JP4092859B2 - Cleaning device for single crystal pulling device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention cleans a single crystal pulling apparatus that cleans the inside of a single crystal pulling apparatus that pulls up a semiconductor single crystal such as a silicon single crystal from a semiconductor melt in a crucible using a CZ method (Czochralski method). Relates to the device.
[0002]
[Prior art]
In general, a single crystal pulling apparatus using a CZ method is known as one of means for growing a semiconductor single crystal such as silicon (Si) or gallium arsenide (GaAs).
In order to perform pulling growth in this single crystal pulling apparatus, as shown in FIG. 8, first, a semiconductor melt L is put in a quartz crucible 3 disposed on a carbon susceptor 2 inside a chamber 1 which is a sealed container. The semiconductor melt L is stored and heated to a predetermined temperature by a cylindrical carbon heater 4 disposed around the quartz crucible 3.
[0003]
Next, a semiconductor single crystal C is extracted from the semiconductor melt L in the crucible 3 disposed below the vertical cylinder 1a by a wire W such as W (tungsten) suspended in the vertical cylinder 1a above the chamber 1. Pull up.
In FIG. 8, reference numeral 5 denotes a heat insulating cylinder, 6 denotes a carbon plate provided as a support plate on the inner surface of the heat insulating cylinder 5, 7 denotes a flow pipe, and 8 denotes an annular upper ring 8 that supports the flow pipe 7. , 9 is a shaft which supports the susceptor 2 and can move up and down.
[0004]
By the way, in this single crystal pulling device, a wire W winding device (not shown) for pulling up the semiconductor single crystal C is provided in the head portion 10 rotatably provided on the vertical cylindrical portion 1a. That is, the wire W is suspended from the head part 10 into the vertical cylinder part 1a through the center piece part 10a which is a hole communicating the head part 10 and the vertical cylinder part 1a.
[0005]
[Problems to be solved by the invention]
In the single crystal pulling apparatus, deposits such as Si vapor are generated on the inner surface of the vertical cylinder during pulling growth, and the deposits may fall as dust. Further, when the wire is wound up by the winding device, dust such as W may be generated from the wire itself. These dusts may affect the pulling growth, cause dislocation of the single crystal, and deteriorate the crystal pulling characteristics. However, since the vertical cylinder and the wire are located at the upper part of the pulling growth apparatus and are high, it is difficult to manually remove dust on the vertical cylinder and the wire surface by manual work or the like.
[0006]
The present invention has been made in view of the above-mentioned problems, and in order to remove dust in the single crystal pulling apparatus, it is easy to clean the inner surface of the vertical cylinder part or the wire suspended in the vertical cylinder part. It is an object of the present invention to provide a cleaning device for a single crystal pulling apparatus that can be performed in the same manner.
[0007]
[Means for Solving the Problems]
The present invention employs the following configuration in order to solve the above problems.
That is, the cleaning device of the single crystal pulling apparatus according to the present invention pulls up the semiconductor single crystal from the semiconductor melt in the crucible installed below the vertical cylindrical portion by the wire suspended in the vertical cylindrical portion of the sealed container. A device for cleaning the inside of a single crystal pulling apparatus, a main cylinder part that can be inserted into the vertical cylinder part, and a wire cleaning for cleaning the wire inserted into the main cylinder part above the main cylinder part and a machine configuration,
The wire cleaning mechanism includes an inner air blowing mechanism capable of blowing air inward in a radial direction from an inner blowing port provided inside the main cylinder portion.
The cleaning device for a single crystal pulling apparatus according to the present invention is a single crystal that pulls up a semiconductor single crystal from a semiconductor melt in a crucible installed below the vertical cylinder by a wire suspended in the vertical cylinder of the sealed container. A device for cleaning the inside of the pulling device, a main cylinder part that can be inserted into the vertical cylinder part, and a wire cleaning mechanism for cleaning the wire inserted into the main cylinder part above the main cylinder part or And at least one of an inner surface cleaning mechanism for cleaning the inner surface of the vertical cylindrical portion.
