JP5530245B2 - Compound microscope and cable support device for compound microscope - Google Patents

Description

  The present invention relates to a composite microscope and a cable support device for the composite microscope.

In recent years, various measuring instrument units such as a scanning probe microscope have been downsized to be used in combination with an optical microscope capable of observing a minute sample. Opportunities for using a measuring instrument unit instead of an objective lens have increased.
As a result, in addition to the observation method possessed by the optical microscope, the sample can be observed by various methods.

  However, in order to mount the measuring instrument unit, it is necessary to exchange signals and power between the measuring instrument unit and an external controller, and the signals and power are often transmitted using cables or the like. .

  For example, as a measuring instrument unit, a scanning tunneling microscope (STM detection unit) which is a kind of scanning probe microscope (SPM) and a composite microscope using a general optical microscope in combination are disclosed in Patent Document 1 below. There are examples.

Here, a general STM (scanning tunneling microscope) will be described.
The STM is a microscope that scans the surface of a sample with a deep needle called a cantilever attached to the STM detector and uses a tunnel current generated between the cantilever and the sample to enable three-dimensional surface shape measurement at the atomic level. is there.

  This STM detection unit is equipped with a fine movement element that can be bent and expanded in each of the X, Y, and Z axes. When a bias voltage is applied to the fine movement element and a region approaching the sample in the Z direction is reached, a cantilever is reached. And a sample generate a tunnel current.

Then, the cantilever scans the sample surface using the fine movement element, and, for example, the surface shape of the sample is imaged by feeding back the tunnel current value between the cantilever and the sample to be constant.
Since this feedback is performed between the fine movement element in the STM detection unit and the controller, exchange of signals and power is indispensable, and transmission of signals and the like is necessary with the outside.

  For this reason, in Patent Document 1, on the revolver side, a support provided with a plurality of contacts connected to a lead wire for driving a plurality of fine movement elements and a contact connected to a lead wire for voltage application to the cantilever Fix the part.

  A fine movement element and a cantilever are provided, and on the side of the fine movement element block attached to and detached from the support portion, a plurality of contact pins connected to the fine movement element are provided on an end surface facing the support portion, and a contact pin connected to the cantilever When the fine movement element block is mounted on the support portion, the contact point connected to the lead wire for driving the multiple fine movement elements, the multiple contact pins connected to the fine movement elements, and the voltage application to the cantilever The contact point connected to the lead wire for contact and the contact pin connected to the cantilever are in contact with each other at the same time and become conductive.

  According to such a configuration of Patent Document 1, it is possible to perform STM observation by realizing exchange of signals and power with the outside by a contact method.

JP-A-2-64401

  However, since the above-described conventional technology is a contact system, there is a concern that the operation of the device may become unstable due to external factors such as impact and vibration during rotation of the revolver.

  In addition, contact pins and contacts are used for signal exchange, but high voltage is required to control fine movement elements. Therefore, shield measures are taken to prevent noise such as EMI (Electro Magnetic Interference) at the contact connection. However, there is a technical problem that the cost becomes high separately.

  Further, in the measuring instrument market, a measuring instrument unit with a cable is common, and in order to make it possible to attach such a measuring instrument product with a general cable to a contact connection mechanism as in Patent Document 1. A large-scale design change is required on the measuring instrument side, usable measuring instrument products are limited, and versatility is low.

  An object of the present invention is to provide a technique capable of realizing an inexpensive and highly versatile composite microscope without causing restrictions on attached devices with cables to be attached.

A first aspect of the present invention includes a revolver in which a plurality of objective lenses can be detached and rotated , and an accessory device that can be attached to and detached from the revolver, and a controller that supplies electric power and electric signals to the accessory device. A compound microscope,
Cable support means for routing the cable connected to the accessory device to the rotation center of the revolver ;
The cable support means includes a revolver cable hole provided at a rotation center portion of the revolver and penetrating in a direction of a rotation center axis of the center portion of the revolver,
A cable connected to the accessory device is inserted into the revolver cable hole from the outside of the revolver to provide a composite microscope connected to the controller .

