Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP4115456B2 - Measuring device for solid electrolytic capacitors - Google Patents
[go: Go Back, main page]

JP4115456B2 - Measuring device for solid electrolytic capacitors - Google Patents

Measuring device for solid electrolytic capacitors Download PDF

Info

Publication number
JP4115456B2
JP4115456B2 JP2005047328A JP2005047328A JP4115456B2 JP 4115456 B2 JP4115456 B2 JP 4115456B2 JP 2005047328 A JP2005047328 A JP 2005047328A JP 2005047328 A JP2005047328 A JP 2005047328A JP 4115456 B2 JP4115456 B2 JP 4115456B2
Authority
JP
Japan
Prior art keywords
electrode
correction
capacitor
electrodes
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2005047328A
Other languages
Japanese (ja)
Other versions
JP2005274561A (en
Inventor
秀樹 石田
広一郎 山路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP2005047328A priority Critical patent/JP4115456B2/en
Publication of JP2005274561A publication Critical patent/JP2005274561A/en
Application granted granted Critical
Publication of JP4115456B2 publication Critical patent/JP4115456B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

本発明は、固体電解コンデンサのESRやESLを測定する装置に関する。   The present invention relates to an apparatus for measuring ESR and ESL of a solid electrolytic capacitor.

従来から、図14に示すチップ型の固体電解コンデンサが知られている(例えば、特許文献1参照)。
固体電解コンデンサ(1)は、図14に示すように、リードフレーム(9)(90)が取り付けられたコンデンサ素子(2)を具え、該コンデンサ素子(2)は合成樹脂製のハウジング(70)にて覆われる。リードフレーム(9)(90)はハウジング(70)に沿って折曲され、ハウジング(70)の側面及び下面から露出している。コンデンサ素子(2)は、弁金属からなる陽極体(20)の一部に、誘電体酸化被膜(21)を形成し、該誘電体酸化被膜(21)上に、陰極層(3)、カーボン層(6)、銀ペースト層(60)を順に設けて形成される。即ち、陽極体(20)上にて誘電体酸化被膜(21)の形成部分が陰極(2b)、陽極体(20)上にて誘電体酸化被膜(21)の未形成部分が陽極(2a)となる。
ここで、弁金属とは、電解酸化処理により極めて緻密で耐久性を有する誘電体酸化被膜が形成される金属を指し、Al(アルミニウム)、Ta(タンタル)、Ti(チタン)、Nb(ニオブ)等が該当する。
Conventionally, a chip-type solid electrolytic capacitor shown in FIG. 14 is known (see, for example, Patent Document 1).
As shown in FIG. 14, the solid electrolytic capacitor (1) includes a capacitor element (2) to which lead frames (9) and (90) are attached, and the capacitor element (2) is made of a synthetic resin housing (70). Covered with. The lead frames (9) and (90) are bent along the housing (70) and exposed from the side surface and the lower surface of the housing (70). In the capacitor element (2), a dielectric oxide film (21) is formed on a part of an anode body (20) made of a valve metal, and a cathode layer (3), carbon is formed on the dielectric oxide film (21). A layer (6) and a silver paste layer (60) are provided in this order. That is, the portion where the dielectric oxide film (21) is formed on the anode body (20) is the cathode (2b), and the portion where the dielectric oxide film (21) is not formed on the anode body (20) is the anode (2a). It becomes.
Here, the valve metal refers to a metal on which an extremely dense and durable dielectric oxide film is formed by electrolytic oxidation treatment. Al (aluminum), Ta (tantalum), Ti (titanium), Nb (niobium) Etc.

コンデンサ(1)の重要な電気特性として、ESR(等価直列抵抗)が知られている。近年では、かかるコンデンサ(1)を数MHz以上の高周波回路に組み込むことが多く、周波数が高いほど、インピーダンスが大きくなるから、ESL(等価直列インダクタンス)が小さいことも、コンデンサ(1)の重要な電気特性となっている。
例えば、図14に示すコンデンサ(1)のESRやESLを4端子法を用いて測定するには、リードフレーム(9)(90)の側方から、測定器(8)に電線(80)(80)を介して繋がった第1プローブ(81)(81)、第2プローブ(82)(82)を当てる。第1プローブ(81)(81)は、高電位側入力プローブと、高電位側出力プローブに別れており、第2プローブ(82)(82)は、低電位側入力プローブと、低電位側出力プローブに別れている。測定器(8)から一定電圧、具体的には0.5Vの正弦波を高電位側入力プローブから低電位側入力プローブに流し、両入力プローブに直列接続された電流計と、両出力プローブに直列接続された電圧計により、測定した値及び位相のズレから、コンデンサ(1)のESR、ESLを測定する。
このコンデンサ(1)のESR、ESLを測定する際には、プローブ(81)(82)を含む測定器(8)内の抵抗、インダクタンス、容量に基づくインピーダンス、及びプローブ(81)(82)とコンデンサ(1)の接触抵抗を補正する必要があり、この補正として、以下のオープン補正とショート補正とがある。
ESR (equivalent series resistance) is known as an important electrical characteristic of the capacitor (1). In recent years, such a capacitor (1) is often incorporated into a high-frequency circuit of several MHz or more, and the higher the frequency, the larger the impedance. Therefore, the ESL (equivalent series inductance) is also small. It has electrical characteristics.
For example, in order to measure the ESR and ESL of the capacitor (1) shown in FIG. 14 using the four-terminal method, the wire (80) ( The first probes (81) and (81) and the second probes (82) and (82) connected through 80) are applied. The first probe (81) (81) is divided into a high potential side input probe and a high potential side output probe, and the second probe (82) (82) is a low potential side input probe and a low potential side output. Separated into probes. A constant voltage, specifically 0.5V sine wave is passed from the high potential side input probe to the low potential side input probe from the measuring instrument (8), and the ammeter connected in series to both input probes and both output probes The ESR and ESL of the capacitor (1) are measured from the measured value and phase shift with a voltmeter connected in series.
When measuring the ESR and ESL of the capacitor (1), the impedance based on the resistance, inductance and capacitance in the measuring instrument (8) including the probes (81) and (82), and the probes (81) and (82) It is necessary to correct the contact resistance of the capacitor (1), and the correction includes the following open correction and short correction.

