JP4223666B2 - Plating equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a plating apparatus, particularly preferably a sealed high-speed plating apparatus.
[0002]
[Prior art]
Conventionally, as shown in FIG. 4, a plating tank 2 having an opening 1 at the top is used, and as a transport mechanism, a rail (not shown) extending in a direction perpendicular to the paper surface of FIG. 4 above the plating tank 2. ) And a hanger (both not shown) that suspends the workpiece W on a jig and moves these hangers horizontally with a pusher or the like. The workpiece W is immersed in the plating solution 4 in the plating chamber 3. The soluble anode 5 is composed of an anode case 6, a metal piece 7, and an anode bag 8, and a hook 9 provided in the anode case 6 is provided on a power supply bar 10 installed at a position slightly away from the inner surface of the side wall of the plating tank 2. Engaging from above, the individual anodes 5 can therefore be easily removed upwards. An anode bag 8 is provided outside the anode case 6 to prevent slime (mucus) and dust from the metal piece 7 of the anode 5 from adhering to the object (workpiece W) during the plating operation. A large diaphragm 11 extending in a direction perpendicular to the paper surface of FIG. 4 is provided between the substrate and the anode 5 so that the anode chamber 12 and the plating chamber 3 are separated from each other, and the plating solution in the anode chamber 12 is extracted through the flow path 13. Thus, the slime and dust are removed from the plating solution in the anode chamber 12.
[0003]
However, there were the following disadvantages.
{Circle around (1)} Impurities such as dust generated by the transport mechanism above the opening 1 and dust in the atmosphere enter the plating solution 4 and the plating film quality is inevitably deteriorated due to adhesion of impurities to the object to be plated.
(2) The diaphragm 11 is generally hydrophobic, and when it is installed in a plating apparatus, it must be treated in advance so that it can easily pass through the liquid by using alcohol. Take it.
(3) In high-speed plating, since processing is performed at a high current density, more slime is generated from the anode 5, and even if the liquid is extracted from the entire anode chamber 12 isolated by the diaphragm 11, the slime The dust cannot be removed, and the replacement of the diaphragm 11, the cleaning, the replacement of the anode bag 8, the cleaning, etc. are advanced, or the anode 5 is contaminated, and the metal piece 7 of the anode 5 is not sufficiently dissolved.
[0004]
[Problems to be solved by the invention]
An object of the present invention is to eliminate the need for a diaphragm that is troublesome to attach and detach, and to reduce the frequency of maintenance of the anode and facilitate the maintenance of the anode so that it can cope with processing at a particularly high current density. Yes.
[0005]
[Means for Solving the Problems]
The invention of claim 1 includes a bottomed inner anode bag (38) capable of passing a slime (36) through an anode case (6) having an open upper end that stands up against a work (W) in a plating tank (16) . covered with the inner anode bag (38) with respect to spaced intervals and dissolved metal (33) and plating solution (4) was passed through slime (34) to pass a narrow end paddle outer anode bag only (36), an inner anode The bag (36) has a side surface and a bottom surface that have different roughness, so that the slime does not easily come out from the side surface portion of the inner anode bag (38) and the slime easily comes out from the bottom surface portion. (36) A plating apparatus in which the drain hole (22) at the bottom is connected to the plating tank (16) through a pump (P) and a filter (F) .
[0006]
The invention according to claim 2 is the plating apparatus according to claim 1, wherein at least an upper end portion of the outer anode bag is secured to the anode case.
[0007]
The invention of claim 3, was placed a separator to prevent adhesion to the inner Anodoba' grayed outer anode bag inside the outer anode bag, a plating apparatus according to claim 1.