  ADVANTAGE OF THE INVENTION According to this invention, the technique which can implement | achieve a cheap and versatile composite microscope can be provided, without producing restrictions with the attached apparatus with a cable.

1 is a schematic side view illustrating a configuration example of a composite microscope according to an embodiment of the present invention. It is a schematic side view which expands and shows a part of structural example of the compound microscope which is one embodiment of this invention. 1 is a schematic plan view of a part of a configuration example of a composite microscope according to an embodiment of the present invention when viewed from the axial direction of a revolver. It is a schematic side view which shows the structural example of the cable support apparatus in the compound microscope which is a modification of one embodiment of this invention. It is a partially broken schematic side view which shows the structural example of the compound microscope which is other embodiment of this invention. It is a schematic plan view which shows the structural example of the revolver in the compound microscope which is other embodiment of this invention. It is a partially broken schematic side view which shows the structural example of the compound microscope which is further another embodiment of this invention. It is a schematic side view which takes out and shows a part of structural example of the compound microscope which is further another embodiment of this invention.

  In this embodiment, as one aspect, a revolver that can be mounted with a plurality of objective lenses and can be rotated, an accessory device that is used in combination with a microscope, a cable for controlling the accessory device, and an accessory device A mechanism for preventing the cable from coming into contact with a stage or a sample placed on the stage is provided by drawing the drawn cable around the rotation center of the revolver.

  According to such a configuration, it is possible to provide an inexpensive, versatile and reliable composite microscope without greatly changing existing microscopes and attached devices.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
In the following description of the present embodiment, in each figure, the X, Y, and Z directions are as illustrated, the vertical direction is the Z direction, and the XY plane is the horizontal plane.

(Embodiment 1)
FIG. 1 is a schematic side view showing a configuration example of a composite microscope according to an embodiment of the present invention.
FIG. 2 is an enlarged schematic side view showing a part of a configuration example of a composite microscope according to an embodiment of the present invention.
FIG. 3 is a schematic plan view of a part of the configuration example of the composite microscope according to the embodiment of the present invention as seen from the axial direction of the revolver.

  As illustrated in FIG. 1, in the composite microscope 10 of the present embodiment, a column 16 is provided in a substantially inverted L-shaped column 12 erected on a base 11 in the Z direction. On the side, an eyepiece 17 is provided inclined.

  A substantially convex spherical revolver 15 having a rotation center shaft 15a (rotation center portion) inclined at a desired angle in the Z direction is rotatably provided on the lower surface of the column 12 supporting the lower end side of the lens barrel 16. Yes.

  An XY stage 13 and a Z stage 14 are provided on the optical axis of the lens barrel 16 in the base 11, and the sample 90 placed on the Z stage 14 can be positioned by XYZ three-dimensional displacement. It has become.

  The column 12 is provided with an internal controller 19 composed of, for example, a microcomputer. The internal controller 19 is configured to control the displacement operation of the XY stage 13, the Z stage 14 and the revolver 15 by receiving a command from the controller 20 provided outside via the cable 21.

  In the case of the present embodiment, as illustrated in FIG. 3, the revolver 15 includes a plurality of lens mounting holes A (first mounting holes) on a concentric circle around the rotation center axis 15a at equal intervals in the circumferential direction. A lens mounting hole F is provided.

  A female screw portion (not shown) is formed on each inner peripheral portion of the lens mounting hole A to the lens mounting hole F so as to have a central axis that is radially inclined with respect to the rotation central axis 15a. By screwing the base end portion of the objective lens 18, the objective lens 18 can be detachably attached.

  In the following description, the objective lenses are collectively referred to as the objective lens 18, and the individual objective lenses are referred to as the objective lens 18a to the objective lens 18c.

  The inclination angle of the central axis of the lens mounting hole A to the lens mounting hole F with respect to the rotation center axis 15a is configured to coincide with the inclination angle of the rotation center axis 15a with respect to the Z-axis direction. When any one of the mounting holes F is selectively positioned on the optical axis (Z axis) of the lens barrel 16, the optical axis of the selected objective lens 18 is the optical axis (Z axis) of the lens barrel 16. It has a configuration that matches.

