JP4675601B2 - Sealed container for large precision sheet products and semi-finished products - Google Patents

Description

  The present invention relates to photomasks (including reticles) or pellicles that are protective films thereof, semiconductor wafer-related products, precision sheet-like (semi) products such as various display products such as liquid crystals, that is, products or their (glass) substrates. The present invention relates to a sealed container used for transporting a semi-finished product up to completion, such as a large-sized product (here, what is intended is at least one side of 500 mm or more).

In general, a precision sheet-like (semi) product as described above is often mechanically fragile, and a precision component or member formed thereon is also more fragile. Furthermore, since precision sheet-like (semi-) products are extremely disliked from dust, particularly fine dust having an adhesion of 0.3 μm or less, because of their suitability for use, special attention must be paid to the sealing performance of the container. In particular, precision sheet-like (semi-) products such as the above are often exported overseas from Japan using aircraft, and fine dust in the container due to the difference in pressure between the aircraft (especially the luggage storage) and atmospheric pressure. Tend to be introduced. In addition, in order to dislike adhesion of fine dust, a container body is formed of a foamed resin that tends to generate fine dust due to friction as in general glass products (for example, Patent Document 1), or a foamed resin cushioning material is used as a container. It is also not appropriate to place it inside. Furthermore, precision sheet-like (semi-) products such as those described above, especially display products and photomask products corresponding to such products, are accompanied by demands for large-sized large-screen displays, and in the case of photomask products, display products, etc. Because the final product is baked in batches, the increase in size (increase in area) is unavoidable for reasons such as these. A number of new problems have arisen along with this. In other words, as the size increases, the precision sheet (semi) product itself, which is the contents, weighs 5 to 10 kg, supports the load, and further deforms the container into a precision sheet (semi) product when supporting it. In order not to exert the stress due to, the container itself is required to have a considerable strength, but if it is formed of a metal material as in the conventional case, even if a light metal such as geralumin is used, only the container 40 kg or more and 50 kg or more including the contents, and the increase in the outer dimensions makes it difficult to carry by hand. Further, when the precision sheet (semi) product is accommodated in the container, it is necessary to support at least one surface (precision member forming surface) so as not to contact other members in the container.
JP 2001-31165 A

  Accordingly, a main object of the present invention is to provide a relatively lightweight sealed container that can safely accommodate and support a large precision sheet-like (semi) product such as a photomask without applying inappropriate stress. There is.

According to the researches of the present inventors, in order to achieve the above-mentioned object, a two-part structure of a main body portion and a lid portion made of a vacuum or compressed air molded body of a thermoplastic resin sheet each provided with an appropriate reinforcing treatment means It has been found that a sealed container having is highly preferred. That is, the large precision sheet-like product or semi-finished product sealed container suitable for aircraft transportation according to the present invention comprises a main body portion and a lid portion having peripheral flange portions that are in contact with each other, and has a large precision sheet shape inside. This is a sealed container for storing products or semi-finished products (hereinafter collectively referred to as “precision sheet-like (semi-) products”). The main body and the lid are provided with reinforcing ribs for thermoplastic resin sheets, respectively. A vacuum or compressed air molded body,
The thermoplastic resin sheet forming the main body and the lid is made of a rigid antistatic resin made of a polyacrylonitrile-based resin blended with a hydrophilic polymer,
Furthermore, holding members for precision sheet-like (semi) products are provided at a plurality of locations adjacent to the peripheral flange portions of the main body portion and the lid portion, and
One holding member of the main body part and the lid part has an abutting end wall part whose height is smaller than the thickness of the tapered part and the precision sheet-like (semi) product, and the other holding member of the main body part and the lid part is A taper portion longer than the taper portion of the one holding member;
An apron portion for reinforcing the support strength of the precision sheet (semi) product load is formed adjacent to the holding member by vacuum or pressure forming.

