JP4566632B2 - Calculation device, setting device, substrate processing device - Google Patents

Description

  The present invention relates to a substrate processing apparatus for performing a process for forming an element on the surface of a substrate such as a semiconductor wafer, a glass substrate for a liquid crystal display device and a glass substrate for a PDP (plasma display panel), and each process of the substrate processing apparatus. The present invention relates to a calculation device that calculates a processing time of a unit, and a setting device that sets a time interval for sending a substrate to a processing unit group.

  In a conventional substrate processing apparatus, an operator sets a time interval (hereinafter referred to as an apparatus tact) for sending a substrate to a processing unit group. The operator estimated the processing time of each processing unit and determined the apparatus tact.

  However, the processing time of each processing unit varies depending on the recipe used for processing (which describes the parameter values for adjusting the processing contents). Therefore, when the device tact is set by the above method, the device is actually I had to drive and check if the equipment tact was appropriate. At this time, if an inappropriate apparatus tact is set, for example, if the apparatus tact is set too fast (the time interval is too short), the processing capability (processing speed) of the substrate processing apparatus cannot catch up with the apparatus tact, and the way The substrate stays in this processing unit, causing product defects and the like. Also, if an apparatus tact is set that is too slow (the time interval is too long), the production amount of the substrate becomes less than the amount that can actually be produced, which is inefficient.

  The present invention has been made in view of the above problems, and includes a calculation apparatus and a setting apparatus for setting an appropriate apparatus tact in a substrate processing apparatus, and a substrate processing apparatus capable of setting an appropriate apparatus tact. The purpose is to provide.

The calculation apparatus according to claim 1 is a calculation apparatus that calculates a time interval when the substrates are continuously loaded into a plurality of processing unit groups that perform a series of processes on the substrates that are continuously conveyed by a conveyor. A storage unit that stores a parameter value that is an operation speed and a processing time of the transport mechanism of each processing unit; a change unit that is used by an operator to change the parameter value stored in the storage unit; Processing time for determining the processing time of each processing unit based on the operation speed stored in the storage means, the length in the transport direction of the substrate, the length of the conveyor, and the processing time stored in the storage means an acquiring unit, Bei example and informing means for informing the operator the processing time obtained by the processing time acquisition means, the operation speed is taken for the processing units when capturing the substrate A time at which the substrate is discharged and a speed at which each processing unit is discharged, and the processing time acquisition means includes a loading time obtained by dividing the length of the substrate in the transport direction by the loading speed. The processing time of each processing unit is calculated using at least the sum of the length in the transport direction of the substrate and the payout time divided by the speed at the time of payout .

  According to this configuration, the processing time of each processing unit when the parameter value changed by the operator using the changing means is used is obtained by the processing time acquiring means, and this processing time is notified to the operator by the notifying means. Since the notification is made, the operator can easily know the processing time of each processing unit when the parameter is changed.

A setting device according to a second aspect is a setting device that sets a time interval when a substrate is continuously put into a plurality of processing unit groups that perform a series of processing on the substrate continuously conveyed by the conveyor. The calculation apparatus according to claim 1, an input unit for an operator to input the time interval, and the time interval input by the input unit is mounted on the uppermost processing unit of the processing unit group. And setting means for setting to the device for charging.

  According to this configuration, the processing time of each processing unit when the parameter value changed by the operator using the changing means is used is obtained by the processing time acquiring means, and this processing time is notified to the operator by the notifying means. Informed. Further, the time interval is input by the operator using the input means, and the input time interval is set by the setting means in the apparatus for loading the substrate into the uppermost processing unit of the processing unit group. The operator can determine the time interval to be input to the input means with reference to the notified processing time, and can set the time interval more appropriate for the operator in the apparatus for loading the substrate.

The setting device according to claim 3 is the setting device according to claim 2, wherein the processing time acquisition means calculates the processing time when each processing unit performs an operation based on the value of the parameter. The processing time is obtained by actual measurement. According to this configuration, since the processing time is obtained by actual measurement, an accurate processing time can be obtained.

According to a fourth aspect of the present invention, there is provided a setting device for setting a time interval for continuously loading substrates into a plurality of processing unit groups for performing a series of processes on substrates continuously conveyed by a conveyor. Storage means for storing parameter values that are the operation speed and processing time of the transport mechanism of each processing unit, change means for the operator to change the parameter values stored in the storage means, Processing time acquisition for determining the processing time of each processing unit based on the operation speed stored in the storage means, the length in the transport direction of the substrate, the length of the conveyor, and the processing time stored in the storage means Means for selecting the latest processing time among the processing times of the respective processing units determined by the processing time acquisition means, and the processing time selected by the selection means in advance. As the time interval, and a setting means for setting the device to introduce the substrate into the most upstream of the processing unit of the processing unit group, the operating speed, and taking the time rate of each processing unit when capturing the substrate, Each of the processing units at the time of paying out the substrate, and the processing time acquisition means includes a loading time obtained by dividing the length of the substrate in the transport direction by the loading speed, The processing time of each processing unit is calculated using at least the sum of the payout time obtained by dividing the length in the transport direction by the payout speed.

According to this configuration, the processing time of each processing unit when the parameter value changed by the operator using the changing means is used is obtained by the processing time acquisition means, and the latest one of the processing times is the The time interval is set by the setting means in the apparatus for loading the substrate into the uppermost processing unit of the processing unit group, so that the operator can change the parameter and insert the substrate at a more appropriate time interval. Can be set to

The setting device according to claim 5 is the setting device according to claim 4, wherein the processing time acquisition means calculates the processing time when each processing unit performs an operation based on the value of the parameter. The processing time is obtained by actual measurement . According to this configuration, since the processing time is obtained by actual measurement, an accurate processing time can be obtained.