  In the case of the present embodiment, as an example, in the lens mounting hole A to the lens mounting hole F, the lens mounting hole A is scanned, for example, as a kind of scanning probe microscope (SPM) instead of the objective lens 18. The STM detection unit 30 (attached device) constituting the probe portion of the scanning tunnel microscope is detachably mounted by being screwed.

  The STM detection unit 30 is an example, and an SPM detection unit that is a probe portion of an arbitrary scanning probe microscope (SPM) can be mounted instead of the STM detection unit 30.

  In each of the other lens mounting holes B to D, the lens mounting hole B is mounted with an objective lens 18a with a magnification of x100, and the lens mounting hole C is mounted with a x20 objective lens 18b. Yes.

  In the case of the present embodiment, the lens mounting hole A in which the STM detection unit 30 is mounted and the lens mounting hole D that is diagonally sandwiching the rotation center shaft 15a have a wide field-of-view range × 5 × low magnification. Objective lens 18c is mounted.

The STM detection unit 30 mounted in the lens mounting hole A is mounted with fine movement elements such as piezo elements that can be bent and expanded in the XYZ axial directions, and the lower end surface of the STM detection unit 30 facing the sample 90. Is equipped with a probe (cantilever).
A cable 31 (cable) is drawn from the side surface of the STM detection unit 30 and connected to the external controller 20.

  This cable 31 is, for example, an electric signal to a power supply line for supplying power for driving a fine movement element provided in the STM detection unit 30 or a probe (not shown) protruding from the lower end of the STM detection unit 30. Including a signal line.

  The cable 31 of the STM detection unit 30 rotates the revolver 15, and the load of the cable 31 is the most when the STM detection unit 30 is arranged at the sample observation position on the optical axis (Z axis) of the lens barrel 16. It is pulled out to be smaller.

  In the case of the composite microscope 10 according to the present embodiment, a cable support device 40 (cable support means) for routing the cable 31 of the STM detection unit 30 on the rotation center shaft 15a is provided.

  That is, the cable holding member 43 of the cable support device 40 is provided on the rotation center shaft 15a of the revolver 15, and the cable 31 connected to the STM detection unit 30 is positioned and held near the rotation center shaft 15a. Is configured to do.

  As illustrated in FIG. 2, the cable support device 40 of the present embodiment includes a support arm 42 in which a support hole 42 a that supports the cable holding member 43 on the rotation center shaft 15 a of the revolver 15 is formed, and the revolver 15. And a base portion 41 that supports the base end portion of the support arm 42 by being screwed into the vacant lens mounting hole E (second mounting hole).

  The base portion 41 includes the same male thread portion as that of the objective lens 18 and can be detachably mounted at any position of the lens mounting hole A to the lens mounting hole E.

  The cable holding member 43 is formed of a cylindrical body formed by penetrating the cable guide hole 43a in the axial direction, and the support arm is arranged so that the center axis of the cable guide hole 43a substantially coincides with the rotation center axis 15a of the revolver 15. 42 and the base portion 41.

  The cable 31 of the STM detecting unit 30 is inserted into the cable guide hole 43a of the cable holding member 43 so that the cable 31 is always routed on the rotation center shaft 15a that is the center of the revolver 15 even if the revolver 15 is rotated. It has a configuration located on the route.

  In addition, a cable receiving member 44 that supports a cable 31 that reaches the controller 20 via the cable holding member 43 is attached to the column 12 of the composite microscope 10. The cable 31 is received by the ring-shaped cable stopper 45. It is fixed along the member 44.

The cable receiving member 44 is detachably attached to the column 12 by a belt, screwing or the like.
Thus, the cable 31 reaching the controller 20 via the cable holding member 43 is prevented from hanging down and coming into contact with the lower Z stage 14 or the sample 90.

  As described above, in the composite microscope 10 of the present embodiment, the cable 31 from the STM detection unit 30 is held by the cable holding member 43 along the rotation center axis 15a of the revolver even when the revolver 15 is rotated. Yes.

Next, the operation of the composite microscope 10 of the present embodiment will be described.
First, an example of the movement of the revolver 15 according to the present embodiment in which the objective lens 18 and the STM detection unit 30 are mounted in a mixed manner as illustrated in FIG. 3 will be described. Hereinafter, the positions of the lens mounting hole A to the lens mounting hole F are simply referred to as A to F as necessary.

