JP3673591B2 - Exhaust system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an exhaust device for a vacuum vessel, a vacuum tube to which the exhaust device is applied, and a flat image display device.
[0002]
[Prior art]
Conventionally, vacuumed apparatuses are used in various fields. The flat image display device is one of them. First, this display device will be described. Flat-panel image display devices include plasma display, EL display devices, and flat-panel image display devices using electron beams. The demand for larger screens and higher definition is increasing, and more self-luminous flat-panel image displays. There is a growing need for equipment. Image display devices that excite phosphors mainly to emit light, such as display devices using fluorescent display tubes, field emission (FE) and surface conduction electron-emitting devices as image forming devices, are flat and bright and easy to see Therefore, it is actively applied and expected in the industry.
[0003]
Various types of thin image display devices have been proposed that use a surface conduction type element as an electron beam source, accelerate the electron beam, irradiate the phosphor, emit light, and display an image (for example, Japanese Patent Laid-Open No. 3-261024). .
[0004]
6 and 7 are a perspective view and a cross-sectional view of an example of the image display device, respectively. 6 and 7, 300 is an exhaust pipe for exhausting the inside of the image display device (shown in the figure after sealing), 301 is a rear plate made of blue plate glass constituting an electron-emitting device, 302 and 303 are electrodes arranged at a certain interval, 304 is a thin film including an electron emission portion provided between the electrodes 302 and 303, and 308 is made of blue plate glass on which a metal back 309 and a phosphor 310 are formed. A festival plate, 311 is an outer frame, and 314 is a getter material container. The getter material container 314 is fixed to a getter material container fixing jig 313, and stores therein a getter material for the purpose of maintaining a vacuum in the panel. The evaporable getter material is a face plate 308 or a back plate. Vapor deposited on (rear plate) 301.
[0005]
Here, with reference to FIG. 6 and FIG. 7, a manufacturing method for the image display apparatus will be described. The airtight container, which is the main body of the image display device, is evacuated through the exhaust pipe 300 and further degassed by baking, and then a part of the exhaust pipe is heated and melted and sealed (blocked, cut). Finally, the getter material container 314 installed in the hermetic container is heated, and the evaporation type getter material housed in the container is deposited on the face plate 308 or the back plate 301 to complete the image display device.
[0006]
Next, a surface conduction electron-emitting device will be described. As this surface conduction electron-emitting device, an Au thin film is used as a thin film for controlling electron emission [G. Dittmer: “ThinSolis Films”, 9, 317 (1972)], an In ₂ O ₃ / SnO ₂ thin film [M. Hartwell and CG Fonstad: “IEEE Trans. ED Conf.”, 519 (1975)], carbon thin film [Hisa Araki et al .: Vacuum, Vol. 26, No. 1, pp. 22 (1983)] etc. have been reported. ing.
[0007]
As a typical device configuration of these surface conduction electron-emitting devices, the above-described M.P. FIG. 8 shows the element structure of Hartwell. In the figure, reference numeral 501 denotes an insulating substrate. Reference numeral 502 denotes a thin film for forming an electron emission portion, which is formed of a metal oxide thin film formed by sputtering in an H-shaped pattern, and an electron emission portion 503 is formed by energization processing called forming described later. Reference numeral 504 denotes a thin film including an electron emission portion. In the figure, L is set to 0.5 to 1 mm, and W is set to 0.1 mm.
[0008]
Conventionally, in these surface conduction electron-emitting devices, the electron-emitting portion 503 is generally formed in advance on the electron-emitting portion forming thin film 502 by an energization process called forming before electron emission. That is, forming is an electron emission in which a voltage is applied to both ends of the electron emission portion forming thin film 502 to locally destroy, deform, or alter the electron emission portion forming thin film to bring it into an electrically high resistance state. Forming a portion 503. In the electron emission portion 503, a crack is generated in a part of the electron emission portion forming thin film 502, and electrons are emitted from the vicinity of the crack. Hereinafter, the electron emission portion forming thin film 502 including the electron emission portion formed by forming is referred to as a thin film 504 including the electron emission portion. In the surface conduction electron-emitting device subjected to the forming process, a voltage is applied to the thin film 504 including the electron-emitting portion and a current is caused to flow through the device, whereby electrons are emitted from the electron-emitting portion 503.