A setting device according to a sixth aspect is a setting device that sets a time interval for continuously loading substrates into a plurality of processing unit groups that perform a series of processes on substrates continuously conveyed by a conveyor. A unit control unit electrically connected to each processing unit, and a main control unit connected to each unit control unit via a communication line, and the main control unit operates an operation of each processing unit. Storage means for storing the values of parameters that are the operating speed and processing time of the mechanism, change means for the operator to change the parameter values stored in the storage means, and parameters stored in the storage means Parameter transmitting means for transmitting a parameter belonging to each processing unit to a unit control unit connected to the processing unit to which the parameter belongs, and the parameter Processing time receiving means for receiving the processing time of each processing unit when using the parameters transmitted by the communication means from a unit control unit connected to each processing unit; and the processing received by the processing time receiving means An informing means for informing the operator of the time, an input means for the operator to input the time interval, and the time interval input by the input means on the uppermost processing unit of the processing unit group. Setting means for setting a device to be input, wherein the unit control unit receives parameter transmitted by the parameter transmission unit, and the operation speed and the parameter received by the parameter reception unit. Based on the processing time, the length of the substrate in the transport direction, and the length of the conveyor, the unit control Comprising a processing time obtaining means for obtaining the processing time of the connected processing unit, and a processing time transmitting means for transmitting the processing time obtained by the processing time acquisition unit to the main control device, the operating speed, the Including a loading speed of each processing unit when loading the substrate and a dispensing speed of each processing unit when discharging the substrate, and the processing time acquisition means sets the length in the transport direction of the substrate The processing time of each processing unit is calculated using at least the sum of the acquisition time divided by the acquisition speed and the payout time obtained by dividing the length of the substrate in the conveyance direction by the discharge speed. .

According to this configuration, the processing time of each processing unit when the parameter value changed by the operator using the changing means is used is obtained by the processing time acquiring means, and this processing time is notified to the operator by the notifying means. Informed. Further, the time interval is input by the operator using the input means, and the input time interval is set by the setting means in the apparatus for loading the substrate into the uppermost processing unit of the processing unit group. The operator can determine the time interval to be input to the input means with reference to the notified processing time, and can set the time interval more appropriate for the operator in the apparatus for loading the substrate.

A setting device according to a seventh aspect is a setting device that sets a time interval for continuously loading substrates into a plurality of processing unit groups that perform a series of processes on substrates that are continuously conveyed by a conveyor. A unit control unit electrically connected to each processing unit, and a main control unit connected to each unit control unit via a communication line, and the main control unit operates an operation of each processing unit. Storage means for storing the values of parameters that are the operating speed and processing time of the mechanism, change means for the operator to change the parameter values stored in the storage means, and parameters stored in the storage means Parameter transmitting means for transmitting a parameter belonging to each processing unit to a unit control unit connected to the processing unit to which the parameter belongs, and the parameter Processing time receiving means for receiving the processing time of each processing unit when the parameter transmitted by the communication means is used from a unit control unit connected to each processing unit, and each processing received by the processing time receiving means A selection means for selecting the latest processing time among the processing times of the units, and a processing time selected by the selection means is set as the time interval in the apparatus for loading the substrate into the uppermost processing unit of the processing unit group. Setting means, wherein the unit control unit receives parameter transmitted by the parameter transmission means, the operation speed and processing time as parameters received by the parameter reception means, and the substrate Connected to the unit control unit based on the length of the conveyor direction and the length of the conveyor A processing time acquisition means for obtaining the processing time of the processing units, the processing time obtained by the processing time acquisition unit and a processing time transmitting means for transmitting to the main controller, the operating speed, the substrate Including the speed at the time of taking in each processing unit at the time of taking-in and the speed at the time of paying-out of each processing unit at the time of paying out the substrate, and the processing time acquisition means calculates the length in the transport direction of the substrate. The processing time of each processing unit is calculated using at least the sum of the take-in time divided by the hourly speed and the payout time obtained by dividing the length of the substrate in the carrying direction by the payout speed.

According to this configuration, the processing time of each processing unit when the parameter value changed by the operator using the changing means is used is obtained by the processing time acquisition means, and the latest one of the processing times is the The time interval is set by the setting means in the apparatus for loading the substrate into the uppermost processing unit of the processing unit group, so that the operator can change the parameter and insert the substrate at a more appropriate time interval. Can be set to

A substrate processing apparatus according to an eighth aspect includes the setting apparatus according to any one of the second to seventh aspects. According to this configuration, it is possible to provide a substrate processing apparatus that can set a more appropriate time interval in an apparatus for loading a substrate.

  According to the first aspect of the present invention, the processing time of each processing unit when the parameter value changed by the operator using the changing means is used is obtained by the processing time acquiring means, and this processing time is notified. Since the operator is notified by the means, the operator can easily know the processing time of each processing unit when the parameter is changed.

According to the invention described in claim 2 or 6 , the processing time of each processing unit when the parameter value changed by the operator using the changing means is used is obtained by the processing time acquiring means. Is notified to the operator by the notification means. Further, the time interval is input by the operator using the input means, and the input time interval is set by the setting means in the apparatus for loading the substrate into the uppermost processing unit of the processing unit group. The operator can determine the time interval to be input to the input means with reference to the notified processing time, and can set the time interval more appropriate for the operator in the apparatus for loading the substrate.

