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JP4378128B2 - 3D shape measurement method - Google Patents
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JP4378128B2 - 3D shape measurement method - Google Patents

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JP4378128B2
JP4378128B2 JP2003278388A JP2003278388A JP4378128B2 JP 4378128 B2 JP4378128 B2 JP 4378128B2 JP 2003278388 A JP2003278388 A JP 2003278388A JP 2003278388 A JP2003278388 A JP 2003278388A JP 4378128 B2 JP4378128 B2 JP 4378128B2
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Description

本発明は、被測定物の外形形状を光学的に3次元で測定する3次元形状測定方法に関する。   The present invention relates to a three-dimensional shape measuring method for optically measuring the outer shape of an object to be measured in three dimensions.

従来より、モアレトポグラフィに代表されるような縞を利用し、被測定物上に縞状パターンを投影し、被測定物の形状により変形した縞模様と基準の縞模様を重ね合わせ、その差周波数として生じる等高線を示すモアレ縞を解析することにより、被測定物の3次元形状を測定する方法として、例えば、特許文献1や特許文献2にあるような方法が知られている。このような方法では、被測定物上にできた縞模様をCCDカメラにより撮像して、解析している。
特開昭53−68267号公報 特開昭61−260107号公報
Conventionally, using stripes as typified by moire topography, projecting a striped pattern onto the object to be measured, superimposing the stripe pattern deformed according to the shape of the object to be measured, and the reference stripe pattern, and the difference frequency As a method of measuring the three-dimensional shape of the object to be measured by analyzing moire fringes indicating contour lines generated as described above, for example, methods disclosed in Patent Document 1 and Patent Document 2 are known. In such a method, a striped pattern formed on the object to be measured is imaged and analyzed by a CCD camera.
JP-A-53-68267 JP 61-260107 A

しかしながら、こうした従来の方法では、被測定物が小さい場合は、被測定物全体をCCDカメラで撮像して解析しても、十分な測定精度が得られるが、被測定物が大きい場合、一度で被測定物全体を撮像したのでは、十分な解像度が得られない場合がある。   However, in such a conventional method, when the object to be measured is small, sufficient measurement accuracy can be obtained even if the entire object to be measured is imaged and analyzed with a CCD camera. If the whole object to be measured is imaged, sufficient resolution may not be obtained.

そのような場合には、被測定物の一部を撮像して3次元形状を測定し、次に、場所を変えて、被測定物の他の一部を撮像して3次元形状を測定し、これを繰り返して全体の3次元形状を測定しているが、分けて測定した測定値を一つの基準座標系の測定値に合成する作業が繁雑であるという問題があった。   In such a case, image a part of the object to be measured to measure the three-dimensional shape, and then change the location and image another part of the object to be measured to measure the three-dimensional shape. The whole three-dimensional shape is measured by repeating this, but there is a problem that the work of combining the measured values separately measured into the measured values of one reference coordinate system is complicated.

本発明の課題は、大きな被測定物であっても容易に3次元測定できる3次元形状測定方法を提供することにある。   An object of the present invention is to provide a three-dimensional shape measuring method capable of easily measuring three-dimensionally even a large object to be measured.

かかる課題を達成すべく、本発明は課題を解決するため次の手段を取った。即ち、
それぞれ3次元形状が異なる複数のマーカーを被測定物の測定箇所に取り付け、同時に2つの前記マーカーを含む前記被測定物の部分領域を形状測定手段により前記マーカーと共に光学的に3次元測定して測定値を得て、その後、前記形状測定手段を移動して、2つの前記マーカーの一方と別の1つの前記マーカーとを含む他の測定箇所の部分領域を光学的に3次元測定して測定値を得て、前記マーカーの3次元形状に基づいて、前記各測定値を同一座標系に変換し、前記被測定物の外形形状を測定することを特徴とする3次元形状測定方法がそれである。前記マーカーは、非対称の3次元形状であることが好ましい。
In order to achieve this problem, the present invention has taken the following measures in order to solve the problem. That is,
A plurality of markers each having a different three-dimensional shape are attached to the measurement location of the object to be measured, and at the same time , a partial region of the object to be measured including two of the markers is optically three-dimensionally measured together with the marker by the shape measuring means. After obtaining the value, the shape measuring means is moved, and a measured value is obtained by optically measuring three-dimensionally a partial region of another measurement location including one of the two markers and another one of the markers. The three-dimensional shape measuring method is characterized in that, based on the three-dimensional shape of the marker, each measured value is converted into the same coordinate system, and the outer shape of the object to be measured is measured. The marker preferably has an asymmetric three-dimensional shape.

