JP4573604B2 - Feeder - Google Patents

Description

  The present invention relates to a feeding device that transports a moving body on which a rotation mechanism is mounted to a positioning point with high transport accuracy.

In recent years, as represented by optical disc master exposure technology and semiconductor technology, there has been a demand for higher precision of microfabrication. In response to this, position control by NC (numerical control) has greatly increased the degree of processing. It is growing.
When positioning with high accuracy using such a linear motion guide device, by applying pressure to the linear motion guide mechanism and the rotational drive mechanism, the clearance between the rolling element and the rolling element rolling groove is reduced to 0, and the rigidity is increased. By increasing it, the amount of elastic displacement with respect to the load is reduced in the rolling element. Also, in slide table devices for optical disk master exposure, an air slide type slide table table in which the table can be moved back and forth through a hydrostatic bearing is used. In this case, a voice coil type linear motor is generally used for driving the table, and a detector of a closed loop control system using an interference laser, a length measuring device or a linear scale is used as a position detector. Yes.
Furthermore, when a stationary state is required in a semiconductor inspection apparatus or the like, or in a feed device in which a rotating mechanism is mounted on a moving body, rigidity in the feed direction is required, so a ball screw or a friction drive system is used for driving the table.

In such a feed device using a ball screw or a friction drive system, a linear motion guide mechanism using a ball or roller-shaped rolling element is used, but when a load is applied in the feed axis direction of the linear motion guide mechanism. Since the friction of the guide mechanism is low, the drive system receives the load directly. In this case, a long settling time is required for positioning under vibration. In order to avoid this, the fact that the amplitude displacement in the feed axis direction becomes smaller as the friction in the feed axis direction becomes higher is used to increase the pressure of the guide mechanism and shorten the positioning settling time.
Furthermore, the loop gain of the feed control system depends on the primary natural frequency of the device that occurs in the low frequency range determined by the mass of the moving body and the rigidity of the bearing that supports the drive shaft, and the natural frequency of the longitudinal and transverse modes such as ball screws. Some attempts have been made to avoid situations where the increase is impossible.

  By the way, Patent Document 1 described later discloses a technical idea for preventing the hunting of the machine and stabilizing the control system by removing a command in the vicinity of the mechanical resonance point by a band rejection filter such as a notch filter. Has been.

  Further, in Patent Document 2 described later, in order to suppress the gain of the resonance peak while suppressing the low-frequency phase delay as much as possible, the speed command value and the speed feedback value can be increased. Filter parameters are set according to the anti-resonance frequency, the resonance frequency, and the magnitude of the anti-resonance / resonance for the servo control device having a speed control system for controlling the servo motor so that the deviation becomes zero. Technical to measure the stabilization of the control system by using an infinite impulse response filter as a filter having at least one set of anti-resonance / resonance characteristics that are to be controlled, or a reverse-current characteristic, and incorporating the filter into a speed controller The idea is disclosed.

  Furthermore, in Patent Document 3 described later, when a plurality of notch filters are inserted into a control loop for a non-single unnecessary natural frequency component, the delay element of the control system increases, and conversely, the speed loop gain is increased. In a control system that generates mechanical vibration, a biquadratic filter is provided at the torque command input stage or motor speed output stage, and the zero point of the filter is the resonance point of the mechanical system. In addition, a technical idea is disclosed in which the filter pole is set in the vicinity of the anti-resonance point of the machine and the viscosity coefficient of the filter is adjusted and set.

In Patent Document 4 to be described later, the physical behavior of the guide mechanism is different between an inertial body behavior state in which the moving amount of the moving body is relatively large and an elastic body behavior state in which the moving amount of the moving body is in a minute region. In order to eliminate the instability of the vibration system caused by the above, a technical idea for switching the control loop between the inertial body behavior state and the elastic body behavior state is disclosed. In this case, specifically, the stabilization compensation element of the positioning control loop in the inertial body behavior state and the stabilization compensation element in the elastic body behavior state are switched.
Japanese Utility Model Publication No. 6-4809 JP 2000-322105 A JP 2001-251880 A Japanese Patent Publication No.7-1117855

  In the method of switching the control loop between the inertial body behavior state and the elastic body behavior state, for example, when performing transfer at a considerably low speed necessary for optical disc master exposure, the inertial body behavior state and the elastic body are always used. Because it is below the boundary of the behavioral state, it is necessary to switch the control loop frequently. When the control loop is switched, an impulse response state is always obtained, and the mechanical system becomes a vibration state, resulting in a decrease in control accuracy. In simple configurations such as a combination of linear motor drive and rolling guide, the distinction between the inertial body behavior state and the elastic body behavior state is clear. However, as in the ball screw drive method and the friction drive method, In the configuration in which the moving body is used at a plurality of locations, the distinction between the inertial body behavior state and the elastic body behavior state is not clear, and the control system is not precisely tuned, and the control accuracy is lowered.

  In addition, because the friction of the guide mechanism is small, positioning is performed under a vibration state, and in order to avoid a long settling time, the higher the friction in the axial direction of the drive shaft, the more the amplitude displacement in the axial direction. If the method of increasing the pressure applied to the guide mechanism is taken, focusing on the fact that it becomes smaller, the friction of the guide mechanism increases, so that the positioning error increases due to the disturbance of the feeding device and the positioning accuracy decreases.

  On the other hand, in a feeding device in which a movable body is rotatably supported by a drive shaft that is rotatably supported by a rolling bearing, a pressure is applied to the rolling bearing, and the natural frequency fo of the feeding device is the rotational frequency of the rotating mechanism. In the method of adjusting so that the natural frequency of the feeder does not match, it is good that the Q value at the natural frequency position does not change greatly when the natural frequency fo of the feeder is changed. If the directional rigidity increases, the Q value increases if the viscosity coefficient of the feed device is the same. If the gain of the feed control device is increased, the control system vibrates and feed accuracy is significantly reduced.

  In addition, in a feeder that does not have a rotating mechanism mounted on the moving body, periodic disturbances such as rotational vibrations do not enter the control system, so mechanical resonance is not excited. When the higher order frequency matches the mechanical resonance frequency of the feeder, the feeder becomes oscillating and the feeding accuracy is significantly reduced. Similarly, since the guide mechanism of the feeding device is set to low friction, the positioning is vibrated by the periodic external force fluctuation load of the rotation mechanism and the time-varying feed load such as the inertia force due to acceleration / deceleration. The settling time becomes longer.

  The present invention has been made in view of the current state of operation of this type of conventional feeding device as described above, and its purpose is that the feed control system oscillates according to the gain of the feed control system and the rotational frequency of the rotation mechanism. Accordingly, it is an object of the present invention to provide a feeding device that maintains high control accuracy and performs high-accuracy positioning and shortens positioning settling time.

