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JP3754844B2 - Manufacturing method and manufacturing apparatus for optical fiber preform - Google Patents
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JP3754844B2 - Manufacturing method and manufacturing apparatus for optical fiber preform - Google Patents

Manufacturing method and manufacturing apparatus for optical fiber preform Download PDF

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Publication number
JP3754844B2
JP3754844B2 JP18339099A JP18339099A JP3754844B2 JP 3754844 B2 JP3754844 B2 JP 3754844B2 JP 18339099 A JP18339099 A JP 18339099A JP 18339099 A JP18339099 A JP 18339099A JP 3754844 B2 JP3754844 B2 JP 3754844B2
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optical fiber
preform
refractive index
temperature
manufacturing
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JP2001019456A (en
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康博 中島
忠克 島田
秀夫 平沢
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146Furnaces therefor, e.g. muffle tubes, furnace linings

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、例えば気相軸付け法(VAD法)によって堆積した光ファイバ多孔質母材を脱水、焼結して光ファイバプリフォームを製造する技術に関する。
【0002】
【従来の技術】
従来、気相軸付け法(VAD法)による光ファイバプリフォームの製造として、石英棒等の出発母材を回転させつつ、下方から光ファイバ原料としての四塩化ケイ素(SiCl4 )、及び屈折率制御に必要な四塩化ゲルマニウム(GeCl4 )等のドーパントをコア用バーナからH2 、O2 ガスとともに吹付け、石英棒の軸方向にコア用多孔質母材を堆積させるとともに、この周囲に向けてクラッド用バーナから光ファイバ原料としての四塩化ケイ素(SiCl4 )等をH2 、O2 ガスとともに吹付けてクラッド用多孔質母材を堆積し、堆積した光ファイバ多孔質母材を加熱して脱水、焼結を行い、透明ガラス化して光ファイバプリフォームを製造するような方法が知られている。
【0003】
ここで、光ファイバ多孔質母材を脱水、焼結する際、光ファイバ多孔質母材を加熱炉の石英製の炉芯管内に入れて、炉芯管内に塩素等の脱水作用のあるガスを導入すると同時に、炉芯管の周囲に配設されるヒータで加熱することで脱水、焼結を行うような方法が採用されることがあり、このような技術では、炉芯管の中に不純物を混入させることが許されず、また炉芯管の内部は高温である等の理由から、通常、炉芯管の外壁に温度測定器を取付け、この温度測定器で測定した温度に基づいて温度管理を行っている。
【0004】
【発明が解決しようとする課題】
ところが、上記のように温度測定器を炉芯管の外壁に取付けて温度管理を行う場合、例えば炉芯管が劣化して内部の処理温度が微妙に変化しても、その変化が検出されないため補正することが出来ず、特に古い炉芯管を新しい炉芯管に交換した時など、外壁の温度測定器で温度管理しても内部の処理温度の変化の度合いが大きくなることがあり、焼結された光ファイバプリフォームの屈折率分布等の特性にばらつきが生じるという不具合があった。
【0005】
本発明は上記問題点に鑑みなされたものであり、光ファイバ多孔質母材を脱水、焼結して光ファイバプリフォームを製造するにあたり、脱水、焼結工程の実際の処理温度の変化に伴う屈折率分布等の特性のばらつきを防止することを目的とする。
【0006】
【課題を解決するための手段】
上記目的を達成するため本発明は、請求項1において、出発母材の軸方向に光ファイバ多孔質母材を堆積した後、この光ファイバ多孔質母材を所定温度で加熱し、脱水、焼結することで光ファイバプリフォームを製造し、この工程を繰返すようにした製造方法において、製造した光ファイバプリフォームの屈折率を測定し、この屈折率と目標の屈折率との差を求めて、この差を光ファイバ多孔質母材の加熱温度の補正値に変換するとともに、次回の製造工程における光ファイバ多孔質母材の加熱温度を前記補正値で補正するようにした。