あるいは、前記複数のマーカーは、それぞれ高さが異なるようにしてもよい。
Or, the plurality of markers may be each different heights so.

前述したように本発明の3次元形状測定方法によると、大きな被測定物であっても十分な精度で容易に3次元測定できるという効果を奏する。   As described above, according to the three-dimensional shape measuring method of the present invention, there is an effect that even a large object to be measured can be easily three-dimensionally measured with sufficient accuracy.

以下本発明を実施するための最良の形態を図面に基づいて詳細に説明する。
図1に示すように、1は被測定物であり、例えば、乗用車の車体等の大型の3次元形状の外形を有するものである。この被測定物1の3次元形状を光学的に測定する形状測定器2を備え、この形状測定器2は、CCDカメラ4とフリンジプロジェクター6と制御装置8とを備えている。CCDカメラ4とフリンジプロジェクター6とは、制御装置8に接続されている。
The best mode for carrying out the present invention will be described below in detail with reference to the drawings.
As shown in FIG. 1, reference numeral 1 denotes an object to be measured, which has, for example, a large three-dimensional shape such as a car body of a passenger car. A shape measuring device 2 that optically measures the three-dimensional shape of the object to be measured 1 is provided. The shape measuring device 2 includes a CCD camera 4, a fringe projector 6, and a control device 8. The CCD camera 4 and the fringe projector 6 are connected to the control device 8.

形状測定器2は、フリンジプロジェクター6が複数の格子を被測定物1の表面に投影し、CCDカメラ4がこの被測定物1の外形形状に応じて変形した格子を撮像する。そして、この変形格子と基準格子とに基づいて、制御装置8が被測定物1の3次元形状を測定し、3次元形状の測定値を得るものである。   In the shape measuring instrument 2, the fringe projector 6 projects a plurality of gratings on the surface of the device under test 1, and the CCD camera 4 images the lattice deformed according to the external shape of the device under test 1. And based on this deformation | transformation grating | lattice and a reference | standard grating | lattice, the control apparatus 8 measures the three-dimensional shape of the to-be-measured object 1, and obtains the measured value of a three-dimensional shape.

形状測定器2は、CCDカメラ4により撮像する領域Sが広ければ解像度が低下して測定精度が粗くなり、撮像する領域Sが狭ければ十分な解像度が得られて測定精度が精密になる。従って、必要な測定精度を得ようとすると、CCDカメラ4により撮像する領域Sの面積が限定され、被測定物1の部分領域を測定することになる。形状測定器2は、3次元の部分座標系に基づいた測定値を出力する。部分座標系は、形状測定器2が有する座標系であり、形状測定器2を移動して別の箇所を測定した際には、それらの測定値の部分座標系が異なり、そのままでは、それらの測定値をつなぎ合わせて、1つの測定値とすることはできない。   In the shape measuring instrument 2, if the area S imaged by the CCD camera 4 is wide, the resolution decreases and the measurement accuracy becomes rough. If the area S to be imaged is narrow, sufficient resolution is obtained and the measurement accuracy becomes precise. Therefore, if an attempt is made to obtain the required measurement accuracy, the area of the region S imaged by the CCD camera 4 is limited, and the partial region of the DUT 1 is measured. The shape measuring instrument 2 outputs a measurement value based on a three-dimensional partial coordinate system. The partial coordinate system is a coordinate system that the shape measuring instrument 2 has, and when the shape measuring instrument 2 is moved to measure another location, the partial coordinate systems of those measured values are different. Measurement values cannot be joined together to form one measurement value.