測定器(8)内のインピーダンス成分には、残留インピーダンスと浮遊アドミタンスがあり、オープン補正用データ測定により、浮遊アドミタンスを測定し、ショート補正用データ測定により、残留インピーダンスを測定する。図15に示すプローブ(81)(82)が開放状態の場合は、残留インピーダンスが無視できるため、浮遊アドミタンス(主に浮遊容量)が測定でき、図16に示すプローブ(81)(82)が短絡状態の場合は、浮遊アドミタンスがバイパスされるので、残留インピーダンスが測定できる。オープン補正用データ測定値とショート補正用データ測定値を基に、コンデンサ(1)の測定値を補正する。これらの補正を夫々、オープン補正、ショート補正と言う。
4端子法を用いて、ESR、ESLを測定する場合のオープン補正用データ測定とは、図15に示すように、第1プローブ(81)(81)に治具である小金属片(45)を当てる。また、第2プローブ(82)(82)に同様の小金属片(45)を当てた状態で、0.5Vの正弦波を通電し、このときの抵抗値、インダクタンス、容量に基づくインピーダンスを測定器(8)内に格納しておく。
また、ショート補正用データ測定に於いては、図16に示すように、治具である大金属片(46)の一側面に一方のリードフレーム(90)に接するべき2つの第1プローブ(81)(81)を当てて固定する。大金属片(46)の反対側の側面に、他方のリードフレーム(9)に接するべき2つの第2プローブ(82)(82)を側方から水平に移動させて当てる。その後、0.5Vの正弦波を通電し、このときの抵抗値、インダクタンス、容量に基づくインピーダンスを測定器(8)内に格納しておく。
上記ショート補正用データ測定に於いては、残留インピーダンスに加え、プローブ(81)(82)と大金属片(46)の接触抵抗についても測定できる。しかし、4端子法に於いては、接触抵抗は、実際の接触抵抗に、プローブどうしの浮遊容量に基づくインピーダンスが加わった値となる。
両補正用データ測定を行うのは、例えばオープン補正のみでは、残留インピーダンス及び接触抵抗を補正することができず、浮遊アドミタンスのみの補正となる。逆に、ショート補正のみでは、浮遊アドミタンスを測定することができないため、コンデンサ(1)のESR、ESLを正確に測定する為には、ショート補正とオープン補正の両方が必要である。
実際のコンデンサ(1)のESR、ESLを測定する際には、ショート補正用及びオープン補正用データ測定で得られた抵抗値、インダクタンス、容量に基づくインピーダンスを測定値から引いた値を求める。
The impedance component in the measuring instrument (8) includes residual impedance and floating admittance. The floating admittance is measured by open correction data measurement, and the residual impedance is measured by short correction data measurement. When the probes (81) and (82) shown in FIG. 15 are in an open state, the residual impedance can be ignored, so that the floating admittance (mainly stray capacitance) can be measured, and the probes (81) and (82) shown in FIG. In the state, stray admittance is bypassed, so the residual impedance can be measured. The measured value of the capacitor (1) is corrected based on the measured data for open correction and the measured data for short correction. These corrections are called open correction and short correction, respectively.
As shown in FIG. 15, open correction data measurement when measuring ESR and ESL using the four-terminal method is a small metal piece (45) as a jig on the first probe (81) (81). Hit. In addition, with the same small metal piece (45) applied to the second probe (82) (82), a 0.5V sine wave is applied, and the impedance based on the resistance, inductance, and capacitance is measured. Store in the container (8).
In the short correction data measurement, as shown in FIG. 16, two first probes (81) to be in contact with one lead frame (90) on one side of a large metal piece (46) as a jig. ) (81) to fix. Two second probes (82) and (82) to be in contact with the other lead frame (9) are horizontally moved from the side and applied to the opposite side surface of the large metal piece (46). Thereafter, a 0.5 V sine wave is energized, and the impedance based on the resistance value, inductance, and capacitance at this time is stored in the measuring instrument (8).
In the short correction data measurement, in addition to the residual impedance, the contact resistance between the probe (81) (82) and the large metal piece (46) can be measured. However, in the four-terminal method, the contact resistance is a value obtained by adding the impedance based on the stray capacitance between the probes to the actual contact resistance.
The data measurement for both corrections is performed, for example, with only open correction, the residual impedance and the contact resistance cannot be corrected, and only the floating admittance is corrected. On the contrary, since the floating admittance cannot be measured only by the short correction, both the short correction and the open correction are necessary to accurately measure the ESR and ESL of the capacitor (1).
When measuring the ESR and ESL of the actual capacitor (1), a value obtained by subtracting the impedance based on the resistance value, the inductance, and the capacitance obtained by the data measurement for the short correction and the open correction from the measurement value is obtained.

特開2002−246268号JP 2002-246268 A

従来の方法では、オープン補正用データ測定時に、第1プローブ(81)及び第2プローブ(82)を水平に動かしている。そのため、横寸法の異なるコンデンサのESR、ESLを連続して測定する場合、浮遊アドミタンス(特に、第1プローブ(81)と第2プローブ(82)の間の浮遊容量)が僅かに変わり、正確にオープン補正用のデータを測定できないことを発見した。
また、4端子法を用いて測定する場合、図16に示すように、ショート補正用データ測定時及びコンデンサ測定時に、第2プローブ(82)(82)を水平に移動させている。そのため、第2プローブ(82)(82)間の浮遊容量が僅かに変化する。これにより、大金属片(46)を通る電流とその位相角と、コンデンサ(1)を通る電流とその位相角との間に誤差が発生する。そのため、ショート補正に於いて補正すべきインピーダンスも誤差が出てくる。特に、高周波領域に於いては、この問題が大きくなる。
本発明の目的は、正確なオープン補正、ショート補正ができる測定装置を提供することにある。
In the conventional method, the first probe (81) and the second probe (82) are moved horizontally during open correction data measurement. Therefore, when ESR and ESL of capacitors with different lateral dimensions are measured continuously, the stray admittance (especially stray capacitance between the first probe (81) and the second probe (82)) slightly changes and is accurately measured. I discovered that data for open correction cannot be measured.
When measurement is performed using the four-terminal method, the second probes (82) and (82) are moved horizontally during short correction data measurement and capacitor measurement, as shown in FIG. Therefore, the stray capacitance between the second probes (82) and (82) slightly changes. As a result, an error occurs between the current passing through the large metal piece (46) and its phase angle, and the current passing through the capacitor (1) and its phase angle. Therefore, an error also occurs in the impedance to be corrected in the short correction. This problem is particularly serious in the high frequency region.
An object of the present invention is to provide a measuring apparatus capable of accurate open correction and short circuit correction.

