JP4637084B2 - Energy beam irradiation apparatus and irradiation method - Google Patents

Description

  The present invention relates to an energy beam irradiation apparatus and an irradiation method, and more particularly, to an energy beam irradiation apparatus and an irradiation method capable of efficiently irradiating an irradiated object with an energy beam.

  In processing apparatuses for semiconductor wafers (hereinafter simply referred to as “wafers”), for example, a protective sheet is applied to the circuit surface of the wafer to perform back surface grinding, or a dicing tape is applied to a plurality of chips. Or processing is performed. The sheet used for such treatment employs an energy ray curable adhesive, for example, an ultraviolet curable adhesive. After the treatment as described above, the adhesive is cured by an ultraviolet irradiation device. As a result, the adhesive force is weakened so that the wafer can be easily peeled away without being damaged.

  For example, Patent Document 1 discloses the ultraviolet irradiation device. The ultraviolet irradiation device in the same document includes an adsorption mechanism for adsorbing and holding an irradiated object in which a wafer is integrated with a ring frame via a protective sheet, a housing having an open top and a bottom made of glass, The structure provided with the light source which is provided in the outer side of the bottom part and irradiates an ultraviolet-ray is employ | adopted. Here, the object to be irradiated is positioned in the housing by closing the housing with an adsorption mechanism, and in this state, the ultraviolet light is transmitted to the bottom portion to irradiate the object to be irradiated with the ultraviolet light. It is supposed to be.

JP 2004-281430 A

  However, since the ultraviolet irradiation device disclosed in Patent Document 1 is configured to cure the adhesive of the protective sheet with ultraviolet rays that pass through the entire area of the bottom portion, so-called collective or entire surface irradiation is performed. In order to secure the illuminance to a portion relatively far from the dome, a high-power lamp must be used, resulting in inconveniences such as an increase in the size of the device and an increase in power consumption and a running cost. Accordingly, when the plane area of the irradiated object is large, a lamp capable of irradiating ultraviolet rays over a corresponding wide area is required, which causes a decrease in versatility.

[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and its purpose is to efficiently irradiate the irradiated body with energy rays such as ultraviolet rays, thereby reducing running power while reducing power consumption. An object of the present invention is to provide an energy beam irradiation apparatus and an irradiation method that can be used for general purposes.

In order to achieve the above-mentioned object, the present invention provides an energy beam irradiation apparatus for irradiating an irradiated body, in which an energy beam reaction type adhesive sheet is attached or temporarily attached to a plate-like member,
A transporting means for transporting the irradiated body; a case closed by the transporting means and having the irradiated body disposed therein; and supported so as to be movable along a predetermined guide ; and the irradiated body through the case Irradiation means having a light source for irradiating the body with energy rays,
The conveying means is provided so as to be movable along the guide together with the case in a state where the case is closed, and the irradiating means partially irradiates the energy beam to the irradiated object in the moving case. It is configured.

  Further, it is preferable that the irradiating means includes a reflecting surface that converges energy rays in a line shape along a direction substantially orthogonal to the moving direction of the case.

  Furthermore, it is good also as a structure which has a filling means to fill the case with the inert gas in the state which closed the said case.

In addition, a receiving table and a delivery table of plate-like members are respectively located on both sides of the guide, and the case is positioned between these tables,
The conveying means is provided at an X-axis robot extending between the receiving table and the delivery table, a Z-axis robot supported by the X-axis robot, a tip of the Z-axis robot, and the irradiated object And a shielding plate capable of adsorbing and holding, and when the shielding plate closes the case, the irradiated body is positioned in the case.

Furthermore, the present invention relates to an energy ray irradiation method for irradiating an irradiated object having an energy ray reaction type adhesive sheet attached or temporarily attached to a plate-like member,
A method is adopted in which after the object to be irradiated is positioned in a substantially closed case, energy rays are partially irradiated from the outside while the case is moved along a predetermined guide .

