JP4002815B2 - Scanning probe microscope - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a scanning probe microscope, and more particularly to a scanning probe microscope including a scanning tunneling microscope and an atomic force microscope.
[0002]
[Prior art]
In order to measure and analyze nano-order undulations, a scanning probe microscope (SPM) that scans a sample with a probe represented by a cantilever is widely known. SPM uses a relatively small cantilever. It is difficult to attach a small cantilever directly to the SPM body when replacing the cantilever. In order to improve the workability of replacement, a cantilever holder 901 using a magnetic force as shown in FIG. 9 is generally used (see, for example, Patent Document 1). The cantilever 902 is fixed to the base 970 via a plate 971. The cantilever 902 is held by the SPM body by the magnetic force of the magnet 972 fixed to the base 970.
[0003]
When an optical lever (e.g., Journal of Applied physics 65p.164 January 1989) is used, the cantilever is irradiated with laser light. When the cantilever is removed from the SPM main body, the laser beam deviates from the optical path of the optical lever and proceeds in an unexpected direction. In order to prevent this, the conventional SPM is provided with an enclosure that covers the SPM and a stop button for stopping laser irradiation. When replacing the cantilever, the user opens / closes the enclosure and operates the stop button.
[0004]
If the distance between the cantilever and the sample stage is reduced when exchanging the cantilever, the laser beam deviated from the optical path of the optical lever can be reliably applied to the sample stage. In this way, laser light can be absorbed or scattered.
[0005]
[Patent Document 1]
Japanese Patent No. 3258120
[0006]
[Problems to be solved by the invention]
However, if the operation of opening / closing the enclosure or operating the stop button is added to the cantilever replacement operation, the replacement operation becomes complicated. In addition, when an enclosure is provided in the SPM, the area occupied by the SPM increases. In addition, if the distance between the cantilever and the sample stage is reduced, it becomes difficult to exchange the cantilever.
[0007]
If you want to scan a sample with a cantilever after observing the sample with an objective lens of various magnifications, you may use a rotating mechanism such as a revolver that can selectively make the objective lens and the cantilever face the sample. . During scanning of the cantilever, most of the laser light emitted by the light lever light source is reflected by the cantilever. Laser light that is not reflected by the cantilever is absorbed or scattered by the sample stage. When replacing the cantilever, rotate the revolver to move the cantilever away from the sample stage. At this time, if the laser beam is irradiated from the light lever light source, the laser beam not reflected by the cantilever proceeds in an unexpected direction.
[0008]
Accordingly, an object of the present invention is to provide a scanning probe microscope capable of preventing laser light from traveling in an unexpected direction by stopping laser irradiation when the cantilever is moved away from the scanning position for replacement or the like. Is to provide.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, a scanning probe microscope according to claim 1 of the present invention comprises a sample stage for holding a sample, a cantilever scanned along the surface of the sample, and a cantilever holder for holding the cantilever. A laser irradiation means for irradiating the cantilever with laser light, a photodetector for detecting the laser light irradiated on the cantilever, and a detachable member for detachably holding the cantilever holder; Power supply means for supplying power to the laser irradiation means; Irradiation stopping means for stopping the laser irradiation by the laser irradiation means when the cantilever holder is detached from the detachable member; , With And the irradiation stopping means stops detection of power when the cantilever holder is detached from the detachable member and power supply by the power supply means when receiving a signal from the detection means. And having a processing unit Yes.
[0010]
By stopping laser irradiation when the cantilever holder is removed from the detachable member, it is possible to prevent the laser light from traveling in an unexpected direction.
[0012]
To achieve the above objective, Claims of the invention 7 The scanning probe microscope according to the present invention is attached to the main body and the main body. Trial A sample stage for holding the sample, a cantilever scanned along the surface of the sample, a cantilever holder for holding the cantilever, laser irradiation means for irradiating the cantilever with laser light, and a laser irradiated on the cantilever A photodetector for detecting light, at least one objective lens, and a pivotally attached to the body. Before Holds the cantilever holder and the objective lens Shiko A revolver that selectively opposes one of these to the sample stage; A power supply means for supplying power to the laser irradiation means; an irradiation circuit including the power supply means and the laser irradiation means; a main body side electrode fixed to the main body; and a revolver side electrode fixed to the revolver; Having a shut-off mechanism including When the cantilever holder facing the sample stage is moved away from the sample stage by the rotation of the revolver The revolver side electrode of the blocking mechanism is separated from the body side electrode to block the irradiation circuit. An irradiation stopping means for stopping the irradiation of the laser beam by the laser irradiation means; , Has It is characterized by .