According to the invention described in claim 3 or 5 , since the processing time is obtained by actual measurement, an accurate processing time can be obtained.

According to the invention described in claim 4 or 7 , the processing time of each processing unit when the parameter value changed by the operator using the changing means is used is obtained by the processing time acquiring means, and this processing time is obtained. The latest one is set as the time interval by the setting means in the apparatus for loading the substrate into the uppermost processing unit of the processing unit group, so that the operator can change the parameter more appropriately by simply changing the parameter. The interval can be set in the apparatus for loading the substrate.

According to the invention described in claim 8 , it is possible to provide a substrate processing apparatus capable of setting a more appropriate time interval in an apparatus for loading a substrate.

  Hereinafter, a substrate processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a top view schematically showing the configuration of the substrate processing apparatus 1. The substrate processing apparatus 1 is an apparatus that performs a series of processes for forming elements on the surface of a substrate. The substrate processing apparatus 1 includes an LD (loader) unit 11, a cleaning unit 12, a dehydrated bake oven unit 13, a coater unit 14, a prebake oven unit 15, and a UL (unloader) unit 16. Unit controllers 21 to 26 for controlling the units are connected to the units 11 to 16 through communication lines, and the unit controllers 21 to 26 are connected to each other through the communication line and to the main controller 3.

  The LD unit 11 is used to put a substrate (not shown) to be processed by the substrate processing apparatus 1 into the processing unit groups 12 to 15 that perform a series of processing on the substrate. The substrate is stored in a case called a cassette (not shown), which stores a plurality of substrates, and is placed on the LD unit 11. The substrates stored in the cassette placed on the LD unit 11 are extracted from the cassette one by one by a turning robot positioned between the LD unit 11 and the cleaning unit 12, for example, and transferred to the cleaning unit 12. The loading of the substrate is continuously performed at a predetermined time interval called an apparatus tact.

  The cleaning unit 12 is for cleaning the substrate. FIG. 2 is a top view schematically showing the configuration of the cleaning unit 12. As shown in this figure, the cleaning unit 12 has a configuration in which an inlet CV (conveyor) 121, a cleaning unit 122, a drying unit 123, and an outlet CV 124 are linearly arranged. The inlet CV 121 transports the substrate delivered from the LD unit 11 to the cleaning unit 122 via the transport robot. The cleaning unit 122 performs cleaning while transporting the substrate. The drying unit 123 dries the cleaned substrate while transporting the substrate. The exit CV 124 conveys the substrate to the next dehydrated baking oven unit 13.

  The dehydrated baking oven unit 13 is for drying the cleaned substrate. FIG. 3 is a top view showing an outline of the configuration of the oven unit (the same configuration applies to a pre-bake oven unit 15 described later). As shown in this figure, the oven units 13 and 15 include an inlet CV 131, a robot 132, a multistage chamber 133, and an outlet CV 134. The entrance CV 131 transports the substrate transported from the cleaning unit 12 by the conveyor (exit CV 124) to the robot 132. The robot 132 grasps the substrate conveyed by the inlet CV 131 with its own arm and turns to place the substrate in one of the multistage chambers 133. Further, the robot 132 grabs the substrate placed in any one of the multistage chambers 133 with an arm, turns it, and places it on the outlet CV134. The multi-stage chamber 133 has a predetermined number of stages, for example, three stages of HP (hot plate) chambers, and a predetermined number of stages, for example, two stages of CP (cold plate) chambers. The hot plate heats and removes moisture from the substrate. Then, the substrate is cooled down by a cold plate. The outlet CV 134 conveys the substrate to the coater unit 14.

  The coater unit 14 applies a resist to the substrate. FIG. 4 is a top view schematically showing the configuration of the coater unit 14. As shown in this figure, the coater unit 14 has a configuration in which an inlet CV 141, a robot 142, a coater 143, a robot 144, and an outlet CV 145 are linearly arranged. The entrance CV 141 transports the substrate transported from the dehydrated baking oven unit 13 by the conveyor (exit CV 134) to the robot 142. The robot 142 grabs the substrate conveyed by the inlet CV 141 with its own arm, turns it, and passes it to the coater 143. The coater 143 performs a process of applying a resist to the substrate delivered by the robot 142. The robot 144 grabs the substrate of the coater 143 with an arm, turns it, and places it on the exit CV145. The outlet CV145 conveys the substrate to the pre-bake oven unit 15.

  The pre-baking oven unit 15 performs heat treatment for the purpose of evaporating residual solvent in the resist film on the substrate and enhancing the adhesion of the substrate. The configuration of the pre-baking oven unit 15 is the same as that of the dehydrated baking oven unit 13.

  The UL unit 16 discharges a substrate from the processing unit group 12 after a series of processing is performed on the substrate by the processing unit groups 12 to 15. A substrate collection cassette is placed on the UL unit 16. For example, a substrate is taken out from the prebake oven unit 15 by a turning robot positioned between the prebake oven unit 15 and the UL unit 16, and the substrate collection cassette is collected. One by one.

  Unit controllers 21 to 26 connected to each unit control the connected units, and are composed of a CPU (Central Processing Unit), a RAM (Random Access Memory), and the like. The unit controller 21 of the LD unit 11 receives the apparatus tact from the main controller 3 and controls the LD unit 11 so that the substrate is put into the processing unit groups 12 to 15 by this apparatus tact.

