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JP4595564B2 - Preparation method for foreign matter inspection of transparent film and foreign matter inspection method - Google Patents
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JP4595564B2 - Preparation method for foreign matter inspection of transparent film and foreign matter inspection method - Google Patents

Preparation method for foreign matter inspection of transparent film and foreign matter inspection method Download PDF

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JP4595564B2
JP4595564B2 JP2005020967A JP2005020967A JP4595564B2 JP 4595564 B2 JP4595564 B2 JP 4595564B2 JP 2005020967 A JP2005020967 A JP 2005020967A JP 2005020967 A JP2005020967 A JP 2005020967A JP 4595564 B2 JP4595564 B2 JP 4595564B2
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foreign matter
transparent film
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JP2006208203A (en
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聡 本多
修央 出口
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Sumitomo Chemical Co Ltd
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Description

本発明は、透明性フィルムの異物を検査する際の検査用試料の作成方法および異物検査方法に関する。詳しくは取り扱い中に付着する異物が少ない異物検査用試料の作成方法および異物検査方法に関する。   The present invention relates to a method for preparing an inspection sample and a foreign matter inspection method for inspecting a foreign matter on a transparent film. More specifically, the present invention relates to a method for preparing a foreign matter inspection sample and a foreign matter inspection method with less foreign matter adhering during handling.

ポリカーボネートフィルム、ポリメタクリレートフィルム、ポリエチレンテレフタレートフィルム、ポリビニルアルコールフィルム、トリアセチルセルロースフィルム、ポリオレフィンフィルム等の透明性フィルム、特に光学用途の透明性フィルムは異物が問題になる。
これらの透明性フィルムは、単独または積層して用いられる。これらのフィルムまたは積層フィルムは、製造後、少なくともその片面に保護フィルムを貼合した状態で取り扱われることが多い。
Foreign matter becomes a problem in transparent films such as polycarbonate films, polymethacrylate films, polyethylene terephthalate films, polyvinyl alcohol films, triacetyl cellulose films, and polyolefin films, particularly transparent films for optical applications.
These transparent films are used alone or laminated. These films or laminated films are often handled in a state in which a protective film is bonded to at least one side after production.

透明性フィルムの異物は製品の欠陥となるため検査が欠かせない。検査は、例えば、2枚の偏光板をクロスニコル、すなわちそれらの偏光軸方向が直交する状態に配置し、検査しようとする透明性フィルムを2枚の偏光板の間に配置し、光源から光を照射し、透過光の画面をカメラで観察する方法によって行われる。
検査しようとする透明性フィルムが保護フィルム粘着偏光板の場合、検査用の偏光板に対して検査しようとする保護フィルム粘着偏光板をクロスニコル状態に配置して行われる。検査しようとする保護フィルム粘着偏光板を透過する光は、検査用偏光板により完全に遮断されるが、検査しようとする偏光板の検査用偏光板側に異物等があるとそれ明るい部分として観察され、これにより異物を検査することができる。反対側の異物は検査しようとする偏光板を裏返して同様に検査することにより行うことができる(例えば、特許文献1および特許文献2参照。)。
特開2000−206327号公報 特開2001−349839号公報
Inspection is indispensable because foreign matter on the transparent film becomes a product defect. For inspection, for example, two polarizing plates are placed in a crossed Nicols state, that is, their polarization axes are orthogonal to each other, a transparent film to be inspected is placed between the two polarizing plates, and light is emitted from the light source. The transmitted light screen is observed with a camera.
When the transparent film to be inspected is a protective film adhesive polarizing plate, the protective film adhesive polarizing plate to be inspected with respect to the inspection polarizing plate is arranged in a crossed Nicol state. The light transmitted through the protective film adhesive polarizing plate to be inspected is completely blocked by the inspection polarizing plate, but if there is a foreign object on the inspection polarizing plate side of the polarizing plate to be inspected, it is observed as a bright part Thus, foreign matter can be inspected. The foreign matter on the opposite side can be obtained by turning over the polarizing plate to be inspected and inspecting in the same manner (for example, see Patent Document 1 and Patent Document 2).
JP 2000-206327 A JP 2001-349839 A

