JP4338936B2 - Sealing and heating device for FPD - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an improvement in a sealing heating apparatus for FPD (Flat Panel Display) for sealing a first substrate and a second substrate to which film forming materials are fixed in different patterns.
[0002]
[Prior art]
In recent years, FPDs such as PDP (Plasma Display Panel) or FED (Field Emission Display) have been put into practical use as a new display for replacing CRT. Such an FPD is characterized in that a thin structure can be realized as compared with a conventional display such as a cathode ray tube, and is suitably used for, for example, a wall-mounted television or a multimedia display. In particular, the PDP is easy to increase in size, is relatively light in weight, and is excellent in earthquake resistance. Therefore, the PDP is the next generation in the field of relatively large display displays such as 40 inches or more. It is considered to be mainstream, and further development is ongoing for the purpose of improving quality and yield.
[0003]
In manufacturing such an FPD, first, in a film forming process, for example, a metal material or an inorganic material is formed on a glass substrate component represented by soda glass or a ceramic substrate represented by alumina. The film itself is fixed repeatedly in the form of a film by melting, softening, melting, or sintering of the material itself, and a film that generates a predetermined function such as an anode or a cathode is formed. In the film formation step, films having different patterns are formed on the first substrate as the front surface and the second substrate as the back surface when used as a display for display. After the first substrate and the second substrate on which the film having a predetermined function is formed are bonded to each other by a sealing material containing an organic solvent in a subsequent sealing heating step, for example, roller hearth skin The organic solvent is burned out by heating in a heating apparatus such as the above, and the sealing material is melted and sintered, whereby the first substrate and the second substrate are sealed together. .
[0004]
However, in the manufacture of a relatively large FPD such as 40 inches or more, for example, in the film forming process or the sealing heating process, dimensional fluctuation due to thermal expansion / contraction of the substrate material itself becomes a problem. In particular, in the sealing heating process, distortion generated in the substrate material due to the dimensional variation causes damage to the substrate. In such a case, since both the first substrate and the second substrate must be discarded, the yield is increased. Decrease significantly. For this reason, in such a sealing heating process, strict temperature management is performed in order to minimize the temperature gradient in the substrate material when the temperature is raised or lowered.
[0005]
As the conventional sealing heating device used in the above-mentioned sealing heating process, there are many by a continuous conveyance method in which a continuous curvilinear heat curve is formed, and as much as possible with such a continuous conveyance type sealing heating device. In order to heat and heat many substrates, it is necessary to increase the speed at which the substrates are conveyed, that is, to shorten the tact time. However, as described above, since strict temperature control is required for the sealing heating process, a sealing heating device is used to increase the substrate conveyance speed and minimize the temperature gradient in the substrate material. It is necessary to lengthen the furnace length, and a large site is required. Furthermore, the conventional continuous transfer method has a problem that a temperature gradient is generated in the traveling direction of the substrate, and it is difficult to obtain a uniform temperature distribution in the substrate.
[0006]
As means for solving such a problem, there is an invention of a method and apparatus for baking a substrate containing a film forming material described in the specification of Japanese Patent No. 3011366. According to this invention, the substrate including the film forming material is soaked for a predetermined time at the first set temperature in the first soaking process in the course of the heat treatment, and then the first set temperature in the transport process. Since it is transported to a second heating chamber maintained at a second set temperature that differs by a predetermined value and is soaked for a predetermined time at the second set temperature in the second soaking step, the inside of the substrate containing the film forming material Temperature variation is made as small as possible, and the manufacturing yield is dramatically increased even with fine patterns and large substrates.
[0007]
[Problems to be solved by the invention]
However, although the method and apparatus for firing a substrate including such a film forming material have significant advantages compared to a general continuous conveyance type heating apparatus, it is a strict requirement for the sealing heating process. In order to realize temperature control, the problem that the furnace length inevitably became long was left. Therefore, the present inventors have intensively studied to realize an improvement for shortening the furnace length without impairing the advantages relating to the temperature gradient in the substrate during firing in the firing apparatus according to the above invention.
[0008]
The present invention has been made against the background of the above circumstances, and the object of the present invention is to seal the FPD with a short furnace length and the temperature gradient in the substrate as small as possible. It is to provide a heating device.