  The unit controllers 22 to 25 of the processing units 12 to 15 receive and store parameters (to be described later) for adjusting the processing to be performed by the processing unit to be controlled from the main controller 3, and the unit performs processing according to the parameters. In this way, the processing unit to be controlled is controlled. The parameter affects the processing time of the processing unit. Further, the unit controllers 22 to 25 calculate the processing time of the processing unit when the parameters received from the main controller 3 are used according to an instruction from the main controller 3 and notify the main controller 3 of the calculated processing time.

  The main controller 3 is a PC (personal computer), for example, in which the operator sets the apparatus tact and changes the parameters and displays the processing time of each processing unit 12 to 15 to the operator. The operation of the operator in the main controller 3 will be described using an example of the screen display of the main controller 3. FIG. 5 is an example of a screen for displaying the processing time of each processing unit and setting the device tact. The main controller 3 can store a plurality of recipes (processing contents of the substrate processing apparatus 1). In the present embodiment, four recipes corresponding to recipe numbers 1 to 4 described in the recipe number column 312 are stored. Each line of the screen display corresponds to each recipe, and each line includes a setting button 311, a recipe number 312, an apparatus tact 313, a processing time 314 of the cleaning unit 12, a processing time 315 of the dehydrated baking oven unit 13, and a coater unit 14. It consists of a processing time 316 and a processing time 317 of the prebaking oven unit 15. Below each processing time display, there is a parameter change button 318 corresponding to the processing time display. The meaning of the processing time here will be described later.

  The setting button 311 is used to input an instruction to operate the substrate processing apparatus 1 using the apparatus tact and parameter (not directly displayed in this line) of the line (recipe) in which the setting button 311 exists. . The recipe number column 312 displays the number given to each line (or recipe). The device tact column 313 is for displaying and changing the device tact in each recipe, and the device tact can be changed by rewriting the displayed device tact. The columns of the cleaning column 314, the dehydrated bake column 315, the coater column 316, and the prebake column 317 display the processing time of each processing unit of the cleaning unit 12, the dehydrated bake oven unit 13, the coater unit 14, and the prebake oven unit 15. To do. The parameter change button 318 below the display of each processing time is for changing the parameter of each processing unit. When this button is pressed, the screen is switched to the parameter change screen.

  FIG. 6 is an example of a parameter change screen, which is a parameter change screen for the cleaning unit 12 that is displayed when the parameter change button in the cleaning field 314 is pressed on the screen of FIG. On the screen, the values of nine parameters of the cleaning unit 12 are displayed. For example, the value of the parameter can be changed by moving the cursor to the display position of this value using a PC pointing device or the like, inputting a numerical value using the PC keyboard, and the operator directly rewriting the value. In this example, the value enclosed by a frame is a parameter that can be directly changed by the operator. When the setting button 321 is pressed, the screen returns to the screen of FIG. At this time, the processing time corresponding to the changed new parameter is displayed, and the processing time of the processing unit having the longest processing time in this recipe (for example, the processing time of the line (recipe) where the parameter is changed (for example, In the case of the recipe number 1, the processing time 92 (sec) of the processing unit of the dehydrated baking oven unit 13 is displayed as an apparatus tact.

  Next, the parameters of each processing unit will be specifically described. The parameters of the cleaning unit 12 include, for example, the speed when the inlet CV is retracted, the speed when the inlet CV is withdrawn (the speed when the CV within the cleaning section is retracted), the stop time of the substrate within the cleaning section, and the time when the CV within the cleaning section is withdrawn. (The speed at the time of drawing in the CV in the drying section), the speed at the time of paying out the CV in the drying section (speed at the time of pulling in the outlet CV), and the speed at the payout side of the outlet CV. Here, the speed at the time of drawing in the inlet CV is the speed of the inlet CV from when the front end of the substrate enters the inlet CV until the front end of the substrate reaches the cleaning unit. The speed at which the inlet CV is dispensed (the speed at which the cleaning section CV is pulled in) is the distance between the inlet CV and the cleaning section CV from when the tip of the substrate reaches the cleaning section until the substrate is positioned around the center of the cleaning section. Speed. The substrate stop time in the cleaning unit is the time during which the substrate stops for cleaning in the cleaning unit. The speed at which the CV in the cleaning unit is dispensed (the speed at which the CV in the drying unit is pulled in) is the speed of the cleaning unit CV and the drying unit CV until the substrate moves from around the center of the cleaning unit to the center of the drying unit. . The speed at the time of paying out the CV in the drying section (the speed at the time of drawing in the outlet CV) is the speed of the CV in the drying section and the outlet CV from the center of the drying section until the entire substrate comes out of the drying section. The speed at the time of discharge of the exit CV is the speed of the exit CV until the substrate completely enters the next processing unit. Similarly, the oven units 13 and 15 and the coater unit 14 have a plurality of parameters.

  Since a plurality of substrates are present in one processing unit at one time (for example, in the cleaning unit 12, one sheet is provided for each inlet CV, cleaning section, drying section, and outlet CV), the apparatus tact is (the entire processing unit is Is not affected by the time required for the substrate to pass through each processing unit (inlet CV 121, cleaning unit 122, drying unit 123, and outlet CV 124) in the processing unit. In the cleaning unit 12, the longest time during which the substrate passes through each of the four processing units is a factor in determining the apparatus tact. That is, when the longest time among the above four times is set as the apparatus tact, the productivity can be maximized in the cleaning unit 12 without the substrate stagnating in the unit. The processing time displayed on the screen of FIG. 5 indicates the longest time during which the substrate passes through a plurality of processing units in each processing unit.

