JP4074971B2 - Tilt-setting rotating laser device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a tilt setting rotary laser device for a laser surveying instrument capable of projecting laser light at an arbitrary tilt angle with respect to a horizontal plane.
[0002]
[Prior art]
Conventionally, for example, there has been a rotating laser device as described in JP-A-6-26861. As shown in FIG. 12, this rotary laser device is configured so that a laser reference surface can be formed by rotating and irradiating laser light, and further, the laser reference surface can be inclined.
[0003]
That is, a laser projector (10) that emits laser light is provided at the approximate center of the casing (5), and a rotation scanning unit (13) is provided on the laser projector (10). The rotation scanning unit (13) is configured to be rotatable in the horizontal direction by a scanning motor (15) via a gear. The rotation scanning unit (13) is provided with a pentaprism (18), which deflects the laser beam emitted on the rotation axis of the rotation scanning unit (13) by 90 degrees to form a laser reference plane. It is supposed to do.
[0004]
The laser projector (10) and the rotation scanning unit (13) are configured to be tiltable in two orthogonal directions, and the laser projector (10) includes a first tilt sensor for detecting tilt in two directions. (20) and second (21) are provided. In addition, the 1st inclination sensor (20) and the 2nd inclination sensor (21) are arrange | positioned so that it may orthogonally cross.
[0005]
Further, the laser projector (10) is provided with a first setting inclination sensor (65) and a second setting inclination sensor (66) configured to be tiltable. In addition, the inclination directions of the first setting inclination sensor (65) and the second setting inclination sensor (66) are two orthogonal directions of the first inclination sensor (20) and the second inclination sensor (21). Are inclined with reference to the positions of the first setting inclination sensor (65) and the second setting inclination sensor (66).
[0006]
The first setting inclination sensor (65) and the second setting inclination sensor (66) are provided on the base plate, and the first arbitrary angle setting section (52) and the second arbitrary angle are provided. An arbitrary angle can be set by a setting unit (53) (both not shown).
[0007]
The first arbitrary angle setting section (52) and the second arbitrary angle setting section (53) are connected to a first tilt motor (58) and a twenty-first tilt motor (59) (both not shown) via gears. ).
[0008]
In the casing (5), the laser projector (10) and the rotation scanning unit (13) are connected to 2 so that the directions of the first tilt sensor (20) and the second tilt sensor (21) are orthogonal to each other. A first inclination setting section (35) and a second inclination setting section (36) (both not shown) for inclining in the direction are provided.
[0009]
The first inclination setting section (35) and the second inclination setting section (36) are connected to the first inclination adjustment motor (31) and the second inclination adjustment motor (32) (both not shown) via gears. )).
[0010]
From the laser projector (10), the first arm 25 and the second arm 26 (both not shown) are oriented in a direction orthogonal to the first tilt setting section (35) and the second tilt setting. Engaging the part (36).
[0011]
When the inclination is set, first, the laser reference plane is horizontally aligned to set the reference position. These tilting mechanisms correspond to tilting means.
[0012]
Further, the horizontal setting is detected by output signals of the first tilt sensor (20) and the second tilt sensor (21). At this time, the rotation axis of the rotation scanning unit (13) is vertical, and the first setting inclination sensor (65) and the second setting inclination sensor (66) are in a horizontal state.
[0013]
Next, the first arbitrary angle setting section (52) and the second arbitrary angle setting section (53) are operated based on the inclination angle input from the input means, and the first setting inclination sensor (65) is operated. The second setting tilt sensor (66) is tilted negatively with respect to a predetermined tilt angle.
[0014]
Then, after the first setting tilt sensor (65) and the second setting tilt sensor (66) are tilted negatively, the first tilt is continued until the output signals of these sensors indicate horizontal. A setting part (35) and a 2nd inclination setting part (36) are operated, and a laser projector (10) and a rotation scanning part (13) are inclined. When the output signals of the first setting inclination sensor (65) and the second setting inclination sensor (66) indicate horizontal, the inclination setting work is completed.
[0015]
FIG. 13 is a diagram illustrating a control block for controlling the apparatus.
[0016]
The detection results of the first fixed bubble tube (20) and the first arbitrary angle setting bubble tube (65) are input to the first angle detection circuit (87) via the first switching circuit (85), The detection results of the second fixed bubble tube (21) and the second arbitrary angle setting bubble tube (66) are input to the second angle detection circuit (88) via the second switching circuit (86). The
[0017]
In the first angle detection circuit (87) and the second angle detection circuit (88), the reference angle (91) and the reference angle (92) are set. The reference angle (91) and the reference angle (92) are normally zero.
[0018]
When a signal from the first fixed bubble tube (20) is input to the first angle detection circuit (87) by the first switching circuit (85), the first angle detection circuit (87) The amount of deviation from the reference angle (91) is detected, and the signal of the first angle detection circuit (87) is input to the first motor controller (89), and the first motor controller (89) One level adjustment motor (31) is driven and controlled.