そこで、3次元形状測定の際には、第1マーカーM1が貼り付けられる。第1マーカーM1は、図3(イ)に示すように、3次元形状に形成されており、被測定物1に貼り付けられる。貼り付けは、第1マーカーM1に設けた磁石により被測定物1に貼り付けるようにしてもよく、あるいは、接着剤や両面接着テープにより貼り付けるようにしてもよい。   Therefore, the first marker M1 is pasted when measuring the three-dimensional shape. As shown in FIG. 3A, the first marker M1 is formed in a three-dimensional shape and is attached to the DUT 1. The affixing may be affixed to the DUT 1 with a magnet provided on the first marker M1, or may be affixed with an adhesive or a double-sided adhesive tape.

第1マーカーM1の形状は、3次元の立体形状に形成されており、本実施形態では、直方体あるいは立方体の一部を、上面12から斜めに切り欠いて2つの傾斜面14,16を形成している。上面12と2つの傾斜面14,16の交点を基準点18としていると共に、上面12は辺が直交する正方形あるいは長方形となるように形成されている。   The shape of the first marker M1 is formed in a three-dimensional solid shape, and in this embodiment, a rectangular parallelepiped or a part of a cube is cut out obliquely from the upper surface 12 to form two inclined surfaces 14 and 16. ing. The intersection of the upper surface 12 and the two inclined surfaces 14 and 16 is used as a reference point 18, and the upper surface 12 is formed to be a square or a rectangle whose sides are orthogonal.

これにより、第1マーカーM1は、3次元の立体に形成されると共に、非対称形状に形成されている。即ち、第1マーカーM1は、第1マーカーM1を形状測定器2により方向を変えて測定した際、測定方向の違いを第1マーカーM1の形状から判別できるように形成されている。即ち、形状が円錐のような対称形状であると、どの方向から見ても形状が同じになり、形状から方向を判別できない。   Accordingly, the first marker M1 is formed in a three-dimensional solid shape and is formed in an asymmetric shape. That is, the first marker M1 is formed so that the difference in measurement direction can be determined from the shape of the first marker M1 when the first marker M1 is measured by changing the direction with the shape measuring instrument 2. That is, when the shape is a symmetric shape such as a cone, the shape is the same from any direction, and the direction cannot be determined from the shape.

また、本実施形態では、複数の形状の異なるマーカーが用意されている。前述した図3(イ)に示す第1マーカーM1の傾斜面14,16より下の高さh1が異なる、図3(ロ)に示す高さh2の第2マーカーM2が用意されている。これらの第1及び第2マーカーM1,M2の3次元形状は、予め測定されて、制御装置8に記憶されている。尚、第1及び第2マーカーM1,M2の違いは、この高さ違いに限らず、上面12の大きさの違いを判別できるようにしてもよい。 In the present embodiment, a plurality of markers having different shapes are prepared. There is prepared a second marker M2 having a height h2 shown in FIG. 3 (b) in which the height h1 below the inclined surfaces 14, 16 of the first marker M1 shown in FIG. 3 (a) is different. The three-dimensional shapes of the first and second markers M1 and M2 are measured in advance and stored in the control device 8. The difference between the first and second markers M1 and M2 is not limited to this height difference, and the difference in size of the upper surface 12 may be determined .

次に、制御装置8で行われる測定処理について、図4のフローチャートによって説明する。
まず、3次元形状の測定に先立って、第1及び第2マーカーM1,M2が測定箇所に張り付けられる。第1及び第2マーカーM1,M2は、図2に示すように、CCDカメラ4により撮像する部分領域S1,S2,S3の領域内に貼り付けられる。例えば、形状測定器2による撮像領域は矩形であり、第1マーカーM1は、第1部分領域S1の角端に貼り付けられ、第2部分領域S2は、この第1部分領域S1に貼り付けられた第1マーカーM1を角端に含む領域として設定される。
Next, the measurement process performed by the control device 8 will be described with reference to the flowchart of FIG.
First, prior to the measurement of the three-dimensional shape, the first and second markers M1 and M2 are attached to the measurement location. As shown in FIG. 2, the first and second markers M <b> 1 and M <b> 2 are affixed in the areas of the partial areas S <b> 1, S <b> 2 and S <b> 3 captured by the CCD camera 4. For example, the imaging region by the shape measuring instrument 2 is a rectangle, the first marker M1 is attached to the corner end of the first partial region S1, and the second partial region S2 is attached to the first partial region S1. The first marker M1 is set as a region including the corner end.