ハウジング(70)から少なくとも陽極側及び陰極側リードフレーム(9)(90)の下面が露出したコンデンサ(1)の測定装置であって、A measuring device for a capacitor (1) in which at least the lower surfaces of the anode side and cathode side lead frames (9) and (90) are exposed from a housing (70),
該測定装置本体(5)上に、各リードフレーム(9)(90)の下面に接するべき第1電極(51)、第2電極(52)を同一平面内に固定して設け、  On the measuring device body (5), a first electrode (51) and a second electrode (52) to be in contact with the lower surface of each lead frame (9) (90) are fixed in the same plane,
ショート補正用のデータ測定時に、前記第1電極(51)、第2電極(52)には同一の治具が当接して電気的に繋がり、  When measuring data for short correction, the same jig is in contact with and electrically connected to the first electrode (51) and the second electrode (52),
前記測定装置本体(5)内には、前記第1電極(51)(51)どうし又は前記第2電極(52)(52)どうしを電気的に接続したオープン補正時に用いる第1補正値と、該第1電極(51)(51)及び第2電極(52)(52)の全てを電気的に接続したショート補正時に用いる第2補正値を格納しておくメモリ(40)と、コンデンサ(1)の測定時に、測定値から、第1補正値と第2補正値に基づくインピーダンスを引く演算回路(4)が設けられたコンデンサ(1)の測定装置において、In the measuring device main body (5), a first correction value used for open correction in which the first electrodes (51) (51) or the second electrodes (52) (52) are electrically connected, and A memory (40) for storing a second correction value used for short correction in which all of the first electrodes (51) (51) and the second electrodes (52) (52) are electrically connected, and a capacitor (1 In the measuring device of the capacitor (1) provided with the arithmetic circuit (4) for subtracting the impedance based on the first correction value and the second correction value from the measurement value at the time of measurement of
前記第1電極(51)と第2電極(52)は、夫々内側に向かって下向きに傾いた斜面(57)を有し、且つ、前記第1電極(51)および第2電極(52)の下面に略平行で、該下向きに傾いた斜面(57)に繋がる平坦面を有する。The first electrode (51) and the second electrode (52) each have an inclined surface (57) inclined downward toward the inside, and the first electrode (51) and the second electrode (52) It has a flat surface that is substantially parallel to the lower surface and is connected to the downwardly inclined slope (57).
また、前記第1電極(51)と第2電極(52)上には、陽極側及び陰極側リードフレーム(9)(90)の下面に接する突起(56)(56)が形成され、且つ、前記第1電極(51)および第2電極(52)の下面に略平行で、該突起(56)(56)に繋がる平坦面が形成されている。On the first electrode (51) and the second electrode (52), protrusions (56) and (56) are formed which are in contact with the lower surfaces of the anode side and cathode side lead frames (9) and (90), and A flat surface is formed substantially parallel to the lower surfaces of the first electrode (51) and the second electrode (52) and connected to the protrusions (56) and (56).

オープン補正用のデータ測定
オープン補正用のデータ測定時には、第1電極(51)(51)又は第2電極(52)(52)に跨って、治具である小金属片(45)を置き、第1電極(51)(51)どうし又は第2電極(52)(52)どうしを電気的に接続する。このとき得られた抵抗、インダクタンス、容量に基づくインピーダンスを第1補正値として、メモリ(40)内に格納する。
ショート補正用のデータ測定
ショート補正用のデータ測定時には、第1電極(51)(51)及び第2電極(52)(52)の全てに跨って、治具である大金属片(46)を置き、第1電極(51)(51)及び第2電極(52)(52)の全てを電気的に接続する。このとき得られた抵抗、インダクタンス、容量に基づくインピーダンスを第2補正値として、メモリ(40)内に格納する。
測定時のオープン補正とショート補正
第1電極(51)(51)及び第2電極(52)(52)に跨ってコンデンサ(1)を置く。第1電極(51)(51)に跨って一方のリードフレーム(90)が、第2電極(52)(52)に跨って他方のリードフレーム(9)が載置される。演算回路(4)は、メモリ(40)内に格納された第1補正値と第2補正値から、第1電極、第2電極(51)(52)の各インピーダンス、及び両電極(51)(52)とコンデンサ(1)との接触抵抗に基づくインピーダンスを夫々算出し、測定値から各インピーダンスを引いた値を求める。第1補正値に基づくインピーダンスを引く補正がオープン補正であり、第2補正値に基づくインピーダンスを引く補正がショート補正である。
第1電極(51)(51)と第2電極(52)(52)は、装置本体(5)上に固定されているから、横方向寸法の異なるコンデンサ(1)を連続して測定する場合にも、第1電極(51)と第2電極(52)との間の浮遊容量に基づくインピーダンスは変化しない。これにより、正確なオープン補正が可能となる。
また、第1電極(51)(51)と第2電極(52)(52)は、装置本体(5)上に固定されているから、第1電極(51)(51)間、及び第2電極(52)(52)間の浮遊容量は一定になる。これにより、大金属片(46)測定時と、コンデンサ測定時の接触抵抗の誤差を無くすことができ、正確なショート補正が可能となる。
Data measurement for open correction When measuring data for open correction , a small metal piece (45) as a jig is placed across the first electrode (51) (51) or the second electrode (52) (52), The first electrodes (51) (51) or the second electrodes (52) (52) are electrically connected to each other. The impedance based on the resistance, inductance, and capacitance obtained at this time is stored in the memory (40) as the first correction value.
Data measurement for short correction When measuring data for short correction , a large metal piece (46), which is a jig, is straddled across all of the first electrode (51) (51) and the second electrode (52) (52). The first electrodes 51 and 51 and the second electrodes 52 and 52 are all electrically connected. The impedance based on the resistance, inductance, and capacitance obtained at this time is stored in the memory (40) as the second correction value.
Open correction and short correction at the time of measurement The capacitor (1) is placed across the first electrode (51) (51) and the second electrode (52) (52). One lead frame (90) is placed across the first electrodes (51) (51), and the other lead frame (9) is placed across the second electrodes (52) (52). The arithmetic circuit (4) calculates the impedance of the first electrode, the second electrode (51) (52), and both electrodes (51) from the first correction value and the second correction value stored in the memory (40). The impedance based on the contact resistance between (52) and the capacitor (1) is calculated, and the value obtained by subtracting each impedance from the measured value is obtained. Correction for subtracting impedance based on the first correction value is open correction, and correction for subtracting impedance based on the second correction value is short correction.
Since the first electrode (51) (51) and the second electrode (52) (52) are fixed on the device body (5), the capacitor (1) having different lateral dimensions is continuously measured. In addition, the impedance based on the stray capacitance between the first electrode (51) and the second electrode (52) does not change. Thus, accurate open correction can be performed.
Further, since the first electrodes (51) (51) and the second electrodes (52) (52) are fixed on the apparatus body (5), the first electrodes (51) (51) and the second electrodes The stray capacitance between the electrodes (52) and (52) is constant. As a result, it is possible to eliminate an error in contact resistance between the measurement of the large metal piece (46) and the measurement of the capacitor, and an accurate short circuit correction is possible.

