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JP3928742B2 - Silica glass for laser - Google Patents
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JP3928742B2 - Silica glass for laser - Google Patents

Silica glass for laser Download PDF

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Publication number
JP3928742B2
JP3928742B2 JP27372795A JP27372795A JP3928742B2 JP 3928742 B2 JP3928742 B2 JP 3928742B2 JP 27372795 A JP27372795 A JP 27372795A JP 27372795 A JP27372795 A JP 27372795A JP 3928742 B2 JP3928742 B2 JP 3928742B2
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Japan
Prior art keywords
silica glass
rare earth
laser
glass
silica
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JP27372795A
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JPH0986952A (en
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靖 藤本
朗 藤ノ木
正大 中塚
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Shin Etsu Quartz Products Co Ltd
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Shin Etsu Quartz Products Co Ltd
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Description

【0001】
【産業上の利用分野】
本発明は、光学用シリカガラス、さらに詳しくは光学特性、非線形光学特性等の特性を有する光学用シリカガラスに関する。
【0002】
【従来の技術】
従来、機能性元素をドーピングし、光学特性、非線形光学特性、電気又は磁気特性等の特性を付与したガラスやセラミックスが多数開発され、実用に供されている。特にガラスに希土類元素をドープしたレーザーガラスは大きな発振体が得られることから、単結晶に比べて大出力レーザー用に適し各種のレーザーガラスが提案されている。前記レーザーガラスとしては、一般にリン酸系ガラス基体に希土類元素をドープしたレーザーガラスが用いられているが、リン酸系ガラスは熱衝撃定数が0.43W/cmと小さいところから、例えば核融合ドライバー等の高平均出力レーザーに作製すると、レーザー発振の際に蓄積されたエネルギーで基材のガラスが破壊される欠点があった。そこで熱衝撃定数が14.5W/cmとリン酸系ガラスよりも2桁も高いシリカガラスを基材とするレーザーガラスが注目され研究がなされた。例えばGalant.et alの溶融法によるレーザーガラス、Edward et alのゾル−ゲル法によるNdドープシリカガラス等が提案された。ところが前記レーザーシリカガラスは、希土類元素をドープしたとき、極少量から希土類元素同志が会合し、レーザー効率が悪かった。こうした問題点を解決するため希土類元素とともにAl23やP23を共ドープしAlやPをNd3+に配位させNd同志の会合を防止するレーザーガラスが特開昭60−11245号公報で提案された。
【0003】
【発明が解決しようとする課題】
ところが、上記公報記載のシリカガラスは、Ndに比べて好ましくは10倍等量以上のAl23又はP23をドープするが、単にNdとAl又はPをシリカガラス中にドープするためその配位状態が不安定で、ドープしたNd全てにAlやPが配位することがなく会合するNdが存在する。この会合したNdはレーザーの発振に寄与しないばかりか、レーザー光を吸収する作用を有しレーザー発振効率を低下させる。特にNdの濃度が0.5mol%以上になるとNdが会合したクラスターのためレーザー発振効率は急激に低下した。