[0009]
The above-described surface conduction electron-emitting device has an advantage that a large number of devices can be formed over a large area because of its simple structure and easy manufacture. Therefore, various applications are possible by making use of this feature, and it is also suitable for the image display apparatus as described above. That is, in recent years, flat panel display devices using liquid crystals have become popular in place of CRTs, but they are not self-luminous and have problems such as having a backlight and the like, and development of self-luminous display devices. Has been desired. Compared to this, an image display device, which is a display device that combines an electron source with a large number of surface-conduction-type emission elements and a phosphor that emits visible light by electrons emitted from the electron source, is a large-screen device. It is a self-luminous display device that can be manufactured relatively easily and has excellent display quality (for example, USP 5066883).
[0010]
However, the flat display device as described above needs to emit electrons stably and stably from the surface conduction electron-emitting device unit for stable image display. In the surface conduction electron-emitting device part, the electron emission ability of the surface conduction electron-emitting device being driven may decrease due to residual molecules adsorbed on the device surface, and the decrease in the electron emission ability It seems to depend on the amount of molecules adsorbed. Therefore, it is considered that there is a great need for an evacuation means for reducing adsorption residual molecules on the element surface as much as possible. This is considered to occur not only in the surface conduction electron-emitting device described above but also in the field emission electron-emitting device described above.
[0011]
In general, an image display device and other vacuum devices reduce the internal pressure of the container, that is, the residual molecules in the container, through a heating process during evacuation called baking in the evacuation process. A cathode ray tube or the like drives an internal electron gun, irradiates the inside of the container with a high-energy electron beam emitted from the electron gun, and desorbs and exhausts residual molecules on the inside surface of the container by a process called aging. Promoting exhaust. Generally, by increasing the exhaust pipe diameter of the vacuum apparatus, it is possible to reduce the time required for the exhaust process including baking and aging, and to improve the ultimate vacuum.
[0012]
[Problems to be solved by the invention]
However, the exhaust means as described above have the following problems.
(1) The baking process has a higher baking temperature, and the longer the time, the greater the effect. In particular, it is important to increase the baking temperature. For this purpose, baking is performed at a temperature as high as possible in a vacuum tube or a cathode ray tube. However, in some cases, the flat display device cannot be baked at a temperature corresponding to that of a vacuum tube or a blank tube in order to protect the element portion and the wiring portion from thermal damage.
(2) Further, in the aging process, the device is damaged in a considerable amount by driving the device in the presence of a large amount of residual molecules, so that the surface conduction electron-emitting device, the field emission electron-emitting device, etc. The electron emission capability inherent to the electron-emitting device cannot be fully exhibited. The driving of the surface conduction electron-emitting device and the field-emission electron-emitting device of the flat panel display device must be higher in vacuum than in the case of a vacuum tube or a cathode ray tube.
(3) Further, exhaust without these baking and aging steps requires a long time to reach a sufficient pressure in the container and the number of residual molecules, which is not realistic. Considering the structural arrangement of the vacuum device, the strength of the exhaust tube, the sealing process, and the like, it is difficult to significantly increase the diameter of the exhaust tube of the vacuum device.
[0013]
[Means for Solving the Problems]
The inventors of the present invention have come to the present invention as a result of repeated studies to solve various problems in the exhaust means of the flat image display device. The present invention is as follows.
1. In an image display device that requires the internal space to be evacuated , the internal space is provided with a positive electrode and a negative electrode that apply a high electric field for ionizing and accelerating the gas existing in the internal space. When, a built-in and getter, positive electrode and negative electrode, an image display device characterized by accelerated ions are arranged to flow toward the getter surface.
2. 2. The image display device as described in 1 above, wherein the exhaust device has a control electrode for controlling the flow of ions .
3. The positive electrode image display apparatus according to the above 1 or 2, characterized in that provided plural. It is.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
The above-described high-field applying positive electrode and negative electrode are arranged to face each other, the electric field strength between the opposed electrodes is set to 10 ⁷ V / m or more, and molecules adsorbed on the surface of the positive electrode are ionized, The phenomenon of cations and desorption from the electrode surface is observed. This phenomenon has been reported as field desorption [EW Muller: Naturwissenschaften, 29 (1941) 533 et al.], And application to mass spectrometry [MG Ingjram and R. Gomer: J. Chem. Phys., 22 (1954) 1279], as well as industrial ion sources.
