JP4423672B2 - Electronic component moving device - Google Patents

Description

  The present invention relates to an electronic component moving device. Specifically, when moving a substantially flat tray on which minute electronic components such as multilayer chip components and thin film heads are placed between the liquid and the liquid, the electronic components can be securely held on the tray. The present invention relates to an electronic component moving device.

  Conventionally, various electronic component moving devices have been used to transport electronic components from outside the cleaning liquid into the liquid to clean the electronic components, and to transport electronic components from the cleaning liquid to the liquid after cleaning. .

  For example, an electronic component such as a magnetic head slider cut out from a wafer-like member has a processing residue, an adhesive, or the like attached to the cut surface. A finished product manufactured using an electronic component in such a state may not exhibit desired performance due to dimensional errors, contamination with impurities, and the like. Therefore, the cut electronic component is cleaned before moving to the next step.

  A specific example will be described below. FIG. 7 is a cross-sectional view of a conventional electronic component cleaning jig. The cleaning jig 701 includes an upper jig 703 and a lower jig 705. A cavity 707 is formed in the lower jig 705, and an electronic component 709 to be cleaned is disposed in the cavity 707. When the upper jig 703 is assembled to the lower jig 705, the electronic component 709 is fixed in the cavity 707.

  The cavity 707 communicates with a supply passage 711 for supplying the cleaning liquid and a discharge passage 713 for discharging the cleaning liquid. Accordingly, the cleaning liquid supplied from the cleaning liquid tank (not shown) to the supply passage 711 by the liquid feed pump (not shown) flows into the cavity 707 and the electronic component 709 is cleaned. The used cleaning liquid is discharged to the outside of the cleaning jig 701 through the discharge passage 713 (for example, Patent Document 1).

  FIG. 8 is an exploded view of another conventional electronic component cleaning object holder. The cleaning object holder 801 includes a first holding unit 807, a second holding unit 809, and a third holding unit 811. The first holding unit 807 includes a plurality of through holes 805 for storing the electronic component 803. A mesh member 813 is affixed to the lower surface of the first holding part 807 to prevent the electronic component 805 from falling. A second holding portion 809 is attached to the upper surface side of the first holding portion 807. The second holding unit 809 is obtained by attaching a mesh member 815 to a frame, and prevents the electronic component 805 of the first holding unit 807 from protruding from above. The third holding unit 811 has the same dimensions and the same shape as the frame of the second holding unit 809, and the first holding unit 807 is sandwiched between the second holding unit 809 and the third holding unit 811.

In order to clean the electronic component 803, the object holder 801 to be cleaned is immersed in a bath containing a cleaning liquid. The cleaning liquid reaches the electronic component 803 via the mesh member 813 of the first holding unit 807 and the second holding unit 809, and the electronic component 803 is cleaned by rotating the object holder 801 (for example, Patent Document 2).
JP-A-9-298179 (paragraph number [0009] to paragraph number [0012], FIG. 5) JP-A-6-103511 (paragraph number [0008]), FIG. 3)

  In the configurations of Patent Documents 1 and 2, the cleaning is performed in a state where the electronic component is sandwiched between the jig and the holder. Since jigs, holders, and the like are used many times, the jigs are cleaned each time they are used. However, it is difficult to clean the net member of the jig of Patent Document 1 and the holder of Patent Document 2 completely because of the complexity of the structure. Therefore, there is a risk that processing residues, dust, and the like may remain attached to the jig and the holder itself. If it does so, when a jig | tool etc. are used next, there exists a possibility of contaminating an electronic component.

  Further, when the electronic component is attached to a jig in order to clamp the electronic component as in the cited document 1, the electronic component freely moves in the holder as in Patent Document 2, and the electronic component and the holder come into contact with each other. At this time, there is a risk that the electronic parts may be contaminated with dust.

  A product made from the above-mentioned contaminated electronic component is not preferable because it may not exhibit the desired performance.