To achieve the above objective, Claims of the invention 8 Scanning probe microscope related to A main body, a sample stage attached to the main body for holding a sample, a cantilever scanned along the surface of the sample, a cantilever holder for holding the cantilever, and a laser irradiation means for irradiating the cantilever with laser light; , A photodetector for detecting the laser light applied to the cantilever, at least one objective lens, and a pivotally attached to the main body, and holding the cantilever holder and the objective lens, A revolver that selectively opposes one to the sample stage; Power supply means for supplying power to the laser irradiation means And an irradiation stop means for stopping the laser irradiation by the laser irradiation means when the cantilever holder facing the sample stage is moved away from the sample stage by the rotation of the revolver, The irradiation stop means includes a detection means for generating a signal when the cantilever holder facing the sample stage is moved away from the sample stage; and a signal from the detection means A processing unit for stopping power supply by the power supply means; , have Is characterized by .
[0013]
By stopping the laser irradiation when the revolver rotates and the cantilever holder is moved away from the sample stage, it is possible to prevent the laser light from traveling in an unexpected direction.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
A scanning probe microscope according to an embodiment of the present invention will be described with reference to FIGS. First, a scanning probe microscope according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic side view showing a part of a scanning probe microscope. The cantilever 102 is held by a leaf spring 114 on the lower surface side of the main body 110 of the cantilever holder 101. The cantilever 102 is irradiated with laser light from the laser irradiation means 120. The laser beam irradiated to the cantilever 102 and reflected here is detected by the photodetector 121. The laser irradiation means 120 and the photodetector 121 form an optical lever. The laser irradiation means 120 includes a laser light source and an optical system that guides the laser light to the cantilever 102.
[0015]
Two attachment / detachment holes 111 and 112 are provided on the upper surface of the main body 110 of the cantilever holder 101. One end of rod-shaped opening / closing electrodes 131 and 132 is detachably fitted in the attachment / detachment holes 111 and 112. The cantilever holder 101 is held by the fitting. The other ends of the open / close electrodes 131 and 132 are fixed to the substrate 151. The substrate 151 is attached to the main body 150 of the scanning probe microscope. The open / close electrodes 131 and 132 and the substrate 151 form a detachable member that detachably holds the cantilever holder 101.
[0016]
The sample 170 is held on the sample stage 152. The sample stage 152 is attached to the main body of the scanning probe microscope via a drive unit 153 that moves the sample stage 152. Instead of moving the sample stage 152, the detachable member may move. In this case, the detachable member is attached to the main body of the scanning probe microscope via the drive unit. The drive unit 153 can bring the cantilever holder 101 and the sample stage 152 close to each other. When approached, the cantilever holder 101 is disposed at a scanning position where the cantilever 102 faces the sample 170. In this state, the cantilever 102 is scanned along the surface of the sample 170.
[0017]
In order to replace the cantilever 102, the cantilever holder 101 disposed at the scanning position can be moved away from the scanning position. In order to move away from the scanning position, the sample stage 152 is separated from the cantilever holder 101 using the driving unit 153, and then the cantilever holder 101 is detached from the detachable member.
[0018]
The scanning probe microscope includes an irradiation stop unit that stops the laser beam irradiation by the laser irradiation unit 120 when the cantilever holder 101 is detached from the detachable member. The irradiation stopping unit stops the irradiation of the laser beam by cutting off the irradiation circuit including the laser irradiation unit 120, the laser power source 140, and the open / close electrodes 131 and 132. The laser power source 140 is used as a power supply unit that supplies power to the laser irradiation unit 120. The irradiation circuit opens and closes depending on whether the open / close electrodes 131 and 132 are electrically connected. A connecting member 113 made of a conductor is fixed to the upper surface of the main body 110 of the cantilever holder 101. The connecting member 113 extends over the two attachment / detachment holes 111 and 112.
