JP4742269B2 - Method for producing double-phase hydrogen permeable alloy and double-phase hydrogen permeable alloy - Google Patents
Method for producing double-phase hydrogen permeable alloy and double-phase hydrogen permeable alloy Download PDFInfo
- Publication number
- JP4742269B2 JP4742269B2 JP2006244265A JP2006244265A JP4742269B2 JP 4742269 B2 JP4742269 B2 JP 4742269B2 JP 2006244265 A JP2006244265 A JP 2006244265A JP 2006244265 A JP2006244265 A JP 2006244265A JP 4742269 B2 JP4742269 B2 JP 4742269B2
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen
- alloy
- phase
- hydrogen permeable
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Hydrogen, Water And Hydrids (AREA)
- Powder Metallurgy (AREA)
Description
本発明は、複相水素透過合金の製造方法および複相水素透過合金に関するものである。 The present invention relates to a method for producing a multiphase hydrogen permeable alloy and a multiphase hydrogen permeable alloy.
高純度水素は、半導体や光ファイバ、薬品などの製造に使用されており、その使用量は、年々増加している。また、最近では、燃料電池での燃料としても水素が注目され、将来本格的に燃料電池が使用されることになれば、高純度の水素が大量に必要とされる。したがって、高純度の水素を低コストで大量に生産可能な方法の開発が望まれている。 High-purity hydrogen is used in the manufacture of semiconductors, optical fibers, chemicals, etc., and the amount of use is increasing year by year. Recently, hydrogen has attracted attention as a fuel for fuel cells, and if fuel cells are to be used in earnest in the future, a large amount of high-purity hydrogen is required. Therefore, development of a method capable of producing high-purity hydrogen in large quantities at low cost is desired.
水素の大量生産の方法としては、(1)非化石資源を利用する水の電気分解による方法と、(2)化石資源を利用する炭化水素の改質による方法がある。(1)の電気分解法では、電力源として太陽光発電で得た電気を用いて行う水の電気分解が研究されているが、現在の技術レベルでは実用化は困難である。したがって、当面は(2)の炭化水素の水蒸気改質で水素を製造することが現実的である。 As a method for mass production of hydrogen, there are (1) a method by electrolysis of water using non-fossil resources and (2) a method by reforming hydrocarbons using fossil resources. In the electrolysis method (1), water electrolysis using electricity obtained by photovoltaic power generation as a power source has been studied, but practical application is difficult at the current technical level. Therefore, for the time being, it is realistic to produce hydrogen by (2) steam reforming of hydrocarbons.
前述したように、水素の大量生産のためには炭化水素の改質が適している。例えば、CH4にH2Oを加えた反応系においては、大量の水素の他にCO、CO2、H2O、CH4等の不純物ガスが発生する。水素を燃料電池への供給原料として利用するには、水素をこれら不純物から分離・精製しなければならない。また、精製水素中のCO含量を10ppm以下にしないと、燃料電池のPt電極の損傷が発生する。すなわち、水素の燃料電池への利用のためには、精製して、高純度化することが条件となる。 As described above, hydrocarbon reforming is suitable for mass production of hydrogen. For example, in the reaction system H 2 O was added to CH 4, CO, CO 2, H 2 O, the impurity gas such as CH 4 are generated in addition to the large amount of hydrogen. In order to use hydrogen as a fuel cell feedstock, it must be separated and purified from these impurities. Further, unless the CO content in the purified hydrogen is 10 ppm or less, the Pt electrode of the fuel cell is damaged. In other words, in order to use hydrogen in a fuel cell, it is necessary to purify and purify it.
水素の精製法にはさまざまな方式があるが、燃料電池用高純度水素を得るには、金属膜による膜分離法が適している。金属膜による水素の精製は、分離係数と透過係数との影響が極めて大きいことが特徴である。金属膜を用いる水素の精製では、例えば、99%程度の水素を99.99999%程度に純化することが可能である。 There are various methods for purifying hydrogen. To obtain high-purity hydrogen for fuel cells, a membrane separation method using a metal membrane is suitable. The purification of hydrogen using a metal membrane is characterized by extremely large influences of the separation coefficient and permeation coefficient. In the purification of hydrogen using a metal film, for example, about 99% of hydrogen can be purified to about 99.99999%.
水素透過膜に用いる水素透過性金属膜として、Pdを主体とする合金、例えばPd−Ag合金、Pd−Ti合金等が知られている(例えば、特許文献1参照)。 As a hydrogen permeable metal film used for the hydrogen permeable film, an alloy mainly composed of Pd, such as a Pd—Ag alloy, a Pd—Ti alloy, or the like is known (for example, see Patent Document 1).
ところで、水素の透過用金属膜としては、Pd−Ag合金膜が実用化されている。しかし、燃料電池の使用が本格化して大量の水素が必要となれば、それに応じて水素の透過用金属膜としてのPd−Ag合金の需要が増すことになる。そうなれば、高価で資源的にも少ないPdが制約となって、Pd−Ag合金膜では対応不可能と推測され、それに替わる金属膜の材料開発が急務となっている。 By the way, a Pd—Ag alloy film has been put to practical use as a hydrogen permeable metal film. However, if the use of fuel cells becomes full-scale and a large amount of hydrogen is required, the demand for Pd—Ag alloys as hydrogen permeable metal films will increase accordingly. In such a case, Pd, which is expensive and less resource-intensive, is considered to be a limitation, and it is assumed that the Pd—Ag alloy film cannot cope with it, and material development of a metal film to replace it is urgently required.
Pdより水素透過性の高いV、Nb、Ta等の5A族元素を基とした合金の開発が試みられたが(例えば、特許文献2参照)、これらの合金は水素を固溶すると脆化するため、使用中に破壊することが問題となっている。そのため、これら合金をアモルファス化することが試みられた。しかし、アモルファス中での水素の拡散は遅く、水素中で容易に結晶化して、脆い平衡相へ変態するため、実用上使用できない(例えば、特許文献3参照)。そのため、高い水素透過性を有するとともに、安定で水素脆化に強い材料が切望されてきた。 Attempts have been made to develop alloys based on Group 5A elements such as V, Nb, and Ta that have higher hydrogen permeability than Pd (see, for example, Patent Document 2), but these alloys become brittle when hydrogen is dissolved. Therefore, it is a problem to break down during use. Therefore, attempts have been made to make these alloys amorphous. However, the diffusion of hydrogen in the amorphous is slow, and it is easily crystallized in hydrogen and transformed into a brittle equilibrium phase, so that it cannot be used practically (see, for example, Patent Document 3). Therefore, a material that has high hydrogen permeability and is stable and resistant to hydrogen embrittlement has been desired.
上記問題を解決する材料として、複相水素透過合金が提案されている。これは、水素透過性を担う相と耐水素脆化性を担う相の複相化により、水素透過性と耐水素脆化性の両立を達成したものである。例えば、Ni−Ti−Nb系においては、水素透過性を担うbcc構造のNiTi相とB2構造のNiTi相の複相化により、耐水素透過性に優れ、純Pdと同等以上の水素透過合金を作製できることが知られている(特許文献4参照)。 As a material for solving the above problems, a multiphase hydrogen permeable alloy has been proposed. This achieves both hydrogen permeability and hydrogen embrittlement resistance by making the phase responsible for hydrogen permeability and the phase responsible for hydrogen embrittlement multi-phase. For example, in the Ni-Ti-Nb system, a hydrogen permeable alloy having excellent hydrogen permeation resistance and equivalent to or better than pure Pd is obtained by forming a bcc structure NiTi phase responsible for hydrogen permeability and a B2 structure NiTi phase. It is known that it can be produced (see Patent Document 4).
一般に、水素透過合金は水素固溶体を形成する領域で使用され、そのような場合には、単位時間、単位面積当たりに合金膜を透過する水素量J(molH2m−2s−1)と水素透過係数Φ(molH2m−1s−1Pa−0.5)との間には次式で示す関係がある。 In general, a hydrogen permeable alloy is used in a region where a hydrogen solid solution is formed. In such a case, a hydrogen amount J (molH 2 m −2 s −1 ) and hydrogen permeating the alloy film per unit time and unit area. There is a relationship represented by the following equation with the transmission coefficient Φ (molH 2 m −1 s −1 Pa −0.5 ).
J=Φ(Pu 0.5−Pd 0.5)/L (1) J = Φ (P u 0.5 −P d 0.5 ) / L (1)
上式中、PuおよびPd(Pa)は、それぞれ上流側および下流側の水素圧力であり、Lは水素透過合金膜の厚さ(m)である。 In the above formula, P u and P d (Pa) are the hydrogen pressure on the upstream side and the downstream side, respectively, and L is the thickness (m) of the hydrogen permeable alloy film.
水素透過量Jを増大させるには、水素透過係数Φの大きい合金を用いることの他に、薄い膜をより高い圧力差をつけて使用することが要求される。効率的な水素製造のために、水素透過合金は膜状で使用される。優れた水素透過特性と耐水素脆化性を兼備したNi−Ti−Nb合金を水素透過合金膜として利用する場合、薄膜化までの製造プロセスの確立が不可欠である。 In order to increase the hydrogen permeation amount J, it is required to use a thin membrane with a higher pressure difference in addition to using an alloy having a large hydrogen permeation coefficient Φ. For efficient hydrogen production, hydrogen permeable alloys are used in membrane form. When a Ni—Ti—Nb alloy having excellent hydrogen permeation characteristics and hydrogen embrittlement resistance is used as a hydrogen permeation alloy film, it is essential to establish a manufacturing process up to thinning.
例えば、Ni−Ti−Nb系複相水素透過合金を作製する場合、平衡状態でNbを固溶したNiTi相とNiを固溶したTiNb相の2相共存が得られるような合金組成を選定する必要がある。通常、合金の作製方法として、溶解・凝固法が一般的に用いられているが、本合金の場合、次のような理由から合金作製が困難である。 For example, when producing a Ni-Ti-Nb-based multiphase hydrogen permeable alloy, an alloy composition is selected so that two-phase coexistence of a NiTi phase in which Nb is dissolved and a TiNb phase in which Ni is dissolved in an equilibrium state is obtained. There is a need. Usually, a melting / solidifying method is generally used as a method for producing an alloy, but in the case of this alloy, it is difficult to produce the alloy for the following reasons.
