JP3753041B2 - X-ray inspection equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an X-ray inspection apparatus that irradiates an inspection object with X-rays and inspects the inspection object from its transmission image.
[0002]
[Prior art]
There are various types of X-ray inspection apparatuses. X-rays generated in one of the X-ray inspection apparatuses are formed in lines by slits, and the X-ray inspection apparatus irradiates the inspection object with the line X-rays. There is a system in which line X-rays that have passed through an object are received by a line sensor (detector). In this case, it is possible to obtain a two-dimensional transmission image by moving the object to be inspected while irradiating the line-shaped X-ray, and to inspect while moving the object to be inspected and to improve the efficiency of the inspection work. is there.
FIG. 7 shows the configuration of such a conventional X-ray inspection apparatus. Reference numeral 1 denotes an X-ray generator, which is placed on the support base 2 inside the hood 3. Reference numeral 5 denotes an installation plate for the support base 2, which is disposed above the machine casing 14 of the inspection apparatus. Further, a belt conveyor mechanism is provided above the machine frame 14 for transferring the inspection object 17 from the left to the right. Reference numeral 7 denotes an endless belt, which is stretched between the pulleys 8I and 8D. Yes. 6I and 6D are made of rubber containing lead, which prevents X-rays from leaking outward and allows the inspection object 17 to be carried into and out of the apparatus. Reference numeral 9 denotes an electric motor, and a rotation output of the electric motor 9 is transmitted to the endless belt 7 by a belt 11 stretched between a pulley 10 and a pulley 8D attached to the output shaft. Accordingly, the inspection object 17 carried in from the left entrance is transferred from the left to the right by the belt conveyor mechanism. An electric control device 13 is mounted on a lower table in the machine casing 14 of the apparatus. Reference numeral 15 denotes a machine base.
[0003]
Next, the X-ray inspection mechanism will be described. As described above, X-rays from the X-ray generator 1 are emitted downward from the irradiation holes PH formed in the support plate 2P on the support base 2. This X-ray passes through a slit S installed on the installation plate 5 in the irradiation region and is formed in a line shape. That is, the slit S is a shielding plate having an elongated square hole. The X-rays formed in a line shape are irradiated downward through a line-shaped hole 5H formed in the installation plate 5. The line-shaped X-rays irradiate the inspection object 17, and the line-shaped X-rays that pass through the inspection object 17 and include information on the inspection object 17 are detected by the line sensor 12. Since the inspection object 17 is transferred and transmits X-rays, the output from the line sensor 12 is sequentially output, and the inspection object 17 is provided by an image forming device or the like provided in the electric control device 13 based on the data. X-ray transmission image is obtained. Then, the image is displayed on the display 4 installed on the upper stage of the inspection apparatus.
[0004]
In FIG. 7, reference numeral 16 denotes an open / close door provided on the hood 3 which is closed during X-ray irradiation so that X-rays are not leaked to the outside. The opening / closing door is opened when the position of the slit S is adjusted or when maintenance is performed in the hood 3, and an operator (inspector) inserts a hand from this portion to perform the operation.
[0005]
[Problems to be solved by the invention]
In an X-ray inspection apparatus that forms and irradiates linear X-rays with a slit, it is an important matter to adjust the installation position of the slit. That is, when used for a long time, the slit is displaced, or the device is loosened or displaced. In this case, sufficient inspection cannot be realized unless the installation position (direction) of the line sensor matches the direction of the slit. For this purpose, the installation angle of the slit is adjusted. The slit adjustment is performed in the following order.
[0006]
(1) From the image obtained from the line sensor during the X-ray irradiation, the direction of the slit in the axial direction (position and angle) is confirmed.
(2) Pause X-ray irradiation.
(3) Open the hood door.
(4) Adjust the slit position and angle (axial direction).
(5) Close the hood door.
(6) X-rays are irradiated again.
(7) Check the deviation of the slit direction again from the irradiated image.
(8) The above operations (2) to (7) are repeated until the axis of the slit and the axis of the line sensor are aligned.
[0007]
Although the work is carried out according to the above procedure, the slit is arranged in the middle of the X-ray irradiation path, and in order to prevent the operator from being exposed to X-rays, the X-ray irradiation is stopped and stopped many times. It will have to be repeated. Each time the opening / closing frequency of the door is increased, there is a danger that X-ray exposure is likely to occur.
