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JP4246085B2 - High Al content ferritic stainless steel sheet for weight detection sensor substrate, manufacturing method thereof, and weight detection sensor - Google Patents
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JP4246085B2 - High Al content ferritic stainless steel sheet for weight detection sensor substrate, manufacturing method thereof, and weight detection sensor - Google Patents

High Al content ferritic stainless steel sheet for weight detection sensor substrate, manufacturing method thereof, and weight detection sensor Download PDF

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JP4246085B2
JP4246085B2 JP2004039879A JP2004039879A JP4246085B2 JP 4246085 B2 JP4246085 B2 JP 4246085B2 JP 2004039879 A JP2004039879 A JP 2004039879A JP 2004039879 A JP2004039879 A JP 2004039879A JP 4246085 B2 JP4246085 B2 JP 4246085B2
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stainless steel
detection sensor
weight detection
crystallized glass
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益啓 深谷
唯志 小森
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Nippon Steel Stainless Steel Corp
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本発明は、自動車エアバッグの重量検知センサー基板用高Al含有フェライト系ステンレス鋼板およびその製造方法ならびに重量検知センサーに関するものである。   The present invention relates to a high Al content ferritic stainless steel sheet for a weight detection sensor substrate of an automobile airbag, a manufacturing method thereof, and a weight detection sensor.

自動車には乗員の安全を確保するための設備としてシートベルトやエアバッグが備えられる。最近では、シートベルトやエアバッグの性能をより向上させるため、乗員の重量(体重)に合わせてそれらの安全設備の動作をコントロールしようという動向がある。例えば、乗員の体重に合わせて、エアバッグの展開ガス量や展開速度を調整したり、シートベルトのプリテンションを調整したりする。そのためには、シートに座っている乗員の重量を何らかの手段で知る必要がある。そのような手段の一例として、シートレールの4隅に荷重センサー(ロードセル)を配置して、ロードセルにかかる垂直方向荷重を合計することにより乗員の重量を含むシート重量を計測する、との提案がなされている(特許文献1)。   Automobiles are equipped with seat belts and airbags as equipment for ensuring the safety of passengers. Recently, in order to further improve the performance of seat belts and airbags, there is a trend to control the operation of these safety equipment according to the weight (weight) of the occupant. For example, the deployment gas amount and deployment speed of the airbag are adjusted according to the weight of the occupant, and the pretension of the seat belt is adjusted. For that purpose, it is necessary to know the weight of the passenger sitting on the seat by some means. As an example of such means, there is a proposal that the load sensor (load cell) is arranged at the four corners of the seat rail and the seat weight including the weight of the occupant is measured by totaling the vertical loads applied to the load cell. (Patent Document 1).

荷重、圧力等を検出する力学量センサーは、基板の種類、抵抗素子に用いる感歪み材料の種類によってさまざまなものが提案されている。その代表的なものとして、(1)ポリエステル、エポキシ、ポリイミド等の樹脂からなるフィルムを基板とし、この表面にCu−Ni合金、Ni−Cr合金等からなる薄膜状の抵抗素子を蒸着またはスパッタリングにより形成したもの、(2)上記の樹脂製フィルムの代りにガラスプレートを用いたもの(特許文献2)、および(3)表面を結晶化ガラス層で被覆した金属基材を基板とし、この表面にペーストを塗布、焼成して抵抗素子を形成したもの(特許文献3)が提案されている。   Various mechanical quantity sensors for detecting loads, pressures, and the like have been proposed depending on the type of substrate and the type of strain-sensitive material used for the resistance element. As a typical example, (1) a film made of a resin such as polyester, epoxy, polyimide or the like is used as a substrate, and a thin film resistance element made of a Cu—Ni alloy, Ni—Cr alloy or the like is formed on this surface by vapor deposition or sputtering. The formed substrate, (2) a substrate using a glass plate instead of the above resin film (Patent Document 2), and (3) a metal substrate whose surface is coated with a crystallized glass layer is used as a substrate, A material in which a resistive element is formed by applying and baking a paste (Patent Document 3) has been proposed.

力学量の大きさは、次のようにして測定される。外部からの力や荷重が力学量センサーに加わると、基板とともに、その表面に形成された抵抗素子が変形する。抵抗素子の長さおよび断面積の変化による電気抵抗の変化を、抵抗素子に接続して形成された一対の電極間で測定することにより、加わった力学量を検出するものである。表面に結晶化ガラス層を形成した金属基材を基板に用いた力学量センサーは、他の方式と異なり、金属基材と結晶化ガラス層、および結晶化ガラス層と抵抗素子の間でそれぞれの成分元素が相互拡散しているため、それらの間の密着性が強く、過酷な環境条件で使用するセンサーとしては最適である。この種の力学量センサーの抵抗素子として、抵抗材料である酸化ルテニウムを含有する抵抗ペーストを塗布、乾燥・焼成して形成したものが知られている。   The magnitude of the mechanical quantity is measured as follows. When an external force or load is applied to the mechanical quantity sensor, the resistance element formed on the surface of the substrate is deformed together with the substrate. The applied mechanical quantity is detected by measuring a change in electrical resistance due to a change in the length and cross-sectional area of the resistance element between a pair of electrodes formed connected to the resistance element. Unlike other methods, the mechanical quantity sensor using a metal substrate with a crystallized glass layer formed on the surface as a substrate differs between the metal substrate and the crystallized glass layer and between the crystallized glass layer and the resistive element. Since the component elements are interdiffused, the adhesion between them is strong, making it ideal as a sensor for use in harsh environmental conditions. As a resistance element of this type of mechanical quantity sensor, one formed by applying, drying and firing a resistance paste containing ruthenium oxide as a resistance material is known.