[0019]
When both signals from the first fixed bubble tube (20) and the arbitrary angle setting bubble tube (65) are input to the first angle detection circuit (87) by the first switching circuit (85), The angle detection circuit (87) 1 outputs a signal corresponding to the deviation amount, and this signal is input to the first tilt drive circuit (83). The drive motor (58) is driven and controlled. Further, when a signal from the first arbitrary angle setting bubble tube (65) is input to the first angle detection circuit (87) by the first switching circuit (85), the first angle detection circuit (87). ) Detects the amount of deviation from the reference angle (91), and the signal of the first angle detection circuit (87) is input to the first motor controller (89), and this first motor controller (89) is detected. ) To drive and control the first level adjustment motor (31).
[0020]
The signal of the second angle detection circuit (88) is input to the second motor controller (90), and the second level controller motor (32) is driven by the second motor controller (90). Control. The signal from the second angle detection circuit (88) and the signal from the second arbitrary angle setting device (82) are input to the second inclination driving circuit (84), and the second inclination driving circuit (84). ) Controls the driving of the second drive motor (59).
[0021]
The angle deviation between the first angle detection circuit (87) and the second angle detection circuit (88) is input to the discriminator (93), and the discriminator (93) is connected to the first angle detection circuit ( 87) and the second angle detection circuit (88), the larger one is selected, and an output corresponding to the change in the selected angle deviation is output to the display driver (94) for display. The device driver (94) causes the display (95) to display according to the value of the deviation.
[0022]
In this embodiment, the reference plane formed by the laser beam can be set to be horizontal or an arbitrary angle. First, the leveling operation of the laser surveying instrument that forms the horizontal reference plane will be described.
[0023]
When the main body (4) is installed and is not adjusted, the axis of the laser projector (10) generally does not coincide with the vertical line, and the first fixed bubble tube (20) and the second fixed bubble tube (21). Is not level.
[0024]
The first switching circuit (85) allows the signal from the first fixed bubble tube (20) to be input to the first angle detection circuit (87), and the second switching circuit (86) A signal from the second fixed bubble tube (21) is configured to be input to the second angle detection circuit (88).
[0025]
When the reference angle 91 is 0, an angle deviation signal is output from the first angle detection circuit (87), and when the reference angle 92 is 0, an angle deviation signal is output from the second angle detection circuit (88). Is done. When this angle deviation signal is output, the first motor controller (89) and the second motor controller (90) cause the first level adjustment motor (89) so that this angle deviation signal becomes zero. 31) and the second level adjustment motor (32) are driven in a required direction.
[0026]
[Problems to be solved by the invention]
Since the laser plane formed by the rotating laser device serves as a reference plane, high tilt accuracy is required. The pendulum type tilt detection device can detect tilt angles in a wide range to some extent. However, since there is a movable part of the machine, the frictional resistance is affected and it is very difficult to detect the angle in units of several seconds.
[0027]
Conventionally, an electric bubble tube 10000 shown in FIG. 14 has been used as an element for detecting the inclination of a surveying instrument. The bubble tube 10000 can measure the inclination by enclosing the bubble 5000 therein, forming electrodes 6000 and 7000, and electrically measuring the capacitance.
[0028]
The electric bubble tube 10000 is composed of a hollow glass tube and encloses a liquid and bubbles 5000 inside. Electrodes 6000 and 7000 are formed on the outside of the glass tube, and there are no mechanically movable parts, and the capacitance due to the movement of bubbles is accurately detected.
[0029]
When a highly accurate angle detection is performed with a bubble tube type, it is required that the radius of curvature of the glass tube is large, but there is a problem that a large radius of curvature has a small detection roll and is expensive.
[0030]
Furthermore, the dynamic range for detecting the capacitance is narrow, the detection range is a substantially horizontal range, and there is a problem that a fixed sensor and a setting inclination sensor are required to set the inclination with high accuracy. Furthermore, in the case of two directions, four tilt sensors are required.
[0031]
Furthermore, since the arbitrary angle setting portion has a complicated structure, it has a serious problem of causing a future wear error and a movable error due to friction.
[0032]
[Means for Solving the Problems]
The present invention has been devised in view of the above problems, and includes a laser projector for projecting laser light, and tilting means for tilting the laser projector in at least one direction, and tilt detection means. The tilt detection means includes a light source and a dark field pattern disposed between the light source and the liquid member, and the dark field pattern has X and Y axes orthogonal to each other. A liquid member having parallel arrays at equal intervals, rectangular transmission portions at intersections of the arrays, and a free surface for reflecting light from the light source; and the dark field A split optical system for splitting light that has passed through the pattern and reflected from the free surface of the liquid member in a plurality of directions together with the pattern image, and one light split from the split optical system X direction or Y direction A first optical element for condensing light in a direction parallel to the array, and a second optical element for condensing the other light divided from the divided optical system in a direction different from that of the first optical element A first light receiving element for receiving an image of the pattern condensed by the first optical element, and a first light receiving element for receiving the image of the pattern condensed by the second optical element. Two light receiving elements and an arithmetic processing means for calculating an inclination angle based on light reception signals of the first light receiving element and the second light receiving element, and based on the inclination calculated by the arithmetic processing means, The tilting means is driven to set the tilt of the laser projector.