In order to achieve the above object, a first aspect of the present invention is a feeding device in which a rotating mechanism is mounted on a moving body, and the moving body is fed by a feed command signal. A drive shaft that is driven by a feed motor provided on one end of the drive shaft and moves the movable body in the longitudinal axis direction, and the one end side of the drive shaft is connected to the longitudinal axis line via a pressurizing bearing that is adjustable in pressure. Pressurizing support means that is rotatably held around the drive shaft, and provided on the other end side of the drive shaft, the drive shaft is held rotatably about the longitudinal axis, and the longitudinal axis is itself Expansion / contraction support means held so as to be movable in the direction of expansion / contraction, expansion / contraction detection means for detecting expansion / contraction information of the expansion / contraction support means, position detection means for detecting the transfer position of the moving body, and rotation from the rotation mechanism Information and expansion / contraction information from the expansion / contraction detection means Therefore, by adjusting the pressurizing force applied to the prestressing bearing, the dynamic characteristic changing means for changing the dynamic characteristic of the feeder, and the movement under the operating state of the telescopic support means and the dynamic characteristic changing means Friction torque storage means for storing friction torque information at each transfer position of the body, and friction torque information from the friction torque storage means is added as an equivalent disturbance to the torque signal of the feed motor, and the feed command signal and the position detection and feed control means for performing feedback control on said transmission Ri command signal based on the position deviation signal between the position information from the means, on the basis of the position deviation signal, and a translational feed control means for extending and retracting the movable said elastic support means It is characterized by this. The second invention according to claim 2 further includes a variable notch filter in which a notch frequency and a Q value are variably set based on setting information of the dynamic characteristic changing means, and the feed control means and the translation feed The control means outputs a control signal through each of the variable notch filters.

The first and second inventions are a feeding device in which a rotating mechanism is mounted on a moving body, and the moving body is fed by a feed command signal, and is driven by a feed motor provided on one end side of the moving body. The moving body is moved in the longitudinal axis direction by the driven shaft, and one end side of the driving shaft is held so as to be rotatable about the longitudinal axis via a pressurizing bearing whose pressurization is adjustable by the pressurizing support means. The other end side of the drive shaft is held by an expansion / contraction support means so as to be rotatable about the longitudinal axis and extendable in the longitudinal axis direction.
In such a state, the expansion / contraction information of the expansion / contraction support means is detected by the expansion / contraction detection means, the transfer position of the moving body is detected by the position detection means, and the rotation information from the rotation mechanism and the expansion / contraction detection means are detected by the dynamic characteristic changing means. The pressure applied to the pressurized bearing is adjusted based on the expansion / contraction information from, and the dynamic characteristics of the feeder are changed.
On the other hand, the friction torque storage means stores friction torque information at each transfer position of the moving body under the operating states of the expansion / contraction support means and the dynamic characteristic changing means.

Then, in the control means, the friction torque signal from the friction torque storage means is added as an equivalent disturbance to the torque signal of the feed motor, and in the notch filter provided in the feed control means, the change information of the dynamic characteristic change means is included. Based on this, the notch frequency and Q value are variably set, and feedback control for the feed command signal is performed based on the position information from the position detection means.
Further, the translation feed control means controls the position detection information of the position detection means based on the position deviation signal from the feed control means.

In this way, in the first and second inventions, even if the elastic behavior region caused by the pressurized bearing or the like is absorbed by the translational operation of the expansion / contraction support means, and the feed control means causes a vibrational behavior, the notch The translation feed control means equipped with the filter is immediately activated to carry out feed control so that the moving body does not vibrate, and the feed is avoided while avoiding resonance with the rotational frequency of the rotating mechanism and its higher order frequency. Since the control is performed, the feed control is performed stably and with high accuracy.

In order to attain the aforementioned object, the third invention of claim 3, wherein, in the first or second invention, the translation feed control means, and said positional deviation signal with a preset reference signal A comparator for comparison; and a stop unit for stopping the operation of the translation feed control unit when the comparator determines that the position deviation signal has a deviation of a predetermined value or more. To do.

In the third invention, in addition to the operation in the first or second aspect of the invention, even under the boundary conditions of the inertial behavior state and the elastic behavior state, to avoid frequent switching operations, the feed control of the stable and highly accurate Done.

Similarly, in order to achieve the object, a fourth invention according to claim 4 is characterized in that, in the third invention, the stopping means is a changeover switch.

In the fourth aspect of the invention, the stop means of the third aspect of the present invention, by using a changeover switch, to simplify the structure of the translation feeding control means, while reducing the manufacturing cost, the action of the third invention is carried out The

Similarly, in order to achieve the object, a fifth invention according to claim 5 is the invention according to any one of the first invention to the fourth invention, wherein the translation feed control means is connected to the drive shaft. The configuration is such that the expansion / contraction portion provided concentrically is driven to move and control the expansion / contraction support means in the longitudinal axis direction .

In the fifth invention, in addition to the operation in any one of the first invention to fourth invention, instrumentation置全body is miniaturized.

In order to attain the aforementioned object, a sixth aspect of the sixth aspect, in any one of the first invention to the fifth invention, the friction torque storage means, and distortion information of the telescopic detection means The average of the friction torque information measured under the operating state of the expansion / contraction support means and the dynamic characteristic changing means at each transfer position of the moving body set in advance based on the pressurization information of the dynamic characteristic changing means or the natural frequency information. The friction torque information is stored.

In the sixth aspect of the invention, in addition to the operation of any one of the first to fifth aspects of the invention, the friction torque information is simply rewritten and re-stored as necessary. Using accurate and useful friction torque information, feed control with high feed accuracy is performed.

In order to attain the aforementioned object, the seventh invention according to claim 7, in any one invention of the first invention to the fifth invention, the friction torque storage means, and distortion information of the telescopic detection means Measured by operating the telescopic support means and the dynamic characteristic changing means at each transfer position of the moving body set in advance based on the pressurization information of the dynamic characteristic changing means or the natural frequency information and the position information of the position detecting means. The friction torque information is stored.

In the seventh invention, in addition to the operation in any one of the first to fifth inventions, the friction torque storage means includes the extension information of the extension detection means and the pressurization information of the dynamic characteristic changing means, or Based on the natural frequency information and the position information of the position detecting means, the friction torque information measured by operating the expansion / contraction support means and the dynamic characteristic changing means is stored at each transfer position of the moving body set in advance, With a low manufacturing cost configuration, good feed accuracy is ensured even if the assembly accuracy of the guide mechanism and the drive shaft is somewhat lowered.

Similarly, in order to achieve the above object, an eighth invention according to claim 8 is the variable notch filter according to any one of the first to seventh inventions, comprising a feed control means and a translation feed control means. Is composed of a multi-rotation variable resistor that determines the notch frequency and the Q value, and a rotary motor that changes the resistance value of the multi-rotation variable resistor.

In the eighth invention, in addition to the operation of any one of the first to seventh inventions, the variable notch filter of the feed control means and the translation feed control means determines the notch frequency and the Q value. A simple and low-cost manufacturing configuration is made up of a multi-rotation variable resistor and a rotary motor that changes the resistance value of the multi-rotation variable resistor.