[0015]
Ions desorbed from the positive electrode surface are accelerated toward the counter electrode. By appropriately selecting the shape and configuration of the counter electrode, ions can flow without being largely trapped by the counter electrode. Therefore, when the exhaust pipe for exhaust is attached to the container to be evacuated, it is parallel to the axis of the exhaust pipe. It becomes possible to make an ion flow. This ion flow is exhausted while repeating general gas molecules repeatedly colliding with the exhaust pipe wall, but is rectified in the axial direction of the exhaust pipe, so that exhaust can be performed regardless of the conductance of the exhaust pipe.
[0016]
Even if it collides with the tube wall, the kinetic energy obtained between the counter electrodes is significantly larger than the molecular adsorption energy, so that the ion is specularly reflected without being adsorbed and re-emitted on the tube wall surface. It has a high probability of moving and is exhausted with fewer collisions than ordinary gas molecules.
[0017]
As a result, the exhaust speed can be increased even when the conductance of the exhaust pipe is small. In addition, it is possible to shorten the evacuation time, lower the baking temperature, and shorten the baking time in the manufacturing process of a vacuum tube, a cathode ray tube, and the like.
[0018]
In addition to exhaust using the exhaust pipe, it is possible to increase the exhaust speed of the getter by directing the exhaust device of the present invention toward the adsorption surface of the getter portion in the vacuum vessel.
[0019]
In the present invention, the above-mentioned counter electrode is provided in the portion of the vacuum vessel that is connected to the exhaust pipe for evacuation so as to oppose the exhaust portion. It is characterized by making it. The present invention also includes an image display device having a structure for performing this method.
[0020]
Since the above-described exhaust device of the present invention and the image display device equipped with the exhaust device assist the exhaust in the form of an ion flow due to field desorption, it is necessary to perform processes such as baking temperature, aging process, exhaust time, and exhaust pipe diameter. Even if this condition does not satisfy the condition conventionally required, it is possible to sufficiently exhaust the residual molecules in the vacuum apparatus. Since the above conditions are relaxed, it is possible to reduce thermal damage due to baking, prevent damage to elements during the aging process, shorten exhaust time, etc., and extend the life, stability, and characteristics of the image display device. It is possible.
[0021]
Hereinafter, the configuration of the apparatus according to the present invention and the method of using the apparatus according to the present invention will be described in detail with reference to the drawings as an embodiment of exhaust of the image display apparatus.
[0022]
FIG. 1 is a side view of an exhaust device using the field desorption method of the present invention and an image display device incorporating the exhaust device. The above apparatus will be described below with reference to the drawings. In FIG. 1, 101 is a face plate having a phosphor surface 102 and a metal back 103, 104 is an outer frame, 105 is a rear plate on which a surface conduction electron-emitting device 107 is installed, and 108 is an exhaust pipe. 109 is a positive electrode for field desorption and 110 is a negative electrode for field desorption. The electric field detachment type exhaust device is constituted by these two electrodes. The positive electrode 109 needs to have a shape that maximizes the electric field strength of the electric field desorption portion. As the shape of the positive electrode, a needle shape as shown in FIG. 1, a wire shape, a coil shape with a wire, a foil shape, and the like are suitable.
[0023]
The material of the positive electrode 109 is resistant to electron impact, and a material having a high melting point is required. If 109 materials are listed, refractory metals such as W, Pt, Re, Ta, Ir, Os, carbides such as WC, TaC, TiC, SiC, oxides such as Al ₂ O ₃ , BN, BC, etc. Borides, nitrides such as TiN. On the other hand, the opposing negative electrode 110 has a shape in which the collision area becomes as small as possible so that the electric field strength increases and the cation released from the positive electrode 109 collides with the negative electrode 110 and reduces the probability of scattering. There is a need. The material of the negative electrode 110 is the same as that of the positive electrode, and is preferably a material that is resistant to ion bombardment and has a high melting point, and the material used for the positive electrode is used.
[0024]
The positive electrode 109 has a higher potential than the surrounding potential, and the negative electrode 110 is grounded similarly to the surrounding. Therefore, the residual molecules adsorbed on the positive electrode 109 are ionized by the high electric field on the surface of the positive electrode and are accelerated toward the negative electrode 110. The shape of the negative electrode reduces the collision cross section as much as possible, and the cation passes through the exhaust pipe 108 without being trapped by the negative electrode and is exhausted.