力学量センサーに用いる金属基材は、ホーロ鋼、ステンレス鋼、珪素鋼、ニッケル−クロム−鉄、ニッケル−鉄、コバール、インバーなどの各種合金材やそれらのクラッド材などが選択される。特許文献4には、金属基材としてステンレス鋼板を使用する技術が開示されている。特許文献5には、金属基材として絶縁ガラス層との密着性の観点よりSUS430を使用する技術が開示されている。特許文献3には、金属基材をガラス層との膨張率を整合させる必要があることから、具体的にはSUS430とする技術が開示されている。   As the metal substrate used for the mechanical quantity sensor, various alloy materials such as horo steel, stainless steel, silicon steel, nickel-chromium-iron, nickel-iron, kovar, and invar, and clad materials thereof are selected. Patent Document 4 discloses a technique of using a stainless steel plate as a metal substrate. Patent Document 5 discloses a technique of using SUS430 as a metal substrate from the viewpoint of adhesion with an insulating glass layer. Since it is necessary to match the expansion coefficient of a metal base material with a glass layer in patent document 3, the technique made into SUS430 is specifically disclosed.

しかしながら、上記従来技術の金属基材では、ガラス密着性および焼成時の高温耐酸化性が不十分であり、実用化されていなかった。センサー基板がステンレス鋼板であり、絶縁ガラス層や抵抗素子、電極の各層が、焼成により固化されていることが好ましい(概念図を図1に示す)。従って、各層を高温で焼成する際にセンサー部材も一緒に焼成することができる高耐熱性でかつガラス密着性の優れたステンレス鋼が強く要望されていた。   However, the metal substrate of the above prior art has not been put into practical use because of insufficient glass adhesion and high-temperature oxidation resistance during firing. It is preferable that the sensor substrate is a stainless steel plate, and each layer of the insulating glass layer, the resistance element, and the electrode is solidified by firing (a conceptual diagram is shown in FIG. 1). Therefore, there has been a strong demand for stainless steel with high heat resistance and excellent glass adhesion that can be fired together with the sensor member when firing each layer at a high temperature.

特開平11−304579号公報JP-A-11-304579 特公平3−20682号公報Japanese Patent Publication No. 3-20682 特開平5−93659号公報JP-A-5-93659 特開2000−180255号公報JP 2000-180255 A 特開平10−38733号公報Japanese Patent Laid-Open No. 10-38733

センサーの基盤であるステンレス鋼に、絶縁層である結晶化ガラス層、感歪み抵抗素子および電極の各層の焼成により固化する際に、金属機材とガラス層の密着性を向上するために両者の線膨張係数を整合させる必要がある。焼成は900℃以下で実施されることから、室温近傍の他、20〜900℃の線膨張係数が近似していることが必要である。平均線膨張係数の差が大きいと、金属基材と結晶化ガラス層との密着性が著しく低下するため、抵抗素子の基盤として機能しない。一般的に用いられている結晶化ガラスの平均線膨張係数は13〜16×10-6/℃であるのに対し、従来用いられていたステンレス鋼の平均線膨張係数は13×10-6/℃程度であり、ステンレス鋼基材とガラス層との線膨張係数の差が大きすぎ、十分なガラス密着性を実現することができなかった。 In order to improve the adhesion between the metal equipment and the glass layer when solidified by firing each layer of the crystallized glass layer, the strain sensitive resistance element, and the electrode, which is the insulating layer, to the stainless steel that is the base of the sensor, The expansion coefficient needs to be matched. Since firing is performed at 900 ° C. or lower, it is necessary that the linear expansion coefficient of 20 to 900 ° C. is approximated in addition to the vicinity of room temperature. When the difference in the average linear expansion coefficient is large, the adhesion between the metal substrate and the crystallized glass layer is remarkably lowered, so that it does not function as the base of the resistance element. The average linear expansion coefficient of the crystallized glass which is generally used while a 13~16 × 10 -6 / ℃, the average linear expansion coefficient of the conventionally used stainless steel 13 × 10 -6 / The difference in linear expansion coefficient between the stainless steel substrate and the glass layer was too large, and sufficient glass adhesion could not be realized.

本発明は、自動車エアバッグ重量検知センサー基板用の金属基材として最適なステンレス鋼を提供することにより、結晶化ガラス層との焼結時の高温耐酸化性を改善するとともにガラス層との密着性を向上することを目的としている。   The present invention improves the high-temperature oxidation resistance during sintering with the crystallized glass layer and provides close contact with the glass layer by providing an optimum stainless steel as a metal base material for a vehicle airbag weight detection sensor substrate. The purpose is to improve performance.

本発明はこの目的のため、成分、製造方法、線膨張係数、高温耐酸化性を検討した結果、完成したものであり、金属基材にTi,Zrを含有する高Al含有フェライト系ステンレス鋼板を適用することが、このような目的に合致することを見出したものである。その要旨とするところは以下の通りである。   For this purpose, the present invention has been completed as a result of examining the components, the production method, the linear expansion coefficient, and the high-temperature oxidation resistance. A high Al content ferritic stainless steel sheet containing Ti and Zr in a metal substrate is obtained. It has been found that application meets such a purpose. The gist is as follows.