このクロスニコルに配置した2枚の偏光板の間に検査しようとする透明性フィルムを配置して行う方法は優れた方法であるが、検査しようとする透明性フィルムの内部の異物なのか、表面に付着した異物なのかは判別し難い。
透明性フィルムは接触、摩擦や貼合されている保護フィルムを剥離した時などに静電気が発生し、表面に塵埃が付着し易く、透明性フィルムの異物を検査する場合に、表面に付着した塵埃をエアーブロー等で除去して行うけれども、完全に除去できるわけではなく、付着異物の把握に手間を要している。
The method of placing the transparent film to be inspected between the two polarizing plates arranged in the crossed Nicols is an excellent method, but it is a foreign substance inside the transparent film to be inspected, or adheres to the surface. It is difficult to determine whether it is a foreign object.
The transparent film generates static electricity when it comes into contact, friction or when the protective film is peeled off, and dust is likely to adhere to the surface. Dust adhering to the surface when inspecting foreign matter on the transparent film Is removed by air blow or the like, but it cannot be completely removed, and it takes time to grasp the adhered foreign matter.

本発明の目的は、付着異物の少ない透明性フィルムの検査用試料を提供し、少なくとも付着異物を検出して除く操作が必要なくなる分、異物検査を容易にすることにある。   An object of the present invention is to provide a sample for inspection of a transparent film with little adhered foreign matter, and to facilitate foreign matter inspection because at least the operation of detecting and removing the adhered foreign matter is not necessary.

本発明者はかかる課題を解決するために透明性フィルムの異物検査方法について鋭意検討した結果、透明性フィルムを水中で洗浄し、そのまま水中で透明性フィルムの両面を2枚の透明ガラス板で挟持した後、空気中で透明性フィルムを挟持した2枚の透明ガラス板の周囲を耐水性テープで封止して作製したガラス板で挟持して作製した異物検査用試料は付着異物が少なくなり、付着異物を検出して除く操作が必要なくなり、異物検査が容易になることを見出し、本発明を完成するに至った。   As a result of diligent examination of a foreign matter inspection method for a transparent film in order to solve such a problem, the present inventor washed the transparent film in water and sandwiched both surfaces of the transparent film in water with two transparent glass plates. After that, the sample for foreign matter inspection produced by sandwiching the periphery of two transparent glass plates sandwiched with a transparent film in air with a glass plate prepared by sealing with a water-resistant tape has less adhered foreign matters, It has been found that an operation for detecting and removing the adhering foreign matter is not required, and the foreign matter inspection becomes easy, and the present invention has been completed.

すなわち本発明は、異物検査用透明性フィルムを水中で洗浄し、そのまま水中で透明性フィルムの両面を透明ガラス板で挟持した後、空気中で透明性フィルムを挟持したガラス板の周囲を耐水性テープで封止することを特徴とする透明性フィルムの異物検査用試料の作製方法である。
また、透明性フィルムの異物を光学的に検査する方法において、透明性フィルムの異物検査用試料として、透明性フィルムを水中で洗浄し、そのまま水中で透明性フィルムの両面を2枚の透明ガラス板で挟持した後、空気中で透明性フィルムを挟持した2枚の透明ガラス板の周囲を耐水性テープで封止して作製したガラス板で挟持した透明性フィルムを用いることを特徴とする透明性フィルムの異物検査方法である。
That is, the present invention is to wash a transparent film for foreign matter inspection in water, hold both sides of the transparent film with water in the transparent glass plate as it is, and then waterproof the periphery of the glass plate in which the transparent film is held in the air. A method for producing a sample for foreign matter inspection of a transparent film, characterized by sealing with a tape.
Moreover, in the method of optically inspecting the foreign matter of the transparent film, the transparent film is washed in water as a sample for inspecting the foreign matter of the transparent film, and the two transparent glass plates on both sides of the transparent film in the water as it is Transparency characterized by using a transparent film sandwiched between two transparent glass plates sandwiched with a water-resistant tape after being sandwiched between two transparent glass plates sandwiched with a transparent film in air This is a film foreign matter inspection method.

