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JP4866382B2 - Composite metal glass hydrogen separation membrane and method for producing the same - Google Patents
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JP4866382B2 - Composite metal glass hydrogen separation membrane and method for producing the same - Google Patents

Composite metal glass hydrogen separation membrane and method for producing the same Download PDF

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JP4866382B2
JP4866382B2 JP2008077292A JP2008077292A JP4866382B2 JP 4866382 B2 JP4866382 B2 JP 4866382B2 JP 2008077292 A JP2008077292 A JP 2008077292A JP 2008077292 A JP2008077292 A JP 2008077292A JP 4866382 B2 JP4866382 B2 JP 4866382B2
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separation membrane
metal glass
hydrogen
hydrogen separation
composite metal
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洋一郎 新保
元紀 西田
浩一 山本
峰央 石田
治 梶田
明久 井上
久道 木村
真一 山浦
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Tohoku University NUC
Fukuda Metal Foil and Powder Co Ltd
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Fukuda Metal Foil and Powder Co Ltd
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Description

本発明は、水素製造用の水素分離膜に関し、より詳細には、非Pd系金属を主成分とした水素分離膜(複合金属ガラス水素分離膜)およびその製造方法に関するものである。   The present invention relates to a hydrogen separation membrane for hydrogen production, and more particularly to a hydrogen separation membrane (composite metal glass hydrogen separation membrane) mainly composed of a non-Pd metal and a method for producing the same.

近年、地球温暖化対策の一つとして、水素精製装置やこれを利用した燃料電池の実用化並びにその普及が望まれている。このような水素精製装置は、第1室と第2室とを有しており、この第1室はメンブレンを介して第2室と隔離されている。そして、第1室に水素を含むガスを流すと、メンブレンは水素を実質的に透過する役割を果たし、水素が富化されたガスが第2室に集まり、不純物(COやCO等)を含むガスが第1室に残留するようになっている。このように、水素精製装置のメンブレンには、いわゆる水素透過性が要求される。
従来、このようなメンブレンとして、水素吸蔵性を有するパラジウム合金(Pd−Ag等)箔が使用されていた。パラジウム合金箔は優れた水素透過性を有しているが、パラジウムは比較的高価であるため、パラジウム合金箔よりも安価な材料から成る代替製品が求められている。そして、パラジウム合金の代替材料としてバナジウム合金やニオブ合金が検討されてきた(例えば特許文献1〜4参照)。
In recent years, as one of the countermeasures against global warming, the practical application and popularization of a hydrogen purifier and a fuel cell using the same have been desired. Such a hydrogen purification apparatus has a first chamber and a second chamber, and the first chamber is isolated from the second chamber via a membrane. When a gas containing hydrogen is allowed to flow into the first chamber, the membrane plays a role of substantially permeating hydrogen, and the gas enriched with hydrogen collects in the second chamber, and impurities (CO, CO 2, etc.) are collected. The contained gas remains in the first chamber. Thus, what is called hydrogen permeability is required for the membrane of the hydrogen purifier.
Conventionally, as such a membrane, a palladium alloy (Pd-Ag or the like) foil having hydrogen storage properties has been used. Palladium alloy foils have excellent hydrogen permeability, but palladium is relatively expensive, so there is a need for alternative products made of materials that are less expensive than palladium alloy foils. And the vanadium alloy and the niobium alloy have been examined as an alternative material of a palladium alloy (for example, refer patent documents 1-4).

特開平1−262,924号公報JP-A-1-262,924 特開平4−29,728号公報JP-A-4-29,728 特開平11−276,866号公報Japanese Patent Laid-Open No. 11-276,866 特開2000−159,503号公報JP 2000-159,503 A

