JP3727597B2 - Surface-treated film, metal-deposited film using the surface-treated film, and method for producing metal-deposited film - Google Patents
Surface-treated film, metal-deposited film using the surface-treated film, and method for producing metal-deposited film Download PDFInfo
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- JP3727597B2 JP3727597B2 JP2002027567A JP2002027567A JP3727597B2 JP 3727597 B2 JP3727597 B2 JP 3727597B2 JP 2002027567 A JP2002027567 A JP 2002027567A JP 2002027567 A JP2002027567 A JP 2002027567A JP 3727597 B2 JP3727597 B2 JP 3727597B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 208000028659 discharge Diseases 0.000 claims description 54
- 150000001925 cycloalkenes Chemical class 0.000 claims description 34
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 238000007740 vapor deposition Methods 0.000 claims description 26
- 238000009832 plasma treatment Methods 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 11
- 229910001882 dioxygen Inorganic materials 0.000 claims description 11
- 239000010410 layer Substances 0.000 description 31
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 125000004430 oxygen atom Chemical group O* 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 238000003851 corona treatment Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
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- Treatments Of Macromolecular Shaped Articles (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Description
【0001】
【発明の属する技術分野】
本願発明は、表面処理済フィルム、該表面処理済フィルムを用いた金属蒸着フィルム、及び金属蒸着フィルムの製造方法に関するものであり、特にフィルム表面に対して金属蒸着層を形成する時のフィルム表面と金属蒸着層との間に生じる密着力を増加させることを可能とした表面処理済フィルム、及び該表面処理済フィルムを用いた金属蒸着フィルム、さらに該金属蒸着フィルムの製造方法に関する。
【0002】
【従来の技術】
従来、様々な種類のフィルム表面に対して金属蒸着層を形成する時に金属蒸着層をフィルム表面に密着させやすくする為に、即ちフィルム表面と金属蒸着層との間の密着力を増加させるために、フィルム表面に対して予め表面処理を施した後に該処理済表面に対して金属蒸着層を設ける、という方法が用いられる。特に低吸水性等に優れたシクロオレフィン系フィルムに金属蒸着層を設けると、昨今普及している液晶表示装置等に用いられる半透過・半反射膜として利用可能となるので、シクロオレフィン系フィルム表面と金属蒸着層との間に生じる密着性を向上させることが望まれている。
【0003】
さて、この低吸水性等に優れたシクロオレフィン系フィルムの表面にアルミニウム等の金属を蒸着させて金属蒸着層を設けるには、従来は、大気中での放電を利用して表面改質を行うコロナ放電処理や、同じく真空中での放電を利用して表面改質を行うグロー放電処理を最初にフィルム表面に対して行うことによりフィルム表面を易接着化し、次いで上記の処理が済んだフィルム表面に対して金属蒸着層を設けることが行われている。
【0004】
【発明が解決しようとする課題】
しかし、上述したようなコロナ放電処理やグロー放電処理によってシクロオレフィン系フィルムの表面改質を行った後に、その表面に金属蒸着層を設けようとしても、シクロオレフィン系フィルム表面と金属蒸着層との間には必ずしも所望する充分な密着力は生じなかった。シクロオレフィン系フィルムであれば、その構造上極性基が存在しておらず、そのため、コロナ放電やグロー放電処理を行っても密着力の向上はなかなか容易には実現できなかった。