  The main body part and the lid part constituting the sealed container for the precision sheet-shaped (semi) product of the present invention are both uniform, unlike the injection-molded body that has a non-uniform thickness and particularly tends to be thick locally. Because it is a vacuum or compressed air molded body of a thermoplastic resin sheet that is provided in an appropriate thickness, it exhibits a uniform strength while being lightweight as a whole, and has a large area due to the action of integrally formed reinforcing ribs. , Deformation due to warpage or deflection is prevented. Further, each of the main body portion and the lid portion has a peripheral flange portion, and the sealing property of the container is improved by adopting the contact structure thereof.

  Hereinafter, the present invention will be described more specifically with reference to the drawings.

(Horizontal structure)
FIG. 1 shows a horizontal type (that is, a type that accommodates a precision sheet (semi) product in a position substantially parallel to the contact surface of the peripheral flange part of the main body and the lid part) for a large precision sheet (semi) product. 2 is a plan view of the main body 10 of the sealed container, FIG. 2 is a cross-sectional view in the direction of arrows AA in FIG. 1, and FIG. FIG.

  Referring to FIGS. 1 and 2, the container body 10 of this example is a liquid crystal formed on a synthetic quartz substrate having a generally rectangular shape (more specifically, about 700 mm long by about 800 mm wide at the illustrated position). It is a horizontal container main body of a photomask for display (hereinafter referred to as “(semi) product sheet”), and has a planar outer dimension of about 880 mm × about 930 mm × depth of about 50 mm. The container main body is formed of a thermoplastic resin vacuum or compressed air molded body 1 having a thickness of about 5 mm. Four reinforcing ribs 2 having a length of about 580 mm having an arc-shaped cross section with a radius of curvature of about 30 mm and a height of about 10 mm (FIG. 2) are arranged in the bottom at the bottom.

  A flange portion 3 having a width of about 100 mm is formed on the peripheral edge portion of the main body portion 1 so as to surround the precision sheet-shaped (semi-) product housing portion 4. The flange portion 3 is formed to be approximately 50 mm higher than the bottom portion of the housing portion 4 provided with the reinforcing rib 2. Three precision sheet-like (semi) product holding members 5 are formed on four sides in the vicinity of the outer edge of the accommodating portion 4. The holding member 5 includes a sheet support portion 5a having a taper of about 5 ° downward toward the center, and a sheet abutment having a height slightly smaller than the thickness of the (semi) product sheet A (FIG. 3). In this example, prior to vacuum or pressure molding of the main body 1, it is placed in the mold in advance as an insert, and is integrally incorporated into the molded resin sheet during vacuum or pressure molding and fixedly held. Is done. In particular, the resin sheet molding portion for fixing and holding the holding member 5 forms an apron portion 6 having an intermediate height of about 30 to 40 mm from the bottom, and the load of the (semi) product sheet A applied to the holding member 5 is reduced. It has a structure to support. On the peripheral flange portion 3, a groove portion 7 that accommodates an elastic O-ring for improving the hermeticity of the container is formed over the entire circumference, and the four corner portions are arranged at opposing positions. The convex portion 8a and the concave portion 8b for alignment with the lid portion are formed, and can be aligned by fitting with the concave portion 8b and the convex portion 8a for alignment provided at the corresponding positions of the lid portion. Has been.

  A generally downward flap 3a is formed on the outer edge of the peripheral flange portion 3 to reinforce the flange 3, but a cutout portion 3b is provided at a part thereof (in this example, two on each side). In addition, the peripheral flange portion 3 is provided with several screw fixing holes 3c.

  The lid portion 20 (only a part of which is shown in FIG. 3) used in combination with the above-described main body portion 10 has a substantially symmetric structure with the main body portion 10, and in this example, an O-ring groove 7 is provided. And the taper portion 15a of the (semi) product sheet holding member 15 is longer than the taper portion 5a of the (semi) product sheet holding member 5 of the main body, and a sheet abutting end wall portion is provided. It differs from the main body only in that it is not.