本発明の方法によれば、透明性フィルムの検査用試料の付着異物を少なくすることができ、少なくとも付着異物を検出して除く操作が必要なくなり、異物検査が容易になる。   According to the method of the present invention, foreign matter adhering to the inspection sample of the transparent film can be reduced, and at least an operation for detecting and removing the foreign matter is not required, and foreign matter inspection is facilitated.

本発明の透明性フィルムは、特に制限されるものではなく、例えば、ポリカーボネートフィルム、ポリメタクリレートフィルム、ポリエチレンテレフタレートフィルム、ポリビニルアルコールフィルム、トリアセチルセルロースフィルム、ポリオレフィンフィルム等が挙げられる。   The transparent film of the present invention is not particularly limited, and examples thereof include a polycarbonate film, a polymethacrylate film, a polyethylene terephthalate film, a polyvinyl alcohol film, a triacetyl cellulose film, and a polyolefin film.

図1は、本発明の透明性フィルムの異物検査用試料を作製する方法の概要を示す図である。異物検査を行う透明性フィルム(1)を水(蒸留水)中で洗浄し、表面の付着物を除去する。洗浄した透明性フィルムを蒸留水中で、洗浄して付着異物のない2枚の透明ガラス板(2)の間に挿入し、気泡を除きながら透明性フィルムを挟み合わせる。挟み合わせた透明ガラス板を水中から取り出し、周囲を耐水性テープ(3)で封止する。透明ガラス表面をワイピングクロス(4)で拭き、水分を除き、検査用試料を作製する。
2枚のガラス板で挟んだ内部には水の薄膜が形成されているが、異物検査に支障きたすものではない。
水中で行うため、静電気の発生がなく、またガラス板の表面は樹脂フィルムに比べて帯電性が低い。従って、異物が洗浄除去できると共に、その後の異物の付着が抑えられる。
FIG. 1 is a view showing an outline of a method for producing a foreign matter inspection sample of a transparent film of the present invention. The transparent film (1) to be inspected for foreign matter is washed in water (distilled water) to remove surface deposits. The washed transparent film is washed in distilled water and inserted between two transparent glass plates (2) having no adhered foreign matter, and the transparent film is sandwiched while removing bubbles. The sandwiched transparent glass plate is taken out from the water, and the periphery is sealed with a water-resistant tape (3). The transparent glass surface is wiped with a wiping cloth (4), moisture is removed, and a test sample is prepared.
Although a thin film of water is formed inside the two glass plates, it does not hinder foreign matter inspection.
Since it is carried out in water, there is no generation of static electricity, and the surface of the glass plate is less charged than the resin film. Accordingly, the foreign matter can be cleaned and removed, and the subsequent adhesion of the foreign matter can be suppressed.

図2は透明性フィルムに光を透過せて異物を検査する装置の一例を示す模式図である。
光源(10)とカメラ(20)の間に、2枚の偏光板(5)、(6)が配置され、その間に水中で2枚の透明ガラス板で挟持された検査しようとする透明性フィルム(7)が配置されている。ここで、2枚の偏光板は相互にクロスニコルに、すなわちそれらの偏光軸方向が互いに直交する状態に配置されている。カメラからの画像信号は画像処理装置(30)で処理され、異物を検出し、モニターに出力される。なお、検査しようとする透明性フィルムが偏光板の場合には、上記2枚の偏光板は一方のみを配置して行う。
FIG. 2 is a schematic view showing an example of an apparatus for inspecting foreign matters by transmitting light through a transparent film.
Two polarizing plates (5) and (6) are arranged between the light source (10) and the camera (20), and the transparent film to be inspected is sandwiched between two transparent glass plates in water. (7) is arranged. Here, the two polarizing plates are arranged in crossed Nicols, that is, in a state where their polarization axes are orthogonal to each other. The image signal from the camera is processed by the image processing device (30) to detect foreign matter and output to the monitor. When the transparent film to be inspected is a polarizing plate, only one of the two polarizing plates is disposed.

