JP4459728B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting device that cuts a thin plate-like workpiece into a lattice shape by a rotating blade and divides the workpiece. In particular, the present invention relates to a cutting device including a cutting powder discharging device that collects cutting powder together with cutting water supplied to a cutting site.

  2. Description of the Related Art A cutting device that cuts a thin plate-like workpiece such as a semiconductor wafer or an IC package module into a lattice shape and divides the workpiece is known. Generally, a cutting stage of a cutting apparatus includes a linear motion table that reciprocates in a horizontal uniaxial direction (X-axis direction) and a rotary table that rotates 90 degrees in a horizontal direction (θ-axis direction) provided on the linear motion table. Comprising. The workpiece is attached to a vacuum chuck provided on a stage on the rotary table. The linear motion table travels on two guide rails provided in parallel on the upper side of the guide base installed directly below the linear motion table so as to face the guide bearing. The rotating blade as a tool is suspended and supported by a slider mounted so as to be reciprocally movable in a vertical direction (Z-axis direction) on a carriage that reciprocates in a horizontal one-axis direction (Y-axis direction) orthogonal to the X-axis direction. Attached to the spindle.

  Cutting water is jetted and supplied from the nozzle to the cutting portion. The cutting water cools the cutting site and removes fine cutting powder generated by the processing from the cutting site. The rotating blade is provided with a blade cover to prevent the cutting water supplied to the cutting site from being scattered. The cutting water supplied to the cutting site flushes the cutting powder from the cutting site and flows down to drainage grooves (pans) provided on both sides of the guide base below the cutting site. A cutting powder discharge device that collects cutting water containing cutting powder discharges the cutting water that has flowed down to the inclined pan to the outside of the machine, and collects the cutting powder in a collection tank by filtration. At this time, since the inclination of the pan is gentle, the cutting powder remains on the pan during the cutting process.

  Since the remaining cutting powder must be periodically cleaned and removed by the operator, it is necessary to make it difficult for the cutting powder to remain on the pan in order to reduce the number of cleaning operations. For example, pressurized cleaning water is jetted and supplied from a cleaning water nozzle to forcibly wash away the cutting powder remaining on the pair of pans (see Patent Document 1). In addition, for example, a wiper that sweeps cutting powder remaining on the pair of breads is provided (see Patent Document 2). Alternatively, the cutting powder is separated from the cutting water, as is the case with belt conveyors and screw conveyors that are typically used in machine tool processing waste ejectors, which are mainly used for machining tools, such as machining centers. Discharging means for conveying to the recovery tank is provided (see Patent Document 2 and Patent Document 3).

Japanese Patent No. 3316206 (pages 3 to 4) JP2003-133259A (pages 2 to 4) JP 2002-239888 A (pages 5 to 7)

  By spraying and supplying cleaning water from the cleaning water nozzle to wash away the cutting powder remaining on the pan, the cutting powder hardly rises and the cutting powder does not accumulate on the pan with a simple configuration. However, in order to wash away effectively with the washing water, it is necessary to provide the nozzle at one end of the inclined pan on the high side so that the washing water can sufficiently reach the one end on the low side of the pan. As a result, it is required to increase the water pressure of the cleaning water or add a plurality of nozzles, and the amount of cleaning water used per unit time increases. In addition, when it is necessary to flow cutting powder having a relatively high specific gravity, the amount of cleaning water must be increased.

  Large cutting powder and cutting lump can be collected by forcibly discharging with a conveyor. However, in a cutting device that cuts a thin plate-like workpiece such as an IC package module, fine cutting powder is generated. Because it is contained in a large amount, the cutting powder flowing down from the cutting stage may stick to the conveyor and adversely affect the operation of the cutting powder discharge device. There is a possibility that the cutting powder dries and solidifies or rises as dust.

  Therefore, an object of this invention is to provide the cutting device provided with the cutting powder discharge | emission apparatus which can remove cutting powder more effectively from a bread | pan or a conveyor with washing water. Moreover, it aims at providing the cutting device provided with the improved cutting powder discharge | emission apparatus which uses less water. Advantages in the specific configuration of the cutting apparatus of the present invention will be described each time in the description of the embodiment.