まず、Nbの融点が2469℃と高いことである。NiおよびTiの融点はそれぞれ1455℃、1670℃であるので、これらの元素の混合物を加熱すると、NiおよびTiがNbより先に融解する。すると、Ni液体、Ti液体またはこれらが反応して生成したNiTi液体がNbを取り囲み、Nbが融解する温度まで加熱することが困難になり、Nbの溶け残りが発生する場合がある。Nbの溶け残りを防止するには、原料金属の配置方法や溶解手順に制約があり、問題となっていた。 First, the melting point of Nb is as high as 2469 ° C. Since the melting points of Ni and Ti are 1455 ° C. and 1670 ° C., respectively, when a mixture of these elements is heated, Ni and Ti are melted before Nb. Then, the Ni liquid, the Ti liquid, or the NiTi liquid generated by the reaction thereof surrounds Nb, making it difficult to heat to a temperature at which Nb melts, and Nb may remain undissolved. In order to prevent Nb from remaining undissolved, there are restrictions on the arrangement method and melting procedure of the raw metal, which has been a problem.
また、たとえ原料金属をすべて溶解できた場合でも、凝固の際に、合金の周辺部と中心部では冷却速度の差が生じて、均一な合金組織が得られない場合が多い。すると、合金部位によって水素透過性に差が生じるため、実用上の問題となっている。 Even when all of the raw metal can be dissolved, a difference in cooling rate occurs between the peripheral portion and the central portion of the alloy during solidification, and a uniform alloy structure is often not obtained. As a result, a difference in hydrogen permeability occurs depending on the alloy site, which is a practical problem.
水素の透過量は膜厚に反比例するので、得られた合金インゴットを薄膜化することが必要である。そのために圧延等の加工により水素透過合金薄膜を作製することが想定されている。ところが、Ni−Ti−Nb系のNiTi+TiNb2相合金は、室温で数十%の圧延が可能であるが、一般的な鉄鋼材料と比較するとかなり低い。そのため、水素透過合金として適切な厚さにまで圧延するには、圧延と焼鈍を何度も繰り返す必要があり、製造コスト増加の原因となっている。 Since the hydrogen permeation amount is inversely proportional to the film thickness, it is necessary to reduce the thickness of the obtained alloy ingot. Therefore, it is assumed that a hydrogen permeable alloy thin film is produced by processing such as rolling. However, the Ni—Ti—Nb NiTi + TiNb two-phase alloy can be rolled at several tens of percent at room temperature, but is considerably lower than a general steel material. For this reason, rolling to an appropriate thickness as a hydrogen permeable alloy requires repeated rolling and annealing, which causes an increase in manufacturing costs.
高融点元素や蒸気圧の高い元素を含む材料を製造する場合、粉末プロセスを用いる場合がある。このような手法は、例えば希土類永久磁石の作製方法として知られている(特許文献5)。溶解・凝固法を用いて作製した合金を粉砕し、圧粉化した後、焼結処理を行い均一で保持力の高い永久磁石を作製できる。本複相水素透過合金においても、この手法を用いて均一材を作製できると考えられるが、溶解・凝固法により作製した合金インゴットは非常に高い延性を示すため、粉砕することが不可能である。
このようなことから、水素透過性を担う相と耐水素脆化性を担う相とで構成された複相水素透過合金を、溶解・凝固法によらずに得ることが、あるいは溶解・凝固法で生じる組成・組織の不均一性を軽減することが、要望されている。 For this reason, it is possible to obtain a multi-phase hydrogen permeable alloy composed of a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement without using the melting / solidifying method, or the melting / solidifying method. It is desired to reduce the composition / tissue non-uniformity that occurs in
そこで、本発明は、水素透過性を担う相と耐水素脆化性を担う相とから構成される複相水素透過合金を、粉末冶金プロセスを用いて作製する技術を提供することを目的とする。 Then, this invention aims at providing the technique which produces the double phase hydrogen permeable alloy comprised from the phase which bears hydrogen permeability, and the phase which bears hydrogen embrittlement resistance using a powder metallurgy process. .
上記課題は、本発明者らが、複相水素透過合金を構成する純金属粉末、あるいは当該合金の水素化により作製した合金水素化物の脱水素処理により得られた粉末を室温で加圧して圧粉体とし、前記圧粉体を真空中で加熱処理を行うことにより解決できることを見出した。 The above problem is that the present inventors pressurize a pure metal powder constituting a multiphase hydrogen permeable alloy or a powder obtained by dehydrogenation of an alloy hydride prepared by hydrogenation of the alloy at room temperature. It has been found that the problem can be solved by preparing a powder and subjecting the green compact to heat treatment in vacuum.
すなわち、請求項1に記載の本発明の複相水素透過合金の製造方法は、水素透過性を担う相と耐水素脆化性を担う相とで構成された複相水素透過合金の製造方法であって、複数種類の粉末原料を選択し、これらを相互に混合する第1の工程と、前記粉末原料を真空中で加圧して圧粉体を作製する第2の工程と、前記圧粉体に加熱処理を施す第3の工程とを有し、前記第1の工程においては、前記複数種類の粉末原料の少なくとも一つとして、溶解・凝固法により作製された前記複相水素透過合金と水素との反応生成物を選択して、水素透過性を担う相と耐水素脆化性を担う相とを形成することを特徴とする。 That is, the method for producing a multiphase hydrogen permeable alloy according to the first aspect of the present invention is a method for producing a multiphase hydrogen permeable alloy comprising a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement resistance. A first step of selecting a plurality of types of powder raw materials and mixing them together; a second step of pressing the powder raw material in a vacuum to produce a green compact; and the green compact in a third step of performing heat treatment, the in the first step, the plurality of types of the at least one powder raw material, the multi-phase hydrogen permeation alloy and hydrogen is produced by melting and solidification method The reaction product is selected to form a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement resistance.
ここで、本明細書において「水素透過性を担う相」とは、専ら水素透過を行う相という意味ではなく、耐水素脆化性としての側面を有することがあるが、主として水素透過を担う機能を有する水素透過性に優れた相との意味である。同様に、「耐水素脆化性を担う相」についても、専ら耐水素脆化を行う相という意味ではなく、水素透過性としての側面を有することがあるが、主として耐水素脆化を担う機能を有する耐水素脆化性に優れた相との意味である。 Here, the term “phase responsible for hydrogen permeability” in the present specification does not mean a phase that exclusively performs hydrogen permeation, but may have an aspect of hydrogen embrittlement resistance, but a function mainly responsible for hydrogen permeation. This means a phase having excellent hydrogen permeability. Similarly, the “phase responsible for hydrogen embrittlement resistance” also does not mean a phase that performs hydrogen embrittlement resistance exclusively, but may have an aspect of hydrogen permeability, but functions mainly responsible for hydrogen embrittlement resistance This means a phase having excellent hydrogen embrittlement resistance.
これにより、圧粉体を作製する第2の工程を経て、加熱処理を施す第3の工程において、固相状態で反応し、効率よく複相水素透過合金を作製することができる。また、粉末原料を用いれば、溶解・凝固法で問題となる高融点金属の溶け残りや、凝固偏析、合金組成および組織のむらを防止することができる。さらに、粉末原料を用いれば、例えば薄膜などのような最終形状に近い形状の圧粉体を容易に作製できるため、合金作製後の薄膜化工程も簡略化できる。 Thus, in the third step of performing the heat treatment through the second step of producing the green compact, it is possible to react in the solid phase and efficiently produce the multiphase hydrogen permeable alloy. In addition, if a powder raw material is used, it is possible to prevent unmelted refractory metal, solidification segregation, alloy composition and unevenness of the structure, which are problems in the melting / solidification method. Furthermore, if a powder raw material is used, a green compact having a shape close to the final shape, such as a thin film, can be easily produced, so that the thinning process after the alloy production can be simplified.
例えば、水素透過が可能なNi−Ti−Nb系水素透過合金を通常の方法で溶解・凝固させると、NiTi相とTiNb相の2相組織を形成する。この合金を室温で水素と反応すると、前記NiTi相およびTiNb相が水素を吸蔵して水素化物へ変態して容易に微粉化する。この粉末を圧粉化して熱処理を行えば、まず合金中の水素が放出され、その後合金粒子同士の密着化が進行する。このような工程を経て複相水素合金を作製することが可能である。溶解・鋳造の際に組成や組織のむらが生じたとしても、粉末化して混合すれば、組成や組織のむらは解消される。 For example, when a Ni—Ti—Nb hydrogen permeable alloy capable of hydrogen permeation is melted and solidified by a normal method, a two-phase structure of NiTi phase and TiNb phase is formed. When this alloy is reacted with hydrogen at room temperature, the NiTi phase and the TiNb phase occlude hydrogen and transform into hydrides to be easily pulverized. When this powder is compacted and heat-treated, hydrogen in the alloy is first released, and then the adhesion between the alloy particles proceeds. It is possible to produce a multiphase hydrogen alloy through such a process. Even if the composition and the structure are uneven during melting and casting, the composition and the structure are removed by powdering and mixing.
なお、合金系はNi−Ti−Nb系に限定されない。複相水素透過合金である合金系は、A−B−C系(ただし、AはFe、Co、Niからなる群であり、BはTi、Zr、Hfからなる群であり、CはV、Nb、Taからなる群である)と記述できる。前記A−B−C系合金が水素透過合金として使用可能なのは、Cを固溶したAB相とAを固溶したBC相の2相領域が形成された場合である。これらの系においてもAとB、AとC間の生成エンタルピーは大きいため、Ni−Ti−Nb系合金と同様に燃焼合成による合金作製が可能である。また、溶解・凝固法で作製したAB+BC2相合金も、水素と反応して水素化物を形成する。 The alloy system is not limited to the Ni—Ti—Nb system. The alloy system that is a multiphase hydrogen permeable alloy is an ABC system (where A is a group consisting of Fe, Co, Ni, B is a group consisting of Ti, Zr, Hf, and C is V, Nb and Ta). The ABC-based alloy can be used as a hydrogen permeable alloy when a two-phase region of an AB phase in which C is dissolved and a BC phase in which A is dissolved is formed. Even in these systems, since the enthalpy of formation between A and B and between A and C is large, it is possible to produce an alloy by combustion synthesis as in the case of Ni—Ti—Nb alloys. Moreover, the AB + BC two-phase alloy produced by the melting / solidifying method also reacts with hydrogen to form a hydride.
