JP4043077B2 - Magnetron sputtering device and magnet unit used therefor - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a magnetron sputtering apparatus for forming a thin film in a vacuum.
[0002]
[Prior art]
In a sputtering apparatus for forming a thin film on a substrate placed opposite to a target, a magnetron sputtering apparatus is often used for the purpose of improving the accuracy of film thickness variation, improving the use efficiency of the target material, and increasing the rate. Yes.
[0003]
The magnetron sputtering apparatus is configured as shown in FIG.
A target 32 and a substrate 33 are arranged facing each other in the sputtering chamber 31, and a magnet unit 34 is arranged on the back side of the target 32. 35 is a backing plate, 36 is a substrate holder, and 37 is a ground shield.
[0004]
Argon gas 39 is introduced into the sputtering chamber 31 through a rare gas introduction valve 38, and the atmosphere in the sputtering chamber 31 is exhausted by being connected to a high vacuum pump unit 41 through a vacuum exhaust valve 40. Reference numeral 42 denotes a high voltage power source.
[0005]
In such a magnetron sputtering apparatus, a high-density plasma region 43 is formed on the surface of the target 32 when power is applied due to the influence of a magnetic field formed by the magnet unit 34 disposed on the back side of the target 32.
[0006]
As described above, the plasma density on the target surface can be increased by receiving the magnetic field of the magnet unit 34, and the sputtering rate is 10 to 30 times faster than the sputtering method without using the magnet unit 34.
[0007]
Further, the shape of the arrangement of the magnet pieces in the magnet unit 34 has become complicated in order to obtain the desired magnetic field distribution. Even if the arrangement of the magnet pieces is determined and the magnet unit is created, the desired magnetic field is obtained. In many cases, a distribution cannot be obtained.
[0008]
At this time, when the magnet piece is bonded to the magnet holder with an adhesive as in the prior art, it is difficult to correct. Therefore, as shown in FIG. 9A, the magnet holder 13 made of non-magnetic material and the yoke 11 made of magnetic material are bonded together, the magnet piece 15 'is inserted into the hole 14a of the magnet holder 13, and the magnet piece 15' is attached to the yoke. 11 and is held by being pressed against the inner peripheral surface of the hole 14a by the magnetic repulsive force between the adjacent magnet piece 15 'and the magnet piece 15'.
[0009]
[Problems to be solved by the invention]
In such a magnet unit 4, when it is necessary to correct the arrangement of the magnet piece 15 ', as shown in FIG. 9B, the magnet 20 on the hand of the magnet piece 15' to be pulled out from the hole 14a. However, the stronger the magnetic force is, and the denser the arrangement of the magnet pieces 15 'is, the more affected the magnetic force of the other magnet pieces 15' around the magnet to be removed. It becomes difficult to align the magnet 20 with the piece 15 ', and the workability of the work of correcting the arrangement of the magnet piece 15' is poor.
[0010]
It is an object of the present invention to provide a magnet unit with good workability for correcting the arrangement of the magnet piece 15 'and a magnetron sputtering apparatus having the magnet unit.
[0011]
[Means for Solving the Problems]
The magnet unit of the present invention is characterized in that an operation rod is inserted from a through hole formed in a yoke so that a magnet piece can be easily taken out from a magnet holder.
[0012]
According to the present invention, it is possible to realize a magnet unit having good workability in the work of correcting the arrangement of the magnet pieces and a magnetron sputtering apparatus having the magnet unit.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
The magnet unit according to claim 1 of the present invention is a magnet unit that is arranged on the back side of at least one of the target and the substrate that are arranged to face each other and acts to increase the plasma density on the target surface. A plurality of magnet pieces, a magnet holder made of a non-magnetic material in which a plurality of first through holes for inserting the magnet pieces are formed in parallel, and the first magnet holder disposed on one side of the magnet holder. A yoke having a second through hole communicating with the one through hole, and the number of the first through holes of the magnet holder is larger than the number of the magnet pieces, and the first through holes Are arranged in a staggered arrangement on a magnet holder.
[0014]
According to a second aspect of the present invention, the magnet unit according to the first aspect is characterized in that a female screw is formed in the second through hole.
A magnet unit according to a third aspect is the magnet unit according to the first or second aspect, wherein at least a part of the through hole in which the magnet piece is not inserted in the first through hole of the magnet holder is made of a nonmagnetic material. A weight is provided.
[0015]
A magnet unit according to a fourth aspect is the magnet unit according to the second aspect, wherein at least a part of the first through hole of the magnet holder into which the magnet piece is not inserted is made of a nonmagnetic material at the end. It is characterized in that a weight is provided on which a male screw that is screwed into a female screw formed in the second through hole of the yoke is formed.
[0016]
A magnetron sputtering apparatus according to a fifth aspect is characterized in that the magnet unit according to any one of the first to fourth aspects is provided.
Hereinafter, embodiments of the present invention will be described with reference to FIGS.
[0017]
(Embodiment 1)
FIG. 5 shows a magnetron sputtering apparatus using the magnet unit 50 of the present invention.