[0019]
When the cantilever holder 101 is held by the detachable member, that is, when the open / close electrodes 131 and 132 are fitted in the detachable holes 111 and 112, the connection member 113 is in contact with the open / close electrodes 131 and 132. At this time, the irradiation circuit is closed. When the cantilever holder 101 is removed from the detachable member, the connection member 113 is separated from the open / close electrodes 131 and 132 and the irradiation circuit is shut off. As a result, the laser irradiation by the laser irradiation unit 120 is stopped. Therefore, when the cantilever holder 101 is removed in order to replace the cantilever 102 or the like, the laser beam does not travel in an unexpected direction unlike the conventional scanning probe microscope. The open / close electrodes 131 and 132 and the connection member 113 form a blocking mechanism that blocks the irradiation circuit. The blocking mechanism is included in the irradiation stopping means.
[0020]
Next, a scanning probe microscope according to the second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a schematic side view showing a part of the scanning probe microscope. Constituent members substantially the same as the constituent members of the first embodiment are denoted by the same reference numerals.
[0021]
A laser power source 140 is connected to the laser irradiation means 120. Power is supplied to the laser power source 140 from the main power source 243. The main power supply 243 supplies power to devices other than the laser power supply 140 included in the scanning probe microscope. The laser power supply 140 and the main power supply 243 are used as power supply means.
[0022]
The scanning probe microscope of the present embodiment is provided with irradiation stopping means different from that of the first embodiment. This irradiation stopping means has a detecting means for generating a signal when the cantilever holder 101 is detached from the detachable member, and a processing unit 242 for stopping the supply of power by the power supplying means when receiving this signal. ing. The detection means includes a connection member 113, open / close electrodes 131 and 132, and a continuity sensor 241 connected to the open / close electrodes 131 and 132. When the open / close electrodes 131 and 132 are removed from the attachment / detachment holes 111 and 112, the electrical connection between the open / close electrodes 131 and 132 is lost. At this time, the continuity sensor 241 generates a signal. When receiving this signal, the processing unit 242 turns off at least one of the laser power source 140 and the main power source 243.
[0023]
Even when such irradiation stopping means is used, it is possible to prevent the laser light from traveling in an unexpected direction when the cantilever holder 101 is attached or detached, as in the first embodiment.
[0024]
Next, a scanning probe microscope according to a third embodiment of the present invention will be described with reference to FIG. FIG. 3 is a schematic side view showing a part of the scanning probe microscope. Constituent members that are substantially the same as those of the above-described embodiment are given the same reference numerals.
[0025]
A piezo element 314 for exciting the cantilever 102 is attached to the cantilever holder 301 of the present embodiment. The ground terminal of the piezo element 314 is connected to an electrode fixed in the attachment / detachment hole 111, and the + terminal is connected to an electrode fixed in the attachment / detachment hole 112. The laser irradiation means 120 is connected to the main power source 243 via the laser power source 140.
[0026]
The irradiation stopping means of the present embodiment has a processing unit 242 and detection means different from that of the second embodiment. This detection means includes a continuity sensor 241 and open / close electrodes 131 and 132. The open / close electrode 131 is connected to the ground 344, and the open / close electrode 132 is connected to a piezo control unit 345 that controls the piezo element 314 via the continuity sensor 241. The piezo control unit 345 is supplied with power from the main power supply 243. When the open / close electrodes 131 and 132 are fitted in the attachment / detachment holes 111 and 112, respectively, a control voltage generated by the piezoelectric control unit 345 is applied to the piezoelectric element 314. When the open / close electrodes 131 and 132 are removed from the attachment / detachment holes 111 and 112, the electrical connection between the open / close electrodes 131 and 132 is lost. At this time, the continuity sensor 241 generates a signal. At the same time, the piezo element 314 stops. When the processing unit 242 receives a signal from the continuity sensor 241, the processing unit 242 turns off at least one of the laser power source 140 and the main power source 243.
[0027]
Even when such irradiation stopping means is used, it is possible to prevent the laser light from traveling in an unexpected direction when the cantilever holder 301 is attached or detached, as in the second embodiment.
[0028]
Next, a scanning probe microscope according to a fourth embodiment of the present invention will be described with reference to FIG. FIG. 4 is a schematic side view showing a part of the scanning probe microscope. Constituent members that are substantially the same as those of the above-described embodiment are given the same reference numerals.
[0029]
The scanning probe microscope according to the present embodiment has a detachable member 454 different from the first to third embodiments. The detachable member 454 is attached to the main body (not shown) of the scanning probe microscope. A guide groove 455 into which the cantilever holder 401 is fitted is formed in the detachable member 454. When the fitting is performed, the cantilever holder 401 is held by the detachable member 454. If the cantilever holder 401 is brought close to a sample stage (not shown) while being held, the cantilever holder 401 can be arranged at the scanning position. When the cantilever holder 401 is removed from the detachable member 454, the cantilever holder 401 is guided in one direction. The guide groove 455 forms a guide for guiding the cantilever holder 401. When the cantilever holder 401 is guided in one direction by the guide groove 455 in a state of approaching the sample stage, the cantilever holder 401 does not collide with the sample stage.