[0008]
A fourth aspect of the present invention is the plating apparatus according to the third aspect, wherein the separator has an upward opening cup-shaped liquid.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
1 is a longitudinal front view of a plating apparatus according to the present invention corresponding to FIG. 4, FIG. 2 is a partially enlarged schematic view of FIG. 1, and the same reference numerals as those in FIG. 4 indicate the same or corresponding members. The plating tank 16 in FIG. 1 is closed at the upper end by a removable lid 17 (a sealed plating tank for high-speed plating), and the lid 17 is provided with an anode metal inlet 18 immediately above the upper end opening of the anode case 6. The inlet 18 is closed by a left hinge type lid 19, for example. A number of inlets 18 are provided at intervals of, for example, 10 to 20 cm in a direction perpendicular to the paper surface of FIG. The bottom plate 20 of the plating tank 16 is provided with a drain hole 23 into which the drain cylinder 22 at the lower end of the anode 21 according to the present invention is fitted, and this drain hole 23 is connected to the suction port of the pump P via the flow path 24. Are connected to a header 26 at the bottom of the plating chamber 3 through a flow path 25 having a filter F in the middle, and a plurality of right and left injection nozzles 27 standing from the header 26 are respectively formed on the left and right side surfaces of the workpiece W. Oriented. The window lid 28 is a window lid on the side wall of the plating tank used for maintenance of the anode 21, and the auxiliary storage tank 29 accommodates the plating solution overflowing from a hole not shown when the plating solution level 30 exceeds the illustrated level. This auxiliary storage tank 29 is connected to a storage tank 31, and the storage tank 31 is connected to the header 26 via a flow path 32 having a pump P1 and a filter F1.
[0010]
As shown in FIG. 2, the anode case 6 is a net-like titanium cylinder having a coarse mesh. As shown in FIG. 3, the molten metal 33 (circle mark) from the metal piece 7 and the slime 34 and dust floating in the liquid (square mark). And a strength allowing the plating solution to pass freely and a strength capable of withstanding the gravity of the metal piece 7. The inner anode bag 38 is a bottomed bag formed of, for example, polypropylene non-woven fabric, ordinary cloth, etc., and allows free passage of the molten metal 33 (circle) and the slime 34 and dust (squares) floating in the liquid. It has an acceptable roughness. The roughness of the inner anode bag 38 is, for example, about 5 to 50 cc / cm ² / sec. The net 35 is a cup-shaped member disposed so as to function as a separator for preventing the close contact between the inner anode bag 38 and the outer anode bag 36. It is possible to adopt a liquid flowable type such as a plastic tube formed of a large number of plastic rods. The outer anode bag 36 is a fine polypropylene nonwoven fabric (for example, 0 to 5 cc / cm ² / sec, preferably ^{2 to 5} cc / cm ² / sec) that allows only the molten metal 33 (circle) and the plating solution to pass through, A nut 39 made of an ordinary cloth and having a bottom center hole 37 (FIG. 2) fitted into the resin drain tube 22 at the bottom center of the net 35 and screwed into the thick male screw portion 22a of the drain tube 22. Is fastened to the lower surface of the bottom plate of the net 35. FIG. 2 shows a step in the middle of screwing the nut 39 upward. The material and weaving method of the inner anode bag 38 and the outer anode bag 36 are not limited to the above, and for example, acrylic can be used for polyethylene, Tetron, or electro nickel plating.
[0011]
The upper end portion 36a of the outer anode bag 36 extends upward beyond the upper end portion of the net 35 as shown in FIG. 2, and the outer peripheral surface of the anode case 6 together with the inner anode bag 38 by a fastener tape 40 (trade name: Velcro tape) or a string. Thus, the anode 21 is integrated.
[0012]
Reference numeral 42 in FIG. 1 denotes a conveyance mechanism, which has a function of holding both sides of the lower end edge of a work W (for example, a printed circuit board) with an opposing belt conveyor (not shown) and driving horizontally in a direction perpendicular to the paper surface of FIG. Either Japanese Patent Application Laid-Open No. 7-316890 “vertical transfer device for printed circuit board” or Japanese Patent Application Laid-Open No. 7-323909 “Lower end support transfer device for vertical plate” of the present applicant can be adopted. Further, the workpiece W enters the plating chamber 3 through, for example, a slide seal (not shown) on the front side wall of FIG. 1 and goes out of the plating tank 16 through a slide seal (not shown) on the back side of FIG. It is supplied to the next cleaning tank, for example.