【0004】
こうした現状に鑑み、本発明者等は鋭意研究を重ねた結果、予め希土類元素を安定した配位場に固定しその状態でシリカガラス中にドープすることで、高濃度であっても希土類元素同志の会合がなく、ドープ元素の機能が十分に発揮できる光学用シリカガラスが得られることを見出し、本発明を完成したものである。すなわち
【0005】
本発明は、希土類元素が会合することなくドープした光学用シリカガラスを提供することを目的とする。
【0007】
さらに、本発明は、大型で、かつ高出力のレーザーシリカガラスを提供することを目的とする。
【0008】
【課題を解決するための手段】
上記目的を達成する本発明は、希土類元素を固定したゼオライトとシリカ原料とを焼結してなるシリカガラスであって、前記希土類元素が会合することなく0.1〜4wt%ドーピングされている機能性シリカガラスに係る。
【0009】
上記希土類元素とは、周期律表IIIB族のランタン系列元素及びアクチニウム系列元素であって各種機能特性を有する元素をいう。特にランタン系列元素、中でもNdが好適である。本発明の機能性シリカガラスは、希土類元素が図1に示すようにアルミノシロキサンの6角柱構造(D6R)、すなわち12個の頂点のうち6個がAl、残り6個がSiが占めている構造、で構成される籠の中央のSIサイトに固定されたゼオライトとシリカ原料とを焼成してなるシリカガラスである。前記籠の中央にあるSIサイトは安定した配位場を構成し、このSIサイトはフォージャサイトの場合単位セル当り16個存在する。前記SIサイトには本来Naが占めているがそのうち3〜13個、好ましくは9個を希土類元素でイオン交換し、残りのサイトにNH、Y又はLaを配位することで希土類元素を安定して固定できる。前記ゼオライトとしては、フォージャサイトタイプのゼオライトや該フォージャサイトと性質が類似のシクロデキストリン等が挙げられる。特にフォージャサイトが好ましく、フォージャサイトA{(Na,K,Ca,Mg)29.5[(AlO59(SiO132]・235HO}、フォージャサイトX{Na86[(AlO86(SiO106]・246HO}又はフォージャサイトY{Na56[(AlO56(SiO136]・250HO}が利用される。本発明の機能性シリカガラスは前記籠構造が1つのユニット、すなわち機能性元素の周辺を他の元素で覆った状態でシリカガラス中にドープされているので、希土類元素の会合がなく、希土類元素が0.1〜4wt%の範囲でドープされる。ドープ濃度が0.1wt%未満では希土類元素の特性が発揮されず、またドープ濃度が4wt%を超えるとガラス化領域を越えシリカガラスとならなくなる。さらに希土類元素がSIサイトの13個を超えて配位すると、希土類元素の離脱が生じ会合が起こる。前記希土類元素が安定した配位場に固定されたゼオライトは、ゼオライトと希土類元素の水溶性化合物とを水中で混合し、加熱しイオン交換したのち、塩化アンモニウム溶液で処理することで製造される。前記希土類元素の水溶性化合物としては希土類元素の塩化物、硝酸、水酸化物塩等を挙げることができ、それらの単独又は2種以上が使用される。希土類元素であってもYb又はLaのように機能性を示さない元素は、SIサイトに配位されても離脱による会合を示さないところから希土類元素の置換数をコントロールする元素として重要である。しかもこの元素を配位させることでゼオライト中のアルカリ元素濃度を低下でき、アルカリ元素の存在を嫌う分野での利用に好適である。前記希土類元素の置換数のコントロールとしては希土類元素のイオン交換後、塩化アンモニウム溶液で処理するのがよい。前記塩化アンモニウム溶液の濃度、処理時間を適宜選ぶことにより置換数を任意に変えることができる。また、鈍感な希土類元素を併用することでも置換数のコントロールは可能である。希土類元素が機能を発揮する最適な置換数は9個であり、その場合飽和塩化アンモニウム溶液を使用して処理するのがよい。
【0010】
上記機能性希土類元素が固定されゼオライトとシリカ原料とを均一に混合したのち、1700〜1800℃で焼成すると本発明の機能性シリカガラスが製造できる。前記シリカ原料としては、珪酸アルカリをシリカ源としたシリカ、アルコキシシランをシリカ源としたシリカ、Si(CH3)Cl3、SiCl4等のシラン化合物をシリカ源としCVD法、VAD法で製造したシリカ、天然結晶質石英等を挙げることができる。特にアルコキシシランをシリカ源とするシリカ原料の場合、アルコキシシランを加水分解して得たシリカゾルに機能性希土類元素を固定したゼオライトを混合しゲル化することで均質なシリカ原料が得られ、それを焼成或は他のシリカ原料と混合して、焼成することで希土類元素が均質にドープしたシリカガラスが得られる。