  The usage mode of the precision sheet-shaped (semi) product container composed of the main body 10 and the lid 20 is shown in FIG. 3 in particular, and the (semi) product sheet 6 is held as shown in FIG. The end portion of the container is held between the support members 5 and 15, and the sealing performance of the container is ensured by pressing and holding the O-ring 9 disposed in the groove portion 7 with the flanges 3 and 13. The pressing force between the support members 5-15 and between the flange portions 3-13 sandwiching the O-ring 9 can be obtained by providing a clamp lock between the flanges 3-13 or by using the peripheral notch portion 3b. This is ensured by providing a buckle lock or by screwing using a screw hole 3c.

  Note that the end of the (semi) product sheet A is held with a slight gap as shown in FIG. 4 even if it is not in a state of being abutted against the end wall 5b of the support member 5 as shown in FIG. May be. In particular, since the distance between the sheet abutting end walls 5b of the pair of supporting members 5 provided on the opposing sides of the main body is slightly larger than the width of the (semi) product sheet A, at least one of the opposing sides is shown in FIG. Usually, a gap as shown in FIG. Moreover, in this example, the height of the sheet abutting end wall of the support member 5 on the main body side is slightly lower than the thickness of the (semi) product sheet A, and the taper portion 15a of the support member 15 on the lid side is provided. The length is larger than the length of the tapered portion 5a of the support member 5 on the main body side. This eliminates the possibility that the lower surface of the support member 15 may come into contact with the upper surface of the precision sheet-shaped (semi) product A and cause damage even if a slight lateral shift occurs when the support member 15 is attached. If the difference in the length of the taper portion is made large, the safety against the displacement of the mounting is increased, but if it is excessive, the support (clamping) of the (semi) product sheet A may be insufficient. Of course, it is possible to provide the support member having the sheet abutting end wall portion on the lid body side and provide the support member having a longer taper portion on the main body side.

(Material)
When the material of each part is supplementarily explained, the vacuum or compressed air molded body 1 constituting the part other than the (semi-) product sheet holding member 5 of the main body part 10 is basically made of an arbitrary thermoplastic resin. In order to avoid electrostatic adhesion of fine dust to the product sheet, it is preferably made of an antistatic resin. The antistatic resin preferably has permanent antistatic properties. Examples of the antistatic resin having permanent antistatic properties include (a) 3 to 100 parts by weight of a hydrophilic polymer, and (b) heat. It is known to be composed of 0 to 97 parts by weight of a plastic resin, (100 parts by weight in total with (a)), and (c) 0.001 to 0.5 parts by weight of a metal salt having a valence of 2 or more. No. 2003-183529), which is also preferably used in the present invention. However, (c) addition of a metal salt having a valence of 2 or more is not required unless extreme optical properties (prevention of cloudiness) are required. Among these, (a) as the hydrophilic polymer, a graft copolymer containing a rubber-like trunk polymer having an alkylene oxide group and further blended with an anionic surfactant (JP 59-2462 A). Rigidity that does not easily apply flexural stress to the (semi) product sheet by blending it with rigid thermoplastic resin such as polyacrylonitrile resin, polystyrene resin, polymethyl methacrylate resin, etc. The thing which gave is preferable. Incidentally, in the above embodiment, an antistatic resin sheet (bending elastic modulus: 2 GPa) having a thickness of 5 mm comprising 10% by weight of the hydrophilic polymer and 90% by weight of polyacrylonitrile-based resin (“Barex 210” manufactured by BPAmoco). In particular, in the present invention, a vacuum or pressure molded body of a thermoplastic resin sheet made of a rigid antistatic resin made of a polyacrylonitrile resin blended with a hydrophilic polymer is used.