[0033]
In addition, in the rectangular transmissive portion of the dark field pattern of the present invention, the lengths of the sides parallel to the first direction parallel to the X axis or the direction perpendicular to the second direction parallel to the Y axis are equal for each array. You can also
[0034]
The dark field pattern of the present invention is composed of a transmissive member, is parallel to each of the X axis and Y axis perpendicular to each other, has an equidistant arrangement, and has a rectangular light shielding portion at the intersection of the arrangement. It can also be configured.
[0035]
Furthermore, the first optical element and the second optical element of the present invention are configured as cylindrical lenses arranged so as to collect light transmitted through the pattern image in the X direction or the Y direction. You can also.
[0036]
The pattern of the array of the present invention includes a first pattern modulated in at least a first period in each of the first direction and the second direction, and a second pattern different from the first pattern. It is also possible to have a configuration in which the first pattern and the second pattern are sequentially arranged at an equal pitch.
[0037]
Further, the modulation of the first pattern and the second pattern of the present invention may be configured to be performed by spatial modulation that changes the line width.
[0039]
Moreover, it can replace with the 1st optical element and 2nd optical element of this invention, and the 1st light receiving element and the 2nd light receiving element, and can also be set as the structure which becomes at least 1 area sensor.
[0040]
The first optical element and the second optical element of the present invention may be configured to be a diverging optical element instead of the converging optical element.
[0041]
DETAILED DESCRIPTION OF THE INVENTION
The present invention configured as described above includes a laser projector for projecting a laser beam, and includes a tilting unit for tilting the laser projector in at least one direction, and a tilt detection unit. The tilt detection means includes a light source and a dark field pattern disposed between the light source and the liquid member, and the dark field pattern is parallel to each of the X axis and the Y axis orthogonal to each other, etc. A liquid member having a free surface that reflects the light from the light source, the splitting optical system passes through the dark field pattern, has an array of intervals, has a rectangular transmissive portion at the intersection of the arrays, The light reflected from the free surface of the liquid member is divided into a plurality of directions together with the pattern image, and the first optical element divides one light divided from the division optical system in the X direction or the Y direction of the pattern image. Focus in a direction parallel to the array, The second optical element condenses the other light split from the split optical system in a direction different from that of the first optical element, and the first light receiving element is an image of the pattern condensed by the first optical element. , The second light receiving element receives the image of the pattern collected by the second optical element, and the arithmetic processing means receives the light reception signals from the first light receiving element and the second light receiving element, The tilt angle is calculated, and the tilt of the laser projector can be set by driving the tilting means based on the tilt calculated by the calculation processing means.
[0042]
In addition, in the rectangular transmissive portion of the dark field pattern of the present invention, the lengths of the sides parallel to the first direction parallel to the X axis or the direction perpendicular to the second direction parallel to the Y axis are equal for each array. You can also
[0043]
The dark field pattern of the present invention is composed of a transmissive member, is parallel to each of the X axis and Y axis perpendicular to each other, has an equidistant arrangement, and has a rectangular light shielding portion at the intersection of the arrangement. You can also.
[0044]
Furthermore, the first optical element and the second optical element of the present invention may be a cylindrical lens arranged so as to collect light transmitted through the pattern image in the X direction or the Y direction.
[0045]
The pattern of the arrangement of the present invention includes a first pattern modulated in at least a first period and a second period different from the first pattern in each of the first direction and the second direction. It is also possible to have a modulated second pattern and to sequentially arrange the first pattern and the second pattern at an equal pitch.
[0046]
The modulation of the first pattern and the second pattern of the present invention can be spatial modulation that changes the line width.
[0048]
Further, instead of the first optical element and the second optical element, and the first light receiving element and the second light receiving element of the present invention, at least one area sensor may be used.
[0049]
The first optical element and the second optical element of the present invention may be diverging optical elements instead of condensing optical elements.
[0050]
【Example】
[0051]
Embodiments of the present invention will be described with reference to the drawings.
[0052]
First, the inclination sensor 1000 used for the inclination setting rotation laser apparatus 5000 of the present embodiment will be described. The tilt sensor 1000 corresponds to tilt detection means.
[0053]
FIG. 1 shows an optical configuration of the tilt sensor 1000 of the first embodiment. The light source 100, the condenser lens 200, the dark field pattern 300, the first pattern relay lens 410, and the first half. Mirror 510, liquid member 600 having a free surface, second pattern relay lens 420, second half mirror 520, first cylindrical lens 710, second cylindrical lens 720, and first light receiving The element 810, the second light receiving element 820, and the arithmetic processing means 16 are configured.
[0054]
The light source 100 of the first embodiment is an LED, but any light source can be used.
[0055]
The condenser lens 200 is for collimating the light from the light source 100, and corresponds to the first optical system.
[0056]
The dark field pattern 300 is for forming a pattern image on the first light receiving element 810 and the second light receiving element 820. The dark field pattern 300 corresponds to a pattern.