すなわち、本発明の目的は、下記(1)〜(6)に記載の高Al含有フェライト系ステンレス鋼板、およびその製造方法により達成されるものである。
(1)質量%で、
C:0.025%以下、
N:0.025%以下、
C+N:0.030%以下
Cr:12〜30%、
Al:2.5〜8%、
Zr:0.02〜0.2%を含有し、残部がFeおよび不可避的不純物よりなることを特徴とする重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。
(2)さらにLa:0.01〜0.20%、REM:0.01〜0.20%の1種以上を含有することを特徴とする(1)に記載の結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。
(3)20から900℃の平均線膨張係数が、13.5〜15.5×10-6/℃であることを特徴とする(1)または(2)に記載の結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。
(4)当該ステンレス鋼板と重量検知センサ−用結晶化ガラスの20から900℃までの平均線膨張係数の差が10%未満であることを特徴とする(1)から(3)のいずれかに記載の結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。
(5)前記ステンレス鋼板の酸化皮膜厚さが0.38μm未満であることを特徴とする(1)から(4)のいずれかに記載の結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。
(6)(1)から(4)のいずれかに記載の高Al含有フェライト系ステンレス鋼板を所望の形状に打ち抜き加工し、続いて800〜900℃で20〜120分の結晶化ガラスの密着焼成熱処理を行うことを特徴とする結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板の製造方法。
(7)(1)から(5)のいずれかに記載の高Al含有フェライト系ステンレス鋼板からなる重量検知センサー基板と、前記基板表面に被覆した結晶化ガラス層と、前記結晶化ガラス層の表面に形成された感歪み抵抗素子と、前記感歪み抵抗素子の電気抵抗変化を検出する一対の電極で構成されていることを特徴とする重量検知センサー。
That is, the object of the present invention is achieved by the high Al-containing ferritic stainless steel sheet described in (1) to (6) below and a method for producing the same.
(1) In mass%,
C: 0.025% or less,
N: 0.025% or less,
C + N: 0.030% or less Cr: 12-30%,
Al: 2.5-8%,
A high Al-containing ferritic stainless steel sheet for a weight detection sensor substrate, comprising Zr: 0.02 to 0.2 % , the balance being Fe and inevitable impurities.
(2) The crystallized glass layer according to (1), further comprising at least one of La: 0.01 to 0.20% and REM: 0.01 to 0.20% , strain sensitive A high Al content ferritic stainless steel sheet for a weight detection sensor substrate provided with a resistance element .
(3) The crystallized glass layer according to (1) or (2), wherein the average linear expansion coefficient from 20 to 900 ° C. is 13.5 to 15.5 × 10 −6 / ° C. A high Al content ferritic stainless steel sheet for a weight detection sensor substrate provided with a strain resistance element .
(4) The difference in average linear expansion coefficient from 20 to 900 ° C. between the stainless steel plate and the crystallized glass for weight detection sensor is less than 10%, according to any one of (1) to (3) A high Al-containing ferritic stainless steel sheet for a weight detection sensor substrate comprising the crystallized glass layer described above and a strain sensitive resistance element .
(5) The weight detection sensor comprising the crystallized glass layer and the strain sensitive resistance element according to any one of (1) to (4), wherein the stainless steel plate has an oxide film thickness of less than 0.38 μm. High Al content ferritic stainless steel sheet for substrates.
(6) The high Al content ferritic stainless steel sheet according to any one of (1) to (4) is punched into a desired shape, and then the close contact firing of the crystallized glass at 800 to 900 ° C. for 20 to 120 minutes. A method for producing a high Al content ferritic stainless steel sheet for a weight detection sensor substrate comprising a crystallized glass layer and a strain sensitive resistance element, characterized by performing a heat treatment.
(7) A weight detection sensor substrate comprising the high Al-containing ferritic stainless steel plate according to any one of (1) to (5), a crystallized glass layer coated on the substrate surface, and a surface of the crystallized glass layer And a pair of electrodes for detecting a change in electric resistance of the strain-sensitive resistor element.

本発明の高Al含有フェライト系ステンレス鋼板は、ガラス密着性と高温耐酸化性に優れた自動車エアバッグ重量検知センサー基板用材料であり、絶縁層を密着させるセンサー基板材に必須の技術であり、その工業的価値は著しく大なるものである。   The high Al content ferritic stainless steel sheet of the present invention is a material for an automobile airbag weight detection sensor substrate excellent in glass adhesion and high-temperature oxidation resistance, and is an essential technology for a sensor substrate material that adheres an insulating layer, Its industrial value is remarkably great.

本発明の限定理由を以下に詳細に説明する。   The reason for limitation of the present invention will be described in detail below.

本発明者は、ステンレス鋼の成分、製造方法、線膨張係数および高温耐酸化性を検討した結果完成したものであり、金属基材にTiまたはZrを含有する高Al含有フェライト系ステンレス鋼板を適用することでガラス密着性に優れた自動車エアバッグ重量検知センサー基板用材料を提供するものである。   The present inventor was completed as a result of examining the components, manufacturing method, linear expansion coefficient and high-temperature oxidation resistance of stainless steel, and applied a high Al content ferritic stainless steel sheet containing Ti or Zr as a metal substrate. Thus, an automotive airbag weight detection sensor substrate material having excellent glass adhesion is provided.

まず、本発明が対象とするステンレス鋼の各成分範囲の限定理由を述べる。   First, the reasons for limiting each component range of the stainless steel targeted by the present invention will be described.

C、N:C、Nは0.025%を超えて存在すると、冷間圧延素材である熱間圧延鋼帯の靱性を低下させ材料の製造性、すなわち冷間圧延性を劣化させるため、それぞれ0.025%以下とし、C+Nの総量で、0.03%以下とする。好ましい範囲は、 C,Nそれぞれ0.010%以下、C+Nの総量で、0.010%以下である。   C, N: When C and N are present in excess of 0.025%, the toughness of the hot-rolled steel strip, which is a cold-rolled material, is reduced and the manufacturability of the material, that is, the cold-rollability is deteriorated. 0.025% or less, and the total amount of C + N is 0.03% or less. A preferable range is 0.010% or less for each of C and N, and a total amount of C + N is 0.010% or less.

