjusting plate. Provided. When adjusting the focus position or the image forming position of the light receiving element, the tilt adjusting member is involved in the movement along the focus adjusting long hole or the image forming position adjusting long hole. When adjusting the tilt position (displacement detection sensitivity) of the light receiving element, the tilt position of the light receiving element is adjusted by eccentric rotation of the tilt adjusting member. As a result, the adjusted tilt position of the light receiving element does not deviate due to the adjustment of the other focal positions and the image forming positions, so that one of the three types of adjustment is determined. Therefore, each positioning adjustment of the light receiving element can be easily and accurately performed.
[Brief description of the drawings]
FIG. 1A is a diagram showing a positioning mechanism according to a displacement measuring device of the present invention.
(B) Side view in FIG. 1 (a).
FIG. 2A illustrates another positioning mechanism.
(B) Side view in FIG.
FIG. 3A illustrates another positioning mechanism.
(B) Side view in FIG.
FIG. 4A illustrates another positioning mechanism.
(B) Side view in FIG.
FIG. 5 is a perspective view showing a displacement measuring device.
FIGS. 6A to 6E are top views showing imaging points corresponding to scanning of irradiation points by a light receiving unit.
FIGS. 7A and 7B are side views showing imaging points corresponding to irradiation points on the light receiving unit.
FIG. 8 is a diagram showing an operation in the vicinity of a boundary between continuous imaging lens units.
FIG. 9 is a diagram illustrating an operation in the vicinity of a boundary between continuous imaging lens units.
FIG. 10 is a diagram showing an operation in the vicinity of a boundary between continuous imaging lens units.
FIG. 11 is a side view in FIG. 5;
FIG. 12A shows a conventional positioning mechanism.
(B) is a side view in FIG. 12 (a).
[Explanation of symbols]
10a: measurement target surface, 20: mounting plate, 21: plate body, 21a: loose insertion hole, 22: adjustment plate, 23a, 23b: focus adjustment slot, 24a, 24b: imaging position adjustment slot, 25: focus Adjusting screw, 26: tilt adjusting member, 27: tilt adjusting screw, 28: imaging position adjusting screw, F: imaging lens array, F1, F2: imaging lens unit, P: light receiving element group, P1, P2: light receiving Element, P1a, P2a ... light receiving surface.

Claims

The measurement target surface (10a) is irradiated with irradiation light, the reflected light is converged by the imaging lens unit (F1), and the detection position of an imaging point formed on the light receiving surface (P1a) of the light receiving element (P1). In a displacement measurement device that measures the displacement amount of the measurement target surface in a non-contact manner based on
A mounting plate (20) to which the light receiving element is fixed;
An immobile plate (21) having one surface disposed in contact with the surface of the mounting plate opposite to the surface on which the light receiving element is fixed, and having a play insertion hole (21a) formed therein;
A pair of focus adjustment slots (23a, 23b) in contact with the other surface of the plate and parallel to the optical axis, and a pair of imaging position adjustment slots (23a and 23b) arranged in parallel with the light receiving surface of the light receiving element. An adjustment plate (22) having 24a, 24b);
A focus adjustment screw (25) screwed to the plate via one of the focus adjustment slots;
An inclination adjusting member (26), which has a cylindrical shape inserted into the other of the focus adjustment slots and is attached to the plate via an inclination adjusting screw (27) screwed into an eccentric position;
An imaging position adjusting screw (28) that is inserted into the play insertion hole through the imaging position adjusting slot and screwed to the mounting plate;
Comprising a positioning mechanism comprising: adjusting the focal position of the light receiving element along each of the focus adjustment slots, adjusting the imaging position of the light receiving element along each of the imaging position adjustment slots, A displacement measuring device for adjusting a tilt position of the light receiving element in accordance with eccentric rotation of a tilt adjusting member about the focus adjusting screw.

The measurement target surface (10a) is irradiated with irradiation light, the reflected light is converged by the imaging lens unit (F1), and the detection position of an imaging point formed on the light receiving surface (P1a) of the light receiving element (P1). In a displacement measurement device that measures the displacement amount of the measurement target surface in a non-contact manner based on
A mounting plate (20) to which the light receiving element is fixed;
An immobile plate (21) having one surface disposed in contact with the surface of the mounting plate opposite to the surface on which the light receiving element is fixed, and having a play insertion hole (21a) formed therein;
A pair of focus adjustment slots (23a, 23b) in contact with the other surface of the plate and parallel to the optical axis, and a pair of imaging position adjustment slots (23a and 23b) arranged in parallel with the light receiving surface of the light receiving element. An adjustment plate (22) having 24a, 24b);
A focus adjusting screw (25) screwed to the plate via the focus adjusting slot;
A tilt adjusting member which has a cylindrical shape inserted into the other one of the imaging position adjusting slots and is inserted into the loose insertion hole via a tilt adjusting screw (27) screwed to an eccentric position and attached to the mounting plate; (26)
An imaging position adjusting screw (28) that is inserted into the play insertion hole through one of the imaging position adjusting slots and screwed to the mounting plate;
Comprising a positioning mechanism comprising: adjusting the focal position of the light receiving element along each of the focus adjustment slots, adjusting the imaging position of the light receiving element along each of the imaging position adjustment slots, A displacement measuring device for adjusting a tilt position of the light receiving element in accordance with an eccentric rotation of a tilt adjusting member around the image forming position adjusting screw.