  Therefore, in view of the above-mentioned phenomenon, the present inventors have a configuration in which dust is not generated by repeatedly contacting and non-contacting electronic components in and out of the liquid, that is, accommodating individual electronic components. The use of a substantially plate-shaped tray provided with an electronic component housing recess was intensively studied. However, when the electronic component is simply housed in the electronic component housing recess, the electronic component may fall out of the electronic component housing recess when transporting between the outside and the liquid.

  The inventors have also found that when an electronic component is present near the liquid surface, surface tension acts on the electronic component and the electronic component falls off the tray. The surface tension will be briefly described with reference to FIG. FIG. 6 shows a state in which the upper surface 103a of the magnetic head slider 103, which is an electronic component placed in the electronic component receiving recess of the tray 109, that is, the slider receiving recess 139, is slightly lower than the liquid level 147. The upper surface 103a of the slider 103 is placed so as to be substantially parallel to the liquid surfaces 147a and b. A force pulling in the direction of arrow 149 due to the surface tension of the right liquid level 147a acts on the upper surface 103a of the slider 103, and further, a force pulling in the direction of arrow 151 due to the surface tension of the left liquid level 147b acts on the upper surface 103a of the slider 103. work. That is, when the slider 103 is subjected to the forces of the vertical components 149a and 151a of the pulling forces 149 and 151, the slider 103 may be pulled up from the slider housing recess 139 in the vertical direction and scattered on the liquid surface.

  Therefore, it is necessary to provide an electronic component moving apparatus that can prevent the slider from separating from the tray even if vertical components 149a and 151a of the pulling force applied to the electronic component such as the slider 103 occur and can hold the electronic component reliably. .

  Therefore, the present invention provides an electronic component moving device that can move an electronic component between in and out of a liquid while securely holding the electronic component without fear of contaminating the electronic component in a cleaning process. The purpose is to do.

  An electronic component moving apparatus according to the present invention for solving the above-mentioned problems is an electronic component for moving the electronic component in and out of a liquid by using a tray having an electronic component receiving recess for holding the electronic component. A moving device, comprising: a tray holding member on which the tray is detachably mounted; and a moving means for moving the tray holding member, wherein the electronic component housed in the electronic component housing recess of the tray is When the liquid surface and near the liquid surface are positioned, the liquid surface and the surface of the electronic component that intersects the liquid surface form a predetermined inclination angle.

  According to the above configuration, although the surface tension acts on the surfaces (for example, the upper surface and the left side surface) of the electronic component that intersect with the liquid surface, the horizontal components of the surface tension acting on the upper surface and the left side surface oppose each other. Since it acts in the direction, it is canceled out, and only the component in the vertical direction with respect to the liquid surface acts on the upper surface and the left surface. On the other hand, the side wall with which the left side surface of the electronic component abuts is inclined by a predetermined inclination angle with respect to the vertical direction. Therefore, when a force in a substantially vertical direction acts on the electronic component, the electronic component is pressed against the side wall, and the movement of the electronic component in the direction away from the electronic component receiving recess is prevented. In this way, when the slider is positioned near the liquid surface by shifting the vertical component of the surface tension acting on the electronic component and the direction in which the side wall extends from the bottom wall of the electronic component receiving recess to the opening. And when it is on the liquid level, it can be prevented from coming off the tray due to surface tension.

  In the first aspect of the electronic component moving device of the present invention, the moving means moves the tray in a substantially vertical direction with respect to the liquid level in a state where the tray is held at the predetermined inclination angle.

  In the second aspect of the electronic component moving device of the present invention, the moving means is moved at the predetermined inclination angle with respect to the liquid surface while the tray holding means is held at the predetermined inclination angle. .

  In the second aspect, the direction of the inclination angle of the surface of the electronic component with respect to the liquid surface is matched with the moving direction of the tray, compared with the case where the tray is moved in the direction perpendicular to the liquid surface. Since the resistance from the liquid is small, the tray can be efficiently moved.

  Furthermore, in the electronic component moving device of the present invention, the predetermined inclination angle is in the range of about 5 degrees to about 20 degrees.