  The (semi) product sheet holding member 5 itself can be formed of the antistatic resin as described above. However, even in this case, forming the holding member 5 as a part of a vacuum or compressed air molded body (that is, with a substantially uniform wall thickness) supports the concentration of stress including the load of the (semi) product sheet. It is impossible to do. Accordingly, in this case, the holding member 5 is separately formed of the antistatic resin, and as described above, the holding member 5 is disposed in the mold as an insert, and is formed into a molded resin sheet at the time of vacuum or pressure forming. A form in which they are integrated and fixed and held is preferable. When the holding member 5 is fixed and held to the main body or the cover body by screwing rather than insert molding, the sealing performance is incomplete, and when fixed and held by an adhesive, the (semi) product sheet is made of an adhesive. Since there is a possibility of contamination of A, the insert molding as described above is preferable. Due to the slight gap between the end wall portion 5b of the holding member and the end portion of the (semi) product sheet A, there is a slight difference between the support portion 5a of the holding member 5 and the end portion of the (semi) product sheet A. Can slide. Therefore, more preferably, the holding member 5 is softer and more slidable than a constituent resin of the vacuum or compressed air molded body 1 such as a fluorine resin such as Teflon (registered trademark), an olefin resin such as polyethylene, a polyacetal resin or the like. A good resin should be used. In the above example, the holding member 5 made of Teflon having a substantially L-shaped cross section is used.

  As the O-ring 9 (FIG. 3), a material made of an elastic resin such as fluorine rubber or silicone rubber is used, and among them, an antistatic elastic resin is preferable. The O-ring is not limited to a solid shape (for example, a diameter of 8 mm) as shown in the figure, but is preferably a hollow shape (for example, an inner diameter of 4 to 6 mm with respect to an outer diameter of 8 mm) to increase the deformation stroke.

(Modification)
In the above description, a preferred embodiment of a horizontal container for a photomask for a liquid crystal display has been described. However, various modifications can be made to the container of the above embodiment within the scope of the present invention. Some of such variations are described.

  For example, in the above example, three holding members 5 are used, a total of twelve, but this can naturally be increased or decreased as appropriate. However, it is preferable that each side is 2 or more, that is, a total of 8 or more. Further, in the above example, two convex portions 8a and concave portions 8b for positioning the main body portion-cover body portion are provided in the vicinity of the four corners on the peripheral flange portion of the main body portion, for a total of four of the main body portion and the lid portion. Although it is provided on both sides, it is possible to provide these in the middle of the four sides and to increase or decrease the number appropriately (however, it is preferable to provide two or more for the main body and the lid). In addition, it is preferable to form the same number of convex portions 8a and concave portions 8b in each of the main body portion and the lid body portion in order to make the vacuum or pressure forming mold of the main body portion and the lid body portion as common as possible. It is also possible in terms of the function of the container that the lid portion has the convex portion 8a on one side and the concave portion 8b on the other side. The same can be said for the O-ring groove 7. In other words, if the O-ring groove 7 is made shallower and a symmetrical O-ring groove is provided also in the peripheral flange portion of the lid body, the vacuum or compressed air molded body portion (that is, the holder disposed as an insert) (Regardless of the member shape) is completely symmetrical, and the same type can be used.

  Although the downward flap part 3a of the peripheral flange part 3 is preferable for reinforcement, it is not essential. Further, the notch 3b and the screw hole 3c can be omitted.

  The cross-sectional shape of the reinforcing rib 2 and the alignment convex portion 8a and the concave portion 8b may be not a semicircle or a hemisphere but a square shape.

(Vertical structure)
The sealed container for precision sheet (semi) products of the present invention is a vertical container (that is, a container of a type that accommodates a precision sheet (semi) product at a position substantially perpendicular to the contact surface of the main body and the lid). Can also be configured. FIG. 5 (main body portion-lid portion combination perspective view), FIG. 6 (plan view (a) and side view (b) from above the main body portion), and FIG. Drawing (a) and sectional views (b) and (c) show an outline of a glass substrate container for manufacturing various displays as an example of such a vertical container.