【0007】
このような工程で製造される光ファイバプリフォームについて、前回に製造した光ファイバプリフォームの屈折率を測定することで、脱水、焼結時の実際の処理温度の変化を読取るようにし、次回の製造工程では、実際の処理温度を一定にするよう補正し安定した特性が得られるようにする。
このような方法により、炉芯管が劣化したり、炉芯管を交換したりして実際の処理温度が変化しているにも拘らず、温度測定手段で検知出来ないような時でも、実際の処理温度の変化を補正することが出来、ロットごとの特性の変化が抑制され、特性変化の少ない安定した光ファイバプリフォームを製造出来る。
ここで測定される屈折率とは、特に限定されるものではないが、光ファイバプリフォームの屈折率分布を測定し、それから得られる屈折率差Δn(%)であることが好ましい。
【0008】
また請求項2では、光ファイバ多孔質母材の加熱温度の補正は、測定した屈折率と目標の屈折率の差が所定値を越えた時に行うようにした。
すなわち、各製造工程ごとに毎回補正すれば、より特性の安定した光ファイバプリフォームの製造が可能であるが、反面、複雑な設備構成になりやすく、また設備コストもかかるようになる。
そこで、測定した屈折率と目標の屈折率の差が所定値を越えた時に加熱温度の補正を行うようにし、屈折率を所望の範囲内に管理するようにすれば、より実用的また経済的である。
【0009】
また請求項3では、光ファイバプリフォームの製造装置として、出発母材の軸方向に堆積した光ファイバ多孔質母材を加熱し、脱水、焼結を行わせるための加熱炉と、この加熱炉の加熱温度を調整する温度調整器と、脱水、焼結された光ファイバプリフォームの屈折率を測定するプリフォームアナライザと、測定された屈折率と目標の屈折率との差を求め、この差を加熱炉の加熱温度の補正値に変換した後、この補正値で補正した加熱温度を温度調整器に指令するシーケンサを設けた。
【0010】
そして、製造された光ファイバプリフォームの屈折率をプリフォームアナライザで測定し、シーケンサで目標の屈折率との差を求めて、加熱温度の補正値に変換するとともに、調整器に指令を発して次回製造工程の加熱温度を補正する。
この際、上記屈折率の差が所定の管理幅を越えた時に加熱温度の補正を行うようにすることも出来る。
【0011】
また請求項4では、加熱炉を、光ファイバ多孔質母材が収容される炉芯管と、この炉芯管の周囲に配設される加熱手段と、炉芯管の外壁に取付けられる温度測定器から構成した。
このような構成にすることで、既存の設備を活用して簡易に構成することが出来る。
【0012】
【発明の実施の形態】
本発明の実施の形態について添付した図面に基づき説明する。
ここで図1は本製造装置の構成概要図である。
【0013】
本発明に係る光ファイバプリフォームの製造装置は、石英棒等の出発母材Sに対してコア用バーナから光ファイバ原料としての四塩化ケイ素(SiCl4 )、及び屈折率制御のためのドーパントとしての四塩化ゲルマニウム(GeCl4 )等をH2 、O2 ガスとともに吹付けて軸方向にコア用多孔質母材を堆積させ、この周囲に向けてクラッド用バーナから光ファイバ原料としての四塩化ケイ素(SiCl4 )等をH2 、O2 ガスとともに吹付けてクラッド用多孔質母材を堆積した後、堆積したコア用多孔質母材とクラッド用多孔質母材からなる光ファイバ多孔質母材を加熱し脱水、焼結して光ファイバプリフォームを製造する際の装置として構成され、図1に示すように、出発母材Sの軸方向に形成される光ファイバ多孔質母材Sfを加熱する加熱炉1を備えている。
【0014】
そしてこの加熱炉1は、光ファイバ多孔質母材Sfを収容せしめることの出来る炉芯管2と、この炉芯管2の周囲に配設される加熱手段としてのヒータ3と、炉芯管2の外壁に取付けられる温度測定器としての熱電対4を備えており、前記炉芯管2には、塩素等の脱水作用のあるガスを導入するガス導入部5と、導入されたガスを排出するガス排出部6が設けられている。
【0015】
また、前記ヒータ3は、温度調整器7によって加熱温度が調整可能にされており、この温度調整器7はシーケンサ8に接続されている。
また本装置には、製造された光ファイバプリフォームの屈折率または屈折率分布を測定するプリフォームアナライザ9が設けられており、測定した屈折率データを前記シーケンサ8に送り込むことが出来るようにしている。
この際、測定される屈折率とは、特に限定されるものではないが、実施形態では、光ファイバプリフォームの屈折率分布を測定し、それから得られる屈折率差Δn(%)としている。
ここで屈折率差Δn(%)とは、コア母材とクラッド母材との屈折率の差を示し、この差を100倍して(%)表示したものをいう。
【0016】