  Next, functional configurations of the main controller 3 and the unit controllers 21 to 25 as an apparatus tact setting device (and a processing time calculation device) will be described with reference to FIG. FIG. 7 is a diagram illustrating a functional configuration of the main controller 3 and the unit controllers 21 to 25 as the device tact setting device 2 (and the processing time calculation device 2A). The main controller 3 includes a display unit 31, a processing time reception unit 32, a device tact determination unit 33, a parameter value storage unit 34, a parameter value transmission unit 35, an input unit 36, a device tact storage unit 37, and a device tact transmission unit 38. Prepare.

  The display unit 31 is a display of a PC, for example, and displays information as an output user interface. When receiving the processing time from the processing time receiving unit 32, the display unit 31 displays the processing time. The display unit 31 always displays the parameter values stored in the parameter value storage unit 34 and the device tact stored in the device tact storage unit 37 (when a screen on which they are displayed is displayed). To do. The input unit 36 is a keyboard of a PC, for example, for inputting information as an input user interface. When there is an input for changing the parameter value, the input unit 36 writes the input parameter value in the parameter value storage unit 34. When the device tact is input, the input unit 36 writes the input device tact in the device tact storage unit 37. When there is an input of a processing time calculation instruction (pressing the setting button 321 in FIG. 6), the input unit 36 transmits that fact to the parameter value transmission unit 35. When there is an operation instruction input (pressing the setting button 311 in FIG. 5), the input unit 36 transmits that fact to the parameter value transmission unit 35 and the apparatus tact transmission unit 38.

  The parameter value storage unit 34 stores parameter values in the main controller 3, and is composed of, for example, a RAM. The parameter value stored in the parameter value storage unit 34 is reflected in each processing unit when an operation instruction is input. The device tact storage unit 37 stores the device tact in the main controller 3 and includes, for example, a RAM. The device tact stored in the device tact storage unit 37 is reflected in the LD unit 11 when an operation instruction is input.

  When the processing time is transmitted from the unit controllers 22 to 25, the processing time receiving unit 32 receives the processing time and transfers it to the display unit 31 and the device tact determining unit 33. When the processing time is received from the processing time receiving unit 32, the device tact determination unit 33 writes the longest processing time of each processing unit in the recipe as a device tact in the device tact storage unit 37.

  The parameter value transmission unit 35 transmits a parameter value and an instruction for the purpose of use (processing time calculation instruction or operation instruction) to the unit controllers 22 to 25. When receiving the processing time calculation instruction from the input unit 36, the parameter value transmission unit 35 reads the parameter value from the parameter value storage unit 34 and transmits the processing time calculation instruction and the parameter value to the unit controllers 22 to 25. . Further, when the operation instruction is received from the input unit 36, the parameter value transmission unit 35 reads the parameter value from the parameter value storage unit 34 and transmits the operation instruction and the parameter value to the unit controllers 22 to 25. The device tact transmission unit 38 transmits the device tact and the operation instruction to the unit controller 21. When receiving the operation instruction from the input unit 36, the apparatus tact transmission unit 38 reads out the apparatus tact from the apparatus tact storage unit 37 and transmits the operation instruction and the apparatus tact to the unit controller 21.

  The unit controllers 22 to 25 of the processing units 12 to 15 include a processing time transmission unit 221, a processing time calculation unit 222, a parameter value reception unit 223, and a processing control unit 224. The parameter value receiving unit 223 receives a parameter value and an instruction for the purpose of use from the main controller 3, and transmits the parameter value and an instruction for the purpose of use to the processing time calculation unit 222 or the processing control unit 224. When the parameter value receiving unit 223 receives the processing time calculation instruction and the parameter value from the main controller 3, the parameter value receiving unit 223 transmits the received parameter value and the processing time calculation instruction to the processing time calculation unit 222. When the parameter value receiving unit 223 receives the operation instruction and the parameter value from the main controller 3, the parameter value reception unit 223 transmits the received parameter value and the operation instruction to the process control unit 224.

  The processing time calculation unit 222 calculates the processing time of the processing unit. When the processing time calculation unit 222 receives the processing time calculation instruction and the parameter value from the parameter value receiving unit 223, the processing time calculation unit 222 calculates the processing time of the processing unit when the parameter value is used, and processes the processing time. It transmits to the time transmission part 221. Here, calculation of the processing time in the cleaning unit 12 will be described as an example. As described above, the cleaning unit 12 calculates processing times in the four position ranges. Here, in order to simplify the description, the length of the substrate in the transport direction and the length of each processing unit (inlet CV121, cleaning unit 122, drying unit 123, outlet CV124) in the transport direction are the same, and this is L. . The processing time in the first position range (the time required for the substrate to pass through the inlet CV121) is “(L / V1) + (L / V1), where V1 is the pull-in speed of the inlet CV and V2 is the payout speed. V2) ”. The processing time in the second position range (the time required for the substrate to pass through the cleaning unit 122) is V2 (the same as the discharging speed of the inlet CV 121), and the discharging speed of the CV in the cleaning unit is the same. Assuming that the hourly speed is V3 and the time during which the substrate is stopped in the cleaning unit 122 is T1, it is expressed as “(L / V2) + T1 + (L / V3)”