しかしながら、上記特許文献1〜4に記載される合金はいずれも圧延性に乏しく、圧延成型によって合金箔を作製しようとすると、特殊な圧延条件や焼鈍工程の繰り返しが必要となり生産コストが上がってしまう。また、箔を作製する際に焼鈍を繰り返すと、箔中の元素分布が偏析する場合がある。また、このような作業は合金の酸化を防止するために不活性ガス雰囲気中で行われなければならないが、圧延工程や焼鈍工程を不活性ガス雰囲気中で行おうとすると装置が大型化する。また圧延成型されたバナジウム合金箔やニオブ合金箔は靭性が低く、加工性や耐久性に乏しい。
尚、ニオブ合金箔については、これまでに、耐水素脆化性を高めるためにTa、Co、Mo、Ni等を添加することが知られているが(上記特許文献4参照)、例えばNiの場合、冷間圧延法によりニオブ合金箔を製造する際、ニオブに対するNiの割合が10〜20重量%を越えると水素透過性が著しく低下するという問題点があった。
However, all of the alloys described in Patent Documents 1 to 4 are poor in rollability, and when it is attempted to produce an alloy foil by rolling, special rolling conditions and repeated annealing steps are required, resulting in an increase in production cost. . Moreover, when annealing is repeated when producing a foil, the element distribution in the foil may be segregated. Further, such work must be performed in an inert gas atmosphere in order to prevent oxidation of the alloy. However, if the rolling process or annealing process is performed in an inert gas atmosphere, the apparatus becomes large. Moreover, the roll-formed vanadium alloy foil and niobium alloy foil have low toughness and poor workability and durability.
As for niobium alloy foils, it has been known so far to add Ta, Co, Mo, Ni, etc. in order to enhance hydrogen embrittlement resistance (see Patent Document 4 above). In this case, when manufacturing a niobium alloy foil by the cold rolling method, there is a problem that hydrogen permeability is remarkably lowered when the ratio of Ni to niobium exceeds 10 to 20% by weight.

本発明は、高水素透過性能と耐水素脆性を両立し、現在のPd合金膜と比較して格段に材料コスト、製造コストの低い非Pd系水素分離膜(複合金属ガラス水素分離膜)及びその製造方法を提供することを課題とする。
上記課題は、耐水素脆性に優れた金属ガラス母相に、高水素透過性能を有するNb、Ta、V、Ti粒子が分散した複合組織を有し、非Pdを主成分とする水素分離膜によって解決することが可能である。
The present invention is a non-Pd-based hydrogen separation membrane (composite metal glass hydrogen separation membrane) that has both high hydrogen permeation performance and hydrogen embrittlement resistance, and material costs and manufacturing costs that are significantly lower than those of current Pd alloy membranes. It is an object to provide a manufacturing method.
The above-described problem is achieved by a hydrogen separation membrane having a composite structure in which Nb, Ta, V, and Ti particles having high hydrogen permeation performance are dispersed in a metallic glass matrix having excellent hydrogen embrittlement resistance and containing Pd as a main component. It is possible to solve.

即ち、上記課題を解決可能な本発明の複合金属ガラス水素分離膜は、アモルファス構造を有する金属ガラス母相に、Nb、Ta、V及びTi粒子からなるグループより選ばれた添加元素の少なくとも1種が分散した構造を有することを特徴とする。   That is, the composite metal glass hydrogen separation membrane of the present invention capable of solving the above-described problems is provided with at least one additive element selected from the group consisting of Nb, Ta, V, and Ti particles in the metal glass matrix having an amorphous structure. Has a dispersed structure.

又、本発明は、前記の特徴を有する複合金属ガラス水素分離膜において、前記金属ガラス母相が、Ni系合金、Co系合金又はCu系合金のいずれかであり、前記添加元素の添加量が5〜80重量%であることを特徴とするものでもある。   Further, the present invention provides the composite metal glass hydrogen separation membrane having the above-described characteristics, wherein the metal glass matrix is any one of a Ni-based alloy, a Co-based alloy, and a Cu-based alloy, and the amount of the additive element added is It is also characterized by being 5 to 80% by weight.

