Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP4019252B2 - Manufacturing method of glass pipe for optical fiber - Google Patents
[go: Go Back, main page]

JP4019252B2 - Manufacturing method of glass pipe for optical fiber - Google Patents

Manufacturing method of glass pipe for optical fiber Download PDF

Info

Publication number
JP4019252B2
JP4019252B2 JP2002018349A JP2002018349A JP4019252B2 JP 4019252 B2 JP4019252 B2 JP 4019252B2 JP 2002018349 A JP2002018349 A JP 2002018349A JP 2002018349 A JP2002018349 A JP 2002018349A JP 4019252 B2 JP4019252 B2 JP 4019252B2
Authority
JP
Japan
Prior art keywords
glass pipe
glass
etching
pipe
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002018349A
Other languages
Japanese (ja)
Other versions
JP2003212573A (en
Inventor
英二 梁田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP2002018349A priority Critical patent/JP4019252B2/en
Publication of JP2003212573A publication Critical patent/JP2003212573A/en
Application granted granted Critical
Publication of JP4019252B2 publication Critical patent/JP4019252B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/01205Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
    • C03B37/01225Means for changing or stabilising the shape, e.g. diameter, of tubes or rods in general, e.g. collapsing
    • C03B37/01254Means for changing or stabilising the shape, e.g. diameter, of tubes or rods in general, e.g. collapsing by expanding radially, e.g. by forcing a mandrel through or axial pressing a tube or rod
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/04Re-forming tubes or rods
    • C03B23/049Re-forming tubes or rods by pressing
    • C03B23/0496Re-forming tubes or rods by pressing for expanding in a radial way, e.g. by forcing a mandrel through a tube or rod