【0005】
そこで、この密着力を増強するという観点から、特開平8−267645号公報では、グロー放電下において特定厚さのアンカー蒸着層を設けることで密着力を増す、という発明が開示されている。しかしこの方法ではグロー放電と金属蒸着を同時に行う必要があり、そのため作業工程は困難であり、ひいては製造コストがかかってしまう、という問題点があった。
【0006】
その他、酸素ガスを用いた直流グロー放電によるプラズマ処理を施す場合であっても、従来はさらに核付け金属蒸着を行う必要のある方法も提示されているが、この方法であれば、核付け金属蒸着を行うという工程が余計に存在するために一層作業工程全体が困難なものとなってしまい、やはり問題であった。
【0007】
本願発明はこのような問題点に鑑みて為されたものであり、その目的は、簡潔な方法でシクロオレフィン系フィルム表面と金属蒸着層との間の密着力を充分なものとすることが出来る、表面処理を施されたシクロオレフィン系フィルム、該フィルムを用いた金属蒸着フィルム、及び該金属蒸着フィルムの製造方法を提供することである。
【0008】
【課題を解決するための手段】
上記課題を解決するため、本願発明の請求項1に記載の発明は、シクロオレフィン系フィルムの片面若しくは両面に対して、プラズマ放電処理を施してなる、表面処理済フィルムであって、前記プラズマ放電処理は、放電ガスを酸素ガスとした直流グロー放電であり、かつ、前記プラズマ放電処理の強度が220W・min/m 2 以上700W・min/m 2 以下であること、を特徴とする。
【0009】
本願発明の請求項2に記載の発明は、請求項1に記載の表面処理済フィルムの、プラズマ処理を施した面に直接金属蒸着層を設けてなること、を特徴とする。
【0010】
本願発明の請求項3に記載の発明は、シクロオレフィン系フィルムの片面若しくは両面に対して、プラズマ放電処理を施してなる、プラズマ処理工程と、前記プラズマ処理工程を終えたシクロオレフィン系フィルムのプラズマ処理面に対して直接金属蒸着層を設けてなる、蒸着工程と、よりなる工程であって、前記プラズマ処理工程におけるプラズマ放電処理は、放電ガスを酸素ガスとした直流グロー放電であり、かつ、前記プラズマ放電処理の強度が220W・min/m 2 以上700W・min/m 2 以下であること、を特徴とする。
【0015】
【発明の実施の形態】
以下、本願発明の実施の形態について説明する。尚、ここで示す実施の形態はあくまでも一例であって、必すしもこの実施の形態に限定されるものではない。(実施の形態1)
本願発明に係る表面処理済フィルムを第1の実施の形態として、説明する。
ここで用いるフィルムはシクロオレフィン系フィルムであり、表面処理フィルムとは、シクロオレフィン系フィルムの表面に対してプラズマ放電処理を施したものを想定しているが、必ずしもこれに限定されるものではなく、他のフィルムとすることも考えられる。またフィルム表面とは両面でもよいが、以下の説明ではフィルム片面に対して処理を施した状態を想定して説明する。
【0016】
プラズマ放電処理は公知の方法で構わないが、特に放電ガスを酸素ガスとした直流グロー放電とすると、密着力に関して非常によい効果が得られ、さらにその際のプラ図今放電の強度を220W・min/m 2 以上700W・min/m 2 以下とすると、より好適な効果が得られる。つまり、シクロオレフィン系フィルム表面に対してプラズマ処理を施すことによりフィルム表面がクリーニングされ、その結果表面が改質され官能基が形成されるので、この官能基を用いることで密着力が大変好適に向上するのである。そして放電の強度を上記範囲とすることで表面に脆弱層を形成しにくくなる。
【0017】
このようにして形成される表面処理済フィルムを用いた金属蒸着フィルムについて説明する。
シクロオレフィン系フィルムとしては、例えばジシクロペンタジエンを原料として高分子化させたシクロオレフィン系樹脂を主成分とするフィルムであることが好適であるが、これであれば低吸水性であること、加水分解などが起きないために廃棄・燃焼時における環境問題をひきおこさないこと、という点において大変好適な性質を得ることが出来るので好ましい。またこのフィルムを基材として用いると、大変に性能の好適な半透過・半反射フィルムの製造が可能となるが、このようなフィルムは昨今の液晶表示装置の普及に伴い、ニーズが急増しているものである。尚詳述はしないが、シクロオレフィン系フィルムに用いる樹脂としては、上記以外にも、例えばポリエチレン(PE)、又はポリプロピレン(PP)、のいずれか又は双方のポリオレフィンであって、分子骨格中に脂環構造を持たせたシクロオレフィン系樹脂を用いることも考えられる。また、シクロオレフィン系フィルムの厚さは4μmから200μmのものであることが好ましい。この範囲内にあればハンドリング性が好適なものとなるからである。
【0018】
ところで、このシクロオレフィン系フィルムは極性を有していないので、そのままの状態であれば密着力は殆ど無い。そこで本実施の形態においてはその密着力を増すために、フィルム表面に対してプラズマ処理を行うことで表面改質を行い、シクロオレフィン系フィルムとその上に蒸着する層、例えば金属蒸着層、との密着力を向上させるのである。
【0019】
そこでこのプラズマ処理に関して具体的に説明する。
本実施の形態では放電ガスを酸素ガスとした直流グロー放電であるものとしている。そしてシクロオレフィン系フィルムの表面に対して酸素ガスを用いたプラズマ放電処理を施すことにより、シクロオレフィンの有する基の一部が切断されて、酸素原子の腕が表面に現れる。この酸素原子の腕を用いることで、本実施の形態に係るシクロオレフィン系フィルムのプラズマ処理を施した表面と金属蒸着層との間の密着力を充分なものとすることが出来るのである。即ち、酸素原子の腕と金属蒸着層を構成する金属分子の腕が化学結合を起こし、それが故に密着力の向上が図れるのであり、また放電ガスとして酸素ガスを用いる理由である。
尚、本実施の形態に係るシクロオレフィン系フィルムに密着させる金属蒸着層を構成する物質としては、アルミニウム、クロム、インジウム、スズ、ニッケル等が考えられ、さらには金属酸化物であるSiO2、ITO、などが考えられるが、本実施の形態においてはこれらに限定するものではない。
【0020】
本実施の形態に係る表面処理済フィルムは以上説明の通りであるが、このフィルムを製造する方法としては、シクロオレフィン系フィルムの片面若しくは両面に対してプラズマ放電処理を施すプラズマ処理工程と、前記プラズマ処理工程を終えたシクロオレフィン系フィルムのプラズマ処理面に対して直接金属蒸着層を設ける蒸着工程と、を備えた製造方法とすることが考えられる。しかし本実施の形態に係るフィルムは上記以外の製法で製造されたものであっても構わない。
【0021】
また、前記プラズマ放電処理は放電ガスを酸素ガスとした直流グロー放電であり、さらに前記プラズマ放電の強度が220W・min/m 2 以上700W・min/m 2 以下であるようにするとより好適な金属蒸着用フィルムを製造することが出来る。蒸着工程については、公知の蒸着方法を用いる事が出来る。
【0022】
以上のように、本実施の形態に係る表面処理済フィルムであれば、表面の密着力を向上させたシクロオレフィン系フィルムを得ることができ、また該シクロオレフィン系フィルムを用いることで金属蒸着層との密着力が向上した
金属蒸着フィルムを得ることが出来る。
【0023】
【実施例】
以下、実施例により本願発明をより具体的に説明するが、必ずしも本願発明はこれら実施例に限定されるものではない。尚、ラミネート強度の評価については、次のように行った。
【0024】
(ラミネート強度の評価方法)
金属蒸着層面に、塩化ビニル・酢酸ビニル共重合体接着剤を固形分で3μm相当をコートし、この塩化ビニル・酢酸ビニル共重合体接着剤を介して、厚さ200μmの軟質塩ビフィルムと重ね合わせる。そしてこれに対して、125℃下で2.0kg/cm2の圧力をかけて2秒間圧着し、25℃の雰囲気で24時間エージングを行う。エージング終了後、これを15mm×200mmの寸法に切り出し、卓上形精密万能試験機(株式会社島津製作所製 島津オートグラフAGS−100)により、Al蒸着層と接着剤層との間を引張速度200mm/minで90°剥離する。この剥離時の強度を密着強度として評価測定した(以下、これを「ドライ密着強度」と呼ぶ)。また、上記と同様の方法で引っ張り始めた時に剥離面に蒸留水を2〜3滴滴下したものについて、剥離時の強度を密着強度として評価測定した(以下、これを「ウェット密着強度」と呼ぶ)。
【0025】
(実施例及び比較例)
シクロオレフィン系フィルム(日本ゼオン株式会社性「ZEONOR」膜厚50μm)表面に対してプラズマ処理を行い、該プラズマ処理面の上に金属層としてアルミニウム層を形成した。具体的には作業ガス圧を0.1Pa〜10Paとし、ロール・ツー・ロール方式の真空蒸着機を用いて、酸素の直流グロー放電によるプラズマ処理を施した上で、該プラズマ処理面上に抵抗加熱による蒸着によってアルミニウムの蒸着を行い、金属層を形成した。その結果について以下に示す。尚、プラズマ処理を行わなかった場合、放電ガスを窒素とした場合、放電ガスをアルゴンとした場合、また放電ガスは酸素であるもののプラズマ強度を220W・min/m 2 以上700W・min/m 2 以下の範囲外とした場合、についても同様の試験を行った。その結果も比較例として以下に示す。
【表1】
【0026】
上記図に示されるとおり、酸素プラズマであってプラズマ放電の強度が220W・min/m 2 以上700W・min/m 2 以下の範囲にある場合は密着強度は高い数値を示すが、それ以外の場合における密着強度は低い数値しか示さないことがわかる。
【0027】
【発明の効果】
以上のように、本願発明の請求項1に記載のフィルムによれば、シクロオレフィン系フィルムの片面若しくは両面に対して、プラズマ放電処理を施したので、シクロオレフィンの構造の一部が切断されてシクロオレフィン系フィルムの表面に官能基の腕が出ることになり、この腕を用いることで、金属蒸着層を設けると密着力の増強したものとすることが出来る。
【0028】
また、本願発明によれば、プラズマ放電処理における放電ガスを酸素ガスとした直流グロー放電であることし、かつプラズマ放電の強度が220W・min/m 2 以上700W・min/m 2 以下であることとしたので、官能基の腕として酸素原子の腕を利用できるようになり、より一層密着力を向上させることが可能となり、また表面に脆弱層を形成しなくなるのである。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a surface-treated film, a metal vapor-deposited film using the surface-treated film, and a method for producing the metal vapor-deposited film, and in particular, a film surface when forming a metal vapor-deposited layer on the film surface The present invention relates to a surface-treated film capable of increasing the adhesion force generated between the metal-deposited layer, a metal-deposited film using the surface-treated film, and a method for producing the metal-deposited film.
[0002]
[Prior art]
Conventionally, when forming a metal vapor deposition layer on various types of film surfaces, in order to facilitate the adhesion of the metal vapor deposition layer to the film surface, that is, to increase the adhesion between the film surface and the metal vapor deposition layer. A method is used in which a metal deposition layer is provided on the treated surface after the film surface has been subjected to a surface treatment in advance. In particular, when a metal vapor-deposited layer is provided on a cycloolefin film excellent in low water absorption, etc., it can be used as a semi-transmissive / semi-reflective film used in liquid crystal display devices and the like that have recently become popular. It is desired to improve the adhesion generated between the metal and the metal vapor deposition layer.
[0003]
In order to provide a metal vapor deposition layer by depositing a metal such as aluminum on the surface of the cycloolefin film excellent in low water absorption, etc., conventionally, surface modification is performed using discharge in the atmosphere. The film surface is subjected to corona discharge treatment or glow discharge treatment, which is similarly modified by using discharge in a vacuum, to make the film surface easy to adhere, and then the above-mentioned film surface is processed. A metal vapor-deposited layer is provided on the surface.
[0004]
[Problems to be solved by the invention]
However, after surface modification of a cycloolefin film by corona discharge treatment or glow discharge treatment as described above, even if an attempt is made to provide a metal vapor deposition layer on the surface, the cycloolefin film surface and the metal vapor deposition layer In the meantime, the desired sufficient adhesion was not always produced. In the case of a cycloolefin-based film, there is no polar group due to its structure. Therefore, even if corona discharge or glow discharge treatment is performed, the adhesion cannot be easily improved.
[0005]
Therefore, from the viewpoint of enhancing the adhesion, JP-A-8-267645 discloses an invention in which the adhesion is increased by providing an anchor vapor deposition layer having a specific thickness under glow discharge. However, this method has a problem that it is necessary to perform glow discharge and metal vapor deposition at the same time, so that the work process is difficult and, consequently, the manufacturing cost is increased.
[0006]
In addition, even in the case of performing plasma treatment by direct current glow discharge using oxygen gas, there has been conventionally presented a method that requires further nucleation metal deposition. Since there was an extra step of vapor deposition, the entire work process became more difficult, which was also a problem.
[0007]
The present invention has been made in view of such problems, and the object thereof is to make the adhesion between the cycloolefin film surface and the metal vapor deposition layer sufficient by a simple method. The present invention provides a cycloolefin-based film subjected to surface treatment, a metal vapor-deposited film using the film, and a method for producing the metal vapor-deposited film.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, the invention according to claim 1 of the present invention is a surface-treated film obtained by performing plasma discharge treatment on one or both sides of a cycloolefin-based film, wherein the plasma discharge is performed. The treatment is a direct current glow discharge using an oxygen gas as a discharge gas, and the intensity of the plasma discharge treatment is 220 W · min / m 2 or more and 700 W · min / m 2 or less .
[0009]
The invention according to claim 2 of the present invention is characterized in that the surface-treated film according to claim 1 is provided with a metal vapor deposition layer directly on the surface subjected to plasma treatment.
[0010]
Invention of Claim 3 of this invention is a plasma processing process formed by performing plasma discharge processing with respect to the single side | surface or both surfaces of a cycloolefin type film, and the plasma of the cycloolefin type film which finished the said plasma processing process A vapor deposition step in which a metal vapor deposition layer is provided directly on the treatment surface, and the plasma discharge treatment in the plasma treatment step is a direct current glow discharge using oxygen gas as a discharge gas, and The intensity of the plasma discharge treatment is 220 W · min / m 2 or more and 700 W · min / m 2 or less .
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below. It should be noted that the embodiment shown here is merely an example, and is not necessarily limited to this embodiment. (Embodiment 1)
A surface-treated film according to the present invention will be described as a first embodiment.
The film used here is a cycloolefin film, and the surface-treated film is assumed to have been subjected to plasma discharge treatment on the surface of the cycloolefin film, but is not necessarily limited thereto. Other films can also be considered. Moreover, although both surfaces may be sufficient as the film surface, in the following description, it demonstrates supposing the state which processed the film single side | surface.
[0016]
The plasma discharge treatment may be performed by a known method, but in particular, if a direct current glow discharge using oxygen gas as the discharge gas is obtained, a very good effect is obtained with respect to the adhesion, and the intensity of the discharge at that time is 220 W · If it is set to min / m 2 or more and 700 W · min / m 2 or less , a more preferable effect is obtained. In other words, the film surface is cleaned by performing plasma treatment on the surface of the cycloolefin-based film, and as a result, the surface is modified to form a functional group. By using this functional group, the adhesion is very suitable. It improves. And it becomes difficult to form a weak layer on the surface by making the intensity | strength of discharge into the said range.
[0017]
The metal vapor deposition film using the surface-treated film thus formed will be described.
As the cycloolefin film, for example, a film mainly comprising a cycloolefin resin obtained by polymerizing dicyclopentadiene as a raw material is preferable. Since decomposition or the like does not occur, it is preferable because a very favorable property can be obtained in that it does not cause environmental problems during disposal and combustion. In addition, when this film is used as a base material, it is possible to produce a semi-transmissive / semi-reflective film having a very good performance. However, with the recent spread of liquid crystal display devices, needs for such films have increased rapidly. It is what. Although not described in detail, as the resin used for the cycloolefin-based film, in addition to the above, for example, polyethylene (PE), polypropylene (PP), or both polyolefins, and a fat in the molecular skeleton. It is also conceivable to use a cycloolefin resin having a ring structure. The thickness of the cycloolefin-based film is preferably 4 μm to 200 μm. This is because if it is within this range, the handling property is suitable.
[0018]
By the way, since this cycloolefin-type film does not have polarity, there is almost no adhesive force if it is the same as it is. Therefore, in this embodiment, in order to increase the adhesion force, surface modification is performed by performing plasma treatment on the film surface, and a cycloolefin-based film and a layer deposited thereon, for example, a metal deposition layer, It improves the adhesive strength of the.
[0019]
Therefore, the plasma processing will be specifically described.
In the present embodiment, a direct current glow discharge is used in which the discharge gas is oxygen gas. By subjecting the surface of the cycloolefin-based film to plasma discharge treatment using oxygen gas, a part of the group possessed by the cycloolefin is cut, and the oxygen atom arms appear on the surface. By using this arm of oxygen atoms, the adhesion between the plasma-treated surface of the cycloolefin film according to the present embodiment and the metal vapor deposition layer can be made sufficient. That is, the arms of oxygen atoms and the arms of metal molecules constituting the metal vapor deposition layer cause chemical bonds, which can improve the adhesion, and are the reason for using oxygen gas as the discharge gas.
As the material constituting the metal deposition layer to come into close contact with the cycloolefin-based film according to the present embodiment, aluminum, chromium, indium, tin, nickel and the like are considered, SiO 2, ITO further a metal oxide However, the present embodiment is not limited to these.
[0020]
The surface-treated film according to the present embodiment is as described above, but as a method for producing this film, a plasma treatment step of performing plasma discharge treatment on one side or both sides of the cycloolefin film, It is conceivable that the manufacturing method includes a vapor deposition step in which a metal vapor deposition layer is directly provided on the plasma treatment surface of the cycloolefin-based film after the plasma treatment step. However, the film according to the present embodiment may be manufactured by a manufacturing method other than the above.
[0021]
Further, the plasma discharge treatment is a direct current glow discharge using oxygen gas as a discharge gas, and the intensity of the plasma discharge is more preferably 220 W · min / m 2 or more and 700 W · min / m 2 or less. A film for vapor deposition can be produced. About a vapor deposition process, a well-known vapor deposition method can be used.
[0022]
As described above, if the surface-treated film according to the present embodiment is used, a cycloolefin-based film with improved surface adhesion can be obtained, and a metal vapor deposition layer can be obtained by using the cycloolefin-based film. It is possible to obtain a metal vapor-deposited film with improved adhesion.
[0023]
【Example】
EXAMPLES Hereinafter, although an Example demonstrates this invention more concretely, this invention is not necessarily limited to these Examples. The laminate strength was evaluated as follows.
[0024]
(Evaluation method of laminate strength)
The surface of the metal vapor-deposited layer is coated with a vinyl chloride / vinyl acetate copolymer adhesive corresponding to a solid content of 3 μm, and this vinyl chloride / vinyl acetate copolymer adhesive is overlaid with a 200 μm-thick soft PVC film. . Then, a pressure of 2.0 kg / cm 2 is applied at 125 ° C. for 2 seconds, and aging is performed in an atmosphere at 25 ° C. for 24 hours. After aging, this was cut out to a size of 15 mm × 200 mm, and a tensile speed of 200 mm / g between the Al vapor-deposited layer and the adhesive layer was measured with a desktop precision universal testing machine (Shimadzu Autograph AGS-100, manufactured by Shimadzu Corporation). Peel 90 ° in min. The strength at the time of peeling was evaluated and measured as adhesion strength (hereinafter referred to as “dry adhesion strength”). In addition, when two to three drops of distilled water were dropped on the peeled surface when starting to pull in the same manner as described above, the strength at the time of peeling was evaluated and measured as the adhesion strength (hereinafter referred to as “wet adhesion strength”). ).
[0025]
(Examples and Comparative Examples)
Plasma treatment was performed on the surface of a cycloolefin film (Nippon Zeon Corporation “ZEONOR” film thickness 50 μm), and an aluminum layer was formed as a metal layer on the plasma treated surface. Specifically, the working gas pressure is set to 0.1 Pa to 10 Pa, a plasma treatment is performed by a direct current glow discharge of oxygen using a roll-to-roll vacuum deposition machine, and a resistance is applied to the plasma treatment surface. Aluminum was deposited by heating to form a metal layer. The results are shown below. When the plasma treatment was not performed, the discharge gas was nitrogen, the discharge gas was argon, or the discharge gas was oxygen, but the plasma intensity was 220 W · min / m 2 or more and 700 W · min / m 2. The same test was also conducted for cases outside the following ranges. The result is also shown below as a comparative example.
[Table 1]
[0026]
As shown in the above figure, when the intensity of plasma discharge is in the range of 220 W · min / m 2 or more and 700 W · min / m 2 or less , the adhesion strength shows a high value, but in other cases It can be seen that the adhesion strength at is only low.
[0027]
【The invention's effect】
As described above, according to the film according to claim 1 of the present invention, since the plasma discharge treatment is performed on one side or both sides of the cycloolefin-based film, a part of the structure of the cycloolefin is cut. The arm of the functional group appears on the surface of the cycloolefin film, and by using this arm, the adhesion can be enhanced when a metal vapor deposition layer is provided.
[0028]
Further, according to the present invention, it is a direct current glow discharge in which the discharge gas in the plasma discharge treatment is oxygen gas, and the intensity of the plasma discharge is 220 W · min / m 2 or more and 700 W · min / m 2 or less. As a result, the arm of oxygen atoms can be used as the arm of the functional group, the adhesion can be further improved, and the fragile layer is not formed on the surface.
Claims (3)
前記プラズマ放電処理は、放電ガスを酸素ガスとした直流グロー放電であり、 The plasma discharge treatment is a direct current glow discharge using oxygen gas as a discharge gas,
かつ、前記プラズマ放電処理の強度が220W・min/m And the intensity of the plasma discharge treatment is 220 W · min / m 22 以上700W・min/m700 W · min / m 22 以下であること、That
を特徴とする、表面処理済フィルム。 Surface-treated film characterized by
プラズマ処理を施した面に直接金属蒸着層を設けてなること、 A metal-deposited layer is directly provided on the plasma-treated surface;
を特徴とする、金属蒸着フィルム。 A metal vapor deposited film characterized by
前記プラズマ処理工程を終えたシクロオレフィン系フィルムのプラズマ処理面に対して直接金属蒸着層を設けてなる、蒸着工程と、 A vapor deposition step, in which a metal vapor deposition layer is provided directly on the plasma treatment surface of the cycloolefin-based film after the plasma treatment step;
よりなる工程であって、 A process comprising:
前記プラズマ処理工程におけるプラズマ放電処理は、放電ガスを酸素ガスとした直流グロー放電であり、 The plasma discharge treatment in the plasma treatment step is a direct current glow discharge using an oxygen gas as a discharge gas,
かつ、前記プラズマ放電処理の強度が220W・min/m And the intensity of the plasma discharge treatment is 220 W · min / m 22 以上700W・min/m700 W · min / m 22 以下であること、That
を特徴とする、金属蒸着フィルムの製造方法。 The manufacturing method of a metal vapor deposition film characterized by these.
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| JP2002027567A JP3727597B2 (en) | 2002-02-05 | 2002-02-05 | Surface-treated film, metal-deposited film using the surface-treated film, and method for producing metal-deposited film |
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| JP2002027567A JP3727597B2 (en) | 2002-02-05 | 2002-02-05 | Surface-treated film, metal-deposited film using the surface-treated film, and method for producing metal-deposited film |
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| Publication Number | Publication Date |
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| JP3727597B2 true JP3727597B2 (en) | 2005-12-14 |
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