  The processing time in the third position range (the time required for the substrate to pass through the drying unit 123) is V3, which is the pulling speed of the CV in the drying unit (this is the same as the dispensing speed of the CV in the cleaning unit). When the payout speed is V4, it is represented by “(L / V3) + (L / V4)”. The processing time in the fourth position range (the time required for the substrate to pass through the outlet CV124) is the pull-in speed V4 of the outlet CV124 (this is the same as the payout speed of the CV in the drying section), and the payout time. When the speed is V5, it is represented by “(L / V4) + (L / V5)”. The processing time calculation unit 222 calculates the processing time of each position range from the received parameters using these equations. The processing time calculation unit 222 of the unit controllers 22 to 25 of the processing units 12 to 15 similarly calculates the processing time for the processing unit to be controlled. For example, for the oven units 13 and 15, the processing time (passing time) at the inlet CV 131, the oven robot 132, the HP chamber 133 (upper stage), the CP chamber 133 (lower stage), and the outlet CV 134 is calculated. For the coater unit 14, processing times at the entrance CV 141, the robot 142, the coater 143, the robot 144, and the exit CV 145 are calculated. The processing time calculation unit 222 transmits the longest processing time of each position range to the processing time transmission unit 221 as the processing time of the processing unit.

  The processing control unit 224 controls processing in the processing unit. When receiving the operation instruction and the parameter value from the parameter value receiving unit 223, the processing control unit 222 controls the processing unit so that the processing unit performs processing on the substrate using the parameter value. The processing time transmission unit 221 transmits the calculated processing time to the main controller 3. The processing time transmission unit 221 transmits the processing time to the main controller 3 when the processing time is received from the processing time calculation unit 222.

  The unit controller 21 of the LD unit 11 includes an apparatus tact receiving unit 211 and an LD control unit 212. The device tact receiving unit 211 receives device tact from the main controller 3. When receiving the device tact transmitted from the main controller 3, the device tact receiving unit 211 transmits the device tact to the LD control unit 212. The LD control unit 212 controls the operation of the LD unit 11. When receiving the device tact from the device tact receiving unit 211, the LD control unit 212 controls the LD unit 11 so that the LD unit 11 inputs the substrate with the device tact.

  Next, the processing flow of the main controller 3 and the unit controllers 21 to 25 will be described with reference to FIG. FIG. 8 is a flowchart showing a processing flow of the main controller 3 and the unit controllers 21 to 25. In the main controller 3, in step M <b> 1, the input unit 36 checks whether or not a parameter value change is input (YES in step M <b> 1), and proceeds to step M <b> 2. In step M <b> 2, the input unit 36 writes the changed parameter value in the parameter value storage unit 34. If the parameter value is not changed in the branch of step M1 (NO in step M1), and if the process of step M2 is completed, the process proceeds to step M3.

  In step M3, the input unit 36 checks whether or not an instruction for calculating the processing time is input by the operator (the setting button 321 is pressed on the screen in FIG. 6). If the instruction is input (in step M3). YES), go to Step M4. In step M4, the input unit 36 acquires the processing time of each processing unit 12-15 based on the parameter value currently stored in the main controller 3 in each unit controller 22-25 of the processing unit to the parameter value transmission unit 35. Instruct. The parameter value transmission unit 35 reads the parameter value from the parameter value storage unit 34 and transmits a processing time calculation instruction and the parameter value to each of the unit controllers 22 to 25. In the branch of step M3, when the processing time calculation instruction is not input (NO in step M3) and when the process of step M4 is completed, the process proceeds to step M5.

  In step M5, the processing time receiving unit 32 checks whether or not the processing time has been received from the unit controllers 22 to 25, and if received (YES in step M5), the processing time proceeds to step M6. In step M6, the processing time receiving unit 32 transmits the received processing time to the device tact determining unit 33, and the device tact determining unit 33 sets the longest processing time of all processing units as the device tact. Write to the storage unit 37. In step M7, the processing time receiving unit 32 transmits the received processing time to the display unit 31, and the display unit 31 displays the processing time. In the branch of step M5, when the processing time is not received (NO in step M5) and when the process of step M7 is completed, the process proceeds to step M8.

  In step M8, the input unit 36 checks whether or not the operator has input the device tact by the keyboard by positioning the cursor at the display position of the device tact on the screen display of the main controller 3, for example. (YES in step M8), the process proceeds to step M9. In step M <b> 9, the input unit 36 writes the input device tact in the device tact storage unit 37. In the branch of step M8, when the device tact is not input (NO in step M8) and when the process of step M9 is completed, the process proceeds to step M10.

  In Step M10, the input unit 36 checks whether or not a driving instruction has been input by the operator. If it has been input (YES in Step M10), the input unit 36 proceeds to Step M11. In step M <b> 11, the input unit 36 transmits a driving instruction to the parameter value transmission unit 35. In response to this, the parameter value transmission unit 35 reads the parameter value from the parameter value storage unit 34 and transmits the operation instruction and the parameter value to the unit controllers 22 to 25. In step M <b> 12, the input unit 36 transmits a driving instruction to the device tact transmission unit 38. In response to this, the device tact transmission unit 38 reads the device tact from the device tact storage unit 37 and transmits the operation instruction and the device tact to the unit controller 21 of the LD unit 11. In the branch of step M10, when the driving instruction is not input (NO in step M10) and when the process of step M12 is completed, the process returns to step M1 and the processes from step M1 are repeated.