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は光ファイバ用ガラスパイプの製造方法に関する。
【0002】
【従来の技術】
光ファイバ用ガラスパイプの製造方法としては、石英ガラスロッドを熱源によって加熱軟化しながら、石英ガラスロッドの中心に穿孔治具を圧入する方法(特開平7−109135号公報参照)が知られている。上記方法によれば、穿孔治具に存在する不純物が、ガラスパイプに付着、拡散するので、通常、不純物の除去を目的に、ガラスパイプの内周面をHF(フッ酸)溶液などを用いてエッチングを行う。
【0003】
しかしながら、従来のエッチング方法では、エッチング量が不十分であることによって、ガラスパイプの内周面に多くの不純物が残留することがあり、特に、不純物が遷移金属である場合においては、伝送損失の高い光ファイバが得られてしまうことがある、という問題があった。一方、該問題を回避するために、エッチング量を増やす方法は、実際は必要以上にエッチングがなされていることが多いという問題があった。
【0004】
【発明が解決しようとする課題】
本発明は、前述した課題を解決するためになされたものであり、その目的は、光伝送特性に優れた光ファイバを確実に得ることのできる、光ファイバ用ガラスパイプの製造方法を提供することにある。
【0005】
【課題を解決するための手段】
請求項1に係る光ファイバ用ガラスパイプの製造方法は、長尺状のガラス素材をガラス素材の長手方向に沿って相対移動する熱源によって加熱することにより、前記ガラス素材が軟化された穿孔領域を設けるとともに、熱源に対する相対位置が一定に保持された穿孔治具をガラス素材の端面から中心軸に沿って圧入することによってガラスパイプを製造し、前記穿孔治具に含有される遷移金属の含有率と、前記穿孔領域における加熱温度と、前記穿孔領域における加熱時間から不純物濃度の深さ分布を見積もり、必要且つ十分なエッチング量を決定し、次いで、ガラスパイプの内周面を、前記エッチング量で、化学的にエッチングすることを特徴としている。今般、本発明者は、前記した「遷移金属の含有率、加熱温度、加熱時間」と、「光伝送特性に優れた光ファイバを確実に得るために必要なエッチング量」とに相関関係があることを見出した。よって、請求項1に係る光ファイバ用ガラスパイプの製造方法によれば、穿孔治具に含有される遷移金属の含有率と、穿孔領域における加熱温度と、穿孔領域における加熱時間とに基づいて、エッチングすることにより、不純物濃度が一定以下となるガラスパイプの内周面からの深さを判定でき、この深さに基づいて必要且つ十分な量のエッチングを施すことができる。よって、エッチングを必要以上に行うことなく、光伝送特性に優れた光ファイバを確実に得ることができる光ファイバ用ガラスパイプの製造方法とすることができる。
【0006】
また、本発明者は、前記遷移金属の含有率を1重量%以下、穿孔領域における加熱温度を1700℃〜1800℃、穿孔領域における加熱時間を10分以下、エッチング量を35μm以上とした時に、光伝送特性に優れた光ファイバを確実に得ることができることを見出した。
よって、請求項2に係る光ファイバ用ガラスパイプの製造方法は、遷移金属の含有率が1重量%以下、穿孔領域における加熱温度が1700℃〜1800℃、前記穿孔領域における加熱時間が10分以下であり、エッチング量が35μm以上であることを特徴としている。
【0007】
【発明の実施の形態】
以下、本発明の実施形態を図面に基づいて詳細に説明する。
図1は本発明の実施形態に係る光ファイバ用ガラスパイプの製造方法を説明する図、図2は本発明の実施形態に係るガラスパイプ内周面からの侵入深さと不純物濃度の関係を示す図である。
【0008】
図1の(A)および(B)に示すように、本発明の実施形態に係る光ファイバ用ガラスパイプの製造方法は、長尺状のガラス素材10をその長手方向に沿って相対移動する熱源11によって加熱することにより、ガラス素材が軟化された穿孔領域を設ける。これと同時に、熱源11に対する相対位置が一定に保持される穿孔治具12をガラス素材10の端面10Aから中心軸Xに沿って圧入し、ガラスパイプ13を形成する。
【0009】
ガラス素材10としては、円柱状のもの、又は、内径が穿孔治具12の最大外径より小さく設定された円筒状のものを好適に使用できる。また、熱源11及び穿孔治具12とガラス素材10とは相対的に移動すればよいので、熱源11及び穿孔治具12を移動させてもよいし、ガラス素材10を移動させてもよい。更に、両方を移動させてもよい。但し、いずれの場合も、通常、熱源11と穿孔治具12との相対位置関係は一定とされる。
【0010】
次いで、図1(C)のガラスパイプ13の概略断面図に示すように、ガラスパイプの内周面(以下、パイプ内周面といもいう)13Aを、エッチング深さh(エッチング量)で、化学的にエッチングして、光ファイバ用ガラスパイプを製造する。
【0011】
通信用光ファイバにおいては1.3〜1.7μmの波長帯が一般に使用されるが、光ファイバ中にFe,Cr,Ni,Co,Cu,V,Mnといった遷移金属が含まれると、これらの波長帯の広い範囲に渡って損失が増加してしまう。
このような遷移金属による損失増加を防ぐためには、不純物として含まれる遷移金属の濃度を1.0wtppbより低いレベルに抑えることが必要である。従って、光ファイバの製造に用いられる材料についても、不純物濃度は1.0wtppbより低いレベルに抑制することが要求される。
【0012】
そして、上述したように、加熱したガラス素材10に穿孔治具12を圧入し、光ファイバ用ガラスパイプを製造する場合には、穿孔治具12に含まれる不純物が加工時の熱によりパイプ内周面13Aから拡散し、不純物を含有する層が形成されることが懸念される(図1(C)参照)。
本発明においては、エッチング深さhは、穿孔治具12に含有される遷移金属の含有率と、穿孔領域における加熱温度(加工温度)と、穿孔領域における加熱時間(加工温度に保持される時間)とに基づいて決定される。
より具体的には、本発明者は、パイプ内周面13Aからの深さxにおける不純物濃度C(x)は、(式1)によって的確に与えられることを見出した。
【0013】
C(x)=C0×exp(‐x2/4Dt) (式1)
但し、C0:ガラスパイプの内表面における不純物濃度
x:ガラスパイプの内表面からの深さ
D:不純物の石英ガラスの加工温度における拡散係数
t:加工温度に保持される時間
【0014】
(式1)によって、不純物濃度が1wtppbとなるパイプ内周面13Aからの深さを見積もることが可能であり、これにより、必要且つ十分な量のエッチング深さhを決定できる。
よって、パイプ内周面13Aを、エッチング深さhでエッチングすることによって、エッチングを必要以上に行うことなく、光伝送特性に優れた光ファイバを確実に得ることができる光ファイバ用パイプを製造できることを見出した。
【0015】
また、本発明者は、上記(式1)を鑑みて、穿孔治具12に含有される遷移金属の含有率で1重量%以下、穿孔領域における加熱温度が1700℃〜1800℃、穿孔領域における加熱時間が10分以下、エッチング量が35μm〜50μmの条件で、エッチングを必要以上に行うことなく、不純物の含有量が十分に小さい光ファイバ用ガラスパイプを確実に製造できることを見出した(以下、実施例参照)。
【0016】
なお、化学的エッチングとしては、ウエットエッチングを行ってもよく、ドライエッチングを行ってもよい。
ウエットエッチングの方法としては、ふっ酸(HF)を含む溶液を用いる方法がある。この場合、HF溶液の濃度を調整することでエッチング深さの微妙な調整が可能であり、過剰なエッチングを防ぐことができる。
ドライエッチングエッチングの方法としては、パイプを加熱しながら、内周面に六フッ化硫黄(SF6)や各種のフロンガスを流す方法がある。この場合、パイプの内周面を平滑にする効果があり、過剰にエッチングしても、内周面が荒れないという効果が期待できる。
【0017】
【実施例】
ガラス素材10としての純石英ガラスロッド(VAD法等の方法で作製される)を穿孔装置にセットして、上記した方法に基づき、ガラスパイプ13を作成する。
穿孔領域における加熱温度(加工温度)は、純石英ガラスロッドを加工可能な粘性とするために、1700℃〜1800℃とする。この温度範囲においては1800℃における拡散係数がもっとも高い(すなわち拡散しやすい)。その値は、例えば、Fe3+においては、3.1×10-10cm2/sであり、その他の遷移金属元素に関しても、オーダー的には同等であるため、上記した(式1)における不純物の拡散係数Dとして1.0×10-9cm2/sを用いると、パイプ内周面13Aから所定深さで存在する不純物層の厚みを見積もる上で十分安全である。
【0018】
また、1700℃〜1800℃が保持される時間(穿孔領域における加熱時間)は、10分とする。
【0019】
穿孔治具12としては純度99wt%の炭素治具を用いる。この場合、穿孔治具12の体積は加工すべき石英ガラスロッドに比較し十分小さいため、パイプの内周面13Aの不純物濃度C0としては1wt%を見積もれば十分安全である。
【0020】
図2は、以上のように見積もった不純物の拡散係数D,不純物濃度C0を用いて、前記(式1)により求めた、パイプ内表面13aからの侵入深さと不純物濃度との相関関係を示す。
図2により、遷移金属不純物の含有量を1wtppbより小さくするためには、パイプ内表面13aから35μm以上のエッチング深さhでエッチングを施せば良い。なお、エッチングを必要以上に行わないためには、エッチング深さhは、50μm以下とされるのが好ましい。
以上のように、本発明によれば、不純物濃度が所定値となるパイプ内周面13Aからの深さxが(式1)によって判定でき、この深さxに基づいて、必要かつ十分な量であるエッチング深さh(エッチング量)でエッチングを行うことによって、不純物の含有量が十分に小さい光ファイバ用ガラスパイプを確実に製造できる。
【0021】
【発明の効果】