また、このようなことから、選択される粉末原料は2種類あるいは3種類に限定されるものではなく、複数種類であれば足り、4種類以上であってもよい。 In addition, for this reason, the powder raw materials to be selected are not limited to two or three types, but may be a plurality of types, and may be four or more types.
さらに、このようなことから、第1の工程において、選択された粉末原料の全てが純金属粉末あるいは上記反応生成物であってもよいが、一部が純金属粉末あるいは上記反応生成物であってもよい。つまり、選択された複数種類の粉末原料の少なくとも一つが純金属粉末あるいは上記反応生成物であればよい。 Further, for this reason, in the first step, all of the selected powder raw materials may be pure metal powder or the above reaction product, but some are pure metal powder or the above reaction product. May be. That is, at least one of the plurality of selected powder raw materials may be pure metal powder or the reaction product.
粉末原料を選択し混合する第1の工程の後に、粉末に圧力を印加し、圧粉体を作製する第2の工程が行われる。水素透過合金膜は、膜前後に水素圧力差をつけて使用するので、バルク材でなければならない。また、合金中に大きな欠陥が存在すると、水素以外のガスが合金中を透過するので、緻密でなければならない。そのため、この工程が不可欠になる。また、この工程により、粉末粒子が緻密に充填されるので、燃焼合成反応の進行により欠陥が少ない合金材が得られる。 After the first step of selecting and mixing the powder raw material, a second step of applying pressure to the powder to produce a green compact is performed. Since the hydrogen permeable alloy membrane is used with a hydrogen pressure difference before and after the membrane, it must be a bulk material. Also, if there are large defects in the alloy, gases other than hydrogen permeate through the alloy, so it must be dense. Therefore, this process becomes indispensable. In addition, since the powder particles are densely packed by this step, an alloy material with few defects can be obtained by the progress of the combustion synthesis reaction.
請求項2に記載の発明は、請求項1記載の発明において、前記第3の工程においては、加熱処理の温度が1000℃より高いことを特徴とする。圧粉体を作製する第2の工程の後、加熱処理を施す第3の工程が行われる。加熱処理を行わないと粉末粒子の反応が起こらず、水素透過合金として適切な相が得られない。これらの相を生成させ、かつ、粉末原料間に隙間が残らないようにするには、高温での熱処理が必要になる。熱処理温度は1000℃より高いことが望ましい。 The invention according to claim 2 is characterized in that, in the invention according to claim 1 , the temperature of the heat treatment is higher than 1000 ° C. in the third step. After the second step of producing the green compact, a third step of performing heat treatment is performed. If the heat treatment is not performed, the reaction of the powder particles does not occur and an appropriate phase as a hydrogen permeable alloy cannot be obtained. Heat treatment at a high temperature is required in order to generate these phases and to avoid leaving gaps between the powder raw materials. The heat treatment temperature is desirably higher than 1000 ° C.
請求項3に記載の本発明の複相水素透過合金は、請求項1または2記載の複相水素透過合金の製造方法で作製され、厚さが0.01〜3mmであることを特徴とする。厚さが3mmを超えると、水素透過束(量)が小さくなり、水素透過効率が悪くなる。また、厚さが0.01mm未満であると、機械的強度が弱くなり、実用的でなくなる。 A multi-phase hydrogen permeable alloy according to a third aspect of the present invention is produced by the method for producing a multi-phase hydrogen permeable alloy according to the first or second aspect, and has a thickness of 0.01 to 3 mm. . When the thickness exceeds 3 mm, the hydrogen permeation flux (amount) becomes small, and the hydrogen permeation efficiency is deteriorated. On the other hand, if the thickness is less than 0.01 mm, the mechanical strength becomes weak and impractical.
請求項4に記載の発明は、請求項3記載の発明において、水素を取り込む側の面および水素を取り出す側の面にPd膜またはPd合金膜が形成され、当該Pd膜またはPd合金膜の厚さが50〜400nmの範囲内であることを特徴とする。このように合金材を挟んで、被処理原料ガス側(上流、高圧側)と精製水素側(下流、低圧水素側)との両側に所定の厚さのPd膜またはPd合金膜を形成すれば、当該合金膜の酸化、窒化等を防止でき、また水素の解離と再結合が容易に行われ得る。この範囲を外れると、薄い場合にはPd膜またはPd合金膜の剥離が生じ、厚い場合には不経済になる。 According to a fourth aspect of the present invention, in the third aspect of the invention, a Pd film or a Pd alloy film is formed on a surface that takes in hydrogen and a surface that takes out hydrogen, and the thickness of the Pd film or Pd alloy film is Is in the range of 50 to 400 nm. If a Pd film or a Pd alloy film having a predetermined thickness is formed on both sides of the raw material gas side (upstream, high-pressure side) and the purified hydrogen side (downstream, low-pressure hydrogen side) with the alloy material sandwiched in this way In addition, oxidation, nitridation, and the like of the alloy film can be prevented, and hydrogen can be easily dissociated and recombined. Outside this range, the Pd film or Pd alloy film peels off when it is thin, and becomes uneconomical when it is thick.
本発明によれば、水素透過性を担う相と耐水素脆化性を担う相からなる複相水素透過合金を粉末冶金プロセスを用いて作製することが可能になるという効果を奏する。 According to the present invention, it is possible to produce a multiphase hydrogen permeable alloy composed of a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement resistance using a powder metallurgy process.
これにより、溶解・凝固法で問題となる高融点金属の溶け残りや、凝固偏析、合金組成および組織のむらを抑制することができる。 Thereby, it is possible to suppress unmelted refractory metal, solidification segregation, alloy composition, and structure unevenness, which are problems in the melting / solidification method.
以下、本発明を実施するための最良の形態を、図面を参照しつつさらに具体的に説明する。重複した説明は省略されている。なお、ここでの説明は本発明が実施される最良の形態であることから、本発明は当該形態に限定されるものではない。 Hereinafter, the best mode for carrying out the present invention will be described more specifically with reference to the drawings. Duplicate explanations are omitted. In addition, since description here is the best form by which this invention is implemented, this invention is not limited to the said form.
本発明者らは、水素透過性を担う相と耐水素脆化性を担う相からなる複相水素透過合金の作製方法について種々検討した結果、複相水素透過合金を構成する純金属粉末原料から作製できることを見出した。また、溶解・凝固法により作製した複相水素透過合金と水素との反応性生物の粉末を原料とした場合でも、複相水素透過合金を作製できることを見出した。 As a result of various studies on a method for producing a multi-phase hydrogen permeable alloy comprising a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement resistance, the present inventors have determined from a pure metal powder raw material constituting the multi-phase hydrogen permeable alloy. It was found that it can be produced. It was also found that a multiphase hydrogen-permeable alloy can be produced even when a raw material is a powder of a reaction product of hydrogen and a multiphase hydrogen-permeable alloy produced by a dissolution / solidification method.
本発明の実施の形態は、水素透過性を担う相と耐水素脆化性を担う相とで構成された複相水素透過合金の製造方法であって、複数の粉末原料を選択し、これらを相互に混合する第1の工程と、前記粉末原料を加圧して圧粉体を作製する第2の工程と、前記圧粉体に加熱処理を施す第3の工程からなる。 An embodiment of the present invention is a method for producing a multiphase hydrogen permeable alloy composed of a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement resistance. It consists of a first step of mixing with each other, a second step of pressing the powder raw material to produce a green compact, and a third step of subjecting the green compact to a heat treatment.
前記粉末原料を選択し混合する第1の工程においては、複相水素透過合金を構成する元素の純金属粉末が粉末原料として選択される。粉末原料の粒度は特に限定されないが、本製造方法では、固相拡散によって合金化が行われるため、通常の溶解・凝固法より原子の拡散距離は小さい。そのため、粒の小さい粉末が必要である。好ましくは100メッシュ以下である。 In the first step of selecting and mixing the powder raw material, a pure metal powder of an element constituting the multiphase hydrogen permeable alloy is selected as the powder raw material. The particle size of the powder raw material is not particularly limited, but in this production method, since alloying is performed by solid phase diffusion, the diffusion distance of atoms is shorter than that of a normal dissolution / solidification method. Therefore, powder with small grains is necessary. Preferably it is 100 mesh or less.
あるいは、前記粉末原料を選択し混合する第1の工程においては、溶解・凝固法にて作製された複相水素透過合金と水素との反応性生物が粉末原料として選択される。前述した理由により、粉末原料の粒度は100メッシュ以下が望ましい。 Alternatively, in the first step of selecting and mixing the powder raw material, a reactive organism of hydrogen with a multiphase hydrogen permeable alloy prepared by a dissolution / solidification method is selected as the powder raw material. For the reasons described above, the particle size of the powder raw material is desirably 100 mesh or less.
粉末原料を混合する手段としては特に限定されず、乾式混合、湿式混合、あるいはボールミリング等を利用した機械式混合のいずれでもよい。 The means for mixing the powder raw material is not particularly limited, and may be any of dry mixing, wet mixing, or mechanical mixing using ball milling or the like.
上記第1の工程の後、粉末原料を混合し、最終形状に近い形状に圧粉化される第2の工程が行われる。この工程は、水素以外のガスを透過しない緻密な合金を作製するため、および水素圧力差に耐える強度を有する合金を作製するためには不可欠な工程である。 After the first step, a second step is performed in which powder raw materials are mixed and compacted into a shape close to the final shape. This step is an indispensable step for producing a dense alloy that does not transmit gas other than hydrogen and for producing an alloy having a strength that can withstand a hydrogen pressure difference.
