JP4670286B2 - Fan filter unit - Google Patents

Description

  The present invention relates to a fan filter unit used in a clean room requiring a clean space such as a semiconductor factory or a food factory.

Conventionally, in this type of fan filter unit, a plurality of guide plates and diffusion plates are provided in the chamber as means for improving the wind speed distribution (see, for example, Patent Document 1).
JP-A-9-94419 ([0003] to [0018], FIG. 1)

  In such a conventional fan filter unit, there is a problem that air currents collide with each other inside and there is a problem that it is difficult to make the wind speed distribution uniform due to unstable air currents, and clean air is supplied more uniformly. Is required.

  In addition, with the recent movement of local cleanliness, the space to maintain a clean environment has been reduced in size, and there is a problem that the fan filter unit cannot be installed unless it is reduced in size and thickness, and a clean room with high volumetric efficiency In order to realize the above, downsizing and thinning of the fan filter unit are required.

  The present invention solves such a conventional problem, and an object of the present invention is to provide a fan filter unit that can improve the uniformity of the wind speed distribution and can be made smaller and thinner.

In order to achieve the above object, the fan filter unit of the present invention has a suction port at the top of a box-shaped chamber, a fan unit comprising a fan and a motor is built in the chamber, and a filter is provided on the outlet side of the fan unit. disposed, said fan unit comprising a support fixed to the chamber, the fan unit and provided with a diffusion means between said filter, a plurality diffusion means is a box-top is open to the side and the bottom oblong opening and provided with a plurality of wind guides adjacent to the opening, the lower surface of the diffusion means and vertically the strip baffles intersect at the center of the lower surface of the diffusion means bear diagonal Yu and, the side surface of the diffusion means on a lower surface separated the wind direction guide and the opening in all separated by the baffle said baffle of the diffusion means A plurality arranged in rows, and is characterized in that for guiding the airflow from the fan unit is provided to be inclined to the wind direction guide on the lower surface of the diffusion means toward the center of the chamber.

Also, other means, spreading means supports the full An'yunitto is obtained by the claim 1, wherein the securing the switch Yanba.

Also, other means, the diffuser means to the horizontal direction of the planar shape, the lower surface of the front Symbol diffusion means has been vertically the strip baffles intersect at the center of the lower surface of the diffusion means bear diagonal the on the lower surface of the diffusion means in parallel arrayed and side surfaces of the diffusion means, separated the open mouth and the wind direction guide in all their separated by the baffle said baffle, said the lower surface of the diffusion means A wind direction guide is provided to be inclined to guide the airflow from the fan unit toward the center of the chamber.

  Another means is a wind-up guide that is cut and raised integrally with the opening.

Another means is that punching metal is used on the lower surface of the diffusing means , the opening is a round hole provided in the punching metal, and a wind direction guide is provided on the lower surface of the punching metal .

  Another means uses punching metal for the support.

  Another means is that the size or quantity of the punching metal opening hole is partially changed.

  The other means has a position changing means capable of changing the position of the diffusing means.

  By these means, it is possible to obtain a fan filter unit that improves the uniformity of the wind speed distribution and can be made smaller and thinner.

  According to the present invention, the air flow blown out from the fan unit is uniformly blown over the entire lower filter surface, and a fan filter unit having an effect of making the blown air velocity distribution from the filter uniform can be obtained.

  In addition, by disposing the support and allowing the diffusing means to support the fan unit, it is possible to obtain a fan filter unit that has an effect of reducing the thickness by simplifying the structure.

  In addition, the diffusion means can be arranged in a size inscribed in the chamber, and even when the outer dimension of the chamber is changed, a uniform wind speed distribution can be easily obtained, and the planar shape can be obtained. The effect of thinning is obtained.

  In addition, there is no need to provide a separate wind direction guide, and the effect of reducing the cost and weight by simplifying the structure can be obtained.

  Moreover, the effect which can suppress the resistance with respect to airflow is acquired.

  Moreover, the effect which can reduce the resistance which a support gives to an airflow is acquired.