以上、説明したように、本発明によれば、穿孔条件下における遷移金属不純物の拡散量を予測し、エッチング量を必要かつ十分な量とすることで、エッチングを必要以上に行うことなく、光伝送特性に優れた光ファイバを確実に得ることができる光ファイバ用ガラスパイプの製造方法を提供できる。
【図面の簡単な説明】
【図1】本発明に係る光ファイバ用ガラスパイプの製造方法を説明する図である。
【図2】本発明に係るガラスパイプ内周面からの侵入深さと不純物濃度の関係を示す図である。
【符号の説明】
10 ガラス素材
11 熱源
12 穿孔治具
13 ガラスパイプ
13A ガラスパイプの内周面
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a glass pipe for optical fiber.
[0002]
[Prior art]
As a method for manufacturing an optical fiber glass pipe, a method of press-fitting a drilling jig into the center of a quartz glass rod while heating and softening the quartz glass rod with a heat source is known (see JP-A-7-109135). . According to the above method, the impurities present in the drilling jig adhere to and diffuse on the glass pipe. Therefore, for the purpose of removing impurities, the inner peripheral surface of the glass pipe is usually used with HF (hydrofluoric acid) solution or the like. Etching is performed.
[0003]
However, in the conventional etching method, a large amount of impurities may remain on the inner peripheral surface of the glass pipe due to an insufficient etching amount. Especially, when the impurities are transition metals, transmission loss is reduced. There was a problem that a high optical fiber might be obtained. On the other hand, in order to avoid the problem, the method of increasing the etching amount has a problem that the etching is actually performed more than necessary.
[0004]
[Problems to be solved by the invention]
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a method for manufacturing a glass pipe for an optical fiber that can reliably obtain an optical fiber having excellent optical transmission characteristics. It is in.
[0005]
[Means for Solving the Problems]
The manufacturing method of the glass pipe for optical fibers which concerns on Claim 1 heats the elongate glass raw material with the heat source which moves relatively along the longitudinal direction of a glass raw material, The perforated area | region where the said glass raw material was softened A glass pipe is manufactured by press-fitting along a central axis from the end face of the glass material a drilling jig that is provided and maintained at a constant relative position to the heat source, and the content of transition metal contained in the drilling jig When a heating temperature in the perforated region, estimate the depth distribution of the impurity concentration of the heating time in the perforated region, to determine the necessary and sufficient amount of etching, then, the inner circumferential surface of the glass pipe, in the etching amount It is characterized by chemical etching. Now, the present inventor has a correlation between the above-mentioned “content of transition metal, heating temperature, heating time” and “etching amount necessary to reliably obtain an optical fiber having excellent optical transmission characteristics”. I found out. Therefore, according to the method for manufacturing an optical fiber glass pipe according to claim 1, based on the transition metal content contained in the drilling jig, the heating temperature in the drilling region, and the heating time in the drilling region, By etching, the depth from the inner peripheral surface of the glass pipe where the impurity concentration is below a certain level can be determined, and a necessary and sufficient amount of etching can be performed based on this depth. Therefore, it can be set as the manufacturing method of the glass pipe for optical fibers which can obtain the optical fiber excellent in the optical transmission characteristic reliably, without performing etching more than necessary.
[0006]
In addition, the present inventor, when the content of the transition metal is 1% by weight or less, the heating temperature in the perforated region is 1700 ° C. to 1800 ° C., the heating time in the perforated region is 10 minutes or less, and the etching amount is 35 μm or more, It has been found that an optical fiber excellent in optical transmission characteristics can be obtained with certainty.
Therefore, in the method for manufacturing the optical fiber glass pipe according to claim 2, the transition metal content is 1 wt% or less, the heating temperature in the perforated region is 1700 ° C. to 1800 ° C., and the heating time in the perforated region is 10 minutes or less. The etching amount is 35 μm or more.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a diagram for explaining a method of manufacturing an optical fiber glass pipe according to an embodiment of the present invention, and FIG. 2 is a diagram showing the relationship between the penetration depth from the inner peripheral surface of the glass pipe and the impurity concentration according to the embodiment of the present invention. It is.