  In the unit controllers 22 to 25 of the processing units, in step P1, the parameter value receiving unit 223 checks whether or not the processing time calculation instruction and the parameter value are received from the main controller 3, and if received (step (1). YES at P1), go to Step P2. In step P <b> 2, the parameter value receiving unit 223 transmits the received parameter value and processing time calculation instruction to the processing time calculation unit 222. The processing time calculation unit 222 calculates the processing time of the processing unit using the received parameter value. In Step P3, the processing time calculation unit 222 transmits the calculated processing time to the processing time transmission unit 221, and the processing time transmission unit 221 transmits the processing time to the main controller. When the processing time calculation instruction and the parameter value are not received in the branch of Step P1 (NO in Step P1), and when the process of Step P3 is completed, the process proceeds to Step P4.

  In step P4, the parameter value receiving unit 223 checks whether or not an operation instruction and a parameter value are received from the main controller 3. If received (YES in step P4), the process proceeds to step P5. In step P5, the parameter value receiving unit 223 transmits the received parameter value and the operation instruction to the process control unit 224. The processing control unit 224 controls the processing unit to perform processing using the received parameter value. In the branch of Step P4, when the operation instruction and the parameter value are not received (NO in Step P4) and when the process of Step P5 is completed, the process returns to Step P1 and the processes from Step P1 are repeated.

  In the unit controller 21 of the LD unit 11, in step D <b> 1, the device tact receiving unit 211 checks whether or not an operation instruction and device tact are received from the main controller 3, and if received (YES in step D <b> 1). ), Go to Step D2. In step D <b> 2, the device tact receiving unit 211 transmits the received device tact and the operation instruction to the LD control unit 212. The LD control unit 212 controls the LD unit 11 to load the substrate at the received apparatus tact. In the branch of Step D1, when the operation instruction and the device tact are not received (NO in Step D1) and when the process of Step D2 is completed, the process returns to Step D1, and the processes from Step D1 are repeated.

  Thus, according to the present embodiment, when the operator changes the parameter value in the main controller 3 and instructs the calculation of the processing time, the processing time is calculated in the unit controller of each processing unit. The result is displayed on the main controller 3. Then, the main controller 3 determines the device tact based on the calculated processing time and stores it in the main controller 3, and displays the calculated processing time on the main controller 3. On the other hand, the operator can set the device tact using the main controller 3 when he / she wants to change the device tact by looking at the processing time and the device tact displayed on the main controller 3. Thereafter, when the operator gives a setting instruction in the main controller 3, the apparatus tact and parameter values stored in the main controller 3 are reflected in the operation of the substrate processing apparatus.

  In addition, this invention is not limited to the thing of the said embodiment, The aspect described below can be employ | adopted. In the present embodiment, the processing time calculation unit 222 calculates the processing time by calculation using the received parameter and the calculation formula stored in the processing time calculation unit 222 in advance. However, the processing time calculation unit 222 actually performs processing using the received parameter. The processing time may be acquired by operating the unit and actually measuring the processing time. In this case, a position detection means for detecting the passage position of the substrate, for example, a sensor is required for the processing unit, and a time measurement means for measuring the passage time between predetermined positions is required for the unit controller.

  In the present embodiment, the processing time calculation device 2A and the device tact setting device 2 are composed of a plurality of unit controllers 21 to 25 and the main controller 3, but for example, an information processing device including one CPU (central processing device). Or it may be composed of one PC.

It is a top view which shows the structure of the substrate processing apparatus in one Embodiment of this invention. It is a top view which shows the structure of the washing | cleaning unit in one Embodiment of this invention. It is a top view which shows the structure of the oven unit in one Embodiment of this invention. It is a top view which shows the structure of the coater unit in one Embodiment of this invention. It is a figure which shows an example of the screen display of the main controller in one Embodiment of this invention. It is a figure which shows an example of the screen display of the main controller in one Embodiment of this invention. It is a block diagram which shows the function structure of the setting apparatus in one Embodiment of this invention. It is a flowchart which shows the flow of a process of the setting apparatus in one Embodiment of this invention.

1 Substrate Processing Device 11 LD Unit (Device for loading substrate)
12 Cleaning unit (processing unit)
13 Dehydrated Bake Oven Unit (Processing Unit)
14 Coater unit (processing unit)
15 Pre-baked oven unit (processing unit)
2 Device tact setting device (setting device)
2A Processing time calculation device (calculation device)
22-25 Unit controller (unit controller)
221 processing time transmission unit (processing time transmission means)
222 Processing time calculation unit (processing time acquisition means)
223 Parameter value receiving unit (parameter receiving means)
3 Main controller (main control unit)
31 Display (notification means)
32 processing time receiving unit (processing time receiving means)
33 Device tact determination unit (selection means)
34 Parameter value storage unit (storage means)
35 Parameter value transmitter (parameter transmitter)
36 Input section (change means, input means)
38 Device tact transmission unit (setting means)

Claims (8)

