JP4363654B2 - Electronic component suction transfer device and electronic component suction transfer method - Google Patents

Description

The present invention relates to an electronic component suction conveyance device and an electronic component suction conveyance method. In particular,
Electronic component adsorption for holding and transporting electronic components to and from the tray when transporting a substantially flat tray on which fine electronic components such as multilayer chip components are placed between and outside the liquid The present invention relates to a transport device and an electronic component suction transport method.

  Conventionally, in order to transport electronic components from outside the liquid into the cleaning liquid in order to clean the electronic components, and to transport the electronic components outside the liquid from the liquid such as the cleaning liquid after cleaning, An electronic component suction conveyance method is used.

  For example, an electronic component such as a laminated chip cut out from a wafer has a processing residue, an adhesive, or the like attached to the cut surface. A finished product manufactured using a laminated chip or the like in such a state may not exhibit the desired performance due to dimensional errors, impurities and the like. Therefore, the cut laminated chip is cleaned before moving to the next step.

  A specific example will be described below. FIG. 6 is a cross-sectional view of a conventional electronic component cleaning jig. The cleaning jig 701 includes an upper jig 703 and a lower jig 705. A cavity 707 is formed in the lower jig 705, and an electronic component 709 to be cleaned is disposed in the cavity 707. When the upper jig 703 is assembled to the lower jig 705, the electronic component 709 is fixed in the cavity 707.

  The cavity 707 communicates with a supply passage 711 for supplying the cleaning liquid and a discharge passage 713 for discharging the cleaning liquid. Accordingly, the cleaning liquid supplied from the cleaning liquid tank (not shown) to the supply passage 711 by the liquid feed pump (not shown) flows into the cavity 707 and the electronic component 709 is cleaned. The used cleaning liquid is discharged to the outside of the cleaning jig 701 through the discharge passage 713 (for example, Patent Document 1).

  FIG. 7 is an exploded view of another conventional electronic component cleaning object holder. The cleaning object holder 801 includes a first holding unit 807, a second holding unit 809, and a third holding unit 811. The first holding unit 807 includes a plurality of through holes 805 for storing the electronic component 803. A mesh member 813 is affixed to the lower surface of the first holding part 807 to prevent the electronic component 805 from falling. A second holding portion 809 is attached to the upper surface side of the first holding portion 807. The second holding unit 809 is obtained by attaching a mesh member 815 to a frame, and prevents the electronic component 805 of the first holding unit 807 from protruding from above. The third holding unit 811 has the same dimensions and the same shape as the frame of the second holding unit 809, and the first holding unit 807 is sandwiched between the second holding unit 809 and the third holding unit 811.

In order to clean the electronic component 803, the object holder 801 to be cleaned is immersed in a bath containing a cleaning liquid. The cleaning liquid reaches the electronic component 813 via the mesh member 813 of the first holding unit 807 and the second holding unit 809, and the electronic component 803 is cleaned by rotating the object holder 801 (for example, Patent Document 2).
JP-A-9-298179 (paragraph number [0009] to paragraph number [0012], FIG. 5) Japanese Patent Laid-Open No. 6-103511 (paragraph number [0008], FIG. 3)

  In the configurations of Patent Documents 1 and 2, the cleaning is performed in a state where the electronic component is sandwiched between the jig and the holder. Since jigs, holders, and the like are used many times, the jigs are cleaned each time they are used. However, it is difficult to clean the net member of the jig of Patent Document 1 and the holder of Patent Document 2 completely because of the complexity of the structure. Therefore, there is a risk that processing residues, dust, and the like may remain attached to the jig and the holder itself. If it does so, when a jig | tool etc. are used next, there exists a possibility of contaminating an electronic component.

  Further, when the electronic component is attached to a jig in order to clamp the electronic component as in the cited document 1, the electronic component freely moves in the holder as in Patent Document 2, and the electronic component and the holder come into contact with each other. At this time, there is a risk that the electronic parts may be contaminated with dust.

  A product made from such a contaminated electronic component is not preferable because it may not exhibit the expected performance.

  In view of the above-mentioned phenomenon, the inventors of the present invention have studied diligently to use a tray having a substantially plate-like member provided with a recess for accommodating each electronic component. However, if the electronic component is simply housed in the recess, the electronic component may fall out of the recess when transported between the outside of the liquid and in the liquid.