[0008]
As shown to (A) and (B) of FIG. 1, the manufacturing method of the glass pipe for optical fibers which concerns on embodiment of this invention is a heat source which relatively moves the elongate glass raw material 10 along the longitudinal direction. 11 is used to provide a perforated region in which the glass material is softened. At the same time, a punching jig 12 whose relative position with respect to the heat source 11 is kept constant is press-fitted along the central axis X from the end face 10A of the glass material 10 to form a glass pipe 13.
[0009]
As the glass material 10, a columnar one or a cylindrical one whose inner diameter is set smaller than the maximum outer diameter of the drilling jig 12 can be suitably used. Moreover, since the heat source 11 and the perforation jig | tool 12 and the glass raw material 10 should just move relatively, the heat source 11 and the perforation jig | tool 12 may be moved, and the glass raw material 10 may be moved. Furthermore, both may be moved. However, in any case, the relative positional relationship between the heat source 11 and the drilling jig 12 is usually constant.
[0010]
Next, as shown in the schematic cross-sectional view of the glass pipe 13 in FIG. 1C, the inner peripheral surface 13A of the glass pipe (hereinafter also referred to as the pipe inner peripheral surface) is etched at an etching depth h (etching amount). Glass pipe for optical fiber is manufactured by chemical etching.
[0011]
In a communication optical fiber, a wavelength band of 1.3 to 1.7 μm is generally used. However, when transition metals such as Fe, Cr, Ni, Co, Cu, V, and Mn are contained in the optical fiber, these wavelengths are used. Loss increases over a wide range of wavelength bands.
In order to prevent such an increase in loss due to the transition metal, it is necessary to suppress the concentration of the transition metal contained as an impurity to a level lower than 1.0 wtppb. Accordingly, the material used for manufacturing the optical fiber is also required to have an impurity concentration suppressed to a level lower than 1.0 wtppb.
[0012]
Then, as described above, when the punching jig 12 is press-fitted into the heated glass material 10 to produce an optical fiber glass pipe, the impurities contained in the punching jig 12 are caused by heat during processing to cause the pipe inner periphery. There is concern that a layer that diffuses from the surface 13A and contains an impurity is formed (see FIG. 1C).
In the present invention, the etching depth h refers to the content of the transition metal contained in the drilling jig 12, the heating temperature in the drilling region (processing temperature), and the heating time in the drilling region (time maintained at the processing temperature). ) And determined.
More specifically, the present inventor has found that the impurity concentration C (x) at the depth x from the pipe inner peripheral surface 13A is accurately given by (Equation 1).
[0013]
C (x) = C0 × exp (−x 2 / 4Dt) (Formula 1)
Where C0: impurity concentration on the inner surface of the glass pipe x: depth from the inner surface of the glass pipe D: diffusion coefficient of impurities at the processing temperature of the quartz glass t: time for which the processing temperature is maintained
According to (Equation 1), it is possible to estimate the depth from the pipe inner peripheral surface 13A where the impurity concentration is 1 wtppb, whereby a necessary and sufficient amount of etching depth h can be determined.
Therefore, by etching the pipe inner peripheral surface 13A at the etching depth h, it is possible to manufacture an optical fiber pipe that can reliably obtain an optical fiber having excellent optical transmission characteristics without performing etching more than necessary. I found.
[0015]