  That is, as shown in FIG. 5, this vertical container is composed of a body portion 30 having a diameter of about 2200 mm and a height of about 350 mm, and a lid portion 40 having a height of about 180 mm, each having a thickness. It consists of vacuum or pressure molded bodies 21 and 31 of an antistatic resin sheet of about 50 mm (consisting of 10% by weight of hydrophilic polymer and 90% by weight of polyacrylonitrile resin), and provided with side wall reinforcing ribs 22 and 32, respectively. . Further, the main body portion and the lid portion have peripheral flange portions 23 and 33 having a width of about 30 mm that are in contact with each other, and an O-ring housing groove 27 is provided in the peripheral flange portion 23 of the main body portion. In addition, a pair of holding members 25 having a sheet insertion support groove 25a provided in the center are inserted into the main body portion through the guide groove member 26 in such a manner that the upper ends thereof extend through the peripheral flange portion 23 and extend upward. Yes. As shown in FIG. 6A, a reinforcing rib 22a is provided at the bottom of the main body, and a support member 26a having a lower end holding groove 26aa of the holding member 25 is disposed. In use, the (semi) product sheet A2 inserted along the sheet insertion support groove 25a of the holding member 25 introduced along the guide groove member 26 and held at the lower end in the holding groove 26aa of the support member 26a. Is held by a sheet lower end holding member 25b having a sheet holding groove 25bb having a lower end provided at the bottom of the main body, and the upper end is held by a holding member 35 provided with a holding groove 35b provided on the lid side. 30 and a container made up of a lid 40. Prior to the contact between the body portion 30 and the peripheral flange portion of the lid portion 40, an O-ring (not shown) is disposed in the receiving groove 27, and a clamp lock or a ratchet buckle lock between the peripheral flange portions 23-33 is provided. Sealing of the container is ensured by the contact pressure of the peripheral flange portion due to the above.

  The materials of the vacuum or compressed air molded bodies 21 and 31 and the holding members 25, 25b, 26a, and 35 are the same as the materials of the vacuum or compressed air molded body 1 and the holding member 5 described with reference to FIGS.

(Further modifications)
In the above, the example which accommodates one (semi) product sheet was mainly demonstrated. However, the sealed container of the present invention can also be applied to contain a plurality of (semi) product sheets. In particular, the vertical container is suitable for accommodating a plurality of (semi) product sheets. FIG. 8 is a schematic perspective view of such a sealed container for housing a plurality of (semi) product sheets with the lid portion removed upward. Referring to FIG. 8, each of the vertical sealed containers includes vacuum or compressed air molded bodies 51 and 61, respectively, and includes a main body section 50 and a lid body section 60 provided with nozzles 52 and 62 for gas replacement inside the container. Become. In the main body 50, for example, a carrier 53 for placing and transporting ten (semi) product sheets is accommodated. FIG. 9A is an enlarged view of the (semi) product sheet carrier 53 taken out from the main body, and FIGS. 9B and 9C are enlarged views of B and C, respectively. FIG. That is, the (semi) product sheet carrier 53 includes, for example, a pair of resin plates 531 having a guide groove 532 and a carrier transporting handle 533 for accommodating ten (semi) product sheets vertically and in parallel, and a pair of these. And a metal frame 534 for supporting and fixing the resin plate and maintaining a gap between the two. Accordingly, the carrier 53 is placed in a state where, for example, 10 (semi) product sheets are inserted along the guide grooves 532 and received at both bottom ends of the (semi) product sheet at the bottom 532c. The main body 50 can be taken in and out. The lower and upper ends of a plurality of (semi) product sheets accommodated in the main body are protected by silicone rubber or fluororesin to reduce the impact during transportation. Further, a groove for accommodating the bottom portion 531a of the resin plate 531 of the carrier 53 is provided in the inner bottom portion of the main body portion 50, and the carrier 53 is prevented from rolling and is fixed. If necessary, a groove for accommodating the upper portion 531b of the resin plate 531 may also be provided in the lid portion 60 to improve the fixing of the carrier 53. The nozzles 52 and 62 for gas replacement inside the container respectively provided in the main body 50 and the lid body 60 are used to seal the (semi) product sheet, as well as adhesion of dust, such as EL (electroluminescence). The inside of the container is suitable for, for example, a use for replacing with dry nitrogen, and can be attached to the horizontal container described with reference to FIGS.