光源(10)からの光は偏光板(5)の偏光軸方向の偏光成分を選択的に透過し、透明性フィルム(7)に異物がなければ、透明性フィルムを透過してくる光は偏光板(6)で阻止されてカメラの撮影画像は暗い色を呈している。透明性フィルムに異物があると、その部分の偏光方向が変わり、偏光板(5)を通過し、暗い撮影画像中に明るい部分(輝点)が現れる。   The light from the light source (10) selectively transmits the polarization component in the polarization axis direction of the polarizing plate (5). If there is no foreign matter in the transparent film (7), the light transmitted through the transparent film is polarized. The image captured by the camera is darkened by being blocked by the plate (6). If there is a foreign substance in the transparent film, the polarization direction of the portion changes, passes through the polarizing plate (5), and a bright portion (bright spot) appears in a dark photographed image.

カメラとしては、通常CCDカメラが使用され、撮影して得られる画像信号は、画像処理装置でコンピュータシステムを利用して画像処理し、異物が検出される。通常、その信号強度から異物の大小が把握される。
用いるCCDカメラの解像度にもよるが、CCDカメラの代わりに顕微鏡を用いて異物を目視検査した場合、焦点の関係でより小さい異物を検出することが可能であるが検出範囲は狭く、全体を検査するには時間を要し、多くの試料を迅速に検査するには好ましい方法とは言えない。
As a camera, a CCD camera is usually used, and an image signal obtained by photographing is subjected to image processing using a computer system by an image processing apparatus, and foreign matter is detected. Usually, the size of the foreign matter is grasped from the signal intensity.
Although it depends on the resolution of the CCD camera used, when a foreign object is visually inspected using a microscope instead of a CCD camera, it is possible to detect a smaller object due to the focus, but the detection range is narrow and the entire inspection is performed. It takes time and is not a preferable method for quickly inspecting many samples.

透明性フィルムに付着する異物は種々の形状、大きさのものがあるが、典型的な例として、図3に示す糸屑状のものが挙げられる。
このような異物は、フィルムの移動方向に平行方向の異物の長さ成分と垂直方向の長さ成分のうちの長い成分に対する短い成分の比が設定値以下、平行方向の異物の長さ成分と垂直方向の長さ成分を乗算して求められる面積に対する異物の面積の比が設定値以下、異物の最大長さを対角線とする正方形の面積に対する異物の面積比が設定値以下、または異物の最大長さを直径とする円の面積に対する異物の面積比が設定値以下である異物として検出することが可能である。
There are various shapes and sizes of foreign substances adhering to the transparent film, and a typical example is a lint-like one shown in FIG.
Such foreign matter has a ratio of the short component to the long component of the length component in the direction parallel to the moving direction of the film and the length component in the vertical direction equal to or less than the set value, The ratio of the area of the foreign object to the area obtained by multiplying the vertical length component is less than the set value, the ratio of the area of the foreign object to the square area whose diagonal is the maximum length of the foreign object is less than the set value, or the maximum of the foreign object It is possible to detect a foreign object having an area ratio of the foreign object to the area of a circle whose length is a diameter being equal to or less than a set value.