  In addition, the bias of the airflow can be adjusted by the size and quantity of the opening holes, and the degree of freedom is high, and the effect that the blowout wind speed distribution can be made uniform can be obtained.

  In addition, even after the fan filter unit is installed, the effect that the uniformity of the blown wind speed distribution can be adjusted in the field according to the situation can be obtained.

The invention according to claim 1 of the present invention has a suction port at the top of a box-shaped chamber, a fan unit comprising a fan and a motor is built in the chamber, and a filter is disposed on the outlet side of the fan unit. wherein the fan unit comprises a support fixed to the chamber, the fan unit and provided with a diffusion means between the filter, the diffusing means is a plurality of oblong openings in the side and the bottom a box-top is opened And a plurality of wind direction guides adjacent to the opening, and has a strip-like baffle that hangs diagonally on the lower surface of the diffusing means and intersects at the center of the lower surface of the diffusing means, and the diffusion A plurality of the openings and the wind direction guides are arranged on the lower surface of the means parallel to the side surface of the diffusion means divided by the baffle, and the diffusion means And the airflow from the fan unit is provided to be inclined to the wind direction guide on the bottom surface that is characterized in that for guiding toward the center of the chamber, the part that has been blown out laterally blown from the fan unit the air flow Is changed to a downward airflow by the opening on the side of the diffusing means and the wind direction guide, and a part of the airflow is sent to the center below the fan unit by the opening and the wind direction guide provided on the lower surface of the diffusing means , The baffle crossed at the center narrows the air path toward the center, and the airflow is blown to the filter while generating a partial airflow due to the resistance, and the airflow blown downward by the baffle crossed at the center The airflow from the fan unit can be uniformly blown to the filter, and the airflow direction guide and baffle are provided integrally on the lower surface of the diffusion means. Reducing the vertical thickness dimension, size reduction of the fan filter unit has an effect that it is slimmer.

The invention of claim 2 of the present invention, the diffusion means to support the full An'yunitto, which was according to claim 1, characterized in that fixed to the switch Yanba, the fan unit to the diffusion means The fan filter unit can be thinned by reducing the number of parts by using the support to be fixed.

The invention according to claim 3 of the present invention has a suction port at the top of the box-shaped chamber, and
A fan unit comprising a motor and a motor is built in the chamber, a filter is provided on the blowout side of the fan unit, and a support for fixing the fan unit to the chamber is provided, and a diffusion means is provided between the fan unit and the filter. the provided, the diffusion means, a horizontal planar shape, the lower surface of the front Symbol diffusion means has been vertically the strip baffles intersect at the center of the lower surface of the diffusion means bear diagonal, the the lower surface of the diffusion means in parallel arrayed and side surfaces of the diffusion means, separated the open mouth and the wind direction guide in all their separated by the baffle said baffle, said wind direction guide on the lower surface of the diffusion means Is provided so as to guide the airflow from the fan unit toward the center of the chamber, and the outer dimensions of the fan filter unit. With always uniform velocity distribution can be obtained even in the case of varying the, an effect that can be thinned by a planar shape.

  In the invention according to claim 4 of the present invention, the wind direction guide is cut and raised integrally with the opening, so that the number of processing steps can be reduced, the additional parts due to the simplification of the structure can be omitted and the weight can be reduced. Has an effect.

According to the fifth aspect of the present invention, a punching metal is used on the lower surface of the diffusing means , the opening is a round hole provided in the punching metal, and a wind direction guide is provided on the lower surface of the punching metal. There is an effect that the resistance given to the airflow can be reduced by distributing the openings throughout the diffusing means.

  Further, the invention according to claim 6 of the present invention uses punching metal for the support, and has an effect that the resistance given to the airflow can be reduced by distributing the openings in the entire support.

  Further, the invention according to claim 7 of the present invention has a function in which the size or quantity of the opening hole of the punching metal is partially changed and the wind speed distribution having a high degree of freedom can be adjusted.