[0030]
Plungers 431a and 432a having open / close electrodes 431 and 432 are fixed to the detachable member 454. The plungers 431a and 432a bias the open / close electrodes 431 and 432 so that the open / close electrodes 431 and 432 protrude from the inner wall of the guide groove 455. The irradiation stopping unit of the present embodiment stops the irradiation of the laser beam by cutting off the irradiation circuit including the laser irradiation unit 120, the laser power source 140, and the open / close electrodes 431 and 432. When the open / close electrodes 431 and 432 are electrically connected, the irradiation circuit is closed and the laser irradiation unit 120 emits laser light. When the open / close electrodes 431 and 432 are not electrically connected, the irradiation circuit is shut off and the laser irradiation means 120 does not irradiate the laser beam.
[0031]
The cantilever holder 401 is provided with a tapered portion 415. When the cantilever holder 401 is inserted into the guide groove 455, the open / close electrodes 431 and 432 protruding from the inner wall of the guide groove 455 are pushed into the inner wall of the guide groove 455 while sliding on the tapered portion 415. The cantilever holder 401 is easily inserted into the guide groove 455.
[0032]
A connecting member 413 made of a conductor is fixed to the cantilever holder 401. When the cantilever holder 401 is fitted in the guide groove 455, the connection member 413 is in contact with the open / close electrodes 431 and 432, and the irradiation circuit is closed. Since the open / close electrodes 431 and 432 are pressed against the connection member 413 by the plungers 431a and 432a, the contact between the open / close electrodes 431 and 432 and the connection member 413 is ensured. When the cantilever holder 401 is detached from the detachable member 454, that is, when the cantilever holder 401 is pulled out from the guide groove 455, the irradiation circuit is interrupted. At this time, the irradiation of the laser beam is stopped.
[0033]
Even when such irradiation stopping means is used, it is possible to prevent the laser light from traveling in an unexpected direction when the cantilever holder 401 is attached and detached, as in the first embodiment.
[0034]
Next, a scanning probe microscope according to a fifth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a schematic side view showing a part of the scanning probe microscope. Constituent members that are substantially the same as those of the above-described embodiment are given the same reference numerals.
[0035]
The scanning probe microscope according to the present embodiment has a detachable member 454 similar to that of the fourth embodiment. The irradiation stop means of this embodiment stops the power supply to the laser irradiation means 120 when receiving the detection means 546 that generates a signal when the cantilever holder 501 is detached from the detachable member 454. And a processing unit 242. The detection means 546 has a contact type sensor fixed at a position close to the guide groove 455. The contact type sensor is in contact with the cantilever holder 501 when the cantilever holder 501 is fitted in the guide groove 455. At this time, the contact sensor does not generate a signal. When the cantilever holder 501 is detached from the detachable member 454, the cantilever holder 501 is separated from the contact sensor. At this time, the contact sensor generates a signal. When the processing unit 242 receives this signal, at least one of the laser power source 140 and the main power source 243 is turned off.
[0036]
Even when such irradiation stopping means is used, it is possible to prevent the laser light from proceeding in an unexpected direction when the cantilever holder 501 is attached / detached as in the first embodiment.
[0037]
The detection means 546 may have another sensor instead of the contact sensor. For example, an optical sensor may be included. The detection means 546 may include an optical lever photodetector. In this case, the photodetector is connected to the processing unit 242. The photodetector detects the laser beam reflected by the cantilever 102 and outputs an output signal having an intensity corresponding to the intensity of the detected light. When the cantilever holder 501 is removed from the detachable member 454, the laser beam is not reflected by the cantilever 102. At this time, the photodetector outputs a weak output signal. That is, when the cantilever holder 501 is removed from the detachable member 454, the photodetector generates a specific signal. When the processing unit 242 receives this signal, the processing unit 242 turns off at least one of the laser power source 140 and the main power source 243. Even when the cantilever 102 is not irradiated with laser light due to a defect in the alignment of the optical lever, the laser light is not reflected by the cantilever 102. Also at this time, the processing unit 242 turns off at least one of the laser power source 140 and the main power source 243. When the detection means 546 includes an optical lever photodetector, it is not necessary to prepare an additional sensor for detecting attachment / detachment of the cantilever holder 501. For this reason, the number of parts can be reduced.