以上のような製造装置において、不図示の多孔質母材作製装置で出発母材Sの軸方向にコア用多孔質母材とクラッド用多孔質母材からなる光ファイバ母材Sfを作製した後、この光ファイバ母材Sfを炉芯管2内にセットし、炉芯管2内に脱水作用のあるガスを導入しつつヒータ3で加熱し脱水、焼結して透明ガラス化することでコア母材とクラッド母材を備えた光ファイバプリフォームを製造し、このような一連の製造工程を繰返して多数ロットの光ファイバプリフォームを製造していくようにしているが、本発明では、製造したコア母材の屈折率分布をプリフォームアナライザ9で測定し、この測定データをシーケンサ8に送って屈折率差Δn(%)を求めるとともに、目標の屈折率差Δn(%)との差を求め、この屈折率差の差を、ずれ分に対応するヒータ3の加熱温度の補正値に変換して補正するようにしている。
このため、測定した屈折率差Δn(%)と目標の屈折率差Δn(%)との差と、加熱温度の補正値との関係を表わす検量線を定めている。
【0017】
この際、加熱温度の補正は、各製造ごとに毎回行っても良いが、本実施形態では、屈折率差の差が所定の管理幅を越えた時に行うようにしている。
【0018】
【実施例】
次に本発明の実施例と比較例について説明する。
(実施例)
前述のような装置で炉芯管2を新しいものに交換して光ファイバプリフォームを製造し、コア母材の屈折率分布をプリフォームアナライザ9で測定し、屈折率差Δn(%)を求めたところ、図2(B)に示すように、交換前の場合と比較して屈折率差Δn(%)が0.01%上まわったため、図2(A)に示すように焼結温度を1200℃から1250℃に変更し、次ロットの光ファイバプリフォームを製造した。
この結果、屈折率差Δn(%)を目標値の0.36に合せることが出来た。
【0019】
また、同じ炉芯管2を使用して13回製造したところ、屈折率差Δn(%)が微減し、13回目では屈折率差Δn(%)が管理範囲の±0.002%を越えたため、焼結温度を5℃減じて製造したところ、屈折率差Δn(%)は管理範囲内に戻った。
【0020】
(比較例)
比較のため従来どおり炉芯管2を交換して炉芯管2が割れを起こすまで同一温度で焼結したところ、図3に示すように、屈折率差Δn(%)は経時的に変化し、安定した特性の光ファイバプリフォームを製造することが出来なかった。
この結果から本発明の有効性が確認された。
【0021】
尚、本発明は、上記実施形態に限定されるものではない。上記実施形態は、例示であり、本発明の特許請求の範囲に記載された技術的思想と実質的に同一な構成を有し、同様な作用効果を奏するものは、いかなるものであっても本発明の技術的範囲に包含される。
例えば光ファイバ原料、ドーパントの種類等は任意である。
【0022】
【発明の効果】
以上のように本発明に係る光ファイバプリフォームの製造方法は、請求項1のように、製造した光ファイバプリフォームの屈折率を測定し、この屈折率と目標の屈折率との差を求めて、この差を光ファイバ多孔質母材の加熱温度の補正値に変換して次回の製造工程の加熱温度を補正するようにしたため、脱水、焼結工程の実際の処理温度が変化してもそれを補正することができ、安定した特性の光ファイバプリフォームを製造することが出来る。
この際、請求項2のように、光ファイバ多孔質母材の加熱温度の補正は、測定した屈折率と目標の屈折率の差が所定値を越えた時に行うようにすれば、屈折率を所望の範囲内に管理することが出来、より実用的でまた経済的である。
【0023】
また光ファイバプリフォームの製造装置として、請求項3のように、光ファイバ多孔質母材を加熱して脱水、焼結を行わせるための加熱炉と、この加熱炉の加熱温度を調整する温度調整器と、脱水、焼結された光ファイバプリフォームの屈折率を測定するプリフォームアナライザと、測定された屈折率と目標の屈折率との差を加熱温度の補正値に変換した後、この補正温度を温度調整器に指令するシーケンサを設ければ、上記方法による光ファイバプリフォームを製造することが出来る。
また請求項4のように、加熱炉を、光ファイバ多孔質母材が収容される炉芯管と、この炉芯管の周囲に配設される加熱手段と、炉芯管の外壁に取付けられる温度測定器から構成すれば、既存の設備を活用して簡易に構成することが出来る。
【図面の簡単な説明】
【図1】本発明に係る製造装置の構成概要図である。
【図2】本発明の製造方法で製造した時の測定データで、(A)は焼結温度(縦軸)と炉芯管使用回数(横軸)の関係を表わすグラフ、(B)は屈折率差(縦軸)と炉芯管使用回数(横軸)の関係を表わすグラフである。
【図3】従来の製造方法で製造した時の屈折率差の変化を表わすグラフで、縦軸は屈折率差で横軸は炉芯管使用回数である。
【符号の説明】
1…加熱炉、 2…炉芯管、
3…ヒータ、 4…熱電対、
5…ガス導入部、 6…ガス排出部、
7…温度調整器、 8…シーケンサ、
9…プリフォームアナライザ、
S…出発母材、 Sf…光ファイバ母材。
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a technique for manufacturing an optical fiber preform by dehydrating and sintering an optical fiber porous preform deposited by, for example, a gas phase axial method (VAD method).