粉末原料を装填した後、真空引きを行う。粉末を装填した段階では、粉末粒子間に多量の大気が存在するので、真空引きを行わないで加圧すると、混入した大気は最終的に空隙となって合金中に残る。この空隙は、膜の強度低下、水素分離能の低下の原因となるため、真空引きによる大気の除去が不可欠である。真空引きの後に粉末を上下から加圧すると、粉末粒子の塑性変形や破壊が起こり、次第に粒子間の空隙が減少して粒子同士が複雑に絡み合った圧粉体が作製できる。 After loading the powder material, evacuation is performed. At the stage of loading the powder, a large amount of air exists between the powder particles, so when pressurized without vacuuming, the mixed air finally becomes a void and remains in the alloy. Since these voids cause a decrease in membrane strength and a decrease in hydrogen separation performance, it is essential to remove the air by evacuation. When the powder is pressed from above and below after evacuation, the powder particles are plastically deformed and broken, and the voids between the particles are gradually reduced, so that a green compact in which the particles are intertwined in a complicated manner can be produced.
上記方法で作製した圧粉体は、水素透過を担う相と耐水素脆化性を担う相から構成されないため、水素分離能は得られない。そこで、圧粉化第2の工程の後に、熱処理によって目的相を生成させ(例えば、Ni−Ti−Nb系では、NiTi相とTiNb相)、粒子間の密着性を向上させるために熱処理第3の工程が行われる。 Since the green compact produced by the above method is not composed of a phase responsible for hydrogen permeation and a phase responsible for hydrogen embrittlement resistance, hydrogen separation ability cannot be obtained. Therefore, after the second step of compacting, the target phase is generated by heat treatment (for example, NiTi phase and TiNb phase in Ni—Ti—Nb system), and the third heat treatment is performed to improve the adhesion between particles. The process is performed.
第1の工程において純金属粉末原料を選択し混合した場合には、加熱処理中に純金属粉末が合金化し、NiTi相とTiNb相が形成される。また同時に、生成した合金粒子同士が強固に結合され、水素以外のガスを透過しない緻密な合金を作製できる。 When the pure metal powder raw material is selected and mixed in the first step, the pure metal powder is alloyed during the heat treatment to form a NiTi phase and a TiNb phase. At the same time, it is possible to produce a dense alloy in which the produced alloy particles are firmly bonded to each other and do not transmit a gas other than hydrogen.
一方、第1の工程において溶解・凝固法により作製された前記複相水素透過合金と水素との反応生成物の粉末原料を選択し混合した場合は、加熱処理によりまず合金水素化物から水素が放出される。その後生成したNiTi相およびTiNb相同士が強固に結合され、水素以外のガスを透過しない緻密な合金が作製できる。 On the other hand, when the powder raw material of the reaction product of the multiphase hydrogen permeable alloy and hydrogen produced by the dissolution / solidification method in the first step is selected and mixed, hydrogen is first released from the alloy hydride by heat treatment. Is done. Thereafter, the produced NiTi phase and TiNb phase are firmly bonded to each other, and a dense alloy that does not transmit gas other than hydrogen can be produced.
本発明の複相水素透過合金からなる金属膜は、Pd合金膜に比ベ1/4〜1/8の費用で作製可能のため低コストであり、また、将来懸念されるPdの資源枯渇の際の代替品として適用できる材料といえる。 The metal film made of the multi-phase hydrogen permeable alloy of the present invention can be manufactured at a cost of 1/4 to 1/8 of the Pd alloy film, and is low in cost. It can be said that it is a material that can be applied as a substitute for the occasion.
また、溶解時の溶け残り、凝固時の偏析等の影響を受けず、最終形状に近い形状で合金を得ることができるので、合金製造工程の簡略化が可能である。 Further, since the alloy can be obtained in a shape close to the final shape without being affected by undissolved residue at the time of melting and segregation at the time of solidification, the alloy manufacturing process can be simplified.
このようにして作製された水素透過用金属膜は、厚さが薄いほど水素透過束(量)が大きくなり、水素透過効率が良くなる。しかし、金属膜の厚さが薄くなれば機械的強度が弱くなる。そのためこれら合金系の場合、厚さは0.01〜3mmであることが好ましい。 As the thickness of the metal membrane for hydrogen permeation produced in this way is smaller, the hydrogen permeation flux (amount) increases and the hydrogen permeation efficiency is improved. However, as the metal film becomes thinner, the mechanical strength becomes weaker. Therefore, in the case of these alloy systems, the thickness is preferably 0.01 to 3 mm.
これら合金材を水素透過用金属膜として利用するためには、その合金材を挟んで、原料ガス側(上流、高圧水素側)である水素を取り込む側の面と精製水素側(下流、低圧水素側)である水素と取り出す側の面との両面に、水素の解離と再結合のために、さらにPd膜またはPd合金膜を形成することが必要である。その厚さは、一般に50〜400nm、好ましくは100〜200nmである。 In order to use these alloy materials as metal membranes for hydrogen permeation, the surface of the source gas side (upstream, high-pressure hydrogen side) and the purified hydrogen side (downstream, low-pressure hydrogen) are sandwiched between the alloy materials. It is necessary to further form a Pd film or a Pd alloy film for dissociation and recombination of hydrogen on both the hydrogen (side) and the surface on the extraction side. The thickness is generally 50 to 400 nm, preferably 100 to 200 nm.
水素の解離と再結合のために、これら合金膜の両側にPdまたはPd合金膜を形成する方法は特に制限されず、例えば、真空蒸着、スパッタリング、イオンプレーティング、電解めっき、無電解めっき等のいずれで行ってもよい。 The method of forming Pd or Pd alloy film on both sides of these alloy films for hydrogen dissociation and recombination is not particularly limited. For example, vacuum deposition, sputtering, ion plating, electrolytic plating, electroless plating, etc. Either may be performed.
以下、本発明の実施例および比較例を説明する。 Examples of the present invention and comparative examples will be described below.
(実施例1) (Example 1)
合金材の組成がNi21Ti23Nb56(原子%)になるように、Ni粉末(純度99.9重量%、100メッシュ以下)、Ti粉末(純度99.9重量%、100メッシュ以下)およびNb粉末(純度99.9重量%、100メッシュ以下)を配合した。配合した混合粉末にエタノールを加えて泥状とし、メノウ乳鉢内でこれらを相互に混合した。 Ni powder (purity 99.9 wt%, 100 mesh or less), Ti powder (purity 99.9 wt%, 100 mesh or less), and so that the composition of the alloy material is Ni 21 Ti 23 Nb 56 (atomic%) Nb powder (purity 99.9% by weight, 100 mesh or less) was blended. Ethanol was added to the blended mixed powder to form a mud, and these were mixed with each other in an agate mortar.
混合した泥状粉末混合物を、錠剤成型器の直径10mmの円筒内に装填した。その後円筒内を油回転ポンプで15分間の真空引きを行い、円筒内の大気を除去しエタノールを揮発させた。その後、油回転ポンプを用いて真空引きを行いながら油圧プレス機により円筒内の粉末に200kg/cm2の圧力を印加し、10分間保持した。圧力を減じた後に試料を取り出し、直径10mm、厚さ1mmの圧粉体を得た。 The mixed mud powder mixture was loaded into a 10 mm diameter cylinder of a tablet press. Thereafter, the cylinder was evacuated for 15 minutes with an oil rotary pump to remove the atmosphere in the cylinder and volatilize ethanol. Thereafter, a pressure of 200 kg / cm 2 was applied to the powder in the cylinder by a hydraulic press while evacuating using an oil rotary pump, and the pressure was maintained for 10 minutes. After reducing the pressure, a sample was taken out to obtain a green compact having a diameter of 10 mm and a thickness of 1 mm.
この圧粉体のSEM写真を図1に、圧粉体作製直後のX線回折図形を図2(a)に示す。SEM写真(図1)より、圧粉化により粉末粒子が塑性変形し、粒子同士が複雑に絡み合っていることが分かる。また、X線回折図形(図2)より、この圧粉体がfcc構造のNi、hcp構造のTiおよびbcc構造のNbから構成されていることが分かる。 An SEM photograph of the green compact is shown in FIG. 1, and an X-ray diffraction pattern immediately after the green compact is produced is shown in FIG. 2 (a). From the SEM photograph (FIG. 1), it can be seen that the powder particles are plastically deformed by compaction, and the particles are intertwined in a complicated manner. Further, from the X-ray diffraction pattern (FIG. 2), it can be seen that the green compact is composed of Ni having an fcc structure, Ti having an hcp structure, and Nb having a bcc structure.
次に、水素透過合金として適切な相を得るために熱処理を行った。作製した圧粉体を透明石英管内に装填し、石英管内を真空引きした。真空引きは、油回転ポンプと油拡散ポンプを用い、5×10−3Pa以下まで行った。真空引き完了後に石英管を封じた後、熱処理を行った。熱処理温度、時間は、1100℃、1時間である。熱処理終了後に石英管を取り出し、空冷により室温まで冷却した。 Next, heat treatment was performed to obtain an appropriate phase as a hydrogen permeable alloy. The produced green compact was loaded into a transparent quartz tube, and the quartz tube was evacuated. The evacuation was performed to 5 × 10 −3 Pa or less using an oil rotary pump and an oil diffusion pump. After the evacuation was completed, the quartz tube was sealed and then heat treatment was performed. The heat treatment temperature and time are 1100 ° C. and 1 hour. After completion of the heat treatment, the quartz tube was taken out and cooled to room temperature by air cooling.
