JP4387432B2 - Coating film drying equipment - Google Patents

Description

  The present invention relates to a coating film drying apparatus, and more specifically, a coating film drying apparatus configured to support a lower surface of a substrate after coating of a coating solution disposed in a drying area by a support means at a plurality of points. Relates to the device.

  As is well known, a coating film such as an alignment film is formed on the surface of a substrate such as a glass substrate for a liquid crystal display or a semiconductor wafer. In the step of forming these coating films, a coating solution is applied to the surface of the substrate. After forming, the coating liquid is dried by heating. The drying of the coating liquid on the substrate is performed by sequentially supplying the substrate after coating the coating liquid into the drying area of the coating film drying apparatus from the viewpoint of increasing demand for the substrate and mass production associated therewith. It has been put to practical use to automatically perform a drying process on the coating film in the drying area.

  As this type of coating film drying apparatus, for example, as disclosed in the following Patent Documents 1 and 2, in the drying area, the substrate is arranged in a horizontal posture so that the upper surface is the coating surface of the coating liquid, By supporting the lower surface of the substrate at a plurality of points that are alternately different between the plurality of fixed pins and the moving pins, the probability of occurrence of pin marks is suppressed. In this case, the plurality of moving pins become individual supporting means or integrated supporting means, and are configured to be moved up and down by the driving means, whereby the plurality of moving pins are simultaneously moved at once. It abuts and separates from the lower surface of the substrate.

As a known coating film drying apparatus, when roughly classified, a driving means for moving a plurality of moving pins is arranged in a drying area as disclosed in Patent Document 1, and Patent Document 2 As disclosed, there are some which are spaced apart below the center of the drying area.
Japanese Patent No. 3917994 Japanese Patent No. 3597321

  By the way, as disclosed in Patent Document 1, if the driving means of the moving pin (air cylinder or rotary driving body) is disposed in the drying area, in the same publication, in the sealed drying chamber of the drying furnace, Particles are generated from the driving part and sliding part of the driving means, causing contamination of the atmosphere in the drying chamber, and the particles adhere to the substrate, leading to deterioration of the quality of the substrate with the coating film after drying.

  Further, as disclosed in Patent Document 2 above, the driving means (cylinder) of the moving pin overlaps with the area of the drying area below the center of the drying area (drying chamber), that is, in plan view. If it is spaced apart from the drying area, a storage area for the drive means is required below the drying area. For this reason, the drying apparatus cannot be shortened in the vertical direction, and a storage area having the same area as the drying area is required, resulting in wasted space. Furthermore, when multiple stages of drying areas are arranged in the vertical direction for mass production, the same number of storage areas for driving means must be arranged between the respective drying areas, and the overall height of the drying apparatus is extremely high. Since it becomes high, the problem that the number of steps of the drying area is limited to a small number arises.

  In view of the above circumstances, the present invention aims to shorten the vertical direction of the coating film drying apparatus and to increase the number of stages of the drying area while suppressing the adhesion of particles to the substrate in the drying area. Technical issue.

In order to solve the above technical problem, the present invention provides a substrate having a coating liquid coated on the upper surface thereof in a drying area where heating and drying are performed by a heating unit, and two supporting units for supporting the substrate. When the driving means is relatively moved, one supporting means supports the lower surface of the substrate at a plurality of points, and the other supporting means supports the lower surface of the substrate at a plurality of points different from the one supporting means. In the coating film drying apparatus configured to switch to the form to be arranged, the drying areas are arranged adjacent to each other in a plurality of stages in the vertical direction, and the driving means is respectively provided in a plan view for each of the drying areas. The drying area is located only on the outer side of the peripheral area of the drying area, and the height of the driving means is above the drying area adjacent to the driving means in the immediate vicinity of the driving means. Is arranged from the upper end of the range to the lower end of the drying area residing under particular characterized it is. As the above-mentioned “drying area”, there are a drying area as a closed drying chamber whose periphery is closed, and an open type (proximity type) drying area whose periphery is open. In addition, the above-mentioned “the drive means moves the two support means relative to each other” means that the other support means is moved relative to one support means only in the vertical direction, and in addition, in the horizontal plane. In addition to these, it is meant to include relative movement in a direction (Y direction) orthogonal to the one direction in the horizontal plane.

