JP3738844B2

JP3738844B2 - Roundness measuring machine

Info

Publication number: JP3738844B2
Application number: JP2002258742A
Authority: JP
Inventors: 昇菊地
Original assignee: Tokyo Seimitsu Co Ltd
Current assignee: Tokyo Seimitsu Co Ltd
Priority date: 2002-09-04
Filing date: 2002-09-04
Publication date: 2006-01-25
Anticipated expiration: 2022-09-04
Also published as: GB0320565D0; GB2393790B; DE10340851A1; JP2004093529A; GB2393790A; DE10340851B4

Description

【０００１】
【発明の属する技術分野】
本発明は真円度測定機に係り、特に被測定物の偏心補正や傾斜補正を行う時の測定倍率自動設定機能を有する真円度測定機に関する。
【０００２】
【従来の技術】
真円度測定機で被測定物の真円度等を測定する場合、真円度測定機の回転軸に対して被測定物のチルチング（傾斜合わせ）とセンタリング（心出し）を行う必要がある。
【０００３】
センタリングは、被測定物の１断面を測定して偏心量を求め、その偏心量が０になるように調整する。また、チルチングは被測定物の高さが異なる２断面を測定し、各断面の偏心量と高さの差とから傾斜量を求める。又は、被測定物の端面が被測定物の軸心と直角の場合は端面１回転分の高さを測定して傾斜量を求め、傾斜量が０になるように調整する。
【０００４】
このセンタリング作業は、検出器で検出した変位量の１／２だけＸＹテーブルを正確に移動する必要があり、またチルチング作業もＸ方向とＹ方向の傾斜に分けて正確に調整する必要があり、どちらも調整作業に時間が掛かるとともに、調整作業に熟練者が必要であるという問題がある。
【０００５】
この問題を解決するため、調整作業を容易に行うためのいくつかの方法が提案されている（例えば、特許文献１参照。）。
【０００６】
【特許文献１】
特開平４−３２９３０６号公報
【０００７】
【発明が解決しようとする課題】
しかし、これら提案された従来の方法においても、偏心量や傾斜量が大きい場合は、先ず低い測定倍率で測定を行い、その測定値に基いて調整する。そして測定倍率を徐々に上げて測定と調整を繰り返す必要があった。この場合測定倍率をいっきに高倍率に挙げて行うと、変位量が測定範囲からはみ出して測定できない場合があり、その場合は測定できる倍率まで落としてやり直す必要があった。
【０００８】
そのため、測定倍率を変更しながら同じ操作を何度も繰り返さなければならないので煩わしく、また調整作業に時間が掛かるという問題が依然として残っていた。
【０００９】
本発明は、このような事情に鑑みてなされたもので、被測定物の心出しや傾斜補正を行うに当たり、測定倍率を変更しながら同じ操作を何度も繰り返す必要がなく、被測定物の心出しや傾斜補正を容易に短時間で行うことのできる真円度測定機を提供することを目的とする。
【００１０】
【課題を解決するための手段】
前記目的を達成するために、請求項１に記載の発明は、被測定物を検出器に対して相対的に回転させ、被測定物の真円度を測定する真円度測定機において、被測定物を載置すると共に、Ｘ方向微動つまみ及びＹ方向微動つまみを有するＸＹテーブルと、前記検出器によって被測定物の側面が１周分計測された時に、前記真円度測定機の回転中心と被測定物の中心とのＸ方向及びＹ方向の偏心量を算出する演算手段と、前記算出されたＸ方向及びＹ方向の偏心量を表示する表示手段と、前記表示されたＸ方向及びＹ方向の偏心量に基いて前記Ｘ方向微動つまみ及びＹ方向微動つまみが操作され、前記Ｘ方向及びＹ方向の偏心量が調整された時に、調整後の被測定物の側面１周分の計測データを予測する処理手段と、を有し、前記予測された計測データから被測定物の偏心補正に最適な測定倍率が前記処理手段によって決定されることを特徴としている。
【００１１】
請求項１の発明によれば、低倍率で被測定物を測定して表示された偏心量に基いて偏心調整した後、次の測定データを予測し、その結果から心出しに最適な測定倍率が決定されるので、測定倍率を徐々に上げて測定と調整を繰り返す必要がなく、被測定物の心出しを容易に短時間で行うことができる。
【００１２】