  The inventors have also found that when an electronic component is present near the liquid surface, surface tension acts on the electronic component and the electronic component falls off the tray. The surface tension will be briefly described with reference to FIG. FIG. 4 shows a state where the upper surface 103 a of the slider 103 of the magnetic head, which is an electronic component placed on the tray 109, is slightly lower than the liquid level 147. A force pulling in the direction of arrow 149 acts on the slider 103 due to the surface tension of the right liquid level 147a, and further, a force pulling in the direction of arrow 151 acts due to the surface tension of the left liquid level 147b. As a result, a resultant force of the pulling forces 149 and 151 and an upward combined pulling force 153 are generated in the slider. There is a possibility that the slider 103 is pulled up from the tray 109 by the pulling force 153 and scattered on the liquid surface.

  Therefore, it is necessary to control the electronic component suction / conveyance device so that a suction force having a magnitude against the combined pulling force 153 applied to the slider 103 can be appropriately applied to the slider 103.

  Accordingly, the present invention provides an electronic component adsorption / conveying device and an electronic component adsorption / conveying method capable of reliably adsorbing and holding an electronic component on a tray in a liquid and outside the liquid without fear of contaminating the electronic component in a cleaning process. With the goal.

  In order to solve the above problems, an electronic component suction / conveyance device of the present invention includes a first suction source that generates a suction force, and a first suction that applies the suction force from the first suction source to the electronic component. An electronic component suction conveyance device comprising: a circuit; and a liquid trap means having a substantially sealed internal space and disposed in the middle of the first suction circuit.

  According to another aspect of the present invention, there is provided an electronic component suction / conveyance device including a suction hole, a tray on which the electronic component is placed, a first suction source that is connectable to the tray and generates a suction force, and the first A first suction circuit that causes a suction force to act on the electronic component by connecting the first suction source and the suction hole when the tray is connected to the tray. An electronic component sucking and conveying apparatus comprising: means; and liquid trap means having a substantially sealed internal space and disposed in the middle of the first suction circuit.

  According to the above configuration, the electronic component can be transported in and out of the liquid while the electronic component is sucked and held on the tray. Further, since the liquid trap means for storing the liquid is interposed in the first suction circuit, it is possible to prevent the liquid from entering the first suction source. Therefore, it is possible to use the first suction source with a simple configuration without using a complicated liquid pump and without having to apply water resistance and corrosion resistance treatment to the first suction source.

  In the electronic component suction / conveyance device according to the present invention, the second suction source can be connected to a tray and generates a suction force, and the second suction source and the tray are connected to each other. And a second suction circuit that causes a suction force to act on the electronic component by communicating the source and the suction hole, the first suction means and the second suction means Can be used selectively.

  According to the above configuration, the first suction source and the second suction source can be appropriately selected and used in accordance with the environment (in liquid or outside of the liquid) where the electronic component is placed. , Can improve the reliability.

  Furthermore, in the electronic component suction conveyance device of the present invention, the first suction circuit is connected to the tray so as to be separable from the tray.

  Furthermore, in the electronic component suction conveyance device of the present invention, the second suction circuit is connected to the tray so as to be separable from the tray.

  In the electronic component suction / conveyance device of the present invention, the first suction source is a gas pump, and the second suction source is a liquid pump.

  A first aspect of the electronic component adsorption / conveying method of the present invention is an electronic component adsorption / conveying method in which an electronic component is adsorbed and held in a liquid or outside the liquid, and is moved outside the liquid. Connecting the first suction source and the tray and applying the force to the electronic component via the first suction circuit having a liquid trap to attract and hold the electronic component on the tray; Lowering the tray from the liquid level to a position in the liquid at a predetermined distance in a state where the electronic component is sucked and held on the tray by applying the suction force of the first suction source to the electronic component; After the step of lowering, the step of removing the first suction circuit from the tray, and the suction force of the second suction source via the second suction circuit that connects the second suction source and the tray To the electronic parts It comprises the steps of sucking and holding the electronic component on the tray by.