[0038]
Next, a scanning probe microscope according to a sixth embodiment of the present invention will be described with reference to FIG. FIG. 6 is a schematic side view showing a part of the scanning probe microscope. Constituent members that are substantially the same as those of the above-described embodiment are given the same reference numerals.
[0039]
A revolver 651 is rotatably attached to the main body 650 of the scanning probe microscope. The revolver 651 holds at least one objective lens 671 and a cantilever holder 601. By rotating the revolver 651 about the axis R as a rotation axis, one of them can be selectively opposed to the sample stage 152 and the rest can be moved away from the sample stage 152.
[0040]
The substantially cylindrical cantilever holder 601 includes a laser light source 120 and a photodetector 121 that form an optical lever, and a laser power source 140. The laser power source 140 is used as laser irradiation means. One end surface side of the cylinder faces the revolver 651. The cantilever 102 is held on the other end surface side of the cylinder.
[0041]
When the cantilever holder 601 is opposed to the sample stage 152 and the cantilever holder 601 and the sample stage 152 are brought close to each other, the cantilever holder 601 can be disposed at the scanning position. The irradiation stopping means of the present embodiment stops the irradiation of the laser light from the laser light source 120 when the cantilever holder 601 facing the sample stage 152 is moved away from the sample stage 152.
[0042]
A main power source 243 that supplies power to the laser light source 120 is disposed on the main body 650 side of the scanning probe microscope. The laser light source 120 and the main power source 243 are included in an irradiation circuit extending over the main body 650 and the revolver 651. The irradiation circuit includes revolver side electrodes 631 and 632 and body side electrodes 633 and 634 arranged at the boundary between the main body 650 and the revolver 651. The revolver side electrodes 631 and 632 are fixed to the revolver 651 and connected to the laser power source 140. The main body side electrodes 633 and 634 are fixed to the main body 650 and connected to the main power source 243. The irradiation circuit opens and closes depending on whether or not the main body side electrodes 633 and 634 and the revolver side electrodes 631 and 632 are in contact with each other. The main body side electrodes 633 and 634 and the revolver side electrodes 631 and 632 form a blocking mechanism.
[0043]
The irradiation stopping means of the present embodiment is constituted by this blocking mechanism. By rotating the revolver 651, the main body side electrodes 633, 634 and the revolver side electrodes 631, 632 can be separated or brought into contact with each other. When the cantilever holder 601 is opposed to the sample stage 152, the main body side electrodes 633 and 634 and the revolver side electrodes 631 and 632 come into contact with each other to close the irradiation circuit. When the cantilever holder 601 facing the sample stage 152 is moved away from the sample stage 152, the revolver side electrodes 631 and 632 are separated from the main body side electrodes 633 and 634, and the irradiation circuit is shut off. At this time, the supply of the electrode from the main power source 243 to the laser power source 140 is stopped, and the laser light irradiation by the laser light source 120 is stopped.
[0044]
In a conventional scanning probe microscope using a revolver, when the revolver is rotated and the cantilever holder is moved away, the laser light not reflected by the cantilever advances in an unexpected direction. In the present embodiment, since the irradiation of the laser beam is stopped when the cantilever holder 601 is moved away, the laser beam does not travel in an unexpected direction.
[0045]
Some conventional scanning probe microscopes using a revolver include an electric cable extending over the main body and the revolver in order to transmit power and signals between the main body side and the revolver side. In such a microscope, if the revolver is continuously rotated in one direction, the electric cable can be extended. As a result, the rotation of the revolver is limited. A relatively long electrical cable is required to ensure freedom of rotation. When a weak signal is transmitted, if the electric cable is long, the S / N is deteriorated. On the other hand, the rotation of the revolver is not limited in the microscope of the present embodiment. Further, since the electric cable can be shortened as much as possible, it is advantageous when a weak signal is transmitted.
[0046]
Next, a scanning probe microscope according to a seventh embodiment of the present invention will be described with reference to FIG. FIG. 7 is a schematic side view showing a part of a scanning probe microscope. Constituent members that are substantially the same as those of the above-described embodiment are given the same reference numerals.