また、請求項２に記載の発明は、被測定物を検出器に対して相対的に回転させ、被測定物の真円度を測定する真円度測定機において、被測定物を載置すると共に、Ｘ方向傾斜調整つまみ及びＹ方向傾斜調整つまみを有する傾斜テーブルと、前記検出器によって被測定物の側面が少なくとも異なる２箇所の高さで夫々１周分計測された時に、あるいは低倍率で被測定物の端面が１回転分計測された時に、前記真円度測定機の回転軸に対する被測定物のＸ方向及びＹ方向の傾斜量を算出する演算手段と、前記算出されたＸ方向及びＹ方向の傾斜量を表示する表示手段と、前記表示されたＸ方向及びＹ方向の傾斜量に基いて前記Ｘ方向傾斜調整つまみ及びＹ方向傾斜調整つまみが操作され、前記Ｘ方向及びＹ方向の傾斜量が調整された時に、調整後の被測定物の側面の少なくとも異なる２箇所の高さにおける夫々１周分の計測データ、あるいは被測定物の端面１回転分の計測データを予測する処理手段と、を有し、前記予測された計測データから被測定物の傾斜補正に最適な測定倍率が前記処理手段によって決定されることを特徴としている。
【００１３】
請求項２の発明によれば、低倍率で被測定物を測定して表示された傾斜量に基いて傾斜調整した後、次の測定データを予測し、その結果から傾斜補正に最適な測定倍率が決定されるので、測定倍率を徐々に上げて測定と調整を繰り返す必要がなく、被測定物の傾斜補正を容易に短時間で行うことができる。
【００１４】
また、請求項３に記載の発明は、請求項１又は請求項２の発明において、前記表示手段で表示される表示がバーグラフであることを特徴としている。
【００１５】
請求項３の発明によれば、補正量がバーグラフで表示されるので、バーがゼロ位置に減少するまでつまみを回せばよく、偏心補正や傾斜補正の調整を容易に行うことができる。
【００１６】
【発明の実施の形態】
以下添付図面に従って、本発明に係る真円度測定機の好ましい実施の形態について詳説する。尚各図において、同一の部材については同一の番号又は符号を付している。
【００１７】
図１は、本発明に係る真円度測定機の構成を表わすブロック図である。真円度測定機１０は、図１に示すように、本体１４には被測定物２６を載置するＸＹ／傾斜テーブル１２が設けられている。ＸＹ／傾斜テーブル１２は、Ｘ方向微動つまみ２２及びＹ方向微動つまみ２３によってＸ方向及びＹ方向に微動送りがされ、Ｘ方向傾斜つまみ２５及びＹ方向傾斜つまみ２４によってＸ方向及びＹ方向に傾斜調整がされるようになっている。
【００１８】
また、ＸＹ／傾斜テーブル１２は、軸受１６を介してモータ２０によって回転可能に支持されている。モータ２０の回転軸にはエンコーダ１８が取付けられ、回転角が高精度で読込まれるようになっている。
【００１９】
また、真円度測定機１０は先端子３０が被測定物２６に接触して被測定物２６を測定する検出器２８を有しており、検出信号は増幅器３２、Ａ／Ｄ変換器３４を経由して演算／処理手段３６に入力され、処理結果は表示手段４０で表示される。また、真円度測定機１０の動作はプログラム３８で制御される。
【００２０】
軸受１６には超高精度の静圧エアーベアリングが用いられ、ＸＹ／傾斜テーブル１２は０．００５μｍの回転精度で回転される。また、検出器２８には差動変圧器を用いた電気マイクロメータが使用され、被測定物２６に接触する先端子３０の変位量を検出する。
【００２１】
この真円度測定機１０で被測定物２６の真円度等を測定する場合は、被測定物２６をＸＹ／傾斜テーブル１２上に載置した後、最初にＸＹ／傾斜テーブル１２の回転中心と被測定物２６の中心との偏心補正と、ＸＹ／傾斜テーブル１２の回転軸に対する被測定物２６の傾斜補正とを行う。
【００２２】
次に、検出器２８の先端子３０が被測定物２６の側面に接触した状態でＸＹ／傾斜テーブル１２がモータ２０によって１回転され、被測定物２６の側面１周分のデータが採取される。アナログ電圧値として得られた検出信号は、増幅器３２で増幅され、Ａ／Ｄ変換器３４でデジタル信号に変換されて演算／処理手段３６に入力される。演算／処理手段３６ではエンコーダ１８から入力される回転角度データと、検出器２８で検出された変位データとから被測定物２６の真円度を演算し、表示手段４０で表示する。
【００２３】
次に前述の偏心補正の手順について、図２のフローチャートに従って説明する。先ず最初に被測定物２６をＸＹ／傾斜テーブル１２に載置する。この状態を図３に示す。被測定物２６は単にＸＹ／傾斜テーブル１２に載置されただけであるから、図３に示すように、被測定物２６の中心２６ＡはＸＹ／傾斜テーブル１２の回転中心１２Ａに対し図のＸ軸から角度θの方向に偏心量Ｒの心ズレ状態になっている（ステップＳ１）。
【００２４】
この状態で検出器２８の先端子３０を被測定物２６の側面に接触させ、ＸＹ／傾斜テーブル１２を回転させながら低倍率で被測定物２６を１周分測定する。この時の回転角度と検出器２８の出力との関係を図４に示す。この場合、被測定物２６はＸＹ／傾斜テーブル１２の回転中心１２Ａに対し偏心量Ｒを有しているので、回転角度と検出器２８の出力との関係を示すグラフは、図４に示す用にサインカーブとなる（ステップＳ３）。
【００２５】
偏心量ＲのＸ方向偏心量をΔＸ、Ｙ方向偏心量をΔＹとし、ＸＹ／傾斜テーブル１２の回転角度をθｎ、その時の検出器出力をＤＴｎとすると、被測定物２６の１周分の検出器出力から、Ｘ方向及びＹ方向の偏心量は演算／処理手段３６によって次式（１）、及び（２）
【００２６】
【数１】

