JP4024239B2 - Pellicle - Google Patents

Description

  The present invention relates to a large pellicle used for preventing foreign matter from adhering to a photomask used in a lithography process when manufacturing a TFT-LCD (thin film transistor-liquid crystal display) or the like.

  Conventionally, in the manufacture of TFT-LCD (Thin Film Transistor-Liquid Crystal Display) or the like, dust prevention means called a pellicle is disposed on both sides of a photomask to prevent foreign matter from adhering to the photomask. The pellicle is a pellicle made of a transparent polymer film such as nitrocellulose or a cellulose derivative or a fluoropolymer having a thickness of about 10 μm or less on one edge surface of a frame of about several millimeters thick having a shape matched to the shape of a photomask. A film is attached, and the other edge surface of the frame is attached to the surface of the photomask via an adhesive material.

  When foreign matter adheres to the surface of the photomask, the foreign matter forms an image on a photoresist formed on a TFT-LCD (thin film transistor-liquid crystal display) mother glass, causing a circuit pattern defect. Therefore, when pellicles are arranged on both sides of the photomask, the foreign matter adhering to the surface of the pellicle is defective in the circuit pattern without forming an image on the photoresist formed on the TFT-LCD mother glass due to the shift of the focus position. Can be prevented.

  In recent years, with the widespread use of various types of multimedia, a large pellicle applicable to a large photomask used in the photolithography process of a large color TFT-LCD capable of high-quality and high-definition display has been demanded.

  As a frame of a large pellicle applicable to a large photomask used in a photolithography process such as a large TFT-LCD, a rectangular shape having a long side and a short side is generally used. The frame width of the pellicle is designed to be as thin as possible for the following reasons. Quartz glass as a mask material is expensive and is required to have as small an area as possible, so that the pellicle must also have a small outer shape. In addition, it is desired that the inner diameter of the pellicle is large in order to ensure an effective exposure area of a large mask.

  When a pellicle film is affixed to this thin frame, there is a problem that the long side of the frame tends to bend easily due to the tension of the pellicle film, and the effective exposure area of the photomask becomes small due to this bending. This phenomenon becomes more prominent as the area of the film is increased.

  For this reason, a pair of long sides of the frame body are formed so as to protrude toward the outside of the frame body, and the photomask is controlled by suppressing bending toward the inside of the long side frame body due to the tension of the large pellicle film. A large pellicle (see, for example, Patent Document 1) that secures an effective exposure area such as the above is known.

JP 2001-42507 A

  However, in the above-mentioned Patent Document 1, as shown in FIG. 5A, by attaching a pellicle film to a frame protruding outside the large pellicle 51, as shown in FIG. Is almost straight, but has a slightly convex shape. In this state, when the frame is set on the jig 50 and wrinkles P are generated on the pellicle film, it is possible to sufficiently inspect the occurrence of wrinkles P when inspecting whether or not foreign matter has adhered to the pellicle film. Can not. Further, if the pellicle film is attached to a photomask or the like with wrinkles P generated, the exposure optical path may be bent when the TFT pattern or the like is exposed.

  The problem of the occurrence of the wrinkles P becomes more prominent when the size of the pellicle increases and the weight of the pellicle increases or the length of the side increases.

The present invention solves the above-mentioned problems, and an object of the present invention is to provide a large pellicle film when a large pellicle film having an area of 1,000 cm ² or more pasted on a frame is pasted on a photomask. Therefore, it is an object of the present invention to provide a pellicle that prevents the generation of wrinkles and suppresses the reduction of the effective exposure area of the pellicle film.

In order to achieve the above object, the first configuration of the pellicle according to the present invention includes a pellicle film (2) having an area of 1,000 cm ² or more when viewed in the thickness direction of the pellicle film (2), and a pellicle on the pellicle film A pellicle having a frame (1) in which the film (2) is stretched with a tensile stress, and the frame (1) is one direction as viewed in the thickness direction of the pellicle film (2). In the other direction perpendicular to the one direction when viewed in the thickness direction of the pellicle film (2) A pair of outer peripheral edges, and before extending the pellicle film (2) on the frame (1) , at least one outer peripheral edge of the two relatively long outer peripheral edges protrudes outward in advance. Both ends of the relatively long outer peripheral edge A virtual straight line I formation in a straight line first and second locations is, the a first point located between the second point, a third point located on the relatively long outer peripheral edge on relationship with the said by tensioning the pellicle membrane (2) with a tensile stress to the frame (1) on the relatively long outer peripheral edge is the virtual straight line the third point is across the imaginary straight line characterized Rukoto such is deformed to concave at the inside than.

