JP3617159B2 - Inspection device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an inspection apparatus suitable for use in an unmanned transfer system in an assembly / manufacturing factory of a machine or the like, a clean room for semiconductor manufacturing, a hospital, an office, or the like.
[0002]
[Prior art]
Conventionally, unmanned transport systems that perform unattended transport of objects using an automatic guided vehicle (AGV) or a mobile robot are known. In addition to assembly / manufacturing factories of machines, semiconductor clean rooms, hospitals, offices, etc. Has also been widely introduced.
FIG. 7 is a perspective view showing an example of such an unmanned conveyance system. In FIG. 7, the mobile robot M receives a cassette containing semiconductor wafers from the semiconductor manufacturing apparatus S by the robot arm A, and then transports the cassette to the cassette stocker T. The cassette stocker T receives the cassette from the mobile robot M, temporarily stores it, or transfers it to the inter-process transfer linear motor type transfer system R and sends it to the next process (not shown).
[0003]
[Problems to be solved by the invention]
By the way, when introducing the above-mentioned unmanned conveyance system, usually, a trial run is performed before the full-scale introduction, and if there is no abnormality, it is delivered to the customer. It is necessary to investigate the cause and take appropriate measures such as program changes. However, conventionally, in the trial operation of such an unmanned conveyance system, the cause of the abnormality has been analyzed afterwards, so the cause could not always be accurately identified.
[0004]
For example, the mobile robot M is provided with an obstacle sensor (not shown) composed of a tape-like switch on the back surface of the bumper B for the purpose of detecting contact with an obstacle. When contact with an object is detected, the following causes are considered, and it is difficult to specify any of them.
1) There was an obstacle on the road, and an abnormality was detected from the obstacle sensor because of contact with the obstacle. In this case, the obstacle sensor has fulfilled its original function.
2) An abnormality was detected because the worker accidentally touched bumper B. In this case, the obstacle sensor performs its original function, but when the worker leaves the place without reporting the fact, the obstacle sensor malfunctions even though there is no obstacle. It is regarded as a thing.
[0005]
The mobile robot M is provided with a pressure sensor (not shown) at a predetermined location for the purpose of detecting the handling abnormality of the robot arm A. The following causes are considered for the handling abnormality. And its identification is difficult.
1) Since a positioning error occurred when receiving a cassette from the semiconductor manufacturing apparatus S due to a malfunction of the mobile robot M, handling became unreasonable, an excessive force was applied, and a handling abnormality was detected. In this case, the handling abnormality of the mobile robot M is correctly detected.
2) The cassette was not delivered due to a malfunction of the semiconductor manufacturing apparatus S, or the position where the cassette was delivered was shifted, so that the mobile robot M could not receive the cassette well, causing unreasonable handling, and handling abnormality was detected. In this case, although the mobile robot M is not malfunctioning, it is regarded as a handling abnormality of the mobile robot M.
[0006]
As described above, conventionally, in the trial operation of the unmanned conveyance system, even if any abnormality is detected by the sensor, the cause cannot always be specified, so what is the operation before and after the time when the abnormality is expected to occur? I had to reproduce it and analyze the cause. For this reason, investigating the cause required a lot of time and labor, and the cause could often not be identified.
[0007]
The present invention has such a was made under the background, and its object is to provide an inspection apparatus capable of specifying the commissioning at definitive anomaly cause of the unmanned conveying device quickly and reliably.
[0008]
[Means for Solving the Problems]
In order to solve the above-described problem, the invention described in claim 1 is an unmanned conveyance apparatus including detection means for detecting an abnormal state occurring at a predetermined location of an inspection target , which is used in a trial operation of the unmanned conveyance system. An inspection device connected to
Imaging means for imaging the inspection object and its vicinity;
Image storage means for storing images picked up by the image pickup means in time series;
Based on a detection signal generated when the detection means detects the abnormal state, an image reproduction means for reading out the stored image of the image storage means from a storage position that is a predetermined time back from the detection time and reproducing it. It is characterized by having.