(第1実施例)
以下、本発明の一例を図を用いて詳述する。
図1は、本例に係わる測定装置の斜視図である。測定されるコンデンサ(1)は、図14に示す従来と同じものである。装置本体(5)上に設けられた基台(50)には、一対の第1電極(51)(51)、第2電極(52)(52)が設けられ、第1電極(51)(51)は陰極側リードフレーム(90)に、第2電極(52)(52)は陽極側リードフレーム(9)に夫々接する。第1電極(51)(51)、第2電極(52)(52)は夫々互いに平行であり、長手方向を横に向けている。
第1、第2電極(51)(52)は、上向きにバネ(54)付勢され、コンデンサ(1)の上方には、コンデンサ(1)をバネ(54)に向けて付勢する押圧片(53)が設けられている。該押圧片(53)にて、測定物であるコンデンサ(1)を第1、第2電極(51)(52)に確実に接触させ、コンデンサ(1)と第1、第2電極(51)(52)との接触抵抗がバラ付くことを防いでいる。
第1、第2電極(51)(52)は、装置本体(5)内に設けられた演算回路(4)に繋がり、該演算回路(4)はメモリ(40)を具える。該メモリ(40)には、後記のオープン補正用データ測定、ショート補正用データ測定時に得られた第1補正値、第2補正値が格納される。装置本体(5)の前面には、表示窓(55)が設けられ、該表示窓(55)は演算回路(4)に繋がって、測定データを表示する。
(First embodiment)
Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view of a measuring apparatus according to this example. The capacitor (1) to be measured is the same as the conventional one shown in FIG. A base (50) provided on the apparatus main body (5) is provided with a pair of first electrodes (51) (51) and second electrodes (52) (52), and the first electrodes (51) ( 51) is in contact with the cathode side lead frame (90), and the second electrodes (52) and (52) are in contact with the anode side lead frame (9). The first electrodes (51) and (51) and the second electrodes (52) and (52) are parallel to each other, and the longitudinal direction is directed sideways.
The first and second electrodes (51) and (52) are biased upward by a spring (54), and above the capacitor (1) are pressing pieces that bias the capacitor (1) toward the spring (54). (53) is provided. With the pressing piece (53), the capacitor (1) as a measurement object is securely brought into contact with the first and second electrodes (51) and (52), and the capacitor (1) and the first and second electrodes (51) are contacted. This prevents the contact resistance with (52) from varying.
The first and second electrodes (51) and (52) are connected to an arithmetic circuit (4) provided in the apparatus body (5), and the arithmetic circuit (4) includes a memory (40). The memory 40 stores a first correction value and a second correction value obtained during open correction data measurement and short correction data measurement described later. A display window (55) is provided on the front surface of the apparatus body (5), and the display window (55) is connected to the arithmetic circuit (4) to display measurement data.

第1、第2電極(51)(52)自体に抵抗値、インダクタンスがある。また同じリードフレーム(9)(90)に接する第1、第2電極(51)(51)(52)(52)間、及び互いに対向する第1電極(51)及び第2電極(52)間には浮遊容量がある。更に、第1、第2電極(51)(52)を含む測定器(8)内の抵抗とコンデンサ(1)の接触抵抗もある。
コンデンサ(1)のESRやESLを正確に測定する際には、第1、第2電極(51)(52)の抵抗、インダクタンス、容量から受けるインピーダンスを引く必要があり、この引くべきパラメータを求める手法として、従来と同様に、オープン補正用データ測定とショート補正用データ測定とがある。以下に、オープン補正用データ測定とショート補正用データ測定の手順を示す。
The first and second electrodes 51 and 52 themselves have a resistance value and an inductance. Also, between the first and second electrodes (51) (51) (52) (52) in contact with the same lead frame (9) (90), and between the first electrode (51) and the second electrode (52) facing each other. Has stray capacitance. Further, there is a resistance in the measuring instrument (8) including the first and second electrodes (51) and (52) and a contact resistance of the capacitor (1).
When accurately measuring the ESR and ESL of the capacitor (1), it is necessary to subtract the impedance received from the resistance, inductance and capacitance of the first and second electrodes (51) and (52), and the parameters to be subtracted are obtained. As methods, there are open correction data measurement and short correction data measurement as in the prior art. The procedure for open correction data measurement and short correction data measurement is shown below.

オープン補正用のデータ測定
オープン補正用のデータ測定時には、第1電極(51)(51)又は第2電極(52)(52)に跨って、治具である小金属片(45)を置き、第1電極(51)(51)どうし又は第2電極(52)(52)どうしを電気的に接続する。このとき得られた抵抗、インダクタンス、容量に基づくインピーダンスを第1補正値として、メモリ(40)内に格納する。
ショート補正用のデータ測定
ショート補正用のデータ測定時には、第1電極(51)(51)及び第2電極(52)(52)の全てに跨って、治具である大金属片(46)を置き、第1電極(51)(51)及び第2電極(52)(52)の全てを電気的に接続する。このとき得られた抵抗、インダクタンス、容量に基づくインピーダンスを第2補正値として、メモリ(40)内に格納する。
測定時のオープン補正とショート補正
第1電極(51)(51)及び第2電極(52)(52)に跨ってコンデンサ(1)を置く。第1電極(51)(51)に跨って一方のリードフレーム(90)が、第2電極(52)(52)に跨って他方のリードフレーム(9)が載置される。演算回路(4)は、メモリ(40)内に格納された第1補正値と第2補正値から、第1電極、第2電極(51)(52)の各インピーダンス、及び両電極(51)(52)とコンデンサ(1)との接触抵抗に基づくインピーダンスを夫々算出し、測定値から各インピーダンスを引いた値を求める。第1補正値に基づくインピーダンスを引く補正がオープン補正であり、第2補正値に基づくインピーダンスを引く補正がショート補正である。
Data measurement for open correction When measuring data for open correction , a small metal piece (45) as a jig is placed across the first electrode (51) (51) or the second electrode (52) (52), The first electrodes (51) (51) or the second electrodes (52) (52) are electrically connected to each other. The impedance based on the resistance, inductance, and capacitance obtained at this time is stored in the memory (40) as the first correction value.
When data measurements data measurements SHORT compensation for short correction is across all of the first electrode (51) (51) and a second electrode (52) (52), a jig large metal piece (46) The first electrodes 51 and 51 and the second electrodes 52 and 52 are all electrically connected. The impedance based on the resistance, inductance, and capacitance obtained at this time is stored in the memory (40) as the second correction value.
Open correction and short correction at the time of measurement The capacitor (1) is placed across the first electrode (51) (51) and the second electrode (52) (52). One lead frame (90) is placed across the first electrodes (51) (51), and the other lead frame (9) is placed across the second electrodes (52) (52). The arithmetic circuit (4) calculates the impedance of the first electrode, the second electrode (51) (52), and both electrodes (51) from the first correction value and the second correction value stored in the memory (40). The impedance based on the contact resistance between (52) and the capacitor (1) is calculated, and the value obtained by subtracting each impedance from the measured value is obtained. Correction for subtracting impedance based on the first correction value is open correction, and correction for subtracting impedance based on the second correction value is short correction.