  According to such a configuration, the form in which the lower surface of the substrate is supported at a plurality of points by moving the other support means relative to the one support means by the driving means is the first form and the second form. And the positions of the plurality of support points are changed. Also, when switching from supporting the substrate by one supporting means to supporting the substrate by the other supporting means and then switching to supporting the substrate by one supporting means, the driving means moves the two supporting means relative to each other. By doing so, the position of the previous substrate support point and the current substrate support point by the one support means can be changed. Thereby, generation | occurrence | production of the pin trace in the lower surface of a board | substrate is suppressed. In this case, both of the two support means are present in the area of the drying area in plan view, but the driving means for relatively moving the two support means is a region on the outer side than the peripheral edge of the drying area in plan view. Has been deployed. Therefore, there is no driving means in the drying area where the substrate is disposed, and the problem of particles caused by driving does not occur, and the area where the driving means is disposed and the drying area overlap in plan view. This eliminates the need to provide a storage area for the driving means below or above the drying area. As a result, the vertical dimension of the coating film drying apparatus (coating film drying furnace) can be shortened, and the overall height of the drying apparatus can be reduced even if the drying areas are arranged in multiple stages in the vertical direction. It is possible to increase the number of drying areas.

  In this case, each of the two support means has a plurality of support pins whose upper ends can respectively contact the lower surface of the substrate, and any one of the support means is in the region of the drying area in plan view. It is preferable that a plurality of support pins are arranged on the arranged moving body, and a part of the moving body is extended to an outer side area where the driving means is provided.

  In this way, both of the two support means can support the lower surface of the substrate by the upper ends of the plurality of support pins, and either one of the support means is a moving body that moves by the operation of the drive means. It becomes possible to support the lower surface of the substrate by the upper ends of the plurality of support pins arranged above. And after arrange | positioning a mobile body in the area | region of a dry area by planar view, only the part of a mobile body is extended to the outer side area | region where the drive means was arrange | positioned, The extension part is made. It becomes possible to connect to the driving means. Therefore, it is not necessary to extend the entire circumference of the moving body to the outer side area even though the driving means is arranged in the outer side area, and only the part corresponding to the place where the driving means is arranged is movable. Therefore, the moving body can be reduced in size and weight, and thus the drying apparatus can be reduced in size and weight.

  Of the two support means, the support means different from the support means having the moving body is configured such that a plurality of support pins are arranged on a hot plate as a heating means fixedly installed above or below the moving body. Can be configured.

  In this way, the hot plate as the heating means is effectively used as the support means on the fixed side, and it is only necessary to provide the drive means for the moving body of one support means, thereby reducing the number of parts. It becomes possible.

  In this case, the hot plates are arranged in a plurality of stages in the vertical direction, and the drying areas are formed between the hot plates adjacent to each other in the vertical direction. It is preferable that the driving means is disposed in the region.

  In this way, since the hot plate is effectively used as a partition wall of the drying area adjacent to the upper and lower sides, the overall height of the drying apparatus can be made as low as possible, and the horizontal expansion can also be achieved by driving means. If only the portion to be disposed is enlarged, it is possible to prevent enlargement over the entire circumference, and it is possible to achieve overall compactness and weight reduction of the drying apparatus.

  On the other hand, in the hermetic drying apparatus, the drying area is a sealed space in which a peripheral edge portion in a plan view is covered with a main casing, and a storage space for storing driving means on the outer surface side of the main casing. An auxiliary casing having a portion extending to the outer side region of a part of the movable body is connected to the driving means through the space between the sealed space and the storage space. Is preferred.

  In this way, a single-stage or multiple-stage drying area is formed as a sealed space inside the main casing, and the driving means is stored inside the auxiliary casing attached to the outer surface side of the main casing. A space is formed, and the moving body in the sealed space is moved by the operation of the driving means in the storage space. Therefore, the substrate in the sealed space is supported while being properly moved by the driving means in the storage space.

  In this case, it is preferable that a sealing means is attached to a portion where the extending portion of the moving body penetrates between the sealed space and the storage space.

  In this way, it is possible to appropriately ensure the sealing property of the sealed space in the drying area, even though the storage space for storing the driving means is adjacent to the drying area, and the driving means existing in the storage space. However, the moving body existing in the sealed space can be moved to the substrate without adversely affecting the atmosphere.

  Further, it is preferable that an elastic biasing means for preventing the movable body from being bent downward is interposed between the movable body and the hot plate located below the movable body.

  In this way, even if the movable body is in a state in which the movable body may bend as the substrate supported by the plurality of support pins on the movable body increases in size and weight, the elastic biasing means (for example, The movement of the spring, rubber, etc.) can suppress the occurrence of the bending without hindering the movement of the moving body.