[0047]
A laser light source 120 is built in a cantilever holder 601 held by a revolver 651. The laser power supply 140 is disposed on the main body 650 side of the scanning probe microscope together with the main power supply 243. The laser light source 120 and the laser power source 140 are connected via a conductive element 652. The conductive element 652 has a brush fixed to the main body 650 of the scanning probe microscope and a slip ring that rotates together with the revolver 651. When the revolver 651 rotates, the electrical connection between the laser light source 120 and the laser power source 140 is not interrupted. Therefore, the revolver 651 can be freely rotated as in the sixth embodiment.
[0048]
The revolver side electrodes 631 and 632 fixed to the revolver 651 are electrically connected to each other, and the main body side electrodes 633 and 634 fixed to the main body 650 side are both connected to the conduction sensor 241. When the cantilever holder 601 is opposed to the sample stage 152, the main body side electrodes 633 and 634 and the revolver side electrodes 631 and 632 come into contact with each other, and the main body side electrodes 633 and 634 are electrically connected. When the cantilever holder 601 facing the sample stage 152 is moved away from the sample stage 152, the revolver side electrodes 631 and 632 are separated from the main body side electrodes 633 and 634 and the conduction between the main body side electrodes 633 and 634 is lost. At this time, a signal is passed from the continuity sensor 241 to the processing unit 242. Receiving the signal, the processing unit 242 turns off at least one of the laser power source 140 and the main power source 243. The revolver side electrodes 631, 632, the main body side electrodes 633, 634, and the continuity sensor 241 form detection means. The irradiation stopping means of the present embodiment is composed of the detection means and the processing unit 242.
[0049]
Even if the irradiation stopping means of the present embodiment is used, since the irradiation of the laser beam is stopped when the cantilever holder 601 is moved away as in the sixth embodiment, the laser beam does not travel in an unexpected direction. .
[0050]
Next, a scanning probe microscope according to the eighth embodiment of the present invention will be described with reference to FIG. FIG. 8 is a schematic side view showing a part of the scanning probe microscope. Constituent members that are substantially the same as those of the above-described embodiment are given the same reference numerals.
[0051]
The scanning probe microscope of the present embodiment has another detection means instead of the detection means of the seventh embodiment. This detection means has an angle sensor 847 for detecting the rotation angle of the revolver 651. The angle sensor 847 generates a signal when the cantilever holder 601 facing the sample stage 152 is moved away from the sample stage 152. When the processing unit 242 receives this signal, at least one of the laser power source 140 and the main power source 243 is turned off.
[0052]
Even if the irradiation stopping means of the present embodiment is used, since the irradiation of the laser beam is stopped when the cantilever holder 601 is moved away as in the sixth embodiment, the laser beam does not travel in an unexpected direction. .
[0053]
The present invention discloses the invention shown in the following items.
[0054]
1. A sample stage for holding the sample;
A cantilever scanned along the surface of the sample;
A cantilever holder for holding the cantilever;
Laser irradiation means for irradiating the cantilever with laser light;
A photodetector for detecting the laser light applied to the cantilever;
A detachable member that detachably holds the cantilever holder;
A drive unit capable of moving at least one of the sample stage and the detachable member to bring the cantilever holder and the sample stage closer to each other;
Irradiation stopping means for stopping the irradiation of the laser beam by the laser irradiation means when the cantilever holder is removed from the detachable member;
A scanning probe microscope.
[0055]
2. The scanning probe microscope further includes a guide for guiding the cantilever holder in one direction when the cantilever holder is removed from the detachable member,
2. The scanning probe microscope according to claim 1, wherein the cantilever holder does not collide with the sample stage when the cantilever holder is guided in one direction by the guide while being close to the sample stage.
[0056]
3. The scanning probe microscope further includes power supply means for supplying power to the laser irradiation means, and an irradiation circuit including the power supply means and the laser irradiation means,
In the first or second aspect, the irradiation stopping unit has a blocking mechanism that blocks the irradiation circuit when the cantilever holder is detached from the detachable member and stops the irradiation of the laser beam by the laser irradiation unit. The scanning probe microscope described.
[0057]
4). The blocking mechanism is
Two open / close electrodes included in the irradiation circuit, the open / close electrodes attached to the detachable member and opened / closed according to whether the open / close electrodes are electrically connected; and
A connecting member attached to the cantilever holder and formed of a conductor;
Have
When the cantilever holder is held by the detachable member, the connecting member contacts the two open / close electrodes to close the irradiation circuit, and when the cantilever holder is removed from the detachable member, the connecting member is separated from the two open / close electrodes. The scanning probe microscope according to item 3, wherein the irradiation circuit is cut off.