  If the inclination angle is smaller than 5 degrees, the electronic component accommodated in the tray may come into contact with the wall surface depending on the vertical component of the tensile force generated on the surface intersecting the liquid surface when passing through the liquid surface. Is not sufficiently generated (because the side wall and the vertical component of the pulling force are substantially aligned), there is a risk of separation from the tray. Even when the tilt angle is greater than 20 degrees, the surface tension is applied only to the surface intersecting the liquid surface, but the moment around the center of gravity of the electronic component is generated by the surface tension, and the electronic component is accommodated in the tray. There is a risk of separation from the recess.

  Furthermore, in the first aspect of the electronic component moving apparatus of the present invention, the moving means moves the tray holding member in a substantially vertical direction with respect to the liquid surface at a speed of about 16 mm / s to about 48 mm / s.

  When the speed is lower than 16 mm / s, the time required for the electronic component to cross the liquid surface becomes longer, so the time for the electronic component to receive the surface tension becomes longer, and the electronic component is separated from the tray due to a disturbance or the like. Increase the likelihood of

  When the speed is higher than 48 mm / s, the fluid resistance with respect to the electronic component increases, and the electronic component may fall off the tray due to the turbulent flow in the liquid generated for that reason.

  According to the electronic component moving device of the present invention, the tray receiving member is moved with a predetermined inclination angle with respect to the liquid surface, so that the liquid is moved from the liquid to the liquid outside, or from the liquid to the liquid. Regardless of the movement, the electronic component can be reliably held on the tray without being affected by the surface tension of the liquid surface. Further, as in the above-mentioned Patent Document 2, the electronic component does not repeatedly contact and non-contact with the tray in and out of the liquid, so that it is possible to prevent the occurrence of dust and the like, and as a result, contamination of the electronic component is prevented. it can.

  Embodiments of an electronic component moving device according to the present invention will be described below with reference to the drawings. In addition, in drawing, the same code | symbol shows the same member.

  FIG. 1 is a front view of the electronic component moving device according to the first embodiment of the present invention. FIG. 5 is a partial cross-sectional view showing a cleaning device to which the electronic component moving device of the first embodiment is applied. In FIG. 1, an electronic component moving device 101 is disposed in a storage tank (not shown) filled with a cleaning liquid 105 for cleaning an object to be cleaned (electronic component), that is, a slider 103.

  The electronic component moving apparatus 101 according to the first embodiment mainly includes a tray holding unit for holding a substantially flat tray 109 on which the slider 103 is arranged, that is, a tray receiving member 111 and a drive connected to the tray receiving member 111. Part 135.

  Further, the tray 109 and the electronic component moving device 101 will be described with reference to FIG. The tray 109 is provided with a plurality of electronic component receiving recesses, that is, slider receiving recesses 139 having a substantially rectangular cross section on one surface (the upper surface in FIG. 5), and a substantially rectangular parallelepiped slider 103 is received in each slider receiving recess 139. . Further, a suction hole 141 passing through the tray 109 in the vertical direction in the figure is continuous with the bottom surface 139a of the slider accommodating recess 139. The diameter 141 a of the suction hole 141 is dimensioned to be smaller than the horizontal length 139 b of the bottom surface 139 a in the drawing, and when the slider 103 is received in the slider receiving recess 139, the suction hole 141 is closed by the slider 103. It will be in the state.

  Mounted on the lower surface side of the tray 109 is a tray receiving member 111. The tray receiving member 111 includes a substantially rectangular frame 112 having an opening 112a, and a columnar support 137 extending from the frame 112 in the direction of arrow 115 in the drawing. The frame body 112 and the support portion 137 of the tray receiving member 111 are connected by shaft coupling using a shaft as described later (see FIG. 1). The opening 112a of the frame body 112 is larger than the entire area of the tray 109 where the suction holes 141 are present. When the tray 109 is mounted on the tray receiving member 111, the suction holes 141 and the openings 112a are It is the structure which communicates directly. The frame body 112 is formed by connecting four frame body constituent members in a rectangular shape. The widths (the lengths in the horizontal direction in FIG. 5) of the opposing frame member 112b and 112c are different from each other, and the width of the frame member 112b is sized smaller than the width of the frame member 112c. The width of the other opposing frame member 112d (see FIG. 1) is the same size. A support portion 137 is connected to the frame member 112c. The drive unit 135 is connected to the support unit 137. When the drive unit 135 is driven, the support unit 137 moves up and down and the tray receiving member 111 moves in the vertical direction (in the direction of arrow 115).