  As described above, according to the coating film drying apparatus of the present invention, the substrate is supported from below in the second form with respect to one supporting means for supporting the substrate from below in the first form within the drying area. Since the driving means for moving the other supporting means relative to each other is arranged in a region on the outer side than the peripheral edge of the drying area in plan view, the driving means does not exist in the drying area, and particles accompanying the driving are removed. Not only does this cause a problem, but the area where the driving means is disposed and the drying area do not overlap in plan view, and there is no need to provide a storage area for the driving means below or above the drying area. As a result, the vertical dimension of the coating film drying apparatus can be shortened, and even if the drying areas are arranged in a plurality of stages in the vertical direction, the overall height of the drying apparatus can be reduced, thereby increasing the number of drying areas. It becomes possible to plan.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic front view showing the overall configuration of a coating film drying apparatus according to the first embodiment of the present invention, and is depicted by cutting the inside, and FIG. 2 is a cross section cut along the line AA in FIG. It is a top view.

  As shown in FIG.1 and FIG.2, the drying apparatus (drying furnace) 1 which concerns on this embodiment has the drying chamber 2 as a drying area arrange | positioned in several steps up and down, and between each drying chamber 2 is hot. Partitioned by a plate 3. In this case, the hot plate 3 excluding the uppermost and lowermost stages is provided with panel-type heaters (not shown) on both the upper surface and the lower surface, and the uppermost hot plate 3 is disposed only on the lower surface. Panel heaters are installed only on the upper surface of the lower hot plate.

  In each of the drying chambers 2 in a plurality of stages, a fixing support means 5 that supports the lower surface of a substrate (for example, a glass substrate for a liquid crystal display) 4 carried in from the outside at a plurality of points, and a lower surface of the substrate 4 A moving support means 6 is provided for supporting a plurality of points different from the fixed support means 5. The fixed support means 5 is configured by arranging a plurality of fixed support pins P1 on the hot plate 3 partitioning the lower side of the corresponding drying chamber 2, and the moving support means 6 is moved by the operation of the driving means 7. A plurality of moving support pins P2 are arranged on the moving body 8.

  More specifically, the fixing support means 5 is fixed to the upper surface of the hot plate 3 in one direction in the horizontal plane (X direction: up and down direction in FIG. 2) at equal intervals and in the other direction perpendicular to the one direction in the horizontal plane. A plurality of (three in the illustrated example) fixing members 9 extending along substantially the entire Y direction of the hot plate 3 along the (Y direction: left and right direction in FIG. 2) are provided. The fixed support pins P1 are erected and fixed at equal pitches in the longitudinal direction (Y direction). FIG. 3 shows a state in which the substrate 4 is supported on the lower surface by a plurality of fixed support pins P <b> 1 of the fixed support means 5. FIG. 3 shows the fixed support pin P1 of the fixed support means 5 and the movable support pin P2 of the movable support means 6 slightly displaced in the Y direction for convenience.

  Further, the movement support means 6 has a moving body 8 made of an assembly frame, and the moving body 8 is a pair of inner and outer extending members 10 extending in the Y direction on the outer sides of both sides in the X direction of the hot plate 3. And a pair of erection members 11 extending in the X direction on both sides in the Y direction of the hot plate 3 and extending over the upper surfaces of the pair of inner and outer extension members 10 are arranged at equal intervals in the X direction. In addition, a plurality of (three in the illustrated example) crosspiece members 12 extending in the Y direction and extending over the upper surfaces of the pair of installation members 11 are provided. A plurality of movement support pins P2 are erected and fixed at equal intervals in the longitudinal direction (Y direction) on each of the plurality of crosspieces 12. FIG. 4 shows a state in which the substrate 4 is supported on the lower surface by a plurality of movement support pins P2 of the movement support means 6. FIG. 4 shows the fixed support pin P1 of the fixed support means 5 and the movement support pin P2 of the movement support means 6 slightly displaced in the Y direction for convenience.