Further, in view of the above (Equation 1), the present inventor has a transition metal content of 1% by weight or less in the drilling jig 12, the heating temperature in the drilling region is 1700 ° C. to 1800 ° C., and in the drilling region. It has been found that a glass pipe for optical fiber with a sufficiently small content of impurities can be reliably produced without performing etching more than necessary under the conditions of a heating time of 10 minutes or less and an etching amount of 35 μm to 50 μm (hereinafter, See Examples).
[0016]
As chemical etching, wet etching or dry etching may be performed.
As a wet etching method, there is a method using a solution containing hydrofluoric acid (HF). In this case, the etching depth can be finely adjusted by adjusting the concentration of the HF solution, and excessive etching can be prevented.
As a dry etching etching method, there is a method of flowing sulfur hexafluoride (SF 6 ) or various types of chlorofluorocarbon gas to the inner peripheral surface while heating the pipe. In this case, there is an effect of smoothing the inner peripheral surface of the pipe, and an effect that the inner peripheral surface is not roughened even if it is etched excessively can be expected.
[0017]
【Example】
A pure quartz glass rod (manufactured by a method such as the VAD method) as the glass material 10 is set in a perforating apparatus, and the glass pipe 13 is created based on the above method.
The heating temperature (processing temperature) in the perforated region is set to 1700 ° C. to 1800 ° C. in order to make the pure quartz glass rod have a processable viscosity. In this temperature range, the diffusion coefficient at 1800 ° C. is the highest (that is, it is easy to diffuse). The value is, for example, 3.1 × 10 −10 cm 2 / s in Fe 3+ , and other transition metal elements are equivalent in order, and therefore in the above (formula 1) When 1.0 × 10 −9 cm 2 / s is used as the impurity diffusion coefficient D, it is sufficiently safe to estimate the thickness of the impurity layer existing at a predetermined depth from the pipe inner peripheral surface 13A.
[0018]
In addition, the time during which 1700 ° C. to 1800 ° C. is maintained (heating time in the perforated region) is 10 minutes.
[0019]
As the drilling jig 12, a carbon jig having a purity of 99 wt% is used. In this case, since the volume of the drilling jig 12 is sufficiently smaller than the quartz glass rod to be processed, it is sufficiently safe to estimate 1 wt% as the impurity concentration C0 of the inner peripheral surface 13A of the pipe.
[0020]
FIG. 2 shows the correlation between the penetration depth from the pipe inner surface 13a and the impurity concentration obtained by the above (Equation 1) using the impurity diffusion coefficient D and the impurity concentration C0 estimated as described above.
According to FIG. 2, in order to make the content of the transition metal impurity smaller than 1 wtppb, the etching may be performed at an etching depth h of 35 μm or more from the pipe inner surface 13a. In order not to perform etching more than necessary, the etching depth h is preferably 50 μm or less.
As described above, according to the present invention, the depth x from the pipe inner peripheral surface 13A at which the impurity concentration becomes a predetermined value can be determined by (Equation 1), and a necessary and sufficient amount based on the depth x By performing the etching at an etching depth h (etching amount), an optical fiber glass pipe with a sufficiently small impurity content can be reliably manufactured.
[0021]
【The invention's effect】
As described above, according to the present invention, the diffusion amount of transition metal impurities under the drilling conditions is predicted, and the etching amount is set to a necessary and sufficient amount, so that the light can be emitted without performing etching more than necessary. The manufacturing method of the glass pipe for optical fibers which can obtain the optical fiber excellent in the transmission characteristic reliably can be provided.
[Brief description of the drawings]
FIG. 1 is a diagram for explaining a method for producing a glass pipe for optical fibers according to the present invention.
FIG. 2 is a graph showing the relationship between the penetration depth from the inner peripheral surface of the glass pipe and the impurity concentration according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Glass material 11 Heat source 12 Drilling jig 13 Glass pipe 13A Inner peripheral surface of glass pipe