[0018]
A target 32 and a substrate 33 are arranged facing each other in the sputtering chamber 31, and a magnet unit 50 is arranged on the back side of the target 32.
As in FIG. 8, argon gas 39 is introduced into the sputtering chamber 31 through a rare gas introduction valve 38, and the atmosphere of the sputtering chamber 31 is connected to a high vacuum pump unit 41 through a vacuum exhaust valve 40. It is exhausted.
[0019]
The magnet unit 50 is rotationally driven around the axis 53 of the support shaft 52 by a motor 51.
The magnet unit 50 is configured as shown in FIGS.
[0020]
As in the case shown in FIG. 9, the magnet holder 13 has a plurality of first through-holes 14a for inserting the magnet pieces 15 'made of a nonmagnetic material in parallel. Specifically, the magnet holder 13 is made of duralumin, and the first through hole 14a has a diameter of 8 mm and a depth of 24 mm. As shown in FIG. 1, the first through holes 14a are arranged in a staggered pattern on almost the entire surface of the magnet holder 13, and the pitch is 9 mm.
[0021]
The yoke 11 that is joined to one surface of the magnet holder 13 and has the second through hole 11a communicating with the first through hole 14a shields the influence of the magnetic field on the back surface and increases the magnetic field strength on the surface. It is made of iron, a magnetic material. The diameter of the second through hole 11a is smaller than that of the first through hole 14a, and a female screw 11b is formed on the inner peripheral surface of the second through hole 11a.
[0022]
A magnet piece 15 'is inserted into a part of the first through hole 14a of the magnet holder 13 with the polarity shown in FIG. N represents the N pole of the magnet piece 15 ', and S represents the S pole of the magnet piece 15'. The magnet piece 15 'is not inserted into the first through hole 14a where N or S is not marked.
[0023]
Specifically, when the size of the first through hole 14a of the magnet holder 13 is 8 mm in diameter and 24 mm in depth, the magnet piece 15 ′ is approximately 8 mm in diameter and 24 mm in height. The magnet piece 15 'is made of neodymium.
[0024]
As shown in FIG. 4, weights 21 are set in all the through holes in which the magnet pieces 15 ′ are not inserted in the first through holes 14 a of the magnet holder 13. The weight 21 is formed of a non-magnetic material, and a male screw 21a that is screwed into the female screw 11b of the yoke 11 is formed at the lower end. Specifically, the weight 21 is made of brass, and the weight of one of the weights 21 is adjusted to the same weight as one of the magnet pieces 15 '.
[0025]
In this way, by inserting the magnet pieces 15 'into the first through holes 14a of the magnet holder 13 so as to form a predetermined magnetic distribution, the magnet pieces 15' arranged in the holes 14a are adjacent to the adjacent magnet pieces 15 '. They are attracted by the magnetic force between them, and are also attracted by the magnetic force to the yoke 11 at the base of the magnet piece 15 '. Furthermore, since the surface is in contact with the inner wall of the hole 14 by a repulsive force with the magnet piece disposed in the adjacent hole 14, the magnet 15 'does not fall even if the magnet unit 50 is turned upside down.
[0026]
When the work of correcting the arrangement of the magnet piece 15 'occurs, as shown in FIG. 3B, a bolt as an operation rod is inserted from the second through hole 11a formed in the yoke 11, and the magnet holder 13 is inserted. It is easy to take out the magnet piece 15 'from the head.
[0027]
Specifically, when the magnet piece 15 'set in the magnet holder 13 is taken out as shown in FIG. 3A, it is screwed into the female screw 11b of the yoke 11 as shown in FIG. The bolt 22 on which the male screw 22a to be formed is screwed in from the back surface of the yoke 11, the magnet 15 'to be taken out is pushed up and protruded from the surface of the magnet holder 13 rather than the other magnets 15'. As shown in (c), another hand-held magnet 20 is attracted to the magnet 15 'to be removed and pulled out while being attracted by the mutual magnetic force.
[0028]
Thus, as shown in FIG. 3 (b), the magnet piece 15 'to be removed is pushed up above the other magnet pieces 15' in the vicinity, so that the hand-held magnet 20 is aligned. Without being affected by the magnetic force, the magnet 20 can be easily pressed against the target magnet piece 15 ′ to be removed from the magnet holder 13 and pulled up.
[0029]
Therefore, it is easy to correct the arrangement of the magnet pieces 15 ′ in the magnet holder 13.
In addition, by setting the weight 21 on the magnet holder 13, a stable constant speed rotation can be obtained even when the magnet holder 13 is rotated upright as shown in FIG.
[0030]
(Embodiment 2)
FIG. 6 shows (Embodiment 2). The magnet unit 50 is the same as that in the first embodiment.