【0011】
上記のように本発明の光学用シリカガラスは、機能性希土類元素を高い濃度で含有し、会合することがないところから、希土類元素の機能発現効率が高く、例えば希土類元素をドープしたレーザーガラスのライフタイムは他の製造方法で得られたレーザーシリカガラスより遥かに長い上に、発振効率も高い。例えば本発明のNdドープシリカガラスは1063nmの励起光に対する蛍光スペクトル強度が特開昭60−11245号公報記載の製造方法に準じて製造したNdドープシリカガラスに比べると3、4倍高くなり、またそのライフタイムは400μs以上と、公知のリン酸系レーザーガラスのライフタイム300μsより遥かに長いものとなる。このように本発明の光学用シリカガラスはドープする機能性希土類元素の種類により各種の機能が発揮される。例えばCs、Tl等屈折率を高める元素を周方向にドープ量を変えれば、周方向に光の屈折が生じ、板状のレンズを作製することができる。前記希土類元素をも含めてNd以外の希土類元素のシリカガラス中のドープはNdの処理と同様に行えばよい。
【0012】
【実施の形態】
以下、実施例に基づいてを本発明を具体的に説明するが、本発明はこれに限定されるものではない。
【0013】
【実施例】
実施例1
フォージャサイトX156gとNdCl3477gとを水中でよく攪拌しながら100℃で還流させながら2週間保持した。ついで得られたNd置換フォージャサイトXを取り出し、それを飽和塩化アンモニウム溶液で4時間処理し、SIサイトの9個にNd+3を配位した。前記フォージャサイトXを乾燥したのち、シリカ粉100gに対してフォージャサイトXを4.59g、9.61g、21.27g及び35.71gの割合でそれぞれ均一に混合し1750℃で焼結し、透明なシリカガラスを作製した。前記シリカガラス中のNdのドープ量はそれぞれ0.5wt%、1wt%、2.0wt%及び3.0wt%であった。Ndのドープ量が1wt%のシリカガラスについてその蛍光スペクトル強度を測定したところ図2に示すとおり1063nmの励起光に対する相対的蛍光スペクトル強度は9.38[a.u.]であった。またNdドープシリカガラスについてそのライフタイムを測定したところ図3に示すように、400μs以上であった。
【0014】
一方、溶融法でNdを1.2wt%ドープしたシリカガラスについて上記と同様に1063nmの励起光に対する相対的蛍光スペクトル強度を測定したところ0.668[a.u.]であった。また、レーザーガラスとして一般的に使用されるリン酸系ガラスのライフタイム及び相対的蛍光スペクトル強度を測定したところ、それぞれ300μs及び5.81[a.u.]であった。
【0015】
上記のとおり本実施例のNdドープシリカガラスは、高濃度のNdを含有するにもかかわらず、相対的蛍光スペクトル強度が高く、かつライフタイムが長いところから、Ndの会合が起こっていないものと推定される。そして同シリカガラス中のNd−Nd間距離はゼオラオト構造などから推定して希土類元素の会合が起こらないとされる9.3Å以上であると考えられる。
実施例2
実施例1においてNdの代わりにCeを使用した以外は実施例1と同様にしてCeを3.0wt%ドープするシリカガラスを作成した。該シリカガラスの蛍光スペクトル強度は図4に示すとおりであった。
【0016】
【発明の効果】
本発明の光学用シリカガラスは、希土類元素の会合がなくその特性を充分に発揮できるシリカガラスである。特にNd等をドープしたレーザーシリカガラスは高出力で、ライフタイムの長いレーザー発振ができ、大型で高出力ガラスレーザーとして有用である。
【図面の簡単な説明】
【図1】ゼオライトXが6角柱構造(D6R)を有することを示す模式図である。
【図2】本発明のNdドープシリカガラスの蛍光スペクトル強度を示すグラフである。
【図3】本発明のNdドープシリカガラスのライフタイムを示すグラフである。
【図4】本発明のCeドープシリカガラスの蛍光スペクトル強度を示すグラフである。
[0001]
[Industrial application fields]
The present invention relates to an optical silica glass, and more particularly to an optical silica glass having characteristics such as optical characteristics and nonlinear optical characteristics.