  Further, the configuration of the tray receiving member will be described with reference to FIG. FIG. 2 is a front view showing a state in which the electronic component moving device moves from the liquid to the outside.

  The frame body 112 and the support portion 137 of the tray receiving member 111 are connected by shaft coupling using a shaft 119. The shaft 119 is mounted in a hole (not shown) that is orthogonal to a center line 111a, which will be described later, and extends straight through the frame member 112c and the support portion 137 of the frame 112 (front and back directions with respect to the paper surface of FIG. 1). ing. With this configuration, the frame body 112 can pivot with respect to the support column 137 around the shaft 119 (in the direction of the arrow 155).

  When the tray 109 is mounted with the tray receiving member 111, the bottom surface 139a of the slider receiving recess 139 of the tray 109 and the frame member 112d of the frame 112 of the tray receiving member 111 are arranged in the height direction (upper surface 112e). It is configured to be substantially parallel to the center line 111a that is divided into approximately two equal parts in a direction perpendicular to the lower surface 112f. Therefore, the tilt angle α between the center line 111a of the frame body 112 and the liquid surface 147 can be changed by pivoting the tray receiving member 111.

  Next, a second embodiment of the electronic component moving device will be described. FIG. 4 is a front view showing the electronic component moving device of the second embodiment.

  The electronic component moving apparatus 301 according to the second embodiment mainly includes a tray holding unit for holding the tray 309 on which the slider 303 is arranged, that is, a tray receiving member 311 and a tray receiving member 311 for moving in a predetermined direction. A tray guide member 313 and a tray driving unit 335 for moving the tray guide member 313 in a predetermined direction are provided.

  The tray 309 for placing the slider 303 and the tray receiving member 311 on which the tray 309 is mounted have the same configuration as the tray and tray receiving member of the first embodiment. Accordingly, the opening 312 is provided in the tray receiving member 311 in the same manner as the opening 112a of the tray receiving member 111 of the first embodiment shown in FIG. In other words, the opening 312 of the tray receiving member 311 is larger than the entire area of the tray 309 where the suction holes 341 exist, and when the tray 309 is mounted on the tray receiving member 311, The opening 312 is configured to communicate directly.

  A tray guide member 313 is mounted on the lower side of the tray receiving member 311. The tray guide member 313 is a rectangular plate-like member, and includes an opening 313 e that communicates with the opening 312 of the tray receiving member 311. The widthwise dimension of the opening 313e (the length along the direction of the center line 313d) and the widthwise dimension of the opening 312 of the tray 309 are substantially the same. The opening 313e is configured to communicate with the internal space (see 209 in FIG. 5) of the suction attachment (see 203 in FIG. 5).

  Further, the tray guide member 313 includes a protrusion 313 a on the upper surface 313 c of the tray guide member 313. The inner surface 313b of the protrusion 313a and the upper surface 313c are continuous at a substantially right angle to form a corner. On the other hand, the side surface 311b and the bottom surface 311c of the tray receiving member 311 are substantially perpendicular to each other. Therefore, the corner portion constituted by the side surface 311b and the bottom surface 311c of the tray receiving member 311 is locked by the corner portion formed by the protruding portion 313a of the tray guide member 313.

  Further, the tray guide member 313 is inclined with respect to the liquid surface 347 by a center line 313d that bisects the side surface 313g of the tray guide member 313 in the height direction (a direction perpendicular to the upper surface 313c and the lower surface 313f). It arrange | positions so that it may be set to (alpha). Further, since the center line 313d of the tray guide member 313 and the upper surface 303a of the slider 303 are substantially parallel, when the inclination angle α with respect to the liquid surface 347 of the tray guide member 313 is set, the upper surface 303a and the liquid surface 347 of the slider 303 are set. An inclination angle with respect to is defined.