熱処理終了後の試料の両側を紙ヤスリ、バフ、次いで、直径0.5μmのαアルミナで研磨して鏡面状態にした。この試料のX線回折図形を図2(b)に示す。熱処理後に、B2構造を有する相とbcc構造を有する相の2相構造に変化していることが分かる。この合金の走査電子顕微鏡(SEM)写真を図3に示す。この図3より、灰色の相と白色の相の2相になっていることが観察された。エネルギー分散型X線分析(EDS)の結果、灰色の相の組成はNi47.3Ti42.3Nb10.4(原子%)、白色の相はNi2.7Ti6.2Nb91.1(原子%)であった。以上の結果より、灰色の相はB2構造のNiTi相、白色の相はbcc構造のTiNb相であることが言える。また、熱処理中に試料が溶解した形跡は見られず、固相反応により合金が作製できたといえる。 Both sides of the sample after the heat treatment were polished with a paper file, a buff, and then α-alumina having a diameter of 0.5 μm to form a mirror surface. The X-ray diffraction pattern of this sample is shown in FIG. It can be seen that after the heat treatment, the phase changes to a two-phase structure of a phase having a B2 structure and a phase having a bcc structure. A scanning electron microscope (SEM) photograph of this alloy is shown in FIG. From FIG. 3, it was observed that there were two phases, a gray phase and a white phase. As a result of energy dispersive X-ray analysis (EDS), the composition of the gray phase is Ni 47.3 Ti 42.3 Nb 10.4 (atomic%), and the white phase is Ni 2.7 Ti 6.2 Nb 91. 1 (atomic%). From the above results, it can be said that the gray phase is a B2 structure NiTi phase and the white phase is a bcc structure TiNb phase. In addition, no evidence of dissolution of the sample during the heat treatment was observed, and it can be said that the alloy was produced by solid phase reaction.
図3にはTiNb相中に数μm程度の空隙が観察されるが、膜厚と比較して十分小さいので、空隙が膜を貫通することはなく、水素以外のガスが透過することはない。また、黒色のNiTi2相が観察されるが、その生成量はごくわずかであり、主にNiTi相とTiNb相の2相合金であるといえる。以上より、熱処理工程において合金化と緻密化が同時に起こっているといえる。 In FIG. 3, voids of about several μm are observed in the TiNb phase, but they are sufficiently small compared to the film thickness, so that the voids do not penetrate the film and gases other than hydrogen do not permeate. Moreover, although a black NiTi 2 phase is observed, the amount produced is very small, and it can be said that it is mainly a two-phase alloy of a NiTi phase and a TiNb phase. From the above, it can be said that alloying and densification occur simultaneously in the heat treatment step.
次に、この試料の水素透過試験を以下の手順で行った。 Next, a hydrogen permeation test of this sample was performed according to the following procedure.
上記αアルミナで研磨した試料をアセトンで洗浄後、高周波マグネトロンスパッタ装置内にセットした。油回転ポンプ、クライオポンプを用いて、3×10−5Torrまで真空引きを行った。その後、試料表面に付着した酸化被膜等を除去するため、RF電源を用いて10分間の逆スパッタを行った。次いで、試料をスパッタ装置内で350℃に加熱し、DC電源を用いて5分間Pdのスパッタを行った。この条件で被覆されるPd膜の厚さは190nmである。 The sample polished with α-alumina was washed with acetone and then set in a high-frequency magnetron sputtering apparatus. Using an oil rotary pump and a cryopump, vacuuming was performed up to 3 × 10 −5 Torr. Thereafter, reverse sputtering was performed for 10 minutes using an RF power source in order to remove the oxide film and the like attached to the sample surface. Next, the sample was heated to 350 ° C. in the sputtering apparatus, and Pd sputtering was performed using a DC power source for 5 minutes. The thickness of the Pd film coated under these conditions is 190 nm.
水素透過測定は次のような流量法により実施した。先ず、Pd成膜した円盤試料をCuガスケットでシールした。次いで、円盤の両側を油拡散ポンプにより排気して3×10−3Pa以下の圧力にし、その後円盤を加熱して673Kにし、そのまま保持した。水素ガスを導入する前に、アルゴンガスによる透過試験を行った。アルゴンガスの透過が確認された場合には、合金の破断や粒子間の密着性不良の恐れがあり、水素透過合金として使用することはできない。合金の下流側および上流側に、アルゴンガスをそれぞれ0.1および0.2MPa導入し、アルゴンガスの透過を調べた。その結果、アルゴンガスの透過は観察されず、合金試料は健全であることが確認された。 Hydrogen permeation measurement was carried out by the following flow rate method. First, the disk sample on which the Pd film was formed was sealed with a Cu gasket. Next, both sides of the disk were evacuated with an oil diffusion pump to a pressure of 3 × 10 −3 Pa or less, and then the disk was heated to 673 K and held as it was. Before introducing hydrogen gas, a permeation test with argon gas was performed. If permeation of argon gas is confirmed, there is a risk of fracture of the alloy or poor adhesion between particles, and it cannot be used as a hydrogen permeable alloy. Argon gas was introduced at 0.1 and 0.2 MPa to the downstream side and upstream side of the alloy, respectively, and the permeation of the argon gas was examined. As a result, the permeation of argon gas was not observed, and it was confirmed that the alloy sample was healthy.
アルゴンガスの透過試験後、合金の両側を再度油回転ポンプで真空引きした。その後、水素ガス(純度99.99999%)を下流側および上流側に、それぞれ0.1および0.2MPa導入し、その後水素透過測定を行った。上流側の水素圧力を0.2MPaから0.8MPaまで増大させ、また、温度は段階的に673Kから523Kまで50K間隔で下げた。一定温度に30分保持してから水素透過試験を開始した。水素透過束J(molH2m−2s−1)はマスフローメータを用いて測定した。 After the argon gas permeation test, both sides of the alloy were again evacuated with an oil rotary pump. Thereafter, hydrogen gas (purity: 99.99999%) was introduced into the downstream side and the upstream side, respectively, at 0.1 and 0.2 MPa, and then hydrogen permeation measurement was performed. The upstream hydrogen pressure was increased from 0.2 MPa to 0.8 MPa, and the temperature was decreased stepwise from 673 K to 523 K at 50 K intervals. After maintaining at a constant temperature for 30 minutes, the hydrogen permeation test was started. The hydrogen permeation flux J (molH 2 m −2 s −1 ) was measured using a mass flow meter.
数式(1)に示されるように、J×L対(Pu0.5−Pd0.5)プロットの傾きから水素透過係数Φが求められる。 As shown in Equation (1), the hydrogen permeation coefficient Φ is obtained from the slope of the J × L vs. (Pu 0.5 −Pd 0.5 ) plot.
上記したように得られた合金材について、J×L対(Pu0.5−Pd0.5)プロットの傾きから計算した水素透過係数Φの温度依存性をアレニウスプロットの形で図4に示す。図4には、比較のために、純Pdおよび溶解・鋳造法で作製した同一組成の合金の結果も示してある。 FIG. 4 shows the temperature dependence of the hydrogen permeability coefficient Φ calculated from the slope of the J × L vs. (Pu 0.5 −Pd 0.5 ) plot for the alloy material obtained as described above in the form of an Arrhenius plot. . For comparison, FIG. 4 also shows the results of pure Pd and alloys of the same composition produced by melting and casting.
この純金属粉末から作製した合金の水素透過係数は、673Kで4.61×10−8(molH2m−1s−1Pa−0.5)であり、温度の下降に従って水素透過係数が減少した。また、純Pdや溶解・鋳造法により作製した合金材の水素透過係数より高いことが分かる。さらに、純金属粉末から作製した合金は523Kでも破壊せず、良好な耐水素脆化性も有している。以上より、本プロセスによって作製した合金は、溶解・凝固材(1.8×10−8(molH2m−1s−1Pa−0.5))と比較して高い水素透過性を有し、水素透過合金として使用可能であった。 The hydrogen permeability coefficient of the alloy produced from this pure metal powder is 4.61 × 10 −8 (molH 2 m −1 s −1 Pa −0.5 ) at 673 K, and the hydrogen permeability coefficient decreases as the temperature decreases. did. Moreover, it turns out that it is higher than the hydrogen permeability coefficient of the alloy material produced by pure Pd or the melt | dissolution and casting method. Furthermore, the alloy produced from the pure metal powder does not break even at 523K, and has good hydrogen embrittlement resistance. As mentioned above, the alloy produced by this process has high hydrogen permeability compared with the melted / solidified material (1.8 × 10 −8 (molH 2 m −1 s −1 Pa −0.5 )). It could be used as a hydrogen permeable alloy.
この純金属粉末を原料とした合金材が、溶解・凝固材より高い水素透過性を有する理由として、TiNb相中のNb濃度の違いが考えられる。本複相合金は、NiTi相とTiNb相の2相から構成され、TiNb相が合金の水素透過性を担っている。この合金を構成するNi、Ti、Nbを比較すると、Nbが最も高い水素透過係数を有している。したがって、TiNb相中のNbが合金の水素透過性を担っていると考えられる。粉末から作製した合金と溶解・鋳造合金のTiNb相中のNb濃度を比較すると、前者は約91原子%、後者は約83原子%であった。つまり、粉末から作製した合金のTiNb相には、高い水素透過係数を有するNbが濃縮している。このことにより、粉末から作製した合金が高い水素透過係数を有すると考えられる。 The reason why the alloy material made of the pure metal powder as a raw material has higher hydrogen permeability than the dissolved / solidified material is considered to be a difference in Nb concentration in the TiNb phase. This multiphase alloy is composed of two phases, a NiTi phase and a TiNb phase, and the TiNb phase is responsible for the hydrogen permeability of the alloy. When Ni, Ti, and Nb constituting this alloy are compared, Nb has the highest hydrogen permeability coefficient. Therefore, it is considered that Nb in the TiNb phase is responsible for the hydrogen permeability of the alloy. When the Nb concentration in the TiNb phase of the alloy produced from the powder and the melted / cast alloy was compared, the former was about 91 atomic% and the latter was about 83 atomic%. In other words, Nb having a high hydrogen permeability coefficient is concentrated in the TiNb phase of the alloy produced from the powder. This suggests that an alloy made from powder has a high hydrogen permeability coefficient.
(実施例2) (Example 2)
実施例1と同様の組成、方法で合金試料を作製した。ただし、熱処理温度、時間は1100℃、30分である。X線回折、SEM観察、EDS分析の結果、この試料も主にNiTi相とTiNb相の2相構造を呈していた。 An alloy sample was prepared by the same composition and method as in Example 1. However, the heat treatment temperature and time are 1100 ° C. and 30 minutes. As a result of X-ray diffraction, SEM observation, and EDS analysis, this sample also mainly exhibited a two-phase structure of NiTi phase and TiNb phase.