第1電極(51)(51)と第2電極(52)(52)は、装置本体(5)上に固定されているから、横方向寸法の異なるコンデンサ(1)を連続して測定する場合にも、第1電極(51)と第2電極(52)との間の浮遊容量に基づくインピーダンスは変化しない。これにより、正確なオープン補正が可能となる。
また、第1電極(51)(51)と第2電極(52)(52)は、装置本体(5)上に固定されているから、第1電極(51)(51)間、及び第2電極(52)(52)間の浮遊容量は一定になる。これにより、大金属片(46)測定時と、コンデンサ測定時の接触抵抗の誤差を無くすことができ、正確なショート補正が可能となる。
即ち、従来にあっては、4端子法を用いて測定する場合、図16に示すように、ショート補正用データ測定時及びコンデンサ測定時に、第2プローブ(82)(82)を水平に移動させている。そのため、第2プローブ(82)(82)間の浮遊容量が僅かに変化する。これにより、大金属片(46)を通る電流とその位相角と、コンデンサ(1)を通る電流とその位相角との間に誤差が発生する。そのため、ショート補正に於いて補正すべきインピーダンスも誤差が出てくる。特に、高周波領域に於いては、この問題が大きくなり、nHオーダーのESLを正確に測定することができない。
しかし、本例にあっては、第1電極(51)(51)間、及び第2電極(52)(52)間の浮遊容量が一定であるため、従来のような接触抵抗の誤差が発生しなくなり、インピーダンスが変化しない。また、ショート補正用データの測定に用いる大金属片(46)の幅と、コンデンサの幅が異なる場合であっても、接触抵抗は一定になる。
Since the first electrode (51) (51) and the second electrode (52) (52) are fixed on the device body (5), the capacitor (1) having different lateral dimensions is continuously measured. In addition, the impedance based on the stray capacitance between the first electrode (51) and the second electrode (52) does not change. Thus, accurate open correction can be performed.
Further, since the first electrodes (51) (51) and the second electrodes (52) (52) are fixed on the apparatus body (5), the first electrodes (51) (51) and the second electrodes The stray capacitance between the electrodes (52) and (52) is constant. As a result, it is possible to eliminate an error in contact resistance between the measurement of the large metal piece (46) and the measurement of the capacitor, and an accurate short circuit correction is possible.
That is, in the past, when measuring using the four-terminal method, as shown in FIG. 16, the second probes (82) and (82) are moved horizontally during short correction data measurement and capacitor measurement. ing. Therefore, the stray capacitance between the second probes (82) and (82) slightly changes. As a result, an error occurs between the current passing through the large metal piece (46) and its phase angle, and the current passing through the capacitor (1) and its phase angle. Therefore, an error also occurs in the impedance to be corrected in the short correction. In particular, in the high-frequency region, this problem becomes large, and nH order ESL cannot be accurately measured.
However, in this example, since the stray capacitance between the first electrodes (51) and (51) and between the second electrodes (52) and (52) is constant, a conventional contact resistance error occurs. Impedance does not change. Further, even when the width of the large metal piece (46) used for measuring the short correction data and the width of the capacitor are different, the contact resistance is constant.

図4は、図1の正面図である。互いに対向する第1電極(51)と第2電極(52)間には、通電時にループインダクタンスL1が発生する。出願人はこのループインダクタンスL1の影響を最小にすべく、第1電極(51)と第2電極(52)の間隔Pを1mm以下にすることを着想している。
図2及び図3に示すように、第1電極(51)と第2電極(52)は、コンデンサ(1)の陰極側リードフレーム(90)及び陽極側リードフレーム(9)の配列方向、即ち横方向に延びている。
第1電極(51)と第2電極(52)の横長さは、第1電極(51)と第2電極(52)の間隔Pよりも大きく、これにより横寸法が長いコンデンサ(1)でも安定して測定できる。
第1電極(51)と第2電極(52)は、横長さが間隔Pよりも大きければよい。従って、図5に示すように、第1電極(51)と第2電極(52)が楕円形であっても、図6に示すように、放射状に配列されてもよい。
FIG. 4 is a front view of FIG. A loop inductance L1 is generated between the first electrode (51) and the second electrode (52) facing each other when energized. The applicant has conceived that the distance P between the first electrode (51) and the second electrode (52) is 1 mm or less in order to minimize the influence of the loop inductance L1.
As shown in FIGS. 2 and 3, the first electrode 51 and the second electrode 52 are arranged in the arrangement direction of the cathode lead frame 90 and the anode lead frame 9 of the capacitor 1, that is, It extends in the lateral direction.
The lateral length of the first electrode (51) and the second electrode (52) is larger than the interval P between the first electrode (51) and the second electrode (52), so that the capacitor (1) having a long lateral dimension is stable. Can be measured.
The lateral length of the first electrode (51) and the second electrode (52) may be larger than the interval P. Therefore, as shown in FIG. 5, the first electrode 51 and the second electrode 52 may be elliptical or may be arranged radially as shown in FIG.

斯種コンデンサ(1)には、小型化に鑑みて、図7に示すように、リードフレーム(9)(90)を平板状に設け、コンデンサ素子(2)の下面とハウジング(70)の下面を接近させたものもある。
また、出願人は以前、図8に示すように、陰極側リードフレーム(90)の2箇所K、K1を露出させたコンデンサ(1)をも提案している。図7及び図8に示すように、ハウジング(70)の下面からリードフレーム(9)(90)を露出させたコンデンサ(1)にあっても、本例の測定装置は有用である。
また、本例にあっては、第1電極(51)(51)、第2電極(52)(52)は夫々2つ設けられているが、3つ以上設けてもよい。
In view of miniaturization, the capacitor (1) is provided with a lead frame (9) (90) in a flat plate shape as shown in FIG. 7, and the lower surface of the capacitor element (2) and the lower surface of the housing (70). There is also a thing which made it approach.
In addition, the applicant has previously proposed a capacitor (1) in which two portions K and K1 of the cathode side lead frame (90) are exposed as shown in FIG. As shown in FIGS. 7 and 8, the measuring apparatus of this example is useful even in the capacitor (1) in which the lead frames (9) and (90) are exposed from the lower surface of the housing (70).
In this example, two first electrodes (51) (51) and two second electrodes (52) (52) are provided, but three or more may be provided.