Claims (2)

長尺状のガラス素材を前記ガラス素材の長手方向に沿って相対移動する熱源によって加熱することにより、前記ガラス素材が軟化された穿孔領域を設けるとともに、前記熱源に対する相対位置が一定に保持された穿孔治具を前記ガラス素材の端面から中心軸に沿って圧入することによってガラスパイプを製造し、
前記穿孔治具に含有される遷移金属の含有率と、前記穿孔領域における加熱温度と、前記穿孔領域における加熱時間から不純物濃度の深さ分布を見積もり、必要且つ十分なエッチング量を決定し、
次いで、前記ガラスパイプの内周面を、前記エッチング量で、化学的にエッチングする光ファイバ用ガラスパイプの製造方法。
By heating a long glass material with a heat source that relatively moves along the longitudinal direction of the glass material, a perforated region in which the glass material is softened is provided, and a relative position with respect to the heat source is kept constant. A glass pipe is manufactured by press-fitting a drilling jig along the central axis from the end face of the glass material,
Estimating the depth distribution of the impurity concentration from the transition metal content contained in the drilling jig, the heating temperature in the drilling region, and the heating time in the drilling region, and determining the necessary and sufficient etching amount,
Then, the manufacturing method of the glass pipe for optical fibers which chemically etches the internal peripheral surface of the said glass pipe with the said etching amount.
前記遷移金属の含有率が1重量%以下、前記穿孔領域における加熱温度が1700℃〜1800℃、前記穿孔領域における加熱時間が10分以下であり、前記エッチング量が35μm以上である請求項1に記載の光ファイバ用ガラスパイプの製造方法。  The content of the transition metal is 1% by weight or less, the heating temperature in the perforated region is 1700 ° C. to 1800 ° C., the heating time in the perforated region is 10 minutes or less, and the etching amount is 35 μm or more. The manufacturing method of the glass pipe for optical fibers of description.
JP2002018349A 2002-01-28 2002-01-28 Manufacturing method of glass pipe for optical fiber Expired - Fee Related JP4019252B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002018349A JP4019252B2 (en) 2002-01-28 2002-01-28 Manufacturing method of glass pipe for optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002018349A JP4019252B2 (en) 2002-01-28 2002-01-28 Manufacturing method of glass pipe for optical fiber