実施例1と同様の方法でこの合金試料の水素透過性を測定した。この合金試料の水素透過係数は673Kで4.65×10−8(molH2m−1s−1Pa−0.5)であり、溶解・凝固材と比較して高い水素透過性を有し、水素透過合金として使用可能であった。 The hydrogen permeability of this alloy sample was measured by the same method as in Example 1. This alloy sample has a hydrogen permeation coefficient of 4.65 × 10 −8 (molH 2 m −1 s −1 Pa −0.5 ) at 673K, and has a high hydrogen permeability compared to the dissolved / solidified material. It could be used as a hydrogen permeable alloy.
(実施例3) Example 3
実施例1と同様の組成、方法で合金試料を作製した。ただし、熱処理温度、時間は1050℃、6時間である。X線回折、SEM観察、EDS分析の結果、この試料も主にNiTi相とTiNb相の2相構造を呈していた。 An alloy sample was prepared by the same composition and method as in Example 1. However, the heat treatment temperature and time are 1050 ° C. and 6 hours. As a result of X-ray diffraction, SEM observation, and EDS analysis, this sample also mainly exhibited a two-phase structure of a NiTi phase and a TiNb phase.
実施例1と同様の方法でこの合金試料の水素透過性を測定した。この合金試料の水素透過係数は673Kで4.41×10−8(molH2m−1s−1Pa−0.5)であり、溶解・凝固材と比較して高い水素透過性を有し、水素透過合金として使用可能であった。 The hydrogen permeability of this alloy sample was measured by the same method as in Example 1. This alloy sample has a hydrogen permeation coefficient of 4.41 × 10 −8 (molH 2 m −1 s −1 Pa −0.5 ) at 673 K, and has a high hydrogen permeability compared to the dissolved / solidified material. It could be used as a hydrogen permeable alloy.
(実施例4) Example 4
実施例1と同様の組成、方法で合金試料を作製した。ただし、熱処理温度、時間は1050℃、1時間である。X線回折、SEM観察、EDS分析の結果、この試料も主にNiTi相とTiNb相の2相構造を呈していた。 An alloy sample was prepared by the same composition and method as in Example 1. However, the heat treatment temperature and time are 1050 ° C. and 1 hour. As a result of X-ray diffraction, SEM observation, and EDS analysis, this sample also mainly exhibited a two-phase structure of NiTi phase and TiNb phase.
実施例1と同様の方法でこの合金試料の水素透過性を測定した。この合金試料の水素透過係数は673Kで4.28×10−8(molH2m−1s−1Pa−0.5)であり、溶解・凝固材と比較して高い水素透過性を有し、水素透過合金として使用可能であった。 The hydrogen permeability of this alloy sample was measured by the same method as in Example 1. The hydrogen permeation coefficient of this alloy sample is 4.28 × 10 −8 (molH 2 m −1 s −1 Pa −0.5 ) at 673 K, and has high hydrogen permeability compared to the melted / solidified material. It could be used as a hydrogen permeable alloy.
(実施例5) (Example 5)
実施例1と同様の方法で合金試料を作製した。ただし、合金組成がNi30Ti30Nb40(原子%)になるようにした。熱処理温度、時間は1100℃、1時間である。X線回折、SEM観察、EDS分析の結果、この試料も主にNiTi相とTiNb相の2相構造を呈していた。 An alloy sample was prepared in the same manner as in Example 1. However, the alloy composition was made to be Ni 30 Ti 30 Nb 40 (atomic%). The heat treatment temperature and time are 1100 ° C. and 1 hour. As a result of X-ray diffraction, SEM observation, and EDS analysis, this sample also mainly exhibited a two-phase structure of NiTi phase and TiNb phase.
実施例1と同様の方法でこの合金試料の水素透過性を測定した。この合金試料の水素透過係数は673Kで2.45×10−8(molH2m−1s−1Pa−0.5)であり、溶解・凝固材の透過係数と比較して高い水素透過性を有し、水素透過合金として使用可能であった。 The hydrogen permeability of this alloy sample was measured by the same method as in Example 1. The hydrogen permeation coefficient of this alloy sample is 2.45 × 10 −8 (molH 2 m −1 s −1 Pa −0.5 ) at 673K, which is higher than the permeation coefficient of the dissolved / solidified material. And could be used as a hydrogen permeable alloy.
以上の結果より、Ni粉末、Ti粉末およびNb粉末の混合粉末を原料とし、圧粉体を作製した後に熱処理を行うと、熱処理中に粉末原料が反応してNiTi相およびTiNb相が生成し、この反応性生物が強固に結合することが分かる。したがって、本方法は、高い水素透過係数を有する複相水素透過合金の作製方法として有効といえる。 From the above results, using a mixed powder of Ni powder, Ti powder and Nb powder as a raw material, and performing a heat treatment after producing a green compact, the powder raw material reacts during the heat treatment to produce a NiTi phase and a TiNb phase, It can be seen that this reactive organism binds tightly. Therefore, this method can be said to be effective as a method for producing a multiphase hydrogen permeable alloy having a high hydrogen permeability coefficient.
(実施例6) (Example 6)
実施例1と同様の方法で合金試料を作製した。ただし、合金組成がCo21Ti23Nb56(原子%)になるように、純Co粉末、純Ti粉末および純Nb粉末を混合した。なお、熱処理温度、時間は1210℃、1時間である。X線回折、SEM観察、EDS分析の結果、この試料は主にNbを固溶したCoTi相とCoを固溶したTiNb相の2相構造を呈していた。 An alloy sample was prepared in the same manner as in Example 1. However, pure Co powder, pure Ti powder, and pure Nb powder were mixed so that the alloy composition would be Co 21 Ti 23 Nb 56 (atomic%). The heat treatment temperature and time are 1210 ° C. and 1 hour. As a result of X-ray diffraction, SEM observation, and EDS analysis, this sample mainly exhibited a two-phase structure of a CoTi phase in which Nb was dissolved and a TiNb phase in which Co was dissolved.
実施例1と同様の方法でこの合金試料の水素透過性を測定した。この合金試料の水素透過係数は673Kで3.80×10−8(molH2m−1s−1Pa−0.5)であり、同一組成の溶解・凝固材の水素透過係数(3.31×10−8(molH2m−1s−1Pa−0.5))と比較して高い水素透過性を有し、水素透過合金として使用可能であった。 The hydrogen permeability of this alloy sample was measured by the same method as in Example 1. The hydrogen permeation coefficient of this alloy sample is 3.80 × 10 −8 (molH 2 m −1 s −1 Pa −0.5 ) at 673 K, and the hydrogen permeation coefficient (3.31) of the dissolved / solidified material having the same composition. Compared to × 10 −8 (molH 2 m −1 s −1 Pa −0.5 )), it has high hydrogen permeability and can be used as a hydrogen permeable alloy.
以上の結果より、本複相水素透過合金作製法はNi−Ti−Nb系に限らず、Co−Ti−Nb系にも適用可能であることが分かる。複相水素透過合金として使用できる合金系は、A−B−C系(ただし、AはFe、Co、Niからなる群であり、BはTi、Zr、Hfからなる群であり、CはV、Nb、Taからなる群である)と記述できる。前記A−B−C系合金が水素透過合金として使用可能なのは、Cを固溶したAB相とAを固溶したBC相の2相領域が形成された場合である。これらの系においてもAとB、AとC間の生成エンタルピーは大きいため、Ni−Ti−Nb系やCo−Ti−Nb系以外の合金系においても、本作製方法を適用できると考えられる。 From the above results, it can be seen that the present method for producing a multiphase hydrogen permeable alloy is applicable not only to the Ni—Ti—Nb system but also to the Co—Ti—Nb system. An alloy system that can be used as a multiphase hydrogen permeable alloy is an ABC system (where A is a group consisting of Fe, Co, Ni, B is a group consisting of Ti, Zr, Hf, and C is V , Nb, and Ta). The ABC-based alloy can be used as a hydrogen permeable alloy when a two-phase region of an AB phase in which C is dissolved and a BC phase in which A is dissolved is formed. Even in these systems, the production enthalpy between A and B and between A and C is large, so it is considered that the present manufacturing method can be applied to alloy systems other than Ni—Ti—Nb and Co—Ti—Nb.
(実施例7) (Example 7)
合金組成がNi21Ti23Nb56(原子%)になるように、Ni(純度99・9%)、Ti(純度99.5%)、Nb(99.9%)の所定量を配合した。この配合物をアーク溶解炉に装填し、真空引きを行った。真空引きは、油回転ポンプと油拡散ポンプを用い、1.3×10−3Pa以下まで行った。真空引き完了後、36mmHgのアルゴンガスを導入しアーク溶解を行った。均一な合金を作製するため、溶解後の鋳塊を反転し再溶解を行った。鋳塊の反転−再溶解は6回行った。このようにして得られた鋳塊を室温で圧延し、幅15mm、厚さ1mmの板状試料を得た。 Predetermined amounts of Ni (purity 99.9%), Ti (purity 99.5%), and Nb (99.9%) were blended so that the alloy composition would be Ni 21 Ti 23 Nb 56 (atomic%). This blend was loaded into an arc melting furnace and evacuated. The evacuation was performed to 1.3 × 10 −3 Pa or less using an oil rotary pump and an oil diffusion pump. After completion of evacuation, arc melting was performed by introducing 36 mmHg argon gas. In order to produce a uniform alloy, the ingot after melting was inverted and remelted. The inversion-remelting of the ingot was performed 6 times. The ingot thus obtained was rolled at room temperature to obtain a plate-like sample having a width of 15 mm and a thickness of 1 mm.