また、第2部分領域S2には、高さが異なる別の第2マーカーM2が第2部分領域S2の角端に貼り付けられる。第3部分領域S3は、この第2部分領域S2に貼り付けられた第2マーカーM2を角端に含む領域として設定される。尚、本実施形態では、第1〜第3部分領域S1〜S3の測定について説明したが、更に、これ以上の部分領域を測定する場合には、同様に、共通のマーカーを含むように設定すればよい。   In the second partial region S2, another second marker M2 having a different height is attached to the corner end of the second partial region S2. The third partial region S3 is set as a region including the second marker M2 attached to the second partial region S2 at the corner end. In the present embodiment, the measurement of the first to third partial areas S1 to S3 has been described. However, when measuring more partial areas, similarly, the measurement should be performed so as to include a common marker. That's fine.

そして、第1及び第2マーカーM1,M2を貼り付けた後、形状測定器2により被測定物1の各第1〜第3部分領域S1〜S3を撮像する。撮像したデータは、制御装置8に記憶される。形状測定器2により第1〜第3部分領域S1〜S3を撮像する際には、形状測定器2を測定者が移動して撮像するか、あるいは、形状測定器2をロボットのアーム先端に取り付けて、ロボットにより移動するようにしてもよい。移動は平行移動である必要はなく、移動量を測定する必要もない。   And after sticking the 1st and 2nd marker M1, M2, each 1st-3rd partial area | region S1-S3 of the to-be-measured object 1 is imaged with the shape measuring device 2. FIG. The imaged data is stored in the control device 8. When the first to third partial areas S1 to S3 are imaged by the shape measuring device 2, the measurer moves the image to measure the shape measuring device 2, or the shape measuring device 2 is attached to the tip of the robot arm. The robot may be moved by a robot. The movement does not need to be a parallel movement, and it is not necessary to measure the movement amount.

そして、3次元形状測定処理では、この撮像したデータから、まず、第1部分領域S1の測定値Ps1(s1xn,s1yn,s1zn)を算出する(ステップ100)。添字nはn個の測定点があることを示す。第2、第3部分領域S2,S3についても同様である。   In the three-dimensional shape measurement process, first, a measurement value Ps1 (s1xn, s1yn, s1zn) of the first partial region S1 is calculated from the captured data (step 100). The subscript n indicates that there are n measurement points. The same applies to the second and third partial regions S2 and S3.

次に、第1部分領域S1の測定値Ps1(s1xn,s1yn,s1zn)から第1マーカーM1を認識する(110)。第1マーカーM1の認識は、予め第1マーカーM1の3次元形状を記憶して、この記憶した3次元形状に基づいて、第1マーカーM1を認識する。   Next, the first marker M1 is recognized from the measured value Ps1 (s1xn, s1yn, s1zn) of the first partial region S1 (110). For the recognition of the first marker M1, the three-dimensional shape of the first marker M1 is stored in advance, and the first marker M1 is recognized based on the stored three-dimensional shape.

続いて、認識した第1マーカーM1の位置及び姿勢を算出する(120)。位置は、第1マーカーM1の基準点18の3次元座標値(x11,y11,z11)である。姿勢は第1マーカーM1の部分座標系での3次元の方向を示し、例えば、部分座標系での直交座標と第1マーカーM1の上面12の辺及び垂線とのなす角度を示す値(a11,b11,c11)として算出する。   Subsequently, the position and orientation of the recognized first marker M1 are calculated (120). The position is a three-dimensional coordinate value (x11, y11, z11) of the reference point 18 of the first marker M1. The posture indicates a three-dimensional direction in the partial coordinate system of the first marker M1, for example, a value (a11, which indicates an angle formed by the orthogonal coordinates in the partial coordinate system and the side and perpendicular of the upper surface 12 of the first marker M1. b11, c11).

次に、第1マーカーM1であるか、第2マーカーM2であるかの個別認識を実行する(130)。個別認識は、本実施形態では、高さh1,h2の違いにより判別する。尚、同じ形状の場合には、上面12に表示した文字やバーコードにより個別認識してもよい。あるいは、各第1マーカーM1の上面12の形状をそれぞれ異なるものとし、この上面12の形状に基づいて個別認識するようにしてもよい。   Next, individual recognition of whether the marker is the first marker M1 or the second marker M2 is executed (130). In the present embodiment, individual recognition is determined based on the difference between the heights h1 and h2. In the case of the same shape, it may be individually recognized by characters or barcodes displayed on the upper surface 12. Alternatively, the shape of the upper surface 12 of each first marker M1 may be different, and individual recognition may be performed based on the shape of the upper surface 12.

制御装置8に記憶されている第2、第3部分領域S2,S3毎の撮像したデータについて、前述したステップ100〜130の処理を繰り返し、被測定物1の第2、第3部分領域S2,S3の測定値Ps2,Ps3を算出する(ステップ100)。次に、第1、第2マーカーM1,M2の認識を行い(ステップ110)、第1、第2マーカーM1,M2の位置・姿勢を算出する(ステップ120)。そして、第1、第2マーカーM1,M2の個別認識を実行する(ステップ130)。   With respect to the imaged data for each of the second and third partial areas S2 and S3 stored in the control device 8, the above-described steps 100 to 130 are repeated, and the second and third partial areas S2 and S2 of the DUT 1 are measured. The measured values Ps2 and Ps3 of S3 are calculated (step 100). Next, the first and second markers M1 and M2 are recognized (step 110), and the positions and orientations of the first and second markers M1 and M2 are calculated (step 120). Then, individual recognition of the first and second markers M1 and M2 is executed (step 130).

第1部分領域S1 第1マーカーM1 x11,y11,z11,a11,b11,c11
第2部分領域S2 第1マーカーM1 x21,y21,z21,a21,b21,c21
第2部分領域S2 第2マーカーM2 x22,y22,z22,a22,b22,c22
第3部分領域S3 第2マーカーM2 x32,y32,z32,a32,b32,c32
更に、部分領域がある場合には(ステップ140)、引き続き繰り返し実行して、各部分領域毎にマーカーを認識すると共に、位置・姿勢を算出し、マーカーを個別に認識する。
1st partial area S1 1st marker M1 x11, y11, z11, a11, b11, c11
Second partial region S2 First marker M1 x21, y21, z21, a21, b21, c21
Second partial region S2 Second marker M2 x22, y22, z22, a22, b22, c22
Third partial region S3 Second marker M2 x32, y32, z32, a32, b32, c32
Further, if there is a partial area (step 140), the process is repeatedly executed repeatedly to recognize the marker for each partial area, calculate the position / posture, and individually recognize the marker.

第n部分領域Sn 第mマーカーMm xnm,ynm,znm,anm,bnm,cnm
続いて、第1〜第n部分領域S1〜Snの測定値Ps1〜Psnを、共通の3次元座標系に変換する処理を実行する(ステップ200)。3次元位置変換処理では、図5に示すように、まず、第1マーカーM1の基準点18の位置・姿勢に基づいて、下記式により座標変換係数R1を算出する(ステップ210)。ここで、[R1]はマトリックスである。
N-th partial region Sn m-th marker Mm xnm, ynm, znm, anm, bnm, cnm
Subsequently, a process of converting the measurement values Ps1 to Psn of the first to nth partial regions S1 to Sn into a common three-dimensional coordinate system is executed (step 200). In the three-dimensional position conversion process, as shown in FIG. 5, first, based on the position / posture of the reference point 18 of the first marker M1, a coordinate conversion coefficient R1 is calculated by the following equation (step 210). Here, [R1] is a matrix.

(x11,y11,z11,a11,b11,c11)=[R1]×(x21,y21,z21,a21,b21,c21)
即ち、第1部分領域S1の測定値Ps1から算出した第1マーカーM1の基準点18の位置(x11,y11,z11)及び姿勢(a11,b11,c11)と、第2部分領域S2の測定値Ps2から算出した同じ第1マーカーM1の基準点18の位置(x21,y21,z21)及び姿勢(a21,b21,c21)とから、第2部分領域S2の測定値Ps2の部分座標系を、第1部分領域S1の部分座標系に変換するための座標変換係数R1を算出する。
(X11, y11, z11, a11, b11, c11) = [R1] × (x21, y21, z21, a21, b21, c21)
That is, the position (x11, y11, z11) and posture (a11, b11, c11) of the reference point 18 of the first marker M1 calculated from the measured value Ps1 of the first partial region S1, and the measured values of the second partial region S2. From the position (x21, y21, z21) and posture (a21, b21, c21) of the reference point 18 of the same first marker M1 calculated from Ps2, the partial coordinate system of the measured value Ps2 of the second partial region S2 is A coordinate conversion coefficient R1 for conversion into the partial coordinate system of one partial area S1 is calculated.

第1マーカーM1の基準点18を基準として、第1部分領域S1の第1マーカーM1の基準点18に、第2部分領域S2の第1マーカーM1の基準点18を重ね合わせるために、平行移動する変換成分と、第1部分領域S1の第1マーカーM1の姿勢及び第2部分領域S2のマーカーの姿勢とが同じになるように回転移動して重ね合わせる変換成分とを、座標変換係数R1が含んでいる。   Translation is performed with the reference point 18 of the first marker M1 in the second partial region S2 being superimposed on the reference point 18 of the first marker M1 in the second partial region S2 with respect to the reference point 18 of the first marker M1. The coordinate conversion coefficient R1 is a transformation component that is rotated and overlapped so that the orientation of the first marker M1 in the first partial region S1 and the orientation of the marker in the second partial region S2 are the same. Contains.

続いて、この座標変換係数R1を用いて、第2部分領域S2の測定値Ps2を第1部分領域S1の部分座標系に変換する(ステップ220)。
Ps2’=[R1]×Ps2
次に、第2部分領域S2の第2マーカーM2を第1部分領域S1の部分座標系に変換する(ステップ230)。
Subsequently, the measured value Ps2 of the second partial region S2 is converted into the partial coordinate system of the first partial region S1 using the coordinate conversion coefficient R1 (step 220).
Ps2 ′ = [R1] × Ps2
Next, the second marker M2 in the second partial area S2 is converted into the partial coordinate system of the first partial area S1 (step 230).

(x22',y22',z22',a22',b22',c22')=[R1]×(x22,y22,z22,a22,b22,c22)
即ち、第3部分領域S3の測定値Ps3を第1部分領域S1の部分座標系に変換するために、まず、座標変換係数R1により、第2部分領域S2の第2マーカーM2の位置・姿勢を第1部分領域S1の部分座標系に変換する。
(X22 ′, y22 ′, z22 ′, a22 ′, b22 ′, c22 ′) = [R1] × (x22, y22, z22, a22, b22, c22)
That is, in order to convert the measurement value Ps3 of the third partial region S3 into the partial coordinate system of the first partial region S1, first, the position / posture of the second marker M2 of the second partial region S2 is determined by the coordinate conversion coefficient R1. Conversion into the partial coordinate system of the first partial region S1 is performed.

続いて、この第1部分領域S1の部分座標系に変換した第2マーカーM2の位置・姿勢と、第3部分領域S3の第2マーカーM2の位置・姿勢とを用いて、第3部分領域S3の測定値Ps3を第1部分領域S1の部分座標系に変換するための座標変換係数R2を算出する(ステップ240)。ここで、[R2]はマトリックスである。   Subsequently, using the position / posture of the second marker M2 converted into the partial coordinate system of the first partial region S1 and the position / posture of the second marker M2 of the third partial region S3, the third partial region S3 is used. A coordinate conversion coefficient R2 for converting the measured value Ps3 into the partial coordinate system of the first partial region S1 is calculated (step 240). Here, [R2] is a matrix.

(x22',y22',z22',a22',b22',c22')=[R2]×(x32,y32,z32,a32,b32,c32)
次に、第3部分領域S3の測定値Ps3を第1部分領域S1の部分座標系に変換する(ステップ250)。
(X22 ′, y22 ′, z22 ′, a22 ′, b22 ′, c22 ′) = [R2] × (x32, y32, z32, a32, b32, c32)
Next, the measurement value Ps3 of the third partial region S3 is converted into the partial coordinate system of the first partial region S1 (step 250).