[0009]
[Means for Solving the Problems]
In order to achieve such an object, the gist of the present invention is an FPD sealing heating apparatus for sealing a first substrate and a second substrate, at least one of which is made of glass, with a furnace A plurality of furnace chambers divided over the entire length of the main body and individually temperature controlled, a plurality of shut-off doors provided between the adjacent furnace chambers, and independently provided on the inner wall of each furnace chamber A heater that is individually temperature controlled, a transport device for transporting the plurality of first and second substrates in one direction, a substrate lifting device provided at one end in the furnace length direction, and sealing A transport path provided on the lower side of the furnace body for transporting the heated substrate in a direction opposite to the transport direction at the time of sealing heating, and the transport device includes the plurality of furnace chambers. Of the plurality of first and second substrates respectively heated at All, while being intermittently conveyed every predetermined time in synchronization to a plurality of furnace chamber adjacent to each of the one direction from the plurality of furnace chamber, a substrate that has been subjected to sealing heated by the substrate lifting device It is sent to the said conveyance path, It is characterized by the above-mentioned.
[0010]
【The invention's effect】
In this way, the furnace body is divided over the entire length by the plurality of shut-off doors, and the plurality of furnace chambers that are individually temperature controlled by the heaters provided independently are provided. , since the first substrate and the second substrate, after being heated at a predetermined time stopping state in each furnace chamber, by the conveying device, it is successively conveyed from the furnace chamber into the furnace chamber adjacent to said one direction, In addition to the fact that a temperature gradient in the one direction on the first substrate and the second substrate hardly occurs, all of the plurality of the first substrate and the second substrate are transferred in synchronization. Also, a substrate lifting device provided at one end of the furnace body in the furnace length direction, and the furnace body in order to transport the substrate subjected to the sealing heating in a direction opposite to the conveying direction during the sealing heating. The substrate is provided with a conveyance path provided on the lower side, and the substrate that has been subjected to the sealing heating is sent to the conveyance path by the substrate lifting device to lower the temperature. With this configuration, the furnace length of the FPD sealing heating apparatus can be reduced to 1/2 to 2/3 as compared with the conventional one. That is, it is possible to provide a sealed heating apparatus for FPD that can suppress the temperature gradient in the first substrate and the second substrate as small as possible and has a short furnace length.
[0011]
Other aspects of the invention
Preferably, the transport device is a plurality of ceramic rollers that are rotated about respective axis centers. In this way, since there is no sliding of the belt that causes dust generation, for example, compared with conveyance by a belt conveyor or the like, the furnace of the FPD sealing heating apparatus is kept clean while the first There is an advantage that the one substrate and the second substrate can be suitably transported in the one direction.
[0012]
【Example】
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
[0013]
FIG. 1 is a schematic diagram for explaining a structure of a main part by cutting an FPD sealing heating apparatus 10 according to an embodiment of the present invention in the furnace length direction. As shown in the figure, the FPD sealing heating apparatus 10 includes a furnace body 12 having a longitudinal tunnel shape and a plurality of blocking doors S ₁ , S ₂ ... Provided perpendicular to the longitudinal direction of the furnace body 12. _-Sn (hereinafter, simply referred to as a shut-off door S unless otherwise distinguished) and a plurality of furnace chambers R in which the furnace body 12 is divided by the plurality of shut-off doors S over its entire length and individually temperature-controlled. ₁ , R ₂ ... R _n (hereinafter simply referred to as furnace chamber R when not particularly distinguished) and a plurality of first and second substrates (hereinafter simply referred to as substrate 14) in one direction indicated by arrow D Are provided with a plurality of ceramic rollers 16 that are rotated about their respective axes and a substrate lifting device 18 provided at one end in the furnace length direction. In the present embodiment, the plurality of ceramic rollers 16 correspond to a conveying device. A transport path 20 is provided below the furnace body 12 for transporting the substrate 14 subjected to the sealing heating in a direction opposite to the transport direction during the sealing heating.
[0014]
The furnace body 12 is composed of a furnace core tube (muffle) made of stainless steel or heat-resistant glass, which is covered with a heat insulating material such as a heat-insulating refractory or glass wool, and is installed on the lower side thereof. The frame 22 is supported in a horizontal state. The ceramic roller 16 is made of ceramics such as alumina, and the furnace body 12 is supported in the width direction while being supported by the furnace body 12 at both ends in the furnace body 12. They are provided so as to pass through and to be parallel to each other. The substrate 14 is supported by the ceramic roller 16 in the furnace body 12. When the servo motor 24 fixed to the frame 22 is driven, the rotation is transmitted to the plurality of ceramic rollers 16 via the chain 26. Thus, when the plurality of ceramic rollers 16 are rotated, the substrate 14 is conveyed in one direction along with the rotation. Here, the plurality of servo motors 24 are controlled and centralized by, for example, the electronic control unit 100, so that all of them are driven and stopped synchronously.