【００２７】
【数２】

で算出される（ステップＳ５）。
【００２８】
この状態でＸＹ／傾斜テーブル１２を０度の位置に戻し、「Ｘ方向目標検出器出力＝１周測定時の０度での検出器出力−ΔＸ」となるように、Ｘ方向微動つまみ２２を回転させ、Ｘ方向偏心量を調整する。具体的にはＸ方向及びＹ方向の偏心量は表示手段４０によって、図５に示すようにバーグラフで表示されているので、バーグラフのバーが０位置になるまでＸ方向微動つまみ２２を回転させればよい（ステップＳ７）。
【００２９】
次いで、ＸＹ／傾斜テーブル１２を９０度の位置に回転し、「Ｙ方向目標検出器出力＝１周測定時の９０度での検出器出力−ΔＹ」となるように、Ｙ方向微動つまみ２３を回転させ、Ｙ方向偏心量を調整する。このときもＹ方向の偏心量はバーグラフで表示されているので、バーグラフのバーが０位置になるまでＹ方向微動つまみ２３を回転させればよい（ステップＳ９）。
【００３０】
ここで今行った偏心補正が１回目の補正か否かが確認され（ステップＳ１１）、１回目の補正であった場合は演算／処理手段３６によって偏心補正調整後の１周分測定データが予想される。
【００３１】
この１周分測定データの予想は、以下のようにして行われる。即ち、調整されたＸ方向偏心量をｘ、Ｙ方向偏心量をｙとすると、「ｘ＝調整後の０度での検出器出力−Ｘ方向目標検出器出力」、「ｙ＝調整後の９０度での検出器出力−Ｙ方向目標検出器出力」であるので調整された偏心量は、「Ｅ＝√（ｘ²＋ｙ²）」であり、その時の偏心方向は、「Ａ＝ｔａｎ^-1( ｙ／ｘ）」で表わされ、偏心調整後の１周分予想データは次式（３）
【００３２】
【数３】