Cr:Crはステンレス鋼の耐熱性もしくは高温耐酸化性を確保する最も基本的な元素である。本発明においては、12%未満ではこれらの特性が十分に確保されず、一方30%を超えて含有すると、特に熱間圧延鋼帯の靱性や延性が著しく低下し材料の製造性を劣化させる。従って、Crの成分範囲は12〜30%とした。好ましい範囲は、15〜16%である。   Cr: Cr is the most basic element that ensures the heat resistance or high temperature oxidation resistance of stainless steel. In the present invention, when the content is less than 12%, these characteristics are not sufficiently ensured. On the other hand, when the content exceeds 30%, the toughness and ductility of the hot-rolled steel strip are particularly lowered and the manufacturability of the material is deteriorated. Therefore, the Cr component range is 12-30%. A preferred range is 15-16%.

Al:Alは、フェライト系ステンレス鋼の高温耐酸化性や電気比抵抗を著しく向上させる元素であると同時に、Al含有量が多くなるに従い線膨張係数が大きくなる。したがって、本発明においては、主にAl質量%を調整した合金設計により、種々の線膨張係数の結晶化ガラス層に対しても線膨張係数を近似・整合させることができる。図2に室温(20℃)〜900℃の平均線膨張係数のCr−Alマップを示す。平均線膨張係数はCr含有量に依存せず、ほぼAl含有量のみに依存することがわかる。図3にAl含有量と平均線膨張係数との関係を示す。室温(20℃)〜900℃の平均線膨張係数/(10-6/℃)の近似式は、8質量%Al以上では12.8+0.28*(Al質量%)で、8質量%Al超では2.9+1.4*(Al質量%)で表現できる。この元素が2.5%以下では高温耐酸化性が不十分である。一方、8%を超えて含有すると平均線膨張係数が急増するとともに、熱間圧延鋼帯の靭性が著しく低下し材料の製造性を劣化させる。従って、Alの成分範囲は2.5〜8%とした。好ましい範囲は、 4〜6%である。 Al: Al is an element that significantly improves high-temperature oxidation resistance and electrical resistivity of ferritic stainless steel, and at the same time, the linear expansion coefficient increases as the Al content increases. Therefore, in the present invention, the linear expansion coefficient can be approximated and matched even for crystallized glass layers having various linear expansion coefficients by the alloy design in which Al mass% is mainly adjusted. FIG. 2 shows a Cr—Al map of an average linear expansion coefficient from room temperature (20 ° C.) to 900 ° C. It can be seen that the average linear expansion coefficient does not depend on the Cr content, but substantially depends only on the Al content. FIG. 3 shows the relationship between the Al content and the average linear expansion coefficient. The approximate expression of the average linear expansion coefficient from room temperature (20 ° C.) to 900 ° C./(10 −6 / ° C.) is 12.8 + 0.28 * (Al mass%) at 8 mass% Al or more, and more than 8 mass% Al. Then, it can be expressed by 2.9 + 1.4 * (Al mass%). If this element is 2.5% or less, the high-temperature oxidation resistance is insufficient. On the other hand, if the content exceeds 8%, the average linear expansion coefficient increases rapidly, and the toughness of the hot-rolled steel strip is remarkably lowered, which deteriorates the manufacturability of the material. Therefore, the Al component range is set to 2.5 to 8%. A preferred range is 4-6%.

Ti:Tiはフェライト系ステンレス鋼の高温耐酸化性向上に効果的で、酸化皮膜の密着性を向上させる元素である。0.02%以上のTi含有量でこの効果を発揮させることができる。しかし、過剰のTi添加は熱間圧延鋼帯の靱性を低下し、材料の製造性を劣化させる。特に、0.2%を超えると靭性の劣化が著しい。従って、成分範囲を0.02〜0.2%以下とした。好ましい範囲は、0.04〜0.10%である。   Ti: Ti is an element effective in improving the high-temperature oxidation resistance of ferritic stainless steel and improving the adhesion of the oxide film. This effect can be exhibited with a Ti content of 0.02% or more. However, excessive Ti addition reduces the toughness of the hot rolled steel strip and degrades the manufacturability of the material. In particular, when it exceeds 0.2%, the toughness is significantly deteriorated. Therefore, the component range is set to 0.02 to 0.2% or less. A preferable range is 0.04 to 0.10%.

Zr:ZrはTiと同様の効果があり、フェライト系ステンレス鋼の高温耐酸化性向上に効果的で、酸化皮膜の密着性を向上させる元素である。0.02%以上のZr添加でこの効果を発揮させることができる。しかし、過剰のZr添加は耐酸化性を劣化させると同時に、熱間圧延鋼帯の靱性を低下し、材料の製造性も劣化させる。特に0.2%を超えると靱性の劣化が著しい。従って、成分範囲を0.2%以下にした。好ましい範囲は、0.05〜0.15%である。   Zr: Zr is an element that has the same effect as Ti, is effective in improving the high-temperature oxidation resistance of ferritic stainless steel, and improves the adhesion of the oxide film. This effect can be exhibited by addition of 0.02% or more of Zr. However, excessive addition of Zr deteriorates the oxidation resistance and at the same time reduces the toughness of the hot-rolled steel strip and deteriorates the manufacturability of the material. In particular, when it exceeds 0.2%, the toughness is significantly deteriorated. Therefore, the component range is set to 0.2% or less. A preferable range is 0.05 to 0.15%.