[0002]
[Prior art]
Conventionally, as a method of manufacturing an optical fiber preform by a gas phase axis method (VAD method), while rotating a starting base material such as a quartz rod, silicon tetrachloride (SiCl 4 ) as an optical fiber material and a refractive index are rotated from below. A dopant such as germanium tetrachloride (GeCl 4 ) necessary for control is sprayed together with H 2 and O 2 gas from the burner for the core, and a porous base material for the core is deposited in the axial direction of the quartz rod and directed toward the periphery Then, silicon tetrachloride (SiCl 4 ) or the like as an optical fiber raw material is sprayed together with H 2 and O 2 gas from the cladding burner to deposit the porous preform for the cladding, and the deposited optical fiber porous preform is heated. A method is known in which an optical fiber preform is manufactured by dehydration and sintering and forming into a transparent glass.
[0003]
Here, when the optical fiber porous preform is dehydrated and sintered, the optical fiber porous preform is put into a quartz furnace core tube of a heating furnace, and a gas having a dehydrating action such as chlorine is introduced into the furnace core tube. At the same time as the introduction, a method of dehydration and sintering may be employed by heating with a heater arranged around the furnace core tube. In such a technique, impurities are contained in the furnace core tube. In general, a temperature measuring device is attached to the outer wall of the furnace core tube, and the temperature is controlled based on the temperature measured by this temperature measuring device. It is carried out.
[0004]
[Problems to be solved by the invention]
However, when a temperature measuring device is attached to the outer wall of the furnace core tube as described above and temperature management is performed, for example, even if the furnace core tube deteriorates and the internal processing temperature changes slightly, the change is not detected. Even if the temperature is controlled with a temperature measuring instrument on the outer wall, especially when an old furnace core tube is replaced with a new one, the degree of change in the internal processing temperature may increase. There has been a problem in that the optical fiber preform has a dispersion in characteristics such as the refractive index distribution.
[0005]
The present invention has been made in view of the above-mentioned problems. In producing an optical fiber preform by dehydrating and sintering an optical fiber porous base material, it accompanies changes in the actual processing temperature of the dehydration and sintering processes. An object is to prevent variation in characteristics such as a refractive index distribution.
[0006]
[Means for Solving the Problems]
To achieve the above object, according to the present invention, in claim 1, after depositing an optical fiber porous preform in the axial direction of the starting preform, the optical fiber porous preform is heated at a predetermined temperature to be dehydrated and baked. In the manufacturing method in which the optical fiber preform is manufactured by repeating the steps and this process is repeated, the refractive index of the manufactured optical fiber preform is measured, and the difference between the refractive index and the target refractive index is obtained. The difference is converted into a correction value for the heating temperature of the optical fiber porous preform, and the heating temperature of the optical fiber porous preform in the next manufacturing process is corrected with the correction value.
[0007]
By measuring the refractive index of the optical fiber preform manufactured in the previous process for the optical fiber preform manufactured in such a process, the change in the actual processing temperature during dehydration and sintering is read. In the manufacturing process, the actual processing temperature is corrected to be constant so that stable characteristics can be obtained.