[0008]
In the cleaning device for the single crystal pulling apparatus, a main cylinder part that can be inserted into the vertical cylinder part, and a wire cleaning mechanism or a vertical cylinder for cleaning the wire inserted into the main cylinder part at the upper part of the main cylinder part At least one of the inner surface cleaning mechanisms for cleaning the inner surface of the portion, so that even if the vertical cylindrical portion is at a high place, the main cylindrical portion is inserted into the vertical cylindrical portion so that the upper portion of the main cylindrical portion is With the wire cleaning mechanism or the inner surface cleaning mechanism, it is possible to clean the inner surface of the wire or the vertical cylindrical portion that is a source of dust generation.
[0009]
In the cleaning device for a single crystal pulling apparatus according to the present invention, it is preferable that the main cylinder portion is extendable and contractible in the axial direction. That is, in this cleaning device, since the main cylinder part can be expanded and contracted in the axial direction, the main cylinder part can be extended to reach the upper part of the vertical cylinder part, and can be cleaned. This improves handling such as transportation and storage.
[0010]
Further, the cleaning device for a single crystal pulling apparatus according to the present invention is characterized in that the wire cleaning mechanism is an inner air capable of blowing air radially inward from an inner air outlet provided inside the main tube portion. A blowout mechanism is provided.
[0011]
In this cleaning device, the wire cleaning mechanism includes an inner air blowing mechanism capable of blowing air inward in the radial direction from an inner blow-out port provided inside the main cylinder portion. It is inserted into the vertical cylinder, and the wire is suspended in the main cylinder, and air is blown away from the inner blowout air to the wire located radially inward by the inner air blowout mechanism. can do.
[0012]
In the cleaning device for a single crystal pulling apparatus according to the present invention, it is preferable that the inner air blowing mechanism includes a plurality of the inner blowing ports. That is, in this cleaning device, for example, air is blown toward the wire from a plurality of inner air outlets provided in the circumferential direction and the axial direction, so that the wire surface can be cleaned in a wide range in the circumferential direction and the axial direction. become.
[0013]
Further, in the cleaning device for a single crystal pulling apparatus according to the present invention, the wire cleaning mechanism includes a vibrating member on the inner surface of the main cylinder portion that contacts and vibrates the wire arranged in the main cylinder portion. It is preferable. In other words, in this cleaning device, by making the vibrating member come into contact with the wire arranged in the main cylinder portion, it is possible to further easily remove dust adhered by vibrating the wire.
[0014]
Moreover, the cleaning device for the single crystal pulling apparatus of the present invention pulls up the semiconductor single crystal from the semiconductor melt in the crucible installed below the vertical cylindrical portion by the wire suspended in the vertical cylindrical portion of the sealed container. A device for cleaning the inside of a single crystal pulling device,
A main tube portion insertable into the vertical tube portion;
An upper surface of the main cylinder part is provided with an inner surface cleaning mechanism for cleaning the inner surface of the vertical cylinder part,
The wiper member is provided in an annular shape along an inner peripheral surface of the vertical cylindrical portion.
In the cleaning device for a single crystal pulling apparatus according to the present invention, the inner surface cleaning mechanism is disposed on the outer peripheral surface of the main cylinder portion, and on the inner surface of the vertical cylinder portion with the main cylinder portion being inserted into the vertical cylinder portion. Ru can be provided with a contact capable wiper member. That is, in this cleaning device, since the wiper member contacts the inner surface of the vertical cylindrical portion in a state where the main cylindrical portion is inserted into the vertical cylindrical portion, the wiper member is moved vertically by moving the main cylindrical portion up and down in the inserted state. The deposits can be scraped off by sliding on the inner surface of the mold cylinder.
[0015]
Furthermore, in the cleaning apparatus for a single crystal pulling apparatus according to the present invention, it is preferable that the wiper member is provided in an annular shape along the inner peripheral surface of the vertical cylindrical portion. That is, in this cleaning device, the wiper member is provided in an annular shape along the inner peripheral surface of the vertical cylindrical portion, so that the wiper member abuts in the entire circumferential direction of the inner surface of the vertical cylindrical portion. It becomes possible to easily clean the entire inner peripheral surface of the.