図4はこれを説明する図である。異物は細長い楕円状に模式的に示してあり、(A)において白抜き矢印はフィルムの移動方向を表し、平行方向の異物の長さ成分をX、垂直方向の長さ成分をYで示す。異物のフィルムの移動方向に対する傾きの程度によって平行方向の長さ成分および垂直方向の長さ成分の大きさは変わる。本発明においては長い成分に対する短い成分の比が設定値以下の異物を表面に付着した異物と判定される。設定値は、フィルムの種類、付着環境にある異物によるが、トリアセチルセルロースフィルムの場合、通常、約0.2〜0.4、好ましくは約0.3とすることによって判定される。   FIG. 4 is a diagram for explaining this. The foreign matter is schematically shown as an elongated ellipse, and in (A), the white arrow indicates the moving direction of the film, the length component of the foreign matter in the parallel direction is indicated by X, and the length component in the vertical direction is indicated by Y. The size of the length component in the parallel direction and the length component in the vertical direction varies depending on the degree of inclination of the foreign material with respect to the moving direction of the film. In the present invention, it is determined that a foreign material having a ratio of a short component to a long component equal to or less than a set value is adhered to the surface. The set value depends on the type of film and the foreign matter in the adhesion environment, but in the case of a triacetyl cellulose film, it is usually determined by setting it to about 0.2 to 0.4, preferably about 0.3.

また、図4の(A)は、平行方向の異物の長さ成分Xと垂直方向の長さ成分Yを乗算して求められる面積XYに対する異物の面積比を説明する図である。図4の(B)は、異物の最大長さを対角線とする正方形の面積に対する異物の面積比を説明する図である。図4の(C)は、異物の最大長さを直径とする円の面積に対する異物の面積比を説明する図である。
設定値は、フィルムの種類、付着環境にある異物によるが、トリアセチルセルロースフィルムの場合、通常、平行方向の異物の長さ成分と垂直方向の長さ成分を乗算して求められる面積に対する異物の面積の比の設定値は約0.2〜0.4、好ましくは約0.3であり、異物の最大長さを対角線とする正方形の面積に対する異物の面積比の設定値は約0.2〜0.4、好ましくは約0.3であり、異物の最大長さを直径とする円の面積に対する異物の面積比の設定値は約0.1〜0.3、好ましくは約0.2とすることによって判定される。
FIG. 4A is a diagram for explaining the area ratio of the foreign matter to the area XY obtained by multiplying the length component X of the foreign matter in the parallel direction and the length component Y in the vertical direction. FIG. 4B is a diagram illustrating the area ratio of a foreign object to a square area whose diagonal is the maximum length of the foreign object. FIG. 4C is a diagram for explaining the area ratio of a foreign object to the area of a circle whose diameter is the maximum length of the foreign object.
The set value depends on the type of film and the foreign material in the adhesion environment. However, in the case of a triacetyl cellulose film, the foreign material is usually multiplied by the length component in the vertical direction and the length component in the vertical direction. The set value of the ratio of the area is about 0.2 to 0.4, preferably about 0.3, and the set value of the area ratio of the foreign matter to the square area whose diagonal is the maximum length of the foreign matter is about 0.2. To 0.4, preferably about 0.3, and the set value of the area ratio of the foreign matter to the area of the circle whose diameter is the maximum length of the foreign matter is about 0.1 to 0.3, preferably about 0.2. It is determined by.

通常、画像信号は画素または画素群毎に求められ、画素が占める長さからそれぞれの長さが、異物が占める画素の数から面積が容易に求められる。   Usually, an image signal is obtained for each pixel or pixel group, and each length is easily obtained from the length occupied by the pixel, and the area is easily obtained from the number of pixels occupied by the foreign matter.

このようにして図3に示す糸屑状の付着異物が把握されるが、透明性フィルム内の異物は、信号強度の大小によって検出することができる。   In this manner, the lint-like adhered foreign matter shown in FIG. 3 is grasped, but the foreign matter in the transparent film can be detected by the magnitude of the signal intensity.

本発明の方法で作製した透明性フィルムの異物検査用試料には、上記の方法で検出される付着異物は殆ど見られず、この付着異物を検出する操作を省略することが可能になる。   In the sample for inspecting foreign matter of the transparent film produced by the method of the present invention, the attached foreign matter detected by the above method is hardly seen, and the operation for detecting this attached foreign matter can be omitted.

