JP3599757B2 - Storage equipment with clean equipment - Google Patents

Description

[0001]
[Industrial applications]
The present invention relates to a storage facility with a clean device that is used for storing products that extremely dislike dust, such as semiconductors.
[0002]
[Prior art]
Conventionally, as this type of storage equipment with a clean device, as disclosed in Japanese Patent Application Laid-Open No. 3-284505, for example, a filter is provided on the rear side of a storage part having an open front and rear face, It is known that an air supply path is formed at the rear, a discharge unit is provided at the lower end side of the air supply path, a fan is provided, and a drive unit of the fan is provided with a control unit.
[0003]
[Problems to be solved by the invention]
In the conventional storage facility with a clean device, since the air supply path behind the filter can secure a sufficient space, the control unit is provided on the driving device or the back of the filter so that the wind speed on the filter surface can be reduced throughout the storage unit. It could be kept almost constant throughout.
However, as the size of the semiconductor wafers and the like stored in the storage unit becomes larger, the storage unit becomes larger, so that the width of the air supply path including the filter is reduced without changing the size of the entire apparatus due to a demand for space saving. Tend to design. For this reason, there has been a problem that the air does not have a uniform pressure in the air supply path, and the pressure increases as it goes upward, so that the wind speed increases and the airflow distribution becomes uneven.
The present invention is the solve the conventional disadvantages, and an object thereof is to provide a clean system with storage facility capable devices a uniform housing section entire airflow distribution without a large child.
[0004]
[Means for Solving the Problems]
The storage facility with a clean device of the present invention, in order to achieve the object, a plurality of storage spaces are formed in the vertical direction , and a work space is formed on the front side of the storage unit having an open front and rear surface , the filter is disposed on the rear side, the rear of the filter to form the air supply passage extending in the vertical direction, further, on one end side of the vertical direction of the air supply passage is directed toward the discharge portion to the air supply path side the fan communicates at the discharge portion, the air from the fan is to be blown out toward the other end from the one end of the air supply passage to circulate and supply clean air to the accommodating portion by the fan in the clean unit with storage facilities as the air supply passage to be communicated with the air supply passage through the buffer chamber provided on the opposite side to the communicating side of the fan provided in the ceiling portion, it is formed in the ceiling portion A supply path is provided with a filter for blowing air downward toward the working space, a flow path cross-sectional area of the buffer chamber is larger than a flow path cross-sectional area of the air supply path extending in the up-down direction, and the ceiling The flow path cross-sectional area of the air supply passage formed in the portion is made larger .
Further, said buffer chamber is provided in the one end side of the air supply passage, Rukoto communicates the air supply passage and the fan via the buffer chamber is preferred.
Also, the fan of the housing part in the clean unit with storage facility according to claim 1 or 2 formed by opposed pair of left and right through a working space formed in front, the lower end of the air supply passage together so as to communicate the air supply passage through the buffer chamber provided at the upper end of the two left and right said communicated to both the air supply passage, and, substantially in the ceiling portion of the air supply passage extending in the horizontal direction provided in the center, it is further more preferable to provide a filter for blowing air downward toward the work space in the air supply passage formed in the ceiling portion.
[0005]
[Action]
In the conventional storage facility with a clean device, the air supplied from the lower fan collides with the upper end wall of the air supply path and returns and is blown out from the upper filter surface to the storage section as it is, so that the wind speed of the upper filter increases. However, in the storage facility with the clean device of the present invention, the buffer chamber communicates with the air supply path, so that the air pressure is relieved in the buffer chamber, and the air supply path and the buffer chamber become one container, so that the upper and lower parts are formed. A uniform air pressure is applied to the filter surface. As a result, variations in the wind speed of the upper and lower filters are suppressed.
In addition, in the conventional storage equipment with a clean device, since the discharge portion of the fan is directly connected to the air supply path, high air pressure is applied to the upper filter by the return air pressure of the upper end wall, and lower air is applied to the lower filter. Pressure will be applied. Therefore, uneven air pressure is applied to the upper and lower filters, causing a variation in wind speed. However, if a buffer chamber is also provided on the communication side of the fan in the air supply path, the air blown out from the discharge section of the fan is alleviated by the buffer chamber and then supplied to the air supply path. The pressure can be increased, and as a result, the variation in the wind speed in the vertical direction can be further suppressed by the synergistic effect with the effect of suppressing the variation in the wind speed of the filter by the buffer chamber.
Further, an air supply path communicated with the air supply path via a buffer chamber provided on the side opposite to the communication side of the fan is provided on the ceiling, and the air supply path formed on the ceiling is provided on the front surface of the storage section. If a filter that blows air is provided in the work space on the side, air supplied from the fan passes from the lower buffer chamber through the air supply path, upper buffer chamber, and upper air supply path, and from the filter on the ceiling to the front side of the storage section. Blown out into the work space. For this reason, the space which becomes the pressure chamber as a whole can be widened and the pressure can be relieved, so that the air does not collide with the wall and the wind speed is increased only in the vicinity of the part, and the air is uniformly distributed throughout the buffer chamber and the air supply path. By setting the pressure, the variation in the ejection speed from the filter can be suppressed more reliably.
[0006]
【Example】
Hereinafter, an embodiment of a storage facility with a clean device according to the present invention will be described with reference to the drawings.
The illustrated storage facility with a clean device is configured as a closed storage device used in a clean room, and a storage section in which a plurality of storage spaces 2 are vertically formed in a box-shaped main body 1. 3 are provided so as to face each other via a work space 4 on the front side. The storage unit 3 has a front surface 3a and a rear surface 3b which are open. A plurality of filters 5 are provided over the entire rear surface 3b, and an air supply path 6 is formed behind the filters 5; The upper buffer chamber 7 is communicated with the upper part of the table.
[0007]
Further, below the air supply passage 6, a compartment 10 accommodating a fan 9 is communicated via a lower buffer chamber 8, and the fan 9 communicates a discharge portion 9a thereof with the lower buffer chamber 8 and a suction portion thereof. 9b was opened into the compartment 10. Pre-filters 11 and 12 are provided on the working space 4 side and the clean room 30 side of the compartment 10, respectively, and air blown into the working space 4 through the storage unit 3 via these pre-filters 11 and 12 is provided. The air in the clean room 30 was sucked into the compartment 10. The pre-filters 11 and 12 may be provided on the lower surface of the compartment 10.
[0008]
A filter 14 is provided on the ceiling 13 of the work space 4 and a ceiling air supply path 15 is formed above the filter 14, and the air supply path 15 also communicates with the buffer chamber 7.
[0009]
Although not shown, an automatic transfer device is generally installed in the work space 4 so that articles stored in the storage section 3 can be automatically loaded and unloaded.
[0010]
Next, the operation of the storage facility with the clean device will be described.
The air supplied by driving the fan 9 passes through the lower buffer chamber 8, the air supply path 6 on the back of the storage unit 3, the upper buffer chamber 7, the air supply path 15 on the ceiling, and the filter 14, and enters the working space 4. Two air flows are generated: an air flow to be circulated, and an air flow to be circulated from the air supply path 6 on the back of the storage section 3 to the filter 5 and the storage section 3 into the working space 4.
In the case of the present embodiment, the air supplied by the fan 9 is temporarily alleviated in the lower buffer chamber 8 and then supplied to the air supply passage 6, so that the air pressure of the lower filter 5 can be increased, and the air is further increased. As a result, the variation in the wind speed of the upper and lower filters 5 can be extremely small. Further, since the air supply passage 15 is also formed in the ceiling portion 13 to form a pressure chamber, a space for the pressure chamber can be widened and the pressure can be further alleviated, so that the air collides with the wall. Then, the air pressure is increased only in the vicinity of the portion, and the wind speed is not increased. The static pressure is equalized over the entire buffer chambers 7, 8 and the air supply paths 6, 15 so that the air blows out from the filter 5. Variations in wind speed are further reduced.
[0011]
In the conventional storage facility with a clean device without a buffer chamber, the wind speed of the upper filter and the wind speed of the lower filter showed a variation of about 1.5 to 1.9 times. In this case, when the fan was driven such that the average wind speed was 0.3 to 0.4 m / s, the variation between the wind speed of the upper filter and the wind speed of the lower filter was 1.2 times or less.
[0012]
Although the control unit is not particularly provided in the drive unit of the fan in the above-described embodiment, it goes without saying that the control unit may be provided in the drive unit of the fan in the storage facility with the clean device of the present invention.
[0013]
【The invention's effect】
Thus, according to the storage facility with a clean device of the present invention, it is possible to supply clean air from the filter surface of the storage device with a clean device with less variation in wind speed distribution without using a special control device. In addition, it is possible to cope with an increase in the size of the storage unit while maintaining the same space as in the related art without increasing the size of the main body device, thereby saving space. Furthermore, if the storage unit has the same size as that of the related art, the main unit can be downsized or a large work space can be secured, so that the space can be effectively used by saving space.
[Brief description of the drawings]
FIG. 1 is a vertical longitudinal sectional view of an embodiment of a storage facility with a clean device of the present invention.
DESCRIPTION OF SYMBOLS 1 Main body 3 Storage part 3a Front surface 3b Rear surface 4 Work space 5 Filter 6 Air supply path 7 Upper buffer room 8 Lower buffer room 9 Fan 13 Ceiling part 14 Filter 15 Ceiling part air supply path 30 Clean room