[0057]
FIG. 2 shows a dark field pattern 300 arranged two-dimensionally according to the first embodiment, and is configured by forming a plurality of transparent pattern portions on a black mask portion. The pattern may be configured so that the mask portion and the transparency are reversed.
[0058]
FIG. 3 is an enlarged view of a plurality of transparent pattern portions of the dark field pattern 300 of the first embodiment, and the pattern portions are arranged in a direction orthogonal to the X-axis direction and the Y-axis direction. . That is, the dark field pattern 300 of the first embodiment is an absolute pattern indicating absolute positions in two axial directions (X-axis direction and Y-axis direction), and is a pattern that crosses the X-axis direction and the Y-axis direction. Yes.
[0059]
Here, the column in the X-axis direction is i (i = 1 to N), the Y-axis row is j (j = 1 to K), and a specific pattern is P _ij (I = 1 to N, j = 1 to K). In the case of FIG. 3, N = 9 and K = 8.
[0060]
Therefore, the first row (J = 1) will be described.
[0061]
In the first row pattern, the first pattern A, the second pattern B, the third pattern C, and the fourth pattern R are repeatedly arranged at equal intervals (p). That is, each block is continuously formed with a set of four types of patterns. The leftmost block is defined as one block, and R, A (1), B (1), C ( 1), R, A (2), B (2), C (2), R, A (3), B (3), C (3) ... Has been placed.
[0062]
That is, P ₁₁ = R, P ₂₁ = A ₁ , P ₃₁ = B ₁ , P ₄₁ = C ₁ , P ₅₁ = R, P ₆₁ = A ₂ , P ₇₁ = B ₂ , P ₈₁ = C ₂ , P ₉₁ = R.
[0063]
Next, the first column (i = 1) will be described.
[0064]
In the first row pattern, the first pattern A, the second pattern B, the third pattern C, and the fourth pattern R are repeatedly arranged at equal intervals (p). That is, each block is continuously formed with four patterns as one set, and the uppermost block is defined as one block, and R, A (1), B (1), C (1), R, A (2), B (2), C (2), R, A (3), B (3), C (3) ... It is arranged repeatedly.
[0065]
That is, P ₁₁ = R, P ₁₂ = A ₁ , P ₁₃ = B ₁ , P ₁₄ = C ₁ , P ₁₅ = R, P ₁₆ = A ₂ , P ₁₇ = B ₂ , P ₁₈ = C ₂ It becomes.
[0066]
The first pattern relay lens 410 guides the light that has passed through the dark field pattern 300 to the first half mirror 510.
[0067]
The first half mirror 510 of the first embodiment is a beam splitter provided with a semi-transmissive surface 511. The light incident on the first half mirror 510 passes through the semi-transmissive surface 511, travels upward, and enters the liquid member 600 having a free surface. The light reflected by the liquid member 600 having a free surface is reflected by the semi-transmissive surface 511 of the first half mirror 510 and travels toward the second pattern relay lens 420.
[0068]
The first half mirror 510 has an inclined surface 512 that is inclined with respect to the reflected light from the light source 100.
[0069]
This is because light incident on the first half mirror 510 from the light source 100 passes through the semi-transmissive surface 511 and travels upward, but there is light that partially reflects the semi-transmissive surface 511. A part of the reflected light is reflected by the end face of the first half mirror 510 and then travels in the opposite direction along the same optical path. The reflected light is again transmitted through the semi-transmissive surface 511 and directed toward the second pattern relay lens 420. End up.
[0070]
The reflected light reflected from the semi-transmissive surface 511 may obstruct inclination detection or cause an error. Therefore, in the first embodiment, the end surface of the first half mirror 510 is configured to be an inclined surface 512 that is inclined with respect to the transmitted light from the light source 100.
[0071]
As a result, the light from the light source 100 reflected by the semi-transmissive surface 511 is reflected again by the inclined surface 512, but the retroreflected light does not travel in the opposite direction on the same optical path, so the second pattern The light does not enter the first light receiving element 810 and the second light receiving element 820 via the relay lens 420, and there is an effect that highly accurate measurement can be performed.
[0072]
The light source 100 and the surface of the liquid member 600 having a free surface for reflecting light from the light source 100 can be arranged in a conjugate relationship.
[0073]
In this case, there is an effect that the reflection area on the surface of the liquid member 600 is minimized, and an error due to the surface tension of the liquid can be minimized. Furthermore, the volume of the liquid member 600 can be reduced.
[0074]
The liquid member 600 having a free surface is filled with a liquid having an appropriate viscosity such as silicon oil. Since the liquid member 600 has a free surface, the surface is always kept horizontal.
[0075]
Furthermore, the liquid member 600 of the present embodiment can be configured integrally with the first half mirror 510.
[0076]
The first half mirror 510 of the present embodiment can also be provided with an antireflection film on the surface in contact with the liquid member 600.
[0077]
In addition, the refractive index of the liquid member 600 of this embodiment and the refractive index of the first half mirror 510 can be set to approximate values.