更に、本発明は、優れた水素透過性能と耐水素脆性を有した複合金属ガラス水素分離膜を製造するための方法であって、当該方法は、母相となる金属ガラス粉末と、Nb、Ta、V及びTi粒子からなるグループより選ばれた添加元素の少なくとも1種とを混合し、前記金属ガラス粉末の過冷却液体領域近傍の温度で加熱、圧縮を行い、複合金属ガラスバルク材を作製する工程、及び、前記複合金属ガラスバルク材を更に過冷却液体領域近傍の温度で薄膜化する工程を含むことを特徴とする。   Furthermore, the present invention is a method for producing a composite metal glass hydrogen separation membrane having excellent hydrogen permeation performance and hydrogen embrittlement resistance, the method comprising a metal glass powder as a parent phase, Nb, Ta A composite metal glass bulk material is prepared by mixing at least one additive element selected from the group consisting of V, Ti particles and heating and compressing at a temperature in the vicinity of the supercooled liquid region of the metal glass powder. And a step of thinning the composite metal glass bulk material at a temperature in the vicinity of the supercooled liquid region.

耐水素脆性に優れた金属ガラス母相中に水素透過性能に優れたNb、Ta、V、Ti粒子が分散した複合組織から成る本発明の水素分離膜は、高い水素透過性能と透過中、透過後も破損しない優れた耐水素脆性を併せ持ち、水素分離膜として有用である。また、高価なPdを主成分としないため、材料コストが低いという利点を有する。さらに、本発明の製法を用いた場合には、大量生産に実績のある粉末冶金法を用いて上記の複合金属ガラス水素分離膜が製造でき、金属ガラス特有の過冷却液体領域での薄膜化が可能なため、製造加工コストを低く抑えることも可能である。   The hydrogen separation membrane of the present invention comprising a composite structure in which Nb, Ta, V, and Ti particles excellent in hydrogen permeation performance are dispersed in a metallic glass matrix having excellent hydrogen embrittlement resistance has high hydrogen permeation performance and permeation during permeation. It also has excellent hydrogen embrittlement resistance that does not break later, and is useful as a hydrogen separation membrane. Moreover, since expensive Pd is not a main component, there is an advantage that the material cost is low. Furthermore, when the production method of the present invention is used, the above-mentioned composite metal glass hydrogen separation membrane can be produced using a powder metallurgy method that has a proven record in mass production, and the thinning in the supercooled liquid region peculiar to metal glass Since this is possible, it is possible to keep the manufacturing and processing costs low.

本発明の複合金属ガラス水素分離膜にあっては、アモルファス構造を有する金属ガラス母相に、Nb、Ta、V及びTi粒子からなるグループより選ばれた添加元素の少なくとも1種が分散されており、上記添加元素の2種以上が分散されていても良い。この際、上記添加金属の添加量は5〜80重量%であること必要であり、例えばNbの場合、好ましい添加量は10〜70重量%であり、Nbの添加量が上記下限値よりも小さくなると、透過性能が低く、水素分離膜として十分な水素透過流量が得られなり、逆に、Nbの添加量が上記上限値を超えると、透過性能は高くなるが、水素雰囲気下では水素脆化しやすく、透過中に破損してしまう等の問題が生じる。同時にバインダー的な役割を担う金属ガラス相が少ないため、温度、圧力等の条件を適正化しても、十分な相対密度が得ることが困難になる。
尚、本発明では、上記添加金属が添加される金属ガラス母相としては、Ni系合金、Co系合金又はCu系合金が好適であり、具体的な合金組成としては、Ni−Nb−Ti−Zr系、Ni−Nb−Zr系、Co−Zr−Nb−B系、Co−B−Si−Nb系、Cu−Zr−Ti系、Cu−Hf−Ti系等が挙げられる。
In the composite metal glass hydrogen separation membrane of the present invention, at least one additive element selected from the group consisting of Nb, Ta, V, and Ti particles is dispersed in a metal glass matrix having an amorphous structure. Two or more of the above additive elements may be dispersed. At this time, the addition amount of the additive metal needs to be 5 to 80% by weight. For example, in the case of Nb, the preferable addition amount is 10 to 70% by weight, and the addition amount of Nb is smaller than the lower limit value. Then, the permeation performance is low, and a sufficient hydrogen permeation flow rate as a hydrogen separation membrane can be obtained. Conversely, if the amount of Nb added exceeds the above upper limit value, the permeation performance increases, but hydrogen embrittlement occurs in a hydrogen atmosphere. It is easy to cause problems such as breakage during transmission. At the same time, since there are few metallic glass phases that play a role as a binder, it is difficult to obtain a sufficient relative density even if conditions such as temperature and pressure are optimized.
In the present invention, a Ni-based alloy, a Co-based alloy, or a Cu-based alloy is suitable as the metallic glass parent phase to which the additive metal is added, and the specific alloy composition is Ni-Nb-Ti-. Zr-based, Ni-Nb-Zr-based, Co-Zr-Nb-B-based, Co-B-Si-Nb-based, Cu-Zr-Ti-based, Cu-Hf-Ti-based, and the like can be given.

