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JP4513655B2 - Method for inspecting magnetic medium protrusions - Google Patents
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JP4513655B2 - Method for inspecting magnetic medium protrusions - Google Patents

Method for inspecting magnetic medium protrusions Download PDF

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JP4513655B2
JP4513655B2 JP2005169947A JP2005169947A JP4513655B2 JP 4513655 B2 JP4513655 B2 JP 4513655B2 JP 2005169947 A JP2005169947 A JP 2005169947A JP 2005169947 A JP2005169947 A JP 2005169947A JP 4513655 B2 JP4513655 B2 JP 4513655B2
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magnetic medium
ght
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protrusion
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JP2006344312A (en
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明彦 岡部
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Fuji Electric Co Ltd
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Description

磁気ディスク装置に装着される磁気媒体である磁気ディスク(特にハードディスク)におけるヘッドを用いた表面突起検査(グライドハイトテスト)の改良に特徴を有する磁気媒体の突起検査方法に関する。   The present invention relates to a method of inspecting a magnetic medium protrusion characterized by improvement of a surface protrusion inspection (glide height test) using a head in a magnetic disk (particularly a hard disk) which is a magnetic medium mounted on a magnetic disk device.

磁気媒体は出荷前の試験として、表面突起検査であるグライドハイト試験(以後GHT)を行う。このGHTは、磁気ディスク装置に装着後にヘッドクラッシュと言われる現象を引き起こす可能性のある磁気媒体の表面突起を検査する試験である。磁気ディスク装置においてデータのリード・ライトを行う時、磁気ディスクの表面突起と磁気ヘッドが繰り返し接触すると、その突起部損傷が磁気ディスク上の周辺へ拡散し、損傷ダストが磁気ヘッドに吸着して、磁気ヘッドの安定浮上を損ない、リード・ライトエラーが発生する。この現象がヘッドクラッシュである。ヘッドを用いたGHT(以後ヘッドGHT)では、1つのGHヘッドを回転する磁気媒体上に浮上させて、スパイラルに磁気媒体の表面を全面走査し、媒体表面突起に接触した時の衝撃を振動感知センサで検知する。この時のGHヘッドの浮上量は、GHヘッドのばらつきを考慮して確実に表面突起を検出するために磁気ディスクのリード・ライトヘッドの浮上量の半分程度に低くしてあり、振動感知センサの出力電圧を閾値判定してGHT欠陥を選別している。図1に示すように、GHTにおいて磁気媒体の表面突起は、(1)GHヘッドが接触してその振動感知センサの出力電圧が閾値以上となる突起(この突起をType-Aと称す)、(2)GHヘッドが接触してその振動感知センサの出力電圧が閾値未満となる突起(この突起をType-Bと称す)、(3)GHヘッドが接触しない突起(この突起をType-Cと称す)の3つに分類され、Type-Aの突起がGHT欠陥で1つでも存在する磁気媒体はGHTで不良とされる。また、Type-Bの個数はType-Aより数十倍多く媒体表面に存在する。この個数についての知見は、振動感知センサの出力電圧の所定閾値でのGHT欠陥L個(=Type-A個数)、振動感知センサの出力電圧の閾値を0にした時のGHT欠陥M個(=Type-A個数+Type-B個数)から、(M-L)/Lで判明している。このため、GHTの良否によらずGHヘッドは磁気媒体表面のType-B突起との接触は存在し、これらの接触の蓄積によるGHヘッド損傷や磁気媒体の保護膜又は潤滑剤のGHヘッドヘの付着等でGHヘッドの低浮上化が発生し、この低浮上化に伴いGHヘッドと接触が無かったType-CがType-Bに変化して、いっそうGHヘッドの低浮上化が進行し、終にはGHヘッドは磁気媒体上を浮上しない状態に陥る(この時がGHヘッドの寿命である)。このGHヘッドの低浮上化状態の進行に伴いGHTは表面突起をより過剰に検出してしまうので、GHTで不良品となった磁気媒体は一旦集められ再度GHT(再GHT)が実施され、この再GHTで過検出によって不良とされた本来の良品を救済している。ただし、再GHTにおいても、ヘッドの低浮上化の進行は免れないので、本来は良品である磁気媒体が再GHTで不良として廃棄される場合がある。   For the magnetic media, a glide height test (hereinafter referred to as GHT), which is a surface protrusion test, is performed as a test before shipment. This GHT is a test for inspecting surface protrusions of a magnetic medium that may cause a phenomenon called head crash after being mounted on a magnetic disk device. When reading and writing data in a magnetic disk device, if the protrusion on the surface of the magnetic disk and the magnetic head repeatedly contact, the damage to the protrusion diffuses to the periphery of the magnetic disk, and the damaged dust is attracted to the magnetic head. The stable flying of the magnetic head is impaired and a read / write error occurs. This phenomenon is a head crash. In the GHT using the head (hereinafter referred to as the head GHT), one GH head is levitated on the rotating magnetic medium, the entire surface of the magnetic medium is scanned in a spiral, and the impact is detected when it touches the projection on the medium surface. Detect with sensor. The flying height of the GH head at this time is lowered to about half of the flying height of the read / write head of the magnetic disk in order to reliably detect surface protrusions in consideration of variations in the GH head. The output voltage is thresholded to select GHT defects. As shown in FIG. 1, the surface protrusions of the magnetic medium in the GHT are (1) protrusions (referred to as Type-A) whose output voltage of the vibration detection sensor is above the threshold when the GH head comes into contact ( 2) Protrusion where the output voltage of the vibration sensor is below the threshold when the GH head comes into contact (this protrusion is called Type-B), (3) Protrusion where the GH head does not contact (this protrusion is called Type-C) ), And magnetic media with at least one Type-A protrusion with a GHT defect are considered defective with GHT. In addition, the number of Type-B is several tens of times greater than Type-A on the medium surface. The knowledge about this number is that L number of GHT defects (= Type-A number) at the predetermined threshold of the output voltage of the vibration detection sensor, M pieces of GHT defects when the threshold of the output voltage of the vibration detection sensor is 0 (= From (Type-A number + Type-B number), it is known as (ML) / L. For this reason, regardless of whether the GHT is good or bad, the GH head is in contact with the Type-B protrusion on the surface of the magnetic medium, and damage to the GH head due to the accumulation of these contacts or adhesion of the protective film of the magnetic medium or lubricant to the GH head As a result, the GH head's low levitation occurred, and with this low levitation, Type-C, which had no contact with the GH head, changed to Type-B. Falls into a state where the GH head does not float on the magnetic medium (this is the life of the GH head). As the GH head progresses in a low-flying state, the GHT detects surface protrusions more excessively, so the magnetic media that became defective with the GHT are collected once and GHT (re-GHT) is performed again. Recovering the original non-defective product that has been rejected by over-detection with GHT. However, even in the re-GHT, the progress of the low flying height of the head is unavoidable, so that a magnetic medium that is originally good may be discarded as a defective in the re-GHT.

さらに、特許文献1に記載されるように、上下両ヘッドの浮上量の違いに着目し、欠陥を検出した場合は、ディスクの周速を低下して、同一ヘッドでリトライ検査を行うことによって、リトライ検査時間を短縮する方法が知られている。また、特許文献2に記載されるように、ディスクの検査領域を半径方向に分割し、各分割領域を別々のヘッドで走査することによって欠陥検査時間を短縮する方法も知られている。   Furthermore, as described in Patent Document 1, paying attention to the difference in the flying height of the upper and lower heads, when a defect is detected, the peripheral speed of the disk is reduced and a retry inspection is performed with the same head. A method for shortening the retry inspection time is known. Further, as described in Patent Document 2, there is also known a method of shortening a defect inspection time by dividing an inspection area of a disk in a radial direction and scanning each divided area with a separate head.

特開平7−6365号公報Japanese Patent Laid-Open No. 7-6365 特開平9−63051号公報Japanese Patent Laid-Open No. 9-63051

まず、上述のように、GHヘッドは磁気媒体表面のType-B突起との接触により、GHヘッドの低浮上化状態が進行すると、磁気媒体の良否判定の適正が損なわれるという解決すべき課題があり、その課題は再GHTでも同様である。また、この課題は、ヘッドとType-B突起との接触の蓄積について何等考慮されていない特許文献1および2においても解決することはできない。   First, as described above, the GH head has a problem to be solved that, when the GH head is in a low flying state due to contact with the Type-B protrusion on the surface of the magnetic medium, the suitability of the magnetic medium is impaired. Yes, the issue is the same for re-GHT. This problem cannot be solved even in Patent Documents 1 and 2 in which no consideration is given to accumulation of contact between the head and the Type-B protrusion.