[0009]
The invention according to claim 2 is the inspection apparatus according to claim 1,
While installing the wireless transmission means together with the imaging means in the unmanned conveyance device, the wireless reception means is installed on the ground side together with the image storage means and the image reproduction means,
Thus, the wireless transmission unit and the wireless reception unit exchange the image captured by the imaging unit and the detection signal generated by the detection unit by wireless communication .
[0010]
The invention described in claim 3 is the inspection apparatus according to claim 1,
The image storage means is constituted by a portable storage medium,
While setting the writing means for the storage medium together with the image pickup means in the automatic transport device, the reading means for the storage medium together with the image reproduction means is installed on the ground side,
As a result, the information of the stored image is conveyed through the storage medium.
The invention according to claim 4 is the inspection apparatus according to claim 1,
Storage control means for storing images picked up by the image pickup means in order from the start address in the image storage means, and storing the images while overwriting again in order from the start address when reaching the final address; ,
A storage stop unit that stops storage of an image by the storage control unit when the detection unit detects the abnormal state;
When the image reproduction means is instructed to reproduce the image, the image reproduction means specifies an address that is traced by a predetermined time from the address at which the storage stop means has stopped the image storage, and the image reproduction means sequentially from the address. Read the stored image in the storage means and play it back
It is characterized by that.
[0011]
(Function)
According to the first aspect of the present invention, the image pickup means picks up the inspection object and its vicinity, the image storage means stores the images picked up by the image pickup means in time series, and the image reproduction means has an abnormality in the detection means. Based on the detection signal generated when the state is detected, the stored image stored in the image storage means is read out from the storage position that is a predetermined time before the detection time and reproduced. Thereby, the progress until the abnormality of the inspection object is detected by the detection unit can be reproduced as an image.
[0012]
According to the second aspect of the present invention, since the image picked up by the image pickup means and the detection signal generated by the detection means can be transmitted to the ground side by radio, the recording / reproduction of a video tape recorder, a monitor, etc. By installing the equipment on the ground side, it is possible to simplify the equipment on the unmanned transfer device side.
[0013]
According to the invention described in claim 3, since the information of the recorded image can be transported to the ground side via a portable storage medium, a reproduction facility such as a monitor is installed on the ground side, It is possible to simplify the facilities on the side.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
A: Configuration of Embodiment FIG. 1 is a perspective view showing an external configuration of an embodiment of the present invention. In this figure, parts that are the same as those shown in FIG.
In Figure 1, 1 is a monitoring equipment for the purpose mainly of inspection according to the present invention, are respectively installed on the pivot portion of the front top and the robot arm A of the robot M. The monitoring device 1 images the bumper B and the vicinity thereof from above, and the monitoring device 2 rotates with the robot arm A and images the work area of the robot arm A.
[0015]
FIG. 2 is a block diagram showing an electrical configuration of the monitoring apparatus 1 according to the present invention. Note that the monitoring device 1 and the monitoring device 2 have the same configuration except that the installation positions are different, so that the description of the monitoring device 1 also serves as an explanation of both the devices 1 and 2.
[0016]
In FIG. 2, the monitoring camera 11 images the bumper B and its vicinity from above, and outputs the input image as an analog image signal. The control unit 12 includes a CPU, a memory, a timer, an A / D converter, a D / A converter, and the like, and controls image recording and reproduction. That is, the control unit 12 converts an analog image signal output from the monitoring camera 11 at the time of image recording into digital image data, writes the digital image data in the image recording unit 13, and from the image recording unit 13 at the time of image reproduction. Data is read out, converted into an analog signal, and output to the monitor 14.
[0017]
In addition, the control unit 12 is connected to an obstacle sensor provided in the bumper B of the mobile robot M (however, in the case of the monitoring device 2, a pressure sensitive sensor provided in the robot arm A). The control unit 12 stops the image recording operation in accordance with the output of the sensor, and writes the image data write address at that time, date and time information obtained by referring to the timer (hereinafter referred to as date information), and Is recorded in a predetermined area of the image recording unit 13.
[0018]
The image recording unit 13 is configured by an EEPROM (Electrically Erasable Programmable Read Only Memory) or the like, and stores the image data supplied from the control unit 3 during image recording as described above. For example, as shown in FIG. 3, the image recording unit 4 is configured to record data cyclically. When the write address advances to the final address “N”, the image recording unit 4 returns to the top address “0” again, and the image is endless. Data is recorded.