In order to solve the above-described problems, the cutting device of the present invention is a cutting device that cuts a thin plate-like workpiece into a lattice shape with a rotating blade and divides the workpiece in a horizontal uniaxial direction. A cutting stage 2 including a moving body 4, a single pan 22 provided below the cutting stage 2 and below the linear moving body 4 in an inclined manner along the horizontal one-axis direction, and a cutting stage 2, a nozzle 52 that supplies the pan 22 with cleaning water that is moved in the horizontal uniaxial direction together with the cut stage 2, a linear motor 32 that drives the linear moving body 4, and an electric machine for the linear motor 32. A cooling device that cools the child coil, and a supply pipe that supplies used cooling water of the cooling device to the nozzle 52 .

Preferably, the cutting device includes a belt conveyor 30 that is provided on the upper side of the pan 22 and receives cutting powder that flows down along with the cleaning water from the cutting site and conveys the cutting powder to the collection tank . Further, the upper and lower ends have a structure projecting sideways, and guide rails 16 and 18 are provided on the projecting structural portions 14A and 14B, respectively, to guide the reciprocation of the linear moving body 4 in the horizontal one-axis direction. A guide 12 is included. In addition, the said code | symbol is attached | subjected for convenience of explanation and this invention is not limited to embodiment shown by drawing.

  Since the cutting device of the present invention is configured to wash the bread and the conveyor with the washing water, it is difficult for the fine cutting powder that has been dried to remain on the bread and the conveyor, and it is difficult for cutting and equipment failures due to dust to occur. Since the cleaning water nozzle is fixed to the cutting stage and the cleaning water nozzle moves as the cutting stage reciprocates during cutting, the cutting water containing cutting powder flows down. The bread and the conveyor can always be washed near the site, and the washing water can be distributed evenly throughout the bread. Accordingly, the cutting powder is more effectively removed, and the labor for the operator to clean the bread and the like is reduced. Further, it is not required to increase the water pressure of the cleaning water or add a plurality of nozzles, and the amount of cleaning water used per unit time can be reduced. As a result, the working efficiency is improved, the running cost is reduced, the productivity is improved, and the influence on the environment is reduced.

  When the linear moving body of the cut stage is driven by a linear motor, the cutting device is configured to use the used cooling water that cools the armature coil of the linear motor as at least a part of the cleaning water. The amount of water used in the whole can be reduced. When the cooling water of the linear motor is used as the entire cleaning water, the linear motor cooling system and the cleaning water supply system can be integrated into one system, and it is necessary to supply water for the cleaning water substantially. Absent. As a result, the running cost can be further reduced to improve productivity, and the effect on the environment can be further reduced.

If you a guide vertically a pair of guide rails of the configuration provided sideways, can be in a state of being fully open around the bottom of the cut stage, it is flow down as it is cutting water immediately below the cutting stage it can. Therefore, since a bread and a conveyor can be installed in the space immediately below the cut stage, it is only necessary to provide a single bread and conveyor, the configuration is simpler, the cleaning work is facilitated, and the space is effectively used. be able to. In addition, since the bread area can be increased compared to the structure where the discharge grooves are provided on both sides of the guide rail, the cutting water flowing down can be received more smoothly and poured out into the collection tank. Make it harder to clog. As a result, the workability is good, the amount of cleaning water to be supplied can be reduced, the running cost is reduced, the productivity is improved, and the influence on the environment is reduced.

  FIG. 1 shows a part of the cutting device of the present invention, partially cut and extracted. FIG. 2 shows a schematic configuration of a washing water nozzle provided on the cut stage, a belt conveyor provided on the pan, and a linear motor that drives the cut stage. FIG. 3 shows a configuration in which two cut stages are installed, partially cut away. Hereinafter, a cutting apparatus according to a preferred embodiment of the present invention will be described with reference to FIGS. 1 to 3.