  A second aspect of the electronic component adsorption / conveying method of the present invention is an electronic component adsorption / conveying method in which an electronic component is adsorbed and held in or out of a liquid and moved, and the second suction source is aspirated in the liquid. Applying a force to the electronic component by applying a force to the electronic component via a second suction circuit that connects the second suction source and the tray; and a predetermined distance from the liquid level. The step of raising the tray to a position in the liquid, the step of removing the second suction circuit from the tray after the step of raising, and the suction force of the first suction source with the first suction source Connecting the tray to the electronic component by acting on the electronic component via a first suction circuit having a liquid trap, holding the electronic component on the tray, and from the position in the liquid to the outside of the liquid, Suction of the first suction source The comprises the steps of raising said tray in a state of sucking and holding the electronic component on the tray by acting on the electronic component.

  In this specification, the suction means is composed of a suction source and a suction circuit, the suction source means a member that generates a suction force, and the suction circuit provides a path for guiding the suction force generated by the suction source to the electronic component. It means a component member. Specifically, the gas pump and the liquid pump in the embodiments and examples described later correspond to the suction source, the first suction attachment, the first tube, and the second tube correspond to the first suction circuit, and the second suction. The attachment, conduit, and third tube correspond to the second suction circuit.

According to the electronic component sucking and conveying apparatus and electronic component sucking and conveying method of the present invention, the electronic component is sucked and held on the tray by using the suction means. Can hold. Furthermore, since the electronic component does not repeatedly contact and non-contact with the tray in and out of the liquid, it is possible to prevent generation of dust and the like, and as a result, contamination of the electronic component can be prevented.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of an electronic component suction / conveyance device according to the present invention will be described below with reference to the drawings. In addition, in drawing, the same code | symbol shows the same member.

  FIG. 1 is a partial cross-sectional view of an electronic component suction conveyance device 101 according to an embodiment of the present invention. In FIG. 1, an electronic component suction conveyance device 101 is disposed in a storage tank 107 filled with a cleaning liquid 105 for cleaning an object to be cleaned (electronic component), that is, a slider 103.

  The electronic component sucking and conveying apparatus 101 is mainly connected to the tray holding means for holding the substantially flat tray 109 on which the slider 103 is arranged, that is, the tray receiving member 111 and the tray receiving member 111, and holds the slider 103 by suction. The first suction means 113 for storing the liquid and the liquid trap means for storing the liquid, that is, the storage tank 119.

  The tray 109 includes a plurality of slider receiving grooves 139 having a substantially rectangular cross section on one surface of the tray (upper surface in FIG. 1), and the slider 103 is received in each slider receiving groove 139. Further, a suction hole 141 passing through the tray 109 in the vertical direction (arrow 133) in the figure is continuous with the bottom surface 139a of the slider receiving groove 139. The diameter 141a (see FIG. 4) of the suction hole 141 is dimensioned to be smaller than the lateral length of the bottom surface 139a in FIG. 4, and when the slider 103 is received in the slider receiving groove 139, the suction hole 141 is formed. The slider 103 is closed.

  With further reference to FIG. 1, the tray receiving member 111 includes a substantially rectangular frame 112 having an opening 112a, and a columnar support 137 extending from the frame 112 in the direction of arrow 133 in the drawing. Is provided. The opening 112a of the frame body 112 is larger than the entire area of the tray 109 where the suction holes 141 are present. When the tray 109 is mounted on the tray receiving member 111, the suction holes 141 and the openings 112a are It is the structure which communicates directly. The frame body 112 is formed by connecting four frame body constituent members in a rectangular shape. The widths (lateral lengths in FIG. 1) of the opposing frame member 112b and 112c are different from each other, and the width of the frame member 112b is smaller than the width of the frame member 112c. The other opposing frame member 112d has the same width. A support portion 137 is connected to the frame member 112b. The drive unit 135 is connected to the support unit 137. When the drive unit 135 is driven, the support unit 137 moves up and down and the tray receiving member 111 moves in the vertical direction (in the direction of arrow 133).

  Further, a first suction unit, that is, a first suction unit 113 is disposed below the tray receiving member 111. The first suction means 113 includes a first suction source and a first suction circuit. The first suction source in the present embodiment is a gas pump (P1) 117. The first suction circuit is a member that constitutes a path that guides the suction force generated by the gas pump (P1) to the slider 103, and includes a suction attachment 115 attached to the tray receiving member 111, a first tube 129, 2 tubes 131.