In order to attain the aforementioned object, a ninth aspect of the present invention according to claim 9, in any one invention of the first invention to the seventh invention, the variable notch filter with translation feeding control means sends control means And a plurality of resistors for determining the notch frequency and the Q value, and switching means for switching the notch frequency and the Q value by changing the combination of these resistors.

In the ninth invention, in addition to the operation in any one of the first to seventh inventions, the variable notch filter of the feed control means and the translation feed control means determines the notch frequency and the Q value. Since it comprises a plurality of resistors and switching means for changing the combination of these resistors to switch the notch frequency and the Q value, stable feeding accuracy is maintained even when the rotational frequency is suddenly changed. Increased versatility.

In order to attain the aforementioned object, the invention of a tenth of claim 10, in any one invention of the first invention to the ninth invention, the switching means, based on the current rotational speed of the rotary mechanism Thus, a ROM from which the switching drive signal is read out is provided.

In the tenth invention, in addition to the operation of any one of the first to ninth inventions, the switching means includes a ROM from which the switching drive signal is read based on the current rotational speed of the rotating mechanism. Since it is provided, with a simple and low-cost construction, high-precision feed control is performed by accurately reducing the primary natural frequency gain peak of the feed control means with a small amount of data.

In order to attain the aforementioned object, the eleventh invention according to claim 11, in any one of the first invention to the tenth invention, the dynamic characteristic changing means is set by pressurized adjusted The dynamic characteristic of the feeding device is changed so that the natural frequency fo of the feeding device does not coincide with the rotation frequency of the rotation mechanism and its higher order frequency.

In the eleventh aspect of the invention, in addition to the operation of any one of the first to tenth aspects of the invention, the dynamic characteristic changing means is configured so that the natural frequency fo of the feeder set by pressure adjustment is Since the dynamic characteristics of the feeding device are changed so as not to coincide with the rotational frequency of the mechanism and its higher order frequency, the feeding device can avoid resonance of the feeding device and stably perform high-precision feeding control.

Similarly, in order to achieve the above object, a twelfth aspect of the invention according to claim 12 is the pressure applied by the pressure support means by the dynamic characteristic changing means in any one of the first invention to the eleventh invention. A pressurizing force transmitting means for adjusting the pressurizing force in the expansion / contraction support means by adjustment is provided between the pressurization support means and the expansion / contraction support means.

In the twelfth invention, in addition to the operation in any one of the first invention to the eleventh invention, the dynamic characteristic changing means is provided by the pressure transmitting means provided between the pressure supporting means and the expansion / contraction support means. Based on the pressurization adjustment by the pressurization support means, the pressurization adjustment by the expansion / contraction support means is also performed, and the expansion / contraction support means assists the operation of the dynamic characteristic changing means, so that it is driven by a simple and low-cost construction. High-precision feed control is performed based on the pressurizing force that is accurately applied to a wide range of shaft bearings.

Similarly, in order to achieve the above object, a thirteenth invention according to claim 13 detects a shake in the direction of the drive shaft of the rotating mechanism relative to any one of the first invention through the twelfth invention. A shake amount detecting means and a shaft displacement detecting means for detecting a displacement amount of the drive shaft on the pressurizing support means side are further provided, and the dynamic characteristic changing means is a natural frequency fo of the feeder set by adjusting the pressurizing. However, the dynamic characteristics of the feeding device are changed so as not to coincide with the rotation frequency of the rotation mechanism and its higher order frequency.

In the thirteenth invention, in addition to the operation in any one of the first to twelfth inventions, the shake detection unit detects a shake in the drive shaft direction of the rotation mechanism, and the shaft displacement detection unit The amount of displacement of the drive shaft on the pressurizing support means side is detected, and based on the detected information, the natural frequency fo of the feeder set by adjusting the pressurization by the dynamic characteristic changing means is the rotational frequency of the rotating mechanism. In addition, since the dynamic characteristics of the feeding device are changed so as not to coincide with the higher-order frequency, high-precision feeding control is performed in an appropriate manner corresponding to a rotating mechanism whose rotational state changes from moment to moment.

According to the first and second inventions, one end side of the moving shaft that is driven by the feed motor and transports the moving body in the axial direction is rotatable about the axis by the pressurizing support means via the pressurizing bearing. The other end side of the moving shaft is held by the expansion / contraction support means so as to be rotatable about the axis and to be extendable / contractible in the axial direction. Based on the expansion / contraction information from the detection means, the pressurization applied to the pressurization bearing is adjusted to change the dynamic characteristics of the feeder. In the control means, the friction torque signal from the friction torque storage means is added as an equivalent disturbance to the torque signal of the feed motor, and the change information of the dynamic characteristic change means is obtained by a notch filter provided in the feed control means. The notch frequency and the Q value are variably set, and feedback control for the feed command signal is performed based on the position information from the position detection means. In the translation feed control means, based on the position deviation signal from the feed control means, The position detection information of the position detection means is controlled.
In this way, even if the elastic behavior region caused by the pressurized bearing or the like is absorbed by the translational operation of the expansion / contraction support means, and the feed control means causes a vibrational behavior, the translation feed control means equipped with the notch filter It is possible to perform feed control so that the moving body does not cause vibrational behavior by operating immediately, and feed control can be performed while avoiding resonance with the rotation frequency of the rotation mechanism and its higher-order frequency. This makes it possible to stably and accurately perform the feed control of the moving body on which the rotation mechanism is mounted.

According to the third invention, in addition to the effects obtained in the first or second invention, the translation feed control means is provided with a comparator and a stop means, and a reference signal preset by the comparator; When it is determined that there is a deviation of a predetermined value or more between the deviation signal from the feed control means, the operation of the translation feed control means is stopped by the stop means, so before the feed control means becomes unstable, The translation feed control means can be used efficiently, and stable and highly accurate feed control can be performed while avoiding frequent switching operations even under the boundary between the inertial behavior state and the elastic behavior state. Become.

According to the fourth invention, by using a changeover switch for the stopping means of the third invention, the structure of the translation feed control means is simplified, and the effects obtained by the third invention are reduced in manufacturing cost. Can be realized.

According to the fifth invention, in addition to the effect obtained in any one of the first to fourth inventions, the drive shaft is a sum rigidity of the rigidity of the bearing and the rigidity in the longitudinal axis direction of the drive shaft, As a translational secondary system having a primary resonance frequency determined by the mass of the moving body, the longitudinal axis line is also used as a rotational drive element and a translational drive element, and through a telescopic part concentrically provided via a bearing on the drive shaft. The entire apparatus can be reduced in size because it is expanded and contracted in the direction.

According to the sixth invention, in addition to the effects obtained in any one of the first to fifth inventions, the friction torque information can be easily rewritten and stored as needed, thereby simplifying and reducing the production cost. With this configuration, it is possible to perform feed control with high feed accuracy using accurate and useful friction torque information.