[0016]
Furthermore, in the cleaning apparatus for a single crystal pulling apparatus according to the present invention, it is preferable that the inner surface cleaning mechanism includes a wiper variable mechanism that deforms or moves the wiper member in a radial direction of the main tube portion. That is, in this cleaning device, the wiper member can be brought into contact with or separated from the inner peripheral surface of the vertical cylindrical portion by deforming or moving the wiper member in the radial direction of the main cylindrical portion by the wiper variable mechanism. To be able to. Accordingly, the wiper member can be kept away from the inner peripheral surface of the vertical cylindrical portion except when actually cleaning, and when the main cylindrical portion is inserted and set in the vertical cylindrical portion or pulled out from the vertical cylindrical portion. Sometimes the wiper member does not get in the way and the work can be performed smoothly.
[0017]
Further, in the cleaning device for a single crystal pulling apparatus according to the present invention, the variable wiper mechanism includes a flexible bag provided between the wiper member and the outer peripheral surface of the main cylinder portion, It is preferable that the pouch can be inflated by injecting air. That is, in this cleaning device, the wiper member disposed outside the flexible bag body is inflated by injecting air into the flexible bag body in a state where the main cylinder portion is inserted into the vertical cylinder portion. Is moved or deformed radially outward, and the wiper member can be brought into contact with the inner peripheral surface of the vertical cylindrical portion. Therefore, the wiper member can be easily deformed or moved only by simple means of inflating the flexible bag.
[0018]
Furthermore, in the cleaning device for a single crystal pulling apparatus according to the present invention, it is preferable that the flexible bag is a rubber tube provided in an annular shape along the outer peripheral surface of the main cylinder portion. That is, in this cleaning device, since the flexible bag body is a rubber tube provided in an annular shape along the outer peripheral surface of the main tube portion, the wiper member can be easily inflated over the entire outer periphery of the main tube portion. It can be deformed or moved over the entire outer periphery of the main tube.
[0019]
In the cleaning apparatus for a single crystal pulling apparatus according to the present invention, the inner surface cleaning mechanism is an outer air capable of blowing air radially outward from an outer outlet provided outside the main cylinder portion. It is preferable to provide a blowing mechanism. That is, in this cleaning device, air is blown radially outward from the outer air outlet of the outer air blowing mechanism in a state where the main cylinder portion is inserted into the vertical cylinder portion, so that the inner surface of the vertical cylinder portion is Air is blown, and the inside of the vertical cylindrical portion can be cleaned by blowing off the deposits on the inner surface.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a cleaning device for a single crystal pulling apparatus according to a first embodiment of the present invention will be described with reference to FIGS.
In these drawings, reference numeral 11 denotes a cleaning device, 12 denotes a main cylinder portion, and 13 denotes an inner air blowing mechanism.
[0021]
FIG. 1 shows a state in which a cleaning device 11 of a single crystal pulling apparatus according to the present embodiment is inserted into a vertical cylindrical portion 1 a above a chamber (sealed container) 1. A main tube portion 12 made of vinyl chloride or the like that can be inserted into the mold tube portion 1a and through which the wire W can be inserted, and a plurality (four) of inner nozzles (inner blowers) provided inside the main tube portion 12 An inner air blowing mechanism (wire cleaning mechanism) 13 capable of blowing air radially inward from the outlet) 13a is provided.
[0022]
The main tube portion 12 is extendable in the axial direction, and as shown in FIGS. 2 to 6, the tube portion lower portion 14, the tube portion intermediate portion 15 inserted into the tube portion lower portion 14, and the tube It has a three-part structure composed of a cylinder part upper part 16 inserted into the part intermediate part 15. The lower portion of the cylindrical portion 14 can be placed on a cart D that can move up and down, and a first slit 14a is formed in the axial direction. Moreover, the cylindrical part intermediate part 15 is provided with a rod-like locking part 15a that protrudes radially outward at the lower part and is inserted into the first slit 14a, and a second slit 15b is formed in the axial direction.