[0015]
FIG. 2 is a cross-sectional view taken along the line II-II in FIG. As shown in this figure, a plate-like base member 28 is fixed to the frame 22, and the base member 28 is parallel to a servo motor 30 for opening and closing the blocking door S. A pair of rails 32 are also provided. An elevating member 34 is fitted on the pair of rails 32, and the elevating member 34 is connected to the blocking door S by a pair of arm members 36 provided in parallel to each other. The pair of arm members 36 is provided in a state of being inserted into a hole 38 formed through the lower portion of the furnace body 12. The chain 40 having an annular shape with its ends fixed to the upper and lower portions of the elevating member 34 is engaged with a motor sprocket 42 of the servo motor 30 and a sprocket 44 provided on the frame 22. Further, the shut-off door S has a width dimension substantially the same as the opening 46 of the furnace body 12, and is a pair of fixings that shut off from the lower end of the opening 46 to a predetermined height that does not reach the upper end of the ceramic roller 16. It is provided in a state sandwiched between the blocking plates 48. In FIG. 2, for the sake of simplification, the front fixed blocking plate 48 is not drawn toward the drawing.
[0016]
In such a configuration, when the servo motor 30 is driven, the rotation is transmitted to the elevating member 34 through the motor sprocket 42, the chain 40, and the sprocket 44 as a driving force for vertical movement, and the elevating member 34 is moved up and down along the pair of rails 32. When the elevating member 34 is moved up and down, the blocking door S connected to the elevating member 34 via the arm member 36 is moved up and down, and the blocking door S is opened and closed. In FIG. 2, the solid line indicates the state where the blocking door S is positioned at the upper end, that is, the state where the blocking door S is closed, and the thin two-dot chain line indicates the state where the blocking door S is positioned at the lower end, that is, the blocking door S is opened. Indicates the state. Here, the plurality of servo motors 30 are controlled and centralized by the electronic control unit 100, for example, so that all of them are driven and stopped synchronously. As described above, when the shut-off door S is opened and closed, communication / blocking between the adjacent furnace chambers R is appropriately performed.
[0017]
Here, the blocking door S and the fixed blocking plate 48 are made of, for example, liquid crystallized glass or a material having excellent heat insulation properties such as a ceramic sintered body such as alumina, silica, and mullite. In addition, by blocking between the adjacent furnace chambers R by the fixed blocking plate 48, thermal interference between the furnace chambers R can be reduced as much as possible. As described above, the plurality of furnace chamber R, the furnace respectively of the furnace chamber R ₁ to the inner wall of the body 12, R ₂ · · · R _n heating provided independently to the heater H _1, H ₂ · · The temperature is individually controlled by H _n (hereinafter, simply referred to as a heater H when not particularly distinguished), and the plurality of heaters H are controlled by the electronic control unit 100, for example. By doing so, each of the plurality of furnace chambers R is maintained at a predetermined temperature. As described above, the thermal interference between adjacent furnace chambers R is reduced as much as possible, so that the temperature management of each furnace chamber R is suitably performed.
[0018]
The substrate elevating device 22 includes a movable part 50 that is moved up and down by a servo motor (not shown), for example, and a solid line indicates that the movable part 50 has reached the upper end. Indicates that the lower end has been reached. In the movable portion 50, a plurality of ceramic rollers 16 similar to those provided in the furnace body 12 are supported by the movable portion 50 at both ends thereof, and the movable portion 50 is moved in the width direction. And arranged parallel to each other. The substrate 14 is supported by the ceramic roller 16 in the movable portion 50. When a servo motor (not shown) provided in the substrate lifting device 18 is driven, the rotation is transmitted to the plurality of ceramic rollers 16 through a chain (not shown). Accordingly, when the plurality of ceramic rollers 16 are rotated, the substrate 14 is conveyed in a predetermined direction along with the rotation. Here, the plurality of ceramic rollers 16 are rotated so as to convey the substrate 14 in the one direction at the upper end indicated by a solid line, that is, to enter the movable part 50, and at the lower end indicated by a chain line, The substrate 14 is rotated so as to be transported in a direction opposite to the one direction, that is, to be fed into the transport path 20.