[0025]
In normal exhaust, gas molecules passing through the exhaust pipe enter the exhaust pipe entrance surface from all directions as shown in FIG. 5A, and collide with the exhaust pipe wall surface. Gas molecules that collide with the wall lose information about the incident direction and are emitted again according to a certain angular distribution. It exhausts while repeating collision adsorption with this wall surface and re-emission. Therefore, the more the number of collisions with the wall surface, that is, the smaller the exhaust pipe diameter and the longer the exhaust pipe length, the lower the exhaust speed.
[0026]
However, in the above exhaust system of the present invention, as shown in FIG. 5 (b), a cation flow of residual molecules is created along the exhaust pipe axial direction, so that collision with the exhaust pipe wall surface can be reduced and the exhaust speed can be increased. It becomes.
[0027]
The voltage between the electrodes of the exhaust device described above is determined in consideration of the distance between the two electrodes because the exhaust can be performed if the electric field strength between the two electrodes is 10 ⁷ V / m or more. The distance between the electrodes may be any distance as long as the electric field strength can be desorbed in the field, but is preferably within 10 mm in consideration of the arrangement of the apparatus, the voltage between the electrodes, and the positive ions released from the positive electrode being captured by the negative electrode. . Further, since the voltage between the electrodes is also related to the velocity of the field desorption ions, it is desirable to apply the maximum possible voltage in consideration of the arrangement of the apparatus.
[0028]
It is also possible to install a control electrode between the negative electrode and the exhaust pipe to control the displacement and control the flight direction of cations. Any number of control electrodes may be used if necessary. The shape, arrangement, and material of the control electrode are not particularly limited as long as an electric field can be applied and the cation flow can be controlled.
[0029]
Further, as shown in FIG. 4, on the getter surface 113 inside the vacuum tube (when using an evaporable getter, an evaporation surface formed by a getter flash, or when using a non-evaporable getter, the surface of the getter material). On the other hand, when the exhaust device 109 and 110 is operated, the getter surface 113 collides with the getter surface 113 in the form of accelerated ions, so that the probability of adsorption of the getter surface increases and the exhaust speed can be increased.
[0030]
【Example】
The present invention will be specifically described with reference to examples.
[0031]
Example 1
A flat image display device in which the exhaust device of the present invention as shown in FIG. 1 is installed is manufactured, the image display device is pre-evacuated, then baked, and then the exhaust device using the field desorption method is operated. I let you.
[0032]
The flat image display device used a prototype having an internal volume of 220 × 246 × 4 (mm), and the exhaust device of the present invention was installed in the vicinity of the opening of the exhaust pipe 108 of the prototype. The positive electrode 109 of this exhaust device is one needle electrode having a length of 8 mm and a maximum diameter of 0.1 mm. The material is made of tungsten in consideration of the high melting point and the strength, and the tip of the needle electrode is sharpened by sputtering. I tried to concentrate the electric field. The axial direction of the needle electrode was set parallel to the axial direction of the exhaust pipe, and the tip thereof was located on the center line of the exhaust pipe 108. Fixing to the image display device was performed with a Cu jig and led out to the outside with a dumet wire. The negative electrode 110 is a circular metal net with a metal wire diameter of 0.01 mm and a stitch pitch of 0.2 mm. The negative electrode 110 has a diameter of 3 mm and is slightly smaller than the exhaust pipe diameter of 3.5 mm. The metal wire was made of platinum in consideration of ion impact resistance and high melting point. In this embodiment, a surface conduction electron-emitting device is used as the electron-emitting device 107.
[0033]
The closest distance between the positive electrode 109 and the negative electrode 110 was 1 mm, and the voltage between both electrodes was 1500 V from the required electric field strength. The negative electrode 110 was installed at a position 5 mm inside from the exhaust pipe opening to avoid as much as possible an obstacle during preliminary exhaust.
[0034]
In order to confirm the effect of this exhaust device, the exhaust pipe was connected to a vacuum gauge (not shown), and the change during operation of the exhaust device was measured. The exhaust system side vacuum gauge after baking indicated 6 × 10 ⁻⁸ Torr. Almost simultaneously with the operation of the exhaust device, the indicated value of the exhaust system side vacuum gauge became 1.4 × 10 ⁻⁷ Torr, indicating that the residual gas in the image display device was exhausted. After that, when the exhaust system was operated for 4 hours, the indicated value of the exhaust system side vacuum gauge showed 4 × 10 ⁻⁸ Torr. The exhaust device is stopped, the residual gas existing between the image display device and the vacuum gauge is removed, the indicated value of the exhaust system side vacuum gauge shows 8 × 10 ^-9 Torr, and the exhaust system functions sufficiently I confirmed.