[0078]
The first half mirror 510 corresponds to a half mirror.
[0079]
The second pattern relay lens 420 forms an image of the light reflected by the liquid member 600 having a free surface and reflected by the first half mirror 510 on the first light receiving element 810 and the second light receiving element 820. Is to do. That is, the second pattern relay lens 420 is for forming an image of the dark field pattern 300 on the first light receiving element 810 and the second light receiving element 820.
[0080]
The second pattern relay lens 420 corresponds to the second optical system, and the focal length f of the second pattern relay lens 420 from the first light receiving element 810 and the second light receiving element 820. It is located at a distance.
[0081]
The second half mirror 520 is for separating the image of the dark field pattern 300 into the first light receiving element 810 and the second light receiving element 820.
[0082]
The first cylindrical lens 710 collects an image of the dark field pattern 300 in the X-axis direction. Note that the first cylindrical lens 710 corresponds to the first optical element.
[0083]
For example, for the first row, P ₁₁ = R, P ₂₁ = A ₁ , P ₃₁ = B ₁ , P ₄₁ = C ₁ , P ₅₁ = R, P ₆₁ = A ₂ , P ₇₁ = B ₂ , P ₈₁ = C ₂ , P ₉₁ = R is condensed as shown in the right corner of FIG.
[0084]
That is, P _i1 (I = 1 to 9) is condensed like the right corner.
[0085]
Therefore, it is possible to collect light in all rows in the X direction.
[0086]
Therefore, “P _i1 Condensation of (i = 1 to 9) is executed from J = 1 to 8 ”.
[0087]
As a result, an absolute pattern indicating the position in the Y direction collected in the X direction at the pitch p is formed like the right corner.
[0088]
The second cylindrical lens 720 collects the image of the dark field pattern 300 in the Y-axis direction. The second cylindrical lens 720 corresponds to the second optical element.
[0089]
Therefore, it is possible to collect light in all rows in the Y direction as in the X direction.
[0090]
In the first embodiment, the first light receiving element 810 and the second light receiving element 820 employ a CCD (charge coupled device) linear sensor.
[0091]
The arithmetic processing means 16 is an arithmetic processing unit including a CPU, which controls the whole and calculates the position of the slit image of the dark field pattern 300 and calculates the corresponding inclination angle.
[0092]
In the first embodiment configured as described above, if the tilt sensor 1000 is tilted, the free surface of the liquid member 600 is kept horizontal, so that the first light receiving element 810 and the second light receiving element 810 are proportional to the tilt angle. The image of the dark field pattern 300 on the light receiving element 820 moves.
[0093]
When the tilt sensor 1000 is tilted at an angle θ, the reflected light from the free surface is tilted by 2nθ, assuming that the refractive index of the liquid member 600 is n, as shown in FIG. When the distance on the linear sensor that is the first light receiving element 810 and the second light receiving element 820 is L,
[0094]
L = f * tan (2nθ) (1)
[0095]
It becomes.
[0096]
Therefore, if the position of the image of the dark field pattern 300 is detected by the first light receiving element 810 and the second light receiving element 820, the distance from the reference position is obtained, and the arithmetic processing means 16 converts it into an inclination angle, The inclination θ of the sensor 1000 can be measured.
[0097]
Next, the tilt angle calculation process of the calculation processing means 16 will be described in detail.
[0098]
With regard to the inclination angle, the distance dL from the position of the detected pattern on the linear sensor may be measured by focusing on the position of the specific pattern.
[0099]
For the distance less than or equal to the pitch interval, the phase difference φ from the reference position with respect to the pitch interval on the linear sensor is calculated by performing Fourier transform of the outputs of the first light receiving element 810 and the second light receiving element 820,
[0100]
φ * p * m / (2π) 2nd formula
[0101]
By obtaining this, it is possible to measure a distance equal to or less than the pitch interval with high accuracy. However, m is a magnification. The total distance can be calculated by combining it with a distance equal to or greater than the pitch interval obtained from the distance of the specific pattern.
[0102]
First, in order to simplify the description, the pattern formed in the dark field pattern 300 will be described in a simplified manner as shown in FIG. In this description, the pattern C is omitted for easy understanding. That is, R, A (0), B (0), R, A (1), B (1), R, A (2), B (2), ... are repeatedly arranged. The case will be described below.
[0103]
In the pattern formed in the dark field pattern 300, as shown in FIG. 5, the first pattern A, the second pattern B, and the third pattern R are repeatedly arranged at equal intervals (p). That is, each block is formed continuously with one set of three types of patterns, and the leftmost block is defined as 0 block, and R (0), A (0), B (0) Are repeatedly arranged as R (1), A (1), B (1), R (2), A (2), B (2),. Since all patterns are repeated at equal intervals p, a signal corresponding to this interval is used as a reference signal.
[0104]
For example, the third pattern R has a black width of 50 μm and a fixed width, and the first pattern A modulates the width of the black portion so that one cycle is 7 blocks, and the second pattern R In B, the width of the black portion is modulated so that one cycle is formed by five blocks.