以下、実施例により本発明をより詳細に説明するが、本発明はこれら実施例に限定されるものではない。   EXAMPLES Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited to these Examples.

実施例1
トリアセチルセルロースフィルム(TACフィルム)(A−1)の異物検査を行った。
図1に示すように、25×17cmに切り出したTACフィルムを蒸留水中で洗浄し、表面の付着物を除去した。洗浄したTACフィルムを蒸留水中で、洗浄して付着異物のない2枚のガラス板(30×20cm)の間に挿入し、気泡を除きながらTACフィルムを挟み合わせた。挟み合わせたガラス板を水中から取り出し、周囲を耐水性テープで封止した。ガラス表面をワイピングクロスで拭き、水分を除き、検査用TACフィルムのサンプルを作製した。
Example 1
The foreign matter inspection of the triacetyl cellulose film (TAC film) (A-1) was performed.
As shown in FIG. 1, the TAC film cut out at 25 × 17 cm was washed in distilled water to remove surface deposits. The washed TAC film was washed in distilled water and inserted between two glass plates (30 × 20 cm) having no adhered foreign matter, and the TAC film was sandwiched while removing bubbles. The sandwiched glass plate was taken out from the water, and the periphery was sealed with water-resistant tape. The glass surface was wiped with a wiping cloth to remove moisture, and a sample TAC film for inspection was prepared.

図2に示すように、光源(10)とカメラ(20)の間に、2枚の偏光板(5)、(6)をクロスニコルに配置し、その間に作製した上記の検査用TACフィルム(7)を配置した。光源として180Wのメタハラ伝送ライト、カメラとして55mmマクロレンズを備えた5000画素ラインカメラを用いた。
サンプルを3m/minで移動させながら異物検査を行った。カメラからの画像信号は画像処理装置(30)で処理した。
As shown in FIG. 2, between the light source (10) and the camera (20), two polarizing plates (5) and (6) are arranged in crossed Nicols, and the inspection TAC film produced between them ( 7) was placed. A 5000-pixel line camera equipped with a 180 W Metahara transmission light as a light source and a 55 mm macro lens as a camera was used.
Foreign matter inspection was performed while moving the sample at 3 m / min. The image signal from the camera was processed by the image processing device (30).

フィルムの移動方向に平行方向の異物の長さ成分と垂直方向の長さ成分のうちの長い成分に対する短い成分の比が0.3以下、平行方向の異物の長さ成分と垂直方向の長さ成分を乗算して求められる面積に対する異物の面積の比が0.3以下、異物の最大長さを対角線とする正方形の面積に対する異物の面積比が0.3以下、または異物の最大長さを直径とする円の面積に対する異物の面積比が0.2以下の異物は検出されなかった。
TACフィルムの他のサンプルについて同様に異物検査を行った。結果を表1に示す。
The ratio of the short component to the long component of the length component in the direction parallel to the moving direction of the film and the length component in the vertical direction is 0.3 or less, the length component in the parallel direction and the length in the vertical direction The ratio of the area of the foreign object to the area obtained by multiplying the components is 0.3 or less, the area ratio of the foreign object to the square area whose diagonal is the maximum length of the foreign object is 0.3 or less, or the maximum length of the foreign object No foreign matter having a foreign matter area ratio of 0.2 or less with respect to the area of the circle as the diameter was detected.
Foreign matter inspection was similarly performed on other samples of the TAC film. The results are shown in Table 1.

比較例1
25×17cmに切り出したTACフィルム(A−1)を、そのままガラス板(30×20cm)に粘着剤P3132(リンテック(株)製)で接着してサンプルを作製した。このサンプルを用いて実施例1と同様にして異物検査を行った。1m2当たり480個の異物が検出された。
TACフィルムの他のサンプルについて同様に異物検査を行った。結果を表1に示す。
Comparative Example 1
A TAC film (A-1) cut out to 25 × 17 cm was directly bonded to a glass plate (30 × 20 cm) with an adhesive P3132 (manufactured by Lintec Corporation) to prepare a sample. Using this sample, foreign matter inspection was performed in the same manner as in Example 1. 1 m 2 per 480 of the foreign matter is detected.
Foreign matter inspection was similarly performed on other samples of the TAC film. The results are shown in Table 1.