The internal controller 19 controls the revolver 15 so that the D × 5 objective lens 18c is at the sample observation position when the composite microscope 10 is turned on.
When the internal controller 19 switches the objective lens 18c, it is switched in the order of A → B → C → D → E → F clockwise in FIG.

When switching the revolver 15 from F to A, the internal controller 19 switches in the order of F → E → D → C → B → A.
Therefore, in the composite microscope 10 of the present embodiment, the revolver 15 does not rotate by 300 ° or more at the maximum.

The internal controller 19 controls the revolver 15 so that the revolver 15 does not move from A → F or F → A, and moves in the shortest distance for other switching.
Thereby, the load which the cable 31 receives by the rotation operation | movement of the revolver 15 becomes the minimum.

  Next, in the composite microscope 10 of the present embodiment having the configuration including the general optical microscope function and the STM detection unit 30 as described above, an example of a procedure for observing the sample 90 using the STM detection unit 30 explain.

  When the power of the composite microscope 10 is turned on, first, the internal controller 19 moves the D × 5 objective lens 18c having the lowest magnification to the observation position on the optical axis of the lens barrel 16, and on the surface of the sample 90. Be placed.

Next, the objective lens 18 c is focused on the surface of the sample 90 using the XY stage 13 and the Z stage 14.
The revolver 15 is gradually rotated from the low-magnification objective lens 18c toward the high-magnification objective lens, and finally the STM detection unit 30 is disposed at the observation position directly above the sample 90.

  At this time, in the case of the present embodiment, as described above, the cable 31 of the STM detection unit 30 is held on the rotation center axis 15a of the revolver 15 by the cable holding member 43. As a result, the floating displacement in the radial direction of the revolver 15 in the routing path of the cable 31 is minimized, and the load acting on the cable 31 and the STM detection unit 30 to which the cable 31 is connected can be greatly reduced.

  Next, using the Z stage 14, the probe of the STM detection unit 30 is brought close to the sample 90 until a region where a tunnel current is generated.

  The probe scans the surface of the sample 90 using the above-described fine movement element (not shown) provided in the STM detection unit 30 and, for example, feedback control is performed so that the tunnel current between the probe and the surface of the sample 90 is constant. Thus, the controller 20 images the surface shape of the sample 90.

  As described above, when the revolver 15 rotates, the cable 31 largely moves as it is. However, in the composite microscope 10 of the present embodiment, the cable holding member is placed on the rotation center shaft 15a that is the rotation center of the revolver 15. 43 and holding the cable 31 in the vicinity of the rotation center of the revolver 15 can suppress the loosening and greatly reduce the load acting on the cable 31 and the STM detection unit 30.

  Further, by providing the cable receiving member 44 supported by the column 12 in the path of the cable 31 that reaches the controller 20 via the cable holding member 43, the cable 31 comes into contact with the surface of the sample 90, the Z stage 14, or the like. Is reliably prevented.

  Further, in the STM detection unit 30 associated with the cable 31, the cable 31 is connected to the revolver 15 by the cable holding member 43 as long as it can be mounted in the lens mounting hole A to the lens mounting hole F of the revolver 15 in the same manner as the objective lens 18. The STM detector 30 can be mounted so as to be routed around the center of rotation, and no modification is required to provide the STM detector 30 with a special connection structure such as a contact point. The STM detector 30 can be manufactured at low cost without sacrificing versatility. it can.

  Further, on the side of the composite microscope 10, it is only necessary to mount the base portion 41 of the cable support device 40 using one of the existing lens mounting holes A to F, and the existing main body structure of the composite microscope 10. Since it is not necessary to modify itself, the composite microscope 10 having high versatility can be realized at low cost.

  Further, in the revolver 15, the objective lens 18 c having the lowest magnification (× 5) is located at the diagonal position of the lens mounting hole A in which the STM detection unit 30 is mounted (that is, the position opposite to the rotation center axis 15 a). The technical problem that the position reproducibility deteriorates due to the stress load of the cable 31 due to the rotation of the revolver 15 is also eliminated.