この板状試料をアセトンで洗浄した後、ステンレス製の耐圧反応容器内に装填し、ジーベルツ型水素吸蔵装置に固定した。次いで、油回転ポンプと油拡散ポンプを用い、1.3×10−3Pa以下まで反応容器内を真空引きした。その後、電気炉を用いて反応容器を400℃まで加熱し、真空引きを行いながら1時間保持した。この処理を活性化処理といい、合金表面に生成した酸化被膜等を除去し、水素吸蔵速度を高める効果がある。活性化終了後、温度を維持したまま5MPaの水素を導入し、1時間水素と反応させた。この状態で反応容器を室温まで冷却し、12時間保持した。その後、反応容器内の水素を放出し、水素化試料を取り出した。 The plate-like sample was washed with acetone, then loaded into a stainless pressure-resistant reaction vessel, and fixed to a Siebelz type hydrogen storage device. Next, the inside of the reaction vessel was evacuated to 1.3 × 10 −3 Pa or less using an oil rotary pump and an oil diffusion pump. Thereafter, the reaction vessel was heated to 400 ° C. using an electric furnace and held for 1 hour while evacuating. This treatment is called activation treatment, and has the effect of removing the oxide film formed on the alloy surface and increasing the hydrogen storage rate. After the activation was completed, 5 MPa of hydrogen was introduced while maintaining the temperature and reacted with hydrogen for 1 hour. In this state, the reaction vessel was cooled to room temperature and held for 12 hours. Thereafter, hydrogen in the reaction vessel was released, and a hydrogenated sample was taken out.
取り出した試料は水素を吸蔵して非常に脆くなっていた。この試料を乳鉢で100メッシュ以下に粉砕した。その後、実施例1と同様の方法で圧粉体を作製した。ただし、圧粉化の際、直径20mmの円筒を用いたので、得られた圧粉体の直径は20mmである。 The sample taken out was very brittle due to occlusion of hydrogen. This sample was pulverized to 100 mesh or less in a mortar. Thereafter, a green compact was produced in the same manner as in Example 1. However, since a cylinder with a diameter of 20 mm was used in the compacting, the diameter of the obtained green compact was 20 mm.
水素化後の試料の水素吸蔵量および水素放出曲線は、水素分析装置を用いて調べた。黒鉛坩堝に試料を装填後、坩堝を毎秒2Kで加熱して放出した水素を測定した。その結果、試料中の水素濃度は1.7重量%であり、すべての水素を放出させるには、700℃以上に加熱する必要があることが分かった。 The hydrogen storage amount and hydrogen release curve of the sample after hydrogenation were examined using a hydrogen analyzer. After loading the sample into the graphite crucible, the released hydrogen was measured by heating the crucible at 2 K / sec. As a result, the hydrogen concentration in the sample was 1.7% by weight, and it was found that it was necessary to heat to 700 ° C. or higher in order to release all hydrogen.
圧粉体を石英間内に装填し、実施例1と同様に真空引きを行った。その後、真空引きを行ったまま、電気炉を用いて石英管を1100℃まで加熱し6時間保持した。その後石英管を室温まで空冷し、合金試料を取り出した。 The green compact was loaded in the quartz space and evacuated as in Example 1. Thereafter, the quartz tube was heated to 1100 ° C. using an electric furnace while being evacuated and held for 6 hours. Thereafter, the quartz tube was air-cooled to room temperature, and an alloy sample was taken out.
図5にアーク溶解で作製した鋳造状態の合金試料のX線回折図形((a))、水素化後に作製した圧粉体試料のX線回折図形((b))、および熱処理後の試料のX線回折図形((c))を示す。また、上記(a)〜(c)に対応した試料のSEM写真を図6(a)〜(c)に示す。 FIG. 5 shows an X-ray diffraction pattern ((a)) of a cast alloy sample prepared by arc melting, an X-ray diffraction pattern ((b)) of a green compact sample prepared after hydrogenation, and a sample after heat treatment. An X-ray diffraction pattern ((c)) is shown. In addition, SEM photographs of samples corresponding to the above (a) to (c) are shown in FIGS.
アーク溶解で作製した試料は、複相水素透過合金として必要なB2型NiTi相とbcc型TiNb相から構成されている。また、TiNb相が初晶として生成し、共晶(NiTi+TiNb)で囲まれた組織を有している。この合金はこのままで水素透過が可能であるが、場所によって組織が異なるため、水素透過特性にばらつきが生じる。 A sample prepared by arc melting is composed of a B2 type NiTi phase and a bcc type TiNb phase which are necessary as a multiphase hydrogen permeable alloy. Further, the TiNb phase is generated as a primary crystal and has a structure surrounded by eutectic (NiTi + TiNb). This alloy can be permeated with hydrogen as it is, but the structure varies depending on the location, resulting in variations in hydrogen permeation characteristics.
水素化後の圧粉体試料は、TiNbH相(正方晶)、TiNbH2相(立方晶)、NiTiH相(正方晶)およびNiTi2H0.5相(立方晶)の4種の水素化物から構成されていた。鋳造状態で存在していたNiTi相およびTiNb相は水素吸蔵により、4種の水素化物へ分解する。圧粉体のSEM写真では、純金属を圧粉した場合と比較して粉末粒子の充填が不完全であることが分かる。水素化物粉末は硬くて塑性変形しないためと考えられる。 The green compact samples after hydrogenation consisted of four kinds of hydrides of TiNbH phase (tetragonal), TiNbH 2 phase (cubic), NiTiH phase (tetragonal) and NiTi 2 H 0.5 phase (cubic). Was composed. The NiTi phase and TiNb phase that existed in the cast state are decomposed into four types of hydrides by hydrogen storage. In the SEM photograph of the green compact, it can be seen that the filling of the powder particles is incomplete compared to the case where the pure metal is compacted. This is probably because the hydride powder is hard and does not plastically deform.
熱処理後の試料の水素分析を行った結果、水素含有量はほぼ0であった。1100℃×6時間の熱処理で、水素は完全に放出されることが分かる。この合金のX線回折図形を見ると、一部NiTi2相の生成が見られるが、B2型のNiTi相とbcc型のTiNb相が生成していることが分かる。したがって、水素化物から水素が放出されると元の相構造に戻ることがいえる。 As a result of hydrogen analysis of the sample after the heat treatment, the hydrogen content was almost zero. It can be seen that hydrogen is completely released by heat treatment at 1100 ° C. × 6 hours. From the X-ray diffraction pattern of this alloy, it can be seen that a part of NiTi 2 phase is generated, but a B2 type NiTi phase and a bcc type TiNb phase are generated. Therefore, it can be said that when hydrogen is released from the hydride, the original phase structure is restored.
実施例1と同様の方法でこの合金試料の水素透過性を測定した。水素透過性の測定前に、Arガスの透過試験を行ったが、Arガスの透過は観察されなかった。この合金試料の水素透過係数は673Kで4.66×10−8(molH2m−1s−1Pa−0.5)であり、溶解・凝固材の透過係数と比較して高い水素透過性を有し、水素透過合金として使用可能であった。 The hydrogen permeability of this alloy sample was measured by the same method as in Example 1. Prior to the measurement of hydrogen permeability, an Ar gas permeation test was performed, but no Ar gas permeation was observed. The hydrogen permeation coefficient of this alloy sample is 4.66 × 10 −8 (molH 2 m −1 s −1 Pa −0.5 ) at 673K, which is higher than the permeation coefficient of the dissolved / solidified material. And could be used as a hydrogen permeable alloy.
以上より、溶解・凝固で作製した合金を水素と反応させて水素化物粉末とし、圧粉化および熱処理によって、元の構造(NiTi+TiNb)を有する緻密な合金を作製することができる。 As described above, a dense alloy having the original structure (NiTi + TiNb) can be produced by reacting an alloy produced by melting and solidification with hydrogen to form a hydride powder, and compacting and heat treatment.
(比較例1) (Comparative Example 1)
実施例1と同様の組成、方法で合金試料を作製した。ただし、熱処理温度、時間は1000℃、6時間である。X線回折、EDS分析の結果、この合金材は主にNiTi相とTiNb相からなるが、脆い金属間化合物であるNiTi2相やNiNb相が比較的多く生成していた。また、空隙も多く観察された。 An alloy sample was prepared by the same composition and method as in Example 1. However, the heat treatment temperature and time are 1000 ° C. and 6 hours. As a result of X-ray diffraction and EDS analysis, this alloy material mainly consists of a NiTi phase and a TiNb phase, but a relatively large amount of NiTi 2 phase and NiNb phase, which are brittle intermetallic compounds, were generated. Many voids were also observed.
実施例1と同様の方法でこの合金のArガスの透過試験を行ったところ、Arガスの透過が観察された。合金の緻密化が不十分であると考えられる。この合金は水素透過合金として使用できなかった。 When an Ar gas permeation test of this alloy was performed in the same manner as in Example 1, the Ar gas permeation was observed. It is considered that the alloy is not sufficiently densified. This alloy could not be used as a hydrogen permeable alloy.
(比較例2) (Comparative Example 2)
実施例1と同様の組成、方法で合金試料を作製した。ただし、熱処理温度、時間は800℃、6時間である。X線回折、EDS分析の結果、この合金材はNiTi相やTiNb相が少量生成していたものの、純Ni、純Tiおよび純Nb相が多く観察され、合金化が十分に進行していないことが分かった。また、実施例1と同様の方法でこの合金のArガスの透過試験を行ったところ、Arガスの透過が観察された。合金の緻密化が不十分であると考えられる。この合金は水素透過合金として使用できなかった。 An alloy sample was prepared by the same composition and method as in Example 1. However, the heat treatment temperature and time are 800 ° C. and 6 hours. As a result of X-ray diffraction and EDS analysis, although a small amount of NiTi phase and TiNb phase were formed in this alloy material, a large amount of pure Ni, pure Ti and pure Nb phases were observed, and alloying did not proceed sufficiently I understood. Further, when an Ar gas permeation test of this alloy was performed in the same manner as in Example 1, the permeation of Ar gas was observed. It is considered that the alloy is not sufficiently densified. This alloy could not be used as a hydrogen permeable alloy.