  The coating film drying apparatus 1 belongs to a so-called hermetic type drying apparatus (drying furnace), and the drying chambers 2 in a plurality of stages are each dried by being covered with a single main casing 13 at the peripheral edge in a plan view. Each chamber 2 has a sealed space, and an auxiliary casing 14 having storage spaces S for driving means 7 for moving the moving body 8 on both outer sides of the main casing 13 in the X direction protrudes on both sides in the Y direction. In such a state, it is detachably attached. In other words, the auxiliary casing 14 is fixed to the four corners on the outer surface of the main casing 13. The cross section of the auxiliary casing 14 may be a U shape as shown in FIG. 2 or may be a frame-like rectangle. A frame-shaped base 13a protruding inward is fixed to the inner surface of the main casing 13, and the hot plate 3 is laid on the base 13a. The moving body 8 (excluding a part of the inner / outer extending member 10) is disposed in a region on the inner side of the peripheral edge of the drying chamber 2 in a plan view, whereas the driving means 7 has a flat surface. As a result, it is arranged in a region outside the peripheral edge of the drying chamber 2 in view. In this case, the four driving units 7 can move the moving body 8 in the X direction, the Y direction, and the vertical direction (Z direction) in the horizontal plane while the moving body 8 is maintained in a horizontal posture. It is configured. In this embodiment, the height position of the driving means 7 is substantially the same as that of the hot plate 3, but drying is performed immediately below the hot plate 3 from the upper end of the drying chamber 2 immediately above the hot plate 3. What is necessary is just the height position in the range to the lower end of the chamber 2.

  And the extension part 10a to each Y direction both sides in a pair of inner / outer extension member 10 of the mobile body 8 penetrates between the airtight drying chamber 2 and the storage space S, and in the storage space S It is connected to the driving means 7. In this case, as illustrated in FIG. 5, the drying chamber 2 and the storage space S are provided at a portion where the extending portion 10 a extending to both sides in the Y direction of the moving body 8 passes between the drying chamber 2 and the storage space S. The sealing means 15 for substantially preventing the flow of gas between the two is attached. More specifically, a through hole 16 is formed in the partition 13 a of the main casing 13 (or the main casing 13 and the auxiliary casing 14) that partitions the drying chamber 2 and the storage space S. The partition portion 13a is sandwiched between the insertion portion 10b of the inner and outer extension member 10 inserted with play (play that can be moved in the X, Y, and Z directions by the drive means 7) with a gap interposed therebetween, and the peripheral edge of the through hole 16 A pair of seal plates 17 are fixed so as to project from the outer circumference in the radial direction over the entire circumference. In this case, the insertion portion 10b of the inner / outer extending member 10 and the pair of seal plates 17 are separated even if the inner / outer extending member 10 is moved in the X, Y, and Z directions by the operation of the driving means 7. 13a is configured so as not to interfere with the through hole 16. In addition, a heat insulating material 18 made of Teflon (registered trademark) or the like is interposed in a portion in the storage space S in the extending portion 10a of the inner / outer extending member 10, whereby the driving means 7 is connected to the driving chamber 7 from the drying chamber 2 side. Care is taken not to conduct heat.

  The drive means 7 uses an electric cylinder, air cylinder, servo motor, pulse motor or the like as a drive source. In this embodiment, as shown in FIG. 6, a support plate fixed in the auxiliary casing 14 is used. A Y drive cylinder 7y installed on 14a and serving as a drive source for movement in the Y direction, and an X drive cylinder 7x capable of moving integrally with a retracting rod 7ya of the Y drive cylinder 7y and serving as a drive source for movement in the X direction. And a Z drive cylinder 7z that can move integrally with the retractable rod 7xa of the X drive cylinder 7x and serve as a drive source for movement in the Z direction. The retractable rod 7za of the Z drive cylinder 7z The outer extension member 10 is connected to the extension portion 10a.

  In this case, as the driving means 7, as shown in FIG. 6, one that moves the extending portion 10a of the inner / outer extending member 10 in the three directions X, Y, and Z, and the Y driving cylinder 7y shown in FIG. The X drive cylinder 7x and the Z drive cylinder 7z are appropriately extracted and assembled to move the extending portion 10a in the two directions of Y and Z, and to move the extending portion 10a in the two directions of X and Z And the one that moves the extending portion 10a only in one direction of Z. In the present embodiment, the driving means 7 indicated by reference numeral (C) in FIG. 2 has three driving directions X, Y, and Z, and the driving means 7 indicated by reference numeral (D) has two driving directions Y and Z. The drive means 7 at the location indicated by E) moves the extending portions 10a of the inner and outer extension members 10 in the two directions X and Z, and the drive means 7 indicated by the reference numeral (F) moves in the Z direction. . Thus, by making the four drive means 7 different, even when the moving body 8 is thermally expanded or contracted in the X, Y, and Z directions, the deformation is absorbed smoothly. Can be moved.