  The cut stage 2 includes a linear moving body 4 and a rotary moving body 6. The linear moving body 4 reciprocates in the X-axis direction by an AC synchronous linear motor. The rotary moving body 6 is driven in the θ-axis direction by an AC motor 10 capable of indexing the rotation angle installed on a mounting base 8 attached and fixed to the side surface of the linear moving body 4. A stage and a vacuum chuck (not shown) are provided on the upper side of the rotary moving body 6, and a workpiece is attached on the stage by the vacuum chuck.

  The guide 12 is a linear guide including a guide base 14, a pair of guide rails 16 and 18 installed on the side surface of the guide base 14 in the X-axis direction, and a guide bearing 20 provided on the linear moving body 4. is there. The guide 12 guides the reciprocating movement of the linear moving body 4 in the X-axis direction. The guide base 14 is a base body of the guide 12 having a structure that is horizontally long in the X-axis direction and whose upper and lower ends protrude laterally in the Y-axis direction. A pair of guide rails 16 and 18 are provided along the longitudinal direction of the guide base 14 on each of the projecting surfaces of the projecting structural portions 14A and 14B. In other words, the guide 12 has a configuration in which the guide base 14 is placed vertically and the pair of guide rails 16 and 18 are provided sideways, and the linearly movable body 4 moves the side surface of the guide base 14 in the X-axis direction. Move back and forth. A pan 22 is provided below the cut stage 2 so as to incline from one end to the other end in parallel with the guide base 14 of the guide 12 along the X-axis direction.

  The configuration in which the guides in the cutting apparatus according to the embodiment are placed vertically and the pair of guide rails are provided in the horizontal direction is different from the configuration in which the linear moving body moves on the well-known guide base. An empty space can be created around the bottom. As a result, not only can the space be used effectively, but a single discharging means such as a bread or a conveyor can be provided, and the bread or conveyor can be provided directly under the cutting site. A configuration advantage can be obtained. In addition, as will be described in detail later, the cutting apparatus according to the embodiment does not require extra discharging means such as a pan or a conveyor even if two cut stages are provided.

  FIG. 1 partially shows a slider 24 moving in the Z-axis direction and a spindle 26 attached to the slider 24 in order to show the positional relationship between the cut table and the spindle. The slider 24 is movably attached to a linear moving body (not shown) that moves in the Y-axis direction. A blade cover 28 that covers a rotating blade that is a cutting tool is provided at the tip of the spindle 26. The blade cover 28 is provided with a cutting water nozzle (not shown), and the cutting water is supplied from the cutting water nozzle to a processing site on the cut stage 2. The cutting water supplied from the cutting water nozzle flows down together with the cutting powder from the cutting stage 2 to the pan 22 immediately below.

  As shown in FIG. 2, a belt conveyor 30 is provided on the upper side of the pan 22 to receive cutting powder that flows down along with the cleaning water from the cutting site on the cut stage 2 and conveys it to a collection tank (not shown). The cutting water flowing down to the belt conveyor 30 flows down to the pan 22 on the lower side of the belt conveyor 30. The cutting water that has flowed down to the pan 22 flows in the inclination direction of the pan 22 and is discharged, and the cutting powder is guided to the collection tank through the filtration device. On the other hand, the cutting powder remaining on the belt conveyor 30 is conveyed to the collection tank by the belt conveyor 30. Since the belt conveyor 30 makes the structure of a cutting device complicated, it is provided as needed. However, the belt conveyor 30 is a means for helping discharge of large cutting powder and cutting powder lump, and is advantageous in that it is not required to eject and supply a larger amount of washing water in order to remove such cutting powder. .

  As shown in FIG. 2, the linear motor 32 that moves the linear moving body 4 includes a mover 34 and a stator 36. The mover 34 is a primary side of the linear motor 32, and includes an armature coil (not shown) housed in the can. The stator 36 is a magnet plate 40 on the secondary side, on which permanent magnets 38 are arranged. The mover 34 is attached and fixed to the linear moving body 4 and moves together with the linear moving body 4. The stator 36 is attached and fixed to the guide base 14 of the guide 12. A detailed description of the means for protecting the magnet plate 40 from contamination with magnetic powder or the like will be omitted. Further, description of the details of the wiring for supplying power to the coil is also omitted.

  The cooling device that cools the coil of the mover 34 includes manifolds 42 and 44, a cooling pipe 46, a drain pipe 48, and a cooling water supply device 50. The cooling water is introduced from the cooling water supply device 50 into the manifold 42 and supplied to the cooling pipe 46. The cooling pipe 46 is integrally formed with the coil by mold resin and is stored in the can, and directly cools the coil. The cooling water used for cooling the coil is discharged out of the mover 34 through the manifold 44 and the drain pipe 48.

  The washing water nozzle 52 is provided on the lower side of the mounting base 8 for attaching the AC motor 10 provided on the linear moving body 4 and driving the rotary moving body 6 to the linear moving body 4. Therefore, the washing water nozzle 52 reciprocates in the X-axis direction together with the linear moving body 4. The supply pipe for supplying the washing water to the washing water nozzle 52 also serves as the drain pipe 48 and is constituted by a flexible hose. Therefore, the cleaning water supplied to the cleaning water nozzle 52 can use the drainage of the cooling water used for cooling the coil of the mover 34 of the linear motor 32.

  The cutting device of the above-described embodiment is configured to obtain all of the cleaning water from the cooling water of the coil. However, if necessary, a cutting water supply device is provided separately, and a part of the cleaning water is supplied to the coil. It can be modified to obtain from cooling water. Further, in the cutting device of the embodiment, when the drive device that drives the other linear motion moving body is a linear motor, the drain device of those linear motors is configured to be connected to the washing water nozzle, The used cooling water can be configured to be used as cleaning water.

  Next, the flow of the cutting water, the cleaning water, and the cooling water of the linear motor according to the embodiment will be described. In the processing part of the cut stage 2, cutting powder of the workpiece cut by the rotating blade is generated. Cutting water is supplied from the cutting water nozzle attached to the blade cover 28 of the rotating blade to the machining site. The cutting water supplied to the processing site removes cutting powder from the processing site. The cutting water containing the cutting powder flows down to the belt conveyor 30 and the pan 22 immediately below the cutting stage 2. Then, a part of the cutting powder contained in the cutting water flows down to the pan 22 together with the cutting water and is discharged from the pan 22 to the collection tank, and a part of the cutting powder is separated from the cutting water on the belt conveyor 30. And is forcibly discharged to the collection tank by the belt conveyor 30.

Cooling water is supplied from the cooling water supply device 50 to the mover 34 of the linear motor 32. The cooling water is introduced from the manifold 42 into the cooling pipe 46, used for cooling the coil, and then discharged from the manifold 44 through the drain pipe 48. And the used cooling water discharged | emitted from the needle | mover 34 is supplied to the washing water nozzle 52 through a supply pipe line, and is sprayed from the washing water nozzle 52 to the pan 22 and the belt conveyor 30. The cleaning water ejected from the cleaning water nozzle 52 is used to wash away the cutting powder remaining on the pan 22 and the belt conveyor 30 and is discharged together with the cutting water flowing down from the cut stage 2 to the recovery tank.

  Since the cut stage 2 moves in the X-axis direction by the movement of the linearly moving body 4, the machining site and the position where the cutting water supplied to the machining site flows down are also displaced in the X-axis direction. At this time, since the washing water nozzle 52 is provided on the mounting base 8 fixed to the linear moving body 4, it moves together with the cut stage 2 in the X-axis direction.

  The cutting device according to the embodiment configured as described above can clean the pan and the conveyor near the cutting water containing the cutting powder flowing down from the cutting site, and can uniformly distribute the cleaning water throughout the entire area. While having an effect, it has the advantage that the amount of washing water is relatively small. Moreover, the cutting device of embodiment uses the used cooling water which cools the coil of a linear motor as it is as washing water of a bread | pan and a belt conveyor, and a cutting device uses cooling water and cutting water. There is an advantage that the amount of water used is reduced, and there is no need to provide a cutting water supply device, and there is an advantage that the configuration is simplified.