The second configuration of the pellicle according to the present invention, in the first configuration, the deformation, characterized in that the name is in any of the relatively long two outer peripheral edge.

The third configuration of the pellicle according to the present invention is such that, in the first and second configurations, at least one outer peripheral edge of the two relatively short outer peripheral edges is convex outward in advance. Between the second virtual straight line that is curved and connects the first point and the fourth point, which are both ends of the relatively short outer peripheral edge, with the straight line, the first point, and the fourth point position is, the relationship between the fifth point located at the relatively short outer peripheral edge on the, by tensioning the pellicle membrane (2) with a tensile stress on the frame (1), the fifth point is the second the relatively short outer peripheral edge across a virtual straight line is characterized deformed by such Rukoto so that concave inside than the virtual straight line.

The fourth structure of the pellicle according to the present invention, in the third configuration, the deformation, characterized in that the name is in any of the relatively short two outer peripheral edge.

Further, the fifth configuration of the pellicle according to the present invention is such that a pellicle film (2) having an area of 1,000 cm ² or more when viewed in the thickness direction of the pellicle film (2), and a pellicle film (2) thereon A pellicle having a frame (1) stretched with a tensile stress, wherein the frame (1) is relatively opposed to each other in one direction when viewed in the thickness direction of the pellicle film (2). short and two of the outer peripheral edge pairs, wherein when viewed in the thickness direction of the pellicle membrane (2), in another direction perpendicular to said one direction, and a relatively long two outer peripheral edge of the pair facing each other And before stretching the pellicle film (2) on the frame (1) , at least one outer peripheral edge of the two relatively short outer peripheral edges is curved in advance to be convex outward. The first point and the second point that are both ends of the outer peripheral edge are straight lines A virtual straight line I binding in, said first point located between the second point, the relationship between the third point located at the relatively short outer peripheral edge on the pellicle membrane (2) Is stretched on the frame (1) with a tensile stress, so that the third point crosses the virtual straight line and the relatively short outer peripheral edge is recessed inside the virtual straight line. and wherein the Rukoto such Te.

The sixth structure of the pellicle according to the present invention, in the configuration of the fifth, the deformation, characterized in that the name is in any of the relatively short two outer peripheral edge.

Further, a seventh structure of the pellicle according to the present invention, in the configuration of the first to sixth, the I that deform the pellicle membrane (2) that stretched with a tensile stress to the frame (1) on the outer peripheral edge of the central point of the third point between the two ends, or when the fifth point, the length of said third point, or said vertical line when a perpendicular line is drawn from the fifth point for the imaginary straight line Saga 0.2mm or more, and is characterized in der Rukoto below 6 mm.

Further, an eighth structure of the pellicle according to the present invention, in the configuration of the first to sixth, the I that deform the pellicle membrane (2) that stretched with a tensile stress to the frame (1) on the outer peripheral edge of the central point of the third point between the two ends, or when the fifth point, the length of said third point, or said vertical line when a perpendicular line is drawn from the fifth point for the imaginary straight line Saga 0.2mm or more, and is characterized in der Rukoto below 3 mm.

The ninth configuration of the pellicle according to the present invention is such that a pellicle film (2) having an area of 1,000 cm ² or more as viewed in the thickness direction of the pellicle film (2), and a pellicle film (2) thereon A pellicle having a frame (1) stretched with a tensile stress, wherein the frame (1) is relatively opposed to each other in one direction when viewed in the thickness direction of the pellicle film (2). A pair of two short beams (1b) on which a peripheral portion of the pellicle film (2) is fixed and a pair of relatively short beams (1b), and a thickness of the pellicle film (2) When viewed in the vertical direction, it is a pair of two relatively long beams (1a) facing each other in another direction perpendicular to the one direction, on which the periphery of the pellicle film (2) is fixed. And a pair of two relatively long beams (1a), the pellicle membrane (2) Before the frame (1) is stretched , at least one beam (1a) of the two relatively long beams (1a) is curved in advance to be convex outward, and the beam ( a virtual straight line connecting the first point and the second point is the opposite ends of the neutral axis of the width direction of 1a), the width direction of and the beam between said second point and said first point (1a) The relationship between the third point located on the neutral axis is that the pellicle film (2) is stretched on the frame (1) with a tensile stress, so that the third point crosses the virtual straight line and the relative point. neutral axis of the long beam (1a) is characterized by deformed by such Rukoto so that concave inside than the virtual straight line.