[0023]
Furthermore, the pipe upper part 16 is provided with a pipe connection part 17 that protrudes radially outward at the lower part and is inserted into the second slit 15b. That is, when the cleaning device 11 is not in use, as shown in FIG. 2, the cylinder part intermediate part 15 is inserted into the cylinder part lower part 14 to the lower part, and the cylinder part upper part 16 is inserted into the cylinder part intermediate part 15. It is inserted to the bottom and is shrunk as a whole to become compact.
[0024]
Further, at the time of use, as shown in FIG. 3, the cylindrical portion intermediate portion 15 is slid to the upper portion of the cylindrical portion upper portion 16, and the rod-shaped locking portion 15a is attached to the first locking portion 14b formed at the upper portion of the first slit 14a. And further supports the pipe connection portion 17 by hooking the pipe connection portion 17 to the second locking portion 15c formed at the upper portion of the second slit 15b. As a result, the overall height is increased.
[0025]
Four inner nozzles 13a arranged at equal intervals in the circumferential direction on the inner peripheral surface of the upper portion of the cylindrical portion 16 and the main cylindrical portion 12 arranged on the upper outer peripheral surface are inserted into the vertical cylindrical portion 1a. A wiper member (inner surface cleaning mechanism) 18 capable of contacting the inner surface of the vertical cylindrical portion 1a in the state is provided.
The inner air blowing mechanism 13 includes a blowing air supply pipe 19 whose tip is connected to each inner nozzle 13 a, and the blowing air supply pipe 19 has a particle filter 20 at an intermediate portion via a pipe connection portion 17. And a mist oil filter 21 is interposed, and a coupler 22 connected to a cleaning air supply source (not shown) is provided at the base end.
[0026]
The cleaning device 11 also includes a wiper variable mechanism 23 that deforms or moves the wiper member 18 in the radial direction of the main cylinder portion 12.
The wiper member 18 is formed of polyester or the like, and is provided in an annular shape along the inner peripheral surface of the vertical cylindrical portion 1a.
The wiper variable mechanism 23 includes a rubber tube (flexible bag) 24 that is provided between the wiper member 18 and the outer peripheral surface of the cylindrical portion upper portion 16 and is annularly provided along the outer peripheral surface of the cylindrical portion upper portion 16. I have.
[0027]
The rubber tube 24 is fitted between the two flange portions 16b at the upper end of the cylinder portion upper portion 16, and the wiper member 18 is attached to the two flange portions 16b in a state of being loosened up and down. Note that the wiper member 18 may be provided directly on the outer peripheral surface of the rubber tube 24.
The rubber tube 24 is connected to a pressure pipe 25, and the pressure pipe 25 is connected to a pressurized air supply source (not shown). That is, the rubber tube 24 can be arbitrarily inflated by injecting air from the pressurized air supply source through the pressurized pipe 25.
[0028]
A chuck SC that holds the seed crystal S is attached to the lower end of the wire W.
The head unit 10 is connected to a head unit air supply pipe 10 b that supplies clean air into the head unit 10.
[0029]
Next, a method for cleaning the inside of the single crystal pulling apparatus (the inner surface of the vertical cylindrical portion 1a and the wire W) by the cleaning apparatus 11 of the present embodiment will be described.
[0030]
First, the main body portion and the upper portion of the chamber 1 are separated from each other, and the cleaning device 11 (shortened state) placed on the carriage D is disposed below the vertical cylindrical portion 1a at the upper portion of the chamber 1. At this time, the cleaning device 11 is kept in a low and shortened state as shown in FIG. Next, the cleaning device 11 is extended and inserted into the vertical cylindrical portion 1a. That is, the cylinder part intermediate part 15 and the cylinder part upper part 16 are slid as shown in FIG.