According to the seventh invention, in addition to the effects obtained in any one of the first to fifth inventions, the friction torque storage means includes the extension information of the extension detection means and the pressurization information of the dynamic characteristic changing means. Or, based on the natural frequency information and the position information of the position detection means, the friction torque information measured by operating the expansion / contraction support means and the dynamic characteristic change means at each preset transfer position of the moving body is stored. With a simple and low-cost construction, it is possible to ensure good feed accuracy even if the assembly accuracy of the guide mechanism and the drive shaft is somewhat lowered.

According to the eighth invention, in addition to the effects obtained in any one of the first to seventh inventions, the variable notch filter of the feed control means and the translation feed control means is provided with the notch frequency and the Q value. It is possible to achieve a simple and low-cost configuration comprising a multi-rotation variable resistor to be determined and a rotary motor that changes the resistance value of the multi-rotation variable resistor.

According to the ninth invention, in addition to the effects obtained in any one of the first to seventh inventions, the variable notch filter of the feed control means and the translation feed control means determines the notch frequency and the Q value. Because it is composed of a plurality of resistors and a switching means that changes the combination of these resistors to switch the notch frequency and the Q value, stable feed accuracy can be maintained even when the rotational frequency is suddenly changed. It becomes possible to improve the versatility of the feeder.

According to the tenth invention, in addition to the effects obtained in any one of the first to ninth inventions, the switching drive signal is read to the switching means based on the current rotational speed of the rotating mechanism. Since the ROM is provided, a simple and low manufacturing cost configuration makes it possible to accurately perform feed control by reducing the primary natural frequency gain peak of the feed control means accurately with a small amount of data. .

According to the eleventh invention, in addition to the effects obtained in any one of the first to tenth inventions, the dynamic characteristic changing means has the natural frequency fo of the feeder set by the pressure adjustment. Since the dynamic characteristics of the feeding device are changed so as not to coincide with the rotational frequency of the rotating mechanism and its higher order frequency, it becomes possible to perform stable and highly accurate feeding control while avoiding resonance of the feeding device.

According to the twelfth invention, in addition to the effects obtained in any one of the first invention to the eleventh invention, dynamic characteristics are provided by the pressurizing transmission means provided between the pressurizing support means and the expansion / contraction support means. Based on the pressurization adjustment in the pressurization support means by the changing means, the pressurization adjustment in the expansion / contraction support means is also performed, and the expansion / contraction support means assists the operation of the dynamic characteristic change means. Thus, it becomes possible to perform highly accurate feed control based on the pressurizing force that is accurately applied to a wide range of bearings of the drive shaft.

According to the thirteenth invention, in addition to the operation in any one of the first to twelfth inventions, the shake amount detecting means detects the shake in the driving shaft direction of the rotating mechanism, and the shaft displacement detecting means The displacement amount of the drive shaft on the pressurizing support means side is detected, and based on the detected information, the natural frequency fo of the feeder set by the dynamic characteristic changing means by pressurization adjustment is the rotation of the rotating mechanism. Because the dynamic characteristics of the feeder are changed so that they do not match the frequency and its higher-order frequency, it is possible to perform high-precision feed control by accurately responding to the rotating mechanism whose rotational state changes from moment to moment. become.

[First Embodiment]

A first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is an explanatory diagram showing the configuration of the first embodiment of the present invention, FIG. 2 is an explanatory diagram showing the configuration of the feed control means and the translation control means of the same embodiment, and FIG. 3 is the notch of the same embodiment. 4 is a circuit diagram showing the configuration of the filter, FIG. 4 is a characteristic diagram showing the relationship between the primary natural frequency of the embodiment and the amount of pressurization, and FIG. 5 shows the relationship between the amount of expansion and contraction and the amount of pressurization of the embodiment. characteristic diagram, the characteristic shown FIG. 6 (a) characteristic diagram showing the relationship of the friction torque and preload of the embodiment, FIG. 7 (a) the relationship of the friction torque and the mobile position of the embodiment illustrated FIG. 8 is a characteristic diagram between gain and frequency under the low pressurization condition of the same embodiment, FIG. 9 is a characteristic diagram between gain and frequency under the high pressurization condition of the same embodiment, and FIG. It is a characteristic view of the transfer function of the notch filter of the embodiment.

In the present embodiment, as shown in FIG. 1B, the plate-shaped rectangular base 24 is arranged on a vibration isolation mechanism such as a pneumatic servo mount (not shown) so as not to be affected by external vibration. At both edge positions in the width direction of the base 24, struts 18 are fixed upright so as to face each other. A spherical roller or a cylindrical roller is attached to the projecting ends of these struts 18 and the base 24. The lower surface portion of the rolling bearings arranged in the longitudinal direction is fixed, and the movable body 13 is disposed on the upper surface portion of the rolling bearing so as to be movable in the longitudinal direction of the base 24.
A turntable 19 is disposed on the upper surface of the movable body 13. An air spindle 22 is attached to the turntable 19. The air spindle 22 floats statically in the radial and thrust directions by compressed air from the outside. Is attached with an optical rotary encoder 20 via a rotational drive motor 21. The rotary encoder 20 outputs an A-phase pulse B output at a position obtained by dividing 360 ° of one rotation into several thousand equal parts, The rotation information of the turntable 19 is acquired from the phase pulse and the Z-phase pulse output every 360 ° of one rotation.
The turntable 19, the air spindle 22, the rotation drive motor 21, and the rotary encoder 20 constitute a rotation mechanism 30. When an energization signal is input to the rotation drive motor 21 from the outside, the rotation mechanism 30 enters a rotation operation state. .

A position detector 15 such as an optical linear encoder for detecting the position of the moving body 13 in the axial direction is provided near the left end of the moving body 13 in FIG. The scale 15b of the position detector 15 is fixed via the mounting plate 15c, and the light receiving part 15a is fixed to the base 24 via the mounting plate 17. The position detector 15 detects the transfer position of the moving body 13 based on the A-phase pulse and the B-phase pulse output with a predetermined resolution in the moving direction of the moving body 13.
Further, a protruding portion 13a is integrally formed to protrude from the right end portion of the movable body 13 in FIG. 1A, and a fitting member into which the drive shaft 1 is inserted and fitted below the protruding portion 13a. 23 is fixed. A screw such as a ball screw is engraved on the outer peripheral surface of the drive shaft 1, and the screw of the drive shaft 1 is formed on the inner peripheral surface of the fitting hole into which the drive shaft 1 of the fitting member 23 is inserted and fitted. A screwing groove to be screwed is formed.