上記の複合金属ガラス水素分離膜を製造するための本発明の製法では、最初の工程において、Nb、Ta、V及びTi粒子からなるグループより選ばれた添加元素の少なくとも1種と、母相となる金属ガラス粉末を混合した後、得られた混合物を加熱し圧縮を行って複合金属ガラスバルク材を作製するが、この際の温度範囲は、使用する金属ガラスの過冷却液体領域近傍であり、望ましくはガラス遷移温度より0〜50℃低温である。このときの温度が、ガラス遷移温度に対して低すぎると、十分な相対密度を有する試料が作製できなくなり、逆に、温度が高すぎると、金属ガラス相の結晶化を招き、機械的特性および透過性能の低下を招く可能性が高くなる。尚、加熱を行った後の圧縮時の圧力としては、十分な相対密度が得られる圧力であれば良く、特に限定されないが、望ましくは600MPa以上である。   In the production method of the present invention for producing the above composite metal glass hydrogen separation membrane, in the first step, at least one additive element selected from the group consisting of Nb, Ta, V, and Ti particles, and a parent phase, After mixing the resulting metallic glass powder, the resulting mixture is heated and compressed to produce a composite metallic glass bulk material, but the temperature range at this time is near the supercooled liquid region of the metallic glass used, Desirably, it is 0 to 50 ° C. lower than the glass transition temperature. If the temperature at this time is too low with respect to the glass transition temperature, a sample having a sufficient relative density cannot be produced. Conversely, if the temperature is too high, crystallization of the metallic glass phase is caused, and mechanical properties and There is a high possibility that the transmission performance will be lowered. The pressure at the time of compression after heating is not particularly limited as long as it is a pressure at which a sufficient relative density is obtained, and is preferably 600 MPa or more.

本発明において、上記の工程を行う際の方法としては、図1に示されるような、ホットプレス法または放電プラズマ焼結法が好適である。
図1の左側に示されたホットプレス法にあっては、上述の混合物(粉末)を超硬合金等で作られたダイに詰め、チャンバー内部でヒーターにより昇温し、上下のパンチを介して圧力をかけて、圧粉成形した試料を得る。一方、図1の右側に示された放電プラズマ焼結法にあっては、上述の混合物を超硬合金等で作られたダイに詰め、上下のパンチを介してパルス電流を与えて、放電プラズマにより発生した熱およびパンチによる加圧により、圧粉成形を行う。この放電プラズマ焼結法は、ホットプレス法と比較して、昇温時間が短く、より低温で相対密度の高い試料が得られる可能性があるため、金属ガラス相の結晶化を避ける上で都合がよいと考えられる。
In the present invention, a hot press method or a discharge plasma sintering method as shown in FIG. 1 is suitable as a method for performing the above steps.
In the hot press method shown on the left side of FIG. 1, the above mixture (powder) is packed in a die made of cemented carbide and the like, heated by a heater inside the chamber, and passed through upper and lower punches. A compacted sample is obtained by applying pressure. On the other hand, in the discharge plasma sintering method shown on the right side of FIG. 1, the above-mentioned mixture is packed in a die made of cemented carbide and the like, and a pulse current is applied through upper and lower punches to generate discharge plasma. Powder compacting is performed by the heat generated by the pressure and the pressure applied by the punch. This discharge plasma sintering method has a short heating time compared to the hot pressing method, and a sample having a higher relative density can be obtained at a lower temperature. Therefore, it is convenient for avoiding crystallization of the metallic glass phase. Is considered good.