  As shown in FIG. 3, the cutting apparatus according to the embodiment has two guide bases 14 arranged side by side in the X-axis direction symmetrically on both sides of the pan 22. The two guide bases 14 are arranged vertically, and are provided sideways so that the pair of guide rails 16 and 18 and the other pair of guide rails 16 and 18 face each other. When the cut stage 2 is the first cut stage and the cut stage 54 provided opposite to the first cut stage 2 is the second cut stage, the configuration of the second cut stage 54 is the first Basically the same as the cut stage 2. The constituent members of the second cut stage 54 shown in FIG. 3 are denoted by the same reference numerals as those of the first cut stage 2 already described, and description thereof is omitted.

  As already described, the cutting apparatus according to the embodiment is configured such that the linear motion moving body reciprocates horizontally on the guide arranged vertically, so that an empty space can be provided below the cut stage. it can. As a result, as shown in FIG. 3, two cut stages can be provided, and two workpieces can be cut at the same time, thereby improving the processing efficiency. Of course, it is possible to control the two cut stages independently and perform cutting with only one of them.

  The cutting apparatus according to the embodiment shown in FIG. 3 has a configuration in which a cut stage is provided for each of the guides arranged to face each other. For example, one guide is provided so as to straddle two linearly-moving moving bodies arranged to face each other. Modifications are possible, such as a configuration in which a rotary moving body is installed and one cut stage is provided.

  The cutting device of the present invention is not limited to the embodiment described in detail, and replacement, combination, addition, etc. with members of already known cutting devices are possible without departing from the technical idea of the present invention. Various modifications are possible, as already mentioned in some examples.

  The present invention is applied to a cutting apparatus that cuts and divides a thin plate-like workpiece such as a semiconductor wafer or an IC package module into a lattice shape. The cutting apparatus of the present invention can be used in a processing apparatus that can employ approximately the same configuration for moving a workpiece in a horizontal uniaxial direction and a rotational uniaxial direction. In the present invention, the cutting powder generated by cutting can be more effectively removed by washing water, the amount of water used can be reduced, workability is good, and running cost is reduced. This improves the productivity and reduces the environmental impact, contributing to the development of semiconductor cutting.

It is a perspective view which cuts and shows the composition around the cut stage of an embodiment of the invention partially. It is a top view which shows typically arrangement | positioning of the linear motor which drives the linear_motion | direct_distance moving body of embodiment of this invention, a washing water nozzle, and a pan. FIG. 2 is a perspective view showing a configuration around a cut stage according to the embodiment of the present invention shown in FIG. 1 partially cut from another direction.

Explanation of symbols

2 Cut stage 4 Direct moving body 6 Rotating body 8 Mounting base 10 AC motor 12 Guide 14 Guide base 16, 18 Guide rail 20 Guide bearing 22 Pan 30 Belt conveyor 32 Linear motor 34 Movable element 36 Stator 46 Cooling pipe 50 Cooling Water supply device 52 Cleaning liquid nozzle

Claims (3)

In a cutting apparatus that cuts and divides a thin plate-like workpiece into a lattice shape by a rotating blade, a cut stage including a linear moving body that reciprocates the workpiece in a horizontal uniaxial direction; and A single pan that is provided directly under the linear moving body and inclined along the horizontal uniaxial direction, and cleaning water that is fixed to the cut stage and moves in the horizontal uniaxial direction and is pressurized. , A linear motor that drives the linear moving body, a cooling device that cools the armature coil of the linear motor, and used cooling water of the cooling device is supplied to the nozzle A cutting apparatus comprising: a supply pipe ;   The cutting apparatus according to claim 1, further comprising a belt conveyor that is provided on the upper side of the pan and receives cutting powder that flows down along with cleaning water from a cutting site and conveys the powder to a collection tank.   The upper and lower ends have a structure projecting sideways, guide rails are provided on the projecting structural parts, respectively, and the guide includes a guide for guiding the reciprocating movement of the linear moving body in the horizontal one-axis direction. The cutting apparatus according to 1.

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