[0013]
During the plating operation, the power supply bar 10 (plus power source) is connected to the metal piece 7 through the hook 9 and the anode case 6. On the other hand, the workpiece W is connected to a minus power feeding mechanism in the transport mechanism 42 and is transported by the transport mechanism 42 in a direction perpendicular to the paper surface of FIG. In the meantime, in the portion of the anode 21 in FIG. 3, the flow of the plating solution as shown by the thick arrow with hatching is generated by the suction force of the pump P, and the molten metal 33 (circle) from the metal piece 7 is the anode case 6, The workpiece W is sucked in the direction of the workpiece W through the anode bag 38, the net 35, and the outer anode bag 36, and is plated on the workpiece W. Slime 34 and dust (square marks) floating in the liquid coming out of the metal piece 7 pass through the anode case 6, the inner anode bag 38, and the net 35, and do not go out of the outer anode bag 36, After being suctioned by the pump P through the passage 24, pressurized and filtered by the filter F, the fluid is supplied from the spray nozzle 27 to the entire left and right side surfaces of the workpiece W through the passage 25 and the header 26. The slime 41 (triangular mark in FIG. 3) that comes out of the metal piece 7 and does not float in the liquid settles on the bottom of the anode case 6. In FIG. 3, 44 is a precipitated slime. The plating solution in the storage tank 31 of FIG. 1 is also supplied to the header 26 from the flow path 32 having the pump P1 and the filter F1, and the liquid level 30 of FIG. Although not shown in FIG. 3, a liquid flow is also generated through the bottom portion of the inner anode bag 38, and in this case, a part of the precipitated slime 44 is melted and sucked into the drain cylinder 22. In order to enhance the slime removing effect, the roughness of the side surface and the bottom surface of the inner anode bag 38 may be varied. For example, the side portion: 8 cc / cm ² / sec and the bottom portion: 29 cc / cm ² / sec. This makes it difficult for the slime to come out from the side surface, lowers the probability of adhering to the workpiece, makes it easier for the slime to go out from the bottom surface near the drain hole, and improves the slime removal efficiency. The suction amount of the liquid from the outer anode bag 36 is preferably 2 to 20 L / min. If it is less than 2 L / min, slime cannot be removed sufficiently. In addition, if it exceeds 20 L / min, the liquid level in the outer / inner anode bags 36 and 38 is lowered, the upper part of the substrate is exposed, the plating cannot be applied, the film thickness is reduced, and the voltage in the plating tank is increased. .
[0014]
For example, once every 3 to 4 days, the lid 19 is opened and a predetermined amount of the metal piece 7 is supplied into the anode case 6. Once every few months, the lid 17 is opened, the anode 21 is pulled upward, and the components are cleaned and replaced. Alternatively, the window lid 28 is opened, the anode 21 is removed, and the components are cleaned and replaced.
[0015]
In carrying out the present invention, the inner anode bag 38 may be omitted. However, as shown in the figure, the inner anode bag 38 is adopted and the eyes are made slightly fine so that a part of the slime (for example, 1 (About / 5) is preferable because it can be expected that the filtration efficiency is improved to some extent and the maintenance period of the filter F can be extended. In general, a filter is more expensive than an anode bag, and the cost is high when the frequency of replacement of the filter is high. However, by taking the above consideration into the inner anode bag 38, the frequency of removal of the anode is reduced and the filter is removed. It is possible to prevent the frequency of replacement from becoming extremely high. Further, when the outer anode bag 36 can be formed as a filter element (in the form of an air cleaner element for an engine) that is substantially circular when viewed from above and is bent in a substantially radial direction, the distance is maintained as in the net 35. No separator is required. Further, when the inner anode bag 38 and the outer anode bag 36 are formed so as to be able to hold an upright state as shown by a solid line in FIG. 2, a securing means such as the fastener tape 40 is not necessary. Become. It is natural that the water permeability of the outer anode bag 36 is designed so as not to cause a conduction failure due to the liquid level in the anode being lowered by the suction force of the pump.