La,REM:La,REMは本発明においては選択的に添加することができる。REMはLa,Ce、Pr、Ndの混合物で、各単独元素に未精製のものである。アルミナ酸化皮膜の密着性向上に極めて効果的で、高温耐酸化性向上に有効な元素である。0.01%以上のLaまたはREMの添加でこの効果を発揮させることができる。しかし、過剰のLa、REMの添加は耐酸化性を劣化させると同時に、粒界に液相を形成し熱間加工性を低下させ、材料の製造性を劣化させる。従って、成分範囲を0.20%以下にした。好ましい範囲は、0.03〜0.10%である。   La, REM: La, REM can be selectively added in the present invention. REM is a mixture of La, Ce, Pr, and Nd, and is unpurified for each single element. It is an element that is extremely effective in improving the adhesion of alumina oxide film and effective in improving high-temperature oxidation resistance. This effect can be exhibited by addition of 0.01% or more of La or REM. However, the addition of excess La and REM deteriorates oxidation resistance, and at the same time, forms a liquid phase at the grain boundary to reduce hot workability, thereby deteriorating material manufacturability. Therefore, the component range is set to 0.20% or less. A preferable range is 0.03 to 0.10%.

次に、本発明が対象とするステンレス鋼について述べる。本発明の高Al含有フェライト系ステンレス鋼板と重量検知センサー基板用結晶化ガラスの20から900℃までの平均線膨張係数の差が10%未満である。センサーの基材であるステンレス鋼に、絶縁層である結晶化ガラス層、感歪み抵抗素子および電極の各層を焼成により固化する際に、金属基材とガラス層の密着性を向上するために両者の線膨張係数を整合させる必要がある。焼成は900℃以下で実施されることから、室温近傍の他、20〜900℃の線膨張係数が近似していることが望まれる。平均線膨張係数の差が10%超の場合は、金属基材と結晶化ガラス層との密着性が著しく低下するため、抵抗素子の基盤として機能しない。一般的に用いられている結晶化ガラスの平均線膨張係数は13〜16×10-6/℃である。 Next, the stainless steel targeted by the present invention will be described. The difference in average linear expansion coefficient from 20 to 900 ° C. between the high Al content ferritic stainless steel plate of the present invention and the crystallized glass for weight detection sensor substrate is less than 10%. In order to improve the adhesion between the metal substrate and the glass layer when the crystallized glass layer, the strain sensitive resistance element and the electrode layer, which are insulating layers, are solidified by firing on the stainless steel which is the sensor substrate, both It is necessary to match the linear expansion coefficient. Since the firing is performed at 900 ° C. or less, it is desirable that the linear expansion coefficient of 20 to 900 ° C. is approximated in addition to the vicinity of room temperature. When the difference in average linear expansion coefficient is more than 10%, the adhesion between the metal substrate and the crystallized glass layer is remarkably lowered, so that it does not function as the base of the resistance element. Generally used crystallized glass has an average linear expansion coefficient of 13 to 16 × 10 −6 / ° C.

本発明の高Al含有フェライト系ステンレス鋼板の20〜900℃の平均線膨張係数は、13.5〜15.5×10-6/℃であることが好適である。線膨張係数αの定義式はLT=L20(1+αT)である。ここで、L20:20℃での長さ、LT:温度Tでの長さである。本発明の高Al含有フェライト系ステンレス鋼板においては、20〜900℃が13.5×10-6/℃未満および15.5×10-6/℃超では、結晶化ガラス層との密着性が確保されない。 The average coefficient of linear expansion of 20 to 900 ° C. of the high Al content ferritic stainless steel sheet of the present invention is preferably 13.5 to 15.5 × 10 −6 / ° C. The defining formula of the linear expansion coefficient α is L T = L 20 (1 + αT). Here, L 20: length at 20 ℃, L T: is the length of the temperature T. In the high Al content ferritic stainless steel sheet of the present invention, when the 20 to 900 ° C. is less than 13.5 × 10 −6 / ° C. and more than 15.5 × 10 −6 / ° C., the adhesion to the crystallized glass layer is low. Not secured.

本発明の高Al含有フェライト系ステンレス鋼板は、熱間圧延鋼帯をデスケーリングの後冷間圧延し、続いて焼鈍およびデスケーリングを施した、冷延焼鈍板である。   The high Al content ferritic stainless steel sheet of the present invention is a cold-rolled annealed sheet obtained by cold rolling a hot-rolled steel strip followed by annealing and descaling.

本発明の高Al含有フェライト系ステンレス鋼板の冷延焼鈍板を所望の形状に打ち抜き加工した後、ガラス層との焼成が行われる。焼成条件は800〜900℃で20〜120分である。800℃未満ではステンレス鋼板とガラス層との相互拡散不足のため密着性が不十分である。一方900℃超ではガラス層の耐熱性が不足する。なお焼成時間は複数回の熱処理の合計時間である。20分未満では相互拡散不足のため密着性が不十分である。一方120分超では酸化の進行によりサブミクロン厚さの酸化皮膜が形成されるため、いわゆるテンパーカラーが着色し、耐テンパーカラー性が劣化する。センサーとしての特性に直接的な影響は無いが、ステンレス鋼表面の金属光沢が消失する。   After the cold-rolled annealed sheet of the high Al content ferritic stainless steel sheet of the present invention is punched into a desired shape, it is fired with a glass layer. Firing conditions are 800 to 900 ° C. and 20 to 120 minutes. If it is less than 800 ° C., the adhesiveness is insufficient due to insufficient mutual diffusion between the stainless steel plate and the glass layer. On the other hand, if it exceeds 900 ° C., the heat resistance of the glass layer is insufficient. The firing time is the total time of a plurality of heat treatments. If it is less than 20 minutes, the adhesion is insufficient due to insufficient mutual diffusion. On the other hand, if it exceeds 120 minutes, an oxide film having a submicron thickness is formed by the progress of oxidation, so that the so-called temper color is colored and the temper color resistance is deteriorated. There is no direct effect on the sensor characteristics, but the metallic luster on the stainless steel surface disappears.