(第2実施例)
図14に示すコンデンサ(1)では、リードフレーム(9)(90)の下端部を内向きに折曲している。従って、図9に示すように、リードフレーム(9)(90)の折曲箇所にて、リードフレーム(9)(90)が浮き上がってしまうことがある。これでは、コンデンサ(1)の検査時に、第1電極(51)と第2電極(52)が、リードフレーム(9)(90)に接触しないから、正しく測定できない。
出願人はこの点に鑑みて、図10に示すように、第1電極(51)と第2電極(52)に夫々内側に向かって下向きに傾いた斜面(57)を設けた。斜面(57)の内側端部は、平坦面(58)に繋がる。
図10に示すように、リードフレーム(9)(90)が浮き上がたコンデンサ(1)を第1電極(51)と第2電極(52)に置くと、リードフレーム(9)(90)の折曲部Cが斜面(57)に接するから、正確にESR、ESLを測定できる。
尚、かかる第1電極(51)と第2電極(52)を具えた測定装置にて、オープン補正用データ測定を行うには、図11(a)に示す治具(75)を用いる。これは絶縁体(76)の下面両側に、平坦面(58)に置かれる小金属片(45)(45)を取り付けたものであり、該小金属片(45)は第1電極(51)(51)どうし、又は第2電極(52)(52)どうしを電気的に繋ぐ。
また、ショート補正用データ測定を行うには、図11(b)に示す治具(75a)を用いる。これは絶縁体(76)の下面に大金属片(46)を取り付けたものであり、該大金属片(45)は、平坦面(58)に載置されて、全ての第1電極(51)(45)及び第2電極(52)(52)を電気的に繋ぐ。
(Second embodiment)
In the capacitor (1) shown in FIG. 14, the lower ends of the lead frames (9) and (90) are bent inward. Therefore, as shown in FIG. 9, the lead frames (9) and (90) may be lifted at the bent portions of the lead frames (9) and (90). In this case, when the capacitor (1) is inspected, the first electrode (51) and the second electrode (52) do not come into contact with the lead frames (9) and (90), so that the measurement cannot be performed correctly.
In view of this point, the applicant provided slopes (57) inclined downward toward the inside on the first electrode (51) and the second electrode (52), respectively, as shown in FIG. The inner end of the slope (57) is connected to the flat surface (58).
As shown in FIG. 10, when the capacitor (1) with the lead frame (9) (90) floating is placed on the first electrode (51) and the second electrode (52), the lead frame (9) (90) Since the bent portion C is in contact with the inclined surface (57), ESR and ESL can be measured accurately.
Note that a jig (75) shown in FIG. 11 (a) is used in order to perform open correction data measurement with a measuring apparatus including the first electrode (51) and the second electrode (52). In this structure, small metal pieces (45) and (45) placed on the flat surface (58) are attached to both sides of the lower surface of the insulator (76), and the small metal pieces (45) are the first electrodes (51). (51) The second electrodes (52) and (52) are electrically connected to each other.
Further, in order to perform short correction data measurement, a jig (75a) shown in FIG. 11B is used. In this structure, a large metal piece (46) is attached to the lower surface of the insulator (76). The large metal piece (45) is placed on the flat surface (58) and all of the first electrodes (51) are mounted. ) (45) and the second electrode (52) (52) are electrically connected.

(第3実施例)
図12は、図7に示す下面からリードフレーム(9)(90)が露出したコンデンサ(1)を測定する装置用の第1電極(51)と第2電極(52)の正面図である。第1電極(51)と第2電極(52)上には、リードフレーム(9)(90)の下面に接する突起(56)(56)が形成されている。
図12に実線で示すように、横に長いコンデンサ(1)のESR、ESLを測定するには、突起(56)(56)にリードフレーム(9)(90)を当てる。横が短いコンデンサ(1)を測定するには、突起(56)から外れて第1電極(51)と第2電極(52)にリードフレーム(9)(90)を当てればよい。尚、突起(56)の位置は、図12に示すように、各電極(51)(52)の端に限定されない。
(Third embodiment)
FIG. 12 is a front view of a first electrode (51) and a second electrode (52) for an apparatus for measuring the capacitor (1) with the lead frame (9) (90) exposed from the lower surface shown in FIG. On the first electrode (51) and the second electrode (52), protrusions (56) and (56) are formed in contact with the lower surfaces of the lead frames (9) and (90).
As shown by the solid line in FIG. 12, in order to measure the ESR and ESL of the horizontally long capacitor (1), the lead frames (9) and (90) are applied to the protrusions (56) and (56). In order to measure the capacitor (1) having a short width, the lead frame (9) (90) may be applied to the first electrode (51) and the second electrode (52) out of the protrusion (56). The position of the protrusion (56) is not limited to the end of each electrode (51) (52), as shown in FIG.

(第4実施例)
図13は、図8に示す陰極側リードフレーム(90)の2箇所K、K1を露出させたコンデンサ(1)を測定する装置用の第1電極(51)と第2電極(52)の正面図である。第1電極(51)と第2電極(52)上には、リードフレーム(9)(90)の下面に接する突起(56)(56)が形成されており、陰極側リードフレーム(90)に接する第1電極(51)は左右に調整可能に設けられている。但し、第1電極(51)は左右に調整後に、ビス(図示せず)等にて、固定される。第1電極(51)が左右に移動可能なままであると、従来と同様に第1電極(51)(51)間の浮遊容量が変化する虞れがあるからである。
第1電極(51)を左右に調整可能とすることにより、突起(56)は陰極側リードフレーム(90)のK、K1何れにも接触することができ、測定に便利である。
(Fourth embodiment)
FIG. 13 is a front view of a first electrode (51) and a second electrode (52) for an apparatus for measuring the capacitor (1) with the two exposed portions K and K1 of the cathode side lead frame (90) shown in FIG. FIG. On the first electrode (51) and the second electrode (52), protrusions (56) and (56) that are in contact with the lower surface of the lead frame (9) and (90) are formed. The first electrode (51) in contact therewith is provided so as to be adjustable left and right. However, the first electrode (51) is fixed with screws (not shown) or the like after being adjusted left and right. This is because if the first electrode (51) remains movable to the left and right, the stray capacitance between the first electrodes (51) and (51) may change as in the prior art.
By making the first electrode (51) adjustable to the left and right, the protrusion (56) can contact both K and K1 of the cathode side lead frame (90), which is convenient for measurement.