  Further, the tray guide member 313 is connected to a tray driving unit 335 for moving the tray guide member 313 on a side surface 313h facing the projection 313a in the direction of the center line 313d. The tray driving unit 335 moves the tray guide member 313 along its center line 313d (in the direction of arrow 341). Therefore, the slider is moved from the liquid to the liquid outside with the center line 313d and the liquid surface 347 maintaining the inclination angle α.

  Note that an angle changing mechanism is interposed between the tray guide member 313 and the tray driving unit 335, and the center line 313d of the tray guide member 313 is substantially the same in order to attach the tray guide member 313 to the suction attachment 203. The tray guide member 313 can be rotated and swung so as to be in a horizontal state.

  Since the electronic component moving apparatus of the second embodiment moves the tray in a state where the tray has an inclination angle with respect to the liquid surface and in the direction of the inclination angle with respect to the liquid surface, the electronic component movement of the first embodiment Compared to the device, there is less fluid resistance during movement. Therefore, it becomes easy to control the moving speed of the electronic component moving device.

  Next, an example in which the electronic component moving device 101 according to the first embodiment of the present invention is applied to a cleaning device will be described with reference to FIG. FIG. 5 is a partial cross-sectional view of a cleaning device to which the electronic component moving device of the first embodiment is applied.

  A suction unit 201 is disposed below the electronic component moving device 101. The suction unit 201 is a member for fixedly arranging the slider 103 in the liquid, and mainly includes a suction attachment 203, a conduit 205 connected to the suction attachment 203, and a suction source, that is, a liquid pump 207. The suction attachment 203 has a box shape including an opening 203a whose upper surface side is open in FIG. Further, the suction attachment 203 is fixedly disposed in a storage tank (not shown) filled with the liquid 105. In this embodiment, pure water is used as the liquid (cleaning liquid) 105, and a thin film head slider made of a ceramic material mainly composed of aluminum oxide and titanium carbide is used as the slider 103.

  The width in the width direction of the opening 203a of the suction attachment 203 (the length in the left-right direction in FIG. 5) is slightly longer than the length in the width direction of the opening 112a of the tray receiving member 111 (the length in the left-right direction in FIG. 5). Are dimensioned. Then, the tray receiving member 111 and the suction attachment 203 are connected in a positional relationship in which the opening 112a of the tray receiving member 111 and the opening 203a of the suction attachment 203 are substantially concentric.

  Further, a conduit 205 is connected to the bottom 203 b of the suction attachment 203, and an internal space 209 is in communication with the conduit 205. The conduit 205 is connected to the liquid pump 207 by a tube 211. Thus, the opening 112a of the tray receiving member 111, the internal space 209 of the suction attachment 203 of the suction unit 201, the conduit 205, and the tube 211 constitute a suction circuit. Therefore, the suction force generated by the liquid pump 207 is transmitted to the slider 103 via the suction circuit and the suction hole 141 of the tray 109.

  In the above configuration, when the liquid pump 207 is driven, a suction force in the direction of the arrow 213 acts on the slider 103 and is held in the slider accommodating recess 139 of the tray 109. Further, the liquid is advanced through the conduit interior 219 in the directions of arrows 215 and 217 by the suction force of the liquid pump 207, and is finally guided to the pump 207. The liquid introduced into the pump 207 is discharged from a discharge port (not shown) to the outside of the pump.

Further, the operation of the cleaning apparatus will be described with reference to FIGS.
As shown in FIG. 5, first, the electronic component moving device 101 is connected to the suction unit 201 in the liquid. That is, the tray receiving member 111 is connected to the upper surface side of the suction attachment 203, and the aforementioned suction circuit is formed. In this state, since the liquid pump 207 of the suction unit 201 is driven, a suction force in the direction of the tray receiving member 111 (arrow 213) acts on the slider 103, so that the slider 103 is securely held. .