によって算出される（ステップＳ１３）。図６にこの１周分の予想データのグラフを示す。
【００３３】
次に、この予想された検出器データのＭａｘ値とＭｉｎ値が測定範囲を超えない最大の測定倍率が演算／処理手段３６によって自動的に決定される（ステップＳ１５）。次いでこの決定された測定倍率がこの真円度測定機１０の最高倍率か否か、あるいは自動決定された測定倍率が現状設定されている倍率のまま変更ないか否かが判定される（ステップＳ１７）。
【００３４】
自動決定された測定倍率が最高倍率の場合、あるいは現状設定されている倍率のまま変更ない場合は、この偏心補正手順はここで終了する。一方自動決定された測定倍率が最高倍率でない場合、あるいは現状設定されている倍率よりも高倍率の場合は、決定された測定倍率に変更し、被測定物１周分の測定を再度行う（ステップＳ１９）。
【００３５】
ステップＳ１９の後はステップＳ５に戻り、ステップＳ７、ステップＳ９と繰り返され偏心補正が行われる。次いでステップＳ１１において、補正が１回目ではないと判定され、最終補正が終了しているので偏心補正手順は終了となる。
【００３６】
図７は、このようにして偏心補正が行われた後に被測定物２６の真円度測定を行った時の検出器出力データを表わすグラフである。検出器出力データは、図７に示すように、偏心補正が適切に行われ、偏心による振れが見受けられない。
【００３７】
ＸＹ／傾斜テーブル１２の回転軸に対する被測定物２６の傾斜補正は、被測定物２６の異なる２箇所の高さ位置において１周分のデータが低倍率の測定倍率で採取され、夫々の高さにおけるＸ方向の偏心量、Ｙ方向の偏心量が算出される。算出された２箇所の高さ夫々におけるＸ方向偏心量、Ｙ方向偏心量、及び２箇所の高さ位置の差とから被測定物２６のＸ方向の傾斜量、Ｙ方向の傾斜量が演算／処理手段３６によって算出される。
【００３８】
得られたＸ方向の傾斜量、及びＹ方向の傾斜量を基に傾斜補正が行われる。先ず最初にＸＹ／傾斜テーブル１２の０度の位置で、Ｘ方向傾斜つまみが回転され、Ｘ方向の傾斜量が調整される。このとき表示手段４０のバーグラフ表示を見ながら傾斜量調整が行われる。
【００３９】
続いてＸＹ／傾斜テーブル１２が９０度の位置に回転され、同様にしてＹ方向傾斜つまみが回転されて、Ｙ方向の傾斜量が調整される。以下偏心補正の手順同様、調整後のデータが予想され、予想されたデータに基いて測定倍率が決定されて調整がもう一度繰り返される。この傾斜補正のフローは、基本的な流れは前述の偏心補正の流れと同じであるので、細部の説明は省略する。
【００４０】
また、被測定物の端面が被測定物の軸心と直角の場合は端面１回転分の高さを測定して傾斜量を求めてもよい。
【００４１】
尚、通常は偏心補正と傾斜補正との両方行う場合が多く、その場合前述の偏心補正のフローと傾斜補正のフローとが夫々単独で行われてもよいが、両方のフローがミックスされた形で行われる方がよい。
【００４２】
以上説明した本発明に係る真円度測定機１０では、被測定物２６を載置したＸＹ／傾斜テーブル１２がモータ２０によって回転されるワーク回転型の構成で説明したが、ＸＹ／傾斜テーブル１２が回転せずに検出器２８が回転する検出器回転型の構成であってもよい。また、検出器２８には電気マイクロメータを用いたが、これに限らず、接触式あるいは非接触式の種々の検出器が用いられてもよい。更に、軸受１６としてエアーベアリングを用いたが、これに限らず磁気軸受等その他の高精度軸受が用いられてもよい。
【００４３】
【発明の効果】
以上説明したように本発明の真円度測定機によれば、低倍率で被測定物を測定して表示された偏心量に基いて偏心調整した後、次の測定データを予測し、その結果から心出しに最適な測定倍率が決定されるので、測定倍率を徐々に上げて測定と調整を繰り返す必要がなく、被測定物の心出しを容易に短時間で行うことができる。
【００４４】
また、低倍率で被測定物を測定して表示された傾斜量に基いて傾斜調整した後、次の測定データを予測し、その結果から傾斜補正に最適な測定倍率が決定されるので、測定倍率を徐々に上げて測定と調整を繰り返す必要がなく、被測定物の傾斜補正を容易に短時間で行うことができる。
【００４５】
更に、補正量がバーグラフで表示されるので、偏心補正や傾斜補正の調整を容易に行うことができる。
【図面の簡単な説明】
【図１】本発明の実施の形態に係る真円度測定機の構成を表わすブロック図
【図２】偏心補正の流れを表わすフローチャート
【図３】被測定物が載置された状態を表わす平面図
【図４】被測定物１周分の測定データを示すグラフ
【図５】バーグラフを表わす表示画面
【図６】予想データを示すグラフ
【図７】偏心補正後の測定データを示すグラフ
【符号の説明】
１０…真円度測定機、１２…ＸＹ／傾斜テーブル（ＸＹテーブル、傾斜テーブル）、１４…本体、２２…Ｘ方向微動つまみ、２３…Ｙ方向微動つまみ、２４…Ｙ方向傾斜つまみ、２５…Ｘ方向傾斜つまみ、２６…被測定物、２８…検出器、３６…演算／処理手段（演算手段、処理手段）、４０…表示手段[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a roundness measuring machine, and more particularly to a roundness measuring machine having an automatic measurement magnification setting function when performing eccentricity correction and inclination correction of an object to be measured.
[0002]
[Prior art]
When measuring the roundness of a measured object with a roundness measuring machine, it is necessary to perform tilting and centering of the measured object with respect to the rotation axis of the roundness measuring machine. .
[0003]
In the centering, an eccentric amount is obtained by measuring one cross section of the object to be measured, and is adjusted so that the eccentric amount becomes zero. In tilting, two cross sections with different heights of the object to be measured are measured, and an inclination amount is obtained from an eccentric amount and a height difference of each cross section. Alternatively, when the end surface of the object to be measured is perpendicular to the axis of the object to be measured, the height of one rotation of the end surface is measured to obtain the inclination amount, and the inclination amount is adjusted to be zero.
[0004]
In this centering work, it is necessary to accurately move the XY table by 1/2 of the amount of displacement detected by the detector, and the tilting work needs to be accurately adjusted by dividing the inclination in the X direction and the Y direction. In both cases, the adjustment work takes time, and there is a problem that an expert is required for the adjustment work.
[0005]
In order to solve this problem, several methods for easily performing the adjustment work have been proposed (see, for example, Patent Document 1).
[0006]
[Patent Document 1]
Japanese Unexamined Patent Publication No. 4-329306
[Problems to be solved by the invention]
However, even in these proposed conventional methods, when the amount of eccentricity or the amount of inclination is large, measurement is first performed at a low measurement magnification, and adjustment is performed based on the measurement value. And it was necessary to repeat measurement and adjustment by gradually increasing the measurement magnification. In this case, if the measurement magnification is increased to a high magnification at the same time, the amount of displacement may protrude from the measurement range and cannot be measured.
[0008]
For this reason, the same operation has to be repeated many times while changing the measurement magnification, which is troublesome, and the problem that the adjustment work takes time remains.
[0009]
The present invention has been made in view of such circumstances, and it is not necessary to repeat the same operation over and over while changing the measurement magnification when performing centering or tilt correction of the object to be measured. An object of the present invention is to provide a roundness measuring machine that can easily perform centering and inclination correction in a short time.
[0010]
[Means for Solving the Problems]
In order to achieve the above-mentioned object, the invention according to claim 1 is a roundness measuring machine for measuring the roundness of a measured object by rotating the measured object relative to a detector. An XY table having an X direction fine movement knob and a Y direction fine movement knob, and a center of rotation of the roundness measuring machine when the side surface of the measurement object is measured by the detector for one round by the detector. Calculating means for calculating the amount of eccentricity between the X direction and the center of the measurement object in the X direction and the Y direction, display means for displaying the calculated amount of eccentricity in the X direction and Y direction, and the displayed X direction and Y When the X-direction fine adjustment knob and the Y-direction fine adjustment knob are operated based on the amount of eccentricity in the direction, and the amount of eccentricity in the X direction and Y direction is adjusted, the measurement data for one side of the side of the measured object after adjustment And processing means for predicting, the predicted measurement Optimum measurement magnification eccentricity correction of the workpiece from over data is being determined by said processing means.
[0011]
According to the first aspect of the present invention, after measuring the object to be measured at a low magnification and adjusting the eccentricity based on the displayed eccentricity, the next measurement data is predicted, and from the result, the optimum measurement magnification for centering Therefore, it is not necessary to repeat measurement and adjustment by gradually increasing the measurement magnification, and the object to be measured can be easily centered in a short time.
[0012]