[0019]
A plurality of ceramic rollers 16 similar to those provided in the furnace main body 12 are supported on the transport path 20 in a state where the frames 22 are supported by the frames 22 at both ends of the frame 22. They are arranged parallel to each other across the direction. The substrate 14 is supported by the ceramic roller 16 in the transport path 20. When a servo motor (not shown) provided on the frame 22 is driven, the rotation is transmitted to the plurality of ceramic rollers 16 through a chain (not shown). Accordingly, when the plurality of ceramic rollers 16 are rotated, the substrate 14 is conveyed in the direction opposite to the one direction, that is, the direction indicated by the arrow D ′ in FIG.
[0020]
In the FPD sealing heating apparatus 10 configured as described above, the substrate 14 is subjected to sealing heating in the following steps. As shown in FIG. 1, description will be made from a state in which the substrate 14 is disposed in each of the furnace chambers R _{1 to} R _n . The substrate 14 disposed in the furnace chamber R ₁ is heated for a predetermined time by the heater H ₁ . At this time, the blocking door S ₁ is closed, and the servo motor 24 is driven substantially simultaneously with the opening of the blocking door S ₁ , and the substrate 14 is transported in the one direction so that the furnace chamber R ₁ is opened. Sent into ₂ . On the other hand, the substrate 14 disposed in the furnace chamber R ₂ is heated for a predetermined time by the heater H ₂ , and the blocking door S ₂ opens in synchronization with the opening of the blocking door S ₁ . When substantially allowed to drive the servo motor 24 simultaneously, the substrate 14 is fed into the furnace chamber R ₂ is transported in the first direction. By performing such an operation in synchronization with R _{1 to} R _n , all of the plurality of the substrates 14 respectively heated in the plurality of furnace chambers R are transferred to the plurality of furnace chambers R _m. Are conveyed in synchronism with a plurality of furnace chambers R _{m + 1} adjacent to each other in the one direction. Compared with the conventional heating device based on the continuous conveyance method in which a continuous curvilinear heat curve is formed by adopting such a conveyance method, the portion where the stepwise temperature management was performed while conveying the substrate 14 However, the furnace length of the FPD sealing heating apparatus 10 can be reduced to 1/2 to 2/3 because the furnace chamber R that controls the temperature with the substrate 14 stationary is replaced.
[0021]
FIG. 3 is a chart showing the temperature exhibited by the substrate 14 in the FPD sealing heating apparatus 10 of the present embodiment, the solid line is the temperature chart in the furnace body 12, and the alternate long and short dash line is in the transport path 20. The temperature chart of is shown. As shown in this figure, the FPD sealing heating apparatus 10 of the present embodiment is provided with, for example, 34 furnace chambers R, and the substrate 14 is first placed in the furnace chambers R _{1 to} R ₇ . Heated sequentially, the temperature is increased to a predetermined temperature indicated by T ₁ , for example, about 300 ° C., and then heated at temperature T ₁ in the furnace chambers R _{8 to} R ₁₁ , thereby being included in the sealing material of the substrate 14. The organic solvent to be burned out is burned out and the sealing material is melted. Next, the furnace chambers R _{12 to} R ₁₇ are sequentially heated, the temperature is increased to a predetermined temperature indicated by T ₂ , for example, about 450 ° C., and the subsequent furnace chambers R _{18 to} R ₂₀ are soaked at the temperature T ₂ . Thereby, the sealing material of the substrate 14 is fired. Further, in the subsequent furnace chambers R _{21 to} R ₃₄ , the temperature is lowered sequentially, and the temperature is lowered to room temperature in the process of being conveyed in the conveying path 20. As described above, the sealing heating of the substrate 14, that is, the first substrate and the second substrate is performed.