本発明では、優れた水素透過性能と耐水素脆性を有した複合金属ガラス水素分離膜を製造するためのポイントとして、以下の点が挙げられる。
使用する金属ガラスのガラス遷移温度に対し、作製温度が低すぎると、金属ガラスの粘性流動が十分に得られず、密に詰まった試料を得ることができず、結果としてピンホールのない良好な分離膜を得ることができない。一方、作製温度が高すぎると、先述のように金属ガラス相の結晶化を招くため、結晶化の生じない範囲とすることが必要となる。よって使用する金属ガラスにより、最適な温度範囲が存在すると考えられる。また、結晶化を防ぐという観点から、押し固める際の時間も重要で、最高温度で長時間保持しないことが望まれる。望ましくは最高温度での保持時間が5分以下となるように作製条件を設定する必要がある。圧力に関しては、低すぎると十分な相対密度が得られないため、高圧にする方が望ましいが、装置が大規模になってしまう問題も生じるため、作製温度との兼ね合いも考慮して特には限定しない。
In the present invention, the following points are mentioned as points for producing a composite metal glass hydrogen separation membrane having excellent hydrogen permeation performance and hydrogen embrittlement resistance.
If the production temperature is too low for the glass transition temperature of the metal glass to be used, the viscous flow of the metal glass cannot be obtained sufficiently, a densely packed sample cannot be obtained, and as a result there is no pinhole. A separation membrane cannot be obtained. On the other hand, if the production temperature is too high, crystallization of the metallic glass phase is caused as described above, and thus it is necessary to set the range in which crystallization does not occur. Therefore, it is considered that there is an optimum temperature range depending on the metal glass used. Further, from the viewpoint of preventing crystallization, the time for compaction is also important, and it is desired not to hold at the maximum temperature for a long time. Desirably, it is necessary to set the production conditions so that the holding time at the maximum temperature is 5 minutes or less. Regarding the pressure, if the pressure is too low, a sufficient relative density cannot be obtained, so it is desirable to use a high pressure. However, since there is a problem that the apparatus becomes large-scale, it is particularly limited in consideration of the balance with the production temperature. do not do.

次に、本発明の製法においては、上述のホットプレス法又は放電プラズマ焼結法により得られた複合金属ガラスバルク材を、水素分離膜として適した膜厚を有した製品とするために、過冷却液体領域近傍の温度で薄膜化するが、この際、圧延によって薄膜化しても良く、あるいは、複合金属ガラスバルク材を切り出して厚さ0.2〜0.3mm程度の膜体とし、これを機械研磨後、表面にPdの表面処理を施しても良い。
このようにして得られた本発明の複合金属ガラス水素分離膜は、高い相対密度を有しており、水素分離膜として十分に使用可能な緻密性を有している。
以下、実施例により本発明をより具体的に説明するが、本発明はこれら実施例に限定されるものではない。
Next, in the production method of the present invention, in order to make the composite metal glass bulk material obtained by the above hot press method or the discharge plasma sintering method into a product having a film thickness suitable as a hydrogen separation membrane, The film is thinned at a temperature in the vicinity of the cooling liquid region. At this time, the film may be thinned by rolling, or a composite metal glass bulk material is cut out to form a film body having a thickness of about 0.2 to 0.3 mm. After mechanical polishing, the surface may be subjected to Pd surface treatment.
The composite metal glass hydrogen separation membrane of the present invention thus obtained has a high relative density and has a denseness that can be sufficiently used as a hydrogen separation membrane.
EXAMPLES Hereinafter, although an Example demonstrates this invention more concretely, this invention is not limited to these Examples.