上記実施例の説明は、本発明を説明するためのものであって、特許請求の範囲に記載の発明を限定し、或は範囲を減縮する様に解すべきではない。又、本発明の各部構成は上記実施例に限らず、特許請求の範囲に記載の技術的範囲内で種々の変形が可能であることは勿論である。   The above description of the embodiments is for explaining the present invention, and should not be construed as limiting the invention described in the claims or reducing the scope thereof. In addition, the configuration of each part of the present invention is not limited to the above-described embodiment, and various modifications can be made within the technical scope described in the claims.

本例に係わる測定装置の斜視図である。It is a perspective view of the measuring apparatus concerning this example. オープン補正用データ測定を示す平面図である。It is a top view which shows the data measurement for open correction | amendment. ショート補正用データ測定を示す平面図である。It is a top view which shows data measurement for short correction. 図1の正面図である。It is a front view of FIG. 別の第1電極、第2電極の平面図である。It is a top view of another 1st electrode and the 2nd electrode. 別の第1電極、第2電極の平面図である。It is a top view of another 1st electrode and the 2nd electrode. 別の従来の固体電解コンデンサの断面図である。It is sectional drawing of another conventional solid electrolytic capacitor. 別の従来の固体電解コンデンサの断面図である。It is sectional drawing of another conventional solid electrolytic capacitor. リードフレームが浮き上がったコンデンサの正面図である。It is a front view of the capacitor where the lead frame is lifted. 他の実施例に於ける第1電極と第2電極の正面図である。It is a front view of the 1st electrode and 2nd electrode in other examples. (a)はオープン補正用データ測定を、(b)はショート補正用データ測定を夫々示す正面図である。(a) is a front view showing open correction data measurement, and (b) is a front view showing short correction data measurement. 下面からリードフレームが露出したコンデンサを測定する装置用の第1電極と第2電極の正面図である。It is a front view of the 1st electrode and 2nd electrode for apparatuses which measure the capacitor which a lead frame exposed from the lower surface. 陰極側リードフレームの2箇所を露出させたコンデンサを測定する装置用の第1電極と第2電極の正面図である。It is a front view of the 1st electrode and 2nd electrode for apparatuses which measure the capacitor which exposed two places of the cathode side lead frame. 従来の固体電解コンデンサの断面図及び測定装置の斜視図である。It is sectional drawing of the conventional solid electrolytic capacitor, and a perspective view of a measuring device. 従来のオープン補正用データ測定を示す正面図である。It is a front view which shows the conventional data measurement for open correction | amendment. 従来のショート補正用データ測定を示す正面図である。It is a front view which shows the conventional data measurement for short correction. 大金属片にてショート補正用データ測定後に、横寸法の小さなコンデンサを測らんとする状態を示す正面図である。It is a front view which shows the state which measures a capacitor | condenser with a small horizontal dimension after measuring data for short correction with a large metal piece.

符号の説明Explanation of symbols

(1) 固体電解コンデンサ
(4) 演算回路
(5) 装置本体
(9) リードフレーム
(40) メモリ
(51) 第1電極
(52) 第2電極
(53) 押圧片
(70) ハウジング
(90) リードフレーム
(1) Solid electrolytic capacitor
(4) Arithmetic circuit
(5) Device body
(9) Lead frame
(40) Memory
(51) First electrode
(52) Second electrode
(53) Pressing piece
(70) Housing
(90) Lead frame

Claims (2)

ハウジング(70)から少なくとも陽極側及び陰極側リードフレーム(9)(90)の下面が露出したコンデンサ(1)の測定装置であって、
該測定装置本体(5)上に、各リードフレーム(9)(90)の下面に接するべき第1電極(51)、第2電極(52)を同一平面内に固定して設け、
ショート補正用のデータ測定時に、前記第1電極(51)、第2電極(52)には同一の治具が当接して電気的に繋がり、
前記測定装置本体(5)内には、前記第1電極(51)(51)どうし又は前記第2電極(52)(52)どうしを電気的に接続したオープン補正時に用いる第1補正値と、該第1電極(51)(51)及び第2電極(52)(52)の全てを電気的に接続したショート補正時に用いる第2補正値を格納しておくメモリ(40)と、コンデンサ(1)の測定時に、測定値から、第1補正値と第2補正値に基づくインピーダンスを引く演算回路(4)が設けられたコンデンサ(1)の測定装置において、
前記第1電極(51)と第2電極(52)は、夫々内側に向かって下向きに傾いた斜面(57)を有し、且つ、前記第1電極(51)および第2電極(52)の下面に略平行で、該下向きに傾いた斜面(57)に繋がる平坦面を有することを特徴とするコンデンサの測定装置。
A measuring device for a capacitor (1) in which at least the lower surfaces of an anode side and cathode side lead frames (9), (90) are exposed from a housing (70),
A first electrode (51) and a second electrode (52) to be in contact with the lower surfaces of the lead frames (9) and (90) are provided on the measuring device main body (5) in the same plane,
When measuring data for short correction, the first jig (51) and the second electrode (52) are in contact with and electrically connected to the same electrode,
In the measuring device body (5), a first correction value used for open correction in which the first electrodes (51) (51) or the second electrodes (52) (52) are electrically connected, A memory (40) for storing a second correction value used at the time of short correction in which all of the first electrodes (51) (51) and the second electrodes (52) (52) are electrically connected, and a capacitor (1 In the measuring device of the capacitor (1) provided with the arithmetic circuit (4) for subtracting the impedance based on the first correction value and the second correction value from the measurement value at the time of measurement of
The first electrode (51) and the second electrode (52) each have an inclined surface (57) inclined downward toward the inside, and the first electrode (51) and the second electrode (52) An apparatus for measuring a capacitor, characterized by having a flat surface substantially parallel to the lower surface and connected to the inclined surface (57) inclined downward .
ハウジング(70)から少なくとも陽極側及び陰極側リードフレーム(9)(90)の下面が露出したコンデンサ(1)の測定装置であって、
該測定装置本体(5)上に、各リードフレーム(9)(90)の下面に接するべき第1電極(51)、第2電極(52)を同一平面内に固定して設け、
ショート補正用のデータ測定時に、前記第1電極(51)、第2電極(52)には同一の治具が当接して電気的に繋がり、
前記測定装置本体(5)内には、前記第1電極(51)(51)どうし又は前記第2電極(52)(52)どうしを電気的に接続したオープン補正時に用いる第1補正値と、該第1電極(51)(51)及び第2電極(52)(52)の全てを電気的に接続したショート補正時に用いる第2補正値を格納しておくメモリ(40)と、コンデンサ(1)の測定時に、測定値から、第1補正値と第2補正値に基づくインピーダンスを引く演算回路(4)が設けられたコンデンサ(1)の測定装置において、
前記第1電極(51)と第2電極(52)上には、陽極側及び陰極側リードフレーム(9)(90)の下面に接する突起(56)(56)が形成され、且つ、前記第1電極(51)および第2電極(52)の下面に略平行で、該突起(56)(56)に繋がる平坦面が形成されていることを特徴とするコンデンサの測定装置。
A measuring device for a capacitor (1) in which at least the lower surfaces of an anode side and cathode side lead frames (9), (90) are exposed from a housing (70),
A first electrode (51) and a second electrode (52) to be in contact with the lower surfaces of the lead frames (9) and (90) are provided on the measuring device main body (5) in the same plane,
When measuring data for short correction, the first jig (51) and the second electrode (52) are in contact with and electrically connected to the same electrode,
In the measuring device body (5), a first correction value used for open correction in which the first electrodes (51) (51) or the second electrodes (52) (52) are electrically connected, A memory (40) for storing a second correction value used at the time of short correction in which all of the first electrodes (51) (51) and the second electrodes (52) (52) are electrically connected, and a capacitor (1 In the measuring device of the capacitor (1) provided with the arithmetic circuit (4) for subtracting the impedance based on the first correction value and the second correction value from the measurement value at the time of measurement of
It said first electrode (51) to the second electrode (52) on the projections in contact with the lower surface of the anode-side and cathode-side lead frame (9) (90) (56) (56) is formed, and the second An apparatus for measuring a capacitor, characterized in that a flat surface is formed substantially parallel to the lower surfaces of the first electrode (51) and the second electrode (52) and connected to the projections (56), (56) .
JP2005047328A 2004-02-25 2005-02-23 Measuring device for solid electrolytic capacitors Expired - Lifetime JP4115456B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005047328A JP4115456B2 (en) 2004-02-25 2005-02-23 Measuring device for solid electrolytic capacitors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004048901 2004-02-25
JP2005047328A JP4115456B2 (en) 2004-02-25 2005-02-23 Measuring device for solid electrolytic capacitors