  In the method, the energy rays are converged in a line along a direction substantially orthogonal to the moving direction of the irradiated object, and the energy rays are sequentially applied from the front end side to the rear end side in the moving direction of the irradiated object. The method of irradiating can be taken.

According to the present invention, energy rays such as ultraviolet rays are partially irradiated, but since the irradiated object in the case moves, it is only necessary to move so that the irradiated object passes through the region to be partially irradiated. It will be. Therefore, it is not necessary to perform batch or whole surface irradiation as in the past, and it is not necessary to use a high output lamp in consideration of the relative distance between the irradiated object and the light source. Thus, an energy-saving type energy beam irradiation device can be provided.
Furthermore, since the case is configured to follow the movement of the conveyance unit, a case conveyance unit is not required separately, and the apparatus configuration can be simplified.
Furthermore, since the energy rays have a reflecting surface that converges in a line shape, it is sufficient to use a light source that extends in the line direction.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a schematic front view in which the present invention is applied to an ultraviolet irradiation device, and FIG. 2 shows an enlarged schematic perspective view of a part thereof. In these drawings, the ultraviolet irradiation device 10 is transported by a transport unit 12 that transports the irradiated body 11 and a case 13 in which the irradiated body 11 is placed while being blocked by using a part of the transport unit 12. And irradiation means 14 for irradiating the irradiated object 11 with ultraviolet rays through the case 13. Here, as shown in FIG. 4, the object to be irradiated 11 in the present embodiment is a target in which an ultraviolet curable adhesive sheet S is attached to a wafer W as a plate-like member.

  As shown in FIG. 1, the conveying means 12 extends between a receiving table 16 and a delivery table 17 positioned on both sides of a guide 15 that guides the case 13 so as to be movable in the X-axis direction (left-right direction). An X-axis robot 20, a Z-axis robot 21 supported by the X-axis robot 20, and a shielding plate that is provided at the tip (lower end) of the Z-axis robot 21 and can hold the irradiated object 11 by suction. 23. The receiving table 16 constitutes a receiving surface when a wafer W is bonded to the wafer W in a previous process via a transfer arm or the like (not shown). It constitutes a delivery surface when the irradiated object 11 is transferred to the next process.

  The X-axis robot 20 includes a robot body 26 and a slider 27 that can move along the robot body 26, and the Z-axis robot 21 is supported by the slider 27. The Z-axis robot 21 includes a robot main body 29, and the shield plate 23 is fixed to the output shaft 30 of the robot main body 29 so that the Z-axis robot 21 can move up and down. As shown in FIG. 2, the shielding plate 23 includes an upper wall 32 having a substantially circular planar shape, and a peripheral wall 33 that hangs down from the outer periphery of the upper wall 32, and a lower surface of the upper wall 32. A suction hole (not shown) is formed on the side so that the irradiated object 11 can be sucked and held.

  As shown in FIGS. 2 to 4, the case 13 includes a case main body 40 and a cylindrical body 41 positioned on the upper portion of the case main body 40. The case body 40 has a substantially square outer shape in plan view, and has an upper wall 42 having a substantially circular opening 42A at the center, four side walls 43 depending from the outer edge of the upper wall 42, and a lower portion of the side wall 43. The bottom wall 45 is positioned so as to be closed, and the slider 46 is disposed at four locations on the lower surface side of the bottom wall 45 and moves along the guide 15. The top wall 42 and the side wall 43 are made of a concealing material that does not transmit ultraviolet rays, while the bottom wall 45 is made of a material that can transmit ultraviolet rays, for example, glass. Thus, the ultraviolet rays irradiated from the irradiation means 14 can be introduced into the case 13. A pipe 48 as a filling means is connected to the upper wall 42, and a case 13 in which nitrogen gas N as an inert gas is blocked from the pump (not shown) through the pipe 48 is filled. The filling means is not particularly limited as long as it can be filled with an inert gas.