[0105]
Next, in the first pattern A, the width of the black portion is modulated so as to be one cycle in 7 blocks. Therefore, if the modulation width is set to 20 μm to 80 μm, the width D of the first pattern _A Is given by
[0106]
D _A = 50 + 30 * SIN (2 * π * X / 7) ... 3rd formula
[0107]
It becomes. However, X = (0, 1, 2, 3,...).
[0108]
Similarly, in the second pattern B, the width of the black portion is modulated so that one cycle is formed by 5 blocks, and therefore the width D of the second pattern _B Is given by the following equation.
[0109]
D _B = 50 + 30 * SIN (2 * π * X / 5) ... 4th formula
[0110]
It becomes. However, X = (0, 1, 2, 3,...).
[0111]
Since the first pattern A and the second pattern B are slightly different in period, the same pattern appears at a distance that is the least common multiple of both. In this embodiment, a similar pattern appears in 35 blocks, which is the least common multiple of 7 blocks and 5 blocks.
[0112]
That is, the phase number of the first pattern A in the block including the horizontal position is φ _A (0-6) and the phase number of the second pattern B at the horizontal position is φ _B If (0-4), the position H of the dark field pattern 300 is
[0113]
φ _A And φ _B Block number including each phase number from the combination of
φ _AB Than,
[0114]
H = φ _AB * P * m ... 5th formula
[0115]
It becomes.
[0116]
Next, a method for calculating the position of the dark field pattern 300 will be specifically described.
[0117]
The width of the pattern is determined within the range of the first and second half pitches of the reference signals (signals corresponding to the equally spaced pitch p) from the output signals of the first light receiving element 810 and the second light receiving element 820. Further, if the width of this pattern is thinned out every three (product detection), as shown in FIGS. 6 and 7, a signal 1 corresponding to the first pattern A and a signal 2 corresponding to the second pattern B are obtained. And a signal 3 corresponding to the third pattern R is obtained. However, since the width of the third pattern R is not modulated, and the maximum modulation width of the first pattern A and the second pattern B is 80 μm, the third pattern R has only 50 μm. The width of the signal 3 corresponding to the pattern R is approximately constant, and is about 50% of the value of the signal 1 and the signal 2.
[0118]
And since the 3rd pattern R, the 1st pattern A, and the 2nd pattern B are repeatedly arrange | positioned in the defined order, the thinned-out signal is the 3rd pattern R, It can be determined whether the pattern is the first pattern A or the second pattern B.
[0119]
Next, from A and B signals, one set of signals A and B including the address position (m-th bit) of linear sensors 810 and 820 at the reference position for tilt reading is selected, and the phase numbers of A and B are selected. It is possible to determine at which position the combination of the first pattern A, the second pattern B, and the third pattern R is obtained.
[0120]
Here, the phase number of the A signal is Am, the phase number of the B signal is Bm, and the block number φ including R, A, and B is determined from the combination of the phase numbers of A and B. _AB Can be requested.
[0121]
A pattern including the reference position (the m-th bit) is
[0122]
In case of R pattern ... 3 * p * φ _AB .... Sixth formula
[0123]
In the case of A pattern ... p * (3 * φ _AB +1) ... 7th formula
[0124]
In the case of the B pattern ... p * (3 * φ _AB +2) ... 8th formula
[0125]
Is required. Note that p is a pitch.
[0126]
The position H of the dark field pattern 300 can be obtained by combining the values of the sixth to eighth expressions and the value obtained from the second expression.
[0127]
Note that the position of the dark field pattern 300 can be similarly obtained by using a cylindrical lens that diverges and enlarges the pattern instead of the condensing cylindrical lens.
[0128]
Next, the arithmetic processing means 16 of the present embodiment will be described in detail with reference to FIG.
[0129]
The amplifier 161 amplifies the electric signal from the first light receiving element 810 or the second light receiving element 820 selected by the selector 168, and the sample hold 162 receives the amplified electric signal from the clock driver 165. The sample and hold is performed with a timing signal. The A / D converter 163 is for A / D conversion of the sampled and held electric signal. The RAM 164 is for storing A / D converted digital signals. The microcomputer 166 performs various arithmetic processes.
[0130]
Here, the functions performed by the microcomputer 166 will be described with reference to FIG. 9. The arithmetic processing means 16 includes a reference signal forming unit 1661, a pattern signal forming unit 1662, and a calculating unit 1664. From the electrical signals obtained from the first light receiving element 810 and the second light receiving element 820, a reference signal corresponding to the equally spaced pitch p is formed by fast Fourier transform.
[0131]
The pattern signal forming unit 1662 obtains the width within the range of the first and second half pitches of the reference signal and thins out the pattern width every three (product detection), thereby obtaining the first pattern signal and the second pattern signal. To form.
[0132]
The calculation unit 1664 calculates the block number including the reference position from the phase numbers of the first pattern signal and the second pattern signal, further obtains the position in pitch units, and within the pitch obtained by the fast Fourier transform The position of the dark field pattern 300 is obtained with high accuracy and the amount of movement H of the dark field pattern 300 is obtained.