  In addition, when the STM detection unit 30 is arranged at the sample observation position on the optical axis of the lens barrel 16, it is arranged so that the load on the cable 31 is the smallest, thereby reducing the visual field deviation at the time of STM observation with respect to the sample 90. it can.

  Furthermore, in the switching operation of the revolver 15, the load acting on the cable 31 and the STM detection unit 30 can be reduced by providing the regularity as described above so that the rotation angle is limited to, for example, 300 ° or less.

  As described above, according to the composite microscope 10 of the present embodiment, the versatility in which the function of a scanning probe microscope such as an optional STM detection unit 30 is added to an existing optical microscope at a low cost with a small change scale. Can be realized.

FIG. 4 is a schematic side view showing a configuration example of a cable support device in a composite microscope that is a modification of the present embodiment.
In the cable support device 40A (cable support means) of the modified example of FIG. 4, a slit 46a through which the cable 31 is inserted penetrates the support arm 42 in the center instead of the cable holding member 43 described above. The cable bush 46 formed in this manner is arranged so as to be idled via a bearing 47.

  The cable bush 46 is made of, for example, an elastic body such as rubber or resin, and the slits 46a are elastically deformed and expanded, so that the cable 31 having an arbitrary thickness can be inserted and held.

  In the case of the cable support device 40A of this modified example, in addition to the effect of the cable support device 40 described above, the cable bush 46 that holds the cable 31 rotates idly with respect to the support arm 42. Accordingly, there is an advantage that torsional stress or the like acting on the cable 31 is further reduced.

Further, since the cable bushing 46 can be made thinner than the cable holding member 43, there is an advantage that the entire cable support device 40A can be further reduced in size.
That is, according to the composite microscope 10 of the present embodiment, it is possible to realize an inexpensive and highly versatile composite microscope 10 without causing restrictions on attached devices with cables such as the STM detection unit 30 to be mounted. .

(Embodiment 2)
FIG. 5 is a partially broken schematic side view showing a configuration example of a composite microscope according to another embodiment of the present invention.
FIG. 6 is a schematic plan view showing a configuration example of a revolver in a composite microscope according to another embodiment of the present invention.

The composite microscope 10A of the second embodiment is the same as the composite microscope 10 described above except that a cable support structure 50 (cable support means) is provided instead of the cable support device 40.
Therefore, in the composite microscope 10A of the second embodiment, the same reference numerals are given to the same components as those of the above-described composite microscope 10 of the first embodiment, and a duplicate description is omitted.

  In the composite microscope 10A of the second embodiment, as the cable support structure 50, a revolver cable hole 51 penetrating in the direction of the rotation center axis 15a at the center of the revolver 15 and a mirror so as to communicate with the revolver cable hole 51 are used. A housing cable hole 52 formed so as to penetrate the column 12 supporting the cylinder 16 is provided.

  In this case, the revolver 15 is rotatably supported on the column 12 by a bearing or the like (not shown) on the outer peripheral portion, and is also rotationally driven by a gear or the like (not shown) provided in the outer part of the revolver 15. .

  For this reason, since there is no movable mechanism or the like in the vicinity of the rotation center axis 15a of the revolver 15 of the present embodiment, the revolver cable hole 51 is simply formed in the center of the revolver 15 without any hindrance to the original function of the microscope. Is possible.

  Further, the housing cable hole 52 on the column 12 side is provided at a position where it does not interfere with the lens barrel 16 supported by the column 12, and it does not cause any trouble in the original function of the microscope.

  The cable 31 of the STM detection unit 30 attached to the revolver 15 instead of a part of the objective lens 18 is inserted into the revolver cable hole 51 and the housing cable hole 52 of the cable support structure 50 and pulled out to the outside. Are connected to an external controller 20.

  As a result, the cable 31 connected to the STM detection unit 30 is routed to the outside via the rotation center axis 15 a of the revolver 15. Therefore, the revolver 15 is used for switching the STM detection unit 30 and the objective lens 18. , It is possible to reliably prevent a large load from acting on the cable 31 and the STM detection unit 30.