  The cylindrical body 41 is provided in a substantially ring shape in a plan view directed upward from the forming edge of the opening 42 </ b> A, and the upper wall 32 of the shielding plate 23 is seated on the upper end of the cylindrical body 41. The peripheral wall 33 of the shielding plate 23 is positioned on the outer periphery of the shielding plate 23, and thus the case 13 forms a space substantially closed by the shielding plate 23.

  The guides 15 that guide the case 13 so as to be movable are arranged in a pair substantially parallel to each other at two locations along the direction orthogonal to the paper surface in FIG. 1, and the irradiation means 14 is arranged between the guides 15. . The irradiating means 14 includes a high-pressure mercury lamp (hereinafter referred to as “mercury lamp”) 50 serving as a light source, and a reflecting surface for partially irradiating ultraviolet rays emitted from the mercury lamp 50 toward the irradiated surface, that is, the adhesive sheet S. And a reflective hood 51 that forms The mercury lamp 50 has a circular tube shape extending between the guides 15, and the reflective hood 51 is provided in a substantially U shape extending along the mercury lamp 50. As shown in FIG. 4, the reflection hood 51 reflects the ultraviolet rays from the mercury lamp 50 by an inner curved surface, converges the ultraviolet rays as it goes upward, and is substantially in the Y-axis direction with respect to the irradiated surface. It is comprised so that it may become line-shaped partial irradiation. The mercury lamp 50 has a sealed structure (not shown) so that the shutter 52 provided on the upper surface thereof moves in the X-axis direction only when irradiating ultraviolet rays, and irradiates the irradiated object 11 with ultraviolet rays. (See FIG. 1).

  Next, the ultraviolet irradiation method according to this embodiment will be described. Here, for convenience of explanation, it is assumed that the case 13 stands by with the position indicated by the two-dot chain line in FIG. 1 as the initial position, and the shielding plate 23 is in a position where the case 13 is closed. .

  In the previous step, the adhesive sheet S is attached to the wafer W, and the irradiated object 11 having been subjected to predetermined processing is transferred onto the upper surface of the receiving table 16 via a transfer arm (not shown). At this time, the irradiated body 11 is kept in a state where the adhesive sheet S is located on the lower surface side. Then, the Z-axis robot 21 is moved onto the irradiated object 11 via the X-axis robot 20, and the irradiated object 11 is adsorbed via the shielding plate 23 as shown by the rightmost two-dot chain line in FIG. Retained.

  The irradiated object 11 thus sucked and held moves onto the case 13 via the X-axis robot 20, and the shielding plate 23 is lowered by the lowering of the Z-axis robot 21 and is seated on the cylinder 41. Then, in a state where the case 13 is closed by the shielding plate 23, the irradiated object 11 is positioned in the space.

  Next, the case 13 is filled with nitrogen gas N through the pipe 48, and the case 13 moves on the guide 15 to the left in FIG. 1 by the driving force of the X-axis robot 20. At this time, the irradiation unit 14 has the mercury lamp 50 lit, and the adhesive sheet S is irradiated with line-shaped ultraviolet rays along the Y-axis direction by opening the shutter 52. Accordingly, when the case 13 moves in the X-axis direction on the line-shaped irradiation light, the irradiated object 11 moves from the moving direction front end side (left end side in FIG. 4) to the moving direction rear end side (right end in FIG. 4). The ultraviolet curable adhesive of the adhesive sheet S is cured by sequentially receiving ultraviolet rays toward the side).

  After the case 13 passes along with the Z-axis robot 21 above the irradiation means 14, the shielding plate 23 is raised by the Z-axis robot 21, and is indicated by the two-dot chain line at the left end in FIG. 1 by the X-axis robot 20. Then, the irradiated object 11 having been irradiated with ultraviolet rays is transferred onto the delivery table 17, and the irradiated object 11 is transferred to the next process via a transfer arm (not shown).

  Therefore, according to such an embodiment, the irradiated surface of the irradiated object 11 is sequentially irradiated by passing the irradiated object 11 located in the case 13 through the ultraviolet irradiation region irradiated from the irradiation means 14. Since it is configured, it is not necessary to irradiate ultraviolet rays in the diffusing direction, so that the irradiated surface can be reliably irradiated with ultraviolet rays, and the ultraviolet curing of the adhesive sheet S can be stabilized. Get.