According to a second aspect of the present invention, the object to be measured is placed in a roundness measuring machine that rotates the object to be measured relative to the detector and measures the roundness of the object to be measured. A tilt table having an X-direction tilt adjustment knob and a Y-direction tilt adjustment knob, and when the side surface of the object to be measured is measured at one height at least at two different positions by the detector, or at a low magnification. When the end face of the object to be measured is measured for one rotation, an arithmetic means for calculating the amount of inclination of the object to be measured with respect to the rotation axis of the roundness measuring device in the X direction and the Y direction, and the calculated X direction and Display means for displaying the amount of inclination in the Y direction, and the X direction inclination adjustment knob and the Y direction inclination adjustment knob are operated based on the displayed X direction and Y direction inclination amounts, and the X direction and Y direction After adjustment when the tilt amount is adjusted Processing means for predicting measurement data for one rotation at each of at least two different heights of the side surface of the object to be measured or measurement data for one rotation of the end surface of the object to be measured. It is characterized in that the processing means determines the optimum measurement magnification for correcting the inclination of the object to be measured from the data.
[0013]
According to the second aspect of the present invention, after measuring the object to be measured at a low magnification and adjusting the inclination based on the displayed inclination amount, the next measurement data is predicted, and from the result, the optimum measurement magnification for the inclination correction. Therefore, it is not necessary to repeat measurement and adjustment by gradually increasing the measurement magnification, and the tilt correction of the object to be measured can be easily performed in a short time.
[0014]
The invention described in claim 3 is characterized in that, in the invention of claim 1 or 2, the display displayed by the display means is a bar graph.
[0015]
According to the invention of claim 3, since the correction amount is displayed in a bar graph, it is sufficient to turn the knob until the bar is reduced to the zero position, and the eccentricity correction and the inclination correction can be easily adjusted.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of a roundness measuring machine according to the present invention will be described in detail with reference to the accompanying drawings. In addition, in each figure, the same number or code | symbol is attached | subjected about the same member.
[0017]
FIG. 1 is a block diagram showing the configuration of a roundness measuring machine according to the present invention. As shown in FIG. 1, in the roundness measuring machine 10, an XY / tilting table 12 on which a measurement object 26 is placed is provided on a main body 14. The XY / tilt table 12 is finely fed in the X direction and Y direction by the X direction fine adjustment knob 22 and the Y direction fine adjustment knob 23, and is adjusted in inclination in the X direction and Y direction by the X direction inclination knob 25 and the Y direction inclination knob 24. Is supposed to be done.
[0018]
The XY / tilting table 12 is rotatably supported by a motor 20 via a bearing 16. An encoder 18 is attached to the rotation shaft of the motor 20, and the rotation angle is read with high accuracy.
[0019]
Further, the roundness measuring machine 10 has a detector 28 that measures the device under test 26 with the tip 30 coming into contact with the device under test 26. The detection signal is sent from the amplifier 32 and the A / D converter 34. Then, it is input to the arithmetic / processing means 36 and the processing result is displayed on the display means 40. The operation of the roundness measuring device 10 is controlled by a program 38.
[0020]
An ultra-high precision hydrostatic air bearing is used as the bearing 16, and the XY / tilting table 12 is rotated with a rotational accuracy of 0.005 μm. Further, an electric micrometer using a differential transformer is used as the detector 28 to detect the amount of displacement of the tip terminal 30 that contacts the device under test 26.
[0021]
When measuring the roundness or the like of the measurement object 26 with the roundness measuring device 10, after the measurement object 26 is placed on the XY / tilting table 12, the rotation center of the XY / tilting table 12 is first set. And the center of the measurement object 26 are corrected, and the inclination correction of the measurement object 26 with respect to the rotation axis of the XY / tilting table 12 is performed.
[0022]
Next, the XY / tilting table 12 is rotated once by the motor 20 with the tip terminal 30 of the detector 28 in contact with the side surface of the object to be measured 26, and data for one round of the side surface of the object to be measured 26 is collected. . The detection signal obtained as an analog voltage value is amplified by the amplifier 32, converted into a digital signal by the A / D converter 34, and input to the calculation / processing means 36. The calculation / processing means 36 calculates the roundness of the device under test 26 from the rotation angle data input from the encoder 18 and the displacement data detected by the detector 28 and displays it on the display means 40.
[0023]
Next, the above-described eccentricity correction procedure will be described with reference to the flowchart of FIG. First, the object to be measured 26 is placed on the XY / tilting table 12. This state is shown in FIG. Since the device under test 26 is simply placed on the XY / tilting table 12, the center 26A of the device under test 26 is X in the figure relative to the rotation center 12A of the XY / tilting table 12, as shown in FIG. The eccentricity R is shifted in the direction of the angle θ from the axis (step S1).
[0024]
In this state, the front terminal 30 of the detector 28 is brought into contact with the side surface of the measurement object 26, and the measurement object 26 is measured for one round at a low magnification while the XY / tilting table 12 is rotated. The relationship between the rotation angle at this time and the output of the detector 28 is shown in FIG. In this case, since the DUT 26 has an eccentricity R with respect to the rotation center 12A of the XY / tilting table 12, a graph showing the relationship between the rotation angle and the output of the detector 28 is shown in FIG. Is a sine curve (step S3).
[0025]
The amount of eccentricity R in the X direction is ΔX, the Y direction eccentricity is ΔY, the rotation angle of XY / tilting table 12 is θn, and the detector output at that time is DTn. From the output of the device, the amount of eccentricity in the X and Y directions is calculated by the calculation / processing means 36 according to the following equations (1) and (2):
[0026]
[Expression 1]