[0019]
The monitor 14 reproduces the recorded image based on the image signal supplied from the control unit 3 during image reproduction. The monitor 14 is used by being connected to the monitoring device 1 only during image reproduction, and is disconnected from the monitoring device 1 during image recording. In addition, the monitoring device 1 itself is configured to be detachable from the mobile robot M, and at the time of image reproduction, after the monitoring device 1 is detached from the mobile robot M, reproduction is performed by connecting the monitor 14.
[0020]
B: Operation of Embodiment Hereinafter, the operation of the embodiment will be described separately when recording an image and when reproducing an image.
(1) Operation at the time of image recording First, before starting the trial operation of the unmanned conveyance system, the monitoring devices 1 and 2 separated from the monitor 14 are respectively installed on the front upper part of the mobile robot M and the turning part of the robot arm A ( (See FIG. 1).
[0021]
Then, image recording by each of the monitoring devices 1 and 2 is started together with the start of the test operation of the system. Thereafter, the monitoring device 1 installed in the upper front part of the mobile robot M records the state of the bumper B and its vicinity, and the monitoring device 2 installed in the turning part of the robot arm A is turning with the robot arm A. Record the status of the work area.
[0022]
When the operator touches the bumper B by mistake while recording is performed in this way, the obstacle sensor provided in the bumper B detects contact, and the detection signal is supplied to the control unit 12. In response to this detection signal, the control unit 12 stops the image recording operation and records the image data writing address and date / time information at this time in the image recording unit 13.
[0023]
On the other hand, when the robot arm A goes to the cassette stage ST of the apparatus S to pick up the cassette, but the apparatus S cannot receive the cassette because of a malfunction such as not placing the cassette at a predetermined position of the cassette stage ST, this is the case. An abnormal handling of arm A is detected by the pressure sensor. In response to the detection signal at this time, the monitoring device 2 stops the image recording operation so far and records the image data write address and date / time information in the image recording unit 13 as in the case of the monitoring device 1.
[0024]
(2) Operation at the time of image reproduction At the time of image reproduction after the above-described recording operation is completed, after the monitoring devices 1 and 2 are detached from the mobile robot M, the monitor 14 is connected to each. Then, when “reproduction” is instructed to each of the monitoring devices 1 and 2, the recorded image of the image recording unit 13 is reproduced from an address that is back by a predetermined time from the address recorded when the abnormality is detected. In other words, it is possible to reproduce as an image the progress from when the abnormality is detected to the time when the abnormality is detected by a predetermined time before the time when the abnormality is detected.
[0025]
At this time, the date and time information recorded at the time of detecting the abnormality is displayed on the monitor 14 together with the image at the time of detecting the abnormality. For example, a replay image by the monitoring device 1 when the worker contacts the mobile robot M is displayed as shown in FIG. 4A, and the robot arm A cannot receive the cassette because the device S malfunctions. The reproduced image by the monitoring device 2 is displayed as shown in FIG.
[0026]
C: Summary As described above, according to the present embodiment, a predetermined area to be monitored is imaged and recorded in a trial operation of the system, and an abnormal state is detected by a sensor installed on the monitoring target. Then, the image recording position and date / time at that time are recorded. At the time of image reproduction, the image is reproduced from a recording position that corresponds to a predetermined time from the image recording position at the time of abnormality detection, and the date and time at the time of abnormality detection is displayed. As a result, the progress until the occurrence of the abnormality can be reproduced as an image, and the time of occurrence of the abnormality can be specified.
[0027]
D: Modification (1) If the capacity of the image recording medium is sufficiently large and the recording time is sufficient, the recording operation is not stopped when an abnormality is detected as in the above embodiment, but continuously. It is also possible to record and handle multiple occurrences of abnormalities. Further, in order to increase the recordable time, the sampling period may be increased and the image may be sampled and recorded every predetermined time.
[0028]
(2) In the above embodiment, the digital image recording unit 13 is used to record an image. However, the present invention is not limited to this, and an analog image recording device such as a video tape recorder may be employed. In this case, the recording may be stopped in response to the occurrence of an abnormality, and the recording / reproduction may be performed simply by rewinding or inputting a cue signal. Also, use the so-called auto-reverse function, or use two tape recorders to switch to the other when recording is completed, and rewind the tape that has been recorded during that time, and endlessly record. A plurality of records may be recorded.