  Further, as shown in FIGS. 2 and 7, the elastic body has an upper end fixed to the crosspiece member 12 and a lower end fixed to the upper surface of the hot plate 3 at the longitudinal center of each crosspiece member 12 of the moving body 8. A spring 19 is attached as a biasing means. The springs 19 are interposed between the crosspiece members 12 and the hot plate 3, thereby applying upward force to the crosspiece members 12, and bending the respective crosspiece members 12 downward. It plays the role which prevents the downward bending of the construction member 11 and the inner / outer extension member 10. Even when the spring 19 is inclined by the movement of the moving body 8, it is possible to continuously apply an upward pushing force to each crosspiece member 12.

  According to the drying apparatus 1 according to the first embodiment of the present invention having the above-described configuration, the substrate 4 carried into the drying chamber 2 from the transport port outside the figure is fixedly supported as shown in FIG. The lower surface is supported at a plurality of points by a plurality of fixed support pins P <b> 1 of the means 5, and is held in the vicinity of the central portion in the height direction of the drying chamber 2. Under this state, the transfer port is closed to make the drying chamber 2 a sealed space, and the hot plate 3 above and below the drying chamber 2 is energized and heated, so that the inside of the drying chamber 2 is kept at a constant high temperature. Maintained. Thereby, the process of drying the coating liquid for forming a film such as an alignment film applied on the upper surface of the substrate 4 is started.

  After the elapse of a certain time from such a state, the driving unit 7 is operated, and the moving body 8 composed of the assembly frame body of the moving support unit 6 is raised along the Z direction. The movable support pin P2 is supported at a plurality of points different from the fixed support pin P1. Further, by the operation of the driving means 7, the moving body 8 moves in the X direction or the Y direction or in both directions while the substrate 4 is supported by the plurality of moving support pins P 2, so that the substrate 4 is also the same. Move in the direction. Thereafter, when the driving unit 7 lowers the moving body 8 along the Z direction, the substrate 4 also descends accordingly, and the lower surface of the substrate 4 is again supported by the plurality of fixed support pins P1. At this time, the support point of the lower surface of the substrate 4 by the fixed support pin P1 is different from the previous support point of the lower surface of the substrate 4 by the fixed support pin P1. Further, after a certain time has elapsed from such a state, the moving body 8 is raised along the Z direction by the operation of the driving means 7, thereby supporting the substrate 4 by the moving support pins P <b> 2 and the driving means 7 being the substrate 4. Is moved in the X direction and / or the Y direction and then lowered along the Z direction, whereby the substrate 4 is again supported by the fixed support pins P1. At this time, the support point of the lower surface of the substrate 4 by the fixed support pins P1 is different from the support point of the lower surface of the substrate 4 by the previous and previous fixed support pins P1. By repeating this series of operations, the coating liquid applied to the upper surface of the substrate 4 can be smoothly dried without any problem, and the occurrence of pin marks on the lower surface of the substrate 4 is suppressed.

  Since the driving means 7 for moving the moving support pin P2 to change the support point of the substrate 4 by the fixed support pin P1 is not provided in the drying chamber 2, it is generated with the operation of the driving means 7. As a result, it is not necessary to provide the storage space S of the driving means 7 below or above the drying chamber 2, so that the overall height of the drying apparatus 1 can be reduced. Can be enjoyed. Moreover, the maintenance and inspection of the driving means 7 can be performed by simply removing the auxiliary casing 14 without affecting the drying chamber 2, the hot plate 3, the fixed support means 5 and the moving support means 6. It is also possible to simplify this.

  8 to 10 illustrate a second embodiment of the coating film drying apparatus 1 according to the present invention. The drying apparatus 1 according to the second embodiment belongs to a so-called open type (proximity type), and there is no casing corresponding to the main casing as shown in FIG. The drying area 2 in the middle is open at the periphery in plan view. Accordingly, the four casings 14 corresponding to the auxiliary casings in which the storage spaces S for storing the driving means 7 are formed play the role of the support columns that support the hot plates 3 and the like. Further, as shown in FIGS. 9 and 10, a moving body 8 made of an assembly frame is disposed below each hot plate 3, and each moving support attached to the moving body 8 is attached to each hot plate 3. A plurality of through holes 20 through which the pin P2 is inserted with play (play that can be moved in the X and Y directions by the drive means 7) are formed. 9 shows a state in which the lower surface of the substrate 4 is supported by a plurality of fixed support pins P1, and FIG. 10 shows a state in which the lower surface of the substrate 4 is supported by a plurality of movement support pins P2. The drying apparatus 1 according to the second embodiment is the same as the drying apparatus 1 according to the above-described first embodiment except for the above-described configuration, and thus the same configuration requirements as those of the first embodiment are the same. Reference numerals are assigned and explanations thereof are omitted.