[0027]
[Expression 2]

(Step S5).
[0028]
In this state, the XY / tilting table 12 is returned to the 0 degree position, and the X direction fine movement knob 22 is adjusted so that “X direction target detector output = detector output at 0 degree during one round measurement−ΔX”. Rotate to adjust the amount of eccentricity in the X direction. Specifically, since the eccentric amount in the X direction and the Y direction is displayed as a bar graph as shown in FIG. 5 by the display means 40, the X direction fine adjustment knob 22 is rotated until the bar of the bar graph reaches the 0 position. (Step S7).
[0029]
Next, the XY / tilting table 12 is rotated to a position of 90 degrees, and the Y-direction fine movement knob 23 is adjusted so that “Y-direction target detector output = detector output at 90 degrees during one round measurement−ΔY”. Rotate to adjust the Y direction eccentricity. At this time, since the amount of eccentricity in the Y direction is displayed as a bar graph, the Y direction fine adjustment knob 23 may be rotated until the bar of the bar graph reaches the 0 position (step S9).
[0030]
Here, it is confirmed whether or not the eccentric correction that has just been made is the first correction (step S11). If it is the first correction, the measurement data for one round after the eccentricity correction adjustment is predicted by the calculation / processing means 36. Is done.
[0031]
The prediction of the measurement data for one round is performed as follows. That is, if the adjusted X-direction eccentricity amount is x and the Y-direction eccentricity amount is y, “x = detector output at 0 degrees after adjustment−X-direction target detector output”, “y = 90 after adjustment. Therefore, the adjusted eccentricity is “E = √ (x ² + y ² )”, and the eccentric direction at that time is “A = tan ^−1. (y / x) ", and the predicted data for one round after the eccentricity adjustment is given by the following equation (3)
[0032]
[Equation 3]