A calculation device that calculates a time interval when continuously loading the substrates to a plurality of processing unit groups that perform a series of processes on the substrates continuously conveyed by a conveyor,
Storage means for storing a parameter value which is an operation speed and a processing time of the transport mechanism of each processing unit;
Changing means for the operator to change the value of the parameter stored in the storage means;
Processing time for determining the processing time of each processing unit based on the operation speed stored in the storage means, the length of the substrate in the transport direction, the length of the conveyor, and the processing time stored in the storage means Acquisition means;
E Bei and informing means for informing the processing time obtained by the processing time acquisition unit to the operator,
The operating speed includes a loading speed of each processing unit when loading the substrate and a dispensing speed of each processing unit when dispensing the substrate,
The processing time acquisition means is a sum of a take-in time obtained by dividing the length of the substrate in the carrying direction by the take-in speed and a take-out time obtained by dividing the length in the carrying direction of the substrate by the take-out speed. A calculation device that calculates the processing time of each processing unit using at least . A setting device that sets a time interval when continuously loading substrates to a plurality of processing unit groups that perform a series of processing on substrates that are continuously conveyed by a conveyor,
A calculation device according to claim 1;
An input means for an operator to input the time interval;
A setting apparatus comprising: setting means for setting the time interval input by the input means to an apparatus for loading a substrate into the uppermost processing unit of the processing unit group.   The setting device according to claim 2, wherein the processing time acquisition unit obtains the processing time by actually measuring the processing time when each processing unit performs an operation based on the value of the parameter. A setting device that sets a time interval when continuously loading substrates to a plurality of processing unit groups that perform a series of processing on substrates that are continuously conveyed by a conveyor,
Storage means for storing a parameter value which is an operation speed and a processing time of the transport mechanism of each processing unit;
Changing means for the operator to change the value of the parameter stored in the storage means;
Processing time for determining the processing time of each processing unit based on the operation speed stored in the storage means, the length of the substrate in the transport direction, the length of the conveyor, and the processing time stored in the storage means Acquisition means;
Selecting means for selecting the latest processing time among the processing times of each processing unit determined by the processing time acquisition means;
A setting means for setting the processing time selected by the selection means as the time interval in an apparatus for loading a substrate into the uppermost processing unit of the processing unit group ;
The operating speed includes a loading speed of each processing unit when loading the substrate and a dispensing speed of each processing unit when dispensing the substrate,
The processing time acquisition means is a sum of a take-in time obtained by dividing the length of the substrate in the carrying direction by the take-in speed and a take-out time obtained by dividing the length in the carrying direction of the substrate by the take-out speed. A setting device that calculates the processing time of each processing unit using at least .   The setting device according to claim 4, wherein the processing time acquisition unit obtains a processing time by actually measuring the processing time when each processing unit performs an operation based on the value of the parameter. A setting device that sets a time interval when continuously loading substrates to a plurality of processing unit groups that perform a series of processing on substrates that are continuously conveyed by a conveyor,
A unit controller electrically connected to each processing unit;
A main controller connected to each unit controller via a communication line;
The main control unit is configured to store a parameter value that is an operation speed and a processing time of an operation mechanism of each processing unit, and a change for an operator to change the parameter value stored in the storage unit. Of the parameters stored in the storage means, the parameter transmitting means for transmitting the parameters belonging to each processing unit to a unit control unit connected to the processing unit to which the parameters belong, and the parameter transmitting means Processing time receiving means for receiving the processing time of each processing unit when the parameters are used from a unit control unit connected to each processing unit, and the processing time received by the processing time receiving means to the operator Notification means for notification, input means for an operator to input the time interval, and input by the input means And a setting means for setting the device to inject substrate the time intervals at the most upstream of the processing units of the processing unit group,
The unit control unit includes a parameter receiving unit that receives a parameter transmitted by the parameter transmitting unit, the operation speed and processing time that are parameters received by the parameter receiving unit, and a length in the transport direction of the substrate. Based on the length of the conveyor, the processing time acquisition means for determining the processing time of the processing unit connected to the unit controller, and the processing time determined by the processing time acquisition means is transmitted to the main controller. Processing time transmission means ,
The operating speed includes a loading speed of each processing unit when loading the substrate and a dispensing speed of each processing unit when dispensing the substrate,
The processing time acquisition means is a sum of a take-in time obtained by dividing the length of the substrate in the carrying direction by the take-in speed and a take-out time obtained by dividing the length in the carrying direction of the substrate by the take-out speed. A setting device that calculates the processing time of each processing unit using at least . A setting device that sets a time interval when continuously loading substrates to a plurality of processing unit groups that perform a series of processing on substrates that are continuously conveyed by a conveyor,
A unit controller electrically connected to each processing unit;
A main controller connected to each unit controller via a communication line;
The main control unit is configured to store a parameter value that is an operation speed and a processing time of an operation mechanism of each processing unit, and a change for an operator to change the parameter value stored in the storage unit. Of the parameters stored in the storage means, the parameter transmitting means for transmitting the parameters belonging to each processing unit to a unit control unit connected to the processing unit to which the parameters belong, and the parameter transmitting means Processing time receiving means for receiving the processing time of each processing unit when using the parameters, from a unit control unit connected to each processing unit, and the processing time of each processing unit received by the processing time receiving means The selecting means for selecting the latest processing time and the processing time selected by the selecting means at the time And a setting means for setting the device to introduce the substrate into the most upstream of the processing unit of the processing unit group as the interval,
The unit control unit includes a parameter receiving unit that receives a parameter transmitted by the parameter transmitting unit, the operation speed and processing time that are parameters received by the parameter receiving unit, and a length in the transport direction of the substrate. Based on the length of the conveyor, the processing time acquisition means for determining the processing time of the processing unit connected to the unit controller, and the processing time determined by the processing time acquisition means is transmitted to the main controller. Processing time transmission means ,
The operating speed includes a loading speed of each processing unit when loading the substrate and a dispensing speed of each processing unit when dispensing the substrate,
The processing time acquisition means is a sum of a take-in time obtained by dividing the length of the substrate in the carrying direction by the take-in speed and a take-out time obtained by dividing the length in the carrying direction of the substrate by the take-out speed. A setting device that calculates the processing time of each processing unit using at least . A substrate processing apparatus comprising the setting device according to claim 2.

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