Publications (2)

Publication Number Publication Date
JP2005274561A JP2005274561A (en) 2005-10-06
JP4115456B2 true JP4115456B2 (en) 2008-07-09

Family

ID=35174369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005047328A Expired - Lifetime JP4115456B2 (en) 2004-02-25 2005-02-23 Measuring device for solid electrolytic capacitors

Country Status (1)

Country Link
JP (1) JP4115456B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5215004B2 (en) * 2008-03-11 2013-06-19 日置電機株式会社 Insulation inspection method and insulation inspection apparatus
TWI409469B (en) * 2008-09-05 2013-09-21 Hon Hai Prec Ind Co Ltd Testing device and testing method
JP2015010983A (en) * 2013-07-01 2015-01-19 日置電機株式会社 Impedance measurement device
JP2015021909A (en) * 2013-07-23 2015-02-02 日置電機株式会社 Impedance measuring device
JP2015117971A (en) * 2013-12-17 2015-06-25 新電元工業株式会社 Impedance measuring apparatus and impedance measuring method
JP7100465B2 (en) * 2017-02-28 2022-07-13 信越ポリマー株式会社 Evaluation device and evaluation method
CN115963322A (en) * 2021-10-13 2023-04-14 中车株洲电力机车研究所有限公司 Capacitor stray inductance test method and system
JPWO2024201700A1 (en) * 2023-03-28 2024-10-03

Also Published As

Publication number Publication date
JP2005274561A (en) 2005-10-06

Similar Documents

Publication Publication Date Title
JP4115456B2 (en) Measuring device for solid electrolytic capacitors
JP6414389B2 (en) Inspection jig, substrate inspection apparatus, and substrate inspection method
DE60329218D1 (en) LIFE DETECTION BY FOUR-POINT MEASUREMENT OF THE COMPLEX IMPEDANCE
US4497699A (en) Method of treating foil for electrolytic capacitors
EP1642121B1 (en) Drift compensation for an impedimetric exhaust gas sensor by variable bias voltage
US7839151B2 (en) Solid electrolytic capacitor inspection device and inspection method
US5502375A (en) Method and apparatus for determining orientation of polarized capacitors
JP5338084B2 (en) Capacitor inspection device and inspection method using the same
JP7077481B2 (en) Mass spectrometer and mass spectrometry method
US20060164793A1 (en) Solid electrolytic capacitor
JP2018071999A (en) Measuring probe
JPS60253209A (en) Method for continuously monitoring the thickness of oxide formed on aluminum foil for electrolytic capacitors
EP4585945A1 (en) Correction device and correction method for correcting initial value of impedance spectrum measurement device
US12510579B2 (en) Contactless DC electric-field sensor
JP2018204987A (en) Resistance value measuring jig and resistance value measuring device
JP6035519B2 (en) ELECTROLYTIC CAPACITOR ELECTRICAL CHARACTERISTIC JIG FOR MEASURING ELECTRIC CAPACITOR, MEASURING DEVICE PROVIDED WITH THE JIG, AND ELECTROLYTIC CAPACITOR MEASURING METHOD
Dreiner et al. Growth Mechanism of Thin Anodic Oxide Films on Tantalum: I. Self‐Anodization Using an External Load Resistor
TWI905382B (en) Voltage measuring device
JPH07181070A (en) Electrode and liquid level measuring device
DE102008042254A1 (en) Capacitive filling level sensor for determining filling level of aqueous urea solution for denitrification of exhaust gases of internal combustion engine, has electrically non-conductive layer covering electrodes in fluid switching region
JP2001021598A (en) Four-wire type characteristic measuring apparatus
SU769310A1 (en) Method of calibrating electrochemical thickness meters
KR200239287Y1 (en) Probe
TWI400457B (en) A device and method of extracting the dielectric constant of material
WO2021054103A1 (en) Electric resistance measurement device, electric resistance measurement method, and electric resistance calculation device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060718

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070702

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070731

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071001

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080318

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080415

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110425

Year of fee payment: 3

R151 Written notification of patent or utility model registration

Ref document number: 4115456

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110425

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120425

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130425

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140425

Year of fee payment: 6

EXPY Cancellation because of completion of term