  The box-shaped first suction attachment 115 whose one surface is open is provided with a substantially rectangular opening 143 on the upper surface side connected to the tray receiving member 111. The width in the width direction of the opening 143 (lateral length in FIG. 1) is dimensioned to be slightly longer than the length in the width direction of the opening 112a of the tray receiving member 111 (lateral length in FIG. 1). ing. Then, the tray receiving member 111 and the first suction attachment 115 are connected in a positional relationship in which the opening 112a of the tray receiving member 111 and the opening 143 of the first suction attachment 115 are substantially concentric. When the first suction attachment 115 is mounted on the tray receiving member 111, the support portion 137 can be moved in the vertical direction (arrow 133) by the drive portion 135.

  Further, the side wall 115a of the suction attachment 115 is provided with a through passage 145 that penetrates the side wall 115a. Further, the suction attachment 115 is connected to a liquid trap means, that is, a storage tank 119 having a substantially sealed internal space that functions as a trap for collecting liquid. One end of the first tube 129 is connected to the through passage 145 of the suction attachment 115, and the other end of the first tube 129 is connected to the inlet 125 of the storage tank 119.

  Furthermore, the storage tank 119 is connected to a gas pump (P1) 117. The outlet 127 of the storage tank 119 is connected to one end of the second tube 131 and the other end of the second tube is connected to the gas pump (P1) 117.

  Thus, the suction hole 141 of the tray 109, the opening 112a of the tray receiving member 111, the internal space 115b of the first suction attachment, the through passage 145, the first tube 129, the internal space of the reservoir 119, and the second tube 131 are provided. By communicating, the suction force by the gas pump (P 1) 117 acts on the slider 103.

  FIG. 2 is a partial cross-sectional view of an example of a cleaning apparatus to which the electronic component suction conveyance device 101 according to the embodiment of the present invention is applied. In this example, the second suction unit 201 is added to the electronic component suction conveyance device 101 of the embodiment. Therefore, the configuration of the second suction unit 201 will be described.

  The second suction unit 201 includes a second suction source and a second suction circuit. The second suction source is the liquid pump (P2) 207. The second suction circuit is a member that constitutes a path for guiding the suction force generated by the liquid pump (P2) 207 to the slider 103 and acting thereon. The second suction attachment 203, the second suction attachment 203, and the liquid pump And a conduit 205 connecting (P2). The second suction attachment 203 has a box shape including an opening 203a whose upper surface side is open in FIG. The second suction attachment 203 is fixedly arranged in the storage tank 107.

  The second suction means 201 will be further described with reference to FIG. FIG. 3 is a partial cross-sectional view of the electronic component suction / conveyance device showing a state in which the second suction means is operating.

  The second suction attachment 203 includes a substantially rectangular opening 203 a on the upper surface side connecting the tray receiving member 111. The width in the width direction of the opening 203a (the length in the horizontal direction in FIG. 3) and the length in the depth direction (the length in the front and back direction in FIG. 3) are the length in the width direction of the opening 112a of the tray receiving member 111 (the width in the horizontal direction in FIG. 3). (Length in the direction) and length in the depth direction (length in the front and back direction in FIG. 3). Then, the tray receiving member 111 and the second suction attachment 209 are connected in a positional relationship in which the opening 112a of the tray receiving member 111 and the opening 203a of the second suction attachment 209 are substantially concentric.

  Further, a conduit 205 is connected to the bottom 203 b of the second suction attachment 203, and an internal space 209 is in communication with the conduit 205. The conduit 205 is connected to the liquid pump (P2) 207 by a third tube 211. In this way, the through-hole 141 of the tray 109, the opening 112a of the tray receiving member 111, the internal space 209 of the suction attachment of the second suction means 201, the conduit 205, and the third tube 211 are communicated to each other, and the liquid pump (P2) 207 Is applied to the slider 103.