[0133]
The display unit 167 displays the tilt angle calculated by the calculation unit 1664, and may employ a display unit such as a liquid crystal display, or may be configured to output to an external storage unit or the like.
[0134]
Next, the tilt setting rotary laser device 5000 will be described, but the description of the configuration common to the conventional example will be omitted.
[0135]
As shown in FIG. 10, the tilt setting rotary laser device 5000 has a laser projector 10 that emits laser light at the approximate center of the casing 5, and a rotation scanning unit 13 is provided on the laser projector 10. The rotation scanning unit 13 is configured to be rotatable in the horizontal direction by a scanning motor 15 via a gear. The rotation scanning unit 13 is provided with a pentaprism 18, and the laser beam emitted on the rotation axis of the rotation scanning unit 13 is deflected by 90 degrees to form a laser reference plane. .
[0136]
The laser projector 10 is provided with an inclination sensor 1000, and the two directions detected by the inclination sensor 1000 coincide with two orthogonal directions in which the laser projector 10 and the rotation scanning unit 13 are inclined.
[0137]
The tilt sensor 1000 used in the present invention is a sensor that inherently detects a position error, but it is possible to detect an angle with high accuracy by converting an output value into an angle. This inclination sensor 1000 uses a liquid level reflection detection type for detecting inclination with high accuracy, and a type that projects and detects a code pattern.
[0138]
Furthermore, in this embodiment, the pattern is devised so as to detect the tilt in two directions equally, and the read signal is subjected to Fourier transform (FFT) so that the tilt can be performed with high accuracy regardless of the pattern error to be formed. Can be detected.
[0139]
With these configurations, it is possible to detect in two directions with a high accuracy, a wide dynamic range, and a maximum detection angle of about 10 degrees (22%). In this embodiment, the slope is sufficient for use in civil works such as a drainage slope and a road slope of several percent.
[0140]
By adopting the present tilt sensor 1000 for the tilt setting rotary laser device 5000, the tilt angle can be set directly.
[0141]
Accordingly, the conventional first tilt sensor (20) and second tilt sensor (21), first setting tilt sensor (65), second setting tilt sensor (66), and first arbitrary angle setting. The unit (52), the second arbitrary angle setting unit (53), the first drive motor (58), and the second drive motor (59) can be replaced with one tilt sensor.
[0142]
Next, control by the tilt sensor 1000 will be described with reference to FIG.
[0143]
The output signal detected by the inclination sensor 1000 which is an inclination detection means is processed by the inclination calculation processing unit 2000 to calculate the inclination angle.
[0144]
The control unit 3000 outputs outputs corresponding to the difference between the set tilt angle input from the input unit 3100 and the tilt angle signal from the tilt calculation processing unit 2000 to the first motor control unit 4100 and the second motor control unit 4200. Output. When the first tilt adjustment motor 4300 and the second tilt adjustment motor 4400 are driven and the difference between the output signal from the tilt sensor 1000 and the signal input at the input unit 3100 becomes zero, the laser projector 10 is set to a desired inclination.
[0145]
A display unit 4600 is connected to the display drive unit 4500, and the display unit 4600 displays the input angle or gradient, the current gradient, and the like.
[0146]
There are two actual operations of this control method.
[0147]
One is to set the tilt to the input tilt directly from the current tilt of the tilt setting rotation laser device 5000 and set it to a predetermined tilt, and then rotate the laser projector 10 by irradiating it with laser light. A reference plane is formed.
[0148]
The other is to set the inclination to the input inclination after leveling as in the conventional case.
[0149]
The first motor control unit 4100 corresponds to the first motor control unit (89) of the conventional technique, and the second motor control unit 4200 is the second motor control unit of the conventional technique. This corresponds to (90).
[0150]
The first inclination adjustment motor 4300 corresponds to the first level adjustment motor (31), and the second inclination adjustment motor 4400 corresponds to the second level adjustment motor (32). is there.
[0151]
Further, the inclination calculation processing unit 2000 is the microcomputer 166 of the above embodiment.
The inclination calculation processing unit 2000 and the control unit 3000 can be realized by common hardware.
[0152]
【effect】
The present invention configured as described above includes a laser projector for projecting a laser beam, and includes a tilting unit for tilting the laser projector in at least one direction, and a tilt detection unit. In the laser apparatus, the tilt detection unit includes a light source and a dark field pattern disposed between the light source and the liquid member, and the dark field pattern is parallel to each of the X axis and the Y axis orthogonal to each other. A liquid member having a free surface for reflecting light from the light source, and having a rectangular transmissive portion at the intersection of the array, and passing through the dark field pattern And a splitting optical system for splitting the light reflected from the free surface of the liquid member together with the pattern image in a plurality of directions and one light split from the splitting optical system in the X direction of the pattern image or Y-direction array and flat A first optical element for condensing light in a different direction, a second optical element for condensing the other light divided from the divided optical system in a direction different from the first optical element, A first light receiving element for receiving the image of the pattern condensed by the first optical element, and a second light receiving for receiving the image of the pattern condensed by the second optical element. And an arithmetic processing means for calculating an inclination angle based on the light receiving signals of the first light receiving element and the second light receiving element. Based on the inclination calculated by the arithmetic processing means, the tilting means Since it has the structure which drives and sets the inclination of the said laser projector, there exists an effect that mechanical strength is high and can provide a compact inclination setting rotation laser apparatus.