本発明においては、結晶化ガラス層との焼成処理で形成された酸化皮膜厚さは0.38μm未満である。0.38μm超では可視光の波長(0.38μm〜0.78μm)に相当するため、青緑色等の干渉色が形成される。0.38μm以下の場合には干渉色は形成されず耐テンパーカラー性に優れている。   In the present invention, the thickness of the oxide film formed by the baking treatment with the crystallized glass layer is less than 0.38 μm. If it exceeds 0.38 μm, it corresponds to the wavelength of visible light (0.38 μm to 0.78 μm), so an interference color such as blue-green is formed. In the case of 0.38 μm or less, no interference color is formed and the temper color resistance is excellent.

本発明の自動車エアバッグ重量検知センサーは、高Al含有フェライト系ステンレス鋼板の金属基材からなる基板(1)と、前記基板表面に被覆した結晶化ガラス層(2)と、前記結晶化ガラス層の表面に形成された感歪み抵抗素子(4)と、前記感歪み抵抗素子の電気抵抗変化を検出する一対の電極(3)で構成されていることを特徴とする重量検知センサー(図1)である。高Al含有フェライト系ステンレス鋼基板は結晶化ガラス層(2)との密着性が良好であるため、金属基板(1)、結晶化ガラス層(2)、電極(3)および感歪み抵抗素子(4)の焼成処理を同時に行うことができるかまたは焼成処理の回数を減らすことができる。   The automobile airbag weight detection sensor of the present invention includes a substrate (1) made of a metal base material of a high Al content ferritic stainless steel plate, a crystallized glass layer (2) coated on the substrate surface, and the crystallized glass layer. A weight detection sensor comprising a strain sensitive resistor element (4) formed on the surface of the substrate and a pair of electrodes (3) for detecting a change in electrical resistance of the strain sensitive resistor element (FIG. 1) It is. Since the high Al content ferritic stainless steel substrate has good adhesion to the crystallized glass layer (2), the metal substrate (1), the crystallized glass layer (2), the electrode (3), and the strain sensitive resistance element ( The baking process of 4) can be performed simultaneously or the number of baking processes can be reduced.

以下、実施例で本発明を具体的に説明する。   Hereinafter, the present invention will be specifically described with reference to Examples.

(実施例1)
転炉AOD法あるいは真空溶解法により表1に示す成分の高Al含有フェライト系ステ
ンレス鋼を溶製した。これらの鋼の表面を手入れした後、熱間圧延終了温度880℃〜9
00℃で熱間圧延し、熱間圧延巻き取り温度400℃〜750℃で巻き取り、水冷により
冷却し、板厚5mmおよび3.8mmの熱延鋼帯とした。続いてショットおよび酸洗によ
るデスケーリングの後、冷間圧延して板厚3mmおよび2mmとした。続いて920℃で
焼鈍し、さらにソルト処理および酸洗によりデスケーリングして冷延鋼板を製造した。そ
の後、所望の形状に打ち抜き加工し、850℃で40分の結晶化ガラスの密着焼成熱処理
を実施した。結晶化ガラスの平均線膨張係数は14.5×10-6/℃のものを用いた。
Example 1
High Al content ferritic stainless steels having the components shown in Table 1 were melted by the converter AOD method or the vacuum melting method. After cleaning the surface of these steels, the hot rolling end temperature is 880 ° C to 9 ° C.
Hot rolled at 00 ° C., wound at a hot rolling coiling temperature of 400 ° C. to 750 ° C., cooled by water cooling, and formed into a hot rolled steel strip having a thickness of 5 mm and 3.8 mm. Subsequently, after descaling by shot and pickling, cold rolling was performed to obtain plate thicknesses of 3 mm and 2 mm. Subsequently, it was annealed at 920 ° C., and further descaled by salt treatment and pickling to produce a cold-rolled steel sheet. Thereafter, it was punched into a desired shape and subjected to an adhesion firing heat treatment of the crystallized glass at 850 ° C. for 40 minutes. Crystallized glass having an average linear expansion coefficient of 14.5 × 10 −6 / ° C. was used.

なお 評価試験は下記の方法で実施した。   The evaluation test was carried out by the following method.

成分は鋼板から試験片をサンプリングして成分分析を行った。C、S、Nについてはガス分析法(Nは不活性ガス溶融−熱伝導測定法で、C、Sは酸素気流中燃焼−赤外線吸収法)で、その他の元素については蛍光X線分析装置(SHIMADZU、MXF−2100)で実施した。   The components were analyzed by sampling a test piece from the steel plate. For C, S, N, gas analysis method (N is inert gas melting-heat conduction measurement method, C, S is oxygen gas combustion-infrared absorption method), and other elements are fluorescent X-ray analyzers ( SHIMADZU, MXF-2100).