(実施例1)
ガスアトマイズ法で作製した平均粒径20μmのCu60Zr30Ti10金属ガラス粉末と市販のNb粉末を表1のような割合となるようそれぞれ秤量した後、乳鉢を用いて十分混合した。混合した粉末を、超硬合金製のダイに詰め、ホットプレス(HP)装置の炉内にセットした。真空引き後、Arを導入して不活性雰囲気とした状態で昇温した。Cu60Zr30Ti10金属ガラスの過冷却液体領域近傍である440℃において、圧力470,780MPaで粉末を押し固め、外径20mm、高さ5mmのコイン状の試料を得た。得られた試料は、密度測定、組織観察を行った。
その結果、圧力470MPaの条件では、Nb添加量の多いNo.5について十分な相対密度が得られず、組織観察でも空隙が数多く観察された。一方、780MPaでは、No.1〜5全ての試料で97%以上の高い相対密度が得られ、組織観察でも密な組織を有していることを確認し、水素分離膜として十分に使用可能な緻密性を有していることが確認された。
Example 1
Cu 60 Zr 30 Ti 10 metal glass powder with an average particle diameter of 20 μm prepared by gas atomization method and commercially available Nb powder were weighed so as to have the ratios shown in Table 1, and then sufficiently mixed using a mortar. The mixed powder was packed in a die made of cemented carbide and set in a furnace of a hot press (HP) apparatus. After evacuation, the temperature was raised in an inert atmosphere by introducing Ar. At 440 ° C. in the vicinity of the supercooled liquid region of Cu 60 Zr 30 Ti 10 metallic glass, the powder was pressed and compacted under pressures of 470 and 780 MPa to obtain a coin-shaped sample having an outer diameter of 20 mm and a height of 5 mm. The obtained sample was subjected to density measurement and structure observation.
As a result, under the condition of a pressure of 470 MPa, No. 2 with a large Nb addition amount was obtained. A sufficient relative density was not obtained with respect to 5, and many voids were observed in the structure observation. On the other hand, at 780 MPa, No. A high relative density of 97% or more was obtained in all the samples 1 to 5, and it was confirmed that the structure had a dense structure even by observing the structure, and it was dense enough to be used as a hydrogen separation membrane. It was confirmed.

(実施例2)
ガスアトマイズ法で作製した平均粒径20μmのCu60Zr30Ti10金属ガラス粉末と市販のNb粉末を表1のような割合となるようそれぞれ秤量した後、乳鉢を用いて十分混合した。混合した粉末を、超硬合金製のダイに詰め、放電プラズマ焼結(SPS)装置内にセットした。Cu60Zr30Ti10金属ガラスの過冷却液体領域近傍である400、420℃において、圧力600MPaの条件で粉末を焼結し、外径20mm、高さ5mmのコイン状の試料を得た。得られた試料は、密度測定、組織観察を行った。さらにこの試料から、厚さ0.2〜0.3mmの薄い円盤状試料を切り出し、機械研磨後、表面にPdの表面処理を施した後、実際に水素ガスを透過させるガス透過法により、水素透過性能を評価した。
図2は、SPS法で作製したCu−Zr−Ti+Nbの水素透過性能を示すグラフであり、図3は、HP法及びSPS法で作製したCu−Zr−Ti+Nbの相対密度を示すグラフである。
その結果、温度400℃では、Nb添加量の高い試料でやや相対密度が低い傾向が認められたが、420℃では97%以上の高い相対密度が得られた。またその透過性能を評価したところ、Nb添加量が40wt%以上のNo.4、5については、水素脆化が起因と考えられる膜の破損により、透過性能評価に至らなかったが、30wt%までの試料については評価が可能であった。その透過係数は、Nb添加量の増加と共に向上する傾向があり、400℃において最大で純Pd並の1.1×10−8(mol・m−1sec−1Pa−1/2)の透過係数が得られた。
(Example 2)
Cu 60 Zr 30 Ti 10 metal glass powder with an average particle diameter of 20 μm prepared by gas atomization method and commercially available Nb powder were weighed so as to have the ratios shown in Table 1, and then sufficiently mixed using a mortar. The mixed powder was packed in a die made of cemented carbide and set in a discharge plasma sintering (SPS) apparatus. The powder was sintered under the conditions of a pressure of 600 MPa at 400 and 420 ° C. in the vicinity of the supercooled liquid region of Cu 60 Zr 30 Ti 10 metallic glass to obtain a coin-shaped sample having an outer diameter of 20 mm and a height of 5 mm. The obtained sample was subjected to density measurement and structure observation. Further, from this sample, a thin disk-shaped sample having a thickness of 0.2 to 0.3 mm was cut out, subjected to mechanical polishing, surface-treated with Pd on the surface, and then subjected to hydrogen permeation by actually permeating hydrogen gas. The permeation performance was evaluated.
FIG. 2 is a graph showing the hydrogen permeation performance of Cu—Zr—Ti + Nb produced by the SPS method, and FIG. 3 is a graph showing the relative density of Cu—Zr—Ti + Nb produced by the HP method and the SPS method.
As a result, at a temperature of 400 ° C., the sample having a high Nb addition amount tended to have a relatively low relative density, but at 420 ° C., a high relative density of 97% or more was obtained. Moreover, when the permeation performance was evaluated, it was found that the Nb addition amount was 40 wt% or more. As for 4 and 5, the permeation performance was not evaluated due to the breakage of the membrane considered to be caused by hydrogen embrittlement, but the samples up to 30 wt% could be evaluated. The permeability coefficient tends to improve as the amount of Nb added increases, and the transmission is 1.1 × 10 −8 (mol · m −1 sec −1 Pa −1/2 ) at 400 ° C., which is the same as that of pure Pd. The coefficient was obtained.