[0058]
5). The scanning probe microscope further includes power supply means for supplying power to the laser irradiation means,
The irradiation stopping means is
Detecting means for generating a signal when the cantilever holder is removed from the detachable member;
A processing unit for stopping the power supply by the power supply means when receiving this signal;
The scanning probe microscope according to Item 1 or 2, wherein the scanning probe microscope is provided.
[0059]
6). The body,
A sample stage that is attached to the main body and holds the sample;
A cantilever scanned along the surface of the sample;
A cantilever holder for holding the cantilever;
Laser irradiation means for irradiating the cantilever with laser light;
A photodetector for detecting the laser light applied to the cantilever;
At least one objective lens;
A revolver that is pivotally attached to the main body and holds the cantilever holder and the objective lens, one of which is selectively opposed to the sample stage and the other is moved away from the sample stage;
An irradiation stopping means for stopping the irradiation of the laser beam by the laser irradiation means when the cantilever holder facing the sample stage is moved away from the sample stage;
A scanning probe microscope.
[0060]
7). The scanning probe microscope further includes power supply means for supplying power to the laser irradiation means, and an irradiation circuit including the power supply means and the laser irradiation means,
The irradiation stopping means has a blocking mechanism for blocking the irradiation circuit and stopping the irradiation of the laser beam by the laser irradiation means when the cantilever holder facing the sample stage is moved away from the sample stage. The scanning probe microscope according to Item.
[0061]
8). The blocking mechanism is
A body side electrode included in the irradiation circuit and fixed to the body;
A revolver-side electrode included in the irradiation circuit and fixed to the revolver;
Have
The irradiation circuit opens and closes depending on whether the main body side electrode and the revolver side electrode are in contact,
When the cantilever holder is made to face the sample stage, the main body side electrode and the revolver side electrode come into contact with each other to close the irradiation circuit. When the cantilever holder facing the sample stage is moved away from the sample stage, the revolver side electrode is Item 8. The scanning probe microscope according to Item 7, wherein the irradiation circuit is cut off from the electrode.
[0062]
9. The scanning probe microscope further includes power supply means for supplying power to the laser irradiation means,
The irradiation stopping means is
Detecting means for generating a signal when the cantilever holder facing the sample stage is moved away from the sample stage;
A processing unit for stopping the power supply by the power supply means when receiving this signal;
The scanning probe microscope according to claim 6, which has
[0063]
It should be noted that the present invention is not limited to the above-described embodiment, and it is needless to say that various modifications and applications can be made without departing from the spirit of the invention.
[0064]
【The invention's effect】
As is clear from the above detailed description, when the scanning probe microscope according to the present invention is used, the laser beam is stopped by stopping the laser irradiation when the cantilever is moved away from the scanning position for replacement or the like. It is possible to prevent traveling in an unexpected direction.
[Brief description of the drawings]
FIG. 1 is a schematic side view showing a part of a scanning probe microscope according to a first embodiment of the present invention.
FIG. 2 is a schematic side view showing a part of a scanning probe microscope according to a second embodiment of the present invention.
FIG. 3 is a schematic side view showing a part of a scanning probe microscope according to a third embodiment of the present invention.
FIG. 4 is a schematic side view showing a part of a scanning probe microscope according to a fourth embodiment of the present invention.
FIG. 5 is a schematic side view showing a part of a scanning probe microscope according to a fifth embodiment of the present invention.
FIG. 6 is a schematic side view showing a part of a scanning probe microscope according to a sixth embodiment of the present invention.
FIG. 7 is a schematic side view showing a part of a scanning probe microscope according to a seventh embodiment of the present invention.
FIG. 8 is a schematic side view showing a part of a scanning probe microscope according to an eighth embodiment of the present invention.
FIG. 9 is a perspective view of a cantilever holder used in a conventional scanning probe microscope.