[0035]
When the exhaust device was not operated under the same conditions, it took 20 hours to reach 8 × 10 ⁻⁹ Torr, and it was confirmed that the exhaust device was effective in increasing the exhaust speed.
[0036]
When the electron emission amount half-time of the electron-emitting device of the flat panel image display device exhausted using this exhaust device was measured, the average was 1.4 times that of the conventional image display device. The value was obtained and the lifetime of the display device could be greatly extended.
[0037]
Example 2
A flat image display device in which the exhaust device of the present invention as shown in FIG. 2 is installed is manufactured, the image display device is pre-evacuated, then baked, and then the exhaust device using the field desorption method is operated. I let you. In the figure, members having the same functions as those in FIG.
[0038]
The flat image display device used a prototype having an internal volume of 220 × 246 × 4 (mm), and the exhaust device of the present invention was installed in the vicinity of the opening of the exhaust pipe 108 of the prototype. As the positive electrode of the exhaust device, 19 needle-like electrodes used in Example 1 were bundled and used as a plurality of needle-like electrodes 111. The acicular electrodes are hexagonal prisms with a distance of 0.2 mm from each other. Further, as the electron-emitting device, a lateral field emission electron-emitting device (FE) was used. Other structures are the same as those in the first embodiment.
[0039]
In order to confirm the effect of this exhaust system, a vacuum gauge was installed on the exhaust system side, and the change during exhaust system operation was measured. The exhaust system side vacuum gauge after baking was 6 × 10 ⁻⁸ Torr. Simultaneously with the operation of the exhaust system, the indicated value of the exhaust system side vacuum gauge indicates 4 × 10 ⁻⁷ Torr. After that, when the operation of the exhaust system is continued for 4 hours, the indicated value of the exhaust system side vacuum gauge becomes 6 × 10 ⁻⁸ Torr. lowered. When the exhaust device was stopped, the indicated value of the exhaust system side vacuum gauge decreased to 7 × 10 ⁻⁹ Torr, and it was confirmed that the exhaust device was functioning sufficiently.
[0040]
If this exhaust system was not operated under the same conditions, 7 × 10 ⁻⁹ Torr could not be reached within 24 hours.
[0041]
When the electron emission amount half-time of the electron-emitting device of the flat panel image display device evacuated using the exhaust device was measured, an average value 1.8 times that of the conventional image display device was obtained. The life of the display device could be greatly extended.
[0042]
Example 3
A flat image display device in which the exhaust device of the present invention as shown in FIG. 3 is installed is manufactured, the image display device is pre-evacuated, then baked, and then the exhaust device utilizing the field desorption method is operated. I let you. In the figure, members having the same functions as those in FIG.
The flat image display device used a prototype having an internal volume of 220 × 246 × 4 (mm), and the exhaust device of the present invention was installed in the vicinity of the opening of the exhaust pipe 108 of the prototype. The positive electrode 109 and the negative electrode 110 of the exhaust device are those used in Example 1, and a control electrode 112 is arranged between the negative electrode 110 and the mouth of the exhaust pipe 108 separately from these electrodes. The control electrode 112 is disposed at a position 5 mm inside the exhaust pipe opening, and the negative electrode 110 is 3 mm from the control electrode 112. The positional relationship between the negative electrode 110 and the positive electrode 109 is the same as in the first embodiment. The control electrode 112 has a cylindrical shape with an inner diameter of 3 mm, a length of 3 mm, and a thickness of 0.2 mm, and controls the cation flow by applying a voltage close to the positive electrode potential. The material of the control electrode 112 is not required to be high strength because there are few ion and electron impacts, and an electrode made of Au was used. Other structures are the same as those in the first embodiment.
[0043]
In order to confirm the effect of this exhaust system, a vacuum gauge was installed on the exhaust system side, and the change during exhaust system operation was measured. The indicated value on the vacuum system side gauge after baking was 6 × 10 ⁻⁸ Torr. At the same time as the operation of the exhaust system, the indicated value of the exhaust system side gauge is 3 × 10 ⁻⁷ Torr. After that, if the operation of the exhaust system is continued for 4 hours, the indicated value of the exhaust system side gauge is 8 × 10 ⁻⁸ Torr. lowered. After that, when the operation of the exhaust system was stopped, the indicated value of the exhaust system side vacuum gauge decreased to 1 × 10 ⁻⁸ Torr, and it was confirmed that the exhaust system was functioning sufficiently.