(比較例3) (Comparative Example 3)
実施例1と同様の組成、方法で合金試料を作製した。ただし、熱処理温度、時間は1150℃、1時間である。SEM観察の結果、結晶粒が球状化し、合金が溶解した形跡が観察された。また、直径200μmを超える空隙が多数存在していた。したがって、この合金材は水素透過合金として使用できなかった。 An alloy sample was prepared by the same composition and method as in Example 1. However, the heat treatment temperature and time are 1150 ° C. and 1 hour. As a result of SEM observation, it was observed that the crystal grains were spheroidized and the alloy was dissolved. In addition, many voids having a diameter exceeding 200 μm existed. Therefore, this alloy material could not be used as a hydrogen permeable alloy.
以上の結果より、純金属粉末の合金化が進行するには800℃より高い温度が必要と考えられる。さらに、1000℃以下の温度で熱処理しても緻密な合金は得られない。したがって、水素透過合金として使用可能な合金材を得るには、1000℃を超える温度での熱処理が不可欠である。また、合金が溶解すると、粉末法の利点、例えば、TiNb相にNbが高い濃度で存在することなどの効果が得られないので、熱処理温度は合金材の融点以下に限定される。 From the above results, it is considered that a temperature higher than 800 ° C. is necessary for the alloying of the pure metal powder to proceed. Furthermore, a dense alloy cannot be obtained even if heat treatment is performed at a temperature of 1000 ° C. or lower. Therefore, in order to obtain an alloy material that can be used as a hydrogen permeable alloy, heat treatment at a temperature exceeding 1000 ° C. is essential. Further, when the alloy is dissolved, the advantage of the powder method, for example, the effect that Nb exists at a high concentration in the TiNb phase cannot be obtained, so that the heat treatment temperature is limited to the melting point or less of the alloy material.
(比較例4) (Comparative Example 4)
実施例7と同様の組成、方法で合金試料を作製した。ただし、熱処理温度、時間は1000℃、6時間である。熱処理後の試料はNiTi+TiNbの2相組織を有していたが、実施例1と同様の方法でこの合金のArガスの透過試験を行ったところ、Arガスの透過が観察された。合金の緻密化が不十分であると考えられる。この合金は水素透過合金として使用できなかった。以上より、水素化物を経由した製法でも、緻密な合金を作製するには1000℃を超える温度が必要になるといえる。 An alloy sample was prepared by the same composition and method as in Example 7. However, the heat treatment temperature and time are 1000 ° C. and 6 hours. The sample after the heat treatment had a NiTi + TiNb two-phase structure. When an Ar gas permeation test of this alloy was performed in the same manner as in Example 1, the Ar gas permeation was observed. It is considered that the alloy is not sufficiently densified. This alloy could not be used as a hydrogen permeable alloy. From the above, it can be said that a temperature exceeding 1000 ° C. is necessary to produce a dense alloy even in a production method via hydride.
本発明によれば、水素透過性を担う相と耐水素脆化性を担う相との複合合金である特定の組成を有する複相合金を純金属粉末原料および鋳造材を水素化して得られた水素化物粉末から作製できる。これらの圧粉、熱処理を経て、優れた水素透過性と耐水素脆化性とを両立して達成することができる。そのため、極めて高い効率で水素の透過を行うことができので、得られた高純度水素を、燃料電池用の供給燃料や、半導体、光ファイバ、薬品等の製造分野に適用可能である。 According to the present invention, a double-phase alloy having a specific composition, which is a composite alloy of a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement resistance, is obtained by hydrogenating a pure metal powder raw material and a cast material. It can be made from hydride powder. Through these compacting and heat treatment, both excellent hydrogen permeability and resistance to hydrogen embrittlement can be achieved. Therefore, since hydrogen can be permeated with extremely high efficiency, the obtained high-purity hydrogen can be applied to the manufacturing field of fuel for fuel cells, semiconductors, optical fibers, chemicals, and the like.
Claims (4)
複数種類の粉末原料を選択し、これらを相互に混合する第1の工程と、
前記粉末原料を真空中で加圧して圧粉体を作製する第2の工程と、
前記圧粉体に加熱処理を施す第3の工程とを有し、
前記第1の工程においては、前記複数種類の粉末原料の少なくとも一つとして、溶解・凝固法により作製された前記複相水素透過合金と水素との反応生成物を選択して、
水素透過性を担う相と耐水素脆化性を担う相とを形成することを特徴とする複相水素透過合金の製造方法。 A method for producing a multiphase hydrogen permeable alloy composed of a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement resistance,
A first step of selecting a plurality of types of powder raw materials and mixing them together;
A second step of pressing the powder raw material in a vacuum to produce a green compact;
And a third step of performing heat treatment to the green compact,
In the first step, as at least one of the plurality of types of powder raw materials, a reaction product of the multiphase hydrogen permeable alloy and hydrogen produced by a melting / solidification method is selected,
A method for producing a multi-phase hydrogen permeable alloy, comprising forming a phase responsible for hydrogen permeability and a phase responsible for hydrogen embrittlement resistance.
当該Pd膜またはPd合金膜の厚さが50〜400nmの範囲内であることを特徴とする請求項3記載の複相水素透過合金。 A Pd film or a Pd alloy film is formed on the surface that takes in hydrogen and the surface that takes out hydrogen,
4. The multiphase hydrogen permeable alloy according to claim 3, wherein the Pd film or the Pd alloy film has a thickness in the range of 50 to 400 nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006244265A JP4742269B2 (en) | 2006-09-08 | 2006-09-08 | Method for producing double-phase hydrogen permeable alloy and double-phase hydrogen permeable alloy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006244265A JP4742269B2 (en) | 2006-09-08 | 2006-09-08 | Method for producing double-phase hydrogen permeable alloy and double-phase hydrogen permeable alloy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008063630A JP2008063630A (en) | 2008-03-21 |
| JP4742269B2 true JP4742269B2 (en) | 2011-08-10 |
Family
ID=39286589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006244265A Active JP4742269B2 (en) | 2006-09-08 | 2006-09-08 | Method for producing double-phase hydrogen permeable alloy and double-phase hydrogen permeable alloy |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4742269B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5549205B2 (en) * | 2008-12-04 | 2014-07-16 | 日立金属株式会社 | Hydrogen separation alloy, hydrogen separation alloy rolling forming material, method for producing hydrogen separation alloy, and hydrogen separation apparatus |
| KR101281576B1 (en) * | 2010-10-28 | 2013-07-03 | 한국에너지기술연구원 | A hydrogen permeation alloy with dual phase and manufacturing method of hydrogen separation membrane using the same |
| JP2013086038A (en) * | 2011-10-19 | 2013-05-13 | Jx Nippon Oil & Energy Corp | Alloy film for hydrogen permeation |
| JP6050501B2 (en) | 2013-12-18 | 2016-12-21 | 功平 田口 | Metal-based structure or nanoparticles containing hydrogen, and method for producing the same |
| JP7359381B2 (en) * | 2019-08-27 | 2023-10-11 | 国立大学法人金沢大学 | Hydrogen separation alloy |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03267327A (en) * | 1990-03-16 | 1991-11-28 | Nisshin Steel Co Ltd | Production of permeable membrane consisting of pd-ag sintered alloy |
| JP4363633B2 (en) * | 2004-02-17 | 2009-11-11 | 株式会社アルバック | Double phase alloy for hydrogen separation / purification and production method thereof, metal membrane for hydrogen separation / purification and production method thereof |
-
2006
- 2006-09-08 JP JP2006244265A patent/JP4742269B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008063630A (en) | 2008-03-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5152433B2 (en) | Hydrogen separation alloy and manufacturing method thereof | |
| KR101290942B1 (en) | Multiple phase alloys for hydrogen separation-purification and method for preparing the alloys, and metal membranes for hydrogen separation-purification and method for preparing the metal membranes | |
| US10590516B2 (en) | Alloy for catalytic membrane reactors | |
| Ishikawa et al. | Effects of tungsten addition on hydrogen absorption and permeation properties of Nb40Ti30Ni30 alloy | |
| JP4742269B2 (en) | Method for producing double-phase hydrogen permeable alloy and double-phase hydrogen permeable alloy | |
| JP3749952B1 (en) | Crystalline double-phase hydrogen permeable alloy membrane and crystalline double-phase hydrogen permeable alloy membrane | |
| JP3749953B1 (en) | Double phase hydrogen permeable alloy and hydrogen permeable alloy membrane | |
| Orimo et al. | Synthesis of fine composite particles for hydrogen storage, starting from Mg-YNi2 mixture | |
| JP2004074070A (en) | Hydrogen permeable membrane | |
| JP4953337B2 (en) | Double phase alloy for hydrogen separation and purification | |
| JP5039968B2 (en) | Crystalline double phase hydrogen permeable alloy and hydrogen permeable alloy membrane | |
| JP4577775B2 (en) | Method for producing double phase alloy for hydrogen separation and purification | |
| JP5199760B2 (en) | Hydrogen permeation separation thin film with excellent hydrogen permeation separation performance | |
| JP5463557B2 (en) | Dual-phase hydrogen permeable alloy and method for producing the same | |
| JP2009291742A (en) | Hydrogen permeation member and hydrogen generating reactor using the same | |
| JP3882089B1 (en) | Crystalline double phase hydrogen permeable alloy and hydrogen permeable alloy membrane | |
| JP4953278B2 (en) | Hydrogen permeation separation thin film with excellent hydrogen permeation separation performance | |
| JP4018030B2 (en) | Hydrogen permeable membrane and manufacturing method thereof | |
| Wu et al. | Theoretical and experimental analysis of Nb-based alloy membranes at non-dilute hydrogen concentration | |
| JPH0819500B2 (en) | Hydrogen storage alloy thin film body and method for producing the same | |
| JP4953279B2 (en) | Hydrogen permeation separation thin film with excellent hydrogen permeation separation performance | |
| JP2005279484A (en) | Hydrogen permeable membrane and its manufacturing method | |
| JP4866382B2 (en) | Composite metal glass hydrogen separation membrane and method for producing the same | |
| CN111644600A (en) | A Nb-Zr-Co hydrogen separation material with continuous hydrogen permeation phase and its preparation method and application | |
| JP2006088037A (en) | Hydrogen permeable membrane and method for producing hydrogen permeable membrane |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090818 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110107 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110113 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110308 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110411 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 4742269 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |