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JP4528682B2 - Manufacturing method of hydrodynamic bearing parts - Google Patents
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JP4528682B2 - Manufacturing method of hydrodynamic bearing parts - Google Patents

Manufacturing method of hydrodynamic bearing parts Download PDF

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JP4528682B2
JP4528682B2 JP2005200462A JP2005200462A JP4528682B2 JP 4528682 B2 JP4528682 B2 JP 4528682B2 JP 2005200462 A JP2005200462 A JP 2005200462A JP 2005200462 A JP2005200462 A JP 2005200462A JP 4528682 B2 JP4528682 B2 JP 4528682B2
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bearing
transfer member
transfer
manufacturing
dynamic pressure
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JP2007016950A (en
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真史 大熊
健一 三谷
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NTN Corp
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Description

本発明は、内面に動圧発生溝を形成した動圧軸受部品の製造方法に関するものであって、例えばハードディスクのスピンドルモータやポリゴンミラーのレーザー走査用モータなどのように、高速で且つ高精度に回転するモータ類の軸受部品に適用できる。   The present invention relates to a method of manufacturing a hydrodynamic bearing part having a dynamic pressure generating groove formed on the inner surface, and is high-speed and high-precision, such as a hard disk spindle motor or a polygon mirror laser scanning motor. Applicable to bearing parts of rotating motors.

この種の高速モータ類では、ヘリングボーンその他の溝パターンの動圧発生溝によって、ラジアル方向及び又はスラスト方向の軸受面を形成する動圧軸受が用いられており、これらの動圧発生溝は軸受装置を構成する軸部品と軸受部品の間に形成されているが、この動圧発生溝は軸側の外面を加工して形成する場合と、軸受側の内面を加工して形成する場合とがある。   In this type of high-speed motors, dynamic pressure bearings are used in which radial and / or thrust bearing surfaces are formed by herringbone and other groove pattern dynamic pressure generating grooves. The dynamic pressure generating groove is formed by processing the outer surface on the shaft side and when forming the inner surface on the bearing side. is there.

例えば、軸側の外面を加工して動圧発生溝を形成する前者の先行技術としては、特許文献1〜3などに開示されているものがある。
特開2000−120695号公報 特開平11−093945号公報 特開平08−283953号公報
For example, as the former prior art for forming the dynamic pressure generating groove by processing the outer surface on the shaft side, there are those disclosed in Patent Documents 1 to 3 and the like.
JP 2000-120695 A Japanese Patent Laid-Open No. 11-093945 Japanese Patent Application Laid-Open No. 08-2833953

また、軸受側の内面を加工して形成する動圧発生溝を形成する後者の先行技術としては、特許文献4〜6などに開示されているものがある。
特開2004−324674号公報 特開2001−146914号公報 特開2000−312943号公報
Further, as the latter prior art for forming the dynamic pressure generating groove formed by processing the inner surface on the bearing side, there are those disclosed in Patent Documents 4 to 6 and the like.
JP 2004-324673 A JP 2001-146914 A JP 2000-312943 A

前者の先行技術では、特許文献1〜3などにも開示されているように、細径な軸の外面に対して、メッキやエッチングなどの化学処理を施すことによって、微細なヘリングボーンなどによる動圧発生溝を、比較的容易且つ安価に高精度で形成することが可能であるが、溝加工による自重の減少や遠心力で作動流体が溝内から流出することなどによって、安定したスラスト浮上特性が損なわれていた。   In the former prior art, as disclosed in Patent Documents 1 to 3 and the like, the outer surface of the thin shaft is subjected to a chemical treatment such as plating or etching, so that it can be moved by a fine herringbone or the like. The pressure generating groove can be formed relatively easily and inexpensively with high accuracy. However, stable thrust levitation characteristics can be achieved by reducing the dead weight due to the groove processing and the working fluid flowing out of the groove by centrifugal force. Was damaged.

後者の先行技術では、特許文献4〜6などにも開示されているように、細径な軸受部品の内面に対して、ボール転造による溝加工用の冶工具を用いて動圧発生溝を塑性加工しており、前者の先行技術に比べて安定したスラスト浮上特性が得られるが、微細なヘリングボーンなどによる動圧発生溝を、軸心と同心状態に位置決めして塑性加工することは容易ではなく、歩留まり良く大量且つ安価に生産することを阻害していた。   In the latter prior art, as disclosed in Patent Documents 4 to 6 and the like, a dynamic pressure generating groove is formed on the inner surface of a small bearing part using a tool for groove processing by ball rolling. Although it is plastically processed, stable thrust levitation characteristics can be obtained compared to the former prior art, but it is easy to perform plastic processing by positioning the dynamic pressure generating groove due to fine herringbone etc. concentrically with the shaft center Rather, it hindered production in large quantities and at low cost with good yield.

そこで本発明では、これら従来技術の課題を解決し得る動圧軸受部品の製造方法を提供するものであって、特許文献4〜6などの先行技術のようにボール転造による塑性加工を用いない新規な製造方法によって、細径な軸受部品の内面に対して容易且つ高精度で動圧発生溝の加工を可能にすると共に、これによって動圧軸受部品を歩留まり良く大量且つ安価に生産可能にすることを主たる目的としている。   Therefore, the present invention provides a method of manufacturing a hydrodynamic bearing component that can solve the problems of the conventional technology, and does not use plastic working by ball rolling as in the prior arts of Patent Documents 4 to 6 and the like. The new manufacturing method enables easy and high-precision machining of the dynamic pressure generating groove on the inner surface of the small-diameter bearing component, thereby enabling the production of the dynamic pressure bearing component with a high yield and a large amount at a low cost. This is the main purpose.

本発明による動圧軸受部品の製造方法は、軸受心材の外面に転写部材を設ける工程と、転写部材の外面を溝加工して動圧発生溝の反転パターンによる転写溝加工を行う工程と、転写部材の転写面に金属軸受部材を設けてマスター軸を形成する工程と、マスター軸を金型内にインサートして金属軸受部材の外面に樹脂成形部材を一体成形する工程と、マスター軸と一体に成形品を金型から取り出して転写部材から軸受心材を除去する工程と、転写部材を除去して金属軸受部材の内面に動圧発生溝を形成する工程とを備え、樹脂成形部材の軸心側に動圧発生溝を形成する金属軸受部材を一体化させた動圧軸受部品を製造する。(請求項1)   The method of manufacturing a hydrodynamic bearing component according to the present invention includes a step of providing a transfer member on the outer surface of the bearing core, a step of groove forming the outer surface of the transfer member, and performing a transfer groove processing using a reverse pattern of the dynamic pressure generating groove, and a transfer A step of providing a metal bearing member on the transfer surface of the member to form a master shaft, a step of inserting the master shaft into the mold and integrally molding a resin molded member on the outer surface of the metal bearing member, A step of removing the bearing core material from the transfer member by removing the molded product from the mold, and a step of removing the transfer member to form a dynamic pressure generating groove on the inner surface of the metal bearing member. To produce a hydrodynamic bearing part in which a metal bearing member forming a hydrodynamic groove is integrated. (Claim 1)

請求項1に記載した動圧軸受部品の製造方法において、前記軸受心材には硬質金属製の円柱軸を用いる形態を採ることができる。(請求項2)   In the method of manufacturing a hydrodynamic bearing component according to claim 1, a form using a cylindrical shaft made of hard metal can be adopted as the bearing core material. (Claim 2)

請求項1又は2に記載した動圧軸受部品の製造方法において、前記転写部材は軟質金属メッキ層で形成する形態を採ることができる。(請求項3)   In the method for manufacturing a hydrodynamic bearing component according to claim 1 or 2, the transfer member may be formed of a soft metal plating layer. (Claim 3)

請求項1〜3のいずれかに記載した動圧軸受部品の製造方法において、前記転写溝加工を行う工程で転写部材に対して転造加工を行う形態を採ることができる。(請求項4)   In the method for manufacturing a hydrodynamic bearing part according to any one of claims 1 to 3, it is possible to adopt a form in which a rolling process is performed on a transfer member in the process of performing the transfer groove process. (Claim 4)

請求項1〜4のいずれかに記載した動圧軸受部品の製造方法において、前記金属軸受部材は表面硬度が高く且つ耐食性のある硬質金属メッキ層で形成する形態を採ることができる。(請求項5)   5. The method of manufacturing a hydrodynamic bearing component according to claim 1, wherein the metal bearing member is formed of a hard metal plating layer having high surface hardness and corrosion resistance. (Claim 5)

請求項1〜5のいずれかに記載した動圧軸受部品の製造方法において、前記樹脂成形部材を一体成形する工程で軸受部品を使用するモータ類のハウジングも同時成形する形態を採ることができる。(請求項6)   In the method for manufacturing a hydrodynamic bearing component according to any one of claims 1 to 5, it is possible to adopt a form in which a housing of a motor that uses the bearing component in the step of integrally molding the resin molded member is simultaneously molded. (Claim 6)

請求項1〜6のいずれかに記載した動圧軸受部品の製造方法において、前記軸受心材を除去する工程で転写部材から引き抜き除去する形態を採ることができる。(請求項7)   In the method for manufacturing a hydrodynamic bearing component according to any one of claims 1 to 6, it is possible to adopt a form in which the bearing core is pulled out and removed in the step of removing the bearing core material. (Claim 7)

請求項1〜7のいずれかに記載した動圧軸受部品の製造方法において、前記転写部材を除去する工程で溶解液によって転写部材を溶解除去する形態を採ることができる。(請求項8)   In the method for manufacturing a hydrodynamic bearing part according to any one of claims 1 to 7, a mode in which the transfer member is dissolved and removed by a dissolving liquid in the step of removing the transfer member can be employed. (Claim 8)

請求項1による動圧軸受部品の製造方法では、転写部材の外面に溝加工した反転パターンを、金属軸受部材に転写して動圧発生溝を形成しているので、ボール転造などで動圧軸受部品の軸心孔に対して、動圧溝加工を直接行う従来技術に比べると、溝加工作業が各段に容易であって且つ加工精度を高めることが可能であるから、動圧軸受部品を歩留まり良く大量且つ安価に生産可能にすることができる。   In the method of manufacturing a hydrodynamic bearing part according to claim 1, since the reverse pattern formed by grooving on the outer surface of the transfer member is transferred to the metal bearing member to form the hydrodynamic pressure generating groove, Compared to the conventional technology that directly performs dynamic pressure groove machining on the shaft hole of the bearing component, the groove machining operation is easy at each stage and the machining accuracy can be increased. Can be produced in large quantities and at low cost with a high yield.

また、製造された動圧軸受部品は樹脂成形部材の軸心側が金属軸受部材によって補強されていると共に、金属軸受部材が製造過程では転写部材を介して軸心部材で保形されているので、樹脂成形品であるにも係わらず軸心孔及び動圧発生溝は、真円度及び寸法精度が確保された状態で製造することが可能である。   Moreover, since the manufactured hydrodynamic bearing part is reinforced by the metal bearing member on the shaft center side of the resin molded member, and the metal bearing member is held by the shaft member through the transfer member in the manufacturing process, Despite being a resin molded product, the shaft hole and the dynamic pressure generating groove can be manufactured with roundness and dimensional accuracy ensured.

請求項2による動圧軸受部品の製造方法では、軸受心材として例えばステンレス材などの硬質金属製の円柱軸を用いる形態を採ることによって、転写部材に対して転造などで転写溝加工する際には、転造圧力による転写部材の変形を防止すると共に、樹脂成形部材をインサート成形する際には、射出成形圧力による転写部材及び金属軸受部材の変形を防止することが可能である。   In the method for manufacturing a hydrodynamic bearing part according to claim 2, when a transfer groove is formed by rolling or the like on a transfer member by adopting a form using a cylindrical shaft made of hard metal such as stainless steel as a bearing core material. In addition to preventing deformation of the transfer member due to rolling pressure, it is possible to prevent deformation of the transfer member and the metal bearing member due to injection molding pressure when insert molding the resin molded member.

請求項3による動圧軸受部品の製造方法では、転写部材を例えば銅メッキなどの軟質金属メッキ層で形成する形態を採ることによって、転造その他による転写溝の溝加工が容易であると共に、溶解液などによって金属軸受部材から容易に分離除去することが可能である。   In the method of manufacturing a hydrodynamic bearing part according to claim 3, by adopting a form in which the transfer member is formed of a soft metal plating layer such as copper plating, the groove processing of the transfer groove by rolling or the like is easy and the melting is performed. It can be easily separated and removed from the metal bearing member by liquid or the like.

請求項4による動圧軸受部品の製造方法では、転写溝加工を行う工程で転写部材に対して転造加工を行う形態を採ることによって、ボール転造などで動圧軸受部品の軸心孔に対して、動圧溝加工を直接行う従来技術に比べると、溝加工作業が各段に容易であって且つ加工精度を高めることが可能である。   In the method of manufacturing a hydrodynamic bearing part according to claim 4, by adopting a form in which the transfer member is rolled in the transfer groove machining process, the shaft hole of the hydrodynamic bearing part is formed by ball rolling or the like. On the other hand, compared with the prior art that directly performs dynamic pressure grooving, the grooving operation is easy at each stage and the machining accuracy can be increased.

請求項5による動圧軸受部品の製造方法では、金属軸受部材を例えばニッケルメッキなどの硬質金属メッキ層で形成することによって、動圧軸受部品の軸受面を表面硬度が高く且つ耐食性のあるものにすることができる。   In the method of manufacturing a hydrodynamic bearing component according to claim 5, the metal bearing member is formed of a hard metal plating layer such as nickel plating, so that the bearing surface of the hydrodynamic bearing component has high surface hardness and corrosion resistance. can do.

請求項6による動圧軸受部品の製造方法では、樹脂成形部材を一体成形する工程で軸受部品を使用するモータ類のハウジングも同時成形する形態を採ることによって、動圧軸受部品モータ類のハウジングを個別に製造する場合に比べ、生産性を向上してコストダウンを図ることができると共に、ハウジングに装着されるモータ部品との位置決め精度も向上させることが可能である。   In the method of manufacturing a hydrodynamic bearing component according to claim 6, the housing of the hydrodynamic bearing component motor is configured by simultaneously forming the housing of the motor using the bearing component in the step of integrally molding the resin molded member. Compared with the case of manufacturing individually, the productivity can be improved and the cost can be reduced, and the positioning accuracy with the motor parts mounted on the housing can also be improved.

請求項7による動圧軸受部品の製造方法では、軸受心材を除去する工程で転写部材から引き抜き除去する形態を採ることによって、金属軸受部材に転写された動圧発生溝のパターン面が、転写部材によって保護された状態で軸受心材を除去することができる。   In the method of manufacturing a hydrodynamic bearing component according to claim 7, the pattern surface of the dynamic pressure generating groove transferred to the metal bearing member is formed by removing the bearing core material from the transfer member in the step of removing the bearing core material. The bearing core material can be removed in a state protected by.

請求項8による動圧軸受部品の製造方法では、転写部材を除去する工程で溶解液によって転写部材を溶解除去する形態を採ることによって、金属軸受部材に転写された動圧発生溝のパターン面を損なうことなく転写部材を容易に除去することができる。   In the method of manufacturing a dynamic pressure bearing part according to claim 8, the pattern surface of the dynamic pressure generating groove transferred to the metal bearing member is formed by adopting a form in which the transfer member is dissolved and removed by the dissolving liquid in the step of removing the transfer member. The transfer member can be easily removed without loss.

以下に、本発明による動圧軸受部品の製造方法について、本発明を適用した好適な実施形態を示す添付図面に基づいて詳細に説明するが、図1〜10では軸方向と平行なラジアル軸受面に動圧発生溝を設けた第1の実施例を示し、図11及び図12では軸方向と平行なラジアル軸受面に動圧発生溝を設けると共に、軸方向と直角なスラスト軸受面に動圧発生溝を設けた第2の実施例を示す。   Hereinafter, a method for manufacturing a hydrodynamic bearing component according to the present invention will be described in detail with reference to the accompanying drawings showing a preferred embodiment to which the present invention is applied. In FIGS. 1 to 10, radial bearing surfaces parallel to the axial direction are described. FIG. 11 and FIG. 12 show a dynamic pressure generating groove on a radial bearing surface parallel to the axial direction and a dynamic pressure on a thrust bearing surface perpendicular to the axial direction. The 2nd Example which provided the generating groove | channel is shown.

いずれの実施例の場合にも、軸受心材の外面に転写部材を設ける工程Aと、転写部材に転写溝を加工する工程Bと、転写部材の外面に金属軸受部材を設ける工程Cと、転写部材と金属軸受部材を設けた軸受心材をインサート軸に樹脂成形部材を射出成形する工程Dと、成形品から軸受心材を除去する工程Eと、樹脂成形部材と金属軸受部材から転写部材を除去する工程Fとを順次実施し、樹脂成形部材の軸心側に動圧発生溝を形成する金属軸受部材を一体化させた動圧軸受部品を製造することができる。   In any of the embodiments, the process A for providing the transfer member on the outer surface of the bearing core, the process B for processing the transfer groove on the transfer member, the process C for providing the metal bearing member on the outer surface of the transfer member, and the transfer member And a step D of injection molding a resin molding member with the bearing core provided with the metal bearing member as an insert shaft, a step E of removing the bearing core material from the molded product, and a step of removing the transfer member from the resin molding member and the metal bearing member. F is sequentially performed, and a dynamic pressure bearing part in which a metal bearing member that forms a dynamic pressure generating groove on the axial center side of the resin molded member is integrated can be manufactured.

工程Aは、軸受部品の内径より小径な軸受心材の外面に軸受部品の内径より大径となる厚みで転写部材を設ける工程であって、軸受心材である円柱軸1に対してレジスト処理やシルク印刷その他公知の各種手段で非メッキ部分をマスキングし、予め設定した所定の長さ範囲に亘ってメッキ処理を行い、図1で示すように円柱軸1の外周面に転写部材となる肉薄状をした軟質金属メッキ層2を局部的に設ける。   Step A is a step of providing a transfer member with a thickness larger than the inner diameter of the bearing component on the outer surface of the bearing core material having a diameter smaller than the inner diameter of the bearing component. The non-plated portion is masked by printing or other known means, and a plating process is performed over a predetermined length range set in advance. As shown in FIG. The soft metal plating layer 2 is provided locally.

軸受心材は、無電解メッキや電鋳その他によって転写部材を設ける際に、容易且つ良好な状態で付着できる材質であること、外周面によって軸受部品の軸心孔が確定されるので高い真円度及び外径寸法精度が得られる材質であること、メッキ処理する際に変質及び変形しないこと、軸受心材を除去する工程Eで転写部材から除去する際に容易且つ滑面状態で分離できること、などが要求される。   The bearing core material is a material that can be easily and satisfactorily attached when a transfer member is provided by electroless plating, electroforming, etc., and the shaft core hole of the bearing component is determined by the outer peripheral surface, so that the roundness is high. And a material capable of obtaining dimensional accuracy of the outer diameter, not being altered or deformed during the plating process, being easily and smoothly separated when removed from the transfer member in the step E of removing the bearing core material, and the like. Required.

この実施例では、焼き入れ処理を施したステンレス鋼をストレートの円柱状に形成した中実軸による円柱軸1を軸受心材として使用しており、特にステンレス鋼のなかでも硬度が高くて耐酸及び耐食性にも優れたSUS420Jなどの使用が望ましいが、ステンレス鋼に限定されず同等の性能を有する他の硬質金属材(例えば、ニッケルクロム鋼その他のニッケル合金やクロム合金など)や、セラミックの表面に硬質金属被膜を施したものなどの使用も可能である。   In this embodiment, a cylindrical shaft 1 made of a solid shaft formed by quenching stainless steel into a straight cylindrical shape is used as a bearing core material. Particularly, stainless steel has high hardness and is resistant to acid and corrosion. It is desirable to use SUS420J, which is also excellent, but it is not limited to stainless steel, but other hard metal materials having equivalent performance (for example, nickel chrome steel and other nickel alloys and chrome alloys) and ceramic surfaces are hard. It is also possible to use a metal coating.

軸受心材は、用途に適合させて各種のサイズを採ることが可能であって、この実施例による円柱軸1は外径寸法を0.3〜1.5mm程度にすると共に、長さ寸法は少なくとも転写部材の巾寸法より十分に長くした所望長さに設定することができるが、この実施による円柱軸1の場合には長さ寸法を7.5mm程度にしている。   The bearing core material can be adapted to various uses and can take various sizes. The cylindrical shaft 1 according to this embodiment has an outer diameter of about 0.3 to 1.5 mm and a length of at least Although it can be set to a desired length sufficiently longer than the width dimension of the transfer member, in the case of the cylindrical shaft 1 according to this implementation, the length dimension is set to about 7.5 mm.

また、軸受心材は中実軸による円柱軸だけではなく中空軸によるパイプを用いたり、パイプ内に樹脂材を充填して補強した形態を採ることも可能であると共に、この実施例では横断面の形状を円柱状に形成した円柱軸にしているが、横断面の形状が一定ならば多角形状その他の非円形状の形態を採ることも可能であり、端部を円錐台形状その他の次第に縮径するに形状にしても良い。   Further, the bearing core material can be not only a solid cylindrical shaft but also a hollow shaft pipe, or can be reinforced by filling a resin material into the pipe. Although the shape is a cylindrical axis formed in a cylindrical shape, it is possible to adopt a polygonal shape or other non-circular shape if the shape of the cross section is constant, and the end is gradually reduced in diameter to a truncated cone shape or the like. You may make it into a shape.

転写部材は、軸受心材に対して容易に接合できる材質であること、転写溝を加工する工程Bにおいて、外周面に所望パターンによる動圧発生溝の転写溝加工が容易な材質であること、金属軸受部材を設ける工程Cにおいて、転写溝加工した外周側が軸受部品となる金属軸受部材と強固に接合できる材質であること、転写部材を除去する工程Fにおいて、分離面となる金属軸受部材の内周側の円滑性を損なうことなく、金属軸受部材から容易に除去することが可能な材質であること、などが要求される。   The transfer member is a material that can be easily joined to the bearing core material, and in the process B of processing the transfer groove, the transfer member is a material that can easily transfer the dynamic pressure generating groove with a desired pattern on the outer peripheral surface, metal In the step C of providing the bearing member, the outer peripheral side of the transfer groove processed is a material that can be firmly joined to the metal bearing member serving as the bearing component, and in the step F of removing the transfer member, the inner periphery of the metal bearing member serving as the separation surface The material is required to be a material that can be easily removed from the metal bearing member without impairing the smoothness of the side.

この実施例では転写部材として、工程Bにおいて転造による転写溝加工が容易であること、工程Cにおいて金属軸受部材と強固に接合できること、工程Fにおいて溶解液による溶解除去が容易であること、安価でメッキの成長速度が速いことなどの理由から、銅又は銅合金などの軟質金属材を電鋳した軟質金属メッキ層2を形成し、軟質金属メッキ層2は巾寸法3.0mm程度にすると共に、皮膜の厚さを10〜30μ程度に設定している。   In this embodiment, as the transfer member, the transfer groove processing by rolling is easy in the process B, the metal bearing member can be firmly joined in the process C, the dissolution removal by the solution in the process F is easy, and the cost is low. For this reason, a soft metal plating layer 2 is formed by electroforming a soft metal material such as copper or a copper alloy, and the soft metal plating layer 2 has a width of about 3.0 mm. The film thickness is set to about 10 to 30 μm.

この転写部材は、軟質金属メッキ層2を電鋳(電解メッキ)ではなくの無電解メッキで形成することも可能であると共に、メッキする金属材料として銅以外の真鍮や金或いは銀などの軟質金属材を用いて電鋳又は無電解メッキすることも可能であり、また転造以外の公知手段で溝加工を行う場合には、当該溝加工手段に適合した材料で金属軸受部材と強固に接合でき且つ、工程Fにおいて除去が可能な材料を使用することができる。   In this transfer member, the soft metal plating layer 2 can be formed by electroless plating instead of electroforming (electrolytic plating), and a soft metal such as brass, gold or silver other than copper as a metal material to be plated. It is also possible to perform electroforming or electroless plating using a material, and when groove processing is performed by a known means other than rolling, the metal bearing member can be firmly joined with a material suitable for the groove processing means. In addition, a material that can be removed in the step F can be used.

例えば、動圧軸受用軸の外周面に動圧発生溝を設ける場合には、上記した転造による塑性加工以外に、軸の外周面に塗布したレジスト層を電解又は化学エッチング或いはレーザ照射などによって除去し、所定パターンの動圧発生溝を加工する公知技術があり、本発明による動圧軸受部品の製造方法では、これらの公知技術を工程Aと工程Bに適用し、これらレジスト層を転写部材とする形態を採ることもできる。   For example, when the dynamic pressure generating groove is provided on the outer peripheral surface of the dynamic pressure bearing shaft, the resist layer applied to the outer peripheral surface of the shaft is subjected to electrolytic or chemical etching or laser irradiation in addition to the above-described plastic working by rolling. There are known techniques for removing and processing dynamic pressure generating grooves of a predetermined pattern. In the method of manufacturing a hydrodynamic bearing part according to the present invention, these known techniques are applied to Step A and Step B, and these resist layers are transferred to a transfer member. It can also take the form.

また、転写部材を水溶性樹脂によって形成する形態を採ることも可能であり、この場合には軸受心材である円柱軸1を金型内にインサートし、水溶性樹脂による転写部材を射出成形することができ、その後に次工程である工程Bにおける転写溝加工を実施することができるが、この射出成形金型に動圧発生溝を設けておくと、次工程である工程Bにおける転写溝加工を同時に実施することができる。   It is also possible to adopt a form in which the transfer member is formed of a water-soluble resin. In this case, the cylindrical shaft 1 as a bearing core material is inserted into a mold, and the transfer member made of the water-soluble resin is injection-molded. After that, the transfer groove processing in the next step B can be carried out. However, if the dynamic pressure generating groove is provided in this injection mold, the transfer groove processing in the next step B is performed. Can be performed simultaneously.

工程Bは、転写部材の外面を軸受部品の内径に適合する深さで溝加工して動圧発生溝の反転パターンによる転写溝加工を行う工程であって、この実施例では転写部材である軟質金属メッキ層2の外周面に対して転造加工を行い、図2で示すように転写凹部3aと転写凸部3bで動圧発生溝の反転パターンによる転写面3を形成するが、転写凹部3aは皮膜の厚さの1/2程度の深さ(5μ)で溝加工する。   Process B is a process in which the outer surface of the transfer member is grooved to a depth that matches the inner diameter of the bearing component, and the transfer groove is processed by the reverse pattern of the dynamic pressure generating groove. As shown in FIG. 2, the outer peripheral surface of the metal plating layer 2 is subjected to a rolling process, and the transfer concave portion 3a and the transfer convex portion 3b form the transfer surface 3 with the reverse pattern of the dynamic pressure generating groove. Is grooved at a depth (5 μm) that is about ½ of the thickness of the film.

転写面3は、公知の先行技術による動圧溝転造装置を用いて容易に転造加工することが可能であり、例えば特開平11−13746号公報に開示されている先行技術などの場合と同様に、水平移動テーブル上に設けた2個のローラで円柱軸1の下方を回転可能に支持すると共に、円柱軸1の上方には動圧発生溝を展開状態にして刻設した平ダイスを水平移動可能に設け、水平移動テーブルと平ダイスを同方向に水平移動させると、軟質金属メッキ層2の外周面に反転パターンによる転写面3が転造加工される。   The transfer surface 3 can be easily rolled using a known prior art dynamic pressure groove rolling device, such as the prior art disclosed in Japanese Patent Application Laid-Open No. 11-13746. Similarly, a flat die which is engraved with a dynamic pressure generating groove in an unfolded state above the cylindrical shaft 1 while two rollers provided on a horizontal moving table are rotatably supported below the cylindrical shaft 1. When the horizontal movement table and the flat die are horizontally moved in the same direction, the transfer surface 3 with a reverse pattern is rolled on the outer peripheral surface of the soft metal plating layer 2.

また、転写面3の加工は上記した転造手段以外の公知転造手段で行うことも可能であると共に、工程Bで前記したように転写部材であるレジスト層に対し、電解又は化学エッチング或いはレーザ照射などを行って所定パターンの溝加工を行うことが可能であり、これらの溝加工は所望なヘリングボーンパターンやV字パターン或いはスパイラルパターンなどによる動圧発生溝に適合させ、その動圧発生溝の反転パターンによる転写溝加工を行う。   Further, the transfer surface 3 can be processed by known rolling means other than the rolling means described above, and as described above in Step B, the resist layer as a transfer member is subjected to electrolytic or chemical etching or laser. Irradiation or the like can be performed to perform groove processing of a predetermined pattern. These groove processing is adapted to a dynamic pressure generating groove by a desired herringbone pattern, V-shaped pattern or spiral pattern, and the dynamic pressure generating groove. The transfer groove is processed by the reverse pattern.

工程Cは、少なくとも軸受部品の外径に適合する厚みで転写部材の転写面に金属軸受部材を設ける工程であって、軟質金属メッキ層2の外周面に転写凹部3aと転写凸部3bで形成した動圧発生溝の反転パターンによる転写面3に対し、図3及び図4で示すように軟質金属メッキ層2より肉厚状をした金属軸受部材となる硬質金属メッキ層4を設け、これによって硬質金属メッキ層4の内周側には、転写面3とは相補形状の動圧溝パターン面5が動圧凹部5aと動圧凸部5bで形成される。   Step C is a step of providing a metal bearing member on the transfer surface of the transfer member with a thickness that matches at least the outer diameter of the bearing component, and is formed by the transfer concave portion 3a and the transfer convex portion 3b on the outer peripheral surface of the soft metal plating layer 2. A hard metal plating layer 4 which is a metal bearing member thicker than the soft metal plating layer 2 as shown in FIG. 3 and FIG. On the inner peripheral side of the hard metal plating layer 4, a dynamic pressure groove pattern surface 5 complementary to the transfer surface 3 is formed by a dynamic pressure concave portion 5a and a dynamic pressure convex portion 5b.

金属軸受部材は、転写部材に対して容易且つ強固に接合できる材質であること、工程Fにおいて転写部材を容易に除去することができると共に、除去した際に分離面で形成した内周側の動圧発生溝形状が損なわれない材質であること、動圧軸受部品として真円度及び寸法精度が確保され且つ、表面硬度が高くて耐食性があること、などが要求される。   The metal bearing member is made of a material that can be easily and firmly joined to the transfer member, and the transfer member can be easily removed in the process F, and the inner peripheral side movement formed on the separation surface when removed. A material that does not impair the shape of the pressure generating groove, roundness and dimensional accuracy as dynamic pressure bearing parts, high surface hardness, and corrosion resistance are required.

この実施例では金属軸受部材として、軟質金属メッキ層2の銅又は銅合金と電鋳メッキで容易且つ強固に接合できること、工程Eにおいて円柱軸1を引き抜き除去できること、工程Fにおいて溶解液によって軟質金属メッキ層2の除去が容易であると共に、溶解除去した際に内周側の動圧発生溝形状が損なわれことがなく、真円度及び寸法精度が確保され且つ、表面硬度が高くて耐食性があることなどの理由から、ニッケル又はニッケル合金などの硬質金属材を電鋳した硬質金属メッキ層4を形成し、その被膜の厚さは100μ程度に設定して軟質金属メッキ層2より十分に厚肉状にしている。   In this embodiment, the metal bearing member can be easily and firmly joined with copper or a copper alloy of the soft metal plating layer 2 by electroforming plating, the cylindrical shaft 1 can be drawn and removed in the process E, and the soft metal can be removed by the solution in the process F. The removal of the plating layer 2 is easy, and the shape of the dynamic pressure generating groove on the inner peripheral side is not damaged when it is dissolved and removed, the roundness and dimensional accuracy are ensured, the surface hardness is high, and the corrosion resistance is high. For some reason, a hard metal plating layer 4 is formed by electroforming a hard metal material such as nickel or a nickel alloy, and the thickness of the coating is set to about 100 μm, which is sufficiently thicker than the soft metal plating layer 2. It is meaty.

この金属軸受部材は、硬質金属メッキ層4を電鋳(電解メッキ)ではなく硬質金属材による無電解メッキで形成することとも可能であると共に、メッキする金属材料としてニッケル又はニッケル合金にカーボンを添加して導電性を高めたり、ポリ四フッ化エチレン(PTFE)や黒鉛などの自己潤滑性微粒子を添加して摺動性及び耐摩耗性を高めたりする公知技術を適用することができる。   In this metal bearing member, the hard metal plating layer 4 can be formed by electroless plating with a hard metal material instead of electroforming (electrolytic plating), and carbon is added to nickel or a nickel alloy as a metal material to be plated. Thus, it is possible to apply a known technique for enhancing the conductivity or adding a self-lubricating fine particle such as polytetrafluoroethylene (PTFE) or graphite to enhance the slidability and wear resistance.

工程Dは、転写部材の転写面に金属軸受部材を設けた軸受心材をマスター軸とし、このマスター軸を射出成形金型内にインサートして金属軸受部材の外面に樹脂成形部材を一体成形する工程であって、この実施例では円柱軸1の外周面に軟質金属メッキ層2と硬質金属メッキ層4を積層したマスター軸6をインサートし、硬質金属メッキ層4の外周面に射出成形を行い、図5で示すように樹脂成形部材である樹脂スリーブ7を一体成形している。   Process D is a process in which a bearing core material provided with a metal bearing member on the transfer surface of the transfer member is used as a master shaft, and this master shaft is inserted into an injection mold to integrally mold a resin molded member on the outer surface of the metal bearing member. In this embodiment, a master shaft 6 in which a soft metal plating layer 2 and a hard metal plating layer 4 are laminated is inserted on the outer peripheral surface of the cylindrical shaft 1, and injection molding is performed on the outer peripheral surface of the hard metal plating layer 4, As shown in FIG. 5, a resin sleeve 7 which is a resin molding member is integrally molded.

樹脂成形部材は、この実施例ではラジアル軸受面に適合させて円筒状の樹脂スリーブ7に形成したが、用途に応じて金型のキャビティを所望に設定し、ラジアル及びスラスト軸受面に適合させて後述する第2の実施例のように有底筒状体に形成したり、その他のモータ部品を装着するハウジングと一体成形して、例えば高速スピンドルモータの軸受装置に適用させることもできる。   In this embodiment, the resin molded member is formed in the cylindrical resin sleeve 7 so as to be adapted to the radial bearing surface. However, the mold cavity is set as desired according to the application and adapted to the radial and thrust bearing surfaces. It can be formed into a bottomed cylindrical body as in a second embodiment to be described later, or formed integrally with a housing to which other motor components are mounted, and applied to a bearing device of a high-speed spindle motor, for example.

このインサート成形では、積層した転写部材と金属軸受部材である軟質金属メッキ層2と硬質金属メッキ層4が、軸受心材である円柱軸1によって保形されているので、成形時に射出圧力を受けても内外径の変形を防止できると共に、射出成形後も円柱軸1を装着したままの状態で金型から取り出し、熱収縮が完了した後に次工程である軸受心材除去工程を実施することにより、軸受部品の真円度及び内外径の寸法精度を確保することが可能である。   In this insert molding, the laminated transfer member, the soft metal plating layer 2 as the metal bearing member and the hard metal plating layer 4 are held by the cylindrical shaft 1 as the bearing core material. In addition, the inner and outer diameters can be prevented from being deformed, and after the injection molding, the cylindrical shaft 1 is taken out from the mold, and after the thermal contraction is completed, the bearing core material removing step, which is the next step, is performed. It is possible to ensure the roundness of parts and the dimensional accuracy of inner and outer diameters.

成形樹脂材は、機械的強度や寸法安定性などに優れているので液晶ポリマー(LCP)の使用が望ましいか、液晶ポリマーの他にもポリフェニレンサルファイド(PPS)樹脂、ポリアセタール樹脂やポリアミド樹脂などの結晶性ポリマー或いは、これら以外でも同様の機能を発揮する高機能樹脂材を使用することが可能であり、これらの樹脂材には必要に応じて繊維強化剤や潤滑剤となる添加剤を加えても良い。   Molded resin materials are excellent in mechanical strength and dimensional stability, so it is desirable to use liquid crystal polymer (LCP), or in addition to liquid crystal polymer, crystals such as polyphenylene sulfide (PPS) resin, polyacetal resin and polyamide resin are used. It is possible to use a functional polymer or a highly functional resin material that exhibits the same function other than these, and if necessary, additives such as a fiber reinforcing agent and a lubricant may be added to these resin materials. good.

工程Eは、内側及び金属軸受部材から軸受心材を除去する工程であって、内側及び金属軸受部材である軟質金属メッキ層2と硬質金属メッキ層4を係止保持した状態で、軸受心材である円柱軸1を軸線方向へ引き抜くか、軸線方向へ僅かに打撃を加える程度で、図6及び図7で示すように除去することが可能であり、引き抜いた後の除去孔8で形成された軸心孔には軟質金属メッキ層2の内周面が露出する。   Step E is a step of removing the bearing core material from the inner side and the metal bearing member, and is a bearing core material in a state where the soft metal plating layer 2 and the hard metal plating layer 4 which are the inner side and the metal bearing member are held in a locked state. The cylindrical shaft 1 can be removed as shown in FIGS. 6 and 7 by pulling the cylindrical shaft 1 in the axial direction or slightly hitting it in the axial direction, and the shaft formed by the removal hole 8 after being pulled out. The inner peripheral surface of the soft metal plating layer 2 is exposed in the core hole.

この軸受心材除去では、硬質金属メッキ層4の内周側に形成した動圧溝パターン面5は、電鋳による銅又は銅合金などで形成した軟質金属メッキ層2によって保護されており、また電鋳メッキ層の特性として軸心から外側へ引っ張り応力が作用するので、特に肉薄状に形成した軟質金属メッキ層2と円柱軸1との間には、微細な空隙を生じて円柱軸1の引き抜き除去を容易に行うことができる。   In this bearing core material removal, the dynamic pressure groove pattern surface 5 formed on the inner peripheral side of the hard metal plating layer 4 is protected by the soft metal plating layer 2 formed by electroforming copper or copper alloy or the like. Since tensile stress acts on the outer side of the axis as a characteristic of the cast plating layer, a fine gap is generated between the soft metal plating layer 2 and the cylindrical shaft 1 that are formed thin, and the cylindrical shaft 1 is pulled out. Removal can be performed easily.

また、必要に応じて軸受心材1の外周面を鏡面加工したり、軸受心材1の外周面に予め摺動性のある皮膜をコーティングしたり、軟質金属メッキ層2にポリ四フッ化エチレン(PTFE)などの自己潤滑性微粒子を含有させて離型性を向上させたり、軟質金属メッキ層2と硬質金属メッキ層4又は軸受心材円柱軸1に対して、一時的に加熱或いは冷却して両者の熱膨張係数の相違を利用するなど、公知の各種手段によって除去を一段と容易にすることも可能である。   If necessary, the outer peripheral surface of the bearing core material 1 is mirror-finished, the outer peripheral surface of the bearing core material 1 is coated with a slidable film in advance, or the soft metal plating layer 2 is coated with polytetrafluoroethylene (PTFE). ) Or the like to improve releasability, or temporarily heat or cool the soft metal plating layer 2 and the hard metal plating layer 4 or the bearing core cylindrical shaft 1 to Removal can be made easier by using various known means such as utilizing the difference in thermal expansion coefficient.

工程Fは、金属軸受部材から転写部材を除去する工程であって、この実施例では電鋳によるニッケル又はニッケル合金で形成した硬質金属メッキ層4から、電鋳による銅又は銅合金で形成した軟質金属メッキ層2を溶解除去するが、その際には塩化第2鉄溶液、塩化銅溶液、過酸化水素水と硫酸の混合液、過硫酸アンモニウム水溶液、あるいはアンモニア水のうち少なくとも1種からなる銅溶解液を用いる。   Step F is a step of removing the transfer member from the metal bearing member. In this embodiment, the soft metal formed by electroforming copper or copper alloy from the hard metal plating layer 4 formed by nickel or nickel alloy by electroforming. The metal plating layer 2 is dissolved and removed. In this case, copper is dissolved in at least one of a ferric chloride solution, a copper chloride solution, a mixed solution of hydrogen peroxide and sulfuric acid, an aqueous solution of ammonium persulfate, or aqueous ammonia. Use liquid.

これにより、樹脂成形部材の軸心側に動圧発生溝を形成する金属軸受部材を一体化させた動圧軸受部品を製造することができるが、この動圧軸受部品9は図8及び図9で示すように、樹脂成形部材である樹脂スリーブ7の軸心側が金属軸受部材である硬質金属メッキ層4によって補強されているので、真円度及び寸法精度が確保され且つ表面硬度が高くて耐食性があると共に、内周側には転写部材である軟質金属メッキ層2から転写された動圧溝パターン面5が、図10で示す展開図のように容易に且つ精度良く形成される。   As a result, it is possible to manufacture a dynamic pressure bearing part in which a metal bearing member that forms a dynamic pressure generating groove is formed on the axial center side of the resin molded member. This dynamic pressure bearing part 9 is shown in FIGS. As shown in the figure, since the axial center side of the resin sleeve 7 which is a resin molded member is reinforced by the hard metal plating layer 4 which is a metal bearing member, roundness and dimensional accuracy are ensured and surface hardness is high and corrosion resistance is ensured. In addition, the dynamic pressure groove pattern surface 5 transferred from the soft metal plating layer 2 as a transfer member is easily and accurately formed on the inner peripheral side as shown in a development view shown in FIG.

なお、工程Fにおける転写部材の除去は、転写部材を軟質金属メッキ層2以外の例えばレジスト層で形成した場合には、当該レジスト層を溶解し得る溶剤やレーザー照射などによって除去するようにし、転写部材を水溶性樹脂によって形成した場合には、当該水溶性樹脂を純水などによって除去するなと、転写部材として用いる材料の性状に応じて適宜の形態を採ることができる。   The transfer member is removed in the process F when the transfer member is formed of a resist layer other than the soft metal plating layer 2, for example, by removing a solvent that can dissolve the resist layer or laser irradiation. When the member is formed of a water-soluble resin, an appropriate form can be adopted depending on the properties of the material used as the transfer member, unless the water-soluble resin is removed with pure water or the like.

次に、軸方向と平行なラジアル軸受面と軸方向と直角なスラスト軸受面とを備えた第2の実施例による動圧軸受部品の製造方法を、図11及び図12に基づいて説明するが、この実施例でも第1の実施例の場合と同様に、工程A〜工程Fを順次実施して動圧軸受部品の製造するものであるから、共通する部分の重複した説明は省略して相違する部分を重点に説明する。   Next, a method for manufacturing a hydrodynamic bearing component according to the second embodiment having a radial bearing surface parallel to the axial direction and a thrust bearing surface perpendicular to the axial direction will be described with reference to FIGS. In this embodiment, as in the case of the first embodiment, the process A to the process F are sequentially performed to manufacture the hydrodynamic bearing part. The explanation will focus on the parts to be performed.

まず、工程Aでは軸受心材に対して転写部材を設けるが、その領域は軸受心材の一方側端面を含む一端側の外面であるから、図11で示すように円柱軸1(軸受心材)の一方側端面を含む一端側の外面に対して、軟質金属メッキ層12(転写部材)を有底筒状に設け、工程Bでは軟質金属メッキ層12の外周面側と端面側に対して個別に転造その他で溝加工を行い、図12で示す動圧溝パターン面5,15の反転パターンによる転写溝の加工を行う(図示を省略)。   First, in step A, a transfer member is provided on the bearing core. Since the region is an outer surface on one end side including the one end surface of the bearing core, one of the cylindrical shafts 1 (bearing core) is shown in FIG. A soft metal plating layer 12 (transfer member) is provided in a bottomed cylindrical shape on the outer surface on one end side including the side end surfaces, and in step B, the soft metal plating layer 12 is individually transferred to the outer peripheral surface side and the end surface side of the soft metal plating layer 12. Groove processing is performed by manufacturing or the like, and transfer grooves are processed by a reverse pattern of the dynamic pressure groove pattern surfaces 5 and 15 shown in FIG. 12 (not shown).

また、工程Cでは軟質金属メッキ層12(転写部材)に対して、転写溝を被覆する態様で硬質金属メッキ層14(金属軸受部材)を有底筒状に設け、工程Dでは軟質金属メッキ層12(転写部材)と硬質金属メッキ層14(金属軸受部材)を積層した円柱軸1(軸受心材)をインサート軸として、金型内で硬質金属メッキ層14(金属軸受部材)の外側に射出成形を行い、有底筒状の樹脂スリーブ17(樹脂成形部材)を一体成形する。   In Step C, a hard metal plating layer 14 (metal bearing member) is provided in a bottomed cylindrical shape so as to cover the transfer groove on the soft metal plating layer 12 (transfer member), and in Step D, the soft metal plating layer is provided. The cylindrical shaft 1 (bearing core material) in which 12 (transfer member) and the hard metal plating layer 14 (metal bearing member) are stacked is used as an insert shaft, and is injection molded outside the hard metal plating layer 14 (metal bearing member) in the mold. The bottomed cylindrical resin sleeve 17 (resin molding member) is integrally molded.

さらに、工程Eでは金型から取り出した射出成形品から円柱軸1(軸受心材)を、他端側への引き抜きなどによって除去し、工程Fでは軟質金属メッキ層12(転写部材)を溶解液などによって溶解除去することによって、図12で示すように樹脂スリーブ17(樹脂成形部材)の軸心側に動圧発生溝を形成する金属軸受部材14を一体化させた動圧軸受部品19を製造することができる。   Further, in step E, the cylindrical shaft 1 (bearing core material) is removed from the injection molded product taken out from the mold by drawing to the other end side, and in step F, the soft metal plating layer 12 (transfer member) is dissolved. As shown in FIG. 12, the hydrodynamic bearing component 19 is manufactured by integrating the metal bearing member 14 forming the dynamic pressure generating groove on the axial center side of the resin sleeve 17 (resin molding member). be able to.

この動圧軸受部品19は、工程Fにおける軟質金属メッキ層12(転写部材)の除去によって、硬質金属メッキ層14(金属軸受部材)の内側には軟質金属メッキ層12(転写部材)から転写された動圧溝パターン面5,15による動圧発生溝が形成されるが、この動圧発生溝は軸周側のラジアル軸受面となる動圧溝パターン面5と、軸端側のスラスト軸受面となる動圧溝パターン面15によって形成される。   The dynamic pressure bearing part 19 is transferred from the soft metal plating layer 12 (transfer member) to the inside of the hard metal plating layer 14 (metal bearing member) by removing the soft metal plating layer 12 (transfer member) in the process F. The dynamic pressure generating grooves are formed by the dynamic pressure groove pattern surfaces 5 and 15. The dynamic pressure generating grooves are the dynamic pressure groove pattern surface 5 serving as the radial bearing surface on the shaft peripheral side and the thrust bearing surface on the shaft end side. The dynamic pressure groove pattern surface 15 is formed.

なお、第1及び第2の実施例による動圧軸受部品9,19において、例えば工程Fでの溶解除去が不十分あったり、その他の理由で動圧溝パターン面5,15による動圧発生溝の修正がを必要な場合には、後加工によって修正することも可能であり、その際には従来技術として広く用いられているボール転造による溝加工を利用することができるが、この場合には新規に溝加工を行うのではなく、既に溝加工されている動圧溝パターン面5,15をトレースしながら修正加工を行うので、その加工作業は極めて容易である。   In the dynamic pressure bearing parts 9 and 19 according to the first and second embodiments, for example, the dissolution removal in the process F is insufficient, or the dynamic pressure generating grooves by the dynamic pressure groove pattern surfaces 5 and 15 for other reasons. If it is necessary to correct this, it is also possible to correct it by post-processing, in which case the groove processing by ball rolling widely used as the prior art can be used. No new groove processing is performed, and correction processing is performed while tracing the hydrodynamic groove pattern surfaces 5 and 15 that have already been grooved. Therefore, the machining operation is extremely easy.

本発明を適用した第1の実施例による動圧軸受部品の製造方法の工程説明図であって、軸受心材の外面に転写部材を設ける工程Aの説明図。It is process explanatory drawing of the manufacturing method of the dynamic pressure bearing components by 1st Example to which this invention is applied, Comprising: Explanatory drawing of the process A which provides a transfer member in the outer surface of a bearing core material. 同じく、転写部材に転写溝を加工する工程Bの説明図。Similarly, explanatory drawing of process B which processes a transfer groove on a transfer member. 同じく、転写部材の外面に金属軸受部材を設ける工程Cの説明図。Similarly, explanatory drawing of the process C which provides a metal bearing member in the outer surface of a transfer member. 図3の工程Cの要部を拡大した説明図。Explanatory drawing which expanded the principal part of the process C of FIG. 同じく、転写部材と金属軸受部材を設けた軸受心材をインサート軸に樹脂成形部材を射出成形する工程Dの説明図。Similarly, explanatory drawing of the process D which carries out the injection molding of the resin molding member to the insert shaft from the bearing core material which provided the transfer member and the metal bearing member. 同じく、成形品から軸受心材を除去する工程Eの説明図。Similarly, explanatory drawing of the process E which removes a bearing core material from a molded article. 図6の工程Eの要部を拡大した説明図。Explanatory drawing which expanded the principal part of the process E of FIG. 同じく、樹脂成形部材と金属軸受部材から転写部材を除去する工程Fの説明図。Similarly, explanatory drawing of process F which removes a transfer member from a resin molding member and a metal bearing member. 図8の工程Fの要部を拡大した説明図。Explanatory drawing which expanded the principal part of the process F of FIG. 図8工程Fで完成した動圧軸受部品における動圧溝パターンの展開図。8 is a development view of the dynamic pressure groove pattern in the dynamic pressure bearing part completed in the process F. FIG. 本発明を適用した第2の実施例による動圧軸受部品の製造方法の工程説明図であって、軸受心材の外面に転写部材を設ける工程Aの説明図。It is process explanatory drawing of the manufacturing method of the dynamic pressure bearing components by 2nd Example to which this invention is applied, Comprising: Explanatory drawing of the process A which provides a transfer member in the outer surface of a bearing core material. 同じく、樹脂成形部材と金属軸受部材から転写部材を除去する工程Fの説明図。Similarly, explanatory drawing of process F which removes a transfer member from a resin molding member and a metal bearing member.

符号の説明Explanation of symbols

1 円柱軸(軸受心材)
2,12 軟質金属メッキ層(転写部材)
3 転写面
4,14 硬質金属メッキ層(金属軸受部材)
5,15 動圧溝パターン面
6 マスター軸(インサート部材)
7,17 樹脂スリーブ(樹脂成形部材)
8 除去孔(軸心孔)
9,19 動圧軸受部品
1 Cylindrical shaft (bearing core material)
2,12 Soft metal plating layer (transfer member)
3 Transfer surface 4,14 Hard metal plating layer (metal bearing member)
5,15 Dynamic pressure groove pattern surface 6 Master shaft (insert member)
7, 17 Resin sleeve (resin molding member)
8 Removal hole (axial hole)
9,19 Hydrodynamic bearing parts

Claims (8)

軸受心材の外面に転写部材を設ける工程と、転写部材の外面を溝加工して動圧発生溝の反転パターンによる転写溝加工を行う工程と、転写部材の転写面に金属軸受部材を設けてマスター軸を形成する工程と、マスター軸を金型内にインサートして金属軸受部材の外面に樹脂成形部材を一体成形する工程と、マスター軸と一体に成形品を金型から取り出して転写部材から軸受心材を除去する工程と、転写部材を除去して金属軸受部材の内面に動圧発生溝を形成する工程とを備え、樹脂成形部材の軸心側に動圧発生溝を形成する金属軸受部材を一体化させたことを特徴とする動圧軸受部品の製造方法。 A step of providing a transfer member on the outer surface of the bearing core, a step of performing groove processing on the outer surface of the transfer member to perform transfer groove processing by a reverse pattern of the dynamic pressure generating groove, and a metal bearing member on the transfer surface of the transfer member to provide a master A step of forming a shaft, a step of inserting a master shaft into the mold and integrally molding a resin molded member on the outer surface of the metal bearing member, and taking out the molded product from the mold integrally with the master shaft and bearing from the transfer member A metal bearing member comprising a step of removing a core material and a step of removing a transfer member to form a dynamic pressure generating groove on the inner surface of the metal bearing member, and forming a dynamic pressure generating groove on the axial center side of the resin molded member. A method of manufacturing a hydrodynamic bearing part, characterized by being integrated. 前記軸受心材には、硬質金属製の円柱軸を用いる請求項1に記載した動圧軸受部品の製造方法。   The method for manufacturing a hydrodynamic bearing component according to claim 1, wherein a hard metal cylindrical shaft is used as the bearing core. 前記転写部材は、軟質金属メッキ層で形成する請求項1又は2に記載した動圧軸受部品の製造方法。   The method for manufacturing a hydrodynamic bearing component according to claim 1, wherein the transfer member is formed of a soft metal plating layer. 前記転写溝加工を行う工程では、転写部材に対して転造加工を行う請求項1〜3のいずれかに記載した動圧軸受部品の製造方法。   The method for manufacturing a hydrodynamic bearing part according to claim 1, wherein in the step of performing the transfer groove processing, a rolling process is performed on the transfer member. 前記金属軸受部材は、硬質金属メッキ層で形成する請求項1〜4のいずれかに記載した動圧軸受部品の製造方法。   The said metal bearing member is a manufacturing method of the hydrodynamic bearing components in any one of Claims 1-4 formed with a hard metal plating layer. 前記樹脂成形部材を一体成形する工程では、軸受部品を使用するモータ類のハウジングも同時成形する請求項1〜5のいずれかに記載した動圧軸受部品の製造方法。   The method for manufacturing a hydrodynamic bearing component according to any one of claims 1 to 5, wherein in the step of integrally molding the resin molded member, a housing of a motor that uses the bearing component is also molded simultaneously. 前記軸受心材を除去する工程では、転写部材から引き抜き除去する請求項1〜6のいずれかに記載した動圧軸受部品の製造方法。   The method for producing a hydrodynamic bearing component according to claim 1, wherein the bearing core material is removed from the transfer member in the step of removing the bearing core material. 前記転写部材を除去する工程では、溶解液によって転写部材を溶解除去する請求項1〜7のいずれかに記載した動圧軸受部品の製造方法。   The method for manufacturing a hydrodynamic bearing component according to claim 1, wherein in the step of removing the transfer member, the transfer member is dissolved and removed by a dissolving liquid.
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