JP4455952B2 - Probe for measurement - Google Patents

Description

  The present invention relates to a measurement probe (contact) suitable for high-frequency chip device measurement, and more particularly to a measurement probe in which elasticity is imparted to a contact surface with an object to be measured.

  2. Description of the Related Art Conventionally, a measurement probe for fixing a large number of thin plate probes (contacts) on a substrate and inspecting the probe against an object to be measured is used for high-frequency chip device inspection, particularly for capacitor filter inspection.

  This type of conventional measurement probe used was a thin plate copper alloy gold-plated, but the object contact surface was flat with little gold-plating elasticity and almost no elasticity. there were. For this reason, a probe that does not come into contact with the object to be measured is generated, and it has to be brought into strong contact. Thus, since the surface of the copper alloy is exposed and oxidized, there arises a problem that it cannot be measured accurately.

  The present invention has been made paying attention to such points, and an object of the present invention is to provide a measurement probe that can be reliably and easily brought into contact with an object to be measured. To do.

  In addition to the above object, an object of the present invention is to provide a measurement probe that can easily and reliably contact all the probes with the object to be measured.

According to one aspect of the present invention along above object, the elongated thin metal plate having a spring property, bending from the base upwards, by to Kaee folding bent from the bent upright portion to the base direction, the folded portion There is formed a substantially U-shaped folded portion such that the protrusion portion, the substantially U-shaped folded portion, by bending the further base part direction from the portion in contact with the upright portion, the second An approximately U-shaped folded portion is formed, the length of the base is longer than that of the folded portion, and the tip of the second substantially U-shaped folded portion is brought into contact with the elongated portion so as to be elastic. It is characterized by giving.

The invention according to claim 2 is configured such that a long and thin metal plate having a spring property is bent upward from a base portion and folded back from the bent standing portion toward the base portion so that the folded portion becomes a protruding portion. A substantially U-shaped folded portion is formed, and the substantially U-shaped folded portion is further bent in a base direction from a portion in contact with the upright portion to form a second substantially U-shaped folded portion. Forming a third substantially U-shaped folded portion by bending the distal end portion toward the base portion, and bringing the third substantially U-shaped folded portion distal end into contact with the base portion to provide elasticity. It was made to be characterized.

  In short, the gist of the present invention is that the measurement probe, which has not been provided with a conventional spring property, is provided with a spring property so that it can be easily and easily brought into contact with an object to be measured. In addition, the portion having the spring property is formed so as to protrude from the flat portion so that the portion having the spring property is more easily brought into contact with the object to be measured and is stabilized. Conventionally, this type of probe (contact point) having a spring property or a step formed thereon is not commercially available, and such an idea is not known. In addition, the fact that the probe is stabilized is important for a high-frequency probe, and cannot be used for high-frequency applications if it is in unstable contact.

As described above, according to the first aspect of the present invention, since the measured surface contact surface has elasticity, all the probes on the substrate can be easily and reliably brought into contact with the measured surface. Specifically, it can be brought into contact with the object to be measured with a force of about 1/10 of the conventional probe.
In addition, according to the second aspect of the invention, since the bent portion that hits the surface to be measured protrudes from the base portion, it is very easy to make all the probes contact with each other more reliably than the conventional flat probe. In addition, since it can be contacted stably, it is extremely suitable as a high-frequency probe.

  Next, embodiments of the present invention will be described with reference to the drawings.

  1 and 2 show an embodiment of the present invention. The ribbon-shaped gold alloy thin plate is bent vertically from the base 1 toward the upper side, and is bent in the direction from the tip of the raised part 2 to the base 1. Bent horizontally and turn back from the horizontal bent portion 3 to form a first substantially U-shaped bent portion 4, and the bent portion 4 is moved from the abutting portion 2 abutting portion toward the base 1 in the second substantially same direction. The example bent so that the U-shaped bending part 5 might be formed is shown. The base 1 and the contact portion 6 at the tip of the second substantially U-shaped bent portion are merely in contact with each other.

  Moreover, it is preferable to form so that the 2nd substantially U-shaped bending part 5 and the perpendicular | vertical part 2 may also contact | abut. This is because an appropriate spring pressure is applied by forming the contact portions.

In the above embodiment, two substantially U-shaped bent portions are formed, and the bent portion is substantially B-shaped as shown in FIG. 2, but the substantially U-shaped bent portion is , but it may also in the three be two.