On the other hand, a substantially rectangular support 10 is fixed to the base 24, and a through-hole into which one end of the drive shaft 1 is inserted is disposed near the upper surface of the support 10. 1 is formed in the axial direction. A first stepped portion is formed in the vicinity of the end portion of the through hole on the fitting member 23 side. In this first stepped portion, the rolling element 2a is formed on the inner peripheral surface of the through hole. 2b, the outer peripheral surface of the outer ring of the bearings 16a, 16b, such as an angular bearing, is fixed via the spacer 3, and the inner peripheral surface of the inner ring of the bearings 16a, 16b is a bearing on the threaded portion of the outer peripheral surface of the drive shaft 1. It is fixed by a stop 4.
In addition, a second stepped portion is formed in the vicinity of the end portion of the through hole in the direction away from the fitting member 23, and the feed motor that rotationally drives the drive shaft 1 in this second stepped portion. 7 is connected to the end of the drive shaft 1 by an Oldham coupling 6, and the feed motor 7 is fixed to the support 10 via an attachment plate 9. A rotary encoder 8 is fixed to the feed motor 7. The rotary encoder 8 outputs an A-phase pulse and a B-phase pulse output at a position obtained by dividing 360 ° of one rotation into several thousand equal parts, and 360 ° of one rotation. The rotation information of the turntable 19 is acquired from the Z-phase pulse output every time.
Further, the outer ring of the bearings 16a and 16b including the rolling elements 2a and 2b is attached to a mounting plate 9 to which the feed motor 7 is fixed via a pressurization adjusting expansion / contraction section 5 such as a piezoelectric element that expands and contracts in the axial direction of the driving body 1. The pressure adjusting expansion / contraction part 5 is actuated by an electric signal from the pressure adjusting means 29 to set a pressure on the bearings 16a and 16b, and the bearing gap between the bearings 16a and 16b becomes zero.

On the other hand, a support body 11 that holds the other end portion of the drive shaft 1 (the left end portion shown in FIG. 1A) is fixed to the base 24. A through hole into which the other end is inserted is formed in the axial direction of the drive shaft 1. In the through hole, a movable body to which outer rings of bearings 12a and 12b including rolling elements 2c and 2d such as a deep groove ball bearing and an angular bearing are fitted is provided, and the outer periphery of the movable body is a through hole of the support body 11. It is set so as to be slidable on the inner circumference. Further, the other end of the drive shaft 1 is provided a support portion 58, in the support portion 58, the fixing ring to the drive shaft 1 coaxially is fixed, the movable body bearings 12a, a bearing gap 12b The elastic member 67 such as a piezoelectric element is fixedly disposed on the support 11 at the end surface position in the axial direction of the drive shaft 1 on the outer periphery of the fixing ring. ing.

In this embodiment, the feed control unit 32, based on the output signal of the position detector 15, the feed command signal is feedback-controlled, feeding the deviation signal of the feed control means 32 is input to the translation control means 60, Similar feedback control is performed by the output signal of the expansion / contraction part 67 of the translation control means 60.
In this way, the drive shaft 1 is rotated by the input of the energization signal to the feed motor 7, and the movable body 13 is transferred in the axial direction via the fitting member 23 by the rotation of the drive shaft 1, and the telescopic portion When a drive signal is input to 67, the drive shaft 1 translates in the axial direction.

As a mechanical model of the support portion 58 in the present embodiment, m is the mass of the moving body 13, K is the sum rigidity of the rigidity of the rolling elements 2a to 2d and the rigidity in the axial direction of the drive shaft 1, and C is the damping of the mechanical system. 7 (b) , and the displacement frequency characteristic of the moving body 13 with respect to the input signal to the expansion / contraction part 67 is a translational secondary system having a primary resonance frequency fc as shown in FIG. 6 (b) . . Moreover, the displacement frequency characteristic of the moving body 13 with respect to the applied voltage of the feed motor 7 varies depending on the pressurizing condition applied to the bearings 16a, 16b, 12a, 12b, and tends to be as shown in FIG. 8 or FIG.

Feed control means 32, have a configuration as shown in FIG. 2, the feed and the pulse train signal command signal, detected by the deviation △ X deviation counter 41 with the pulse train signal indicating the current position of the position detector 15 Then, the obtained deviation signal is D / A converted by the D / A converter 42 and input to the integrator 43 for setting the steady position deviation to zero. The output signal of the integrator 43 is input to a compensator 44 that compensates for the position servo loop, and the gain Ka of the position servo loop is set by the gain circuit 45 to the output signal of the compensator 44 and input to the comparison circuit RC1. Is done.

  In the comparison circuit RC1, the speed signal of the feeding device obtained by converting the output signal of the position detector 15 by the F / V converter 49 is compared with the output signal of the gain circuit 45, and the speed of the comparison circuit RC1 is The deviation signal is input to a compensator 46 that performs compensation of the speed servo loop. The output signal of the compensator 46 is input to the variable notch filter 40a after the speed servo loop gain Kb is set by the gain circuit 47. The output signal of the variable notch filter 40a is added to the friction torque information signal by the signal adding circuit RA1, and further feedback-controlled by the output signal of the feed motor 7, and then input to the drive amplifier 48. An output signal is input to the feed motor 7, and position detection is performed by the position detector 15 from the feed stage ST driven by the feed motor 7.

Further, a feed deviation signal is input from the D / A converter 42 of the feed control means 32 to the comparator 61 and the amplifier 62 of the translation feed control means 60, and the common terminal of the switch 63 is connected to the output terminal of the amplifier 62. An output of the comparator 61 that determines whether or not the feed deviation signal from the D / A converter 42 satisfies a predetermined deviation level and outputs a switching signal is connected to the switching terminal of the switching device 63. Connected to the terminal.
The output terminal of the switch 63 is connected to the input terminal of the compensator 64 for setting the stabilization condition, and the gain Kc of the position servo loop is set by the gain circuit 66 for the output signal of the compensator 64. The output signal of the gain circuit 66 is input to the drive amplifier 66 through the notch filter 40b having the same setting conditions as the variable notch filter 40a of the feed control means 32, and the expansion / contraction section 67 is driven by the output signal of the drive amplifier 66. .

In this manner, the compensators 44 and 46 of the feed control means 32 are set as compensators that stabilize the frequency characteristics shown in FIGS. 8 and 9, and the compensator 64 of the translation control means 60 is set as shown in FIG. If it sets as a compensator which stabilizes with respect to the secondary system shown to (b) , the translation behavior of the support part 58 will absorb the elastic behavior area | regions, such as rolling elements 2a-2d, and the feed control means 32 will be vibrationally. Even when the behavior is shown, the translation control means 60 that operates instantaneously performs stable servo control that does not cause the moving body 13 to vibrate, and the moving body 13 is stably and highly accurately fed.