[0031]
Next, with the main cylinder part 12 in the inserted state, the winding device is driven to insert the wire W into the main cylinder part 12. Further, after the coupler 22 and the cleaning air supply source are connected, compressed air is supplied from the air supply source to the blowing air supply pipe 19, and the compressed air is passed through the particle filter 20 and the mist oil filter 21. It sprays toward the wire W from each inner nozzle 13a.
[0032]
At this time, air is blown over the entire circumference of the wire W from each inner nozzle 13a, and dust on the surface of the wire W can be blown away. In particular, the chuck SC at the lower end of the wire W becomes a weight, and the air blown onto the wire W generates vibration in the wire W, so that dust is more likely to fall. At this time, the entire wire W can be cleaned by moving the wire W up and down several times by the winding device.
[0033]
At this time, by introducing clean air from the head part air supply pipe 10b into the head part 10, the clean air supplied into the head part 10 flows from the center piece part 10a into the vertical cylinder part 1a. . At this time, the dust adhering to the center piece portion 10a can be simultaneously removed with clean air.
[0034]
Further, air is sent from the pressurized air supply source to the rubber tube 24 through the pressure pipe 25 to inflate the rubber tube 24. At this time, the wiper member 18 is deformed by the swollen rubber tube 24 so as to be pushed outward in the radial direction, and is pressed against the inner peripheral surface of the vertical cylindrical portion 1a. In this state, when the upper part 16 and the vertical cylindrical part 1a are moved up and down relatively, the wiper member 18 slides on the inner peripheral surface of the vertical cylindrical part 1a and scrapes off the adhering matter. it can.
[0035]
In addition, except when actually cleaning, the wiper member 18 can be kept away from the inner peripheral surface of the vertical cylindrical portion 1a by wiping the rubber tube 24, and the main cylindrical portion 12 can be separated from the vertical cylindrical portion. The wiper member 18 does not get in the way when being inserted and set in 1a or pulled out from the vertical cylindrical portion 1a, and the work can be performed smoothly.
[0036]
In performing the cleaning, an exhaust unit is connected or installed at the lower part of the cleaning device 11 to prevent dust from being scattered around, and dust falling from the main cylinder part 12 and the vertical cylinder part 1a is collected. It is desirable to dust.
Further, an upper end wiper member that can come into contact with the upper end inner surface of the vertical cylindrical portion 1a may be attached to the upper surface of the cylindrical upper portion 16. In this case, by adhering the upper end wiper member to the inner surface of the upper end of the vertical cylinder portion 1a by extending the main cylinder portion 12, it is possible to remove the deposits on this portion.
[0037]
As described above, in the cleaning device 11 of the present embodiment, the main tube portion 12 that can be inserted into the vertical tube portion 1a, and the main tube portion 12 inserted into the outer surface of the main tube portion 12 into the vertical tube portion 1a. The wiper member 18 that can be brought into contact with the inner surface of the vertical cylindrical portion 1a in the state in which it is made, and the inner air that can blow out air radially inward from the inner nozzle 13a provided inside the main cylindrical portion 12 Since the blower mechanism 13 is provided, the main cylinder 12 is inserted into the vertical cylinder 1a and the inner periphery of the vertical cylinder 1a by the wiper member 18 even when the vertical cylinder 1a is at a high place. The surface can be rubbed off to remove the deposits, and the inner air blowing mechanism 13 blows air from the inner nozzle 13a onto the wire W in the main cylinder portion 12 to blow away dust from the surface of the wire W. be able to.
[0038]
Moreover, since the main cylinder part 12 can extend and contract in the axial direction, the wire W can be cleaned by reaching the upper part of the vertical cylinder part 1a by extending the main cylinder part 12. By shortening the cylindrical portion 12, handling properties such as transportation and storage are improved.
[0039]
Next, a second embodiment of the cleaning apparatus for a single crystal pulling apparatus according to the present invention will be described with reference to FIG.