In this case, since the cable 31 is routed above the back side of the revolver 15 through the revolver cable hole 51, the cable 31 is also reliably prevented from contacting the sample 90 and the Z stage 14 below.
That is, according to the composite microscope 10A of the second embodiment, the same effects as those of the first embodiment can be obtained.

  Further, according to the composite microscope 10A, there is an advantage that all of the lens mounting holes A to F provided in the revolver 15 can be used for mounting the objective lens 18 and the STM detection unit 30.

  In addition, the cable support structure 50 is simply manufactured because the revolver cable hole 51 and the housing cable hole 52 are formed in the revolver 15 and the column 12, respectively, so that the structure of the existing composite microscope 10A is simple and low cost. There is an advantage that can be realized by remodeling.

(Embodiment 3)
FIG. 7 is a partially cutaway schematic side view showing a configuration example of a composite microscope according to still another embodiment of the present invention.

  The composite microscope 10B according to the third embodiment includes a cable support structure 60 (cable support) that includes a cylindrical bar 61 that protrudes coaxially with the rotation center shaft 15a at the center of the revolver 15 instead of the cable support device 40. Unlike the composite microscope 10 of the first embodiment described above, the other configurations are the same.

That is, the cylindrical rod 61 of the cable support structure 60 is supported by the base end portion via the bearing 62 so as to be free to rotate coaxially with the rotation center shaft 15 a of the revolver 15.
The cable 31 connected to the STM detection unit 30 is routed in the axial direction along the outer periphery of the columnar bar 61, and is fixed to the columnar bar 61 by the cable stopper member 63.

Further, the cable 31 extending from the cylindrical rod 61 to the controller 20 is fixed by the cable receiving member 44 and the cable stopper 45 provided on the column 12 side, as in the first embodiment.
The composite microscope 10B according to the third embodiment can also obtain the same effects as those of the first embodiment.

  In the first embodiment described above, the cable stopper 45 that fastens the cable 31 and the cable receiving member 44 is provided. However, the cable receiving member 44 is provided with a groove or a protruding wall in which the cable 31 is fitted and fixed. It is good also as a structure which provides and is made into a structure like a guide and the cable stop part 45 is abbreviate | omitted.

(Embodiment 4)
FIG. 8 is a schematic side view showing a part of a configuration example of a composite microscope which is still another embodiment of the present invention.

  In the fourth embodiment, in the composite microscope 10 of the first embodiment described above, the objective lens piezo to which the cable 71 (cable) is connected as an accessory to the revolver 15 instead of the STM detection unit 30 is provided. The case where the objective lens 18 is mounted via the scanner 70 (attached device) will be exemplified.

  The objective lens piezo scanner 70 has one end formed with a male threaded portion 73 that is screwed into one of the lens mounting hole A to the lens mounting hole F of the revolver 15, and the objective lens 18 is screwed into the other end. The female threaded portion 72 to be attached is formed coaxially, and a through hole 74 serving as an optical path has a hollow cylindrical structure formed by penetrating in the axial direction.

  In addition, a plurality of fine movement elements such as piezoelectric elements (not shown) are arranged on the wall surface of the objective lens piezo scanner 70. By applying a voltage to each fine movement element from the outside via the cable 71, the objective lens can be rotated. The lens piezo scanner 70 is minutely deformed independently in each of the X, Y, and Z axis directions to adjust the focus of the objective lens 18 mounted on the objective lens piezo scanner 70 by fine movement in the Z direction, It is possible to control the inclination with respect to the 16 optical axis directions.

The resolution of fine movement in each of the XYZ axial directions in the piezo scanner 70 for the objective lens is smaller than that of the Z stage 14 and the XY stage 13 and is highly accurate.
Therefore, the objective lens piezo scanner 70 is used for applications such as finely controlling the displacement of the objective lens 18 with higher resolution than the Z stage 14 and the XY stage 13.

  That is, as exemplified in the fourth embodiment, the accessory device attached to the composite microscope 10 is not limited to the STM detection unit 30 such as the above-described scanning probe microscope, but is an objective lens piezo provided with the cable 71. The present invention can also be applied to the scanner 70 and the like.

  Although not particularly illustrated, the cable 71 may be held using means such as the cable support device 40A, the cable support structure 50, and the cable support structure 60 described above instead of the cable support device 40 illustrated in FIG. Needless to say, it is good.