(実施例3)
ガスアトマイズ法で作製した平均粒径30μmのNi53Nb20Ti10ZrCoCu金属ガラス粉末と市販のV、Nb、Ta粉末を表2のような割合となるようそれぞれ秤量した後、乳鉢を用いて十分混合した。混合した粉末を、超硬合金製のダイに詰め、ホットプレス(HP)装置の炉内にセットした。真空引き後、Arを導入して不活性雰囲気とした状態で昇温した。Ni53Nb20Ti10ZrCoCu金属ガラスの過冷却液体領域近傍である540、560℃において、圧力780MPaで粉末を押し固め、外径20mm、高さ5mmのコイン状の試料を得た。得られた試料は、密度測定、組織観察を行った。さらにこの試料から、厚さ0.2〜0.3mmの薄い円盤状試料を切り出し、機械研磨後、表面にPdの表面処理を施した後、実際に水素ガスを透過させるガス透過法により、水素透過性能を評価した。
その結果、温度540、560℃共に、概ね97%以上の高い相対密度が得られた。またその透過性能を500℃において評価したところ、それぞれV、Nb、Ta添加量の増加と共に透過性能の向上が認められ、最も高い透過性能を示したNo.14の試料では3.0×10−8(mol・m−1sec−1Pa−1/2)の透過係数が得られた。
(Example 3)
Ni 53 Nb 20 Ti 10 Zr 8 Co 6 Cu 3 metal glass powder having an average particle diameter of 30 μm prepared by gas atomization method and commercially available V, Nb, Ta powder were weighed to have the ratios shown in Table 2, and then mortar Was mixed well. The mixed powder was packed in a die made of cemented carbide and set in a furnace of a hot press (HP) apparatus. After evacuation, the temperature was raised in an inert atmosphere by introducing Ar. At 540 and 560 ° C. near the supercooled liquid region of Ni 53 Nb 20 Ti 10 Zr 8 Co 6 Cu 3 metallic glass, the powder was pressed and compacted at a pressure of 780 MPa to obtain a coin-shaped sample having an outer diameter of 20 mm and a height of 5 mm. It was. The obtained sample was subjected to density measurement and structure observation. Further, from this sample, a thin disk-shaped sample having a thickness of 0.2 to 0.3 mm was cut out, subjected to mechanical polishing, surface-treated with Pd on the surface, and then subjected to hydrogen permeation by actually permeating hydrogen gas. The permeation performance was evaluated.
As a result, a high relative density of approximately 97% or more was obtained at both temperatures of 540 and 560 ° C. Further, when the permeation performance was evaluated at 500 ° C., the permeation performance was improved with the increase of V, Nb, and Ta, respectively. For the 14 samples, a transmission coefficient of 3.0 × 10 −8 (mol · m −1 sec −1 Pa −1/2 ) was obtained.