[0040]
The difference between the second embodiment and the first embodiment is that, in the first embodiment, the inner nozzle 13a is arranged in the circumferential direction of the cylindrical portion upper portion 16, whereas the inner portion in the cleaning device 31 of the second embodiment is different. In the direction air blowing mechanism 32, a plurality of inner nozzles 13a are further arranged in the axial direction. In the first embodiment, only the inner nozzle 13a that blows air on the wire W is provided. On the other hand, the cleaning device 31 of the second embodiment is provided on the upper portion of the cylindrical portion upper portion 16 and is radially outward. An outer air blowing mechanism 35 having a plurality of outer nozzles (outer outlets) 33 that can blow out air toward the outside is provided. Furthermore, in the second embodiment, a vibration member 34 that contacts and vibrates the wire W disposed in the cylinder upper part 16 is provided on the inner surface of the cylinder upper part 16.
[0041]
Each outer nozzle 33 is connected to the blowing air supply pipe 19 in the same manner as the inner nozzle 13a. Further, the vibration member 34 is a rod-like member connected to a vibration source such as a motor (not shown), and is provided so that the tip end side can move in the cylindrical portion upper part 16 so as to be in contact with and away from the wire W.
[0042]
That is, since the cleaning device 31 in this embodiment has a plurality of inner nozzles 13a installed not only in the circumferential direction but also in the axial direction, the wire W can be cleaned in a wider range with respect to the axial direction. . Further, by blowing air from the outer nozzle 33 to the inner peripheral surface of the vertical cylindrical portion 1a, the deposits on the inner surface of the vertical cylindrical portion 1a can be blown off. Further, by bringing the vibrating member 34 into contact with the wire W, it is possible to make it easier for the dust attached to the wire W to vibrate more to fall off.
[0043]
【The invention's effect】
According to the cleaning apparatus for a single crystal pulling apparatus of the present invention, a wire cleaning mechanism for cleaning a main tube portion that can be inserted into a vertical tube portion, and a wire inserted into the main tube portion at the upper portion of the main tube portion. Or at least one of an inner surface cleaning mechanism for cleaning the inner surface of the vertical cylindrical portion, so that the main cylindrical portion is inserted into the vertical cylindrical portion even when the vertical cylindrical portion is at a high place. By the wire cleaning mechanism or the inner surface cleaning mechanism at the upper part of the cylinder part, the inner surface of the wire or the vertical cylinder part that is a source of dust generation can be cleaned. Therefore, it is possible to easily clean at least one of the inner surface of the wire or the vertical cylindrical portion without relying on manual work, and suppress the influence on the pulling growth due to dust from these (such as dislocation of crystals). be able to.
[Brief description of the drawings]
FIG. 1 is an overall cross-sectional view showing a cleaning device set in a vertical cylindrical portion in a first embodiment of a cleaning device for a single crystal pulling device according to the present invention.
FIG. 2 is a front view when the cleaning device is contracted in the first embodiment of the cleaning device of the single crystal pulling device according to the present invention.
FIG. 3 is a front view when the cleaning device is extended in the first embodiment of the cleaning device of the single crystal pulling device according to the present invention;
FIGS. 4A and 4B are a front view and a plan view showing an upper portion of a cylindrical portion in the cleaning device for a single crystal pulling apparatus according to the first embodiment of the present invention. FIGS.
FIGS. 5A and 5B are a front view and a plan view showing a middle portion of a cylindrical portion in the cleaning device for a single crystal pulling apparatus according to the first embodiment of the present invention. FIGS.
FIGS. 6A and 6B are a front view and a plan view showing a lower portion of a cylindrical portion in the cleaning device for a single crystal pulling apparatus according to the first embodiment of the present invention. FIGS.
FIG. 7 is an overall cross-sectional view showing a cleaning device set in a vertical cylindrical portion in a second embodiment of a cleaning device for a single crystal pulling apparatus according to the present invention.
FIG. 8 is an overall sectional view showing a single crystal pulling apparatus.
[Explanation of symbols]
1 chamber (sealed container)
1a Vertical cylinder 3 Crucible 11, 31 Cleaning device 13, 32 Inner air blowing mechanism (wire cleaning mechanism)
12 Main tube part 13a Inner nozzle (inner outlet)
14 cylinder part lower part 15 cylinder part middle part 16 cylinder part upper part 18 wiper member (inner surface cleaning mechanism)
24 Rubber tube (flexible bag)
33 Outer nozzle (outer outlet)
34 Vibrating member 35 Outer air blowing mechanism (inner surface cleaning mechanism)
C Semiconductor single crystal L Semiconductor melt W Wire

Claims (10)

A device for cleaning the inside of a single crystal pulling apparatus that pulls up a semiconductor single crystal from a semiconductor melt in a crucible installed below the vertical cylinder by means of a wire suspended in the vertical cylinder of the sealed container,
A main tube portion insertable into the vertical tube portion;
On top of the main tube portion, and a wire cleaning Organization for cleaning the wire to be inserted into the main cylindrical portion,
The wire cleaning mechanism includes an inner air blowing mechanism capable of blowing air inward in the radial direction from an inner outlet provided on the inner side of the main cylinder portion. Equipment cleaning device. In the cleaning apparatus of the single crystal pulling apparatus according to claim 1,
A cleaning device for a single crystal pulling apparatus, wherein the main cylinder part is extendable and contractible in an axial direction. In the cleaning apparatus of the single crystal pulling apparatus according to claim 1 or 2 ,
The cleaning device for a single crystal pulling apparatus, wherein the inner air blowing mechanism includes a plurality of the inner blowing ports. In the cleaning apparatus of the single crystal pulling apparatus according to any one of claims 1 to 3 ,
The cleaning apparatus for a single crystal pulling apparatus, wherein the wire cleaning mechanism includes a vibration member that contacts and vibrates a wire disposed in the main cylinder part on an inner surface of the main cylinder part. In the cleaning apparatus of the single crystal pulling apparatus according to any one of claims 1 to 4 ,
A cleaning device for a single crystal pulling apparatus , comprising an inner surface cleaning mechanism for cleaning an inner surface of the vertical cylinder portion at an upper portion of the main cylinder portion . A device for cleaning the inside of a single crystal pulling apparatus that pulls up a semiconductor single crystal from a semiconductor melt in a crucible installed below the vertical cylinder by means of a wire suspended in the vertical cylinder of the sealed container,
A main tube portion insertable into the vertical tube portion;
An upper surface of the main cylinder part is provided with an inner surface cleaning mechanism for cleaning the inner surface of the vertical cylinder part,
The inner surface cleaning mechanism includes a wiper member that can contact the inner surface of the vertical cylindrical portion in a state where the main cylindrical portion is inserted into the vertical cylindrical portion on the outer peripheral surface of the main cylindrical portion,
The cleaning device for a single crystal pulling apparatus, wherein the wiper member is provided in an annular shape along an inner peripheral surface of the vertical cylindrical portion. In the cleaning apparatus of the single crystal pulling apparatus according to claim 6,
The cleaning device of a single crystal pulling apparatus, wherein the inner surface cleaning mechanism includes a wiper variable mechanism that deforms or moves the wiper member in a radial direction of the main tube portion. The cleaning apparatus for a single crystal pulling apparatus according to claim 7,
The wiper variable mechanism includes a flexible bag provided between the wiper member and an outer peripheral surface of the main cylinder portion,
A cleaning apparatus for a single crystal pulling apparatus, wherein the flexible bag body can be inflated by injecting air. The cleaning apparatus for a single crystal pulling apparatus according to claim 8,
The cleaning device for a single crystal pulling apparatus, wherein the flexible bag is a rubber tube provided in an annular shape along the outer peripheral surface of the main cylinder portion. In the cleaning apparatus of the single crystal pulling apparatus according to any one of claims 5 to 9 ,
The inner surface cleaning mechanism includes an outer air blowing mechanism capable of blowing air radially outward from an outer outlet provided on the outer side of the main cylinder portion. Equipment cleaning device.

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