(Step S13). FIG. 6 shows a graph of predicted data for one round.
[0033]
Next, the maximum measurement magnification at which the Max value and the Min value of the predicted detector data do not exceed the measurement range is automatically determined by the calculation / processing means 36 (step S15). Next, it is determined whether or not the determined measurement magnification is the maximum magnification of the roundness measuring device 10, or whether or not the automatically determined measurement magnification remains unchanged from the currently set magnification (step S17). ).
[0034]
If the automatically determined measurement magnification is the maximum magnification, or if the currently set magnification remains unchanged, this eccentricity correction procedure ends here. On the other hand, when the automatically determined measurement magnification is not the maximum magnification or higher than the currently set magnification, the measurement magnification is changed to the determined measurement magnification, and the measurement for one round of the object to be measured is performed again (step). S19).
[0035]
After step S19, the process returns to step S5, and steps S7 and S9 are repeated to perform eccentricity correction. Next, in step S11, it is determined that the correction is not the first time, and since the final correction has been completed, the eccentricity correction procedure ends.
[0036]
FIG. 7 is a graph showing the detector output data when the roundness of the device under test 26 is measured after the eccentricity correction is performed as described above. As shown in FIG. 7, the detector output data is appropriately corrected for eccentricity, and no shake due to eccentricity is observed.
[0037]
In the inclination correction of the object to be measured 26 with respect to the rotation axis of the XY / tilting table 12, data for one round is collected at a low magnification measurement magnification at two different height positions of the object to be measured 26. The amount of eccentricity in the X direction and the amount of eccentricity in the Y direction are calculated. From the calculated X-direction eccentricity amount, Y-direction eccentricity amount at the two heights, and the difference between the two height positions, the X-direction inclination amount and the Y-direction inclination amount of the measurement object 26 are calculated / Calculated by the processing means 36.
[0038]
The tilt correction is performed based on the obtained tilt amount in the X direction and the tilt amount in the Y direction. First, the X-direction tilt knob is rotated at the 0 degree position of the XY / tilt table 12 to adjust the tilt amount in the X direction. At this time, the tilt amount is adjusted while viewing the bar graph display of the display means 40.
[0039]
Subsequently, the XY / tilt table 12 is rotated to a position of 90 degrees, and the Y-direction tilt knob is similarly rotated to adjust the amount of tilt in the Y direction. Thereafter, similarly to the procedure of eccentricity correction, the adjusted data is predicted, the measurement magnification is determined based on the predicted data, and the adjustment is repeated once more. The basic flow of this inclination correction flow is the same as the above-described eccentricity correction flow, and thus detailed description thereof is omitted.
[0040]
Further, when the end surface of the object to be measured is perpendicular to the axis of the object to be measured, the amount of inclination may be obtained by measuring the height of one end surface rotation.
[0041]
Normally, both the eccentricity correction and the inclination correction are often performed. In this case, the above-described eccentricity correction flow and the inclination correction flow may be performed independently. However, both flows are mixed. It is better to be done at.
[0042]
In the roundness measuring device 10 according to the present invention described above, the XY / tilting table 12 on which the object to be measured 26 is placed has been described as a work rotation type configuration rotated by the motor 20. It may be a detector rotation type configuration in which the detector 28 rotates without rotating. Moreover, although the electric micrometer was used for the detector 28, not only this but various detectors of a contact type or a non-contact type may be used. Furthermore, although an air bearing is used as the bearing 16, the present invention is not limited to this, and other high-precision bearings such as a magnetic bearing may be used.
[0043]
【The invention's effect】
As described above, according to the roundness measuring machine of the present invention, after measuring the measured object at a low magnification and adjusting the eccentricity based on the displayed eccentricity, the next measurement data is predicted, and the result Therefore, it is not necessary to repeat the measurement and adjustment by gradually increasing the measurement magnification, and the object to be measured can be easily centered in a short time.
[0044]
In addition, after measuring the measured object at a low magnification and adjusting the tilt based on the displayed tilt amount, the next measurement data is predicted, and the optimal measurement magnification for tilt correction is determined from the result, so the measurement There is no need to repeat the measurement and adjustment by gradually increasing the magnification, and the inclination of the object to be measured can be easily corrected in a short time.
[0045]
Furthermore, since the correction amount is displayed as a bar graph, the eccentricity correction and the inclination correction can be easily adjusted.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a configuration of a roundness measuring machine according to an embodiment of the present invention. FIG. 2 is a flowchart showing a flow of eccentricity correction. FIG. 3 is a plane showing a state where an object to be measured is placed. [Fig. 4] Graph showing measurement data for one round of the object to be measured [Fig. 5] Display screen showing bar graph [Fig. 6] Graph showing expected data [Fig. 7] Graph showing measurement data after eccentricity correction [Fig. Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Roundness measuring machine, 12 ... XY / inclination table (XY table, inclination table), 14 ... Main body, 22 ... X direction fine adjustment knob, 23 ... Y direction fine adjustment knob, 24 ... Y direction inclination knob, 25 ... X Direction tilting knob, 26 ... object to be measured, 28 ... detector, 36 ... calculation / processing means (calculation means, processing means), 40 ... display means