[0031]
In (Embodiment 1), the magnet unit 50 is provided outside the vacuum sputtering chamber 31 inside, but in this (Embodiment 2), a vacuum in which the target 32 and the substrate 33 are arranged to face each other. A vacuum second chamber 31b is provided adjacent to the first chamber 31a, a magnet unit 50 is disposed in the second chamber 31b, and a drive shaft 52 pulled out from the second chamber 31b is provided. The magnet unit 50 is rotated on the back surface of the target 32 by rotating.
[0032]
In this (Embodiment 2), since the target 32 and the substrate 33 are arranged in the vertical direction and face each other, the magnet unit 50 is rotated in the horizontal direction on the back surface of the target 32, but as shown in FIG. Similarly, when the target 32 and the substrate 33 are arranged in the horizontal direction and face each other and the magnet unit 50 is rotated vertically on the back surface of the target 32, the magnet unit 50 can be rotationally driven in a vacuum chamber.
[0033]
In each of the above embodiments, the weight 21 is set in all the through holes in which the magnet piece 15 'is not set in the first through hole 14 of the magnet holder 13, but the magnet piece 15' is set. Even if the weights 21 are not set in all the through holes that are not, the magnet unit 50 can be configured by setting the weights 21 only in the minimum necessary through holes while observing the rotational balance.
[0034]
In each of the above-described embodiments, it has been described that one magnet piece 15 'is set for each necessary one of the first through holes 14a of the magnet holder 13. However, as shown in FIG. The same applies to 15'a, 15'b, 15'c. Specifically, when the first through hole 14 has a diameter of 8 mm and a depth of 24 mm, the magnet pieces 15 ′ a, 15 ′ b and 15 ′ c are made of neodymium and have a diameter of about 8 mm. The height is 8 mm.
[0035]
In each of the above embodiments, a female screw is formed on the inner peripheral surface of the second through hole 11a formed in the yoke 11, but even if such a female screw is not formed, the second screw is formed. An operating rod can be inserted from the through hole 11a and the magnet piece 15 'can be pushed up from the magnet holder 13.
[0036]
【The invention's effect】
As described above, according to the present invention, the magnet can be pushed up by pushing the operating tool through the through-hole formed in the yoke. Therefore, when pulling out another magnet on hand with the magnet piece to be removed, the magnet Even if the magnetic force of the magnet piece buried in the holder is strong or the magnet pieces are arranged densely, it is affected by the magnetic force of other magnet pieces around the magnet piece to be removed buried in the magnet holder. Without changing, you can easily match the magnet you want to remove with other magnets. Therefore, the magnet can be replaced more easily than before.
[0037]
Further, when a female screw is formed in the through hole formed in the yoke, the magnet piece can be pushed up stably by screwing a bolt into the female screw.
In addition, when a female screw is formed in the through-hole drilled in the yoke, the balance of rotation is facilitated by embedding the male screw of the weight in the through-hole that is not set on the magnet piece of the magnet holder. Even when the magnet holder is set up vertically and rotated, a stable constant speed rotation can be obtained.
[Brief description of the drawings]
FIG. 1 is a plan view of a magnet unit according to (Embodiment 1) of the present invention. FIG. 2 is a sectional side view of the magnet unit according to the embodiment. FIG. 3 is a hole of a magnet holder of the magnet unit according to the embodiment. Fig. 4 is an explanatory diagram for removing a magnet piece held in the magnet. Fig. 4 is an explanatory diagram for attaching a weight to the hole of the magnet holder of the magnet unit of the embodiment. Fig. 5 Adopts the magnet unit of the embodiment. FIG. 6 is a sectional view of a magnetron sputtering apparatus employing a magnet unit according to another embodiment. FIG. 7 is a sectional view of a magnet unit according to another embodiment. FIG. 8 is a conventional magnetron. Cross section of sputtering equipment [Fig. 9] Cross section of conventional magnet holder [Explanation of symbols]
11 Yoke 11a Second through hole 11b Female screw 13 Magnet holder 14a First through hole 15 'Magnet piece 21 Weight 21a Male screw

Claims (5)

A magnet unit that is disposed on the back side of at least one of a target and a substrate that are disposed to face each other and acts to increase the plasma density on the target surface,
A plurality of magnet pieces;
A magnet holder made of a nonmagnetic material in which a plurality of first through holes for inserting the magnet pieces are formed in parallel;
A yoke disposed on one side of the magnet holder and having a second through hole communicating with the first through hole, and the number of the first through holes of the magnet holder is the number of the magnet pieces. A magnet unit in which the first through holes are arranged in a staggered arrangement in a magnet holder, more than the number.   The magnet unit according to claim 1, wherein an internal thread is formed in the second through hole.   3. The magnet unit according to claim 1, wherein a weight made of a nonmagnetic material is provided in at least a part of the through hole in which the magnet piece is not inserted in the first through hole of the magnet holder.   A female screw made of a non-magnetic material and formed at the end of the second through hole of the yoke in at least a part of the through hole in which the magnet piece is not inserted in the first through hole of the magnet holder. The magnet unit according to claim 2, further comprising a weight on which a male screw to be screwed is formed.   A magnetron sputtering apparatus provided with the magnet unit according to claim 1.

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