[0153]
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of a tilt sensor 1000 according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating a dark field pattern 300 according to the present embodiment.
FIG. 3 is a diagram illustrating a dark field pattern 300 according to the present embodiment.
FIG. 4 is a diagram illustrating a fluid member according to the present embodiment.
FIG. 5 is a diagram illustrating the principle of measurement.
FIG. 6 is a diagram illustrating the principle of measurement.
FIG. 7 is a diagram illustrating the principle of measurement.
FIG. 8 is a diagram showing a configuration of arithmetic processing means of the present embodiment.
FIG. 9 is a diagram showing a configuration of arithmetic processing means of the present embodiment.
FIG. 10 is a diagram illustrating a tilt setting rotating laser apparatus 5000 according to the present embodiment.
FIG. 11 is a diagram illustrating an electrical configuration of a tilt setting rotary laser device 5000 according to the present embodiment.
FIG. 12 is a diagram illustrating a conventional technique.
FIG. 13 is a diagram illustrating a conventional technique.
FIG. 14 is a diagram illustrating a conventional technique.
[Explanation of symbols]
1000 Tilt sensor
5,000 Tilt setting rotating laser device
5 Casing
10 Laser projector
13 Rotating scanning unit
15 motor
18 Penta prism
100 light sources
200 condenser lens
300 Dark field pattern
410 First pattern relay lens
420 Second pattern relay lens
510 first half mirror
520 second half mirror
511 translucent surface
512 inclined surface
600 Liquid member having a free surface
710 First cylindrical lens
720 Second cylindrical lens
810 First light receiving element
820 Second light receiving element
16 Arithmetic processing means
166 Microcomputer 1
1661 Reference signal forming section
1662 pattern signal forming section
1664 calculation unit
2000 Inclination processing unit
3000 control unit
3100 Input section
4100 First motor control unit
4200 Second motor control unit
4300 First tilt adjustment motor
4400 Second tilt adjustment motor
4500 Display driver
4600 display

Claims (8)

A rotary laser apparatus including a laser projector for projecting laser light, tilting means for allowing the laser projector to tilt in at least one direction, and tilt detection means, wherein the tilt detection means includes: A dark field pattern disposed between the light source and the light member, the dark field pattern is parallel to each of the X axis and the Y axis orthogonal to each other, and has an equidistant arrangement, It has a rectangular transmission part at the intersection of the array, and has a liquid member having a free surface for reflecting light from the light source, and passes through the dark field pattern and reflects the free surface of the liquid member A splitting optical system for splitting light into a plurality of directions together with a pattern image, and condensing one light split from the splitting optical system in a direction parallel to the X image or Y direction array of the pattern image First to let An optical element, a second optical element for condensing the other light split from the split optical system in a direction different from that of the first optical element, and the light focused by the first optical element A first light receiving element for receiving a pattern image; a second light receiving element for receiving the image of the pattern collected by the second optical element; and And a calculation processing means for calculating an inclination angle based on a light reception signal with the two light receiving elements, and the inclination means is driven to set the inclination of the laser projector based on the inclination calculated by the calculation processing means. A tilt setting rotary laser device characterized by that . 2. The rectangular transmissive portion of the dark field pattern has equal lengths for each array in a direction parallel to a first direction parallel to the X axis or a direction perpendicular to a second direction parallel to the Y axis. The tilt setting rotating laser device described . The pattern of the array has a first pattern modulated in at least a first period and a second period different from the first pattern in each of the first direction and the second direction. The tilt setting rotary laser device according to claim 1, wherein the first pattern and the second pattern are sequentially arranged at an equal pitch . 4. The tilt setting rotating laser apparatus according to claim 3, wherein the modulation of the first pattern and the second pattern is performed by spatial modulation that changes a line width . 5. The method according to claim 1, wherein at least one area sensor is used instead of the first optical element and the second optical element, and the first light receiving element and the second light receiving element. The tilt setting rotating laser device described in 1 . The tilt setting rotation laser device according to any one of claims 1 to 4 , wherein the first optical element and the second optical element are diverging optical elements instead of condensing optical elements . The dark field pattern is made of a transmissive member, has an array of equal intervals parallel to the X axis and the Y axis orthogonal to each other, and has a rectangular light shielding portion at the intersection of the array. Item 7. The tilt setting rotation laser device according to any one of Items 1 to 6 . The first optical element and the second optical element are cylindrical lenses arranged so as to collect light transmitted through the pattern image in the X direction or the Y direction. The tilt setting rotating laser device according to any one of the above .

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