Claims

In a roundness measuring machine that rotates the measured object relative to the detector and measures the roundness of the measured object,
An XY table for placing an object to be measured and having an X-direction fine movement knob and a Y-direction fine movement knob;
An arithmetic means for calculating the amount of eccentricity in the X direction and the Y direction between the rotation center of the roundness measuring machine and the center of the object to be measured when the side surface of the object to be measured is measured by the detector for one round;
Display means for displaying the calculated amount of eccentricity in the X and Y directions;
When the X-direction fine movement knob and the Y-direction fine movement knob are operated based on the displayed X-direction and Y-direction eccentricity amounts, and the eccentricity amounts in the X-direction and Y-direction are adjusted, the measured object after adjustment And a processing means for predicting measurement data for one side of the side surface,
The roundness measuring machine, wherein the processing means determines a measurement magnification optimum for correcting the eccentricity of the object to be measured from the predicted measurement data.

In a roundness measuring machine that rotates the measured object relative to the detector and measures the roundness of the measured object,
An inclination table for placing the object to be measured and having an X direction inclination adjustment knob and a Y direction inclination adjustment knob,
The roundness is measured when the detector measures at least two different heights of the side surface of the object to be measured, or when the end surface of the object to be measured is measured by one rotation at a low magnification. Computing means for calculating the amount of inclination of the object to be measured with respect to the rotation axis of the machine in the X direction and the Y direction;
Display means for displaying the calculated amount of inclination in the X and Y directions;
When the X-direction tilt adjustment knob and the Y-direction tilt adjustment knob are operated based on the displayed X-direction and Y-direction tilt amounts to adjust the X-direction and Y-direction tilt amounts, Processing means for predicting measurement data for one rotation at each of at least two different heights of the side surface of the measurement object, or measurement data for one rotation of the end face of the measurement object,
The roundness measuring machine, wherein the processing means determines a measurement magnification optimum for the inclination correction of the object to be measured from the predicted measurement data.

The roundness measuring machine according to claim 1 or 2, wherein the display displayed by the display means is a bar graph.