  Further, when the tray receiving member 111 is raised by the driving unit 135 while the liquid pump 207 of the suction unit 201 is driven, the suction attachment 203 and the tray receiving member 111 are separated. At this time, the liquid around the suction attachment 203 flows into the internal space 209 by the suction force of the liquid pump 207. As a result, the slider 103 maintains the suction force in the direction of pressing against the tray 109 (arrow 213), and the slider 103 is held on the tray 109.

  Next, as shown in FIG. 1, the drive unit 135 is driven so that the frame body 112 of the tray receiving member 111 is rotated around the axis 119 so that the tray 109 has a predetermined inclination angle α with respect to the liquid surface 147 ( Pivot (in the direction of arrow 155).

  Further, when the drive unit 135 is driven to raise the tray 109, the slider 103 reaches the vicinity of the liquid level 147, and the surface tension of the liquid level 147 acts on the slider 103. This state is shown in FIG.

  FIG. 2 is a partial cross-sectional view showing the ascending process of the electronic component moving device 101. FIG. 3 is an enlarged view of a portion III in FIG. Hereinafter, the surface tension generated in the slider when the electronic component moving apparatus according to the present embodiment is used will be described.

  FIG. 3 shows a state in which the liquid level 147 is slightly above the corner 103e formed by the upper surface 103a and the left side surface 103c of the slider 103. FIG. A force pulling in the direction of arrow 149 acts on the upper surface 103a of the slider 103 due to the surface tension of the right liquid level 147a, and a force pulling in the direction of arrow 151 due to the surface tension of the left liquid level 147b acts on the left side surface 103c of the slider 103. Work. As a result, an upward pulling force 153 acts on the upper surface 103a and the left side surface 103c of the slider 103. The upward pulling force 153 causes a force that causes the slider 103 to abut against the side wall 139 b of the slider accommodating recess 139. As described above, in the configuration in which the side wall 139b extends in the direction orthogonal to the upper surface 109a of the tray 109, the extending direction of the side wall is shifted with respect to the direction perpendicular to the liquid surface. It is possible to prevent detachment from the recess.

  Thus, by tilting the tray receiving member 111 by the predetermined angle α and moving the slider 103, even if there is a section where suction force cannot be applied to the suction hole, it resists the surface tension to be removed from the tray. Thus, the slider can be securely held.

  When the inclination angle α is in the range of about 5 degrees to about 20 degrees, the slider 103 did not leave the tray 109. Further, when the speed of the tray receiving member 111 is in the range of about 16 mm / s to about 48 mm / s in a direction substantially perpendicular to the liquid level, the slider 103 does not leave the tray 109.

  Example 2 in which the electronic component moving device 101 according to the second embodiment is applied to a cleaning device will be briefly described. In the second embodiment, as in the first embodiment, pure water is used as the liquid (cleaning liquid), and a thin film head slider made of a ceramic material mainly composed of aluminum oxide and titanium carbide is used as the slider 303. It was.

  First, the tray guide member 313 of the electronic component moving device 301 is attached to the suction attachment 203 of the suction unit 201 disposed in the liquid as in FIG. An opening (see 112a in FIG. 1) of the tray receiving member 311; an internal space (see 209 in FIG. 1) of a suction attachment (see 203 in FIG. 1); an opening 313e in the tray guide member 313; A suction circuit is composed of a conduit (see 205 in FIG. 1) and a tube (see 211 in FIG. 1). In this state, a suction force in the direction of the tray receiving member 311 acts on the slider 303 by a liquid pump (see FIG. 1) or the like, so that the slider 303 is securely held.

  Next, the tray guide member 313 is pivoted so that the center line 313d of the tray guide member 313 is at a predetermined inclination angle α with respect to the liquid level 347, and the coupling between the suction attachment and the tray guide member 311 is released. .