Ps3’=[R2]×Ps3
更に、部分領域の測定値がある場合には(ステップ260)、前述したステップ230〜250と同様の処理を実行して(ステップ270)、第1部分領域S1の部分座標系に変換して、一旦本制御処理を終了する。これにより、各測定値Ps1〜Psnは、第1部分領域S1の座標系に変換され、被測定物1の全体を解像度よく、十分な精度で容易に測定できる。
Ps3 ′ = [R2] × Ps3
Further, when there is a measurement value of the partial area (step 260), the same processing as the above-described steps 230 to 250 is executed (step 270), and converted into the partial coordinate system of the first partial area S1, This control process is once terminated. Thereby, each measured value Ps1-Psn is converted into the coordinate system of 1st partial area | region S1, and the whole to-be-measured object 1 can be easily measured with sufficient precision with sufficient resolution.

以上本発明はこの様な実施形態に何等限定されるものではなく、本発明の要旨を逸脱しない範囲において種々なる態様で実施し得る。   The present invention is not limited to such embodiments as described above, and can be implemented in various modes without departing from the gist of the present invention.

本発明の一実施形態としての3次元形状測定方法の実施に用いる形状側定器の概略構成図である。It is a schematic block diagram of the shape side fixed device used for implementation of the three-dimensional shape measuring method as one Embodiment of this invention. 本実施形態の複数のマーカーの貼り付け箇所の説明図である。It is explanatory drawing of the attachment location of the some marker of this embodiment. 本実施形態のマーカーの斜視図である。It is a perspective view of the marker of this embodiment. 本実施形態の制御装置において行われる3次元形状測定処理のフローチャートである。It is a flowchart of the three-dimensional shape measurement process performed in the control apparatus of this embodiment. 本実施形態の制御装置において行われる3次元位置変換処理のフローチャートである。It is a flowchart of the three-dimensional position conversion process performed in the control apparatus of this embodiment.

符号の説明Explanation of symbols

1…被測定物 2…形状測定器
4…CCDカメラ
6…フリンジプロジェクター
8…制御装置 12…上面
14,16…傾斜面 18…基準点
M1…第1マーカー M2…第2マーカー
S1…第1部分領域 S2…第2部分領域
S3…第3部分領域
DESCRIPTION OF SYMBOLS 1 ... Object to be measured 2 ... Shape measuring instrument 4 ... CCD camera 6 ... Fringe projector 8 ... Control device 12 ... Upper surface 14, 16 ... Inclined surface 18 ... Reference point M1 ... 1st marker M2 ... 2nd marker S1 ... 1st part Region S2 ... Second partial region S3 ... Third partial region

Claims (3)

それぞれ3次元形状が異なる複数のマーカーを被測定物の測定箇所に取り付け、同時に2つの前記マーカーを含む前記被測定物の部分領域を形状測定手段により前記マーカーと共に光学的に3次元測定して測定値を得て、その後、前記形状測定手段を移動して、2つの前記マーカーの一方と別の1つの前記マーカーとを含む他の測定箇所の部分領域を光学的に3次元測定して測定値を得て、前記マーカーの3次元形状に基づいて、前記各測定値を同一座標系に変換し、前記被測定物の外形形状を測定することを特徴とする3次元形状測定方法。 A plurality of markers each having a different three-dimensional shape are attached to the measurement location of the object to be measured, and at the same time , a partial region of the object to be measured including two of the markers is optically three-dimensionally measured together with the marker by the shape measuring means. After obtaining the value, the shape measuring means is moved, and a measured value is obtained by optically measuring three-dimensionally a partial region of another measurement location including one of the two markers and another one of the markers. And measuring the outer shape of the object to be measured by converting the measured values into the same coordinate system based on the three-dimensional shape of the marker. 前記マーカーは、非対称の3次元形状であることを特徴とする請求項1記載の3次元形状測定方法。 The three-dimensional shape measuring method according to claim 1, wherein the marker has an asymmetric three-dimensional shape. 前記複数のマーカーは、それぞれ高さが異なることを特徴とする請求項1記載の3次元形状測定方法。 The three-dimensional shape measuring method according to claim 1 , wherein the plurality of markers have different heights.
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