[0044]
When this exhaust system was not operated under the same conditions, it took 12 hours to reach 1 × 10 ⁻⁸ Torr, and it was confirmed that this exhaust system was effective in increasing the exhaust speed.
[0045]
When the electron emission amount half-time of the electron-emitting device of the flat panel image display device exhausted using this exhaust device was measured, an average of 1 compared with the case of the image display device manufactured in the conventional process. The value of 2 times was obtained, and the lifetime of the display device could be greatly extended.
[0046]
Example 4
A flat image display device having the exhaust device of the present invention installed therein as shown in FIG. 4 is manufactured, and after performing conventional processes such as preliminary exhaust and baking of the image display device, the exhaust pipe is sealed and this electric field is sealed. The exhaust device using the desorption method was activated. In the figure, members having the same functions as those in FIG.
[0047]
The flat image display device used a prototype with an internal volume of 220 × 246 × 4 (mm) similar to that in Example 1, and an exhaust device was installed on the getter surface 113 of the prototype. The positive electrode 109 and the negative electrode 110 of the exhaust device are those used in the first embodiment. The negative electrode is 5 mm away from the getter surface 113, and the arrangement of the negative electrode 110 and the positive electrode 109 is the same as in the first embodiment. Reference numeral 114 denotes a getter container.
[0048]
This exhaust device is adapted to cause a cation flow to collide with the getter surface 113 and has a function of embedding residual molecules in the getter surface as well as chemical adsorption of the getter. As a result, the exhaust speed of the getter can be increased.
[0049]
When this exhaust device was operated continuously under the same conditions as in Example 1, the electron emission amount half-life of the electron-emitting device of the image display device was 1. It was able to stretch 4 times.
[0050]
【The invention's effect】
As described above, by applying the present invention, the exhaust speed is increased without increasing the exhaust pipe diameter of the flat image display device, the exhaust time is shortened, and the ultimate vacuum is improved. Therefore, it is possible to reduce the number of residual molecules in the image display device, which is effective in extending the life of the image display device, stabilizing the image, and making the image uniform.
[Brief description of the drawings]
FIG. 1 is a schematic cross-sectional view of a flat image display device including an exhaust device according to an example of the present invention.
FIG. 2 is a schematic cross-sectional view of a flat image display device including an exhaust device according to another example of the present invention.
FIG. 3 is a schematic cross-sectional view of a flat image display device provided with an exhaust device of the present invention using a control electrode.
FIG. 4 is a schematic cross-sectional view of an exhaust device and a flat image display device of the present invention used for a getter surface.
FIG. 5 is a schematic diagram of the movement of gas molecules in the exhaust pipe, where (a) shows a conventional apparatus (b) when the apparatus of the present invention is used.
FIG. 6 is a schematic perspective view of a flat image display device.
7 is a schematic cross-sectional view of a cross section including an exhaust pipe of the flat image display device of FIG. 6;
FIG. 8 is a schematic view of a surface conduction electron-emitting device used in a flat image display device.
[Explanation of symbols]
101 Face plate 102 Phosphor 103 Metal back 104 Outer frame 105 Rear plate 106 Wiring 107 Surface conduction electron-emitting device 108 Exhaust pipe 109 Needle-like positive electrode 110 Negative electrode 111 Multiple needle-like electrode 112 Control electrode 113 Getter surface 114 Getter container 300 Exhaust pipe 301 Back plate 302, 303 Electrode 304 Thin film 308 Face plate 309 Metal back 310 Phosphor 311 Outer frame 313 Getter material container fixing jig 314 Getter material container 501 Substrate 502 Electrode 503 Electron emission portion 504 Conductive thin film

Claims (3)

In an image display device that requires evacuation of the internal space ,
In the internal space, an exhaust device including a positive electrode and a negative electrode for applying a high electric field for ionizing a gas existing in the internal space and accelerating the ions, and a getter are incorporated,
The image display apparatus, wherein the positive electrode and the negative electrode are arranged so that the accelerated ions flow toward the surface of the getter . The exhaust system, an image display apparatus according to claim 1, characterized in that it has a control electrode for controlling the flow of said ions. The image display apparatus according to claim 1 or 2, characterized in that before KiTadashi electrodes are provided a plurality.

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