[Explanation of symbols]
101 Cantilever holder
102 Cantilever
113 Connection member
120 Laser irradiation means
131,132 Open / close electrode
140 Laser power supply
152 Sample Stage
170 samples
241 Continuity sensor
242 processing unit
243 Main power supply
301 Cantilever holder
314 Piezo element
345 Piezo control unit
401 Cantilever holder
413 Connection member
431,432 Open / close electrode
454 Detachable member
455 Guide groove
501 Cantilever holder
546 detection means
601 Cantilever holder
631,632 Revolver side electrode
633,634 Body side electrode
651 Revolver
761 Objective lens
847 Angle sensor

Claims (11)

A sample stage for holding the sample;
A cantilever scanned along the surface of the sample;
A cantilever holder for holding the cantilever;
Laser irradiation means for irradiating the cantilever with laser light;
A photodetector for detecting the laser light applied to the cantilever;
A detachable member that detachably holds the cantilever holder;
Power supply means for supplying power to the laser irradiation means;
An irradiation stop means for stopping the irradiation of the laser beam by the laser irradiation means when the cantilever holder is removed from the detachable member;
Equipped with a,
The irradiation stopping means includes a detecting means for generating a signal when the cantilever holder is removed from the detachable member, and a process for stopping the supply of power by the power supplying means when receiving a signal from the detecting means. And having a part,
A scanning probe microscope characterized by the above.   The scanning probe microscope according to claim 1, wherein the detachable member further includes a guide for guiding the cantilever holder in one direction when the cantilever holder is detached from the detachable member. The detection means includes an open / close electrode that forms a part of the detachable member, a connection member that is formed of a conductor and is provided in the cantilever holder, and a continuity sensor that is connected to the open / close electrode. The scanning probe microscope according to claim 1 . The scanning probe microscope according to claim 3, wherein the continuity sensor generates a signal when the open / close electrode is detached from the connection member . The detection means includes a contact sensor fixed to the detachable member, and the contact sensor generates a signal when the cantilever holder is detached from the detachable member and separated from the contact sensor. The scanning probe microscope according to claim 1 . The detection means includes the photodetector;
2. The scanning type according to claim 1, wherein the photodetector detects the laser beam reflected by the cantilever and outputs an output signal having an intensity corresponding to the intensity of the detected light. Probe microscope. The body,
A sample stage attached to the body and holding a sample;
A cantilever scanned along the surface of the sample;
A cantilever holder for holding the cantilever;
Laser irradiation means for irradiating the cantilever with laser light;
A photodetector for detecting the laser light applied to the cantilever;
At least one objective lens;
A revolver that is rotatably attached to the main body, holds the cantilever holder and the objective lens, and selectively makes one of them face the sample stage;
Power supply means for supplying power to the laser irradiation means;
An irradiation circuit including the power supply means and the laser irradiation means;
The cantilever holder facing the sample stage has a blocking mechanism including a main body side electrode fixed to the main body and a revolver side electrode fixed to the revolver. An irradiation stop means for stopping the irradiation of the laser beam by the laser irradiation means by the revolver side electrode of the blocking mechanism being separated from the main body side electrode and blocking the irradiation circuit when being moved away ;
It characterized in that it comprises a run査型probe microscope. The body,
A sample stage attached to the body and holding a sample;
A cantilever scanned along the surface of the sample;
A cantilever holder for holding the cantilever;
Laser irradiation means for irradiating the cantilever with laser light;
A photodetector for detecting the laser light applied to the cantilever;
At least one objective lens;
A revolver that is rotatably attached to the main body, holds the cantilever holder and the objective lens, and selectively makes one of them face the sample stage;
Power supply means for supplying power to the laser irradiation means;
An irradiation stop means for stopping the laser irradiation by the laser irradiation means when the cantilever holder facing the sample stage is moved away from the sample stage by the rotation of the revolver;
With
The irradiation stopping means includes a detecting means for generating a signal when the cantilever holder facing the sample stage is moved away from the sample stage, and the power supply means when receiving a signal from the detecting means. A processing unit for stopping the supply of power by
It shall be the said run査型probe microscope. The detection means includes a main body side electrode fixed to the main body, a revolver side electrode fixed to the revolver and contacting and leaving the main body side electrode by rotation of the revolver, and a conduction connected to the main body side electrode. The scanning probe microscope according to claim 8 , wherein the scanning probe microscope is formed of a sensor . The continuity sensor of the detecting means generates a signal when the cantilever holder facing the sample stage is moved away from the sample stage and the revolver side electrode is separated from the main body side electrode. The scanning probe microscope according to claim 9. The detection means has an angle sensor for detecting a rotation angle of the revolver, and the angle sensor is moved when the cantilever holder facing the sample stage is moved away from the sample stage by the rotation of the revolver. 9. The scanning probe microscope according to claim 8, wherein a signal is generated in the scanning probe microscope.

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