As described above, the best configuration, method, and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

For example, in the above embodiment, the case where the adhesive of the adhesive sheet S is cured by irradiating with ultraviolet rays has been described, but the present invention is not limited to this. For example, the present invention can be applied to an apparatus or the like that temporarily attaches a heat-sensitive adhesive sheet to a wafer and heats it to strongly adhere the adhesive sheet to the wafer. Examples of energy rays in this case include infrared rays.
Further, the plate-like member is not limited to a wafer, and includes other plate-like members such as those in which an adhesive sheet is attached to glass, a steel plate, a resin plate, or the like.
Further, the conveying means 12 is constituted by the X-axis robot 20 and the slider 27, but holds the shielding plate 23, and the X, Y, Z orthogonal three-axis directions and θ between the receiving table 16 and the delivery table 17. Of course, it is possible to use an articulated robot that can move in the axial direction.
Further, as the light source of the irradiating means 14, the adoption of a halogen lamp, a fluorescent lamp, a metal halide lamp, or a light emitting diode in addition to a mercury lamp is not prevented.
Furthermore, in the present embodiment, nitrogen gas is used as an example of the inert gas, but another inert gas such as argon gas or carbon dioxide gas may be used instead.

The schematic front view of the ultraviolet irradiation device concerning this embodiment. The schematic perspective view which expanded the principal part of FIG. The partial top view of the said ultraviolet irradiation device. The front view which shows the state by which an to-be-irradiated body is irradiated with an ultraviolet-ray.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Ultraviolet irradiation apparatus 11 To-be-irradiated body 12 Conveyance means 13 Case 14 Irradiation means 15 Guide 16 Reception table 17 Delivery table 20 X-axis robot 21 Z-axis robot 23 Shielding plate 48 Piping (filling means)
50 Mercury lamp (light source)
51 Reflective hood (reflective surface)
W Semiconductor wafer (plate-like member)
S Adhesive sheet

Claims (6)

In the energy beam irradiation device for irradiating the irradiated object with the energy beam reaction type adhesive sheet attached or temporarily attached to the plate-shaped member,
A transporting means for transporting the irradiated body; a case closed by the transporting means and having the irradiated body disposed therein; and supported so as to be movable along a predetermined guide ; and the irradiated body through the case Irradiation means having a light source for irradiating the body with energy rays,
The transport means is provided so as to be movable along the guide with the case closed, and the irradiation means partially irradiates the irradiated body in the moving case with the energy beam. A featured energy beam irradiation device. It said illumination means, the energy beam irradiation apparatus according to claim 1, characterized in that it comprises a reflecting surface to converge the energy beam along a direction substantially perpendicular to the moving direction of the casing in a line. Energy beam irradiation apparatus according to claim 1, wherein further comprising a filling means for filling an inert gas into the pertaining case in a state of closing the case. A plate-shaped member receiving table and a delivery table are positioned on both sides of the guide, respectively, and the case is positioned between the tables,
The conveying means is provided at an X-axis robot extending between the receiving table and the delivery table, a Z-axis robot supported by the X-axis robot, a tip of the Z-axis robot, and the irradiated object the and a suction capable of holding the shielding plate, when the shielding plate closes the said case, the energy according to any one of claims 1 to 3 wherein the irradiation object is being located in a casing X-ray irradiation device. In the energy beam irradiation method of irradiating the irradiated body with the energy beam reaction type adhesive sheet attached or temporarily attached to the plate-like member,
An energy ray irradiating method comprising: irradiating a part of an energy ray from the outside while moving the case along a predetermined guide after the irradiated object is positioned in a substantially closed case. Irradiating energy beams sequentially from the front end side to the rear end side in the moving direction of the irradiated object in a state where the energy rays are converged in a line shape along a direction substantially orthogonal to the moving direction of the irradiated object. 6. The energy beam irradiation method according to claim 5, wherein

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