製造性(冷間加工性)の評価は、JIS規格に準拠したサブサイズ(厚み5mmまたは3.8mm)のVノッチシャルピー試験片を圧延方向と平行に採取し衝撃試験を行い、衝撃値が2kgf/cm2になる温度(vT2:℃)で評価した。vT2が90℃超の場合には、たとえボックス焼鈍炉等の加熱装置で事前に予備加熱を実施しても、冷間圧延を行うと衝撃等による板破断の危険性が極めて高くなり、実質的に冷間圧延不可であるため、×とした。 Evaluation of manufacturability (cold workability) was conducted by taking an impact test by taking a V-notch Charpy test piece of subsize (thickness 5 mm or 3.8 mm) compliant with the JIS standard in parallel with the rolling direction, and an impact value of 2 kgf Evaluation was made at a temperature (vT2: ° C.) at which / cm 2 is reached. When vT2 exceeds 90 ° C., even if preheating is performed in advance using a heating apparatus such as a box annealing furnace, the risk of sheet breakage due to impact or the like becomes extremely high when cold rolling is performed, which is substantially Since it cannot be cold-rolled, it was set as x.

高温耐酸化性の評価は、#400の番手で表面研磨したサンプルを用い大気中900℃×120分後の酸化増量で評価した。酸化増量が0.2mg/cm2以下の場合を○、0.2mg/cm2超の場合を×で示した。比較例のNo.13(サンプル記号13)はCrが請求項下限値をはずれ、比較例のNo.15(サンプル記号15)はAlが請求項下限値をはずれ、いずれも耐酸化性が劣っている。 Evaluation of high-temperature oxidation resistance was performed by using a sample whose surface was polished with a # 400 count and an oxidation increase after 900 ° C. for 120 minutes in the atmosphere. A case where the increase in oxidation was 0.2 mg / cm 2 or less was indicated by ◯, and a case where the increase in oxidation was more than 0.2 mg / cm 2 was indicated by x. Comparative Example No. No. 13 (sample symbol 13) shows that Cr is outside the lower limit of the claims, and No. of the comparative example. No. 15 (sample symbol 15) is inferior in oxidation resistance because Al is outside the lower limit of the claims.

線膨張係数は、ISO規格の試験方法で実施し、室温(20℃)〜900℃の温度範囲での平均線膨張係数を評価した。平均線膨張係数が13.5〜15.5×10-6/℃の範囲のものを○、13.5×10-6/℃未満又は15.5×10-6/℃超のものを×で示した。本発明例においては、高Al含有フェライト系ステンレス鋼板と重量検知センサー基板用結晶化ガラスの20から900℃までの平均線膨張係数の差が10%以内である。 The linear expansion coefficient was measured by an ISO standard test method, and an average linear expansion coefficient in a temperature range of room temperature (20 ° C.) to 900 ° C. was evaluated. The average coefficient of linear expansion ○ those range of 13.5~15.5 × 10 -6 / ℃, 13.5 × 10 -6 / ℃ or less than 15.5 × 10 -6 / ° C. greater × ones It showed in. In the present invention example, the difference in average linear expansion coefficient from 20 to 900 ° C. between the high Al content ferritic stainless steel sheet and the crystallized glass for weight detection sensor substrate is within 10%.

ガラス密着性の評価は、テープ引き剥し試験JIS H 8504(めっきの密着性試験方法)で評価した。結晶化ガラス層が剥離したものを×、剥離しなかったものを○で示した。本発明の成分の金属基材は、ガラス密着性が大いに改善されている。比較例のNo.15(サンプル記号15)はAl含有量が本発明範囲下限以下であり、ガラス密着性が不良であった。   The glass adhesion was evaluated by a tape peeling test JIS H 8504 (plating adhesion test method). The case where the crystallized glass layer was peeled off was indicated by ×, and the case where the crystallized glass layer was not peeled was indicated by ○. The metal substrate of the component of the present invention has greatly improved glass adhesion. Comparative Example No. No. 15 (sample symbol 15) had an Al content below the lower limit of the range of the present invention and poor glass adhesion.

Figure 0004246085
Figure 0004246085

(実施例2)
表1のサンプル記号1(No.1)のサンプルについて、表2に示す条件で焼成熱処理を行った。結晶化ガラスの平均線膨張係数は実施例1と同じ14.5×10-6/℃のものを用いた。
(Example 2)
The sample of sample symbol 1 (No. 1) in Table 1 was subjected to a firing heat treatment under the conditions shown in Table 2. The average linear expansion coefficient of the crystallized glass was 14.5 × 10 −6 / ° C. as in Example 1.

皮膜厚さの測定は、GDS(グロー放電発光分光分析法)を使用した。装置はJOBIN YVON社製(仏)JY5000RF−PSS型で、測定領域は4mmφである。スパッタ速度は、日本鉄鋼標準試料JSS652−13を250秒間放電した後の深さで求めた。校正試料は、日本鉄鋼標準試料JSS652−13、JSS171−1、JSS1001−1等の4種類を用いた。   The film thickness was measured using GDS (Glow Discharge Emission Spectroscopy). The apparatus is a JY5000RF-PSS type manufactured by JOBIN YVON (France), and the measurement area is 4 mmφ. The sputter speed was determined by the depth after discharging the Japanese steel standard sample JSS65-13 for 250 seconds. Four types of calibration samples such as Japanese steel standard samples JSS65-13, JSS171-1, and JSS1001-1 were used.

耐テンパーカラー性は可視光の色の着色有無を目視で判断した。   Temper color resistance was determined by visual observation of the presence or absence of a visible light color.