BRIEF DESCRIPTION OF THE DRAWINGS It is the schematic front view which showed the whole structure of the drying apparatus for coating films concerning 1st Embodiment of this invention, and cut and depicted the inside. It is the cross-sectional top view cut | disconnected according to the AA line of FIG. It is the longitudinal cross-sectional view cut | disconnected according to the BB line of FIG. 2, Comprising: It is a figure which shows the effect | action of the coating-film drying apparatus which concerns on the said 1st Embodiment. It is the longitudinal cross-sectional view cut | disconnected according to the BB line of FIG. 2, Comprising: It is a figure which shows the effect | action of the coating-film drying apparatus which concerns on the said 1st Embodiment. It is an expansion cross-sectional top view which shows the principal part of the drying apparatus for coating films concerning the said 1st Embodiment. It is an enlarged vertical front view which shows the principal part of the drying apparatus for coating films which concerns on the said 1st Embodiment. It is an enlarged vertical front view which shows the principal part of the drying apparatus for coating films which concerns on the said 1st Embodiment. It is a cross-sectional top view of the coating-film drying apparatus which concerns on 2nd Embodiment of this invention, Comprising: It is a figure corresponding to FIG. It is the longitudinal cross-sectional view cut | disconnected according to the GG line of FIG. 8, Comprising: It is a figure which shows the effect | action of the coating-film drying apparatus which concerns on the said 2nd Embodiment. It is the longitudinal cross-sectional view cut | disconnected according to the GG line of FIG. 8, Comprising: It is a figure which shows the effect | action of the coating-film drying apparatus which concerns on the said 2nd Embodiment.

Explanation of symbols

1 Drying device for coating film 2 Drying area (drying room)
3 Hot Plate 4 Substrate 5 Fixed Support Means 6 Movement Support Means 7 Drive Means 8 Moving Body (Assembly Frame)
DESCRIPTION OF SYMBOLS 10 Inner / outer extension member 10a Extension part 13 Main casing 14 Auxiliary casing 15 Sealing means 17 Sealing plate 19 Spring (elastic urging means)
S storage space P1 fixed support pin P2 movable support pin

Claims (7)

A substrate having a coating liquid coated on its upper surface is placed in a drying area where heat drying is performed by a heating unit, and the two supporting units for supporting the substrate are moved relative to each other so that one of the supporting units is a substrate. In the coating film drying apparatus configured to switch between a mode in which the lower surface of the substrate is supported at a plurality of points and a mode in which the other support unit supports the lower surface of the substrate at a plurality of points different from the one support unit,
The drying areas are arranged adjacent to each other in a plurality of stages in the vertical direction, and the driving means is provided for each of the drying areas only in a region outside the periphery of the drying area in plan view. And the height position of the drive means is disposed within the range from the upper end of the upper dry area to the lower end of the lower dry area among the upper and lower dry areas in the immediate vicinity of the drive means. a coating film for drying and wherein the are.   Each of the two support means has a plurality of support pins whose upper ends can be brought into contact with the lower surface of the substrate, respectively, and either one of the support means is disposed in the region of the drying area in plan view. 2. The structure according to claim 1, wherein a plurality of support pins are arranged on the movable body, and a part of the movable body is extended to an outer side area where the driving means is provided. Coating film drying equipment.   Of the two support means, the support means different from the support means having the moving body is configured by arranging a plurality of support pins on a hot plate as a heating means stationaryly installed below or above the moving body. It is comprised, The drying apparatus for coating films of Claim 2 characterized by the above-mentioned.   The hot plates are arranged in a plurality of stages in the vertical direction, and the drying areas are formed between the hot plates adjacent to each other in the vertical direction. 4. The coating film drying apparatus according to claim 3, further comprising a driving unit. The drying area has a peripheral space in plan view that is covered with a main casing to form a sealed space, and an auxiliary casing having a storage space for storing driving means is attached to the outer surface side of the main casing. The extension part to the said outer side area | region of a part of body penetrates between the said enclosed space and the said storage space, and is connected to the drive means to Claim 3 or 4 characterized by the above-mentioned. The drying apparatus for coating films as described.   6. The coating film drying apparatus according to claim 5, wherein a seal means is attached to a portion where the extending portion of the movable body penetrates between the sealed space and the storage space. .   The elastic urging means for preventing the downward bending of the moving body is interposed between the moving body and the hot plate below the moving body. The coating film drying apparatus according to 1.

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