Even if the furnace core tube is deteriorated by such a method or the furnace core tube is replaced and the actual processing temperature is changed, the actual temperature cannot be detected by the temperature measuring means. Therefore, it is possible to manufacture a stable optical fiber preform in which the change in characteristics of each lot is suppressed and the change in characteristics is small.
The refractive index measured here is not particularly limited, but is preferably the refractive index difference Δn (%) obtained by measuring the refractive index distribution of the optical fiber preform.
[0008]
According to the second aspect of the present invention, the heating temperature of the optical fiber porous preform is corrected when the difference between the measured refractive index and the target refractive index exceeds a predetermined value.
That is, if correction is made every time for each manufacturing process, it is possible to manufacture an optical fiber preform with more stable characteristics. However, on the other hand, a complicated equipment configuration is likely to occur, and the equipment cost also increases.
Therefore, it is more practical and economical if the heating temperature is corrected when the difference between the measured refractive index and the target refractive index exceeds a predetermined value, and the refractive index is controlled within a desired range. It is.
[0009]
According to a third aspect of the present invention, as an optical fiber preform manufacturing apparatus, a heating furnace for heating, dehydrating and sintering an optical fiber porous base material deposited in the axial direction of the starting base material, and the heating furnace Find the difference between the measured refractive index and the target refractive index, and the temperature controller that adjusts the heating temperature of the fiber, the preform analyzer that measures the refractive index of the dehydrated and sintered optical fiber preform, Is converted into a correction value for the heating temperature of the heating furnace, and then a sequencer is provided for instructing the temperature regulator to the heating temperature corrected by this correction value.
[0010]
Then, the refractive index of the manufactured optical fiber preform is measured by a preform analyzer, the difference from the target refractive index is obtained by a sequencer, converted into a correction value for the heating temperature, and a command is issued to the adjuster. The heating temperature of the next manufacturing process is corrected.
At this time, it is also possible to correct the heating temperature when the difference in refractive index exceeds a predetermined management width.
[0011]
According to a fourth aspect of the present invention, there is provided a heating furnace comprising: a furnace core tube in which an optical fiber porous preform is accommodated; heating means disposed around the furnace core tube; and temperature measurement attached to an outer wall of the furnace core tube It consisted of a vessel.
By adopting such a configuration, it is possible to simply configure using existing equipment.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the accompanying drawings.
Here, FIG. 1 is a schematic configuration diagram of the manufacturing apparatus.
[0013]
The optical fiber preform manufacturing apparatus according to the present invention uses silicon tetrachloride (SiCl 4 ) as an optical fiber raw material from a core burner with respect to a starting base material S such as a quartz rod, and a dopant for controlling the refractive index. A porous base material for the core is deposited in the axial direction by spraying germanium tetrachloride (GeCl 4 ) or the like together with H 2 and O 2 gases, and silicon tetrachloride as an optical fiber raw material is applied from the cladding burner toward the periphery. (SiCl 4 ) or the like is sprayed together with H 2 and O 2 gases to deposit a porous base material for cladding, and then an optical fiber porous base material comprising the core porous base material and the porous base material for cladding. 1 is constructed as an apparatus for producing an optical fiber preform by dehydration and sintering, and as shown in FIG. 1, the optical fiber porous preform Sf formed in the axial direction of the starting preform S is heated. You A heating furnace 1 is provided.
[0014]
The heating furnace 1 includes a furnace core tube 2 that can accommodate the optical fiber porous base material Sf, a heater 3 as a heating means disposed around the furnace core tube 2, and the furnace core tube 2. The thermocouple 4 is provided as a temperature measuring device attached to the outer wall of the gas. The furnace core tube 2 is provided with a gas introduction part 5 for introducing a gas having a dehydrating action such as chlorine, and the introduced gas is discharged. A gas discharge unit 6 is provided.
[0015]
The heating temperature of the heater 3 can be adjusted by a temperature regulator 7, and the temperature regulator 7 is connected to a sequencer 8.
The apparatus is also provided with a preform analyzer 9 for measuring the refractive index or refractive index distribution of the manufactured optical fiber preform so that the measured refractive index data can be sent to the sequencer 8. Yes.
At this time, the refractive index to be measured is not particularly limited, but in the embodiment, the refractive index distribution of the optical fiber preform is measured, and the refractive index difference Δn (%) obtained therefrom is obtained.