  Further, the invention according to claim 8 of the present invention has a position changing means capable of changing the position of the diffusing plate means up and down, and moves the diffusing means up and down after the installation of the fan filter unit. Therefore, it has an effect that it can be adjusted on the spot according to the situation so that the distribution of the blown air velocity from the filter can be made uniform.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIGS. 1 to 3, a fan unit 4 composed of a turbo fan 2 and a motor 3 is built in a box-shaped chamber 5, a filter 6 is provided below the fan unit 4 on the blowing side, and a fan 7 is supported by a support 7. The unit 4 is fixed to the chamber 5. During the fan unit 4 and the filter 6 in the chamber 5, to insert the diffuser plate 11 of the box-shaped upper is opened, so that shorter as toward the center of the oblong opening 8 under surface of the diffusion plate 11 Are arranged in parallel with the side surface of the diffusion plate 11, and an airflow direction guide 9 is provided adjacent to each opening 8 so as to incline the airflow toward the center of the chamber 5. A part of the airflow blown out from the fan unit 4 in the lateral direction is changed into a downward airflow by a wind direction guide 9 provided to be inclined with the opening 8 on the side surface of the diffusion means 11. In addition, a strip-shaped baffle 10 that ties diagonally and intersects is suspended from the lower surface of the diffusion plate 11.

  In the above configuration, a part of the air flow blown from the fan unit 4 is blown to the outer peripheral portion of the filter 6 by the opening 8 on the side surface of the diffusion plate 11 and the wind direction guide 9. The other airflow is blown inward by the opening 8 on the lower surface of the diffusion plate 11 and the airflow direction guide 9, and a part of the airflow is sent to the center of the filter 6 along the intersecting baffle 10. At this time, as shown in FIG. 3, the baffle 10 intersecting at the center portion narrows the air path toward the center portion, and the air current is blown to the filter 6 while generating a downward air flow partially due to the resistance. The wind speed distribution can be made uniform.

  Further, on the lower surface of the diffusion plate 11, a wind direction guide 9 is provided in the vicinity of the opening 8, and the intersecting baffles 10 connecting the diagonals of the lower surface are integrally suspended on the same surface. It is possible to minimize the installation space for parts for achieving uniform wind speed, and to shorten the distance between the diffusion plate 11 and the filter 6, the chamber 5 can be reduced in size and thickness.

(Embodiment 2)
As shown in FIGS. 3 and 4, the diffusion plate 11 directly supports the fan unit 4, and has a plurality of openings 8 and wind direction guides 9 on the side surface and the bottom surface thereof, and diagonally on the bottom surface of the diffusion plate 11. A belt-like baffle 10 that crosses at the center is fixed.

  In the above configuration, since the baffle 10 is diagonally fixed to the lower surface of the diffusion plate 11 and the plurality of wind direction guides 9 are provided between the baffles 10, the flat diffusion plate 11 is sufficiently reinforced, It has a structure that does not generate vibration or deflection. As a result, the diffusion plate 11 can secure sufficient strength to support the fan unit 4, and the fan unit 4 can be directly supported by the diffusion plate 11 without supporting parts. Therefore, the number of parts can be reduced and the structure can be simplified, and the chamber 5 can be thinned.

  In addition, since the airflow blown out from the fan unit 4 does not include support parts that obstruct the air passage, the airflow is less likely to diffuse evenly, and the opening 8 of the diffusion plate 11 and the wind direction guide 9 are reduced. , And a part is guided to the central part by the baffle 10 so that the wind speed distribution is made uniform and blown out to the filter 6.

(Embodiment 3)
As shown in FIG. 5, a planar diffusion plate 11 </ b> A is arranged between the fan unit 4 and the filter 6 in the chamber 5. The diffusion plate 11 </ b> A has a plurality of openings 8, and a baffle 10 provided so as to intersect with a wind direction guide 9 provided close to the openings 8 is integrally provided on the lower surface. A space 5 a is formed on the upper side surface of the chamber 5, and serves as a space for changing the direction of the blown airflow of the fan unit 4.