  The dynamic characteristic changing unit 31 is provided with a rotation information input unit 26, a necessary characteristic calculation unit 27, a characteristic control circuit 28, and a pressure adjusting unit 29, and rotation information in which rotation information such as a rotation speed and a rotation program is set in advance. The output signal from the input means 26 includes a rotation frequency given to the rotation information input means 26 by the primary natural frequency determined from the thrust stiffness of the moving body 13 and the bearings 16a and 16b, or the rotation frequency in the rotation program and The natural frequency data that does not match the higher-order frequency is input to the necessary characteristic calculation unit 27 that sends it out. The output signal of the necessary characteristic calculator 27 is an analog signal or digital data corresponding to the natural frequency data. These signals are input to the characteristic control circuit 28, and the output signal of the characteristic control circuit 28 is the natural frequency. The pressure applied to the bearings 16a and 16b is input to the pressure adjusting means 29 for setting the amount of expansion / contraction in the driving shaft 1 direction, and the output signal of the pressure adjusting means 29 is input to the pressure adjusting expansion / contraction section 5. The

On the other hand, the frequency information signal and the Q value information signal of the necessary characteristic calculator 27 are input to the variable notch filter 40 a of the feed control means 32 and the variable notch filter 40 b of the translation control means 60. Further, the frequency information signal of the necessary characteristic calculation unit 27 is a friction in which an average friction torque calculated from the converted friction torque of the feed motor 7 of the drive shaft 1 at each position of the moving body 13 corresponding to the frequency information signal is stored. Input to the torque storage means 55.
Then, as shown in FIG. 2, the output signal of the friction torque storage means 55 is input as an equivalent friction torque disturbance to the signal addition circuit RA1 in the previous stage of the drive amplifier 48 of the feed control means 32.

The characteristics used in the characteristic control circuit 28 and the pressurizing adjustment means 29 will be described. As shown in FIG. 4, the primary natural frequency of the feeding device is set so that the pressurizing pressure at which the bearing gaps of the bearings 16a and 16b are zero is Wo. Then, the primary natural frequency of the feeder at that time becomes fo. When the pressure is changed to W1 from this state, the primary natural frequency of the feeder moves to f1 due to the increase in bearing rigidity, and becomes higher than fo. In this case, the experimental data actually obtained is as shown in the Bode diagrams of FIGS.
In the characteristic control circuit 28, for example, when the natural frequency f2 is calculated by the required characteristic calculation unit 27 as shown in FIG. 4, the corresponding pressure amount W2 is output.
The relationship between the amount of pressurization and the amount of expansion / contraction of the pressurization adjusting expansion / contraction part 5 is as shown in FIG. 5. If the pressure for setting the bearing gap between the bearings 16a, 16b to 0 is Wo, then the bearings 16a, 16b Are deformed in the opposite directions to the axis of the drive shaft 1 by δo.
From this state, when the pressurization adjusting expansion / contraction section 5 is extended to X1 by the output signal of the pressurization adjusting means 29, the pressurization amount becomes W1, and when the pressurization amount W2 is given from the characteristic control circuit 28, The pressure adjusting unit 29 determines the expansion / contraction amount X2 and inputs the expansion / contraction amount X2 to the pressurization adjusting expansion / contraction unit 5.

Referring to friction torque storage means 55, pressurized volume and the primary natural frequency relationship is described in Figure 4, the relationship in terms frictional torque preload amount and feed motor 7, shown in FIG. 6 (a) look like in advance necessary primary natural frequency information, or the friction torque of each position as shown in FIG. 7 (a) of the movable member 13 in the preload amount information is measured, the average friction calculated by the equation (1) Torque data Tf is stored in the friction torque storage means 55.

As shown in FIG. 7 (b), the straightness of the drive shaft 1 and the guide mechanism is made assembly with high accuracy, caused torque variation to suit the movement amount cycles per ball screw and the drive shaft 1 rotation Yes.

Further, as shown in FIG. 3, the variable notch filters 40a and 40b constitute a T-type notch filter. The resistors R1 to R3 for determining the notch frequency and the resistor VR1 for determining the Q value are a multi-rotation type. Each of the rotary motors 51a to 51d is input with a frequency information signal and a Q value information signal from the required characteristic calculator 27. The variable resistors 50a to 5Od are connected to the rotary motors 51a to 51d. Has been.
In this case, the variable notch filter 40a, and 40b transfer function, between the notch frequency and Q value, the notch frequency fo fo = 1 / (2πRC) , the gain of the ball le stage follower and K, Q = 1 / As [4 (1-R)], R = R1 = R2 = 2 · R3, and C = C1 = C2 = C3 / 2, there is a relationship expressed by [Equation 2].

For example, the gain of the voltage follower is K = 0.9, Q = 3, K = 0.9975, and Q = 100, and the Q value during this period can be obtained by the variable operation of the variable resistor. The transfer function of the notch frequency fo = 47.5 Hz is as shown in FIG.
Thus, based on the rotation information of the rotation mechanism 30 set in advance, the dynamic characteristic varying means 31 causes the primary natural frequency of the feeder to match the rotation frequency of the rotation mechanism 30 and its higher-order frequency. The natural frequency and Q value data are set in the variable notch filters 40a and 40b of the feed control means 32, and the friction torque information signal at that time obtained from the natural frequency is a signal adding circuit. Applied to RA1 as an equivalent disturbance signal.
For this reason, the vibration excitation of the feeding device by rotational drive is avoided without causing a position error due to an increase in friction torque, and at the natural frequency corresponding to the changed natural frequency and Q value. The peak gain can be suppressed, and the feed control means 32 and the translation control means 60 can be stably operated to perform a highly accurate feed operation.

[Second Embodiment]
A second embodiment of the present invention will be described with reference to FIG.
FIG. 11 is an explanatory diagram showing the configuration of the present embodiment.

In the present embodiment, as shown in FIG. 11, the output signal of the position detector 15 is input to the friction torque storage means 55, and as shown in FIG. 7A , it corresponds to the current position information of the moving body 13. The friction torque to be stored is stored in the friction torque storage means 55. In this case, the sampling interval ΔX depends on the fluctuation state of the friction torque, but if there is no steep torque fluctuation, the sampling interval ΔX is set to such an extent that the torque fluctuation due to the lead (advance in one rotation of the drive shaft 1) can be determined. .
Since the configuration of the other parts of the present embodiment is the same as that of the first embodiment already described, duplicate description will not be given.

In the first embodiment already described, the friction torque storage means 55 stores the average value of the friction torque at each transfer position of the moving body 13 that is measured in advance, so that the guide mechanism and the drive shaft 1 It is necessary for the straightness to be assembled with high accuracy in order to perform feed control stably and with high accuracy.
In the present embodiment, the friction torque information measured by operating the support portion 58 and the dynamic characteristic changing means 31 at each transfer position is stored in the friction torque storage means 55, so that the straightness between the guide mechanism and the drive shaft 1 is determined. Even when the degree is not so good, stable and highly accurate feed control is performed.
Other operations of the present embodiment are the same as those of the first embodiment already described, and thus a redundant description will not be given.

  Thus, according to the present embodiment, in addition to the effects obtained in the first embodiment, the friction torque information measured by operating the support portion 58 and the dynamic characteristic changing means 31 at each transfer position is Since it is stored in the friction torque storage means 55, even when the straightness between the guide mechanism and the drive shaft 1 is not very good, stable and highly accurate feed control can be performed.

[Third Embodiment]
A third embodiment of the present invention will be described with reference to FIG.
FIG. 12 is a circuit diagram showing a configuration of the notch filter of the present embodiment.