次に、GHT処理時間に関する課題について述べる。ヘッドGHT装置の概略を図2に示す。図2の(a)は磁気媒体1とGHヘッド2の平面図であり、GHヘッド2は、キャリッジ2aに支持アーム2bが取り付けられ、支持アーム2bの先端部のスライダー2cに振動感知センサ2dが取り付けられた構成となっている。図2−(b)〜(d)はGHT実施時のスピンドル3にローディングする磁気媒体1とGHヘッド2との位置関係を示す。3aはスピンドルモータである。GHTでは、(1)磁気媒体のローディング−磁気媒体の未装着状態(図2−(b))を磁気媒体装着状態(図2−(c))にする、(2)GHヘッドのローディング−GHヘッドを試験の開始位置に移動し、ローディング機構(図示せず)によりローディングする、(3)GHヘッドでの磁気媒体の表面突起検査−スピンドルモータを回転させて磁気媒体上のGHヘッドを浮上させ、GHヘッドをキャリッジ機構で磁気媒体の半径方向に移動させて、スパイラル状に磁気媒体の表面突起をGHヘッドにより走査する(図2−(d))、(4)GHヘッドのアンローディング−GHヘッドを磁気媒体上から退避させる、(5)磁気媒体のアンローディング−試験した磁気媒体を取り除いて、磁気媒体の未装着状態にする過程からなるが、(3)の表面突起検査に要する時間は、(1),(2),(4),(5)をあわせた所要時間より圧倒的に長いため、GHTの所要時間は(3)の表面突起検査に多くは依存する。一方、ヘッドGHTは磁気媒体1枚づつの試験であるため試験時間は磁気媒体のコストを左右し、試験時問短縮はGHT装置の設備投資を抑えることができる。従って、上記表面突起査に要する時間短縮はヘッドGHTにおける恒常の解決すべき課題である。また、再GHTも総計のヘッドGHT時間を延ばしてしまうと言う課題がある。   Next, issues related to GHT processing time are described. An outline of the head GHT device is shown in FIG. 2A is a plan view of the magnetic medium 1 and the GH head 2. The GH head 2 has a support arm 2b attached to a carriage 2a, and a vibration detection sensor 2d attached to a slider 2c at the tip of the support arm 2b. It has an attached configuration. FIGS. 2B to 2D show the positional relationship between the magnetic medium 1 loaded on the spindle 3 and the GH head 2 when the GHT is performed. 3a is a spindle motor. In GHT, (1) Magnetic medium loading-Magnetic medium unmounted state (Fig. 2- (b)) is changed to magnetic medium loaded state (Fig. 2- (c)). (2) GH head loading-GH The head is moved to the start position of the test and loaded by a loading mechanism (not shown). (3) Inspection of surface projection of magnetic medium by GH head-Spindle motor is rotated to float the GH head on the magnetic medium. The GH head is moved in the radial direction of the magnetic medium by the carriage mechanism, and the surface protrusions of the magnetic medium are scanned by the GH head in a spiral shape (FIG. 2- (d)), (4) GH head unloading-GH The head is retracted from the magnetic medium. (5) Unloading of the magnetic medium—The process includes removing the tested magnetic medium and putting the magnetic medium into the unmounted state. The time required for the surface protrusion inspection in (3) is as follows. , (1) , (2), (4), and (5) are overwhelmingly longer than the total time required, so the time required for GHT largely depends on the surface protrusion inspection of (3). On the other hand, since the head GHT is a test for each magnetic medium, the test time affects the cost of the magnetic medium, and shortening the test time can reduce the capital investment of the GHT equipment. Therefore, shortening the time required for the surface protrusion inspection is a constant problem to be solved in the head GHT. Another problem is that re-GHT also increases the total head GHT time.

そこで本発明の目的は、以上のような課題を解決した磁気媒体の突起検査方法を提供することにある。   SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a magnetic medium protrusion inspection method that solves the above-described problems.

本発明は、磁気媒体に対してヘッドを用いたグライドハイト試験を行う磁気媒体の突起検査方法であって、1次ヘッドにより前記磁気媒体を走査して欠陥を検出した場合は、2次ヘッドを前記磁気媒体の前記欠陥の検出位置に移動させ、当該2次ヘッドを用いて前記欠陥の検出位置近傍のみの突起検査を行わせることを特徴とする。   The present invention is a method for inspecting a protrusion of a magnetic medium for performing a glide height test using a head with respect to the magnetic medium. When a defect is detected by scanning the magnetic medium with a primary head, the secondary head is The magnetic medium is moved to the defect detection position, and the secondary head is used to perform a protrusion inspection only in the vicinity of the defect detection position.

ここで、前記2次ヘッドの突起検出レベルを参照して、前記1次ヘッドの感度を補正することができる。   Here, the sensitivity of the primary head can be corrected with reference to the protrusion detection level of the secondary head.

さらに、前記磁気媒体の検査領域を分割し、各検査領域に対して2以上の1次ヘッドの各々を用いて走査を実行し、いずれかの1次ヘッドが欠陥を検出した場合は、当該欠陥検出位置に対する前記2次ヘッドによる突起検査を実行することができる。   Further, the inspection area of the magnetic medium is divided, and each inspection area is scanned using each of two or more primary heads. If any of the primary heads detects a defect, the defect is detected. The protrusion inspection by the secondary head with respect to the detection position can be executed.

本発明によれば、磁気媒体のヘッドを用いたグライドハイト試験において、表面突起走査時間を短縮することができる。また、磁気媒体の良否判定が的確になる効果がある。   According to the present invention, the surface protrusion scanning time can be shortened in a glide height test using a magnetic medium head. In addition, there is an effect that the quality determination of the magnetic medium becomes accurate.

(実施例1)
磁気媒体のヘッドGHTおいて、磁気媒体の直径方向に対向した2つのGHヘッドを具備したヘッドGHT装置を図3に示す。磁気媒体で内外周のGHTを行わない領域は、磁気媒体を磁気ディスク装置に装着した時、浮上保証をしていない領域である。
(Example 1)
FIG. 3 shows a head GHT device having two GH heads facing each other in the diameter direction of the magnetic medium in the magnetic medium head GHT. The area where GHT is not performed on the inner and outer circumferences of the magnetic medium is an area which is not guaranteed to float when the magnetic medium is mounted on the magnetic disk device.

図3−(a)は磁気媒体1と2つのGHヘッドとの関係を示す図である。本実施例では、ローディングした磁気媒体1に対して、GHTを行う1次ヘッドとしてのGHヘッドAと、2次ヘッドとしてのGHヘッドBとを磁気媒体1の直径方向に対向して配置してある。磁気媒体1には、GHT欠陥5を例示してある。2つのGHヘッドA,Bと、スピンドルモータ3aとは、コントローラ4に接続されており、このコントローラ4によって以下のように制御される。   FIG. 3A shows the relationship between the magnetic medium 1 and the two GH heads. In this embodiment, a GH head A as a primary head for performing GHT and a GH head B as a secondary head are arranged facing the loaded magnetic medium 1 in the diameter direction of the magnetic medium 1. is there. The GHT defect 5 is illustrated in the magnetic medium 1. The two GH heads A and B and the spindle motor 3a are connected to the controller 4 and are controlled by the controller 4 as follows.

コントローラ4は、2つのGHヘッドA,Bの各振動感知センサ2dからの検出出力電圧と所定のGHT閾値とを比較してType−A突起を検出する突起検出回路と、2つのGHヘッドA,Bの各キャリッジ2aの駆動を制御するキャリッジ制御回路と、スピンドルモータ3aの駆動を制御するモータ制御回路と、これらの回路と接続され、突起検出回路の検出信号を参照し、キャリッジ制御回路とモータ制御回路とに制御信号を供給するCPUと、このCPUの実行する制御手順を格納したROMと、CPUの作業領域を提供するRAMとを有する。コントローラ4内のCPUは、ROM内の制御手順に従って以下に述べるようなGHTを実行する(この構成は実施例2,3においても同様である)。   The controller 4 compares a detection output voltage from each vibration detection sensor 2d of the two GH heads A and B with a predetermined GHT threshold value to detect a Type-A protrusion, and two GH heads A, A carriage control circuit for controlling the driving of each carriage 2a of B, a motor control circuit for controlling the driving of the spindle motor 3a, and these circuits are connected, and the carriage control circuit and the motor are referenced with reference to the detection signal of the protrusion detection circuit. The CPU includes a CPU that supplies a control signal to the control circuit, a ROM that stores a control procedure executed by the CPU, and a RAM that provides a work area for the CPU. The CPU in the controller 4 executes GHT as described below according to the control procedure in the ROM (this configuration is the same in the second and third embodiments).

1次ヘッドのGHTは、コントローラ4の制御下で、磁気媒体のローディング→GHヘッドAのローデイング、磁気媒体の表面突起走査、アンローデイング→磁気媒体のアンローディグを実行する(図3−(b))。ここまでは、従来の1つGHヘッドによるGHTと全く変わりない。従来技術では、このGHTでGHT欠陥が検出された磁気媒体は不良媒体として集められ、再GHTにまわされる。ところが、本実施例では、GHT欠陥が検出された場合は、GHヘッドAの走査中において、コントローラ4内の突起検出回路からの検出信号とキャリッジ制御回路への制御信号とに基づいて、CPUによって磁気媒体1の半径方向上のGHT欠陥位置が特定できるので、さらに、コントローラ4の制御下で、2次ヘッドであるGHヘッドBをGHT欠陥5の位置に移動させ、このGHヘッドBを用いてGHT欠陥5の位置近傍のリング領域(図3−(c)に6で示す)のみのGHT欠陥走査を行う。このGHT欠陥走査で従来の再GHTを補完し、このGHT欠陥走査でType-A突起が検出されなかった磁気媒体は良品とされ、Type-A突起が検出された磁気媒体は不良媒体として廃棄される。従って、本実施例では再GHTはなくなり、しかも、上記GHT欠陥走査のリング領域のサイズはGHT欠陥の欠陥長に依存するが、昨今のGHT欠陥の欠陥長は数ミクロン以下が殆どであることから、磁気媒体のGHT領域に比べてリング領域は微小になる。従って、処理時間が大幅に短縮される。さらに、GHヘッドBのType-B突起との接触頻度はGHヘッドAに比べて極めて低くなるので、GHヘッドBの低浮上化は殆ど発生しない。従来の再GHTでは、再GHT中にもヘッドの低浮上化が進行するが、本実施例ではこの問題も回避される。   Under the control of the controller 4, the GHT of the primary head executes loading of the magnetic medium → loading of the GH head A, scanning of the surface protrusion of the magnetic medium, unloading → unloading of the magnetic medium (FIG. 3B). . Up to this point, there is no difference from the conventional GHT with one GH head. In the prior art, magnetic media in which GHT defects are detected by this GHT are collected as defective media and re-circulated for GHT. However, in the present embodiment, when a GHT defect is detected, during the scanning of the GH head A, the CPU determines based on the detection signal from the protrusion detection circuit in the controller 4 and the control signal to the carriage control circuit. Since the GHT defect position in the radial direction of the magnetic medium 1 can be specified, the GH head B, which is the secondary head, is further moved to the position of the GHT defect 5 under the control of the controller 4, and this GH head B is used. GHT defect scanning is performed only on the ring region (indicated by 6 in FIG. 3C) near the position of the GHT defect 5. This GHT defect scan complements the conventional re-GHT, and magnetic media in which Type-A protrusions are not detected in this GHT defect scan are considered good products, and magnetic media in which Type-A protrusions are detected are discarded as defective media. The Therefore, in this embodiment, there is no re-GHT, and the size of the ring region of the GHT defect scanning depends on the defect length of the GHT defect, but the defect length of the GHT defect in recent years is almost several microns or less. The ring region is very small compared to the GHT region of the magnetic medium. Therefore, the processing time is greatly shortened. Furthermore, since the contact frequency of the GH head B with the Type-B protrusion is extremely lower than that of the GH head A, the flying height of the GH head B hardly occurs. In the conventional re-GHT, the flying height of the head is reduced even during the re-GHT, but this problem is also avoided in this embodiment.

また、GHヘッドAが磁気媒体上を浮上しない状態に陥って(GHヘッドの寿命がつき)新しいヘッドに交換されるときは、全面GHTをGHヘッドB、GHT欠陥走査を新しいGHヘッドAに切り替える。結果、低浮上化は殆ど発生していないGHヘッドで常にGHT欠陥走査を行うことが可能になる。   Also, when the GH head A falls into a state where it does not float on the magnetic medium (the GH head has a lifetime) and is replaced with a new head, the entire GHT is switched to the GH head B and GHT defect scanning is switched to the new GH head A. . As a result, it is possible to always perform GHT defect scanning with a GH head in which low flying height hardly occurs.

次に、2次ヘッドの突起検出レベルからの、1次ヘッドの感度の補正(GHT閾値電圧の補正)例について述べる。GHTに装着される新GHヘッドは、高さ・形状の判明した基準の突起(バンプ)と接触した場合の振動感知センサの出力電圧が一定範囲内におさまることを確認後、ヘッドメーカーにより出荷されたものである。従って、振動感知センサのGHT閾値電圧Veはヘッドに依らず一定である。1次ヘッドによるGHT欠陥の振動感知センサの出力電圧をV1、2次ヘッドによる同一GHT欠陥の振動感知センサの出力電圧をV2とすると、感度補正係数kはk=V1/V2となる。以後の1次ヘッドのGHTにおいて、突起検出回路における1次ヘッドのGHT閾値電圧をk×Veに切り替える(1次ヘッドの感度の補正)と、1次ヘッドの低浮上化状態でも磁気媒体の良否判定を適正に行える。2次ヘッドが1次ヘッドが検出したGHT欠陥を検出しない場合は、V2=0でk=∞になることを考慮すれば、感度補正係数の上限値k・maxを設けて、GHヘッドの寿命が完了する前に、k>k・maxでコントローラ4から交換警告等を出力(または警告表示)を行うことによって、ヘッド交換も行うことができる。   Next, an example of correcting the sensitivity of the primary head (correcting the GHT threshold voltage) from the protrusion detection level of the secondary head will be described. The new GH head mounted on the GHT is shipped by the head manufacturer after confirming that the output voltage of the vibration sensor is within a certain range when it comes into contact with a reference protrusion (bump) whose height and shape are known. It is a thing. Therefore, the GHT threshold voltage Ve of the vibration sensor is constant regardless of the head. If the output voltage of the vibration detection sensor for the GHT defect by the primary head is V1, and the output voltage of the vibration detection sensor for the same GHT defect by the secondary head is V2, the sensitivity correction coefficient k is k = V1 / V2. In the subsequent GHT of the primary head, when the GHT threshold voltage of the primary head in the protrusion detection circuit is switched to k × Ve (correction of the sensitivity of the primary head), the quality of the magnetic medium is good even when the primary head is in a low flying state. Judgment can be made properly. If the secondary head does not detect the GHT defect detected by the primary head, considering the fact that V = 0 and k = ∞, the upper limit value k · max of the sensitivity correction coefficient is set, and the life of the GH head The head replacement can also be performed by outputting a replacement warning or the like from the controller 4 (or a warning display) at k> k · max before the process is completed.

(実施例2)
図4−(a)に示すように、磁気媒体1のGHT領域を外周側のGHT領域Iと内周側のGHT領域IIに2分して、GHT領域I,IIの表面突起走査を各々GHヘッドA、Bに分担させる(図4−(b))。この時、各々の領域の半径方向の長さは等しく(図4−(a)でL1=L2)、当然のことではあるが、GHヘッドA、Bのキャリッジの半径方向の移動速度も等しいので、GHT領域I,IIの表面突起走査時間はともに従来GHTの1/2時間で、本実施例を適用すれば、GHTの表面突起走査時間を従来GHTの半分に短縮することが可能になる。
(Example 2)
As shown in FIG. 4- (a), the GHT region of the magnetic medium 1 is divided into the GHT region I on the outer peripheral side and the GHT region II on the inner peripheral side, and the surface protrusion scanning of the GHT regions I and II is performed for each GH. Share heads A and B (Fig. 4- (b)). At this time, the lengths in the radial direction of the respective regions are equal (L1 = L2 in FIG. 4A). Naturally, the moving speeds of the GH heads A and B in the radial direction are also equal. The surface protrusion scanning time of the GHT regions I and II are both 1/2 hours of the conventional GHT. If this embodiment is applied, the surface protrusion scanning time of the GHT can be shortened to half that of the conventional GHT.

(実施例3)
ヘッドGHTおいて、3つのGHヘッドを具備したヘッドGHT装置の例を図5に示す。まず、GHヘッドA、Bを用いて、実施例2(2分割領域のGHT)を適用する。次に、実施例1を適用して、この領域2分割GHTでGHT欠陥が検出された場合は、GHヘッドCでGHT欠陥走査を行わせる。本実施例により、
(1)再GHTを無くす
(2)磁気媒体の良否判定を的確に行う
(3)GHTの表面突起走査時間を従来GHTの半分に短縮する
ことが実現され、実施例1,2の効果が同時に得られる。
(Example 3)
FIG. 5 shows an example of a head GHT apparatus having three GH heads in the head GHT. First, using the GH heads A and B, Example 2 (GHT of two divided regions) is applied. Next, when the first embodiment is applied and a GHT defect is detected in the region-divided GHT, the GH head C performs GHT defect scanning. According to this example,
(1) Eliminate GHT again (2) Accurately judge the quality of magnetic media (3) Reduce the GHT surface protrusion scanning time to half that of the conventional GHT, and simultaneously achieve the effects of the first and second embodiments can get.

突起のタイプ別の説明と振動感知センサの出力電圧との関係を示す図である。It is a figure which shows the relationship between description according to the type of protrusion, and the output voltage of a vibration detection sensor. (a)は磁気媒体1とGHヘッド2の平面図であり、(b),(c)および(d)はGHT実施時のスピンドル3にローディングする磁気媒体1とGHヘッド2との位置関係を示す図である。(A) is a plan view of the magnetic medium 1 and the GH head 2, and (b), (c) and (d) show the positional relationship between the magnetic medium 1 loaded on the spindle 3 and the GH head 2 when performing GHT. FIG. (a)は磁気媒体1と2つのGHヘッドとの関係を示す図であり、(b),(c)は磁気媒体1と2つのGHヘッドとの関係を示す図である。(A) is a figure which shows the relationship between the magnetic medium 1 and two GH heads, (b), (c) is a figure which shows the relationship between the magnetic medium 1 and two GH heads. (a)は磁気媒体1と2つのGHヘッドとの他の関係を示す図であり、(b),(c)は磁気媒体1と2つのGHヘッドとの他の関係を示す図である。(A) is a figure which shows the other relationship between the magnetic medium 1 and two GH heads, (b), (c) is a figure which shows the other relationship between the magnetic medium 1 and two GH heads. 磁気媒体1と3つのGHヘッドとの他の関係を示す図である。It is a figure which shows the other relationship between the magnetic medium 1 and three GH heads.

符号の説明Explanation of symbols

1 磁気媒体
3 スピンドル
4 コントローラ
5 GHT欠陥
A,B GHTヘッド
1 Magnetic medium 3 Spindle 4 Controller 5 GHT defect A, B GHT head

Claims (3)

磁気媒体に対してヘッドを用いたグライドハイト試験を行う磁気媒体の突起検査方法であって、
1次ヘッドにより前記磁気媒体を走査して欠陥を検出した場合は、2次ヘッドを前記磁気媒体の前記欠陥の検出位置に移動させ、当該2次ヘッドを用いて前記欠陥の検出位置近傍のリング領域のみの突起検査を行わせ、前記リング領域のサイズは、前記欠陥の欠陥長に依存し、前記欠陥の欠陥長は数ミクロン以下であることを特徴とする磁気媒体の突起検査方法。
A method for inspecting a protrusion of a magnetic medium for performing a glide height test using a head against the magnetic medium,
When a defect is detected by scanning the magnetic medium with a primary head, the secondary head is moved to the defect detection position of the magnetic medium, and a ring near the defect detection position is used by using the secondary head. to perform the projection examination region only, the size of the ring region is dependent on the defect length of the defect, the defect length projection inspection method of the magnetic medium characterized der Rukoto than several microns of the defect.
請求項1において、
前記2次ヘッドの突起検出レベルを参照して、前記1次ヘッドの感度を補正することを特徴とする磁気媒体の突起検査方法。
In claim 1,
A method for inspecting a protrusion on a magnetic medium, wherein the sensitivity of the primary head is corrected with reference to the protrusion detection level of the secondary head.
請求項1または2において、
前記磁気媒体の検査領域を分割し、各検査領域に対して2以上の1次ヘッドの各々を用いて走査を実行し、いずれかの1次ヘッドが欠陥を検出した場合は、当該欠陥検出位置に対する前記2次ヘッドによる突起検査を実行することを特徴とする磁気媒体の突起検査方法。
In claim 1 or 2,
When the inspection area of the magnetic medium is divided and scanning is performed using each of two or more primary heads for each inspection area, and any of the primary heads detects a defect, the defect detection position A method for inspecting a protrusion of a magnetic medium, wherein the protrusion inspection by the secondary head is executed.
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