  In the above configuration, the diffusion plate 11A having a planar shape can reduce the number of processing steps of the diffusion plate 11A and can be manufactured at low cost, and the air flow blown from the fan unit 4 By effectively using the space 5a, the direction can be changed smoothly and the wind speed distribution at the end of the filter 6 can be made uniform.

  Even for a design change that changes the outer dimension of the chamber 5, the wind speed distribution can be made uniform simply by changing the size of the diffusion means 11 so as to be inscribed in the chamber 5.

(Embodiment 4)
As shown in FIG. 6, the diffusion plate 11 has a cut-and-raised shape integrated with the wind direction guide 9 and the opening 8, and is provided with a baffle 10.

  In the above configuration, the wind direction guide 9 of the diffusion plate 11 has a cut-and-raised shape integrated with the opening 8, thereby reducing the number of parts and simultaneously forming the opening 8 and the wind direction guide 9. It is possible to reduce the weight of the diffusion plate 11 by reducing the weight. Therefore, the structure of the diffusion plate 11 can be simplified to reduce the cost and weight of the fan filter unit.

(Embodiment 5)
As shown in FIGS. 7 and 8, punching metal is processed and used as the base material of the diffusion plate 11B, and the wind direction guide 9 and the baffle 10 are integrally provided on the lower surface thereof.

  7 shows a structure in which the fan unit 4 is supported by the support 7 and a diffusion plate 11B is disposed on the downstream side. In the structure shown in FIG. 8, the fan unit 4 is directly supported by the diffusion plate 11B. Is.

  In the above configuration, the opening of the diffusing plate 11B is formed by a round hole provided in the punching metal, and the airflow is made uniform by passing the airflow through the circular holes widely distributed throughout the diffusing plate 11B. Ventilation resistance against can be suppressed.

  Moreover, compared with the case where a general steel plate is used as a base material, the punching metal does not need to form an opening, and the number of processing steps can be reduced.

(Embodiment 6)
As shown in FIGS. 1 and 5, punching metal is used for the base material of the support 7 that supports the fan unit 4 to reduce the ventilation resistance.

  In addition, when punching metal is used for the base material of the support and punching metal is used for the base material of the diffusion plate (not shown), the ventilation resistance is further reduced.

  With the above configuration, it is possible to reduce the ventilation resistance of the support 7 itself with respect to the air flow and to facilitate the ventilation to the filter 6, and when the diffusion plate is also a punching metal, it is possible to further uniform the wind speed distribution.

(Embodiment 7)
As shown in FIG. 9, punching metal is used for the diffusion plate 11C, and the number of opening holes of the punching metal is changed so that the center side increases, and the wind direction guide 9 and the baffle 10 are provided integrally.

  In the above configuration, the range for suppressing the air flow can be adjusted with a high degree of freedom such as reducing the number of opening holes in the punching metal and the range for guiding the air flow increasing the number of opening holes in the punching metal.

  In the present embodiment, the number of opening holes of the punching metal is changed. However, the size may be adjusted by changing the size of the opening holes. Moreover, when using a support, you may make it use the punching metal for a support and to change the quantity and magnitude | size of the opening hole.

(Embodiment 8)
As shown in FIG. 10, the chamber 5 has female screws 13 at a plurality of locations on the top corner, and the diffusion plate 11 is provided with bearings 14 at positions facing the female screws 13, and the bearings 14 and female screws 13 are connected by adjusting bolts 12. The diffuser plate 11 is supported up and down by connecting and rotating the adjusting bolt 12. Further, the head of the adjustment bolt 12 is provided so as to protrude from the top surface of the chamber 5 so that the rotation operation can be performed even after the chamber 5 is installed.

  With the above configuration, the diffusion plate 11 can be moved up and down from the outside of the fan filter unit by turning the head of the adjustment bolt 12, and the fan filter unit is installed by changing the gap a between the fan 2 and the diffusion plate 11. The wind speed distribution can be easily adjusted later, and the wind speed can be adjusted to the optimum state at the installation site.