The measurement target surface (10a) is irradiated with irradiation light, the reflected light is converged by the imaging lens unit (F1), and the detection position of an imaging point formed on the light receiving surface (P1a) of the light receiving element (P1). In a displacement measurement device that measures the displacement amount of the measurement target surface in a non-contact manner based on
A mounting plate (20) to which the light receiving element is fixed;
An immobile plate (21) having one surface disposed in contact with the surface of the mounting plate opposite to the surface on which the light receiving element is fixed, and having a play insertion hole (21a) formed therein;
A pair of focus adjustment slots (23a, 23b) in contact with the other surface of the plate and parallel to the optical axis, and a pair of imaging position adjustment slots (23a and 23b) arranged in parallel with the light receiving surface of the light receiving element. An adjustment plate (22) having 24a, 24b);
A focus adjustment screw (25) inserted through the play insertion hole through one of the focus adjustment slots and screwed to the mounting plate;
A tilt adjusting member (26) which has a cylindrical shape inserted into the other of the focus adjusting slots, is inserted into the play insertion hole via a tilt adjusting screw (27) screwed at an eccentric position, and is attached to the mounting plate. )When,
An imaging position adjusting screw (28) screwed to the plate via the imaging position adjusting slot;
Comprising a positioning mechanism comprising: adjusting the focal position of the light receiving element along each of the focus adjustment slots, adjusting the imaging position of the light receiving element along each of the imaging position adjustment slots, A displacement measuring device for adjusting a tilt position of the light receiving element in accordance with eccentric rotation of a tilt adjusting member about the focus adjusting screw.

The measurement target surface (10a) is irradiated with irradiation light, the reflected light is converged by the imaging lens unit (F1), and the detection position of an imaging point formed on the light receiving surface (P1a) of the light receiving element (P1). In a displacement measurement device that measures the displacement amount of the measurement target surface in a non-contact manner based on
A mounting plate (20) to which the light receiving element is fixed;
An immobile plate (21) having one surface disposed in contact with the surface of the mounting plate opposite to the surface on which the light receiving element is fixed, and having a play insertion hole (21a) formed therein;
A pair of focus adjustment slots (23a, 23b) in contact with the other surface of the plate and parallel to the optical axis, and a pair of imaging position adjustment slots (23a and 23b) arranged in parallel with the light receiving surface of the light receiving element. An adjustment plate (22) having 24a, 24b);
A focus adjusting screw (25) that is inserted into the play insertion hole through the focus adjusting slot and screwed to the mounting plate;
A tilt adjusting member (26) having a columnar shape inserted into the other one of the image forming position adjusting slots and attached to the plate via a tilt adjusting screw (27) screwed into an eccentric position;
An imaging position adjusting screw (28) screwed to the plate via one of the imaging position adjusting slots;
Comprising a positioning mechanism comprising: adjusting the focal position of the light receiving element along each of the focus adjustment slots, adjusting the imaging position of the light receiving element along each of the imaging position adjustment slots, A displacement measuring device for adjusting a tilt position of the light receiving element in accordance with an eccentric rotation of a tilt adjusting member around the image forming position adjusting screw.

An imaging lens array (F) in which a plurality of imaging lens units (F1, F2) are continuously provided;
A light-receiving element group (P) provided with a plurality of light-receiving elements (P1, P2) so as to correspond to the respective imaging lens units;
A focus position adjustment unit that moves the imaging lens array in the optical axis direction and adjusts a focus position on one light receiving element (P2) serving as a reference for the light receiving element group;
An imaging position adjustment unit that moves the reference light receiving element along the light receiving surface (P2a) and adjusts an imaging position applied to the reference light receiving element;
The tilt adjustment member (26) is eccentrically rotated by the positioning mechanism so that the displacement detection sensitivity applied to the other light receiving element (P1) of the reference light receiving element matches the displacement detection sensitivity of the reference light receiving element. The displacement measuring device according to any one of claims 1 to 4, wherein the displacement is measured.