JP3868211B2 - Housing structure of heat treatment equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a housing structure of a heat treatment apparatus.
[0002]
[Prior art]
FIG. 5 is a diagram showing an outline of a housing structure in a conventional heat treatment apparatus. First, in (a), a square cylindrical outer container 102 is installed on a base 101. Then, the preassembled inner container 103 for performing heat treatment inside is inserted into the outer container 102. After the insertion, as shown in (b), the heat insulating material 104 is pushed into the gap between the outer container 102 and the inner container 103, the lid 105 is put on, and the outer container 102 is closed.
[0003]
[Problems to be solved by the invention]
In the case structure of the conventional heat treatment apparatus as described above, it is not easy to push the heat insulating material 104 from above, and the work efficiency is poor. Moreover, the heat insulating material 104 may not reach the lower corner , and in such a case, a sufficient heat insulating effect cannot be obtained.
[0004]
In view of the conventional problems as described above, it is an object of the present invention to provide a housing structure for a heat treatment apparatus in which a heat insulating material can be easily attached and an excellent heat insulating effect can be obtained.
[0005]
[Means for Solving the Problems]
The housing structure of the heat treatment apparatus of the present invention includes a base, a heat insulating material provided on the base, and is fixed to the base by being placed on the base via the heat insulating material. On the outer surface of the inner container, a box-shaped inner container for heat treatment, another heat insulating material along the outer surface other than the bottom surface of the inner container, and a plurality of panels interposing the other heat insulating material on the inner surface side The heat insulating material is placed along the heat insulating material and insulated from the inner container , and these panels are fastened to each other to form a casing outside the inner container and are also fastened to the base. An outer container and an outer container cover provided with a gap on at least a part of the outer surface of the outer container , and an opening for carrying in or out the object to be heat-treated is provided at a predetermined position of the inner container and the outer container. Corresponding to this, an openable / closable part is provided at a predetermined part of the outer container or the outer container cover. It has been kicked.
In the case structure of the heat treatment apparatus configured as described above, the inner container is installed on the base via the heat insulating material, and then the panel is arranged via the other heat insulating material, and the panels are fastened to each other. And an outer container is formed by fastening also to a base. Further, the outer container cover has a surface temperature lower than that of the outer container by forming an air layer between the outer container cover and the outer container.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
1A and 1B are views showing the appearance of a heat treatment apparatus according to an embodiment of the present invention. FIG. 1A is a rear view, and FIG. 1B is a right side view with respect to FIG. FIG. 2 is a plan view showing a schematic structure inside the heat treatment apparatus. In FIG. 1, the heat treatment apparatus comprises a heat treatment chamber 2 on a rectangular parallelepiped base 1 supported by a large number of support legs 1a.
[0007]
1 and 2, the heat treatment chamber 2 includes a box-shaped inner container 3 that can be sealed, and an outer container 4 that covers the other five surfaces (back surface, front surface, both side surfaces, and upper surface) except the bottom surface of the inner container 3. A heat insulating material 5 provided between a gap between the inner container 3 and the outer container 4, a bottom surface of the inner container 3 and the upper surface of the base 1, and an outer container cover 6 that covers a part of the outer surface of the outer container 4. The top cover 7 on the upper part of the outer container cover 6 is provided. The outer container 4 is composed of five panels (details will be described later) corresponding to the above five surfaces, and each panel has a lid-like shape with its edge portion bent. An inspection door 8 is provided on the back side of the heat treatment chamber 2, and a shutter 10 that is opened and closed when the workpiece 9 is carried in or out is provided on the front side. Inside the inspection door 8 and the shutter 10, the heat insulating material 5 is attached.
[0008]
Inside the inner container 3 (FIG. 2), a heater 11, a sirocco fan 12 that circulates hot air, and a filter 13 that reduces the hot air to a predetermined cleanliness or less are provided. When the sirocco fan 12 is rotationally driven by the motor 14 attached to the outside of the outer container 4, the hot air circulates through the path indicated by the arrow, and the object 9 is heat-treated. The object to be processed 9 is a glass substrate used for a flat display such as a liquid crystal panel or a plasma display panel, and is placed in multiple stages on a rack (not shown). A space for housing the motor 14 is covered with a decorative cover 15.
[0009]