  Then, as shown in FIG. 4, the tray guide member 313 is moved by the driving member 335 along the center line 313d to move the slider 303 out of the liquid. The relationship between the slider 303 and the liquid level 347 is the same as the relationship shown in FIG. That is, when the tray guide member 313 is tilted with respect to the liquid level 347 and the upper surface 303a and the liquid level 347 of the slider 303 are at a predetermined tilt angle α, the slider 303 is scattered over the liquid level. Can be avoided. Therefore, the engagement state between the slider 303 and the slider accommodating recess 339 is ensured against the surface tension generated in the slider 303.

  When the tilt angle α is in the range of about 5 degrees to about 20 degrees, the slider 303 did not leave the tray 309.

  Although the tray used in the embodiment and the example is a slider accommodating recess having a rectangular cross section, the shape is not limited to this. In other words, the protrusion may be formed on the surface of the tray so as to surround the region where the slider is placed.

  Furthermore, the tray is provided with a suction hole, but needless to say, it is not necessary to provide it when it is not necessary to suck the slider in the liquid, and the electronic component such as the slider and the liquid surface have a predetermined inclination angle. As long as the tray can be made, the shape of the tray can be appropriately changed.

  In the embodiment and the example, only the process of transporting the slider in the liquid to the outside of the liquid has been described, but the process of transporting the slider in the liquid to the liquid is opposite to the operation from the liquid to the liquid outside. Needless to say, the process can be implemented.

  In the embodiment and the example, the second suction attachment is fixedly arranged and only the tray receiving member can be moved in the vertical direction. However, the second suction attachment may be configured to be movable in the vertical direction. Needless to say.

  In the embodiments and examples, the slider is used as the electronic component, but it goes without saying that other fine electronic components such as other multilayer chips can be used.

  In the embodiments and examples, the drive unit is connected to the upper surface side of the tray holding member. However, the drive unit may be mounted on the lower surface side of the tray holding member and moved up and down.

  The present invention can be embodied in many forms without departing from its essential characteristics. Therefore, it is needless to say that the above-described embodiment is exclusively for description and does not limit the present invention.

It is a front view which shows the electronic component moving apparatus of 1st Embodiment of this invention. It is a figure which shows the state which raises the electronic component moving apparatus of FIG. It is an enlarged view of the III part of FIG. It is a front view which shows the electronic component moving apparatus of 2nd Embodiment of this invention. It is a fragmentary sectional view of the washing | cleaning apparatus which is an Example which applied the electronic component moving apparatus of 1st Embodiment of this invention. It is a figure which shows the surface tension which acts on a slider. It is sectional drawing of the jig | tool used with the conventional washing | cleaning apparatus. It is an expanded view of the holder used with the other conventional washing | cleaning apparatus.

Explanation of symbols

101, 301 Electronic component moving device 103, 303 Slider 109, 309 Tray 111, 311 Tray receiving member 313 Tray guide member 135, 335 Drive unit 207 Liquid pump

Claims (4)

An electronic component moving device for moving the electronic component in and out of the liquid using a tray having a plurality of electronic component receiving recesses for storing a plurality of electronic components,
A tray holding member to which the tray is detachably mounted;
Moving means for moving the tray holding member,
When the tray holding member holds the tray at an inclination angle of 5 degrees to 20 degrees, the electronic component accommodated in the electronic component accommodating recess of the tray is in a position intersecting the liquid level with respect to the liquid level. an inclined state Te and Do Ri,
The side wall on the moving means side inside the accommodating recess is lower than the height of the electronic component and extends parallel to the side surface of the electronic component,
In the position intersecting with the liquid level, the side surface abuts on the side wall, and the corner of the electronic component continuing to the side surface protrudes from the surface of the tray provided with the receiving recess. Electronic component moving device.   The electronic component moving apparatus according to claim 1, wherein the tray is moved in a substantially vertical direction with respect to the liquid level while the tray is held at the tilt angle.   2. The electronic component moving device according to claim 1, wherein the tray is moved at the inclination angle with respect to the liquid level while the tray is held at the inclination angle.   The electronic component moving apparatus according to claim 2, wherein the tray holding member is moved by the moving unit at a speed of 16 mm / s to 48 mm / s.

Images