  As the metal having a spring property used in the present invention, a gold alloy, preferably a gold-nickel alloy is preferably used. If such an alloy is used, there is no problem that the gold plating is peeled off and oxidized like the conventional gold plating, and cannot be used.

  In the said Example, the length of the base 1 is formed longer than the substantially B-shaped bending part. By forming in this way, the bent portion (substantially B-shaped portion) becomes a protruding portion, which is preferable because it can be easily brought into contact with the surface to be measured and the measurement probe is stabilized.

  The thickness of the thin plate used in the present invention is preferably 50 to 100 μ, particularly preferably 60 to 80 μ. The width of the thin plate is 0.2 to 1.0 mm, particularly preferably 0.3 to 0.6 mm. The height of the standing part 2 is preferably 0.2 mm to 1.0 mm, particularly preferably 0.3 to 0.6 mm. The length of the base 1 is 0.5 to 1.5 mm, preferably 0.6 to 1.0 mm. The length of the substantially B-shaped bent portion is preferably about the middle of the base portion 1.

  In the said Example, the thickness of the thin plate was performed about two types, 70-80micro and 60-70micro. The width of the thin plate was 0.4 mm, the height of the upright part 2 was 0.35 to 0.4 mm, the base part 1 was 0.8 mm, and the length of the bent part was 0.4 mm.

  In the present invention, a thin plate is used without using a linear body. This is because the horizontal bent portion 3 at the upper end is in surface contact with the object to be measured. If a linear body is used, it becomes unstable because it becomes point contact instead of surface contact, and the inspection reliability is impaired.

  In the present invention, the base 1 of a large number of probes (contacts) is usually fixed to the substrate, and the bent portion upper end horizontal bent portion 3 is brought into contact with the object to be measured. Needless to say, the probe itself may be used in the same manner as a conventional measurement probe (contact). The probe of the present invention is suitable for use for high-frequency chip device inspection, particularly for capacitor filter inspection. However, it can also be used for low frequency chip device inspection.

  According to the present invention, unlike this type of conventional measurement probe, since it has elasticity in the direction of contact with the surface to be measured, a large number of measurement probes are fixed to the substrate and made to contact the surface to be measured. However, all the probes can be easily and reliably brought into contact with the object to be measured. Moreover, since it is not necessary to press with a strong force as in the prior art, the service life of the probe itself is significantly improved.

  Further, if the probe of the present invention is formed of a gold alloy, there is no trouble such that the gold plating is peeled off and accurate measurement cannot be performed as in the conventional case, so that the reliability of inspection is greatly improved.

  Furthermore, if the base 1 is formed longer than the bent portion, the bent portion protrudes on the substrate, so that the bent portions of all the probes are easily brought into contact with the surface to be measured.

It is a top view which shows one Example of this invention. It is a side view which shows one Example of this invention.

Explanation of symbols

1 .... Base of thin plate 2 .... Standing part 3 .... Horizontal bending part 4 .... First substantially U-shaped bending part 5 .... 2 substantially U-shaped bent part 6... ... contact part between bent part tip and base

Claims (4)

A long and thin metal plate having a spring property is bent upward from the base, and folded back from the bent upright portion toward the base, thereby forming a substantially U-shaped folded portion so that the folded portion becomes a protruding portion. formed, the substantially U-shaped folded portion, by bending the further base part direction from the portion in contact with the upstanding portion, the second substantially U-shaped folded portion is formed, the length of the base A measuring probe characterized in that it is formed longer than the folded portion and the second substantially U-shaped folded portion is brought into contact with the long formed portion to provide elasticity. A long and thin metal plate having a spring property is bent upward from the base, and folded back from the bent upright part in the direction of the base, so that a substantially U-shaped folded part is formed so that the folded part becomes a protruding part. Forming a substantially U-shaped folded portion further in a base direction from a portion contacting the upright portion to form a second substantially U-shaped folded portion; A third substantially U-shaped folded portion is formed by bending in a direction, and the tip of the third substantially U-shaped folded portion is brought into contact with the base to impart elasticity. Probe. The probe according to claim 1 or 2, wherein the metal is a gold alloy. The probe according to claim 3, wherein the gold alloy is a gold-nickel alloy.

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