  Next, the operation of the electronic component suction conveyance device 101 will be described with reference to FIGS. 2 to 5 in relation to the cleaning device of the present embodiment. As shown in FIG. 3, first, the tray receiving member 111 is connected to the upper surface side of the second suction attachment 203, and the second suction circuit and the opening 112a of the tray receiving member 111 communicate with each other. In this state, a suction force in the direction of the tray receiving member 111 (arrow 213) acts on the slider 103, so that the slider is securely held. Further, the liquid advances through the conduit interior 219 in the directions of arrows 215 and 217 by the suction force of the liquid pump (P2) 207 and is finally led to the pump 207. The liquid introduced into the pump 207 is discharged from a discharge port (not shown) to the outside of the pump.

  Next, with the liquid pump (P2) 207 of the second suction means 201 being driven, the tray receiving member 111 is raised by the drive unit 135 (see FIG. 5). At this time, the second suction means 201 is separated from the tray receiving member 111, that is, the second suction source 207 and each suction hole 141 are separated. As a result, the liquid around the second suction attachment 203 flows into the internal space 209 (arrows 213, 215, and 217) by the suction force of the liquid pump (P2) 207. As a result, a suction force is generated in the slider 103 in a direction in which the slider 103 is pressed against the tray 109, and the state where the slider 103 is held by the tray 109 is maintained.

  Further, the tray 109 is raised to a depth that is not affected by the above-described surface tension (arrows 149 and 151 in FIG. 4). Here, the suction attachment 115 of the first suction means 113 is moved in the right direction of the arrow 155 (right direction in FIG. 2), and the first suction means 113 is connected to the tray receiving member 111. This state is shown in FIG.

  As described above, the gas pump (P1) 117 of the first suction unit 113 is used to prevent the liquid pump (P2) 207 from being overloaded when the slider 103 is transported from the inside of the liquid to the outside of the liquid. To do. Accordingly, the first suction attachment 115 is slidably attached to the tray receiving member 111.

  In a state where the slider 103 is attracted and held, the drive unit 135 is driven to raise the support unit 137 (upward direction of the arrow 133). When the slider 103 is positioned below the liquid level 147, the liquid may enter the first suction circuit, but the liquid 123 is stored in the storage tank 119 by the storage tank 119 disposed in the middle of the suction circuit ( Trap function). Therefore, it can prevent that a liquid is introduce | transduced into a gas pump (P1).

  When the first suction means 113 is operated, the suction force of the gas pump (P1) 117 acts on the slider 103 via the storage tank 119, the first suction circuit, the tray receiving member, and the tray. The drawn gas advances along the arrows 149 and 151 and is guided to the storage tank 119. Further, the gas in the storage tank 119 is guided to the gas pump (P1) 117 along the arrow 153, and is discharged out of the gas pump (P1) 117 through a discharge port (not shown).

  Finally, the tray 109 in which the slider 103 is disposed in the slider receiving groove 139 is removed from the tray receiving member 111 in a state where the tray receiving member 111 of the electronic component suction conveyance device 101 is positioned above the liquid level 147.

  In this embodiment, the tray receiving member 111 is used to hold the tray 109, and the opening 112a of the tray receiving member 111 is interposed between the suction circuit and the suction hole of the tray. However, without using the tray receiving member 111, for example, when a chuck mechanism (not shown) that holds the tray 109 by pressing from both sides of the tray 109 is provided in the first or second suction attachment, Alternatively, it is needless to say that the suction source and the tray can be separated directly between the tray 109 and the first suction attachment 115 or the second suction attachment 209 in the second suction means.

  In the present embodiment, since the gas pump is used in the first suction means and the liquid pump is used in the second suction means, the most suitable configuration when the slider is outside the liquid or in the liquid, respectively. Thus, the slider can be sucked and held. In addition, the 2nd suction means provided with the liquid pump used by the present Example is an additional component. Therefore, if it is not necessary to hold an electronic component such as a slider in the liquid for a long period of time, it goes without saying that it is possible to use only the first suction means without providing the second suction means having the liquid pump. .

With the above configuration, the liquid pump (P2) is used only in a situation where a predetermined fluid resistance is obtained, and it is possible to prevent a failure due to an overload of the liquid pump (P2).
Further, since the gas pump (P1) is used at a depth at which the slider is not affected by the surface tension, there is a section where the suction force cannot be controlled when switching between the gas pump (P1) and the liquid pump (P2). Even in such a case, the slider can be securely held against the force to be removed from the tray due to surface tension or fluid resistance.