Here, the refractive index difference Δn (%) indicates a difference in refractive index between the core base material and the clad base material, which is expressed by multiplying this difference by 100 (%).
[0016]
In the manufacturing apparatus as described above, after the optical fiber preform Sf composed of the core porous preform and the cladding porous preform in the axial direction of the starting preform S is produced in the porous preform producing apparatus (not shown). Then, the optical fiber preform Sf is set in the furnace core tube 2 and heated by the heater 3 while introducing a gas having a dehydrating action into the furnace core tube 2, dehydrated and sintered to form a transparent glass. An optical fiber preform having a base material and a clad base material is manufactured, and a series of manufacturing processes are repeated to manufacture a large number of optical fiber preforms. The refractive index distribution of the core base material measured is measured by the preform analyzer 9 and this measurement data is sent to the sequencer 8 to obtain the refractive index difference Δn (%), and the difference from the target refractive index difference Δn (%) is calculated. Find the difference in refractive index difference, Correction is performed by converting the correction value to the heating temperature of the heater 3 corresponding to the minute.
Therefore, a calibration curve representing the relationship between the difference between the measured refractive index difference Δn (%) and the target refractive index difference Δn (%) and the correction value of the heating temperature is defined.
[0017]
At this time, the correction of the heating temperature may be performed every time for each production, but in the present embodiment, the heating temperature is corrected when the difference in the refractive index difference exceeds a predetermined management width.
[0018]
【Example】
Next, examples and comparative examples of the present invention will be described.
(Example)
An optical fiber preform is manufactured by replacing the furnace core tube 2 with a new one using the apparatus described above, and the refractive index distribution of the core preform is measured by the preform analyzer 9 to obtain the refractive index difference Δn (%). As a result, as shown in FIG. 2B, the refractive index difference Δn (%) was increased by 0.01% compared to the case before the replacement, so that the sintering temperature was changed as shown in FIG. The temperature was changed from 1200 ° C. to 1250 ° C., and the optical fiber preform of the next lot was manufactured.
As a result, the refractive index difference Δn (%) could be adjusted to the target value of 0.36.
[0019]
Moreover, when manufactured 13 times using the same furnace core tube 2, the refractive index difference Δn (%) decreased slightly, and in the 13th time, the refractive index difference Δn (%) exceeded ± 0.002% of the control range. When the sintering temperature was reduced by 5 ° C., the refractive index difference Δn (%) returned to the control range.
[0020]
(Comparative example)
For comparison, when the furnace core tube 2 was replaced as before and sintered at the same temperature until the furnace core tube 2 cracked, the refractive index difference Δn (%) changed with time as shown in FIG. An optical fiber preform with stable characteristics could not be manufactured.
From this result, the effectiveness of the present invention was confirmed.
[0021]
The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.
For example, the optical fiber raw material, the kind of dopant, etc. are arbitrary.
[0022]
【The invention's effect】
As described above, the method for manufacturing an optical fiber preform according to the present invention measures the refractive index of the manufactured optical fiber preform and determines the difference between the refractive index and the target refractive index. This difference is converted into a correction value for the heating temperature of the optical fiber porous base material to correct the heating temperature in the next manufacturing process, so that even if the actual processing temperature of the dehydration and sintering processes changes. This can be corrected, and an optical fiber preform with stable characteristics can be manufactured.
At this time, as described in claim 2, the correction of the heating temperature of the optical fiber porous preform is performed when the difference between the measured refractive index and the target refractive index exceeds a predetermined value. It can be managed within a desired range, and is more practical and economical.
[0023]
Further, as an optical fiber preform manufacturing apparatus, as in claim 3, a heating furnace for heating and dehydrating and sintering an optical fiber porous preform, and a temperature for adjusting the heating temperature of the heating furnace After converting the difference between the measured refractive index and the target refractive index into a correction value for the heating temperature after adjusting the conditioner, the preform analyzer that measures the refractive index of the dehydrated and sintered optical fiber preform, If a sequencer for instructing the temperature adjustment to the correction temperature is provided, the optical fiber preform can be manufactured by the above method.
According to a fourth aspect of the present invention, the heating furnace is attached to the furnace core tube in which the optical fiber porous preform is accommodated, the heating means disposed around the furnace core tube, and the outer wall of the furnace core tube. If it comprises a temperature measuring device, it can be simply constructed using existing equipment.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a manufacturing apparatus according to the present invention.