本発明の複合金属ガラス水素分離膜は、高水素透過性能と優れた耐水素脆性を有しており、現在のPd合金膜と比較して格段に材料コスト、製造コストが低く、水素分離膜として有用である。   The composite metal glass hydrogen separation membrane of the present invention has high hydrogen permeation performance and excellent hydrogen embrittlement resistance, and material costs and manufacturing costs are significantly lower than current Pd alloy membranes. Useful.

本発明の複合金属ガラス水素分離膜を製造する際に使用されるホットプレス法と放電プラズマ焼結法の模式図である。It is a schematic diagram of the hot press method and discharge plasma sintering method used when manufacturing the composite metal glass hydrogen separation membrane of this invention. SPS法で作製したCu−Zr−Ti+Nbの水素透過性能を示すグラフである。It is a graph which shows the hydrogen permeation performance of Cu-Zr-Ti + Nb produced by SPS method. HP法及びSPS法で作製したCu−Zr−Ti+Nbの相対密度を示すグラフである。It is a graph which shows the relative density of Cu-Zr-Ti + Nb produced by HP method and SPS method. HP法で作製したNi−Nb−Ti−Zr−Co−Cu+V、Nb、Taの500℃における水素透過性能を示すグラフである。It is a graph which shows the hydrogen permeation performance in 500 degreeC of Ni-Nb-Ti-Zr-Co-Cu + V, Nb, and Ta produced with HP method. HP法で作製したNi−Nb−Ti−Zr−Co−Cu+V、Nb、Taの相対密度を示すグラフである。It is a graph which shows the relative density of Ni-Nb-Ti-Zr-Co-Cu + V, Nb, and Ta produced by HP method.

Claims (3)

アモルファス構造を有する金属ガラス母相に、Nb、Ta、V及びTi粒子からなるグループより選ばれた添加元素の少なくとも1種が分散した構造を有することを特徴とする複合金属ガラス水素分離膜。 A composite metallic glass hydrogen separation membrane characterized by having a structure in which at least one additive element selected from the group consisting of Nb, Ta, V and Ti particles is dispersed in a metallic glass matrix having an amorphous structure. 前記金属ガラス母相が、Ni系合金、Co系合金又はCu系合金のいずれかであり、前記添加元素の添加量が5〜80重量%であることを特徴とする請求項1に記載の複合金属ガラス水素分離膜。 2. The composite according to claim 1, wherein the metallic glass matrix phase is any one of a Ni-based alloy, a Co-based alloy, and a Cu-based alloy, and the amount of the additive element added is 5 to 80 wt%. Metallic glass hydrogen separation membrane. 優れた水素透過性能と耐水素脆性を有した複合金属ガラス水素分離膜を製造するための方法であって、当該方法が、母相となる金属ガラス粉末と、Nb、Ta、V及びTi粒子からなるグループより選ばれた添加元素の少なくとも1種とを混合し、前記金属ガラス粉末の過冷却液体領域近傍の温度で加熱、圧縮を行い、複合金属ガラスバルク材を作製する工程、及び、前記複合金属ガラスバルク材を更に過冷却液体領域近傍の温度で薄膜化する工程を含むことを特徴とする複合金属ガラス水素分離膜の製造方法。 A method for producing a composite metal glass hydrogen separation membrane having excellent hydrogen permeation performance and hydrogen embrittlement resistance, the method comprising a metal glass powder as a parent phase and Nb, Ta, V and Ti particles Mixing at least one additive element selected from the group consisting of the above, heating and compressing at a temperature in the vicinity of the supercooled liquid region of the metal glass powder to produce a composite metal glass bulk material, and the composite A method for producing a composite metal glass hydrogen separation membrane, comprising a step of further thinning a metal glass bulk material at a temperature near a supercooled liquid region.
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