  Also in this case, since the load acting on the cable 71 in the rotational displacement of the revolver 15 can be greatly reduced by the cable holding member 43 or the like, the objective lens piezo scanner 70 and the revolver 15 are caused by the reaction of the load acting on the cable 71. There is an advantage that it is possible to prevent a failure caused by distortion of the image and a decrease in observation accuracy.

Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, the accessory device attached to the revolver is not limited to the scanning probe microscope and the objective lens piezo scanner, and a general accessory device attached to the revolver with a cable connected thereto can be widely used.

(Appendix 1)
A revolver that can be rotated with multiple objective lenses,
In a compound microscope capable of mounting a measuring instrument unit on the revolver,
The composite microscope having a mechanism for routing a control cord for a measuring instrument unit that has come out of the measuring instrument unit to the rotation center of the revolver.

(Appendix 2)
A cord holding member that holds the control cord for the measuring instrument unit that is output from the measuring instrument unit at the rotation center of the revolver;
A cord holding member holding portion for holding the cord holding member at the rotation center of the revolver;
The composite microscope according to claim 1, further comprising: a cord receiving member for preventing contact between the measuring instrument unit control cord drawn from the measuring instrument unit and a sample surface or a stage surface.

(Appendix 3)
The composite microscope according to any one of appendices 1 and 2, wherein the contact-preventing cord receiving member includes a cord-stopping portion for preventing a ramp of the measuring instrument unit control cord pulled out from the measuring instrument unit.

(Appendix 4)
2. The composite microscope according to claim 1, further comprising a mechanism for providing a hole at the rotation center of the revolver and drawing the instrument unit control cord drawn from the measurement unit through the hole at the rotation center of the revolver.

(Appendix 5)
In order to prevent visual field shift due to code stress at the time of revolver rotation of the instrument unit control cord drawn out from the instrument unit,
The composite microscope according to any one of appendices 1 to 4, wherein a low-magnification objective lens having a wide field of view is disposed at a diagonal of the measuring instrument unit mounting portion of the revolver.

DESCRIPTION OF SYMBOLS 10 Compound microscope 10A Compound microscope 10B Compound microscope 11 Base 12 Column 13 XY stage 14 Z stage 15 Revolver 15a Rotation center axis 16 Lens barrel 17 Eyepiece 18 (18a-18c) Objective lens 19 Internal controller 20 Controller 21 Cable 30 STM detection part 31 Cable 40 Cable support device 40A Cable support device 41 Base portion 42 Support arm 42a Support hole 43 Cable holding member 43a Cable guide hole 44 Cable receiving member 45 Cable stopper 46 Cable bush 46a Slit 47 Bearing 50 Cable support structure 51 Revolver cable hole 52 Housing cable hole 60 Cable support structure 61 Cylindrical bar 62 Bearing 63 Cable stopper 70 Objective lens piezo scanner 71 Cable 72 Female thread 7 Externally threaded portion 74 through hole 90 samples A~F lens mounting hole

Claims (4)

A compound microscope comprising a revolver in which a plurality of objective lenses can be detached and rotated , an accessory device that can be attached to and detached from the revolver, and a controller that supplies power and electric signals to the accessory device ,
Cable support means for routing the cable connected to the accessory device to the rotation center of the revolver , and
The cable support means includes a revolver cable hole provided at a rotation center portion of the revolver and penetrating in a direction of a rotation center axis of the center portion of the revolver
The composite microscope , wherein a cable connected to the accessory device is inserted into the revolver cable hole from the outside of the revolver and connected to the controller . The composite microscope according to claim 1 ,
The housing that supports the revolver is provided with a housing cable hole that communicates the revolver cable hole with the outside of the housing.
The composite microscope , wherein a cable connected to the accessory device is connected to the controller through the revolver cable hole and the housing cable hole from the outside of the revolver. In the composite microscope according to claim 1 or 2 ,
The accessory device includes a scanning probe microscope. In the composite microscope according to claim 1 or 2 ,
The accessory microscope comprises an objective lens piezo scanner interposed between the revolver and the objective lens.

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