Figure 0004595564

本発明の方法で作製した異物検査試料には図3で示す付着異物が検出されず、異物検査する際に付着異物を検出する操作を省略できる。
Figure 0004595564

3 is not detected in the foreign matter inspection sample produced by the method of the present invention, and the operation of detecting the attached foreign matter can be omitted when the foreign matter inspection is performed.

本発明の透明性フィルムの異物検査用試料を作製する方法の概要を示す図である。It is a figure which shows the outline | summary of the method of producing the sample for foreign material inspection of the transparent film of this invention. 透明性フィルムに光を透過せて異物を検査する装置の一例を示す模式図である。It is a schematic diagram which shows an example of the apparatus which permeate | transmits light to a transparent film and test | inspects a foreign material. 透明性フィルムに付着した異物の例を示す図である。It is a figure which shows the example of the foreign material adhering to the transparency film. 異物の形状を規定する方法を説明するための図である。It is a figure for demonstrating the method to prescribe | regulate the shape of a foreign material.

符号の説明Explanation of symbols

1 透明性フィルム
2 ガラス板
3 耐水性テープ
4 ワイピングクロス
5 偏光板
6 偏光板
7 透明性フィルム
10 光源
20 カメラ
30 画像処理装置

DESCRIPTION OF SYMBOLS 1 Transparent film 2 Glass plate 3 Water-resistant tape 4 Wiping cloth 5 Polarizing plate 6 Polarizing plate 7 Transparent film 10 Light source 20 Camera 30 Image processing apparatus

Claims (4)

異物検査用透明性フィルムを水中で洗浄し、そのまま水中で透明性フィルムの両面を透明ガラス板で挟持した後、空気中で透明性フィルムを挟持したガラス板の周囲を耐水性テープで封止することを特徴とする透明性フィルムの異物検査用試料の作製方法。   The transparent film for foreign substance inspection is washed in water, and both sides of the transparent film are sandwiched between transparent glass plates in water, and then the periphery of the glass plate sandwiched in the air is sealed with water-resistant tape. A method for producing a sample for inspecting a foreign substance of a transparent film. 透明性フィルムの異物を光学的に検査する方法において、透明性フィルムの異物検査用試料として、透明性フィルムを水中で洗浄し、そのまま水中で透明性フィルムの両面を2枚の透明ガラス板で挟持した後、空気中で透明性フィルムを挟持した2枚の透明ガラス板の周囲を耐水性テープで封止して作製したガラス板で挟持した透明性フィルムを用いることを特徴とする透明性フィルムの異物検査方法。   In the method of optically inspecting the foreign matter of the transparent film, the transparent film is washed in water as a sample for inspecting the foreign matter of the transparent film, and both sides of the transparent film are sandwiched between two transparent glass plates in the water. Then, a transparent film sandwiched between glass plates produced by sealing the periphery of two transparent glass plates sandwiched with a transparent film in air with a water-resistant tape is used. Foreign substance inspection method. 異物を光学的に検査する方法が、透明性フィルムに光を透過せて異物を検査する方法である請求項2記載の方法。 Method of inspecting a foreign material optically method of claim 2 wherein the method by transmitting light transparency film for inspecting foreign matter. 異物を光学的に検査する方法が、光源とカメラの間にクロスニコルに配置した2枚の偏光板の間を透明性フィルムを移動させ、透過してくる光源からの光をカメラで撮影し、その画像処理によって透明性フィルム中の異物を検査する方法である請求項2記載の方法。   A method for optically inspecting a foreign object is to move a transparent film between two polarizing plates arranged in crossed Nicols between a light source and a camera, and photograph the light from the transmitted light source with the camera. 3. The method according to claim 2, which is a method for inspecting foreign matter in the transparent film by treatment.
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