Claims (3)

A plurality of storage space is partitioned and formed in the vertical direction, and to form a working space on the front side of the housing part the front and rear surfaces are opened, the filter is disposed on the rear side, vertically to the rear of the filter the air supply passage is formed extending further above the one end side in the vertical direction of the air supply passage communicating the fan with its discharge portion to the air supply path side in the discharge portion, the air is said from the fan so as to be blown out toward the other end from the one end side of the air supply passage, at the clean unit with storage facilities so as to circulate supplying clean air to said housing part by the fan, opposite to the communicating side of the fan An air supply passage communicating with the air supply passage through a buffer chamber provided on the side of the ceiling, and a filter that blows air downward toward the work space into the air supply passage formed in the ceiling portion Provided, the flow path cross-sectional area of the buffer chamber is greater than the flow path cross-sectional area of the air supply passage extending in the vertical direction and is larger than the flow path cross-sectional area of the air supply passage formed in the ceiling portion A storage facility with a clean device, characterized in that: Said buffer chamber is provided in the one end side of the air supply passage, the clean unit with storage facility according to claim 1, characterized in that communicated the air supply path and the fan via the buffer chamber. In the clean unit with storage facility according to the storage section to claim 1 or 2 formed by opposed pair of left and right through a working space formed in front, communicating the fan at the lower end of the air supply passage together so as to, said communicated to both the air supply channel two left and right of the air supply passage through the buffer chamber provided at the upper end of, and, the air supply passage extending in the horizontal direction substantially in the center of the ceiling portion A storage facility with a clean device, further comprising a filter for blowing air downward toward the work space in an air supply path formed in the ceiling.

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