Publications (2)

Publication Number Publication Date
JP2003212573A JP2003212573A (en) 2003-07-30
JP4019252B2 true JP4019252B2 (en) 2007-12-12

Family

ID=27653737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002018349A Expired - Fee Related JP4019252B2 (en) 2002-01-28 2002-01-28 Manufacturing method of glass pipe for optical fiber

Country Status (1)

Country Link
JP (1) JP4019252B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102225838B (en) * 2011-06-20 2013-03-13 桂林市光隆光电科技有限公司 Rotatable temperature control heater
JP6151310B2 (en) * 2015-07-02 2017-06-21 株式会社フジクラ Optical fiber preform manufacturing method and optical fiber manufacturing method

Also Published As

Publication number Publication date
JP2003212573A (en) 2003-07-30

Similar Documents

Publication Publication Date Title
JP5489713B2 (en) Optical fiber containing alkali metal oxide
US4469554A (en) Etch procedure for optical fibers
KR20050031110A (en) Low loss optical fiber and method for making same
DK158940B (en) PROCEDURE FOR MANUFACTURING FRAME FOR OPTICAL FIBERS
US20140370287A1 (en) Method for producing optical fiber preform, optical fiber preform, and optical fiber
JPH0134938B2 (en)
JP4019252B2 (en) Manufacturing method of glass pipe for optical fiber
JP4204374B2 (en) Manufacturing method of quartz glass jig
JP5130735B2 (en) Method for producing quartz glass molded article and quartz glass molded article
JP4179265B2 (en) Optical fiber preform and manufacturing method thereof
JP2008247740A (en) Optical fiber preform and manufacturing method thereof
JP2003081656A (en) Manufacturing method of photonic crystal fiber
JPH09142863A (en) Production of optical fiber having glass core of low fusing temperature
EP1270522B1 (en) Method for fabricating optical fiber from preforms, using control of the partial pressure of oxygen during preform dehydration
JP2013079177A (en) Glass film and glass roll
JP6822375B2 (en) Manufacturing method of silicon epitaxial wafer
JP2007063094A (en) Quartz tube inner surface processing method, optical fiber preform manufacturing method, and optical fiber manufacturing method
JP3836730B2 (en) Polarization-maintaining photonic crystal fiber and manufacturing method thereof
JP3580640B2 (en) Manufacturing method of dispersion-shifted optical fiber preform
JPS6144820B2 (en)
US6757473B2 (en) Optical fiber and planar waveguide for achieving a substantially uniform optical attenuation
JPWO2022004415A5 (en)
JP5384123B2 (en) Rare earth element-doped optical fiber preform manufacturing method
JP3379074B2 (en) Optical fiber manufacturing method
JP4513403B2 (en) Optical fiber preform manufacturing method, optical fiber, and optical fiber manufacturing method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041021

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070613

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070620

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070802

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070829

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070911

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101005

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111005

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121005

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131005

Year of fee payment: 6

LAPS Cancellation because of no payment of annual fees