Next, assembly of the heat treatment chamber 2 configured as described above will be described. FIG. 3 is an exploded perspective view showing an assembling procedure of main casings constituting the heat treatment chamber 2. In addition, the inner container 3 shall be assembled previously. In the figure, first, the inner container 3 is placed at a predetermined position on the base 1 through the heat insulating material 5 and fixed to the base 1. Next, among the five panels 41, 42, 43, 44, 45 constituting the outer container 4, the heat insulating material 5 is put on the inner surface side of the four panels 41 to 44 on the back surface, front surface, and both side surfaces. And each is arrange | positioned along the corresponding surface of the inner container 3, and each panel 41-44 is fastened also to the base 1 while fastening each other. Further, the remaining one panel 45 is stacked on the top plate of the inner container 3 with the heat insulating material 5 interposed therebetween, with the non-folded surface of the edge portion facing down, and this is put on the four previous panels 41. Fasten with ~ 44. Thus, the outer container 4 (41 to 45) is formed on the five surfaces of the inner container 3 via the heat insulating material 5. Moreover, the heat insulating material 5 is arrange | positioned at the whole outer surface (6 surfaces) of the inner container 3 also including a bottom face. Since this operation is an operation of attaching the panels 41 to 45 after attaching the necessary heat insulating material 5 in advance, it can be performed easily and in a short time. Moreover, since the heat insulating material 5 reaches 6 area | regions reliably, the outstanding heat insulation effect can be acquired.
[0010]
FIG. 4 is a longitudinal sectional view showing a fastening structure between members in the upper part of the outer container 4. After the outer container 4 is configured as described above, the top cover 7 is attached to the upper end surfaces of the rear panel 41 and the right panel 44 of the outer container 4 as shown in FIG. Although the top cover 7 is attached in addition to the shutter 10 elevating part on the front side, the illustration thereof is omitted. A large number of holes 7a for allowing air to pass through are provided in the lower end surface of the top cover 7 in the attached state. Subsequently, the back side panel 61 and the right side panel 62 of the outer container cover 6 are attached. The upper portions of these panels 61 and 62 are fastened to the top cover 7, and the lower portions are fastened to the base 1. By attaching the outer container cover 6, an air layer is formed between the panels (41, 44) of the outer container 4 as shown in FIG. 4. Thereby, the surface temperature of the outer container cover 6 is reduced from the surface temperature of the outer container 4. Further, the outer container cover 6 has the significance of improving the aesthetics by hiding bolts exposed on the surface of the outer container 4.
[0011]
Finally, the inspection door 8 is attached to the back side panel 61 of the outer container cover 6 in FIG. 3, and the shutter 10 and the like are attached to the front side, and the main housing of the heat treatment chamber 2 is completed.
In addition, the outer container cover 6 and the top cover 7 can be provided not only on the back surface and the right side surface but also on other surfaces as necessary.
[0012]
【The invention's effect】
The present invention configured as described above has the following effects.
According to the housing structure of the heat treatment apparatus of the present invention, after the inner container is installed on the base via the heat insulating material, the panel is arranged via the other heat insulating material, and the panels are fastened to each other. Since the outer container is formed by fastening to the base, it is easy to attach the heat insulating material, and the outer container can be easily assembled. Moreover, since the heat insulating material reaches every corner reliably, an excellent heat insulating effect can be obtained. Furthermore, since an air layer is formed between the outer container cover and the outer container, the surface temperature of the outer container cover is lower than that of the outer container, which is safe.
[Brief description of the drawings]
1A and 1B are views showing an external appearance of a heat treatment apparatus according to an embodiment of the present invention, in which FIG. 1A is a rear view and FIG. 1B is a right side view with respect to FIG.
FIG. 2 is a plan view showing a schematic structure inside the heat treatment apparatus.
FIG. 3 is an exploded perspective view showing a procedure for assembling a main housing constituting the heat treatment chamber of the heat treatment apparatus.
FIG. 4 is a longitudinal sectional view showing details of a fastening structure between members in the upper part of the outer container of the casing.
FIG. 5 is a perspective view showing an outline of a housing structure of a conventional heat treatment apparatus.
[Explanation of symbols]
3 inner container 4 outer container 5 heat insulating material 6 outer container cover 41 to 45 panel 61 rear side panel 62 right side panel

Claims (1)

The base,
A heat insulating material provided on the base;
A box-shaped inner container that is placed on the base via the heat insulating material and fixed to the base, and heat-treated inside;
Other heat insulating materials along the outer surface other than the bottom surface of the inner container,
A plurality of panels interposing the other heat insulating material on the inner surface side are arranged in a state of being insulated from the inner container along the heat insulating material along the outer surface of the inner container , and these panels are fastened to each other. An outer container configured on the outside of the inner container and fastened to the base;
An outer container cover provided with a gap on at least a part of the outer surface of the outer container ,
An opening for carrying in or out the object to be heat-treated is provided at a predetermined position of the inner container and the outer container, and an opening / closing part is provided at a predetermined position of the outer container or the outer container cover correspondingly. A housing structure of a heat treatment apparatus characterized by

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