[0002]
[Prior art]
Conventionally, many glasses and ceramics doped with functional elements and imparted with characteristics such as optical characteristics, nonlinear optical characteristics, electric or magnetic characteristics have been developed and put into practical use. In particular, since laser glasses obtained by doping rare earth elements into glass can provide large oscillators, various types of laser glasses have been proposed that are suitable for high-power lasers compared to single crystals. As the laser glass, a laser glass in which a phosphate glass substrate is doped with a rare earth element is generally used. Since a phosphate glass has a small thermal shock constant of 0.43 W / cm, for example, a fusion driver. When the laser is manufactured to a high average output laser such as the above, there is a defect that the glass of the base material is broken by the energy accumulated at the time of laser oscillation. Therefore, laser glass based on silica glass having a thermal shock constant of 14.5 W / cm, which is two orders of magnitude higher than that of phosphate glass, has attracted attention and research. For example, Galant. There have been proposed laser glass by et al melting method, Nd-doped silica glass by Edward et al sol-gel method, and the like. However, when the laser silica glass was doped with a rare earth element, rare earth elements were associated with each other from a very small amount, and the laser efficiency was poor. In order to solve such problems, a laser glass which co-doped Al 2 O 3 and P 2 O 3 together with rare earth elements to coordinate Al and P to Nd 3+ and prevent association of Nd atoms is disclosed in Japanese Patent Application Laid-Open No. 60-11245. Proposed in the Gazette.
[0003]
[Problems to be solved by the invention]
However, the silica glass described in the above publication is preferably doped with Al 2 O 3 or P 2 O 3 in an amount equal to or more than 10 times that of Nd, but simply because Nd and Al or P are doped into the silica glass. The coordination state is unstable, and there is Nd that associates with all doped Nd without coordination of Al or P. This associated Nd not only contributes to the laser oscillation, but also has a function of absorbing the laser beam and lowers the laser oscillation efficiency. In particular, when the Nd concentration was 0.5 mol% or more, the laser oscillation efficiency decreased rapidly due to the cluster in which Nd was associated.
[0004]
In view of the current situation, the present inventors have conducted extensive research, and as a result, the rare earth elements were fixed in a stable coordination field in advance and doped into the silica glass in that state, so that the rare earth elements could be supported even at high concentrations. The present invention has been completed by finding that an optical silica glass capable of sufficiently exhibiting the function of a doping element is obtained. That is, [0005]
An object of the present invention is to provide an optical silica glass doped without rare earth elements being associated.
[0007]
Furthermore, an object of the present invention is to provide a large-sized and high-power laser silica glass.
[0008]
[Means for Solving the Problems]
The present invention that achieves the above object is a silica glass obtained by sintering a rare earth element-fixed zeolite and a silica raw material, wherein the rare earth element is doped in an amount of 0.1 to 4 wt% without association. Related to porous silica glass.