  As described above, according to the present invention, a large precision sheet-shaped (semi-) product such as a photomask can be safely and airtightly stored and supported and transported without improper stress. A lightweight resin container is provided.

The top view of the main-body part of one Example of the horizontal container of this invention. AA sectional view taken on the line AA of FIG. The fragmentary sectional view which shows the (semi) product sheet holding structure in the vicinity of the holding member of the container of the example of FIG. The partial cross section which shows the play of the (semi) product sheet edge part in a holding member. The main-body part-lid part combination perspective view of one Example of the vertical container of this invention. The top view (a) and side view (b) on the main body part of the container of FIG. The schematic front view (a) which shows the (semi) product sheet holding structure in the container of FIG. 5, BB sectional drawing (b), and CC sectional drawing (c). The main-body part-lid part combination perspective view of one Example of the vertical container for several (semi) product sheets of this invention. (A) The perspective view in the taking-out state of the (semi) product sheet carrier in the container of FIG. 8, (b) The enlarged view of the B section, (c) The enlarged view of the C section.

Explanation of symbols

10, 30, 50 Body part 20, 40, 60 Lid part 1, 21, 31, 51, Vacuum or pressure molded body 2, 22, 22a Reinforcing rib 3, 13, 23, 33 Peripheral flange part 4 (half) Product sheet storage part 5, 15, 25, 25b, 35 (Semi) Product sheet holding member 5a, 15a, 25a, 25bb, 35b Holding member taper part 5b Holding member (semi) Product sheet end part abutting side wall part 25a (Semi ) Product sheet guide groove 6 Holding member peripheral apron portion 26 Holding member guide member 7, 27 O-ring housing groove 8a Alignment convex portion 8b Alignment concave portion 9 O-ring 52, 62 Container internal gas replacement nozzle 53 Multiple (semi) products Sheet carrier 531 (Semi) product sheet guide resin plate (531a: bottom, 531b: top)
532 (Semi) product sheet guide groove (532c: bottom thereof)
533 Carrier handle 534 Reinforcing metal frame A, A2 (Semi) product sheet

Claims (4)

It is a sealed container for accommodating a large precision sheet-like product or semi-finished product inside a body part having a peripheral flange part abutted against each other and a lid part, and the body part and the lid part are Each consists of a vacuum or compressed air molded body provided with reinforcing ribs for thermoplastic resin sheets,
The thermoplastic resin sheet forming the main body and the lid is made of a rigid antistatic resin made of a polyacrylonitrile-based resin blended with a hydrophilic polymer,
Furthermore, holding members for the precision sheet-like product or semi-finished product are provided at a plurality of locations adjacent to the peripheral flange portions of the main body portion and the lid portion, and
One holding member of the main body portion and the lid body portion has a taper portion and an abutting end wall portion having a height smaller than the thickness of the precision sheet-like product or semi-finished product , and the other holding member of the main body portion and the lid body portion Has a taper portion longer than the taper portion of the one holding member,
A large precision sheet-like product suitable for aircraft transportation, wherein an apron portion for reinforcing the supporting strength of the load of the precision sheet-like product or semi-finished product is formed by vacuum or pneumatic molding adjacent to the holding member Or a sealed container for semi-finished products . The container according to claim 1, wherein at least one peripheral flange portion of the main body portion and the lid portion is provided with an O-ring receiving groove for sealing. The container according to claim 1 or 2, wherein the holding member is integrally incorporated and fixed and held in a thermoplastic resin sheet molded in a vacuum or air pressure as an insert. The container according to claim 3, wherein the holding member is made of a thermoplastic resin that is softer and more slidable than the thermoplastic resin sheet.

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