The present invention is intended to provide an X-ray inspection apparatus that solves such problems.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, an X-ray inspection apparatus provided by the present invention includes a guide tube that narrows and guides X-rays generated from an X-ray generator to the vicinity of a slit, and the guide tube and the slit. A protective wall that surrounds the surrounding area is provided. Therefore, the irradiated X-rays are shielded by the guide tube and the protective wall, and there is no risk of exposure. Furthermore, this invention provides the adjustment tool which adjusts the direction and position of a slit while providing a slit so that a movement with respect to an installation surface is possible. Therefore, the position of the slit can be adjusted by opening the door, even during X-ray irradiation.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an X-ray inspection apparatus provided by the present invention will be described with reference to an embodiment shown in the drawings.
FIG. 1 is a diagram showing the configuration of an X-ray inspection apparatus showing the features of the present invention. The feature of the configuration is an irradiation hole PH formed in a support plate 2P which is an X-ray irradiation hole from the X-ray generator 1. In addition, a guide tube T that guides the slit S while narrowing the X-ray in a line shape is suspended.
[0010]
The structure of the guide tube T is shown in detail in FIGS. FIG. 2 is an enlarged view showing a longitudinal section of the guide tube T, and FIG. 3 is a perspective view showing only the guide tube T removed. FIG. 2 is a cross-sectional view of a specific X-ray inspection apparatus, which differs from FIG. 1 schematically showing the configuration in terms of details such as the support base 2 and the installation plate 5. As shown in FIG. 2, the guide tube T is a double tube lined with a lead plate TC, and the outside is formed of a stainless steel TS.
[0011]
The two metal plates are joined by a fixing screw 18 in order to prevent X-ray transmission and maintain strength. The fixing screw 18 is also joined together with end plates 19 at both ends of the guide tube T in the elongated direction. Reference numeral 19F denotes a bent upper end portion that forms the inside of the irradiation hole PH. In FIG. 2, TF is a bent portion at the upper end of the guide tube T, and is for easily and reliably suspending the guide tube T from the support base 2. TH is a hole that penetrates the fixing screw 20 for the suspension.
[0012]
The lower end of the guide tube T is close to the slit S, and the line-shaped X-ray is guided and irradiated to the upper part close to the slit S. On the other hand, a protective wall W surrounding the periphery between the slit S and the guide tube T is installed on the installation plate 5 on the side of the slit S. The height of the protective wall W is set higher than the lower end of the guide tube T by a predetermined distance. Therefore, when X-rays are irradiated from the lower end hole of the guide tube T, the reflected X-rays are not blocked by the protective wall W and radiated outward.
Therefore, even if X-rays are irradiated with the open / close door 16 open, the X-rays are not emitted into the hood 3, and therefore there is no risk of exposure even if a hand is inserted through the open / close door 16.
[0013]
Further, in the present invention, the slit S can be adjusted in its direction and position and can be adjusted. The configuration is shown in FIGS. That is, FIG. 4 is a plan view of the slit S as viewed from above, and the slit S is configured by joining two divided bodies S1 and S2 together. That is, the two divided bodies S1 and S2 are joined, and a small gap SK is formed at the joined portion, and a linear X-ray is formed by the gap SK.
[0014]
By the way, the two divided bodies S1 and S2 can be displaced with respect to the installation base 21. 21H indicates an X-ray irradiation hole. Further, a protective wall W is provided on the outer periphery of the slit S, and a fulcrum pin 22 is screwed to the protective wall W below the right protective wall W as shown in FIG. On the other hand, two movable pins 23, 24 are arranged on the left protective wall W with a constant interval and are arranged at the same distance from the fulcrum pin 22 and screwed together. By adjusting the screwing of the fulcrum pin 22 and the movable pins 23 and 24, the position of the slit S, strictly the gap SK, can be displaced left and right, and its direction (angle) can be adjusted. Moreover, these operations can be performed during X-ray irradiation.
[0015]
FIG. 6 is an enlarged sectional view showing the fulcrum pin 22. As shown in the figure, the tip of the screw cylinder NT has a recess NP, and a ball BL provided in the recess NP via a coil spring SP engages with the slits S1 and S2. Coil springs are not interposed between the movable pins 23 and 24. With such a configuration, the slits S1 and S2 are smoothly engaged with the fulcrum pins 22 and the movable pins 23 and 24, thereby adjusting the slits. Fine and accurate.
[0016]
The characteristics of the X-ray inspection apparatus provided by the present invention are as described in detail above, but are not limited to the above and illustrated examples, and include various modified embodiments.
First, the guide cylinder which is the first feature is not limited to being configured by the joined body with the end plate as described above, and may be a single hollow body having an elongated hole, and not a double shape. For example, it can be a hollow single body made of lead. The guide tube is required to have a shape in which the lower end is close to the slit, but the lower end may be slightly widened to cover the slit. However, even in that case, it is desirable to provide the protective wall W as a peripheral wall having a certain height.
[0017]
The protective wall W is not limited to the shape as shown in the illustrated example, and a rectangular annular frame may be directly attached to the installation plate 5. It should be noted that a means for adjusting the slit S actually needs to be attached to the protective wall W. For this purpose, the shape of the protective wall W can be changed depending on these configurations depending on the adjusting means and the adjustment method. is there. That is, for example, in the case of a system in which the slit S is adjusted by a rotation mechanism, it is necessary to use a protective wall combined with the rotation mechanism, and a circular portion (expansion portion) is formed at the center.
[0018]
By the way, as an adjusting means for the slit S, the illustrated example is a system in which the fulcrum pin 22 and the movable pins 23 and 24 are screwed into the protective wall W. The split bodies S1 and S2 of the slit S can be engaged and displaced by the amount. Or as above-mentioned, it can also carry out by the combination of a rotation mechanism and a left-right displacement mechanism. Further, the slit can be a single body instead of a divided body.
[0019]
The illustrated example is an example of the overall configuration of the X-ray inspection apparatus, the shape of each part, and the like, and various modifications can be given in terms of design. For example, the conveyor mechanism is not limited to the belt system as the transfer mechanism of the object to be inspected 17, and a chain system may be considered, or a reciprocating actuator system that can be pushed out may be used.
The present invention includes all these modified embodiments.
[0020]
【The invention's effect】
Since the X-ray inspection apparatus provided by the present invention is as described in detail above, the slit can be adjusted while viewing the image on the display device by the output from the line sensor during the X-ray irradiation, and the adjustment work time Can be shortened. That is, the operation of turning on / off X-ray irradiation and the opening / closing operation of the hood door are omitted when adjusting the slit. Therefore, assembly and adjustment costs can be reduced. Furthermore, by reducing the X-ray irradiation path, the cost of the product can be significantly reduced by reducing the protective wall, simplifying the protective structure, reducing the interlock mechanism, and the like.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of an X-ray inspection apparatus according to the present invention.
FIG. 2 is an enlarged view showing a main part of the present invention.
FIG. 3 is a perspective view showing a shape of a guide tube which is a main part of the present invention.
FIG. 4 is a diagram showing shapes of a slit and a protective wall, which are the main parts of the present invention.
FIG. 5 is a cross-sectional view of a slit and a protective wall in the present invention.
FIG. 6 is an enlarged view showing a partial cross section of a fulcrum pin which is a slit adjusting tool in the present invention.
FIG. 7 is a diagram showing a configuration of a conventional X-ray inspection apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... X-ray generator 2 ... Support stand 3 ... Hood 4 ... Display 5 ... Installation board 6I, 6D ... Goodwill 7 ... Endless belt 8I, 8D ... Pulley 9 ... Electric motor 12 ... Line sensor S ... Slit S1, S2 ... Division Body 22 ... fulcrum pins 23, 24 ... movable pin T ... guide tube W ... protective wall

Claims (1)

  The X-ray from the X-ray generator is formed in a line shape through a slit installed in the X-ray irradiation area and on the installation surface away from the X-ray generator, and the object to be inspected is irradiated and inspected. In an X-ray inspection apparatus for inspecting an object, a guide cylinder that narrows and guides X-rays generated from the X-ray generator to the vicinity of the slit and surrounds the periphery between the guide cylinder and the slit X-ray inspection characterized in that a protective wall is provided, the slit is disposed so that the direction and position of the slit can be displaced with respect to the installation surface, and an adjustment mechanism for adjusting the displacement is provided. apparatus.

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