2A and 2B are measurement data when manufactured by the manufacturing method of the present invention, where FIG. 2A is a graph showing the relationship between the sintering temperature (vertical axis) and the number of furnace core tubes used (horizontal axis), and FIG. It is a graph showing the relationship between a rate difference (vertical axis) and the use frequency (horizontal axis) of a furnace core tube.
FIG. 3 is a graph showing a change in refractive index difference when manufactured by a conventional manufacturing method, where the vertical axis indicates the refractive index difference and the horizontal axis indicates the number of times the furnace core tube is used.
[Explanation of symbols]
1 ... heating furnace, 2 ... furnace core tube,
3 ... heater, 4 ... thermocouple,
5 ... Gas introduction part, 6 ... Gas discharge part,
7 ... Temperature controller, 8 ... Sequencer,
9 ... Preform analyzer,
S: Starting base material, Sf: Optical fiber base material.

Claims (4)

出発母材の軸方向に光ファイバ多孔質母材を堆積した後、この光ファイバ多孔質母材を所定温度で加熱し、脱水、焼結することで光ファイバプリフォームを製造し、この工程を繰返すようにした製造方法であって、製造した光ファイバプリフォームの屈折率を測定し、この屈折率と目標の屈折率との差を求めて、この差を光ファイバ多孔質母材の加熱温度の補正値に変換するとともに、次回の製造工程における光ファイバ多孔質母材の加熱温度を前記補正値で補正することを特徴とする光ファイバプリフォームの製造方法。After depositing an optical fiber porous preform in the axial direction of the starting preform, this optical fiber porous preform is heated at a predetermined temperature, dehydrated and sintered to produce an optical fiber preform. The manufacturing method is to repeat the measurement, the refractive index of the manufactured optical fiber preform is measured, the difference between this refractive index and the target refractive index is obtained, and this difference is calculated as the heating temperature of the optical fiber porous preform. And a heating temperature of the optical fiber porous preform in the next manufacturing process is corrected with the correction value. 請求項1に記載の光ファイバプリフォームの製造方法において、前記光ファイバ多孔質母材の加熱温度の補正は、測定した屈折率と目標の屈折率との差が所定値を越えた時に行われることを特徴とする光ファイバプリフォームの製造方法。2. The method of manufacturing an optical fiber preform according to claim 1, wherein the correction of the heating temperature of the optical fiber porous preform is performed when the difference between the measured refractive index and the target refractive index exceeds a predetermined value. An optical fiber preform manufacturing method characterized by the above. 出発母材の軸方向に堆積した光ファイバ多孔質母材を加熱し、脱水、焼結を行わせるための加熱炉と、この加熱炉の加熱温度を調整する温度調整器と、脱水、焼結された光ファイバプリフォームの屈折率を測定するプリフォームアナライザと、測定された屈折率と目標の屈折率との差を求め、この差を加熱炉の加熱温度の補正値に変換した後、この補正値で補正した加熱温度を前記温度調整器に指令するシーケンサを備えたことを特徴とする光ファイバプリフォームの製造装置。A heating furnace for heating, dehydrating and sintering the optical fiber porous base material deposited in the axial direction of the starting base material, a temperature controller for adjusting the heating temperature of the heating furnace, and dehydrating and sintering The difference between the measured refractive index and the target refractive index is calculated and the difference is converted into a correction value for the heating temperature of the heating furnace. An apparatus for manufacturing an optical fiber preform, comprising: a sequencer that instructs the temperature regulator to correct a heating temperature corrected with a correction value. 請求項3に記載の光ファイバプリフォームの製造装置において、前記加熱炉は、前記光ファイバ多孔質母材が収容される炉芯管と、この炉芯管の周囲に配設される加熱手段と、前記炉芯管の外壁に取付けられる温度測定器を備えたことを特徴とする光ファイバプリフォームの製造装置。The apparatus for manufacturing an optical fiber preform according to claim 3, wherein the heating furnace includes a furnace core tube in which the optical fiber porous preform is accommodated, and a heating unit disposed around the furnace core tube. An apparatus for manufacturing an optical fiber preform, comprising a temperature measuring device attached to the outer wall of the furnace core tube.
JP18339099A 1999-06-29 1999-06-29 Manufacturing method and manufacturing apparatus for optical fiber preform Expired - Fee Related JP3754844B2 (en)

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