参考例No.1および、No.25は本発明の焼成条件を採用したものであり、ガラス密着性、耐テンパーカラー性ともに優れている。比較例No.26は焼成温度が上限を外れ、ガラス密着性、皮膜厚さ、耐テンパーカラー性のいずれも不良であった。比較例No.27は焼成時間が上限を外れ、皮膜厚さ、耐テンパーカラー性が不良であった。比較例No.28は焼成時間が下限を外れ、ガラス密着性が不良であった。比較例No.29は焼成温度が下限を外れ、ガラス密着性が不良であった。 Reference Example No. 1 and no. No. 25 employs the firing conditions of the present invention and is excellent in both glass adhesion and temper color resistance. Comparative Example No. In No. 26, the firing temperature deviated from the upper limit, and the glass adhesion, film thickness, and temper color resistance were all poor. Comparative Example No. In No. 27, the firing time exceeded the upper limit, and the film thickness and temper color resistance were poor. Comparative Example No. In No. 28, the firing time deviated from the lower limit, and the glass adhesion was poor. Comparative Example No. In No. 29, the firing temperature was outside the lower limit, and the glass adhesion was poor.

Figure 0004246085
Figure 0004246085

本発明は、自動車エアバッグ重量検知センサー基板用材料に適用可能な技術である。   The present invention is a technology applicable to a material for an automobile airbag weight detection sensor substrate.

本発明の力学量センサーの概念図である。It is a conceptual diagram of the mechanical quantity sensor of this invention. 室温(20℃)〜900℃における平均線膨張係数のCr−AlマップCr-Al map of average linear expansion coefficient from room temperature (20 ° C) to 900 ° C 室温(20℃)〜900℃におけるAl含有量と平均線膨張係数の関係Relationship between Al content and average linear expansion coefficient at room temperature (20 ° C) to 900 ° C

符号の説明Explanation of symbols

1 高Al含有フェライト系ステンレス鋼板からなる金属基材
2 結晶化ガラス層
3 電極
4 感歪み抵抗素子
5 ボルト孔
1 Metal substrate made of high Al content ferritic stainless steel sheet
2 Crystallized glass layer
3 electrodes
4 strain sensitive resistance elements
5 Bolt hole

Claims (7)

質量%で、
C:0.025%以下、
N:0.025%以下、
C+N:0.030%以下
Cr:12〜30%、
Al:2.5〜8%、
Zr:0.02〜0.2%を含有し、残部がFeおよび不可避的不純物よりなることを特徴とする結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。
% By mass
C: 0.025% or less,
N: 0.025% or less,
C + N: 0.030% or less Cr: 12-30%,
Al: 2.5-8%,
High Al content ferritic stainless steel for weight detection sensor substrate comprising crystallized glass layer, strain sensitive resistance element, characterized in that it contains Zr: 0.02 to 0.2 % , the balance being Fe and inevitable impurities steel sheet.
さらにLa:0.01〜0.20%、REM:0.01〜0.20%の1種以上を含有することを特徴とする請求項1に記載の結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。 The crystallized glass layer and the strain sensitive resistance element according to claim 1, further comprising at least one of La: 0.01 to 0.20% and REM: 0.01 to 0.20%. high Al-containing ferritic stainless steel sheet for weight detection sensor substrate provided. 20から900℃の平均線膨張係数が、13.5〜15.5×10-6/℃であることを特徴とする請求項1または2に記載の結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。 3. The crystallized glass layer and the strain sensitive resistance element according to claim 1, wherein an average linear expansion coefficient from 20 to 900 ° C. is 13.5 to 15.5 × 10 −6 / ° C. High Al content ferritic stainless steel sheet for weight detection sensor substrate. 当該ステンレス鋼板と重量検知センサ−用結晶化ガラスの20から900℃までの平均線膨張係数の差が10%未満であることを特徴とする請求項1から3のいずれかに記載の結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。 Crystallized glass of any of claims 1 to 3, wherein the difference in average linear expansion coefficient from crystallizing 20 of the glass up to 900 ° C. is less than 10% - the stainless steel plate and the weight detection sensor High Al content ferritic stainless steel sheet for weight detection sensor substrate comprising layers and strain sensitive resistance elements . 前記ステンレス鋼板の酸化皮膜厚さが0.38μm未満であることを特徴とする請求項1から4のいずれかに記載の結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板。 The thickness of the oxide film of the stainless steel plate is less than 0.38 μm, and the high Al content for a weight detection sensor substrate comprising a crystallized glass layer and a strain sensitive resistance element according to any one of claims 1 to 4 Ferritic stainless steel sheet. 請求項1から4のいずれかに記載の高Al含有フェライト系ステンレス鋼板を所望の形状に打ち抜き加工し、続いて800〜900℃で20〜120分の結晶化ガラスの密着焼成熱処理を行うことを特徴とする結晶化ガラス層、感歪み抵抗素子を備える重量検知センサー基板用高Al含有フェライト系ステンレス鋼板の製造方法。 The high Al content ferritic stainless steel sheet according to any one of claims 1 to 4 is punched into a desired shape, and subsequently subjected to an adhesion firing heat treatment of crystallized glass at 800 to 900 ° C for 20 to 120 minutes. A method for producing a high Al content ferritic stainless steel sheet for a weight detection sensor substrate comprising a crystallized glass layer and a strain sensitive resistance element . 請求項1から5のいずれかに記載の高Al含有フェライト系ステンレス鋼板からなる重量検知センサー基板と、前記基板表面に被覆した結晶化ガラス層と、前記結晶化ガラス層の表面に形成された感歪み抵抗素子と、前記感歪み抵抗素子の電気抵抗変化を検出する一対の電極で構成されていることを特徴とする重量検知センサー。   A weight detection sensor substrate comprising the high Al-containing ferritic stainless steel plate according to any one of claims 1 to 5, a crystallized glass layer coated on the surface of the substrate, and a feeling formed on the surface of the crystallized glass layer. A weight detection sensor comprising a strain resistance element and a pair of electrodes for detecting a change in electrical resistance of the strain sensitive resistance element.
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