[0009]
The rare earth element refers to an element having various functional characteristics, which is a lanthanum series element and actinium series element of Group IIIB of the periodic table. In particular, lanthanum series elements, especially Nd, are preferred. As shown in FIG. 1, the functional silica glass of the present invention has an aluminosiloxane hexagonal column structure (D6R) as shown in FIG. 1, that is, a structure in which 6 out of 12 vertices are Al and the remaining 6 are Si. Is a silica glass obtained by firing zeolite fixed to the SI site at the center of the soot and silica raw material. The SI site in the center of the cage constitutes a stable coordination field, and there are 16 SI sites per unit cell in the case of a fauger site. Originally Na + occupies the SI site, but 3 to 13, preferably 9 of them are ion-exchanged with rare earth elements, and NH 4 , Y b or La is coordinated to the remaining sites, thereby rare earth elements. Can be fixed stably. Examples of the zeolite include faujasite type zeolite and cyclodextrin having similar properties to the faujasite. In particular, faujasite is preferable, and faujasite A {(Na 2 , K 2 , Ca, Mg) 29.5 [(AlO 2 ) 59 (SiO 2 ) 132 ] · 235H 2 O}, faujasite X {Na 86 [(AlO 2 ) 86 (SiO 2 ) 106 ] · 246H 2 O} or faujasite Y {Na 56 [(AlO 2 ) 56 (SiO 2 ) 136 ] · 250H 2 O} is used. The functional silica glass of the present invention is doped in the silica glass with the soot structure covering one unit, that is, the periphery of the functional element with another element. Is doped in the range of 0.1 to 4 wt%. When the doping concentration is less than 0.1 wt%, the characteristics of rare earth elements are not exhibited, and when the doping concentration exceeds 4 wt%, the vitreous region is exceeded and silica glass is not formed. Further, when the rare earth element coordinates more than 13 SI sites, the rare earth element is detached and association occurs. The zeolite in which the rare earth element is fixed in a stable coordination field is manufactured by mixing zeolite and a water-soluble compound of the rare earth element in water, heating and exchanging ions, and then treating with an ammonium chloride solution. Examples of the water-soluble compound of the rare earth element include chloride, nitric acid, hydroxide salt, and the like of the rare earth element, and these are used alone or in combination. An element that does not exhibit functionality, such as Yb or La, even if it is a rare earth element is important as an element that controls the number of substitution of the rare earth element because it does not show an association due to separation even when coordinated to the SI site. Moreover, by coordinating this element, the alkali element concentration in the zeolite can be reduced, which is suitable for use in the field where the presence of the alkali element is disliked. As a control of the number of substitution of the rare earth element, it is preferable to treat with an ammonium chloride solution after ion exchange of the rare earth element. The number of substitutions can be arbitrarily changed by appropriately selecting the concentration and treatment time of the ammonium chloride solution. The number of substitutions can also be controlled by using insensitive rare earth elements in combination. The optimum number of substitutions in which the rare earth element performs its function is nine, and in this case, it is preferable to treat with a saturated ammonium chloride solution.
[0010]
After the functional rare earth element is fixed and the zeolite and the silica raw material are uniformly mixed, the functional silica glass of the present invention can be produced by firing at 1700 to 1800 ° C. The silica raw material was produced by a CVD method or a VAD method using silica using an alkali silicate as a silica source, silica using an alkoxysilane as a silica source, or a silane compound such as Si (CH 3 ) Cl 3 or SiCl 4 as a silica source. Examples thereof include silica and natural crystalline quartz. In particular, in the case of a silica raw material using alkoxysilane as a silica source, a homogeneous silica raw material can be obtained by mixing and gelling a silica sol obtained by hydrolyzing alkoxysilane with a zeolite in which a functional rare earth element is fixed. By firing or mixing with other silica raw materials and firing, silica glass doped with rare earth elements uniformly can be obtained.
[0011]
As described above, the optical silica glass of the present invention contains a functional rare earth element at a high concentration and does not associate, so that the function expression efficiency of the rare earth element is high. For example, a laser glass doped with a rare earth element is used. The lifetime is much longer than laser silica glass obtained by other manufacturing methods, and the oscillation efficiency is also high. For example, the Nd-doped silica glass of the present invention has a fluorescence spectrum intensity for 1063 nm excitation light that is 3 to 4 times higher than that of an Nd-doped silica glass produced according to the production method described in JP-A-60-11245, The lifetime is 400 μs or longer, which is much longer than the lifetime of 300 μs of the known phosphoric acid laser glass. As described above, the optical silica glass of the present invention exhibits various functions depending on the kind of the functional rare earth element to be doped. For example, if the doping amount of an element that increases the refractive index such as Cs or Tl is changed in the circumferential direction, light is refracted in the circumferential direction, and a plate-like lens can be manufactured. Doping of rare earth elements other than Nd, including the rare earth elements, into the silica glass may be performed in the same manner as the Nd treatment.
[0012]
[Embodiment]
EXAMPLES Hereinafter, although this invention is demonstrated concretely based on an Example, this invention is not limited to this.