[0029]
(3) The monitoring devices 1 and 2 are not limited to the configuration shown in FIG. 2. For example, as shown in FIG. 5, the monitoring camera 11 and the wireless transmitter TD are installed on the mobile robot M. In addition, the receiver RD, the control unit 12, the image recording unit 13, and the monitor 14 may be installed so that the recorded image can be transmitted and received wirelessly. In this case, the output signal of the sensor that detects the abnormality is also transmitted and received wirelessly.
[0030]
(4) In addition, as shown in FIG. 6, the monitoring devices 1 and 2 have a monitoring camera 11 and an IC card writer 101 installed on the mobile robot M, while an IC card reader 102 and a reproduction control unit 12 ′ are installed on the ground side. The monitor 14 may be installed. In this case, the recorded image, the image writing address at the time of abnormality detection, and the date and time are recorded on the IC card 102 and conveyed to the ground side through this.
(5) In addition to the IC card, other portable image recording media such as a video disk can be used.
(6) Furthermore, the monitoring devices 1 and 2 according to the present invention can be used not only during the trial operation of the system but also during normal operation.
[0031]
【The invention's effect】
As described above, according to the present invention, since the progress until the abnormality of the monitoring target is detected by the detection unit can be reproduced as an image, the cause of the abnormality can be easily generated during the trial operation of the unmanned conveyance device. And can be identified accurately.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an external configuration of an embodiment of the present invention.
FIG. 2 is a block diagram showing an electrical configuration of a monitoring apparatus according to the present invention.
FIG. 3 is a conceptual diagram illustrating an example of an image recording unit of the monitoring apparatus.
FIG. 4 is a diagram showing an example of a reproduction image by the monitoring apparatus.
FIG. 5 is a block diagram showing a modification example of the monitoring apparatus.
FIG. 6 is a block diagram showing another modification of the monitoring apparatus.
FIG. 7 is a perspective view showing a configuration example of a conventional unmanned conveyance system.
[Explanation of symbols]
1, 2 Monitoring device 11 Monitoring camera (imaging means)
12 Control unit (image reproduction means)
13 Image recording unit (image storage means)
14 Monitor (image playback means)

Claims (4)

An inspection apparatus that is used in a trial operation of an unmanned conveyance system and is connected to an unmanned conveyance apparatus including a detection unit that detects an abnormal state that occurs in a predetermined location of an inspection target.
Imaging means for imaging the inspection object and its vicinity;
Image storage means for storing images picked up by the image pickup means in time series;
Based on a detection signal generated when the detection means detects the abnormal state, an image reproduction means for reading out the stored image of the image storage means from a storage position that is a predetermined time back from the detection time and reproducing it. An inspection apparatus comprising the inspection apparatus. The inspection apparatus according to claim 1,
While installing the wireless transmission means together with the imaging means in the unmanned conveyance device, the wireless reception means is installed on the ground side together with the image storage means and the image reproduction means,
Thus, an inspection apparatus characterized in that an image captured by the imaging means and a detection signal generated by the detection means are exchanged between the wireless transmission means and the wireless reception means by wireless communication . The inspection apparatus according to claim 1,
The image storage means is constituted by a portable storage medium,
While setting the writing means for the storage medium together with the image pickup means in the automatic transport device, the reading means for the storage medium together with the image reproduction means is installed on the ground side,
Thereby, the inspection apparatus characterized by information stored images via the storage medium is conveyed. The inspection apparatus according to claim 1,
Storage control means for storing images picked up by the image pickup means in order from the start address in the image storage means, and storing the images while overwriting again in order from the start address when reaching the final address; ,
A storage stop unit that stops storage of an image by the storage control unit when the detection unit detects the abnormal state;
When the image reproduction means is instructed to reproduce the image, the image reproduction means specifies an address that is back by a predetermined time from the address at which the storage stop means has stopped the image storage, and the image reproduction means sequentially from the address. Read the stored image in the storage means and play it back
Inspection apparatus characterized by that.

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