[0022]
Thus, according to the present embodiment, the furnace body 12 is divided over the entire length by the plurality of shut-off doors S, and the plurality of furnace chambers R that are individually temperature-controlled are provided. the substrate 14 or the temperature has been managed in the furnace chamber R first substrate and the second substrate, by the conveying apparatus, successively to the furnace chamber adjacent the inside R _m in said one direction furnace chamber R _{m + 1} Since the substrate 14 is transported, a temperature gradient in the one direction on the substrate 14 does not occur so much. In addition, since all of the plurality of substrates 14 are transported synchronously, the FPD sealing heating is performed. The furnace length of the apparatus 10 can be reduced to 1/2 to 2/3 compared with the conventional one. That is, the temperature gradient in the substrate 14 can be suppressed as small as possible, and the FPD sealing heating apparatus 10 with a short furnace length can be provided.
[0023]
Further, preferably, since the conveying device is a plurality of ceramic rollers 16 that are rotated around the respective shaft centers, the sliding of the belt that causes generation of dust compared to conveyance by a belt conveyor or the like, for example. Therefore, there is an advantage that the substrate 14 can be suitably transported in the one direction indicated by the arrow D while keeping the inside of the furnace of the FPD sealing heating apparatus 10 clean.
[0024]
As mentioned above, although the suitable Example of this invention was described in detail based on drawing, this invention is not limited to this, Furthermore, it implements in another aspect.
[0025]
For example, in the above-described embodiment, the transport device is the ceramic roller 16, but this is a preferred embodiment, and the substrate 14 is moved in the one direction by, for example, a belt conveyor made of a heat resistant material. It may be conveyed.
[0026]
Further, the FPD sealing heating apparatus 10 of the above-described embodiment is operated so that the substrate 14 shows a temperature chart as shown in FIG. 3, but the present invention is not limited to this. For example, in addition to the first soaking step soaked at temperature T ₁ and the second soaking step soaked at temperature T _2, the third soaking step soaked at temperature T ₃ . The temperature chart is appropriately set according to the mode of the substrate 14.
[0027]
Further, the above-described blocking door 14 may be a fixed member that is separated from the upper surface of the ceramic roller 16 by a distance slightly larger than the thickness of the substrate 14. That is, the form is not limited as long as each furnace chamber R can be individually temperature controlled.
[0028]
The ceramic roller 16 is made of alumina ceramics, but may be made of other ceramics such as mullite or spodumene, or made of a metal having high heat resistance such as SUS310. It doesn't matter.
[0029]
In the above-described embodiment, the operation from the state in which the substrate 14 is disposed in all of the plurality of furnace chambers R has been described. For example, the substrate may be included in some of the plurality of furnace chambers R. Naturally, it is possible to arrange 14 and to perform sealing heating.
[0030]
Although not exemplified one by one, the present invention is implemented with various modifications within a range not departing from the gist thereof.
[Brief description of the drawings]
BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a schematic view for explaining a main structure of an FPD sealing heating apparatus according to an embodiment of the present invention by cutting it in the furnace length direction.
2 is a cross-sectional view taken along the line II-II in FIG. 1, and is a diagram for explaining in detail the configuration of a blocking door provided between furnace chambers.
FIG. 3 is a chart showing the temperature exhibited by the substrate in the FPD sealing heating apparatus of this example.
[Explanation of symbols]
10: Sealing heating device for FPD 12: Furnace body 14: Substrate (first substrate and second substrate)
16: Ceramic roller (conveying device)
S: Shut-off door R: Furnace chamber

Claims (2)

An FPD sealing heating device for sealing a first substrate and a second substrate, at least one of which is made of glass,
A plurality of furnace chambers that are divided over the entire length of the furnace body and are individually temperature controlled, a plurality of shut-off doors provided between adjacent furnace chambers, and provided independently on the inner wall of each furnace chamber A heater that is individually temperature controlled, a transport device for transporting the plurality of first and second substrates in one direction, a substrate lifting device provided at one end in the furnace length direction, A transport path provided on the lower side of the furnace body in order to transport the substrate subjected to deposition heating in a direction opposite to the transport direction during sealing heating,
All of the plurality of first and second substrates heated in the plurality of furnace chambers by the transfer device are synchronized from the plurality of furnace chambers to the plurality of furnace chambers adjacent in the one direction, respectively. In addition, the FPD sealing heating apparatus is characterized in that the substrate which is intermittently transported every predetermined time and is subjected to the sealing heating is fed into the transport path by the substrate lifting device.   The sealing heating apparatus for FPD according to claim 1, wherein the conveying device is a plurality of ceramic rollers that are rotated around respective axis centers.

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