  Although the tray used in this embodiment and this example is a slider receiving groove having a rectangular cross section, it is not limited to this shape. In other words, the protrusion may be formed on the surface of the tray so as to surround the region where the slider is placed.

  In the present embodiment and this example, only the process of transporting the slider outside the liquid into the liquid has been described. However, the process of transporting the slider inside the liquid out of the liquid is an operation from outside the liquid to the liquid. Needless to say, it may be operated by the reverse process.

  In the present embodiment, the second suction attachment is fixedly arranged and only the tray receiving member 111 can be moved in the vertical direction, but it goes without saying that the second suction attachment may be moved in the vertical direction. Yes.

  In the embodiment, the slider is used as the electronic component, but it goes without saying that other fine electronic components such as other multilayer chips can be used.

  The present invention can be embodied in many forms without departing from its essential characteristics. Therefore, it is needless to say that the above-described embodiments are exclusively explanatory and do not limit the present invention.

It is a fragmentary sectional view of the electronic component adsorption holding device of an embodiment of the present invention. It is a fragmentary sectional view of the Example which applied the electronic component adsorption holding device of embodiment of this invention to the washing | cleaning apparatus. It is a fragmentary sectional view showing the state where the 2nd suction means of Drawing 2 is operating. FIG. 4 is an enlarged view of a portion IV in FIG. 2. It is a figure which shows the state which started the operation | movement of the 2nd suction means of FIG. It is sectional drawing of the jig | tool used with the conventional washing | cleaning apparatus. It is an expanded view of the holder used with the other conventional washing | cleaning apparatus.

Explanation of symbols

101 Electronic Component Adsorption / Transport Device 109 Tray 111 Tray Receiving Member 113 First Suction Unit 115 First Suction Attachment 117 Gas Pump (P1)
119 Reservoir 201 Second suction means 203 Second suction attachment 207 Liquid pump (P2)

Claims (5)

An electronic component adsorption transport device for adsorbing, holding and moving electronic components in and out of the liquid,
A tray having a suction hole, on which the electronic component is placed;
A gas pump that generates a suction force can be connected to the tray, and when the gas pump and the tray are connected, the suction force acts on the electronic component by communicating the gas pump and the suction hole. A first suction circuit that has a first suction circuit;
Liquid trap means disposed in the middle of the first suction circuit;
A liquid pump that generates a suction force can be connected to the tray, and when the liquid pump and the tray are connected, the suction force acts on the electronic component by communicating the liquid pump and the suction hole. It includes a second suction circuit for a second suction means having the,
Wherein the first suction means second suction means, to that electronic component suction conveying device, characterized in that it is used selectively. The electronic component suction conveyance device according to claim 1 , wherein the first suction circuit is connected to the tray so as to be separable from the tray. The electronic component suction conveyance device according to claim 1 , wherein the second suction circuit is connected to the tray so as to be separable from the tray. An electronic component sucking and conveying method in which an electronic component is sucked and held in liquid or outside the liquid,
Outside the liquid, the electronic pump is sucked and held on the tray by connecting the gas pump and the tray and acting on the electronic component via the first suction circuit having a liquid trap. And a process of
Lowering the tray from a liquid level to a position in the liquid at a predetermined distance in a state where the electronic component is sucked and held on the tray by applying a suction force of the gas pump to the electronic component;
After the step of lowering, removing the first suction circuit from the tray;
The suction force of the liquid pump, an electronic component comprising the steps of sucking and holding the electronic component on the tray by acting on the electronic component through the second suction circuit connecting line between the liquid pump tray Adsorption transport method. An electronic component sucking and conveying method in which an electronic component is sucked and held in liquid or outside the liquid,
In the liquid, the steps of sucking and holding the electronic component on the tray by the suction force of the liquid pump, said to act on the electronic component through the second suction circuit for connecting the liquid pump and the tray,
Raising the tray to a position in the liquid at a predetermined distance from the liquid level;
Removing the second suction circuit from the tray after the raising step;
The suction force of the gas mover, and connecting the gas pump and the tray, the steps of sucking and holding the electronic component on the tray by via a first suction circuit with a liquid trap to act on the electronic component,
From the position in the liquid to the outside of the liquid, causing the suction of the gas pump to act on the electronic component to raise the tray in a state where the electronic component is sucked and held on the tray. Transport method.

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