In the present embodiment, the notch filters 40a and 40b receive the natural frequency information signal and Q value information of the feed stage as digital values, and the notch filters are configured by switching elements corresponding to the plurality of resistance groups 52a to 52d, An output signal is obtained by a combination of resistors selected from each resistor group.
Since the configuration of the other parts of the present embodiment is the same as that of the first embodiment or the second embodiment already described, duplicate description will not be given.

  In the first embodiment or the second embodiment already described, in the variable notch filters 40a and 40b, the multi-rotation type variable resistors 50a to 5Od are respectively controlled by the rotary motors 51a to 51d. However, in this embodiment, the switching element is operated by a combination operation of resistors selected from each resistor group, so that a sudden change in the rotation frequency is instantaneously detected. In response to this, stable and highly accurate frequency control is performed.

  As described above, according to the present embodiment, in addition to the effects obtained in the first embodiment or the second embodiment described above, the variable notch filters 40a and 40b have a plurality of switching elements. Since the operation is performed based on a combination of resistors selected from the resistor group, stable and highly accurate frequency control can be performed in response to a sudden change in the rotation frequency.

[Fourth Embodiment]
A fourth embodiment of the present invention will be described with reference to FIG.
FIG. 13 is a circuit diagram showing the configuration of the notch filter of the present embodiment.

The notch filter of this embodiment corresponds to the ROM 53a corresponding to the frequency information signal and the Q value information signal, respectively, in the preceding stage of the switching means 54a and 54b, compared to the notch filter of the third embodiment already described. A ROM 53b is provided.
Since the configuration of the other parts of the present embodiment is the same as that of the third embodiment already described, duplicate description will not be given.

According to the present embodiment, the notch filter is provided with the ROM 53a corresponding to the frequency information signal and the ROM 53b corresponding to the Q value information signal, respectively, before the switching means 54a and 54b. Thus, more stable feed control is performed.
The other operations of the present embodiment are the same as those of the third embodiment already described, and therefore will not be described repeatedly.

  Thus, according to the present embodiment, the notch filter is provided with the ROM 53a corresponding to the frequency information signal and the ROM 53b corresponding to the Q value information signal, respectively, before the switching means 54a and 54b. The effect obtained in the third embodiment can be realized by ensuring data acquisition and performing more stable feed control.

[Fifth Embodiment]
A fifth embodiment of the present invention will be described with reference to FIGS.
FIG. 14 is an explanatory diagram showing the configuration of the present embodiment, and FIG. 15 is a block diagram showing the configuration of the rotation frequency information detecting means of the rotation mechanism of the present embodiment.

In the present embodiment, as shown in FIG. 14, a capacitive displacement detection system of a holder 38 fixed to the moving body 13 is opposed to the side surface of the turntable 19 in the radial direction of the turntable 19. A shake amount detection means 39 is fixedly disposed, and a detection signal from the shake amount detection means 39 is input to the rotation information input means 26.
As shown in FIG. 15, the detection signal from the shake amount detection means 39 is a unit time after the fundamental level is selected by the comparator 56 having a fundamental wave as a sine wave and a predetermined signal level as a threshold. Counting is performed by a counter circuit 57 that performs a counting operation with a count pulse of a period, and the obtained frequency information is input to the necessary characteristic calculation unit 27.

  On the other hand, on the support 10 side, a displacement detection means 25 of a capacitive displacement detection system is fixedly disposed on the support 10 in the vicinity of the peripheral surface of the drive shaft 1, and is driven by the displacement detection means 25. The displacement of the shaft 1 in the axial direction is detected, and the detection signal of the displacement detection means 25 is input to the pressurization adjustment means 29, and the pressurization to the bearings 16a and 16b corresponding to the natural frequency is applied by the pressurization adjustment means 29. Is set to the amount of expansion and contraction in the direction of the drive shaft 1.

  Since the configuration and operation of the other parts of the present embodiment are the same as those of any of the first to fourth embodiments already described, duplicate description will not be given.

  As described above, according to the present embodiment, the shake amount detecting means 39 is fixed to the holder 38 fixed to the moving body 13 in the radial direction of the turntable 19 so as to face the side surface of the turntable 19. The detection signal of the shake amount detection means 39 is input to the rotation information input means 26, the displacement detection means 25 is fixedly provided on the support 10 in the vicinity of the peripheral surface of the drive shaft 1, and the displacement detection means 25, the displacement in the axial direction of the drive shaft 1 is detected, and the output signal of the displacement detection means 25 is input to the pressurizing adjustment means 29.

  As described above, according to the present embodiment, in addition to the effects obtained in any of the first to fourth embodiments, the rotation frequency of the rotation mechanism 30 that changes from moment to moment is obtained. From the current pressurization information of the displacement detecting means 25, the primary natural frequency of the feeder is set so as not to coincide with the rotational frequency of the rotating mechanism 30 and its higher-order frequency, and the rotational vibration varies from moment to moment. It is possible to completely avoid the vibration excitation of the feeding device and perform stable and highly accurate feeding control.

[Sixth Embodiment]
A sixth embodiment of the present invention will be described with reference to FIGS.

  FIG. 16 is an explanatory diagram showing the configuration of the present embodiment, and FIG. 17 is a block diagram showing the configuration of the rotation frequency information detecting means of the rotation mechanism of the present embodiment.

In the present embodiment, as shown in FIG. 16, displacement detection means 59 for detecting the amount of expansion / contraction of the support portion 58 is provided, and the detection signal of the displacement detection means 59 is the required characteristic calculation section 27 of the dynamic characteristic change means 31. The dynamic characteristic changing operation of the dynamic characteristic changing means 31 is assisted by the detection signal of the displacement detecting means 59. In this case, the frequency range of fo to f1 shown in FIG. 4 is expanded by using the pressurization of the bearings 12a, 12b, 16a, and 16b.
Here, as shown in FIG. 17, the rotation speed information of the rotation mechanism 30 is an A-phase pulse signal from the rotary encoder 20, and this rotation speed information is a counter circuit that performs a counting operation with a count pulse of a unit time period. The frequency information counted and obtained at 57 is input to the required characteristic calculator 27.

In this type of feeder, except for special applications, the rotation region of the normal rotating mechanism 30 is about several tens of Hz, the primary natural frequency of the feeder is 100 Hz or higher, and the higher order frequency of the rotational frequency is 2 ~ 3rd level.
When the rotation mechanism 30 rotates at a high speed of several thousand rpm to several ten thousand rpm, the rotation frequency becomes the same level as the primary natural frequency of the feeding device, and the variable region of the characteristics shown in FIGS. In any of the embodiments to the fifth embodiment, resonance may be unavoidable and normal feed control may not be possible.
However, in the present embodiment, by using the pressurization of the bearings 12a, 12b, 16a, 16b, the operating frequency range is expanded, and the stable and high-accuracy feeding can be appropriately handled corresponding to the high rotational frequency. Control is performed.