  Here, the neutral axis is a term used in material mechanics and means a line passing through the centroid.

Further, a tenth structure of the pellicle according to the present invention, in the configuration of the ninth, the deformation, also made in any said relatively long two beams (1a), characterized in Rukoto.

Further, according to an eleventh configuration of the pellicle according to the present invention, in the ninth and tenth configurations, at least one beam (1b) of the two relatively short beams (1b) also protrudes outward in advance. A second virtual straight line connecting the first point and the fourth point, which are both ends on the neutral axis in the width direction of the relatively short beam (1b), with a straight line, The relationship between the first point and the fifth point located between the fourth point and the neutral axis of the relatively short beam (1b) is that the pellicle membrane (2) is attached to the frame ( 1) By tensioning upward with a tensile stress, the neutral point of the relatively short beam (1b) becomes concave inside the imaginary straight line, with the fifth point crossing the second imaginary straight line. wherein the deformed in such Rukoto as.

Further, a twelfth structure of the pellicle according to the present invention, in the configuration of the eleventh, the deformation, also made in any said relatively short two beams (1b), characterized in Rukoto.

Further, the thirteenth configuration of the pellicle according to the present invention includes a pellicle film (2) having an area of 1,000 cm ² or more when viewed in the thickness direction of the pellicle film (2), and a pellicle film (2) on the pellicle film (2). A pellicle having a frame (1) stretched with a tensile stress, wherein the frame (1) is relative to each other in one direction when viewed in the thickness direction of the pellicle film (2). A pair of two relatively short beams (1b) on which a peripheral portion of the pellicle film (2) is fixed, and a pair of the pellicle film (2). A pair of two relatively long beams (1a) facing each other in another direction perpendicular to the one direction when viewed in the thickness direction, on which the peripheral portion of the pellicle film (2) is A pair of two relatively long beams (1a) to be fixed, and the pellicle membrane ( Before extending 2) onto the frame (1) , at least one beam (1b) of the two relatively short beams (1b) is curved in advance to be convex outwardly, a virtual straight line connecting the first point and the second point is the opposite ends of the neutral axis of the width direction of the relatively short beams (1b), and the relative between said second location and said first location In relation to the third point located on the neutral axis in the width direction of the short beam (1b), the third pellicle film (2) is stretched on the frame (1) with a tensile stress . point is the shorter the across the virtual straight line relatively beams (1b) is characterized deformed by such Rukoto so that concave inside than the virtual straight line.

Further, a fourteenth structure of the pellicle according to the present invention, in the configuration of the thirteenth, the deformation, also made in any said relatively short two beams (1b), characterized in Rukoto.

According to the first configuration of the pellicle of the present invention, before the pellicle film is stretched on the frame , at least one outer peripheral edge of the relatively long outer peripheral edges is curved in advance so as to protrude outward. and is a virtual straight line I formation in a straight line first and second locations is the relatively long outer peripheral edge of the end portions, said first point located between said second point, relationship between the third point located on the relatively long outer peripheral edge on the, by tensioning the pellicle membrane (2) with a tensile stress to the frame (1) on, said third point is the imaginary straight line the relatively long outer peripheral edge is deformed to a concave shape in the inner side than the virtual straight line across the a Runode, be set on the jig at least one relatively long two outer peripheral edge pellicle Wrinkles are prevented from occurring in the film.

According to a second configuration of the pellicle according to the present invention, the deformation, the if the name is either relatively long two outer peripheral edge, a relatively long two outer peripheral edge of either the on jig Even if set to, wrinkles are prevented from occurring in the pellicle film.

According to the third configuration of the pellicle according to the present invention, before the pellicle film is stretched on the frame , at least one outer peripheral edge of the two relatively short outer peripheral edges is projected outward in advance. A second virtual straight line connecting the first point and the fourth point, which are both ends of the relatively short outer peripheral edge, with a straight line, and between the first point and the fourth point located in the relationship between the fifth point located at the relatively short outer peripheral edge on the, by tensioning the pellicle membrane (2) with a tensile stress on the frame (1), the fifth point jig but the second of the relatively short outer peripheral edge across a virtual straight line such is deformed to concave inside than the virtual straight line Runode, at least one of the relatively short two outer peripheral edge Even when set on the top, wrinkles are prevented from occurring on the pellicle film.

According to a fourth aspect of the pellicle according to the present invention, the deformation, the if the name is either a relatively short two outer peripheral edge, relatively short two outer peripheral edge of either the on jig Even if set to, wrinkles are prevented from occurring in the pellicle film.