  The fan filter unit can be installed in a small space by reducing the size, thickness, and weight while ensuring the uniformity of the wind speed distribution, necessitating clean spaces such as semiconductor factories and food factories. It can be applied to limited clean rooms and manufacturing equipment.

Vertical sectional view of the fan filter unit of Embodiments 1 and 6 of the present invention FIG. 3 is an external view of the lower surface of the chamber according to the first embodiment of the present invention. FIG. 2 is a main part external view showing an air flow near the center of the first and second embodiments of the present invention A longitudinal sectional view of a fan filter unit according to a second embodiment of the present invention. Vertical sectional view of the fan filter unit of Embodiments 3 and 6 of the present invention Bottom view of chamber according to Embodiment 4 of the present invention Bottom view of chamber according to Embodiment 5 of the present invention Bottom view of another chamber according to Embodiment 5 of the present invention Bottom view of chamber according to Embodiment 7 of the present invention Vertical sectional view of a fan filter unit according to an eighth embodiment of the present invention.

Explanation of symbols

1 Suction Port 2 Fan 3 Motor 4 Fan Unit 5 Chamber 6 Filter 7 Support 8 Opening 9 Air Direction Guide 10 Baffle 11 Diffusion Plate (Diffusion Means)
11A Diffuser (Diffusion means)
11B Diffuser (Diffusion means)
11C Diffusion plate (Diffusion means)
12 Adjustment bolt (Position adjustment means)
13 Female thread (Position adjustment means)
14 Bearing (Position adjustment means)

Claims (8)

The box-shaped chamber has a suction port at the top, a fan unit consisting of a fan and a motor is built in the chamber, a filter is provided on the blowout side of the fan unit, and a support for fixing the fan unit to the chamber is provided. the fan unit and provided with diffusion means between the filter, the diffusing means is a plurality of wind direction adjacent to the opening and a plurality of oblong openings in the side surface and the lower surface a box-top is opened A guide is provided, and a strip-shaped baffle is formed by hanging diagonally on the lower surface of the diffusion means and intersecting at the center of the lower surface of the diffusion means, and the lower surface of the diffusion means is partitioned by the baffle All of the openings and the wind direction guides are arranged in parallel to the side surfaces of the diffusion means separated by the baffle, and the wind direction guides are inclined on the lower surface of the diffusion means. Fan filter unit you characterized by guiding the airflow from the fan unit in the center of the chamber are provided. Diffusion means supports the fan unit, the fan filter unit according to claim 1, characterized in that secured to the chamber. The box-shaped chamber has a suction port at the top, a fan unit consisting of a fan and a motor is built in the chamber, a filter is provided on the blowout side of the fan unit, and a support for fixing the fan unit to the chamber is provided. A diffusion means is provided between the fan unit and the filter;
This diffusion means has a horizontal planar shape,
The lower surface of the front Symbol diffusion means has been vertically the strip baffles intersect at the center of the lower surface of the diffusion means bear diagonal,
Wherein the lower surface of the diffusion means in parallel arrayed and side surfaces of the diffusion means, separated the open mouth and the wind direction guide in all their separated by the baffle said baffle,
The fan filter unit characterized in that the airflow direction guide is provided on the lower surface of the diffusing means so as to guide the airflow from the fan unit toward the center of the chamber. The fan filter unit according to claim 1, wherein the wind direction guide has a cut and raised shape integrated with the opening. The fan filter unit according to any one of claims 1 to 3 , wherein a punching metal is used on a lower surface of the diffusing means , an opening is a round hole provided in the punching metal, and a wind direction guide is provided on the lower surface of the punching metal. . 4. A fan filter unit according to claim 1, wherein punching metal is used for the support. 7. The fan filter unit according to claim 5, wherein the size or quantity of the opening hole of the punching metal is partially changed. 4. A fan filter unit according to claim 1, further comprising position changing means capable of changing the position of the diffusing means up and down.

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