[0016]
【The invention's effect】
According to the invention of claim 1, since the diaphragm is not used, maintenance such as desorption of the diaphragm and pretreatment with alcohol becomes unnecessary. Since the slime 34 and dust are likely to come out from the anode case 6, the liquid around the metal piece 7 of the anode becomes a fresh liquid, and sufficient dissolution of the metal piece 7 is promoted. Further, since the outer anode bag 36 prevents the slime and dust from entering the plating solution 4 and prevents the slime and dust from adhering to the object to be plated (work W), the plating quality is improved. In particular, in high-speed plating, since processing is performed at a high current density, more slime is generated from the anode. However, liquid is extracted from one or one of the anodes 21 and impurities are filtered through a filter F. Since it is returned to the plating chamber 3 of the plating tank 16, the slime removal efficiency can be improved, the frequency of maintenance of the anode 21 can be reduced, and the anode can be easily maintained. Practical application of plating equipment becomes possible. By easily go out slime from at different side portions and a bottom portion of the mesh size of the inner side anode bag 38 hardly go out slime from the side surface of the inner anode bag 38 bottom part, the anode casing As a result, it is possible to increase the removal efficiency of the slime not only in the precipitated slime 44 of 6 but also in the side surface portion of the inner anode bag 38. As shown in the figure, when the inner anode bag 38 is adopted and the eyes are made slightly fine so that a part of the slime (for example, about 1/5) is captured, a certain degree of improvement in filtration efficiency can be expected. The maintenance period of F can be extended, which is preferable. In general, a filter is more expensive than an anode bag, and the cost is high when the frequency of replacement of the filter is high. However, by taking the above consideration into the inner anode bag 38, the frequency of removal of the anode is reduced and the filter is removed. It is possible to prevent the frequency of replacement from becoming extremely high.
[0017]
According to the second aspect of the present invention, the covering posture of the outer anode bag 36 can be reliably maintained during the plating operation, and this brings about an advantage that the slime removal efficiency can be kept high for a long period of time. Moreover, it becomes easy to attach and detach the anode 21 as an integral member.
[0018]
According to the invention of claim 3, even when negative pressure is applied to the bottom of the outer anode bag 36 from the pump P, the outer anode bag 36 contracts to the outer peripheral surface of the anode case 6 (inner anode bag 38 in the embodiment). It is possible to reliably prevent a decrease in filtration function due to adhesion.
[0019]
According to the invention of claim 4, the liquid having a circulation such as the net 35 functions as a separator having a simple structure.
[Brief description of the drawings]
FIG. 1 is a longitudinal front view of a plating apparatus according to the present invention.
FIG. 2 is a partially enlarged schematic view of FIG. 1;
FIG. 3 is an operation explanatory diagram.
FIG. 4 is a longitudinal front view of a conventional plating apparatus.
[Explanation of symbols]
6 Anode case 16 Plating tank 33 Molten metal 34 Slime 35 Net 36 Outside anode bag 37 Drain hole 40 Fastener tape F Filter P Pump W Workpiece

Claims (4)

A bottomed inner anode bag (38) through which the slime (36) can be passed through an anode case (6) having an open upper end that stands up against the work (W ) in the plating tank (16) , and the inner anode bag (38). covered with spaced intervals and dissolve metal (33) and plating solution (4) was passed through fine paddle outer anode bags have a through slime (34) only (36) with respect to the side surface of the inner anode bag (38) The bottom of the outer anode bag (36) is made to be less likely to come out of the side face of the inner anode bag (38) and more difficult to come out of the bottom face. A plating apparatus, wherein the hole (22) is connected to the plating tank (16) through a pump (P) and a filter (F) . The plating apparatus according to claim 1, wherein at least an upper end portion of the outer anode bag (36) is secured to the anode case (6) . The plating apparatus according to claim 1, wherein a separator for preventing the outer anode bag (36) from sticking to the inner anode bag ( 38) is disposed inside the outer anode bag (36) .   The plating apparatus according to claim 3, wherein the separator has a cup-shaped liquid circulation.

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