According to the fifth configuration of the pellicle of the present invention, before the pellicle film is stretched on the frame , at least one outer peripheral edge of the two relatively short outer peripheral edges is curved in advance so as to protrude outward. and is a virtual straight line I formation do a straight line first and second locations are two ends of the outer peripheral edge, said first point located between the second point, the relatively relationship between the third point which is located a short outer peripheral edge on the said by tensioning the pellicle membrane (2) with a tensile stress to the frame (1) on, said third point is across the imaginary straight line relatively short outer peripheral edge is such is deformed to concave inside than the virtual straight line Runode, wrinkles at least one of the two outer peripheral edge has a relatively short in pellicle film be set on the jig Is prevented from occurring.

According to the sixth structure of the pellicle according to the present invention, the deformation, since the name of either the relatively short two outer peripheral edge, relatively not short of the two outer peripheral edge at least one of the jig Even if set to, wrinkles are prevented from occurring in the pellicle film.

Seventh pellicle according to the present invention, according to the configuration of the eighth, the by that deformation in tensioning the pellicle membrane (2) with a tensile stress to the frame (1) on, between the peripheral edge at both ends central point of the third point, or when the fifth point, said third point, or the length of said vertical lines when a perpendicular line is drawn from the fifth point for the imaginary straight line 0.2mm or more, and if Ru der 6 mm (or 3mm) or less, achieved that in the third point or region of the fifth point vicinity, while applying an appropriate tensile stress in the pellicle membrane and minimum inhibiting reduction of the effective exposure area of the pellicle Is done.

  As described above, the large pellicle according to the present invention does not protrude outward because the central portion of the long side of the frame body is recessed inward from the end portion of the long side. For this reason, for example, even if the long side end portion is fixed and the frame body is pressed, the long side center portion does not bend. Thus, wrinkles can be prevented from occurring on the pellicle film by preventing the frame from bending.

  In addition to the above effect, by suppressing the amount of depression to 6 mm or less, it is possible to minimize the problem that the effective exposure area of the photomask becomes small.

According to the ninth configuration of the pellicle of the present invention, before the pellicle film (2) is stretched on the frame (1), at least one beam (1a) of the two relatively long beams (1a) is formed. ) Is curved so as to be convex outward in advance, and a virtual straight line connecting the first point and the second point which are both ends of the neutral axis in the width direction of the beam (1a), and the first point wherein and the relationship between the third point located on the width direction of the neutral axis of the beam (1a) (line passing through the centroid a term used in mechanics of materials) that between the second point is, the pellicle and by tensioning film (2) with a tensile stress to the frame (1) on, the neutral axis is the imaginary straight line of the third point is the longer the across the virtual straight line relatively beams (1a) the deformed by such Rukoto so that concave inside, the pellicle film when spanned with a tensile stress on the frame, Also in the near region with three locations, points, it is possible to give sufficient tensile stress to the pellicle membrane, stability support is achieved for the pellicle film.

According to the tenth structure of the pellicle according to the present invention, the deformation, if any to also lack of the relatively long two beams (1a), any relatively long two beams jig Even when set on the top, wrinkles are prevented from occurring on the pellicle film.

According to the eleventh configuration of the pellicle of the present invention, at least one of the two relatively short beams (1b) (1b) is also curved in advance to be convex outwardly, A second virtual straight line connecting the first point and the fourth point, which are both ends on the neutral axis in the width direction of the relatively short beam (1b), with the straight line, the first point, and the fourth point, located between the relationship between the fifth point located on the neutral axis of the relatively short beam (1b) is, put the pellicle membrane (2) with a tensile stress on the frame (1) it allows the fifth point is the second such neutral axis of the virtual straight line across and the relatively short beam (1b) is deformed so as to be concave on the inside than the virtual straight line Runode, relative To prevent the pellicle film from wrinkling even if at least one of the two short beams is set on the jig. It is.

According to the twelfth structure of the pellicle according to the present invention, the deformation, the if Ru been made in any of the relatively short two beams (1b), even in the near area with the fifth land point, pellicle A sufficient tensile stress can be applied to the membrane, and a more stable support of the pellicle membrane is achieved.

According to the thirteenth configuration of the pellicle according to the present invention, before the pellicle film is stretched on the frame , at least one beam (1b) of the two relatively short beams (1b) is projected outward in advance. and it is curved so that a virtual straight line connecting the first and second location which is both end portions in the width direction of the neutral axis of the relatively short beams (1b), the said first point first and the relationship between the third point located at the relatively short beam (1b) the width direction of the neutral axis on between the point-to-point is, tensile stress of the pellicle membrane (2) to the frame (1) on the by tensioning with, if the third point is the the relatively short beam across a virtual straight line (1b) is ing is deformed to concave inside than the virtual straight line, the third even in the near of the area with ground point, it is possible to give sufficient tensile stress to the pellicle film, a pellicle film Stable support is achieved.

According to the fourteenth structure of the pellicle according to the present invention, the deformation, the if all the Ru also made of relatively short two beams (1b), even in a region of the near-dated third ground point, pellicle A sufficient tensile stress can be applied to the membrane, and a more stable support of the pellicle membrane is achieved.

  The best mode for carrying out the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing the structure of a large pellicle frame, FIG. 2 (a) is a plan view showing the structure of the large pellicle frame, and FIG. 2 (b) shows a pellicle film on the large pellicle frame. FIG. 3 is a plan view showing a state in which the long side of the frame for the large pellicle is depressed inwardly, FIG. 3 is a diagram showing the state when the large pellicle is held by a jig, and FIG. 4 is a pellicle film stretched on the frame It is a table | surface which shows the change value of the dimension of the frame for large pellicles shown in FIG. 2 before and after a pellicle film was stuck to the frame.

1 and 2, reference numeral 1 denotes a nitrocellulose having a thickness of 10 μm or less, a cellulose derivative, or an amorphous fluoropolymer (for example, Cytop (trade name) manufactured by Asahi Glass Co., Ltd. or Teflon AF ( registered trademark ) manufactured by DuPont Co., Ltd.). ; Aluminum) and its alloys, or iron and iron alloys that support a large pellicle film (hereinafter simply referred to as “pellicle film”) 2 composed of a transparent polymer film such as a trade name) A large pellicle frame (hereinafter simply referred to as “frame”).

  The frame 1 has two relatively long outer peripheral edges facing each other in one direction (left and right direction in FIG. 2B) when viewed in the thickness direction of the pellicle film 2 (paper surface direction in FIG. 2B). A pair of long sides 1a made of beams and a direction perpendicular to the one direction (left and right direction in FIG. 2B) when viewed in the thickness direction of the pellicle film 2 (the paper surface direction in FIG. 2B) In one direction (vertical direction in FIG. 2B), there are two relatively short outer peripheral edges facing each other and a pair of short sides 1b made of a beam, and the long side 1a and the short side 1b are predetermined. And a predetermined height dimension equal to each other. On one surface of the long side 1a and the short side 1b of the frame 1, there are formed bonding surfaces 1a1, 1b1 that are flat surfaces over the entire frame 1, and for bonding the pellicle film 2. ing.

The area of the frame body 1 after the pellicle film 2 is pasted is configured to have an area of 1,000 cm ² or more when viewed in the thickness direction of the pellicle film 2, and the pair of long sides 1 a of the frame body 1 is a frame body. 1 is formed so as to protrude outward. In the present embodiment, the pair of long sides 1a of the frame body 1 has a predetermined curvature and protrudes in a curved manner toward the outside, but is projected in an elliptical shape, a parabolic shape, or other various shapes. May be.

  Moreover, as other embodiment which is not shown in figure, a pair of short sides 1b may have a predetermined curvature and bend and protrude outward, or a pair of long sides 1a and a pair of short sides 1b. All four sides may have a predetermined curvature and bend and project outward. Further, one long side 1a or one short side 1b may have a predetermined curvature and bend and protrude outward, or the long side 1a and the short side 1b may be appropriately combined with various combinations thereof. Alternatively, the projection may be curved and protruded outward with a predetermined curvature.

Thus, since the area where the pellicle film 2 is pasted is 1,000 cm ² or more, it can be applied to a large photomask or reticle used in a photolithography process of a large TFT-LCD (Thin Film Transistor-Liquid Crystal Display). It can be used as a large pellicle.

  As shown in FIG. 2B, an adhesive is applied to the sticking surfaces 1a1 and 1b1 of the long side 1a and the short side 1b of the frame 1, and the peripheral part of the pellicle film 2 is accompanied by a predetermined tensile stress. Affixed and fixed.

Before the pellicle film 2 is stretched on the frame 1, as shown in FIG. 2 (a), the long side 1a is curved, and the first point (for example, A virtual straight line (not shown) that connects the second point (for example, the right end of the long side 1a) and a second point (for example, the long side 1a) between the first point and the second point is connected to the second point (for example, the long end 1a). respect of the intermediate portion or the neutral axis), the long side 1a of relatively a long two outer peripheral edge the beam inner side has passed the curved long sides 1a, as shown in FIG. 2 (b) By stretching the pellicle film 2 on the frame body 1 with a tensile stress, the first point (for example, the left end portion of the long side 1a) and the second point (for example, the long side 1a) are viewed in the thickness direction of the pellicle film 2. A virtual straight line (not shown) connecting the right end of the third point between the first point and the second point (for example, the middle part of the long side 1a or neutral) ) Relative to, is deformed so as to pass through the outer side of the curved long sides 1a.

As another embodiment (not shown), the same applies to a case where the short side 1b has a predetermined curvature and protrudes outward, and the short side 1b is bent to be seen in the thickness direction of the pellicle film 2. A virtual straight line (not shown) connecting the first point (for example, the upper end portion of the short side 1b) and the second point (for example, the lower end portion of the short side 1b) above the lever is located between the first point and the second point. the third point (e.g., an intermediate portion or a neutral axis of the short sides 1b) with respect to a short side 1b which the outer peripheral edge at a by beams relatively short two which has passed through the inner side of the short side 1b which is curved, By stretching the pellicle film 2 on the frame 1 with a tensile stress, the first point (for example, the upper end of the short side 1b) and the second point (for example, the short side 1b) are viewed in the thickness direction of the pellicle film 2. A virtual straight line (not shown) connecting the lower end) is a third point (for example, short side 1b) between the first point and the second point. The intermediate portion or the neutral axis), is deformed so as to pass through the outer side of the short sides 1b curved.

  Although the tension of the pellicle film 2 attached to the attachment surfaces 1a1 and 1b1 of the frame body 1 acts uniformly on the entire circumference of the frame body 1, the sectional shape is not necessarily equal over the entire circumference, but the sectional shape Are equal, the longer the side, the greater the deflection.

  For this reason, as shown in FIG. 2 (b), the long side 1 a particularly acts so as to generate a large deflection toward the inside of the frame 1, and the pellicle film 2 is stretched and adhered to the frame 1. After that, the opposing long sides 1a of the frame 1 are both recessed inward. In order to attach the pellicle film 2 to the frame body 1, the pellicle film 2 may be attached to the frame body 1 while maintaining the tension of the pellicle film 2, or the tension of the pellicle film 2 is set to a predetermined tension using a jig 3 or the like. You may affix on the frame 1 after controlling.

  In the present embodiment, by forming the pair of long sides 1a of the frame body 1 so as to protrude toward the outside of the frame body 1, bending of the long side 1a toward the inside of the frame body 1 is suppressed. Therefore, it is possible to secure an effective exposure region such as a photomask or a reticle (not shown) to which a large pellicle is attached.

  Here, in the present embodiment, when the pellicle film 2 is stuck to the frame body 1 with a predetermined tensile stress, the two outer peripheral edges are relatively long when viewed in the thickness direction of the pellicle film 2. A virtual straight line (not shown) that connects both end points of the long side 1a made of a beam has a long side at the center of the long side 1a in a direction perpendicular to the virtual straight line connecting the two end points with respect to the central point between the two end points. It is formed so as to be recessed away from the end portion of 1a by a recess amount d. Here, the depression amount d is preferably 0.2 mm or more and 6 mm or less, and more preferably the depression amount d is 0.2 mm or more and 3 mm or less. Thus, a part of the long side 1a does not protrude in a state where the pellicle film 2 is attached.

  For this reason, as shown in FIG. 3, when the edge part of the frame 1 is set to the jig 3, and it presses with a mounter, the part which the jig 3 protrudes is not pressed. As a result, unnecessary force is not applied to the pellicle film 2 stretched on the frame 1, and there is no fear of wrinkles.

  Further, by setting the depression amount d to 3 mm or less, in addition to the above-described action, the problem that the effective exposure area of the photomask is reduced by bending the long side 1a of the frame 1 is minimized. it can.

  Below, one Example of the frame 1 formed based on the said embodiment is described. The amount d of depressions is roughly determined by the following equation (1). Here, d: dent amount, ω: tension, L: length of the long side 1a, E: elastic modulus, h: height of the frame 1, and b: width of the frame 1.

In this example, L = 777.7 mm, E = 70560 × 10 ⁶ Pa (7200 kgf / mm ² ), h = 4.3 mm, b = 9 mm, ω = 2.9 × 10 ⁻² MPa / mm (3 × 10 ⁻³ kgf / mm) As a result, d = 1.5 mm was obtained.

  In this embodiment, the dent amount d is set to 1.5 mm, but other numerical values may be changed as long as the dent amount d is 3 mm (or 6 mm) or less.

  4 shows dimensions of the large pellicle frame body 1 shown in FIGS. 2A and 2B before the pellicle film 2 is applied to the frame body 1 and after the pellicle film 2 is attached to the frame body 1. FIG. Is the width of the short side 1b side beam, W is the width of the long side 1a side beam, V is the outer edge length of the short side 1b side beam at the longitudinal center of the short side 1b side beam. X is the outer edge length of the long side 1a beam at the longitudinal center of the long side 1a beam, Y is the longitudinal length of the short side 1b beam, and Z is the longitudinal length of the long side 1a beam. Indicates.

  As an application example of the present invention, it is used as a large pellicle, that is, a pellicle for mounting on a larger photomask.

It is a perspective view which shows the structure of the frame for large pellicles. (A) is a plan view showing a state of a large pellicle frame body before the pellicle film is stretched, and (b) is a diagram showing that the long side of the large pellicle frame body is bonded to the large pellicle frame body. It is a top view which shows the state hollowed inside. It is a figure which shows a state when holding a large pellicle with a jig. It is a table | surface which shows the change value of the dimension of the frame for large pellicles shown in FIG. 2 before sticking a pellicle film | membrane on a frame, and after a pellicle film was affixed on a frame. It is a top view which shows the structure of the conventional large pellicle.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Frame 1a ... Long side 1a1 ... Adhering surface 1b ... Short side 1b1 ... Adhering surface 2 ... Pellicle film 3 ... Jig

Claims (14)

A pellicle film (2) having an area of 1,000 cm ² or more when viewed in the thickness direction of the pellicle film (2), and a frame (1) on which the pellicle film (2) is stretched with a tensile stress, A pellicle having
The frame (1) is seen in the thickness direction of the pellicle film (2), and a pair of two relatively short outer peripheral edges facing each other in one direction, and in the thickness direction of the pellicle film (2). Seeing, in another direction perpendicular to the one direction, two relatively long pairs of outer peripheral edges facing each other, and
Before stretching the pellicle film (2) on the frame (1) , at least one outer peripheral edge of the two relatively long outer peripheral edges is curved so as to be convex outward in advance, a virtual straight line I formation do at the first location and the straight line a second location which is a relatively long outer peripheral edge of the end portions, said first point located between the second point, a long the relatively The relationship with the third point located on the outer peripheral edge is that the pellicle film (2) is stretched on the frame (1) with a tensile stress, so that the third point crosses the virtual straight line and the relative point. pellicle is to long outer peripheral edge and said Rukoto such is deformed to concave inside than the virtual straight line. The pellicle according to claim 1 variant according to claim 1, also made in any of the relatively long two outer peripheral edge, characterized in Rukoto. Further, at least one outer peripheral edge of the two relatively short outer peripheral edges is curved in advance so as to protrude outward, and the first point and the fourth point are both ends of the relatively short outer peripheral edge. Between the second virtual straight line connecting the two straight lines, the first point, and the fifth point located between the first point and the fourth point, and located on the relatively short outer peripheral edge. By stretching the membrane (2) on the frame (1) with a tensile stress, the fifth short point crosses the second imaginary straight line and the relatively short outer peripheral edge is inside the imaginary straight line. the pellicle according to claim 1 or claim 2, wherein a modified in such Rukoto so that concave. The pellicle according to claim 3 variant according to claim 3, also made in any of the relatively short two outer peripheral edge, characterized in Rukoto. A pellicle film (2) having an area of 1,000 cm ² or more when viewed in the thickness direction of the pellicle film (2), and a frame (1) on which the pellicle film (2) is stretched with a tensile stress, A pellicle having
The frame (1) is seen in the thickness direction of the pellicle film (2), and a pair of two relatively short outer peripheral edges facing each other in one direction, and in the thickness direction of the pellicle film (2). Seeing, in another direction perpendicular to the one direction, two relatively long pairs of outer peripheral edges facing each other, and
Before stretching the pellicle film (2) on the frame (1) , at least one outer peripheral edge of the two relatively short outer peripheral edges is curved in advance so as to protrude outwardly, a virtual straight line I formation do at the first location and the straight line a second location which is both end portions of the outer peripheral edge, said first point located between the second point, the relatively short outer peripheral edge on relationship between the third point to position the by tensioning the pellicle membrane (2) with a tensile stress to the frame (1) on the relatively short outer periphery the third point is across the imaginary straight line pellicle edge is characterized by deformed by such Rukoto so that concave inside than the virtual straight line. 6. The pellicle according to claim 5, wherein the deformation according to claim 5 is performed on any of the two relatively short outer peripheral edges . Wherein the pellicle film (2) that due to tensioning with a tensile stress on the frame (1) a modification, the central point of the third point between the peripheral edge at both ends, or when the fifth point, said third point, or of claims 1 to 6 the length of the fifth point said vertical line when a perpendicular line is dropped for the imaginary straight line from the characterized above 0.2 mm, and 6mm below der Rukoto The pellicle according to any one of the above. Wherein the pellicle film (2) that due to tensioning with a tensile stress on the frame (1) a modification, the central point of the third point between the peripheral edge at both ends, or when the fifth point, said third point, or of claims 1 to 6 the length of the fifth point said vertical line when a perpendicular line is dropped for the imaginary straight line from the characterized above 0.2 mm, and 3mm below der Rukoto The pellicle according to any one of the above. A pellicle film (2) having an area of 1,000 cm ² or more when viewed in the thickness direction of the pellicle film (2), and a frame (1) on which the pellicle film (2) is stretched with a tensile stress, A pellicle having
The frame (1) is a pair of two relatively short beams (1b) facing each other in one direction when viewed in the thickness direction of the pellicle film (2), on which the pellicle film (2 ) In the other direction perpendicular to the one direction as viewed in the thickness direction of the pellicle film (2) A pair of two relatively long beams (1a) facing each other, and a pair of two relatively long beams (1a) on which the periphery of the pellicle film (2) is fixed,
Before the pellicle film (2) is stretched on the frame (1 ), at least one of the relatively long beams (1a) is curved in advance so as to be convex outward. and a virtual straight line connecting the first point and the second point is the opposite ends of the neutral axis in the width direction of the beam (1a), and the beam between said second point and said first point ( The relationship with the third point located on the neutral axis in the width direction of 1a) is that the pellicle film (2) is stretched on the frame (1) with a tensile stress, so that the third point becomes the virtual point. pellicle, wherein Rukoto neutral axis such is deformed to concave inside than the virtual straight line of the relatively long beams (1a) across a straight line. The pellicle according to claim 9 deformation of claim 9, also made in any of the relatively long two beams (1a), characterized in Rukoto. Further, at least one beam (1b) of the two relatively short beams (1b) is also curved in advance so as to be convex outward, and the neutral axis in the width direction of the relatively short beam (1b). The relatively short beam (1b) is located between the second virtual straight line connecting the first point and the fourth point, which are the upper ends, and the first point and the fourth point. ) When the relationship between the fifth point and the fifth point located on the neutral axis is that the pellicle film (2) is stretched on the frame (1) with a tensile stress, the fifth point becomes the second virtual straight line. the pellicle according to claim 9 or claim 10 neutral axis and said deformed in such Rukoto so that concave inside than the virtual straight line of the relatively short beam across the (1b). The pellicle according to claim 11 modified according to claim 11, also made in any of the relatively short two beams (1b), characterized in Rukoto. A pellicle film (2) having an area of 1,000 cm ² or more when viewed in the thickness direction of the pellicle film (2), and a frame (1) on which the pellicle film (2) is stretched with a tensile stress, A pellicle having
The frame (1) is a pair of two relatively short beams (1b) facing each other in one direction when viewed in the thickness direction of the pellicle film (2), on which the pellicle film (2 ) In the other direction perpendicular to the one direction as viewed in the thickness direction of the pellicle film (2) A pair of two relatively long beams (1a) facing each other, and a pair of two relatively long beams (1a) on which the periphery of the pellicle film (2) is fixed,
Before the pellicle film (2) is stretched on the frame (1 ), at least one of the two relatively short beams (1b) is curved so as to be convex outward in advance. and has a virtual straight line connecting the first point and the second point is the opposite end portions in the width direction of the neutral axis of relatively short beams (1b), between said second location and said first location And the relationship with the third point located on the neutral axis in the width direction of the relatively short beam (1b) is that the pellicle film (2) is stretched on the frame (1) with a tensile stress. the pellicle third point is the relatively short beam across said imaginary straight line (1b) is characterized deformed by such Rukoto so that concave inside than the virtual straight line. The pellicle according to claim 13 modified according to claim 13, also made in any of the relatively short two beams (1b), characterized in Rukoto.

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