[0013]
【Example】
Example 1
156 g of faujasite X and 477 g of NdCl 3 were kept for 2 weeks while refluxing at 100 ° C. with good stirring in water. Subsequently, the obtained Nd-substituted faujasite X was taken out, treated with saturated ammonium chloride solution for 4 hours, and Nd +3 was coordinated to 9 SI sites. After drying the faujasite X, the faujasite X is uniformly mixed at a ratio of 4.59 g, 9.61 g, 21.27 g, and 35.71 g with respect to 100 g of silica powder, and sintered at 1750 ° C. A transparent silica glass was prepared. The doped amounts of Nd in the silica glass were 0.5 wt%, 1 wt%, 2.0 wt% and 3.0 wt%, respectively. When the fluorescence spectrum intensity of silica glass having a Nd doping amount of 1 wt% was measured, the relative fluorescence spectrum intensity with respect to the excitation light of 1063 nm was 9.38 [a. u. ]Met. Further, when the lifetime of the Nd-doped silica glass was measured, it was 400 μs or more as shown in FIG.
[0014]
On the other hand, when the relative fluorescence spectrum intensity for the excitation light of 1063 nm was measured in the same manner as described above for silica glass doped with 1.2 wt% Nd by the melting method, 0.668 [a. u. ]Met. Further, when the lifetime and relative fluorescence spectrum intensity of a phosphate glass generally used as a laser glass were measured, 300 μs and 5.81 [a. u. ]Met.
[0015]
As described above, the Nd-doped silica glass of this example has a high relative fluorescence spectrum intensity and a long lifetime, despite the fact that it contains a high concentration of Nd. Presumed. The distance between Nd and Nd in the silica glass is estimated to be 9.3 mm or more, which is estimated from the Zeolato structure and the like, and rare earth elements do not associate.
Example 2
A silica glass doped with 3.0 wt% of Ce was prepared in the same manner as in Example 1 except that Ce was used instead of Nd in Example 1. The fluorescence spectrum intensity of the silica glass was as shown in FIG.
[0016]
【The invention's effect】
The optical silica glass of the present invention is a silica glass that can exhibit its characteristics sufficiently without association of rare earth elements. In particular, a laser silica glass doped with Nd or the like has a high output and a long lifetime laser oscillation, and is useful as a large and high output glass laser.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing that zeolite X has a hexagonal prism structure (D6R).
FIG. 2 is a graph showing the fluorescence spectrum intensity of the Nd-doped silica glass of the present invention.
FIG. 3 is a graph showing the lifetime of the Nd-doped silica glass of the present invention.
FIG. 4 is a graph showing the fluorescence spectrum intensity of the Ce-doped silica glass of the present invention.

Claims (5)

希土類元素がSIサイトに固定されたゼオライトとシリカ原料とを焼結してなる光学用シリカガラスであって、前記希土類元素が会合することなく0.1〜4wt%ドーピングされていることを特徴とするレーザー用シリカガラス。An optical silica glass obtained by sintering a zeolite in which a rare earth element is fixed at an SI site and a silica raw material, wherein the rare earth element is doped in an amount of 0.1 to 4 wt% without association. Silica glass for laser . 希土類元素がSIサイトの3〜13個に固定されたゼオライトであることを特徴とする請求項1記載のレーザー用シリカガラス。2. The silica glass for laser according to claim 1, wherein the rare earth element is zeolite fixed to 3 to 13 SI sites. 光学用シリカガラスがレーザーガラスであることを特徴とする請求項1又は2記載のレーザー用シリカガラス。 Laser silica glass according to claim 1 or 2, wherein the silica glass for optical is a laser glass. レーザーガラスの蛍光寿命が400μsec以上であることを特徴とする請求項3記載のレーザー用シリカガラス。The silica glass for laser according to claim 3, wherein the fluorescence lifetime of the laser glass is 400 µsec or more. 希土類元素がNdであることを特徴とする請求項1記載のレーザー用シリカガラス。2. The silica glass for laser according to claim 1, wherein the rare earth element is Nd.
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