  Thus, according to the present embodiment, in addition to the effects obtained in any of the first to fifth embodiments, the displacement detection that detects the amount of expansion / contraction of the support portion 58. Means 59 are provided, and the detection signal of the displacement detection means 59 is input to the required characteristic calculator 27 of the dynamic characteristic change means 31, and the dynamic characteristic change operation of the dynamic characteristic change means 31 is performed by the detection signal of the displacement detection means 59. By assisting, it becomes possible to expand the stable operating frequency region by using the pressure applied to the bearings 12a, 12b, 16a, 16b, and to cope with the high-speed rotation of the rotating mechanism 30 accurately and stably and highly accurately. Feed control can be performed.

It is explanatory drawing which shows the structure of the 1st Embodiment of this invention. It is explanatory drawing which shows the structure of the feed control means of the same embodiment, and a translation control means. It is a circuit diagram which shows the structure of the notch filter of the embodiment. It is a characteristic view which shows the relationship between the primary natural frequency of the embodiment, and the amount of pressurization. It is a characteristic view which shows the relationship between the expansion-contraction amount and pressurization amount of the embodiment. It is a characteristic view which shows the relationship between the pressurization amount and friction torque of the embodiment. It is a characteristic view which shows the relationship between the mobile body position and friction torque of the embodiment. It is a characteristic figure between the gain and frequency under the low pressurization conditions of the embodiment. It is a characteristic figure between the gain and frequency on the high pressurization conditions of the embodiment. It is a characteristic figure of the transfer function of the notch filter of the embodiment. It is explanatory drawing which shows the structure of the 2nd Embodiment of this invention. It is a circuit diagram which shows the structure of the notch filter of the 3rd Embodiment of this invention. It is a circuit diagram which shows the structure of the notch filter of the 4th Embodiment of this invention. It is explanatory drawing which shows the structure of the 5th Embodiment of this invention. It is a block diagram which shows the structure of the rotation frequency information detection means of the rotation mechanism of the embodiment. It is explanatory drawing which shows the structure of the 6th Embodiment of this invention. It is a block diagram which shows the structure of the rotation frequency information detection means of the rotation mechanism of the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Drive shaft 2a-2d Rolling body 4 Bearing stop 7 Feed motor 8 Rotary encoder 10, 11 Support body 13 Moving body 15 Position detector 16a, 16b Bearing 19 Turntable 20 Rotary encoder 21 Rotary drive motor 23 Fitting member 32 Feed control Means 58 Supporting part 60 Translation control means 67 Telescopic part

Claims (13)

A rotating device is mounted on the moving body, and the moving body is fed by a feed command signal.
A drive shaft that is driven by a feed motor provided on one end side of the movable body, and that transports the movable body in the longitudinal axis direction;
Pressurizing support means for holding the one end side of the drive shaft rotatably about the longitudinal axis through a pressurizing bearing capable of adjusting the pressurization;
Telescopic support means provided on the other end side of the drive shaft, holding the drive shaft so as to be rotatable about the longitudinal axis, and being held so as to expand and contract in the longitudinal axis direction;
Expansion / contraction detection means for detecting expansion / contraction information of the expansion / contraction support means;
Position detecting means for detecting a transfer position of the moving body;
Dynamic characteristic changing means for changing the dynamic characteristics of the feeder by adjusting the pressure applied to the pressurized bearing based on the rotation information from the rotation mechanism and the expansion / contraction information from the expansion / contraction detection means,
Friction torque storage means for storing friction torque information at each transfer position of the movable body under the operating states of the expansion / contraction support means and the dynamic characteristic change means;
Friction torque information from the friction torque storage means is added as an equivalent disturbance to the torque signal of the feed motor, and based on a position deviation signal between the feed command signal and position information from the position detection means , Feed control means for performing feedback control;
A feed apparatus comprising: a translation feed control means for moving the extension / contraction support means to expand and contract based on the position deviation signal . A variable notch filter in which a notch frequency and a Q value are variably set based on setting information of the dynamic characteristic changing means;
2. The feeding apparatus according to claim 1, wherein the feed control means and the translation feed control means output a control signal via each of the variable notch filters.   In the translation feed control means, a comparator for comparing a preset reference signal and the position deviation signal, and when the comparator determines that the position deviation signal has a deviation of a predetermined value or more, the translation 3. A feeding apparatus according to claim 1, further comprising stop means for stopping the operation of the feed control means.   4. A feeding apparatus according to claim 3, wherein the stopping means is a changeover switch.   2. The translation feed control means is configured to drive a telescopic portion provided concentrically with respect to the drive shaft so as to move and control the telescopic support means in the longitudinal axis direction. The feeding device according to any one of claims 4 to 4.   The friction torque storage means is configured to change the dynamic characteristics and the expansion / contraction support means at each preset transfer position of the moving body based on the expansion / contraction information of the expansion / contraction detection means and the pressurization information of the dynamic characteristic change means or the natural frequency information. 6. The feeder according to claim 1, wherein average friction torque information of the friction torque information measured under the operating state of the means is stored.   The friction torque storage means expands and contracts at each transfer position of the moving body set in advance based on the expansion / contraction information of the expansion / contraction detection means and the pressurization information of the dynamic characteristic changing means, or the natural frequency information and the position information of the position detection means. 6. The feeding device according to claim 1, wherein friction torque information measured by operating the support means and the dynamic characteristic changing means is stored.   The variable notch filter of the feed control means and the translation feed control means is composed of a multi-rotation variable resistor that determines the notch frequency and Q value, and a rotary motor that changes the resistance value of the multi-rotation variable resistor. The feeding device according to claim 1, wherein:   The variable notch filter of the feed control means and the translation feed control means is composed of a plurality of resistors for determining the notch frequency and the Q value, and a switching means for changing the combination of these resistors to switch the notch frequency and the Q value. The feeding device according to any one of claims 1 to 7, wherein the feeding device is provided.   10. The feeding device according to claim 1, wherein the switching means is provided with a ROM from which a switching drive signal is read based on the current rotational speed of the rotating mechanism.   The dynamic characteristic changing means changes the dynamic characteristic of the feeder so that the natural frequency fo of the feeder set by adjusting the pressurization does not coincide with the rotational frequency of the rotating mechanism and its higher order frequency. The feeding device according to any one of claims 1 to 10.   A pressurizing transmission means that also adjusts the pressurization by the expansion / contraction support means by adjusting the pressurization by the pressurization support means by the dynamic characteristic changing means is provided between the pressurization support means and the expansion / contraction support means. The feeding device according to any one of claims 1 to 11, characterized in that:   There is further provided a shake amount detecting means for detecting a shake in the drive shaft direction of the rotation mechanism and a shaft displacement detecting means for detecting a displacement amount of the drive shaft on the pressurizing support means side, and the dynamic characteristic changing means is a pressure adjustment. 13. The dynamic characteristics of the feeding device are changed so that the natural frequency fo of the feeding device set by the formula does not coincide with the rotational frequency of the rotating mechanism and its higher order frequency. The feeding device according to any one of the above.

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