JP3729903B2 - Cassette station - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a cassette station for mounting a cassette containing a glass mask for semiconductor manufacturing or the like.
[0002]
[Prior art]
Photomasks for manufacturing semiconductors are generally those in which a very small pattern is drawn on a glass plate (hereinafter referred to as a glass mask). Work is required.
[0003]
For this reason, conventionally, this glass mask is stored in a cassette that simultaneously holds a plurality of glass masks, and the robot carries, installs, or replaces the cassette.
[0004]
[Problems to be solved by the invention]
However, an operator or the like must perform the operation of selecting the cassette or the glass mask and transferring it to the robot in order to place it in the semiconductor manufacturing line.
A place where a cassette is transferred between the worker and the robot is called a cassette station.
[0005]
By the way, in a factory where a robot that automatically conveys or automatically turns an arm operates, it is necessary to strictly separate the robot area and the worker area in order to ensure the safety of the worker.
However, in a cassette station for delivering cassettes, it is natural that both approaches must be possible.
[0006]
Therefore, a structure has been used in which a booth constituting the cassette station is provided with sensors, switches, gates, and traffic lights, and when one of them enters the cassette station, the other is prevented from entering.
[0007]
However, in such a conventional cassette station, for example, when one enters, the switch is pressed and the other is notified of this, while the other is entering, the other is waiting outside the cassette station, etc. There were many disadvantages in that there were many wasted processes and the work efficiency was very low.
[0008]
The present invention has been made under such a background, and an object thereof is to provide a cassette station capable of efficiently and stably delivering a cassette between a robot and a worker.
[0009]
[Means for Solving the Problems]
In order to solve the above-described problem, in the invention according to claim 1, a cassette station including a holding unit for placing a cassette for storing one or a plurality of objects conveyed by a robot arm in a main body. A partition plate that is vertically attached to the upper surface of the main body, has a passage window through which the holding portion passes substantially at the center, and separates the upper surface of the main body into a first region and a second region; On the first area of the upper surface of the main body, an upper end is attached to the second area with a predetermined inclination angle, and elevating means for elevating the holding portion, the inclination angle being the elevating means The holding portion is positioned in the first region when the lift is at the lowest position, and the holding portion is positioned at the second region when the elevating means is at the highest position. .
[0010]
In the invention according to claim 2, in the cassette station according to claim 1, the cassette station is attached to the second region side on the main body and in the vicinity of the lowest position of the elevating means, and is stored in the cassette. It has an extruding means for extruding a part or all of the target object to the first region side.
[0011]
Further, in the invention according to claim 3, in the cassette station according to claim 1, the holding portion includes gripping means for gripping one or a plurality of the cassettes on an inclined upper surface. It is characterized by.
[0012]
According to a fourth aspect of the present invention, in the cassette station according to any one of the first to third aspects, the object is a glass having a semiconductor manufacturing pattern formed on a glass plate. It is a mask.
[0013]
[Action]
According to the present invention, when the lifting means attached with a predetermined inclination on the main body whose upper surface is separated into the first and second regions by the partition plate is at the lowest position, the holding of the cassette is placed. When the part is located on the first area side and the lifting means is at the highest position, the holding part is located on the second area side.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
A. Configuration An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a side configuration diagram showing configurations of a cassette station 1 and a robot 2 according to an embodiment of the present invention. FIG. 2 is a front view of the cassette station 1 shown in FIG. In the following description, in FIG. 1, the left side is assumed to be the front (front), and the right side is assumed to be the rear (back).
[0015]
In FIG. 1, a partition plate 11 formed of, for example, transparent acrylic resin or the like is vertically and detachably attached to a substantially central portion of the cassette station 1 so that the right side is an operator's area A and the left side is a robot. 2 region B. A passage window 11a (see FIG. 2) is provided in the middle of the partition plate 11.
[0016]
14-1 and 14-2 are cassettes for storing a plurality of glass masks 15, 15..., Respectively, and are carried by an operator by holding a handle 14 a (see FIG. 1) formed on the upper part. Is possible.
[0017]
An elevator 13 is attached to the upper surface of the cassette station 1. A holding base 12 that holds the cassettes 14-1 and 14-2 is attached to the upper end of the elevator 13. Although not shown in the drawings, in the elevator 13 according to the present embodiment, the holding base 12 moves up and down as the motor rotates the shaft of the ball nut gear.
[0018]
As shown in FIG. 2, the cassette 14-1 and the cassette 14-2 are placed side by side with respect to the front. Further, as an example, the robot 2 pulls out and transports the glass mask 15 from the cassette 14-1 placed on the left side, and stores the replaced glass mask 15 in the cassette 14-2 placed on the right side. .
[0019]
The elevator 13 described above is mounted with an inclination of approximately 30 ° from the vertical to the right (backward direction) (see FIG. 1). Thus, when the holding table 12 is raised, the cassettes 14-1 and 14-2 are fed out to the region A side through the passage window 11 a of the partition plate 11. On the other hand, when the holding table 12 is lowered, the cassettes 14-1 and 14-2 are fed out to the region B side through the passage window 11 a of the partition plate 11.
[0020]
Sensors 19 a-1, 19 a-2, 19 b-1 and 19 b-2 are attached to the holding table 12. The sensors 19a-1, 19a-2 detect whether or not the glass masks 15, 15... Are stored in the respective positions of the cassette 14-1 by light. Similarly, the sensors 19b-1 and 19b-2 detect the glass mask 15 in the cassette 14-2.
[0021]
FIG. 3 is a side configuration diagram showing a detailed configuration of the mount portion 12a on the upper surface of the holding table 12. As shown in FIG. The mount portion 12a includes a fixed frame 41, a plunger 42, and sensor switches 43, 43,..., And a cassette 14-1 (14-2) is placed therebetween.
[0022]
The plunger 42 has a resin ball 42a and a push spring 42b inside, and when the cassette 14-1 (14-2) is placed, the resin ball 42a is placed on the cassette 14-1 (14-2) side. Be energized.
Further, the presence / absence and size of the cassette 14-1 (14-2) are detected by the sensor switches 43, 43.
[0023]
The main body of the cassette station 1 is provided with a limit switch 20-1 and a limit switch 20-2. The limit switch 20-1 detects that the holding unit 12 is completely raised, and the limit switch 20-2 detects that the holding unit 12 is completely lowered.
[0024]
An air cylinder type actuator 16 is provided on the right side of the elevator 13, and pushers 17 are attached to the tip of the cylinder 16 a of the actuator 16.
[0025]
When the holding table 12 is lowered, compressed air (air) supplied from the outside of the cassette station 1 is sent to the actuator 16, whereby the cylinder 16 a is drawn out to the mechanical limit point. As a result, the glass masks 15, 15... Housed in the cassettes 14-1, 14-2 are pushed forward by the pushers 17, 17.
[0026]
The above-described compressed air is controlled by an electromagnetic valve (not shown). The operation of the electromagnetic valve is prohibited by the above-described limit switch 20-2 except when the holding unit 12 is at the lowest position of the elevator 13. It becomes the composition which is done.
[0027]
Reference numeral 20-3 attached to the main body of the cassette station 1 is a limit switch for detecting whether or not the cylinder 16a is completely retracted into the actuator 16. As a result, when the cylinder 16a is not completely drawn into the actuator 16, the motor of the elevator 13 does not rotate.
[0028]
In the present embodiment, the actuator 16, the pusher 17, and the limit switches 20-1 to 20-3 are covered with a cover 18. Reference numeral 32 denotes an access indicator which displays whether or not the cassettes 14-1 and 14-2 can be replaced by an operator.
[0029]
Reference numeral 31 on the cassette station 1 is a regrip station, which is a place where the gripper 24 of the robot 2 described later changes the glass mask 15 once held in accordance with the place to be placed.
[0030]
FIG. 4 is a side configuration diagram showing a detailed configuration of the rip grip station 31. As shown in FIG. 4, the regrip station 31 is inclined at a predetermined angle, and a positioning key 45 having a protrusion 45a at the upper end is provided in one end direction of the upper surface.
[0031]
On the other hand, a support base 46 a is provided in the other end direction of the regrip station 31, and a support base 46 b is provided between the support base 46 a and the positioning key 45. The overall height of the support base 46b is lower than that of the support base 46a.
Further, a mask detector 47 is provided on the upper surface of the regrip station 31 to check the presence or absence of the glass mask 15 by ultrasonic waves.
[0032]
Reference numeral 50 denotes a control unit that controls the above-described motor, electromagnetic valve, and other units (not shown).
In the present embodiment, the control unit 50 and the robot 2 of the cassette station 1 are controlled by a central control device installed separately from these, although not shown.
[0033]
In FIG. 1, the lower part 21 of the robot 2 is movable in the direction perpendicular to the display surface of FIG.
Arms 23a and 23b are attached to the lower part 21 of the robot 2 via joints 22a and 22b, and a gripper 24 is attached to the tip of the arm 23b via a joint 22c.
The robot 2 teaches and transports the glass mask 15 by the gripper 24 and performs operations such as replacement.
[0034]
B. Operation FIG. 5 and FIG. 6 are flowcharts for explaining the operation of the present embodiment. The operation will be described below with reference to this flowchart. In the following, the glass masks 15, 15... Stored in the cassettes 14-1, 14-2 are pushed out by the pushers 17, 17, and the replacement work of the glass masks 15, 15. The procedure for exchanging the cassettes 14-1 and 14-2 from the above state is shown. At this time, the access indicator 32 is lit with “access not possible”.
[0035]
First, the control unit 50 confirms whether or not there is a request for replacement of the cassettes 14-1 and 14-2 from a central control unit (not shown) (step St1). Here, if there is no instruction from the central control unit, the replacement work of the glass masks 15, 15... By the robot 2 is continued (step St2).
[0036]
In step St1, when there is a replacement request from the central control device by an operator or the like, the control unit 50 prohibits the replacement work of the glass masks 15, 15... By the robot 2 (step St3).
[0037]
Next, the control unit 50 controls an electromagnetic valve (not shown) to release (discharge) the air (compressed air) supplied to the actuator 16 (step St4).
Thereby, the cylinder 16a is drawn, and the glass masks 15, 15... Pushed out by the pushers 17 and 17 are returned into the cassettes 14-1 and 14-2, respectively.
[0038]
When the control unit 50 confirms that the cylinder 16a is completely retracted by the limit switch 20-3 (step St5), the control unit 50 starts raising the elevator 13 (step St6). As a result, the holding table 12 on which the cassettes 14-1 and 14-2 are placed moves from the region A side to the region B side.
[0039]
Thereafter, when it is confirmed by the limit switch 20-1 that the holding portion 12 provided at the upper end of the elevator 13 is completely raised (step St7), the operation of the elevator 13 is stopped (step St8), and the access indicator 32 is displayed. Turn off the “Access not possible” display.
Although not shown, the cassettes 14-1 and 14-2 can be exchanged by an operator here, and each cassette is exchanged with another predetermined cassette according to the work procedure.
[0040]
The control unit 50 waits until a request for resuming the replacement of the glass masks 15, 15... Is issued from the central control unit (step St10). Thereafter, when the replacement work of the cassettes 14-1, 14-2 is completed and a request for restarting the replacement work of the glass masks 15, 15... Is made, the control unit 50 first detects the sensor switches 43, 43. To detect the presence / absence of the cassettes 14-1 and 14-2 and the sizes thereof (step St11).
[0041]
Next, the sensors 19a-1, 19a-2, 19b-1 and 19b-2 determine whether or not the glass mask 15 is in the cassettes 14-1, 14-2, and the glass masks 15, 15. Each size is detected (step St13).
[0042]
Here, the control unit 50 checks whether or not the glass masks 15, 15... Stored in the cassettes 14-1, 14-2 are predetermined (size) (step St14). In step St14, if the cassettes 14-1, 14-2 storing the predetermined glass masks 15, 15... Are not placed on the holding unit 12, the control unit 50 displays an “error” on the access display 32. Is displayed (step St15), and the process returns to step St10.
[0043]
In step St14, if it is confirmed that the predetermined cassettes 14-1 and 14-2 are placed on the holding unit 12, the control unit 50 first turns on the display of “inaccessible” on the access display 32 ( Step St16), then, the elevator 13 starts to descend (Step St17). As a result, the holding table 12 on which the cassettes 14-1 and 14-2 are placed moves from the region B side to the region A side.
[0044]
After confirming that the holding unit 12 is completely lowered by the limit switch 20-2 (step St18), the control unit 50 stops the descent operation of the elevator 13 (step St19).
[0045]
Thereafter, the control unit 50 controls an electromagnetic valve (not shown) to supply air to the actuator 16 (step St20), and thus the glass masks 15, 15. Pushed forward by pushers 17, 17.
[0046]
Finally, the control unit 50 resumes the replacement work of the glass masks 15, 15... By the robot 2, and the processing according to the present embodiment ends.
Thus, in the present embodiment, the worker's area A and the robot 2 area B are separated by the partition plate 11 over the entire work process. Therefore, the safety and workability of workers are not impaired, and the glass masks 15, 15... Are not affected by dust or the like.
[0047]
In addition, since the cassettes 14-1 and 14-2 are placed with an inclination, the stored glass masks 15, 15... .
Furthermore, since the partition plate 11 is transparent as described above and can be removed, the visibility and maintainability are not impaired.
[0048]
It should be noted that the elevator and pusher driving method, the type of each sensor, the inclination angle of the elevator, etc. described in the above embodiment are merely examples, and the present invention is limited to these types and numerical values. is not.
[0049]
【The invention's effect】
As described above, according to the present invention, when the lifting means attached with a predetermined inclination on the main body whose upper surface is separated into the first and second regions by the partition plate is the lowest position, When the holding unit on which the cassette is placed is located on the first area side and the elevating means is at the highest position, the holding part is located on the second area side. An effect is obtained that it is possible to realize a cassette station that can deliver cassettes efficiently and stably.
[Brief description of the drawings]
FIG. 1 is a side configuration diagram showing configurations of a cassette station 1 and a robot 2 according to an embodiment of the present invention.
FIG. 2 is a front configuration diagram of a cassette station 1 in the same embodiment.
FIG. 3 is a side configuration diagram showing a detailed configuration of a mount portion 12a on the upper surface of the holding base 12 in the same embodiment;
FIG. 4 is a side configuration diagram showing a detailed configuration of a rip grip station 31 in the same embodiment;
FIG. 5 is a flowchart for explaining the operation of the embodiment;
FIG. 6 is a flowchart for explaining the operation of the embodiment;
[Explanation of symbols]
1 Cassette station (main unit)
2 Robot (Robot Arm)
11 Partition plate 11a Passing window 12 Holding stand (holding portion)
13 Elevator (elevating means)
14-1, 14-2 Cassette 15, 15 ... Glass mask (object)
17 Pusher (Extruding means)
24 Gripper (Robot Arm)
41 Fixed frame (gripping means)
42 Plunger (gripping means)

Claims (4)

A cassette station having a main body with a holding unit for placing a cassette for storing one or more objects conveyed by a robot arm;
A partition plate vertically attached to the upper surface of the main body, having a passage window through which the holding portion passes at a substantially central portion, and separating the upper surface of the main body into a first region and a second region;
On the first area of the upper surface of the main body, an upper end is attached to the second area with a predetermined inclination angle, and has an elevating means for raising and lowering the holding portion, and the inclination angle is
When the elevating means is at the lowest position, the holding portion is located in the first region,
The cassette station according to claim 1, wherein, when the elevating means is at the highest position, the holding portion has an angle at which it is located in the second region. A push-out means that is attached to the second area side of the main body and near the lowest position of the elevating means, and pushes out a part or all of the object stored in the cassette to the first area side; The cassette station according to claim 1. The holding part is
2. The cassette station according to claim 1, further comprising gripping means for gripping one or a plurality of the cassettes on the inclined upper surface. The object is
The cassette station according to any one of claims 1 to 3, wherein the cassette station is a glass mask in which a semiconductor manufacturing pattern is formed on a glass plate.

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